KR20110007866A - Apparatus and method of coating treatment solution - Google Patents

Abstract

PURPOSE: An apparatus and a method for applying treatment fluid are provided to accurately grasp the generation time of foreign material which causes processing liquid applying defects. CONSTITUTION: An apparatus for applying treatment fluid comprises a support member, a head, and a fluid spraying unit(180). Objects are placed in the support member. The support member is vertically movable. The head applies the processing liquid on the object placed in the support member. The fluid spraying unit sprays gas on the surface of the object and removes foreign materials on the surface of the object. The controller senses the time when foreign materials are loaded on the object, using images photographed by the camera unit.

Description

Treatment liquid applying device and method {APPARATUS AND METHOD OF COATING TREATMENT SOLUTION}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a treatment liquid coating apparatus of an inkjet method for applying a treatment liquid onto a substrate, and more particularly, to a treatment liquid applying apparatus and method for forming a thin film on a substrate.

A liquid crystal display for displaying an image includes two substrates on which various thin films are deposited and a liquid crystal layer interposed between the two substrates. In general, since the thin films formed on each substrate have patterns of various shapes, they are formed through a deposition process and a photolithography process for the accuracy of the pattern. As such, since a photolithography process using an expensive mask is used to form one thin film, manufacturing cost increases and manufacturing process time increases.

Recently, a thin film forming method using an inkjet printing method has been used as an alternative to the thin film forming method. The inkjet printing method forms a thin film by applying a chemical to a specific position on the substrate, and thus does not require a separate etching process. The inkjet printing method may be used to form various thin films such as a color filter or an alignment layer of a liquid crystal display.

In general, an inkjet printing apparatus includes a head for applying a chemical liquid on a substrate and an image capturing unit for imaging an image. The head has a plurality of nozzles for discharging the chemical liquid and applies the chemical liquid to a specific position on the substrate. The imaging unit picks up the surface of the substrate in order to inspect the application state after applying the chemical liquid, and inspection such as coating failure is performed through analysis of the captured image. Since the coating process forms a fine thin film, defects are generated when foreign particles of fine particles are loaded on the substrate, and the corresponding process conditions must be adjusted according to the time point when the foreign material defects are generated. However, the physical defect may be recognized through the inspection process using the imaging unit, but it is not easy to identify the process step in which the foreign matter has occurred after passing through a plurality of process steps.

It is an object of the present invention to provide a treatment liquid application apparatus capable of removing foreign substances generated in a process.

Moreover, the objective of this invention is providing the method of apply | coating a process liquid in the said process liquid application apparatus.

A treatment liquid application device according to one feature for realizing the object of the present invention described above includes a support member, at least one head, and a fluid ejection portion.

Specifically, the support member is mounted on the object, the vertical movement is possible. The head applies the treatment liquid to the object seated on the support member. The fluid injection unit sprays gas onto the surface of the object seated on the support member to remove foreign matter on the surface of the object.

In addition, the processing liquid applying device may further include an imaging unit and a control unit. The imaging unit picks up the processing liquid application state of the object seated on the support member. The controller detects a failure of coating of the processing liquid of the object and a time point at which the foreign matter is loaded on the object through the image captured by the imaging unit.

In addition, the treatment liquid coating method according to one feature for realizing the above object of the present invention is as follows. First, the object to which the treatment liquid is to be applied is placed on the support member, and the treatment liquid is applied to the surface of the object. Then, gas is sprayed on the surface of the object to remove the foreign matter loaded on the surface of the object.

On the other hand, the treatment liquid applying method further comprises the step of sensing the surface of the object after the removal of the foreign material, and detecting the failure of coating of the treatment liquid of the object and the point of time when the foreign material is loaded on the object through the captured image. Can be.

In addition, the treatment liquid applying method may further include a step of removing the foreign matter loaded on the surface of the object by spraying gas on the surface of the object before applying the treatment liquid.

According to the present invention described above, since the fluid injection unit removes the foreign matter on the surface of the object by injecting gas, it is possible to reduce the process defects due to the foreign matter.

