TW202310936A - Droplet release device and droplet release method - Google Patents

Droplet release device and droplet release method Download PDF

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TW202310936A
TW202310936A TW111123343A TW111123343A TW202310936A TW 202310936 A TW202310936 A TW 202310936A TW 111123343 A TW111123343 A TW 111123343A TW 111123343 A TW111123343 A TW 111123343A TW 202310936 A TW202310936 A TW 202310936A
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Taiwan
Prior art keywords
wiping
droplet discharge
liquid
cleaning
cleaning solution
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TW111123343A
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Chinese (zh)
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松雪聡
大島澄美
林輝幸
中込裕
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日商東京威力科創股份有限公司
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Publication of TW202310936A publication Critical patent/TW202310936A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • B41J2/16552Cleaning of print head nozzles using cleaning fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • B41J2/1652Cleaning of print head nozzles by driving a fluid through the nozzles to the outside thereof, e.g. by applying pressure to the inside or vacuum at the outside of the print head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • B41J2/16535Cleaning of print head nozzles using wiping constructions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/165Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16517Cleaning of print head nozzles
    • B41J2/16552Cleaning of print head nozzles using cleaning fluids
    • B41J2002/16558Using cleaning liquid for wet wiping

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  • Coating Apparatus (AREA)
  • Ink Jet (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention provides a liquid droplet releasing device and a liquid droplet releasing method which can improve the cleaning performance of a liquid droplet releasing head in a maintenance step. The liquid droplet releasing device performs drawing by releasing liquid droplets of a functional liquid to a workpiece, and includes: a liquid droplet releasing head that releases the liquid droplets to the workpiece; a processing liquid supply unit that supplies a first cleaning liquid, which is a solvent for the functional liquid, or a second cleaning liquid, which is an alcohol, to the droplet releasing head; and a control unit that controls the processing liquid supply unit, the control unit being configured so as to be able to perform control such that the functional liquid filled in the droplet release head is replaced with either the first cleaning liquid or the second cleaning liquid, and then replaced with the other cleaning liquid.

Description

液滴吐出裝置及液滴吐出方法Droplet discharge device and droplet discharge method

本揭示係有關於液滴吐出裝置及液滴吐出方法。The present disclosure relates to a droplet discharge device and a droplet discharge method.

專利文獻1揭示具備液滴吐出頭、及在該液滴吐出頭的噴嘴面按壓清掃構件進行該噴嘴面的擦拭動作的擦拭單元的液滴吐出裝置。該液滴吐出裝置,具備擦拭單元對清掃構件供應洗淨液的洗淨液供應機構、及對噴嘴面按壓清掃構件的按壓機構,並具有依序執行將含浸洗淨液的狀態的清掃構件藉由按壓機構按壓至噴嘴面的擦拭動作、及將乾燥狀態的清掃構件藉由按壓機構按壓至噴嘴面的擦拭動作的控制機構。 [先前技術文獻] [專利文獻] Patent Document 1 discloses a droplet discharge device including a droplet discharge head and a wiper unit that presses a cleaning member on a nozzle surface of the droplet discharge head to perform a wiping operation on the nozzle surface. This liquid droplet discharge device includes a cleaning liquid supply mechanism for supplying cleaning liquid to a cleaning member by a wiping unit, a pressing mechanism for pressing the cleaning member against a nozzle surface, and a cleaning member sequentially impregnated with cleaning liquid. A control mechanism for the wiping operation of pressing the nozzle surface by the pressing mechanism and the wiping operation of pressing the dry cleaning member to the nozzle surface by the pressing mechanism. [Prior Art Literature] [Patent Document]

[專利文獻1]特開2005-022251號公報[Patent Document 1] JP-A-2005-022251

[發明所欲解決的問題][Problem to be solved by the invention]

本揭示的技術使維護工程中的液滴吐出頭的清理性能提升。 [解決問題的手段] The technology disclosed herein improves the cleaning performance of the droplet discharge head during maintenance work. [means to solve the problem]

根據本揭示的一態樣的液滴吐出裝置,係對工件吐出機能液的液滴並進行描繪,具有:對前述工件吐出液滴的液滴吐出頭;對前述液滴吐出頭,供應前述機能液的溶劑即第1洗淨液或醇系的第2洗淨液的處理液供應部;控制前述處理液供應部的控制部;前述控制部,執行:將填充於前述液滴吐出頭的前述機能液,置換成前述第1洗淨液及前述第2洗淨液的任一洗淨液後,置換成另一洗淨液的控制。 [發明的效果] According to one aspect of the present disclosure, a droplet discharge device discharges and draws droplets of a functional liquid on a workpiece, and includes: a droplet discharge head that discharges droplets to the workpiece; and the droplet discharge head that supplies the aforementioned functions The solvent of the liquid is the processing liquid supply part of the first cleaning liquid or the alcohol-based second cleaning liquid; the control part for controlling the processing liquid supply part; the control part executes: Control of replacing the functional liquid with any one of the first cleaning liquid and the second cleaning liquid and then replacing it with another cleaning liquid. [Effect of the invention]

根據本揭示,使維護工程中的液滴吐出頭的清理性能提升。According to the present disclosure, the cleaning performance of the droplet discharge head during maintenance work is improved.

從前,作為使用機能液對基板進行描繪的裝置,已知將該機能液作為液滴吐出的噴墨方式的液滴吐出裝置。液滴吐出裝置,在製造例如有機EL裝置、彩色濾光器、液晶顯示裝置、電漿顯示器(PDP裝置)、電子放出裝置(FED裝置、SED裝置)等電光學裝置(平面顯示器:FPD)時等被廣泛地利用。Conventionally, as an apparatus for drawing on a substrate using a functional liquid, an inkjet liquid droplet discharge device that discharges the functional liquid as droplets is known. Droplet discharge device, when manufacturing electro-optical devices (flat panel displays: FPD) such as organic EL devices, color filters, liquid crystal display devices, plasma displays (PDP devices), electron emission devices (FED devices, SED devices) etc. are widely used.

