JP5109689B2 - Head inspection cleaning device, head inspection cleaning method - Google Patents

Description

  The present invention relates to a head inspection cleaning apparatus and a head inspection cleaning method. Specifically, the present invention relates to a head inspection cleaning apparatus and a head inspection cleaning method capable of simultaneously performing head inspection and cleaning.

  In recent years, with the widespread use of personal computers and mobile phones, high-definition and thin display devices are required. The display device is, for example, an LCD (Liquid Crystal Display Panel), a PDP (Plasma Display Panel), or an organic EL (Electro Luminescent Display). A color filter is used as a constituent member of these display devices.

As a method for forming a colored layer in a color filter, there are various methods such as an inkjet method, a dyeing method, a pigment dispersion method, an electrodeposition method, and a printing method.
In the ink jet method, a colored layer is formed by applying ink to an ink receiving layer patterned on a substrate. Alternatively, the colored layer is formed by applying ink to the opening provided by the light shielding portion on the substrate.

  The color filter manufacturing apparatus supplies ink to an inkjet head and discharges ink to a substrate from a plurality of nozzle holes to form a colored layer. When the processing accuracy of the nozzle holes is poor or there are foreign objects around the nozzle holes, the ink discharge becomes non-uniform and the colored layer is defective. For this reason, it is necessary to inspect the inkjet head before the operation of the color filter manufacturing apparatus. Conventionally, an ink jet head is inspected by supplying ink after cleaning.

  In addition, in order to prevent the ink from being bent, a color filter manufacturing apparatus in which the discharge port of the orifice portion of the inkjet head is convex has been proposed (see, for example, [Patent Document 1]).

JP 2002-214421 A

  The conventional cleaning and inspection of the ink jet head are performed before or after the color filter manufacturing apparatus is mounted. However, the cleaning and the inspection are performed separately, and ink is used for the inspection. That is, after the inkjet head is cleaned, ink is supplied and ink flight inspection is performed. However, there is a problem that the cleaning and the inspection of the inkjet head are separate processes, and the working efficiency is poor. In addition, there is a problem that ink is required at the time of inspection of the inkjet head, and the ink consumption increases.

In addition, when the inkjet head is attached to the color filter manufacturing apparatus, cleaning and ink flight inspection are performed, and when ink ejection failure is detected, the inkjet head is removed from the color filter manufacturing apparatus, and the inkjet head to be inspected is attached again. There is a problem that it is necessary to perform cleaning, ink supply, and ink flight inspection, which increases the work load.
In addition, there is a problem that processing the orifice part of the ink jet head to prevent the ink from being bent is costly.

  SUMMARY An advantage of some aspects of the invention is that it provides a head inspection cleaning apparatus and a head inspection cleaning method capable of efficiently performing head cleaning and inspection.

In order to achieve the above-described object, the first invention provides a head mounting portion to which a head having a plurality of nozzle holes is mounted, a liquid agent supplied to the head, and the liquid agent is linearly supplied from the plurality of nozzle holes. A liquid agent supply unit to be discharged; and a head inspection unit that inspects a flying state of the liquid agent discharged from the head by measuring an interval between the liquid agents discharged linearly from each of the plurality of nozzle holes. The head inspection and cleaning apparatus performs the head inspection and the head cleaning at the same time.

  The head is a head such as an inkjet head. The head has a plurality of nozzle holes. The head mounting unit is a device for mounting a head to be inspected and cleaned. The head mounting part is detachable from the head. A solvent supply part is an apparatus which supplies a liquid agent to a head. The head inspection cleaning device supplies liquid to the head from a solvent supply unit, discharges the liquid in a linear (shower shape) from a plurality of nozzle holes, and simultaneously performs head inspection and cleaning.

  The head is inspected by measuring the flying state (trajectory) of the liquid agent discharged from the plurality of nozzle holes. For example, when the processing accuracy of the nozzle holes is uneven or there are foreign objects around the nozzle holes, the flying state of the discharged liquid agent becomes non-uniform.

  In the first invention, the head inspection and cleaning apparatus performs head inspection and cleaning in advance, and a non-defective head is mounted on the color filter manufacturing apparatus during operation, so there is no need to perform head replacement work in the color filter manufacturing apparatus. . In addition, since the inspection process and the cleaning process are performed simultaneously, the number of processes can be reduced.

  Further, the head may be inspected by measuring the discharge interval of the liquid agent. Thus, by inspecting the head by measuring the discharge interval of the liquid agent, it is possible to automate the head inspection and increase the efficiency.