In addition, since the treatment liquid coating method removes the foreign matter on the surface of the object after the coating process, it is possible to accurately determine the occurrence time of the foreign matter that caused the treatment liquid application failure, and to control the process conditions of the step to prevent this.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Hereinafter, an inkjet printing apparatus for forming a color filter of a liquid crystal display device as a processing liquid application device will be described as an example. However, the processing liquid application device may form various thin films in addition to the color filter, It can be used in various ways to form a thin film in a device or to form a specific pattern.

1 is a perspective view schematically showing a thin film forming apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the thin film forming apparatus 1000 includes an inkjet print unit 100, a processing liquid supply unit 200, a loader unit 300, an unloader unit 400, an indexer unit 500, and a baking unit 600. ), And the main controller 700.

The inkjet print unit 100 forms a color filter on the substrate by applying a processing liquid, for example, RGB inks, onto the substrate. In this embodiment, the inkjet print unit 100 applies RGB inks to form a color filter. However, the inkjet print unit 100 may apply various types of processing liquids in addition to RGB inks, and thus, various thin films, such as an alignment layer, may be formed on a substrate.

The main controller 700 installed at one side of the inkjet print unit 100 controls process conditions of the inkjet print unit 100, and the inkjet print unit 100 is applied under the control of the main controller 700. Proceed with the process.

The processing liquid supply unit 200 is installed at one side of the inkjet print unit 100. The processing liquid supply unit 200 stores the processing liquid to be applied to the substrate in the inkjet printing unit 100, and provides the processing liquid to the inkjet printing unit 100. In this embodiment, the processing liquid supply unit 200 stores the RGB inks separately from each other.

On the other side of the inkjet print unit 100, the loader 300 for receiving and loading a substrate waiting for processing from the outside and the unloader 400 for loading a substrate processed in the thin film forming apparatus 1000 are provided. Installed side by side.

The loader unit 300 and the unloader unit 400 are installed at one side of the indexer unit 500, and the loader unit 300 and the unloader unit 400 are interposed between the indexer unit 500. The inkjet print unit 100 faces the inkjet print unit 100. The indexer unit 500 communicates with the inkjet print unit 100, the loader unit 300, the unloader unit 400, and the bake unit 600, and the inkjet print unit 100 and the loader. The substrate 300 is transferred between the unit 300, the unloader unit 400, and the bake unit 600.

In detail, the indexer 500 includes a transfer robot (not shown) for transferring a substrate, and the transfer robot draws the substrate from the loader 300 and transfers the substrate to the inkjet print unit 100. When the inkjet printing unit 100 completes the RGB ink coating of the substrate, the transfer robot draws the substrate on which the color filter is formed from the inkjet printing unit 100 and transfers the substrate to the baking unit 600. The bake unit 600 heats the inserted substrate to cure the thin film formed on the substrate, that is, the color filter, thereby completing the thin film forming process by the thin film forming apparatus 1000. The transfer robot withdraws the processed substrate from the bake unit 600 and transfers it to the unloader unit 400. The board | substrate mounted in the said unloader part 400 is carried out by a conveying apparatus.

In the above, the configuration of the thin film forming apparatus 1000 has been schematically described. Hereinafter, the inkjet print unit 100 will be described in detail with reference to the accompanying drawings.

FIG. 2 is a perspective view illustrating the inkjet print unit shown in FIG. 1, and FIG. 3 is a plan view illustrating the inkjet print unit illustrated in FIG. 2.

2 and 3, the inkjet print unit 100 may include a stage 110, a substrate support 120, a gantry 130, first and second head assemblies 140a and 140b, The first and second head moving parts 151 and 152, the first cleaning unit 160, the second cleaning unit 170, the fluid injection unit 180, and the imaging unit 190 may be included.

On the stage 110, facilities for applying the treatment liquid, that is, the substrate support 120, the gantry 130, the first and second head assemblies 140a and 140b, and the first and second heads are provided. The moving parts 151 and 152, the first cleaning unit 160, and the second cleaning unit 170 are installed. The stage 110 is provided with a central rail 111 extending along one side of the stage 110, and the substrate support 120 is coupled to the central rail 111. The substrate support part 120 supports the substrate on which the treatment liquid is to be applied and is movable along the center rail 111. In addition, the substrate support 120 may be rotatably installed on the support on which the substrate is mounted, and fixes the substrate to the support during the treatment liquid application process.