一般的噴墨方式的液滴吐出裝置,具備具有吐出機能液的液滴的液滴吐出頭的載架、搭載工件的工件載台、及沿著印刷方向使工件載台移動的移動機構。接著,藉由使工件載台相對於載架移動,同時從液滴吐出頭對在工件上預先形成的區塊吐出機能液,對工件進行描繪。A general inkjet droplet discharge device includes a carriage having a droplet discharge head that discharges droplets of a functional liquid, a workpiece stage on which a workpiece is placed, and a moving mechanism that moves the workpiece stage along the printing direction. Next, the workpiece is drawn by moving the workpiece stage relative to the carrier while discharging the functional liquid from the droplet discharge head to the blocks formed in advance on the workpiece.

重複進行上述那種描繪處理時,因機能液的成份析出等原因,會有在液滴吐出頭的吐出噴嘴附著固形物的情形。在吐出噴嘴附著固形物的情形,會產生吐出的液滴的彎曲及噴嘴阻塞等,無法使機能液對區塊適切地彈著。因此,在從前的液滴吐出裝置中,會設置以擦拭片擦拭液滴吐出頭的噴嘴面的擦拭單元,定期實施液滴吐出頭的維護。When the drawing process described above is repeated, solid matter may adhere to the discharge nozzles of the droplet discharge head due to precipitation of components of the functional fluid or the like. When solid matter adheres to the discharge nozzle, deflection of the discharged liquid droplet, clogging of the nozzle, etc. occur, and the functional fluid cannot be properly bounced to the block. Therefore, in the conventional droplet discharge apparatus, a wiping unit for wiping the nozzle surface of the droplet discharge head with a wiping sheet is provided, and the maintenance of the droplet discharge head is performed periodically.

專利文獻1記載的液滴吐出裝置中,在進行液滴吐出頭的維護時,會實施以含侵洗淨液的擦拭片擦拭噴嘴面的第1擦拭動作、及以未含侵洗淨液的擦拭片擦拭噴嘴面的第2擦拭動作。但是,因為僅以噴嘴面的擦拭除去液滴吐出頭的吐出噴嘴內的固形物是困難的,在液滴吐出頭的清理性能的觀點上有改善的餘地。In the droplet discharge device described in Patent Document 1, when performing maintenance of the droplet discharge head, the first wiping action of wiping the nozzle surface with a wiper sheet containing infiltrated cleaning solution and the first wiping operation with a wiper sheet not containing infiltrated cleaning solution are performed. The second wiping operation in which the wiping sheet wipes the nozzle surface. However, since it is difficult to remove solid matter in the discharge nozzle of the droplet discharge head only by wiping the nozzle surface, there is room for improvement from the viewpoint of cleaning performance of the droplet discharge head.

因此,本揭示的技術使維護工程中的液滴吐出頭的清理性能提升。Therefore, the technique disclosed herein improves the cleaning performance of the droplet discharge head during maintenance work.

以下,參照圖式說明有關本實施形態的液滴吐出裝置及液滴吐出方法。此外,在本說明書及圖式中,關於具有實質上相同的機能構造的要素,附加相同符號省略重複說明。Hereinafter, the droplet discharge device and the droplet discharge method according to the present embodiment will be described with reference to the drawings. In addition, in this specification and drawing, about the element which has substantially the same functional structure, the same code|symbol is attached|subjected, and repeated description is abbreviate|omitted.

<液滴吐出裝置的構造> 首先,參照圖1及圖2說明有關本實施形態的液滴吐出裝置的構造。圖1為示意表示液滴吐出裝置1的構造的概略的側視圖。圖2為示意表示液滴吐出裝置1的構造的概略的平面圖。此外,在以下,將工件W的主掃描方向設為X軸方向、與主掃描方向垂直的副掃描方向設為Y軸方向、與X軸方向及Y軸方向垂直的鉛直方向設為Z軸方向、繞Z軸方向旋轉的轉動方向設為θ方向。 <Structure of droplet discharge device> First, the structure of the droplet discharge device according to this embodiment will be described with reference to FIGS. 1 and 2 . FIG. 1 is a schematic side view schematically showing the structure of a droplet discharge device 1 . FIG. 2 is a plan view schematically showing the outline of the structure of the droplet discharge device 1 . In addition, in the following, the main scanning direction of the workpiece W is referred to as the X-axis direction, the sub-scanning direction perpendicular to the main scanning direction is referred to as the Y-axis direction, and the vertical direction perpendicular to the X-axis direction and the Y-axis direction is referred to as the Z-axis direction. , The direction of rotation around the Z-axis direction is set as the θ direction.

液滴吐出裝置1具有在主掃描方向(Y軸方向)延伸並使工件W在主掃描方向移動的X軸載台10、及以跨越X軸載台10的方式架設並在副掃描方向(Y軸方向)延伸的一對Y軸載台11、11。在X軸載台10的上面,一對X軸導引軌道12、12在X軸方向延伸設置,在各X軸導引軌道12設有X軸線性馬達(圖未示)。在Y軸載台11的上面,Y軸導引軌道13在Y軸方向延伸設置,在該Y軸導引軌道13設有Y軸線性馬達(圖未示)。The droplet discharge device 1 has an X-axis stage 10 extending in the main scanning direction (Y-axis direction) and moving the workpiece W in the main scanning direction, and an X-axis stage 10 that is erected across the X-axis stage 10 and moves in the sub-scanning direction (Y-axis direction). A pair of Y-axis stages 11, 11 extending in the direction of the axis. On the top of the X-axis stage 10, a pair of X-axis guide rails 12, 12 are extended in the X-axis direction, and an X-axis linear motor (not shown) is provided on each X-axis guide rail 12 . On the upper surface of the Y-axis stage 11, a Y-axis guide rail 13 is extended in the Y-axis direction, and a Y-axis linear motor (not shown) is provided on the Y-axis guide rail 13 .

在一對Y軸載台11、11設有載架單元20及攝像單元30。在X軸載台10上設有工件載台40、沖洗單元50、及吐出檢查單元60。工件載台40、沖洗單元50、及吐出檢查單元60在X軸方向依序配置。在X軸載台10的外側(Y軸負方向側),一對Y軸載台11、11之間設有維護單元80。以下,詳述關於各單元。A carriage unit 20 and an imaging unit 30 are provided on a pair of Y-axis stages 11 and 11 . A workpiece stage 40 , a flushing unit 50 , and a discharge inspection unit 60 are provided on the X-axis stage 10 . The workpiece stage 40, the flushing unit 50, and the discharge inspection unit 60 are arranged sequentially in the X-axis direction. A maintenance unit 80 is provided between the pair of Y-axis stages 11 , 11 on the outer side of the X-axis stage 10 (the Y-axis negative direction side). Hereinafter, each unit will be described in detail.