  Alternatively, the head may be cleaned by applying pressure from the liquid supply unit and discharging the liquid from the nozzle holes in a linear shape. In this manner, by applying pressure to the nozzle holes and discharging the liquid agent, the nozzle holes can be cleaned simultaneously with the inspection of the nozzle holes.

  Further, the head inspection cleaning device is provided with a light projecting unit that irradiates light to the liquid agent discharged from the nozzle hole, and a projection image acquisition and analysis unit that acquires and analyzes the projection image of the liquid agent discharged from the nozzle hole. Anyway.

The light projecting unit is a light source. The light projecting unit is a light source having directionality such as fluorescence, halogen, light bulb, LED light, and the like.
The projection image acquisition / analysis unit includes an imaging device such as a CCD camera that captures a projection image of the discharged liquid agent and an analysis device that analyzes the projection image.
Thereby, the projected image of the discharged liquid agent is image-analyzed and inspected, and the visibility can be improved and a head defect can be determined automatically and efficiently.

Further, the head inspection cleaning apparatus may rotate the head by a predetermined angle to relatively change the irradiation angle of the light irradiated from the light projecting unit.
Thus, by rotating the head and measuring the flying state of the discharged liquid agent from different directions, it is possible to improve the accuracy of the head quality determination.

  Further, as the liquid agent supplied to the head, ink or an ink solvent can be used. Since the solvent is a main component contained in the ink and the ink ejection characteristics and the solvent ejection characteristics are very similar, the use of a solvent in place of the ink does not affect the inspection accuracy.

According to a second aspect of the present invention, there is provided a head connecting step for connecting a head having a plurality of nozzle holes to a liquid agent supply unit, a liquid agent is supplied from the liquid agent supply unit to the head, and the liquid agent is linearly supplied from the plurality of nozzle holes. A liquid supply step for discharging, and a head inspection step for inspecting a flight state of the liquid liquid discharged from the head by measuring an interval between liquid lines discharged linearly from each of the plurality of nozzle holes. The head inspection cleaning method is characterized in that the head inspection and the head cleaning are simultaneously performed.

The second invention relates to a head inspection cleaning method for simultaneously performing head inspection and head cleaning.
3rd invention is invention regarding the manufacturing method of a color filter provided with the head test | inspection cleaning method of 2nd invention. In the color filter manufacturing method of the third invention, the color filter is manufactured using the head that has been inspected and cleaned by the head inspection and cleaning method of the second invention.

  ADVANTAGE OF THE INVENTION According to this invention, the head test | inspection cleaning apparatus and head test | inspection cleaning method which make it possible to wash | clean and test | inspect a head efficiently can be provided.

  Hereinafter, preferred embodiments of a color filter manufacturing apparatus and a manufacturing method according to the present invention will be described in detail with reference to the accompanying drawings. In the following description and the accompanying drawings, the same reference numerals are given to components having substantially the same functional configuration, and redundant description will be omitted.

(1. Configuration of the head inspection cleaning device 1)
First, the configuration of the head inspection cleaning apparatus 1 will be described with reference to FIG.
FIG. 1 is a configuration diagram of the head inspection cleaning apparatus 1.

The head inspection cleaning apparatus 1 includes a control unit 2, a head mounting unit 21 to which the inkjet head 3 is mounted, a moving rotation unit 4, a solvent supply unit 5, and a projection inspection unit 6.
The projection inspection unit 6 includes a light projection unit 7 that emits light 8, a projection image acquisition unit 9, and a projection image analysis unit 10.
The head inspection cleaning apparatus 1 is an apparatus that inspects and cleans the inkjet head 3.

The ink jet head 3 is an apparatus that is mounted on a color filter manufacturing apparatus (not shown) during color filter manufacturing and discharges ink including a colorant onto a substrate. The inkjet head 3 is connected to the liquid supply unit 5 via the head mounting unit 21.
The head mounting portion 21 is a device that attaches and fixes the inkjet head 3.

  The moving rotation unit 4 is a device that moves, rotates, and positions the inkjet head 3. As the moving mechanism, a general-purpose moving actuator or guide mechanism can be used. For example, a step motor, a servo motor, or a linear motor can be used as the moving actuator, and a linear moving mechanism or an air slide can be used as the guide mechanism. As the rotation mechanism, for example, a step motor, a servo motor or the like can be used. The moving and rotating unit 4 can move and rotate the inkjet head 3 by moving and rotating the head mounting unit 21.

  The solvent supply unit 5 supplies an ink solvent to the inkjet head 3 in accordance with a control signal sent from the control unit 2. The solvent supply unit 5 supplies a solvent to the inkjet head 3 by applying a predetermined pressure, and discharges the solvent 20 from the plurality of nozzles 11 of the inkjet head 3 in a linear shape (shower shape).