The stage 110 may include first and second guide rails 112a and 112b that face each other with the center rail 111 interposed therebetween. Each of the first and second guide rails 112a and 112b extends in the same first direction D1 as the center rail 111 and extends in the first direction D1. It has almost the same length as one side of.

The gantry 130 is coupled to the first and second guide rails 112a and 112b. Both ends of the gantry 130 may be coupled to the first and second guide rails 112a and 112b, respectively, and may move horizontally along the first and second guide rails 112a and 112b.

The first and second head assemblies 140a and 140b are fixed to the gantry 130. When the gantry 130 is horizontally moved, the first and second head assemblies 140a and 140b installed in the gantry 130 are moved together, and accordingly, the first and the first and second heads D1 are moved in the first direction D1. The position of the two head assemblies 140a and 140b may be changed.

The first and second head assemblies 140a and 140b receive the treatment liquid from the treatment liquid supply part 200 and discharge the treatment liquid to the substrate fixed to the substrate support 120. In this embodiment, the inkjet print unit 100 has two head assemblies 140a and 140b, but the number of the head assemblies 140a and 140b is a process efficiency and the size of the head assemblies 140a and 140b. May increase or decrease depending on the

The first and second head assemblies 140a and 140b are disposed in parallel in the first direction D1 and are spaced apart from each other. In this embodiment, the first and second head assemblies 140a and 140b have the same configuration. Therefore, hereinafter, the configuration of the first head assembly 140a will be described in detail, and the detailed description of the second head assembly 140b will be omitted.

The first head assembly 140a is arranged in parallel with the first direction D1 in the second direction D2 perpendicular to the horizontal direction, and the first, second and third heads 141a, 142a, and 143a are arranged side by side. Each of the first to third heads 141a, 142a, and 143a includes a plurality of nozzles for discharging the processing liquid.

In this embodiment, the first head assembly 140a includes three heads 141a, 142a, and 143a, but the number of the heads 141a, 142a, and 143a depends on the process efficiency and the number of types of treatment liquid. May increase or decrease accordingly.

The first to third heads 141a, 142a, and 143a discharge ink having different colors to form a color filter on the substrate. Specifically, the first head 141a discharges R ink having a red color, the second head 142a discharges G ink having a green color, and the third head 143a has B ink having a blue color. To discharge. Here, the ink arrangement of the first to third heads 141a, 142a, and 143a may be changed according to the color pixel arrangement of the color filter.

Each of the heads 141a, 142a, and 143a is rotatable based on the central axis of each of the heads 141a, 142a, and 143a.

In the treatment liquid applying process, the first to third heads 141a, 142a, and 143a may discharge ink at the same time, or ink may be discharged from only one head at a time. In addition, the first to third heads 141a, 142a, and 143a may alternately discharge ink.

In addition, during the process liquid applying process, the first and second head assemblies 140a and 140b may be driven simultaneously to eject ink from the first and second head assemblies 140a and 140b simultaneously. The first and second head assemblies 140a and 140b may alternately eject ink. In addition, when the first or second head assembly (140a, 140b) is first driven to apply ink, and then all the ink supplied to the head assembly is exhausted, the remaining head assembly may be driven to apply ink.

Meanwhile, the first and second head assemblies 140a and 140b are fixedly installed on the first head moving part 151, and the first head moving part 151 extends in the second direction D2. 1 moving rails are provided. The first and second head assemblies 140a and 140b may be coupled to different first moving rails and may reciprocate in the second direction D2 along the combined first moving rails. Here, the heads of the first and second head assemblies 140a and 140b are individually movable along the combined first moving rail.

The first head moving part 151 is fixed to the second head moving part 152, and a second moving rail (not shown) is installed in the second head moving part 152. The second moving rail extends in a direction D3 perpendicular to the first and second directions D1 and D2, that is, in a third direction D3 perpendicular to the upper surface of the stage 110. The first head moving part 151 is coupled to the second moving rail, and can be reciprocated in the up / down direction D2 along the second moving rail. The second head moving part 152 is fixed to the gantry 130. A third moving rail extending in the second direction D2 is installed in the gantry 130. The second head moving part 152 is coupled to the third moving rail, and reciprocating in the second direction D2 is possible along the third moving rail.