載架單元20在Y軸載台11設置複數個,例如10個。各載架單元20具有載架平板21、載架轉動機構22、載架23、及液滴吐出頭24。A plurality of carriage units 20 , for example ten, are provided on the Y-axis stage 11 . Each carrier unit 20 has a carrier plate 21 , a carrier rotating mechanism 22 , a carrier 23 , and a droplet discharge head 24 .

載架平板21安裝於Y軸導引軌道13,藉由設於該Y軸軌道軌道13的Y軸線性馬達在Y軸方向移動自如。此外,也能將複數載架平板21作為一體而在Y軸方向移動。The carrier plate 21 is installed on the Y-axis guide rail 13 , and can move freely in the Y-axis direction by a Y-axis linear motor provided on the Y-axis rail 13 . In addition, it is also possible to move the plurality of carrier plates 21 in the Y-axis direction as a whole.

在載架平板21下面的中央設置載架轉動機構22,在該載架轉動機構22的下端部將載架23以裝卸自如的方式安裝。載架23藉由載架轉動機構22在θ方向轉動自如。此外,在工件載台40設置攝像載架23的載架對準攝影機(圖未示)。接著,基於以載架對準攝影機攝像到的影像,藉由載架轉動機構22,補正載架23的θ方向的位置。A carrier rotating mechanism 22 is provided at the center of the lower surface of the carrier plate 21 , and a carrier 23 is detachably attached to the lower end of the carrier rotating mechanism 22 . The carrier 23 is rotatable in the θ direction by the carrier rotating mechanism 22 . In addition, a carrier alignment camera (not shown) of an imaging carrier 23 is provided on the workpiece carrier 40 . Then, based on the image captured by the camera aligned with the carrier, the position of the carrier 23 in the θ direction is corrected by the carrier rotating mechanism 22 .

在載架23的下面,複數液滴吐出頭24在X軸方向排列設置。本實施形態中,例如在X軸方向設置3個、在Y軸方向設置2個,亦即合計設置6個液滴吐出頭24。在液滴吐出頭24的下面(亦即噴嘴面24a)形成複數吐出噴嘴(圖未示),從該吐出噴嘴吐出機能液的液滴。On the lower surface of the carriage 23, a plurality of droplet discharge heads 24 are arranged side by side in the X-axis direction. In this embodiment, for example, three droplet discharge heads 24 are provided in the X-axis direction and two are provided in the Y-axis direction, that is, a total of six droplet discharge heads 24 are provided. A plurality of discharge nozzles (not shown) are formed on the lower surface of the droplet discharge head 24 (that is, the nozzle surface 24 a ), and droplets of the functional liquid are discharged from the discharge nozzles.

吐出至液滴吐出頭24的機能液從處理液供應部25供應。處理液供應部25,具有供應墨水等機能液的機能液供應源26a、成為該機能液的流路的機能液供應管26b、供應作為第1洗淨液的機能液的溶劑的溶劑供應源27a、成為該溶劑的流路的溶劑供應管27b、供應作為第2洗淨液的醇系洗淨液的醇供應源28a、及成為該醇系洗淨液的流路的醇供應管28b。此外,作為醇系洗淨液,例如使用含有由乙醇、n‐丙醇、異丙醇選擇出的1種或2種以上的有機溶劑的溶液較佳。The functional liquid discharged to the droplet discharge head 24 is supplied from the processing liquid supply unit 25 . The processing liquid supply unit 25 has a functional liquid supply source 26a for supplying a functional liquid such as ink, a functional liquid supply tube 26b serving as a flow path of the functional liquid, and a solvent supply source 27a for supplying a solvent of the functional liquid as the first cleaning liquid. , a solvent supply pipe 27b serving as a flow path for the solvent, an alcohol supply source 28a for supplying an alcohol-based cleaning liquid as a second cleaning liquid, and an alcohol supply pipe 28b serving as a flow path for the alcohol-based cleaning liquid. In addition, as the alcohol-based cleaning solution, for example, a solution containing one or two or more organic solvents selected from ethanol, n-propanol, and isopropanol is preferably used.

機能液供應管26b、溶劑供應管27b及醇供應管28b的各配管連接至合流配管29。對合流配管29,藉由以後述控制部150適宜開關控制上述各配管26b、27b、28b的閥門,供應機能液、該機能液的溶劑、醇系洗淨液的任一處理液。合流配管29,以能夠對載架23供應處理液的方式連接於載架單元20。此外,處理液供應部25的構造沒有特別限定,例如不設置合流配管29,而將機能液供應管26b、溶劑供應管27b及醇供應管28b的各配管直接連接至載架單元20也可以。Each of the functional liquid supply pipe 26 b , the solvent supply pipe 27 b , and the alcohol supply pipe 28 b is connected to a confluence pipe 29 . To the confluent pipe 29, the valves of the respective pipes 26b, 27b, and 28b are suitably opened and closed by the control unit 150 described later to supply any one of the functional liquid, the solvent of the functional liquid, and the alcohol-based cleaning liquid. The junction pipe 29 is connected to the carrier unit 20 so as to be able to supply the processing liquid to the carrier 23 . In addition, the structure of the processing liquid supply part 25 is not particularly limited. For example, the joint piping 29 is not provided, and each piping of the functional liquid supply pipe 26b, the solvent supply pipe 27b, and the alcohol supply pipe 28b may be directly connected to the carrier unit 20.

攝像單元30,具有作為吐出檢查用攝像部的吐出檢查攝影機31、作為描繪檢查用攝像部的描繪檢查攝影機32。吐出檢查攝影機31與描繪檢查攝影機32,包夾載架23(液滴吐出頭24)在X軸方向對向設置。吐出檢查攝影機31,相對於載架23配置於X軸正方向側(亦即沖洗單元50側)。描繪檢查攝影機32,相對於載架23配置於X軸負方向側(亦即工件載台40側)。The imaging unit 30 has a discharge inspection camera 31 as an imaging unit for discharge inspection, and a drawing inspection camera 32 as an imaging unit for drawing inspection. The discharge inspection camera 31, the drawing inspection camera 32, and the clamping carriage 23 (droplet discharge head 24) are arranged facing each other in the X-axis direction. The discharge inspection camera 31 is arranged on the side in the positive direction of the X-axis (that is, on the side of the washing unit 50 ) with respect to the carriage 23 . The drawing inspection camera 32 is arranged on the X-axis negative direction side (that is, on the workpiece stage 40 side) with respect to the carriage 23 .