  The light projecting unit 7 is a light source. The light projecting unit 7 is a light source having directionality such as fluorescence, halogen, light bulb, LED light, and the like. The light projecting unit 7 irradiates the solvent 20 discharged from the plurality of nozzles 11 of the inkjet head 3 with light 8.

The projection image acquisition unit 9 is an apparatus that acquires a projection image of the solvent 20. The projection image acquisition unit 9 is, for example, a CCD camera.
The projection image analysis unit 10 is an apparatus that performs an arithmetic process on the projection image of the solvent 20 acquired by the projection image acquisition unit 9 and analyzes the image. The projection image analysis unit 10 automatically determines the ejection failure of the nozzles 11 of the inkjet head 3.

The control unit 2 is a device that performs arithmetic processing and operation control of each device. The control unit 2 includes a CPU (Central Processing Unit) and a memory. The control unit 2 sends a control signal regarding the amount, pressure, discharge timing, and the like of the solvent 20 supplied to the inkjet head 3 to the solvent supply unit 5. In addition, the control unit 2 sends control signals related to the movement, rotation, and positioning of the inkjet head 3 to the rotational movement unit 4.
Further, the control unit 2 may have a function as the projection image analysis unit 10 of the projection inspection unit 6.

(2. Cleaning and inspection of inkjet head 3)
Next, cleaning and inspection of the inkjet head 3 will be described with reference to FIGS.
FIG. 2 is a flowchart showing cleaning and inspection of the inkjet head 3.

  First, the ink jet head 3 is mounted and fixed on the head mounting portion 21 of the head inspection cleaning apparatus 1 (step 1001). The control unit 2 sends a control signal related to the movement and positioning of the inkjet head 3 to the moving rotation unit 4. The moving rotation unit 4 fixes the position of the inkjet head 3.

  The control unit 2 sends a control signal related to the amount of solvent supplied to the inkjet head 3, pressure, ejection timing, and the like to the solvent supply unit 5. The solvent supply unit 5 supplies the solvent to the inkjet head 3 based on the control signal (step 1002).

  A solvent 20 having a predetermined pressure is discharged in a linear shape (shower shape) from the plurality of nozzles 11 of the inkjet head 3. The plurality of nozzles 11 of the inkjet head 3 are cleaned by discharging the solvent 20 continuously in a linear form by applying a predetermined pressure instead of dropping the solvent 20 intermittently. At the same time, the nozzles 11 of the inkjet head 3 are inspected by measuring the solvent 20 ejected linearly from the plurality of nozzles 11 (step 1003).

FIG. 3 is a diagram illustrating inspection of the inkjet head 3.
The light projecting unit 7 irradiates the solvent 20 ejected linearly from the plurality of nozzles 11 of the inkjet head 3 with the light 8 from the A direction.

FIG. 4 is a diagram showing the projected image 30.
The projected image 30 is an image obtained by capturing the inkjet head 3 and the solvent 20 from the C direction. The projection image 30 is acquired by the projection image acquisition unit 9.
The inkjet head 3 includes a plurality of nozzles 11-1 to 11-8, and the solvent 20 is discharged from each nozzle 11.

  The projection image analysis unit 10 analyzes the projection image 30 of the ejection solvent 20 and performs flight determination (step 1004). The projection image analysis unit 10 measures the intervals 15-1 to 15-7 of the solvent 20 ejected in a linear shape at a position 13 away from the nozzles 11-1 to 11-8.

  When the measured intervals 15-1 to 15-7 are equal, the projection image analysis unit 10 determines that the inkjet head 3 is a non-defective product (“good” in Step 1004). It is installed and operated in a color filter manufacturing apparatus (not shown) (step 1005).

  When the measured intervals 15-1 to 15-7 are not equal intervals, the projection image analysis unit 10 determines that the inkjet head 3 is defective (“defective” in step 1004). In FIG. 4, since the interval 15-6 and the interval 15-7 are different from the other intervals 15-1 to 15-5, the nozzle 11-7 is detected as a defective nozzle. There is a possibility that foreign matter exists in the vicinity of the nozzle hole in the ink jet head 3 determined to be defective, due to uneven processing accuracy. Therefore, the ink jet head 3 is not attached to the color filter manufacturing apparatus.

As described above, in the present embodiment, the head inspection cleaning apparatus 1 performs the cleaning and the inspection simultaneously using the solvent 20 before the inkjet head 3 is attached to the color filter manufacturing apparatus, so that the cleaning / inspection process is simplified. And process reduction.
Further, the inspection of the nozzle 11 of the ink jet head 3 can automatically reduce the inspection time and improve the inspection accuracy by automatically analyzing the projected image 30 of the solvent 20.