As such, the first and second head assemblies 140a and 14b may be formed by the gantry 130 and the first and second head moving parts 151 and 152 in the first to third directions D1 and D2. , D3). That is, the first and second head assemblies 140a and 140b are movable in the first direction D1 by the horizontal movement of the gantry 130, and by the movement of the second head moving unit 152. It is movable in the second direction D2, and is movable in the third direction D3 by the movement of the first head moving part 151. In addition, the heads of the first and second head assemblies 140a and 140b are movable in the second direction D2 along the corresponding first moving rail.

In the process liquid applying process, the first and second head assemblies 140a and 140b move by the first and second head moving parts 151 and 152 and the gantry 130 to apply ink to the substrate. It can be applied. In addition, the substrate support 120 moves along the center rail 111 in the first direction D1, and the first and second head assemblies 140a and 140b move in the second and third directions. The ink application may be performed only by moving to (D2, D3).

Meanwhile, the first and second cleaning units 160 and 170 are installed in a maintenance area provided between the center rail 111 and the second guide rail 112b of the stage 110.

The first cleaning unit 160 scrapes and removes the ink remaining in the first and second head assemblies 140a and 140b. Specifically, the first cleaning unit 160 includes a purge tank which collects the ink remaining in the nozzles of the heads and discharges the ink to the outside, and the ink remaining in the nozzles of the heads on the top of the purge tanks. Blades for scraping off are installed. The first and second head assemblies 140a and 140b are transferred to the upper portion of the first cleaning unit 160 by the gantry 130 when ink is applied to a single substrate, and the nozzles are discharged. The surface moves in the first direction D1 while the surface is disposed adjacent to the blades. At this time, the blades are in contact with the ink remaining on the discharge surface of the nozzles, the residual ink is drawn to the top of the blades by the surface tension is removed from the discharge surface of the nozzles.

In addition, when the process waiting time is long, ink remaining in each nozzle may solidify. To remove this, the first and second head assemblies 140a and 140b discharge and remove ink remaining in each nozzle in the purge tank. When the first and second head assemblies 140a and 140b discharge the remaining ink therein, the blades remove the ink on the discharge surface of each nozzle in the same manner as the cleaning of the discharge surfaces of the nozzles.

The purge tank may be provided with a cleaning liquid. The cleaning liquid separates the ink remaining in the inner wall of the purge tank from the inner wall of the purge tank to induce the residual ink to be discharged to the outside.

On the other hand, the second cleaning unit 170 is installed on one side of the first cleaning unit 160. When the gantry 130 is positioned at the home position, the second cleaning unit 170 faces the gantry 130 with the first cleaning unit 160 interposed therebetween. The second cleaning unit 170 wipes the ink on each nozzle of the first and second head assemblies 140a and 140b to improve the yield of the product. Here, the second cleaning unit 170 may secondary clean the nozzles first cleaned by the first cleaning unit 160, and clean the nozzles not cleaned by the first cleaning unit 160. You may.

The second cleaning unit 170 may include a supply roller, a recovery roller, and a wiper. Specifically, the feed roller and the recovery roller is connected through the wiper. The wiper has a tape shape, a first end is fixed to the feed roller, and a second end is fixed to the recovery roller. When the first and second head assemblies 140a and 140b are cleaned, the wiper contacts the discharge surface of each nozzle to wipe off the ink remaining in the nozzle. The wiper is supplied while being wound on the supply roller, and a portion contaminated by the cleaning of the nozzle is wound on the recovery roller. That is, the feed roller provides an uncontaminated wiper, and the recovery roller recovers a contaminated wiper.

On the other hand, the gantry 130, the fluid injection unit 180 is installed to be movable. In detail, the fluid sprayer 180 removes foreign matters seated on the surface of the substrate 10 by spraying air on the surface of the substrate 10 seated on the substrate support 120. The fluid injection unit 180 is fixed to the fourth moving rail 131 provided in the gantry 130 and is movable in the second direction along the fourth moving rail 131. The fourth moving rail 131 is installed on a surface on which the fluid supply part 180 of the gantry 130 is fixedly installed and extends in the second direction D2.

When the air is sprayed on the surface of the substrate 10, the fluid spraying unit 180 sprays while moving in the second direction D2 along the fourth moving rail 131, and the gantry 130 or the substrate The support part 120 moves in the first direction D1. Accordingly, the air may be uniformly sprayed on the entire area of the substrate 10.