吐出檢查攝影機31,攝像吐出檢查單元60對後述檢查片62檢查吐出的液滴的彈著點。吐出檢查攝影機31,支持於設在一對Y軸載台11、11之中的X軸正方向側的Y軸載台11的側面的基底33。在基底33設置使吐出檢查攝影機31移動的移動機構(圖未示),吐出檢查攝影機31在Y軸方向移動自如。接著,在吐出檢查攝影機31於Y軸方向移動的軌跡的正下方,導引吐出檢查單元60時,吐出檢查攝影機31,藉由在Y軸方向移動,能夠攝影在配置於吐出檢查單元60的檢查片62彈著的液滴。The discharge inspection camera 31 and the imaging discharge inspection unit 60 inspect the impact point of the discharged liquid droplet on the inspection sheet 62 described later. The discharge inspection camera 31 is supported by a base 33 provided on the side surface of the Y-axis stage 11 on the positive X-axis direction side among the pair of Y-axis stages 11 , 11 . A movement mechanism (not shown) for moving the discharge inspection camera 31 is provided on the base 33, and the discharge inspection camera 31 is movable in the Y-axis direction. Next, when the discharge inspection unit 60 is guided right under the trajectory where the discharge inspection camera 31 moves in the Y-axis direction, the discharge inspection camera 31 can photograph the inspections arranged in the discharge inspection unit 60 by moving in the Y-axis direction. Sheet 62 bounces off the droplet.

描繪檢查攝影機32,攝像對工件W吐出的液滴所致的描繪狀態。描繪檢查攝影機32,支持於設在一對Y軸載台11、11之中的X軸負方向側的Y軸載台11的側面的基底34。在基底34設置使描繪檢查攝影機32移動的移動機構(圖未示),描繪檢查攝影機32在Y軸方向移動自如。接著,在吐出檢查攝影機31於Y軸方向移動的軌跡的正下方,導引工件載台40時,描繪檢查攝影機32,在Y軸方向移動,能夠攝影對工件載台40的工件W吐出的液滴所致的圖案等的描繪狀態。The drawing inspection camera 32 images the drawing state of the workpiece W by the liquid droplets discharged. The drawing inspection camera 32 is supported by a base 34 provided on the side surface of the Y-axis stage 11 on the negative side of the X-axis direction among the pair of Y-axis stages 11 , 11 . A movement mechanism (not shown) for moving the drawing inspection camera 32 is provided on the base 34, and the drawing inspection camera 32 can move freely in the Y-axis direction. Next, when the workpiece stage 40 is guided directly under the track where the discharge inspection camera 31 moves in the Y-axis direction, the drawing inspection camera 32 moves in the Y-axis direction, and the liquid discharged to the workpiece W on the workpiece stage 40 can be photographed. Drawing status of patterns etc. caused by drops.

工件載台40例如為真空吸附載台,將工件W吸附載置。工件載台40,藉由設於該工件載台4的下面側的載台轉動機構41,在θ方向以旋轉自如的方式被支持。此外,在Y軸載台11的X軸負方向側,工件載台40的上方,設置攝像工件載台40上的工件W的對準標記的工件對準攝影機(圖未示)。接著,基於工件對準攝影機攝像到的影像,藉由載台轉動機構41,補正載置於工件載台40的工件W的θ方向的位置。The workpiece stage 40 is, for example, a vacuum suction stage, and places the workpiece W by suction. The workpiece stage 40 is rotatably supported in the θ direction by a stage rotation mechanism 41 provided on the lower surface side of the workpiece stage 4 . In addition, on the negative X-axis side of the Y-axis stage 11 , above the workpiece stage 40 , a workpiece alignment camera (not shown) that captures the alignment marks of the workpiece W on the workpiece stage 40 is installed. Next, based on the image captured by the workpiece alignment camera, the position of the workpiece W placed on the workpiece stage 40 in the θ direction is corrected by the stage rotation mechanism 41 .

工件載台40與載台移動機構41,被支持於設於載台轉動機構41的下面側的第1X軸滑動器42。第1X軸滑動器42安裝於X軸導引軌道12,藉由設於該X軸導引軌道12的X軸線性馬達在X軸方向移動自如。接著,工件載台40(工件W)也藉由設於第1X軸滑動器42沿著X軸導引軌道12在X軸方向移動自如。The workpiece stage 40 and the stage moving mechanism 41 are supported by a first X-axis slider 42 provided on the lower surface side of the stage rotating mechanism 41 . The first X-axis slider 42 is attached to the X-axis guide rail 12 , and is movable in the X-axis direction by an X-axis linear motor provided on the X-axis guide rail 12 . Next, the workpiece stage 40 (workpiece W) is also movable in the X-axis direction along the X-axis guide rail 12 by the first X-axis slider 42 provided therein.

沖洗單元50為接收來自液滴吐出頭24的捨棄吐出的單元。在沖洗單元50,在Y軸方向排列設置複數個(例如10個)沖洗回收台51。該沖洗回收台51之數與載架23之數相同。The flushing unit 50 is a unit that receives discarded discharge from the droplet discharge head 24 . In the rinse unit 50, a plurality of (for example, ten) rinse recovery stations 51 are arranged in line in the Y-axis direction. The number of the flushing recovery stations 51 is the same as the number of the carriers 23 .

沖洗回收台51其上面開口,在被導引至沖洗回收台51所對應的載架23正下方時,從載架23的液滴吐出頭24吐出(沖洗)液滴,接住該液滴而收容之。亦即,在對工件W以液滴進行描繪前進行沖洗動作,將基於該沖洗的液滴以沖洗回收台51來回收。The flush recovery station 51 has an opening on its upper surface, and when it is guided to directly below the carrier 23 corresponding to the flush recovery station 51, a droplet is ejected (rinsed) from the droplet discharge head 24 of the carrier 23, and the droplet is caught and released. Take it in. That is, before the workpiece W is drawn with liquid droplets, a rinsing operation is performed, and the liquid droplets resulting from the rinsing are recovered by the rinsing recovery station 51 .