  Although the projection image acquisition unit 9 has been described as acquiring the projection image 30 from the C direction, the image of the solvent 20 may be acquired from the same direction as the A direction in which the light 8 is emitted from the light projecting unit 7.

  In addition, the projection image analysis unit 10 has been described as analyzing the projection image 30 of the solvent 20 to determine whether the inkjet head 3 is good or bad. However, the inspector visually observes the flying state of the solvent 20, so that the inkjet head 3 You may make it determine the defect of.

(3. Rotation of inkjet head 3)
Next, an inspection method when the inkjet head 3 is rotated will be described with reference to FIGS. 5 and 6.

FIG. 5 is a diagram illustrating inspection of the inkjet head 3-2 after rotation.
The position of the inkjet head 3-1 before the rotation is the same as the position of the inkjet head 3 shown in FIG. 3, and the irradiation direction (A direction) of the light 8 from the light projecting unit 7 and the longitudinal direction of the inkjet head 3-1. (The direction in which the nozzles 11 are arranged in series) is perpendicular.

  First, it is assumed that the inkjet head 3-1 is determined to be a non-defective product in the state of the inkjet head 3-1 before rotation, and the angle of the inkjet head 3-1 is changed for further inspection accuracy. To do.

The moving rotation unit 4 rotates the head mounting unit 21 and the inkjet head 3-1 by a predetermined angle in the B direction based on a control signal from the control unit 2.
Subsequent cleaning and inspection procedures of the inkjet head 3-2 are the same as the processing of Step 1001 to Step 1005 of FIG.

FIG. 6 is a diagram showing the projected image 30a.
The projected image 30a is an image obtained by capturing the solvent 20a discharged from the inkjet head 3-2 in FIG. 5 from the C direction. The projection image 30a is acquired by the projection image acquisition unit 9.
The C direction and the series direction of the nozzles 11-1 to 11-8 of the inkjet head 3-2 are not perpendicular. Accordingly, in the projected image 30a, the intervals 17-1 to 17-7 of the solvent 20 ejected in a linear shape at a distance 13 from the nozzles 11-1 to 11-8 are the actual intervals 15-1 to 15-15. Measured narrower than -7.

  The projection image analysis unit 10 analyzes the projection image 30a of the discharge solvent 20a and performs flight determination. The projection image analysis unit 10 measures the intervals 17-1 to 17-7 of the solvent 20a that is ejected in a linear shape at a distance 13 from the nozzles 11-1 to 11-8.

  Even if it is determined that the inkjet head 3-1 is a non-defective product in the flight determination at the position before the rotation, if the flight determination is performed at the position of the inkjet head 3-2 after rotating in the B direction, the intervals 17-1 to 17-17. In some cases, −7 is not equally spaced and is determined to be defective.

  In this way, it is possible to determine whether the inkjet head 3 is good or not with high accuracy by performing a flight inspection in a plurality of directions by rotating the inkjet head 3 not only from one direction.

(4. Example)
Hereinafter, the present invention will be described in more detail with reference to examples.

[1. Example 1]
[1-1. Head Inspection Cleaning Device (Flight Inspection Device) Configuration]
As the head, an inkjet head in which 60 um nozzle holes were arranged in a row at intervals of 1000 um was used.
As a liquid agent for cleaning an ink jet head and a flight inspection, a liquid agent using an ink-jet ink solvent as a main solvent was used.
As the optical system of the flight inspection apparatus, a strobe for irradiating the liquid agent and a CCD camera for imaging the flight state were used.
A tube pump is used as the mechanism of the liquid supply device that supplies the liquid to the inkjet head, and a 5 um mesh filter made by SUS (Stainless Used Steel) is used to prevent ejection failure due to foreign matter mixing into the inkjet head.