In this embodiment, the fluid injection unit 180 is fixed to the gantry 130, but may be installed to be movable on the stage (110).

In addition, in this embodiment, the fluid injection unit 180 injects air to remove foreign substances on the surface of the substrate 10, but the cleaning efficiency and discharge from the first and second head assembly (140a, 140b) Depending on the kind of processing liquid to be used, other gases other than air may be injected.

As such, since the fluid injection unit 180 removes foreign substances on the surface of the substrate 10, foreign substances on the surface of the substrate 10 may prevent defects that may occur in subsequent processes, and thus yield of products. Can improve.

Meanwhile, the imaging unit 190 is installed in the stage 110. The imaging unit 190 is positioned adjacent to the first guide rail 112a and is installed on the opposite side of the maintenance area with respect to the center rail 111. The imaging unit 190 captures the surface of the substrate 10 seated on the substrate support unit 120, and then provides the captured image to the main control unit 700, and the main control unit 700 captures the image. The processed image is inspected whether the process of applying the treatment liquid of the substrate 10 is normally performed. That is, the imaging unit 190 photographs the substrate 10 coated with the R, G, and B inks and provides the same to the main control unit 700, and the main control unit 700 uses the captured image. Surface inspection of the substrate 10, that is, application of the R, G, and B in-situ application and uniformity of the R, G, and B inks are examined.

Image capturing of the imaging unit 190 may also be performed while the fluid injector 180 injects air. Therefore, when a portion of the processing liquid applied to the substrate 10 together with the foreign material, that is, the thin film is removed together while being removed, the defect confirmed through the image captured in the inspection process is generated after the application process. It can be seen that due to. In addition, when the foreign matter is deposited in the process before the coating process and the treatment liquid is applied thereon, the portion on which the foreign matter is deposited protrudes and is recognized as defective. In this case, since the foreign material is under the thin film, the foreign material cannot be removed by the air injected from the fluid injection unit 180.

As described above, since foreign matters are removed by air injection before the surface inspection of the substrate 10, the foreign matters causing the defects of the substrate 10 are generated at any one of the application process step and the previous process step. I can see. Accordingly, the thin film forming apparatus 1000 may accurately recognize the process step in which the foreign matter is generated, and may adjust the process conditions of the corresponding step to prevent this.

Hereinafter, a process of inspecting the surface of the substrate 10 after the treatment liquid is applied will be described in detail with reference to the accompanying drawings.

FIG. 4 is a flowchart illustrating a process of applying the treatment liquid by the inkjet print unit illustrated in FIG. 2, and FIG. 5 is a cross-sectional view illustrating a process of spraying air onto the surface of the substrate in the fluid ejection unit illustrated in FIG. 3.

2, 4, and 5, first, the substrate 10 is seated on the support plate 121 of the substrate support part 120 (step S110). Here, the substrate support 120 has a support shaft 121 installed below the support plate 121, the support shaft 121 is moved in a vertical direction, that is, the third direction (D3) The vertical position of the substrate 10 is adjusted.

Thereafter, the gantry 130 moves in the first direction D1 to place the fluid injector 180 on the substrate 10, and the fluid injector 180 may move in the second direction (D). While moving to D2), air is blown onto the surface of the substrate 10 and the substrate support part 120 moves along the center rail 111 in the first direction D1 (step S120). As a result, air from the fluid injection unit 180 is uniformly provided to the entire area of the substrate 10, and foreign matter on the surface of the substrate 10 is removed.

Subsequently, the first and second head assemblies 140a and 140b discharge the processing liquid onto the substrate 10. Accordingly, as illustrated in FIG. 5, a thin film (or thin film) may be formed on the upper surface of the substrate 10. 11) is formed (step S130).

As such, since the fluid ejection unit 180 removes foreign matter on the surface of the substrate 10 before the application process of applying the treatment liquid, the defect of the application process due to the foreign matter deposited in the previous process step can be reduced. .

In this embodiment, the process of removing the foreign matter on the surface of the substrate 10 by the fluid injection unit 180 before the application of the treatment liquid (step S120) is made, but the foreign material removal process before the treatment liquid application ( Step S120 may be omitted depending on the process efficiency.