吐出檢查單元60為接收來自液滴吐出頭24的檢查吐出的單元。在吐出檢查單元60設置在Y軸方向延伸的檢查台61。在檢查台61的上面,配置於表面施予薄膜塗佈的檢查片62。配置於檢查台61的檢查片62,在檢查台61被導引至液滴吐出頭24的正下方時,彈著從液滴吐出頭24吐出的液滴。The discharge inspection unit 60 is a unit that receives inspection discharge from the droplet discharge head 24 . An inspection table 61 extending in the Y-axis direction is provided on the discharge inspection unit 60 . On the upper surface of the inspection table 61, an inspection piece 62 on which a thin film coating is applied is disposed. The inspection piece 62 disposed on the inspection table 61 bounces the liquid droplets discharged from the liquid droplet discharge heads 24 when the inspection table 61 is guided directly under the liquid droplet discharge heads 24 .

沖洗單元50與吐出檢查單元60搭載於第2X軸滑動器70。第2X軸滑動器70安裝於X軸導引軌道12,藉由設於該X軸導引軌道12的X軸線性馬達在X軸方向移動自如。接著,沖洗單元50與吐出檢查單元60也藉由第2X軸滑動器70沿著X軸導引軌道12在X軸方向移動自如。The flushing unit 50 and the discharge inspection unit 60 are mounted on the second X-axis slider 70 . The second X-axis slider 70 is attached to the X-axis guide rail 12 , and is movable in the X-axis direction by an X-axis linear motor provided on the X-axis guide rail 12 . Next, the flushing unit 50 and the discharge inspection unit 60 are also freely movable in the X-axis direction along the X-axis guide rail 12 by the second X-axis slider 70 .

維護單元80,進行液滴吐出頭24的維護,解消該液滴吐出頭24的吐出不良。維護單元80,具有作為擦拭液滴吐出頭24的噴嘴面24a的擦拭部的擦拭單元90、及作為進行液滴吐出頭24的吸引的吸引部的吸引單元110。擦拭單元90與吸引單元110,從X軸載台10側依序在Y軸方向排列配置。又,擦拭單元90與吸引單元110,配置於載架23的下方。The maintenance unit 80 performs maintenance of the droplet discharge head 24 and resolves a discharge failure of the droplet discharge head 24 . The maintenance unit 80 includes a wiping unit 90 as a wiping unit for wiping the nozzle surface 24 a of the droplet discharge head 24 , and a suction unit 110 as a suction unit for suctioning the droplet discharge head 24 . The wiping unit 90 and the suction unit 110 are sequentially arranged in the Y-axis direction from the X-axis stage 10 side. In addition, the wiping unit 90 and the suction unit 110 are arranged below the carriage 23 .

擦拭單元90,為擦拭在液滴吐出頭24中形成複數吐出噴嘴的噴嘴面24a的單元。擦拭單元90具有擦拭滾輪91。接著,載架23被導引至擦拭單元90的上方時,擦拭滾輪91與載架23的液滴吐出頭24的噴嘴面24a接觸,擦拭該噴嘴面24a。The wiping unit 90 is a unit for wiping the nozzle surface 24 a of the plurality of discharge nozzles formed in the droplet discharge head 24 . The wiping unit 90 has a wiping roller 91 . Next, when the carriage 23 is guided above the wiping unit 90 , the wiping roller 91 comes into contact with the nozzle surface 24 a of the droplet discharge head 24 of the carriage 23 to wipe the nozzle surface 24 a.

在此更詳細說明關於擦拭單元90的構造。   圖3為示意地表示擦拭單元90的構造的概略的側面圖。擦拭單元90,作為擦拭液滴吐出頭24的噴嘴面24a的擦拭機構,具有送出乾燥後的擦拭片92的送出捲軸93、導引滾輪94、前述擦拭滾輪91、捲取擦拭片92的捲取捲軸95。擦拭片92,例如是由聚酯纖維或聚丙烯纖維形成的片或綿布、或者由聚酯纖維與聚醯胺的層積構造的纖維形成的片。此外,用於噴嘴面24a的擦拭的擦拭構件,不限於擦拭片92那種片狀構件。The configuration of the wiping unit 90 is described in more detail herein. FIG. 3 is a schematic side view schematically showing the structure of the wiping unit 90. The wiping unit 90, as a wiping mechanism for wiping the nozzle surface 24a of the droplet discharge head 24, has a delivery reel 93 for sending out the dried wiping sheet 92, a guide roller 94, the aforementioned wiping roller 91, and a winding for the wiping sheet 92. Scroll 95. The wiping sheet 92 is, for example, a sheet or cotton cloth formed of polyester fibers or polypropylene fibers, or a sheet formed of fibers having a laminated structure of polyester fibers and polyamide. In addition, the wiping member used for wiping the nozzle surface 24a is not limited to a sheet-like member such as the wiping sheet 92 .

擦拭滾輪91,相對於液滴吐出頭24的噴嘴面24a以升降自如設置。進行噴嘴面24a的擦拭時,擦拭滾輪91相對於噴嘴面24a上升,在噴嘴面24a按壓擦拭片92,以擦拭噴嘴面24a。此外,進行噴嘴面24a的擦拭時,藉由使載架23下降,將噴嘴面24a按壓至擦拭片92也可以。亦即,使噴嘴面24a與擦拭片92相互接觸的擦拭機構的構造沒有特別限定,例如適用公知的構造也可以。The wiping roller 91 is provided so as to be able to move up and down with respect to the nozzle surface 24 a of the droplet discharge head 24 . When wiping the nozzle surface 24a, the wiping roller 91 rises with respect to the nozzle surface 24a, presses the wiping piece 92 on the nozzle surface 24a, and wipes the nozzle surface 24a. In addition, when wiping the nozzle surface 24 a , the nozzle surface 24 a may be pressed against the wiping sheet 92 by lowering the carrier 23 . That is, the structure of the wiping mechanism which brings the nozzle face 24a and the wiping sheet 92 into contact with each other is not particularly limited, and a known structure may be applied, for example.