[1-2. Head inspection cleaning process]
The ink jet head was prepared, and was arranged in the head mounting portion of the flight inspection device so that the liquid agent imaging direction and the ink jet nozzle row were orthogonal between the strobe and the CCD camera.
The liquid agent was supplied to the ink jet head by the liquid agent supply apparatus. At this time, the liquid supply amount was controlled by gradually increasing the number of rotations per unit time from the stopped state of the tube pump until the liquid agent was discharged linearly from all the nozzle holes.
In order to take an image of the liquid flying state from the endmost nozzle, the position of the endmost nozzle hole of the ink jet head was moved into a field of view where imaging is possible. On the flight observation monitor of the flight inspection apparatus, an image in which the liquid agent was ejected in a linear shape from a plurality of adjacent nozzle holes was projected.
The detection position of the discharged liquid agent, which is a condition for determining pass / fail in the flight inspection, is set at a distance of 500 μm from the nozzle hole of the inkjet head, and is discharged within a range of ± 70 μm in the direction orthogonal to the imaging direction from the center of the nozzle hole. I made it a good product.
The inkjet head was automatically moved in the nozzle row direction at a regular pitch, and all nozzles were visually observed, but there was no flying curve. Further, in the flight inspection result obtained by analyzing the flight direction from the captured image of the flight inspection device, the flight defect that causes a problem in the display of color mixture or the like was not detected when the color filter production device applied the ink jet.
Next, in order to increase the flight inspection accuracy, the inkjet head was rotated about the center so that the nozzle hole interval from the liquid agent imaging direction was 170 μm. Thereafter, the flight inspection was sequentially performed from the endmost nozzle in the same manner as the above-described flight inspection. However, when the ink was applied by the color filter production apparatus, a flight defect that caused a problem in the display of color mixture or the like was not detected.

[1-3. Preparation of colored layer forming substrate]
EAGLE 2000 made by Corning having a thickness of 0.7 mm, a width of 370 mm, and a length of 470 mm used as a glass material for a color filter was prepared, and a resin black matrix was formed on the glass substrate by photolithography.
The black matrix is formed so that the opening is 150 μm × 410 μm, the line width of the light shielding portion is 100 μm in the pixel major axis direction and 20 μm in the pixel minor axis direction, and 2400 (800 × 3) at a pitch of 170 μm in the pixel minor axis direction. ) It is assumed that 600 pixels are arranged at a pitch of 510 μm in the pixel major axis direction. At this time, the film thickness of the light shielding portion was 1.5 μm on average.
By applying a plasma treatment using a fluorine compound as an introduction gas to the glass substrate with a black matrix, the surface of the black matrix is made lyophobic, and the other area (colored layer forming area) is made lyophilic. did. At this time, the contact angle with the liquid having a surface tension of 40 mN / m was 60 ° on the black matrix and 10 ° in the colored layer forming region.

[1-4. Colored layer forming step]
The colored layer forming coating solution was applied to the colored layer forming substrate having lyophobic properties using an inkjet head determined to be a non-defective product by the liquid agent flight test. The color layer forming coating liquid uses RGB color pigment dispersed inks composed of a color filter pigment and a thermosetting resin, etc., and a desired color at 50 drops per one opening (colored layer forming region). What designed the density so that the color of the filter could be expressed was used.
The inkjet head used one head for each color, that is, three heads for RGB three colors. The voltage applied to the ink jet head was set to 75 V, and the pulse width was set to 2 μs.
The application is performed by positioning so that one nozzle is arranged for each colored layer forming region (one pixel), and each droplet of the colored layer forming coating liquid discharged from the nozzle is used for forming the colored layer. Went to land in the area. Further, the coloring layer forming coating solution was repeatedly arranged in the order of RGB in the pixel minor axis direction, and arranged so that the same color was aligned in the pixel major axis direction. And the coating liquid for colored layer formation was apply | coated, scanning an inkjet head to a pixel major axis direction. At this time, the colored layer forming coating solution of each color spreads over the entire opening and does not mix different colors.

[1-5. Pre-baking process]
The color filter substrate on which the colored layer forming coating solution was landed was placed in a reduced pressure heating and drying apparatus equipped with a heating mechanism and dried under reduced pressure.
The gap between the substrate and the stage equipped with the heating mechanism was set using a 5 mm pin made of SUS. The heating set temperature was 30 ° C. The reduced pressure was set to 10 Pa and the reduced pressure holding time was 70 sec. The set pressure reduction pressure arrival time was 15 sec. The substrate temperature at this time was 30 ° C.
The pre-baked colored layer forming coating solution was solidified to the extent that no flaws were formed even when the surface of the tip was touched with a needle having a diameter of 12 μm at a pressure of 5 μm, and no color mixing occurred.

[1-6. Post bake process]
The color filter substrate after the pre-baking step was placed in a 200 ° C. oven and post-baked for 30 minutes.

[1-7. Colored layer shape inspection process]
The post-baking color filter substrate was free from defects such as color mixing, cracks, surface roughness, color unevenness and the like that affected display, and a good color filter substrate could be produced.

[2. Example 2]
[2-1. Head Inspection Cleaning Device (Flight Inspection Device) Configuration]
Since it is the same as [Embodiment 1], its description is omitted.