When the application of the treatment liquid is completed, the gantry 130 moves in the first direction D1 to place the fluid ejection unit 180 on the substrate 10 on which the thin film 11 is formed. Subsequently, the fluid injector 180 injects air to the surface of the substrate 10 while moving in the second direction D2, and at the same time, the substrate support unit 120 follows the center rail 111. The motor moves in the first direction D1 (step S140). Accordingly, the air from the fluid injection unit 180 is uniformly provided to the entire region of the substrate 10, and the foreign matter 20 seated on the upper surface of the thin film 11 is removed. In this case, imaging of the surface of the substrate 10 by the imaging unit 190 may be performed together.

Subsequently, the imaging unit 190 picks up the substrate 10 and provides it to the main control unit 700 (step S150).

The processing liquid application failure is inspected through the image provided to the main controller 700, and a time point in which a foreign material is loaded on the substrate 10 is determined (step S160).

As such, since the fluid ejection unit 180 removes the foreign matter on the surface of the substrate 10 after the application process, it is possible to accurately grasp the occurrence time of the foreign matter causing the treatment liquid application failure, and to prevent this from occurring. Process conditions can be controlled.

Although described with reference to the embodiments above, those skilled in the art will understand that the present invention can be variously modified and changed without departing from the spirit and scope of the invention as set forth in the claims below. Could be.

1 is a perspective view schematically showing a thin film forming apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating the inkjet print unit shown in FIG. 1.

3 is a plan view illustrating the inkjet print unit illustrated in FIG. 2.

FIG. 4 is a flowchart illustrating a process of applying the treatment liquid by the inkjet print unit shown in FIG. 2.

FIG. 5 is a cross-sectional view illustrating a process of injecting air onto a substrate surface in the fluid ejection unit illustrated in FIG. 3.

Explanation of symbols on the main parts of the drawings

100: inkjet print portion 200: chemical liquid supply portion

300: loader part 400: unloader part

500: indexer 600: baking unit

700: main control unit

Claims (10)

A support member on which an object is mounted and which can be vertically moved; At least one head for applying a treatment liquid to an object seated on the support member; And And a fluid ejection unit for spraying gas onto the surface of the object seated on the support member to remove foreign matter from the surface of the object. The method of claim 1, An imaging unit which picks up a processing liquid application state of the object seated on the support member; And And a control unit for detecting a failure of coating of the processing liquid of the object and a time point at which the foreign matter is loaded on the object through the image picked up by the imaging unit. The method of claim 2, The gantry extending in the same direction as one side of the support surface for supporting the object in the support member, the head and the fluid injection unit is further installed, The head and the fluid injection unit is a treatment liquid applying device, characterized in that the horizontal movement in the longitudinal direction of the gantry. The method of claim 3, Further comprising at least one guide rail extending in a direction perpendicular to the longitudinal direction of the gantry, The gantry is coupled to the guide rail treatment liquid applying device, characterized in that the horizontal movement along the guide rail. Mounting an object to be coated with a treatment liquid on a support member; Applying the treatment liquid to the surface of the object; And Thereafter, the step of spraying a gas on the surface of the object to remove the foreign matter loaded on the surface of the object. The method of claim 5, wherein after the gas injection step, Imaging the surface of the object; And Detecting the treatment liquid coating failure of the object and the point of time when the foreign matter is loaded on the object through the captured image. The method of claim 6, wherein the detecting of the loading time of the foreign material is performed. And recognizing that the foreign matter is loaded on the object before the treatment liquid is applied, if it is detected that the foreign material remains on the object on the captured image after completion of the spraying of the gas. The method of claim 7, wherein injecting the gas, Imaging the surface of the object while injecting the gas onto the surface of the object; And If it is detected that the thin film applied to the object is partially removed together with the foreign matter deposited on the surface of the object on the image taken while spraying the gas, the step of recognizing that the foreign material is loaded after the treatment liquid is applied. Treatment liquid coating method comprising a. The method of claim 6, The treatment liquid applying method is between the treatment liquid applying step and the gas injection step, Imaging the surface of the object; Detecting the loading time of the foreign material, And a time point at which the foreign material is loaded, by comparing the image captured before the gas injection step with the image captured after the gas injection step. The method according to any one of claims 5 to 9, wherein before the treatment liquid application step, And spraying a gas onto the surface of the object to remove the foreign matter loaded on the surface of the object.

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