在擦拭滾輪91與導引滾輪94之間,設置對擦拭片92供應洗淨液的洗淨液供應部96。洗淨液供應部96,具有供應作為第1洗淨液的機能液的溶劑的溶劑供應源97a、成為該溶劑的流路的溶劑供應管97b、供應作為第2洗淨液的醇系洗淨液的醇供應源98a、成為該醇系洗淨液的流路的醇供應管98b、供應作為第3洗淨液的將水作為主成份的洗淨液的水供應源99a、及成為將該水作為主成份的洗淨液的流路的水供應管99b。此外,作為醇系洗淨液,與供應至前述液滴吐出頭24的醇系洗淨液一樣,例如使用含有由乙醇、n‐丙醇、異丙醇選擇出的1種或2種以上的有機溶劑的溶液較佳。作為以水為主成份的洗淨液,例如使用純水較佳。Between the wiping roller 91 and the guide roller 94 , a cleaning liquid supply part 96 for supplying cleaning liquid to the wiping sheet 92 is provided. The cleaning liquid supply unit 96 has a solvent supply source 97a for supplying a solvent as a functional liquid of the first cleaning liquid, a solvent supply pipe 97b serving as a flow path of the solvent, and an alcohol-based cleaning solution for supplying the second cleaning liquid. Alcohol supply source 98a for liquid, alcohol supply pipe 98b for the flow path of the alcohol-based cleaning solution, water supply source 99a for supplying cleaning solution having water as the main component as the third cleaning solution, and the The water supply pipe 99b is a flow path of the cleaning liquid whose main component is water. In addition, as the alcohol-based cleaning liquid, the same as the alcohol-based cleaning liquid supplied to the droplet discharge head 24, for example, one or more selected from ethanol, n-propanol, and isopropanol is used. A solution in an organic solvent is preferred. As the cleaning solution mainly composed of water, for example, pure water is preferably used.

溶劑供應管97b、醇供應管98b及水供應管99b的各配管連接至合流配管100。對合流配管100,藉由以後述控制部150適宜開關控制上述各配管97b、98b、99b的閥門,供應機能液的溶劑、醇系洗淨液、以水為主成份的洗淨液的任一者的洗淨液。合流配管100連接至對擦拭片92吐出洗淨液的洗淨液吐出噴嘴101。洗淨液吐出噴嘴101,在X軸方向複數設置,藉由從各洗淨液吐出噴嘴101吐出的洗淨液,能夠使向擦拭滾輪91送出的擦拭片92的X軸方向全域濕濡。Each of the solvent supply pipe 97 b , the alcohol supply pipe 98 b , and the water supply pipe 99 b is connected to a confluence pipe 100 . To the confluent piping 100, any one of the solvent of the functional liquid, the alcohol-based cleaning liquid, and the cleaning liquid mainly composed of water is supplied by appropriately opening and closing the valves of the above-mentioned piping 97b, 98b, and 99b by the control unit 150 described later. detergent for the patient. The junction pipe 100 is connected to a cleaning liquid discharge nozzle 101 that discharges cleaning liquid to the wiper sheet 92 . Cleaning liquid discharge nozzles 101 are provided in plural in the X-axis direction, and the entire area in the X-axis direction of the wiping sheet 92 fed to the wiping roller 91 can be wetted by the cleaning liquid discharged from each cleaning liquid discharge nozzle 101 .

此外,洗淨液供應部96的構造沒有特別限定,例如不設置合流配管100,而將溶劑供應管97b、醇供應管98b及水供應管99b的各配管直接連接至洗淨液吐出噴嘴101也可以。又,例如,各洗淨液吐出噴嘴101,使每個噴嘴在不同的時機吐出洗淨液也可以。藉此,能使洗淨液所致的擦拭,僅對複數液滴吐出頭24之中一部分的液滴吐出頭24進行。In addition, the structure of the cleaning liquid supply part 96 is not particularly limited. For example, the pipes of the solvent supply pipe 97b, the alcohol supply pipe 98b, and the water supply pipe 99b are directly connected to the cleaning liquid discharge nozzle 101 without providing the confluent pipe 100. Can. Also, for example, the cleaning liquid discharge nozzles 101 may discharge the cleaning liquid at different timings for each nozzle. Thereby, wiping with the cleaning liquid can be performed on only some of the droplet discharge heads 24 among the plurality of droplet discharge heads 24 .

吸引單元110為從液滴吐出頭24吸引處理液的單元。在吸引單元110,在Y軸方向排列設置複數個(例如10個)分割吸引單元111。該分割吸引單元111之數與載架23之數相同。各分割吸引單元111,吸引對應的載架23的液滴吐出頭24,從該液滴吐出頭24的吐出噴嘴(圖未示)使處理液強制排出。又,各分割吸引單元111,在液滴吐出裝置1為停止狀態時,與液滴吐出頭24的噴嘴面24a密著抑制處理液的乾燥。The suction unit 110 is a unit for suctioning the processing liquid from the droplet discharge head 24 . In the suction unit 110, a plurality of (for example, 10) divided suction units 111 are arranged in line in the Y-axis direction. The number of the divided suction units 111 is the same as the number of the carriages 23 . Each divided suction unit 111 sucks the liquid droplet discharge head 24 of the corresponding carrier 23 and forcibly discharges the processing liquid from the discharge nozzles (not shown) of the liquid droplet discharge head 24 . Further, each divided suction unit 111 is in close contact with the nozzle surface 24a of the droplet discharge head 24 to suppress drying of the treatment liquid when the droplet discharge device 1 is in a stopped state.