[2-2. Head inspection cleaning process]
An ink jet head different from that in Example 1 was prepared, and was arranged in the head mounting portion of the flight inspection apparatus so that the imaging direction of the liquid agent and the ink jet nozzle row were orthogonal between the strobe and the CCD camera.
The liquid agent was supplied to the ink jet head by the liquid agent supply apparatus. At this time, the liquid supply amount was controlled by gradually increasing the number of rotations per unit time from the stopped state of the tube pump until the liquid agent was discharged linearly from all the nozzle holes.
In order to take an image of the liquid flying state from the endmost nozzle, the position of the endmost nozzle hole of the ink jet head was moved into a field of view where imaging is possible. On the flight observation monitor of the flight inspection apparatus, an image in which the liquid agent was ejected in a linear shape from a plurality of adjacent nozzle holes was projected.
The detection position of the discharged liquid agent, which is a condition for determining pass / fail in the flight inspection, is set at a distance of 500 μm from the nozzle hole of the inkjet head, and is discharged within a range of ± 70 μm in the direction orthogonal to the imaging direction from the center of the nozzle hole. I made it a good product.
The inkjet head was automatically moved in the nozzle row direction at a regular pitch, and all nozzles were visually observed, but there was no flying curve. Further, in the flight inspection result obtained by analyzing the flight direction from the captured image of the flight inspection device, a flight curve of 50 um was detected in the flight curve in the nozzle hole arrangement direction. No flying failure was detected as a problem.
Next, in order to increase the flight inspection accuracy, the inkjet head was rotated about the center so that the nozzle hole interval from the liquid agent imaging direction was 170 μm. Thereafter, the flight inspection was sequentially performed from the endmost nozzle in the same manner as the above-described flight inspection. However, when the ink was applied by the color filter production apparatus, a flight defect that caused a problem in the display of color mixture or the like was not detected.

[2-3. Preparation of colored layer forming substrate]
Since it is the same as [Embodiment 1], its description is omitted.

[2-4. Colored layer forming step]
Since it is the same as [Embodiment 1], its description is omitted.

[2-5. Pre-baking process]
Since it is the same as [Embodiment 1], its description is omitted.

[2-6. Post bake process]
Since it is the same as [Embodiment 1], its description is omitted.

[2-7. Colored layer shape inspection process]
The post-baking color filter substrate was free from defects such as color mixing, cracks, surface roughness, color unevenness and the like that affected display, and a good color filter substrate could be produced.

[3. Example 3]
[3-1. Head Inspection Cleaning Device (Flight Inspection Device) Configuration]
Since it is the same as [Embodiment 1], its description is omitted.

[3-2. Head inspection cleaning process]
Ink jet heads different from those in Example 1 and Example 2 were prepared and arranged in the head mounting portion of the flight inspection apparatus so that the imaging direction of the liquid agent and the inkjet nozzle rows were orthogonal between the strobe and the CCD camera.
The liquid agent was supplied to the ink jet head by the liquid agent supply apparatus. At this time, the liquid supply amount was controlled by gradually increasing the number of rotations per unit time from the stopped state of the tube pump until the liquid agent was discharged linearly from all the nozzle holes.
In order to take an image of the liquid flying state from the endmost nozzle, the position of the endmost nozzle hole of the ink jet head was moved into a field of view where imaging is possible. On the flight observation monitor of the flight inspection apparatus, an image in which the liquid agent was ejected in a linear shape from a plurality of adjacent nozzle holes was projected.
As a condition for determining whether or not the flight inspection is good, the length of the liquid agent discharged from the nozzle hole of the inkjet head is 500 μm, and the liquid is discharged within a range of ± 70 μm from the center of the nozzle hole in a direction perpendicular to the imaging direction. Was used as a criterion for non-defective products.
The inkjet head was automatically moved in the nozzle row direction at a regular pitch, and all nozzles were visually observed, but there was no flying curve. Further, in the flight inspection result obtained by analyzing the flight direction from the captured image of the flight inspection device, a flight curve of 95 μm was detected and determined as a defective head.

[3-3. Preparation of colored layer forming substrate]
Since it is the same as [Embodiment 1], its description is omitted.

[3-4. Colored layer forming step]
The head determined to be defective in the liquid material flight inspection is not originally mounted on the color filter production apparatus, but the colored layer forming coating liquid is applied to the colored layer forming substrate having the lyophobic property. did. The color layer forming coating liquid uses RGB color pigment dispersed inks composed of a color filter pigment and a thermosetting resin, etc., and a desired color at 50 drops per one opening (colored layer forming region). What designed the density so that the color of the filter could be expressed was used.
The inkjet head used one head for each color, that is, three heads for RGB three colors. The voltage applied to the ink jet head was set to 75 V, and the pulse width was set to 2 μs.
The application is performed by positioning so that one nozzle is arranged for each colored layer forming region (one pixel), and each droplet of the colored layer forming coating liquid discharged from the nozzle is used for forming the colored layer. Went to land in the area. Further, the coloring layer forming coating solution was repeatedly arranged in the order of RGB in the pixel minor axis direction, and arranged so that the same color was aligned in the pixel major axis direction. And the coating liquid for colored layer formation was apply | coated, scanning an inkjet head to a pixel major axis direction.

[3-5. Pre-baking process]
Since it is the same as [Embodiment 1], its description is omitted.

[3-6. Post bake process]
Since it is the same as [Embodiment 1], its description is omitted.

[3-7. Colored layer shape inspection process]
The substrate for color filter after the post-baking was confirmed to have regular pitch stripes in the coating direction. Further, color mixture could be confirmed in the above-mentioned stripes, and a good color filter substrate could not be produced.

[4. Example 4]
[4-1. Head Inspection Cleaning Device (Flight Inspection Device) Configuration]
Since it is the same as [Embodiment 1], its description is omitted.

[4-2. Head inspection cleaning process]
Ink jet heads different from those in Example 1 to Example 3 were prepared and arranged in the head mounting portion of the flight inspection apparatus so that the imaging direction of the liquid agent and the inkjet nozzle rows were orthogonal between the strobe and the CCD camera.
The liquid agent was supplied to the ink jet head by the liquid agent supply apparatus. At this time, the liquid supply amount was controlled by gradually increasing the number of rotations per unit time from the stopped state of the tube pump until the liquid agent was discharged linearly from all the nozzle holes.
In order to take an image of the liquid flying state from the endmost nozzle, the position of the endmost nozzle hole of the ink jet head was moved into a field of view where imaging is possible. On the flight observation monitor of the flight inspection apparatus, an image in which the liquid agent was ejected in a linear shape from a plurality of adjacent nozzle holes was projected.
The detection position of the discharged liquid agent, which is a condition for determining pass / fail in the flight inspection, is set at a distance of 500 μm from the nozzle hole of the inkjet head, and is discharged within a range of ± 70 μm in the direction orthogonal to the imaging direction from the center of the nozzle hole. I made it a good product.
The inkjet head was automatically moved at a regular pitch in the nozzle row direction, and all nozzles were visually observed. Although there was no flying curve, a nozzle hole that did not discharge was confirmed. In addition, nozzle holes that do not discharge were detected even in the flight inspection result obtained by analyzing the flight direction from the captured image of the flight inspection device.
Since it has a nozzle that does not discharge, it was not mounted on a color filter production apparatus.

[5. Flight inspection results and color filter quality inspection results]
FIG. 7 is a diagram showing the flight inspection results and the color filter quality inspection results in the above [Example 1] to [Example 4].
The non-defective head determination indicates the pass / fail determination of the inkjet head to be inspected. The flight inspection result indicates a flight inspection result by the head inspection cleaning device (flight inspection device). The color filter quality inspection result indicates the quality inspection result of the produced color filter.

As described above, in [Embodiment 1], in the flight inspection, all the nozzles of the inkjet head to be inspected had no flight bending and the ink discharge state was good. In the quality inspection of the color filters produced using these ink jet heads, there were no defects that affected the display.
In [Example 2], in the flight inspection, the flight curve at the nozzle of the inkjet head to be inspected is small, and in the quality inspection of the color filter produced using these inkjet heads, there was no defect affecting the display. .

On the other hand, in [Example 3], in the flight inspection, the flight curve at the nozzle of the inkjet head to be inspected is large, and in the quality inspection of the color filter produced using these inkjet heads, streaks and color mixing defects were confirmed. . In this [Example 3], the inkjet head to be inspected was determined to be defective by the flight inspection, but a color filter quality inspection was performed to verify the accuracy of the flight inspection.
Further, in [Example 4], in the flight inspection, there are ink jet heads that cannot eject ink, and these ink jet heads were not mounted on the color filter production apparatus.

  As described above, since the flight inspection result and the color filter quality inspection result correspond to each other, the quality of the inkjet head to be inspected is determined according to the flight inspection result, and then these inkjet heads are mounted on the color filter production apparatus. Or not. Since the ink jet head to be inspected can be inspected without mounting the ink jet head to be inspected in the color filter production apparatus, the work load related to the inspection of the ink jet head can be reduced.

(5. Other)
As explained in detail above, since the non-defective product is used after cleaning and inspection at the stage before mounting the inkjet head on the color filter manufacturing apparatus, an extra process of replacing defective products after mounting on the color filter manufacturing apparatus is performed. Can be reduced.
In the head inspection cleaning apparatus according to the present embodiment, cleaning and inspection can be performed simultaneously by supplying a predetermined pressure to the ink solvent and supplying it to the ink jet head. Therefore, the cleaning and inspection processes can be simplified and the time can be shortened.