又,液滴吐出頭24進行填充的機能液的吸引時,將前述圖1所示的機能液供應管26b與醇供應管28b的閥門關閉,在僅開放溶劑供應管27b的閥門的狀態下進行吸引時,溶劑被吸入液滴吐出頭24。藉此,在液滴吐出頭24填充溶劑,能夠將吸引前填充至液滴吐出頭24的機能液置換成溶劑。同樣,將機能液供應管26b與溶劑供應管27b的閥門關閉,在僅開放醇供應管28b的閥門的狀態下進行吸引時,能夠將填充至液滴吐出頭24的溶劑置換成醇。此外,這種處理液的置換,使用其他機構實現,而非吸引單元110所致的吸引也可以。In addition, when the droplet discharge head 24 sucks the functional liquid filled, the valves of the functional liquid supply pipe 26b and the alcohol supply pipe 28b shown in FIG. 1 are closed, and only the valve of the solvent supply pipe 27b is opened. During suction, the solvent is sucked into the droplet discharge head 24 . Thereby, the droplet discharge head 24 is filled with a solvent, and the functional liquid filled in the droplet discharge head 24 before suction can be replaced with the solvent. Similarly, when suction is performed with the valves of the functional liquid supply pipe 26b and the solvent supply pipe 27b closed and only the valve of the alcohol supply pipe 28b opened, the solvent filled in the droplet discharge head 24 can be replaced with alcohol. In addition, such replacement of the treatment liquid may be realized by using other means instead of suction by the suction unit 110 .

在以上的液滴吐出裝置1設有控制部150。控制部150為例如具備CPU及記憶體等的電腦,具有資料儲存部(圖未示)。在資料儲存部中,儲存有例如控制對工件W吐出的液滴,而用以對該工件W描繪預定圖案的描繪資料(位元對映資料)等。又,控制部150具有程式儲存部(圖未示)。在程式儲存部中,儲存有控制液滴吐出裝置1中的各種處理的程式及控制驅動系統的動作的程式等。此外,上述程式為記錄於電腦可讀取的記憶媒體中者,為從該記憶媒體安裝至控制部150者也可以。記憶媒體可以是暫時記憶媒體或非暫時記憶媒體。程式的一部或全部以專用硬體(電路基板)實現也可以。The control unit 150 is provided in the above-mentioned droplet discharge device 1 . The control unit 150 is, for example, a computer including a CPU and a memory, and has a data storage unit (not shown). The data storage unit stores, for example, drawing data (bit-mapped data) for drawing a predetermined pattern on the workpiece W by controlling liquid droplets discharged on the workpiece W, and the like. In addition, the control unit 150 has a program storage unit (not shown). The program storage unit stores programs for controlling various processes in the droplet discharge device 1 , programs for controlling the operation of the drive system, and the like. In addition, the above-mentioned program is recorded in a computer-readable storage medium, and may be installed to the control unit 150 from the storage medium. Memory media can be either temporary memory media or non-transitory memory media. A part or all of the program may be realized by dedicated hardware (circuit board).

<液滴吐出裝置中的工件處理> 接著,說明有關利用如以上的方式構成的液滴吐出裝置1進行的工件處理。在以下說明中,在X軸載台10上,將比Y軸載台11還靠X軸負方向側的區域稱為搬入出區域A1,將一對Y軸載台11、11間的區域稱為處理區域A2,將比Y軸載台11還靠X軸正方向側的區域稱為待機區域A3。又,將X軸載台10的Y軸負方向側,一對Y軸載台11、11間的區域稱為維護區域A4。 <Workpiece handling in droplet discharge device> Next, the workpiece processing performed by the droplet discharge apparatus 1 configured as above will be described. In the following description, on the X-axis stage 10, the area on the negative side of the X-axis direction relative to the Y-axis stage 11 is referred to as the carry-in/out area A1, and the area between the pair of Y-axis stages 11 and 11 is referred to as For the processing area A2, the area on the positive X-axis direction side of the Y-axis stage 11 is referred to as a standby area A3. Also, the area between the pair of Y-axis stages 11 and 11 on the Y-axis negative direction side of the X-axis stage 10 is referred to as a maintenance area A4.

首先,在搬入出區域A1配置工件載台40,藉由搬送機構(圖未示)搬入至液滴吐出裝置1的工件W被載置於該工件載台40。接著,藉由工件對準攝影機(圖未示)攝像工件載台40上的工件W的對準標記。接著,基於該攝像到的影像,藉由載台轉動機構41,補正載置於工件載台40的工件W的θ方向的位置,進行工件W的對準(步驟S1)。First, a workpiece stage 40 is arranged in the loading and unloading area A1 , and the workpiece W carried into the droplet discharge device 1 by a transport mechanism (not shown) is placed on the workpiece stage 40 . Next, the alignment mark of the workpiece W on the workpiece stage 40 is photographed by a workpiece alignment camera (not shown in the figure). Next, based on the imaged image, the position of the workpiece W placed on the workpiece stage 40 in the θ direction is corrected by the stage rotation mechanism 41 to perform alignment of the workpiece W (step S1 ).

之後,藉由第1X軸滑動器42,使工件載台40從搬入出區域A1移動至處理區域A2。在處理區域A2,對移動至液滴吐出頭24下方的工件W,從該液滴吐出頭24吐出液滴。再來,如圖4所示以使工件W的全面通過液滴吐出頭24的下方的方式,使工件載台40再移動至待機區域A3側。接著,使工件W在X軸方向返復移動,並適宜地使載架單元20在Y軸方向移動,對工件W描繪預定的圖案(步驟S2)。Thereafter, the workpiece stage 40 is moved from the carry-in/out area A1 to the processing area A2 by the first X-axis slider 42 . In the processing area A2 , liquid droplets are discharged from the droplet discharge head 24 to the workpiece W that has moved below the droplet discharge head 24 . Next, as shown in FIG. 4 , the workpiece stage 40 is moved to the standby area A3 side so that the entire surface of the workpiece W passes under the droplet discharge head 24 . Next, the workpiece W is moved back and forth in the X-axis direction, and the carrier unit 20 is moved in the Y-axis direction as appropriate to draw a predetermined pattern on the workpiece W (step S2).