Moreover, the inspection time can be shortened and the inspection accuracy can be improved by acquiring an image of the discharge solvent, analyzing the image, and inspecting the inkjet head. Further, it is possible to reduce the cost by automating the inspection.
Further, the inspection accuracy can be improved by performing the flight inspection of the discharged solvent from a plurality of directions.
Further, the head inspection cleaning apparatus of the present embodiment is not limited to the inkjet head, and can be used for inspection cleaning of other members having a plurality of nozzles, for example.

  In the above-described embodiment, it has been described that a solvent is used as the liquid agent supplied to the head. However, the present invention is not limited to this. Ink actually used can also be used. However, since the solvent is a main component of the ink and the ink ejection characteristics and the solvent ejection characteristics are very similar, the use of a solvent instead of ink does not affect the inspection accuracy. Further, the solvent supply mechanism can have a simpler device configuration than the ink supply mechanism. Furthermore, the cost burden can be reduced by using a solvent instead of ink.

  The preferred embodiments of the head inspection cleaning apparatus and method according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these are naturally within the technical scope of the present invention. Understood.

Configuration of head inspection cleaning device 1 Head inspection and cleaning flowchart The figure which shows the test | inspection and washing | cleaning of the inkjet head 3 The figure which shows the projection image 30 of the solvent 20 The figure which shows the test | inspection and washing | cleaning of the inkjet head 3-2 after rotation The figure which shows the projection image 30a of the solvent 20a after rotation The figure which shows the flight test result and color filter quality test result in [Example 1]-[Example 4]

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ......... Head test | inspection washing apparatus 2 ......... Control part 3, 3-1, 3-2 ......... Inkjet head 4 ......... Moving rotation part 5 ......... Solvent supply apparatus 6 ......... Projection inspection part 7 ......... Projector 8 ......... Light 9 ......... Projected image acquisition device 10 ......... Projected image analyzer 11-1 to 11-8 ......... Nozzles 15-1 to 15-7, 17-1 17-7 ........ Spacing 20, 20a .... Solvent 21 .... Head mounting part 30, 30a .... Projected image

Claims (11)

A head mounting portion to which a head having a plurality of nozzle holes is mounted;
A liquid agent supply unit that supplies the liquid agent to the head and discharges the liquid agent linearly from the plurality of nozzle holes;
A head inspection unit for measuring the distance between the liquid agents discharged linearly from each of the plurality of nozzle holes and inspecting the flying state of the liquid agent discharged from the head;
Comprising
A head inspection cleaning apparatus, wherein the head inspection and the head cleaning are simultaneously performed.   The head inspection cleaning apparatus according to claim 1, wherein the head is cleaned by applying pressure from the liquid supply unit and discharging the liquid from the nozzle holes in a linear shape. A light projecting unit for irradiating at least one or more of the linearly ejected liquid agents;
A projection image acquisition / analysis unit that acquires and analyzes at least one projection image of the liquid ejected in a linear shape;
The head inspection cleaning apparatus according to claim 1, further comprising:   The head inspection cleaning apparatus according to claim 3, further comprising a rotating unit that rotates the head.   The head inspection cleaning apparatus according to claim 1, wherein the liquid agent is at least one or more solvents contained in ink. A head coupling step for coupling a head having a plurality of nozzle holes to the liquid supply section;
A liquid agent supply step of supplying a liquid agent to the head from the liquid agent supply unit, and discharging the liquid agent linearly from the plurality of nozzle holes;
A head inspection step of measuring the interval between the liquid agents discharged linearly from each of the plurality of nozzle holes and inspecting the flying state of the liquid agent discharged from the head;
Comprising
A head inspection cleaning method, wherein the head inspection and the head cleaning are simultaneously performed.   The head inspection cleaning method according to claim 6, wherein, in the liquid agent supply step, the head is cleaned by applying pressure from the liquid agent supply unit and ejecting the liquid agent linearly from the nozzle holes. . A light projecting step of irradiating at least one or more liquid ejected in a linear form with light;
A projection image acquisition and analysis step of acquiring and analyzing at least one or more projection images of the liquid material ejected in the linear shape;
The head inspection cleaning method according to claim 6 or 7, further comprising:   The head inspection cleaning method according to claim 8, further comprising a rotating step of rotating the head.   The head inspection cleaning method according to claim 6, wherein the liquid agent is at least one or more solvents contained in ink.   A method for manufacturing a color filter, comprising the head inspection cleaning method according to claim 6.

Images