之後,如圖5所示使工件載台40從待機區域A3移動至搬入出區域A1。在該工件載台40的移動中,使描繪檢查攝影機32適宜地在Y軸方向移動,藉由該描繪檢查攝影機32攝像工件載台40上的工件W的全面(亦即攝像對工件W吐出的液滴所致的圖案的描繪狀態)。攝像到的影像被輸出至控制部150,控制部150基於攝像到的影像,檢查描繪狀態的不良,例如膜虹斑等。在該檢查結果中,判定成描繪狀態不良的情形,例如將來自液滴吐出頭24的液滴的吐出等進行回饋控制(步驟S3)。Thereafter, as shown in FIG. 5 , the workpiece stage 40 is moved from the standby area A3 to the loading and unloading area A1 . During the movement of the workpiece stage 40, the drawing inspection camera 32 is appropriately moved in the Y-axis direction, and the entire surface of the workpiece W on the workpiece stage 40 is captured by the drawing inspection camera 32 (that is, the portion of the workpiece W ejected is imaged). drawing state of the pattern caused by the droplet). The captured video is output to the control unit 150 , and the control unit 150 checks for defects in the drawing state, such as iris spots, based on the captured video. As a result of this inspection, if it is determined that the drawing state is poor, for example, feedback control is performed on the discharge of liquid droplets from the liquid droplet discharge head 24 (step S3 ).

工件載台40移動至搬入出區域A1後,結束描繪處理的工件W被從液滴吐出裝置1搬出。接著,下個工件W被搬入至液滴吐出裝置1,進行上述步驟S1的工件W的對準(步驟S4)。After the workpiece stage 40 moves to the loading and unloading area A1 , the workpiece W whose drawing process has been completed is carried out from the droplet discharge device 1 . Next, the next workpiece W is carried into the liquid droplet discharge device 1, and the alignment of the workpiece W in the above-mentioned step S1 is performed (step S4).

以此方式進行步驟S3中的描繪狀態的檢查與步驟S4中的工件W的搬入出的期間,如圖5所示與工件載台40的移動一同藉由第2X軸滑動器70,使沖洗單元50與吐出檢查單元60從待機區域A3移動至處理區域A2。在處理區域A2,將吐出檢查單元60的檢查片62配置於液滴吐出頭24的下方,對該檢查片62從液滴吐出頭24將液滴檢查吐出(步驟S5)In this way, during the inspection of the drawing state in step S3 and the loading and unloading of the workpiece W in step S4, as shown in FIG. 50 and the discharge inspection unit 60 move from the standby area A3 to the processing area A2. In the processing area A2, the inspection sheet 62 of the discharge inspection unit 60 is arranged below the droplet discharge head 24, and the droplet is inspected and discharged from the droplet discharge head 24 on the inspection sheet 62 (step S5)

之後,如圖6所示使沖洗單元50與吐出檢查單元60向X軸正方向側移動,將吐出檢查單元60的檢查片62配置於吐出檢查攝影機31的下方,並將沖洗單元50的沖洗回收台51配置於液滴吐出頭24的下方。Afterwards, as shown in FIG. 6 , the washing unit 50 and the discharge inspection unit 60 are moved to the positive side of the X-axis, the inspection piece 62 of the discharge inspection unit 60 is arranged below the discharge inspection camera 31 , and the rinse unit 50 is recovered. The stage 51 is arranged below the droplet discharge head 24 .

接著,使吐出檢查攝影機31適宜地在Y軸方向移動,藉由該吐出檢查攝影機31攝像對檢查片62檢查吐出的液滴的彈著點。攝像到的影像被輸出至控制部150,控制部150基於攝像到的影像,檢查液滴吐出頭24中的吐出噴嘴的吐出不良。在該檢查結果中,例如判定成液滴的噴嘴丟失及飛行彎曲的吐出不良的情形,藉由維護單元80進行液滴吐出頭24的維護。具體上進行吸引單元110的吸引處理與擦拭單元90的擦拭處理。又,例如判定成液滴的彈著點之徑與位置不良的情形,補正位元對映資料,將來自液滴吐出頭24的液滴的吐出進行回饋控制。Next, the discharge inspection camera 31 is appropriately moved in the Y-axis direction, and the impact point of the discharged liquid droplet is inspected on the inspection sheet 62 by the discharge inspection camera 31 . The captured video is output to the control unit 150 , and the control unit 150 checks for a discharge failure of the discharge nozzles in the droplet discharge head 24 based on the captured video. In this inspection result, for example, when it is determined that the nozzle of the droplet is missing or the ejection of the flight curve is defective, the maintenance unit 80 performs maintenance of the droplet discharge head 24 . Specifically, suction processing by the suction unit 110 and wiping processing by the wiping unit 90 are performed. Also, for example, when it is determined that the diameter and position of the impact point of the droplet are not good, the bit map data is corrected, and the droplet discharge from the droplet discharge head 24 is feedback-controlled.

又,以此方式進行吐出檢查攝影機31的攝像處理及控制部150的吐出不良檢查時,對沖洗回收台51從液滴吐出頭24進行液滴的捨棄吐出(步驟S6)。Further, when the imaging processing by the discharge inspection camera 31 and the discharge failure inspection by the control unit 150 are performed in this way, the droplet is discarded and discharged from the droplet discharge head 24 to the rinse recovery station 51 (step S6).

如同以上對各工件W進行步驟S1~S6,結束一連串的工件處理。Steps S1 to S6 are performed for each workpiece W as described above, and a series of workpiece processing ends.

又,除了這種步驟S1~S6的工件W的通常處理外,還適宜地進行維護單元80所致的液滴吐出頭24的維護。以下說明中,首先,說明關於維護工程的概要。Moreover, in addition to the normal processing of the workpiece W in steps S1 to S6, maintenance of the droplet discharge head 24 by the maintenance unit 80 is also suitably performed. In the following description, first, an outline of the maintenance process will be described.

如圖7所示,進行液滴吐出頭24的維護時,使載架單元20從處理區域A2移動至維護區域A4。維護區域A4中,首先,將各液滴吐出頭24分別配置於吸引單元110的分割吸引單元111的上方,藉由分割吸引單元111從液滴吐出頭24吸引機能液。As shown in FIG. 7 , when performing maintenance of the droplet discharge head 24 , the carriage unit 20 is moved from the processing area A2 to the maintenance area A4 . In the maintenance area A4 , first, each droplet discharge head 24 is disposed above the divided suction unit 111 of the suction unit 110 , and the functional fluid is sucked from the droplet discharge head 24 by the divided suction unit 111 .

之後,如圖8所示使載架單元20在Y軸正方向側移動,將液滴吐出頭24配置於擦拭單元90的擦拭滾輪91的上方。接著,使載架單元20移動至Y軸正方向側,同時使擦拭滾輪91接觸液滴吐出頭24的噴嘴面,擦拭該噴嘴面。Thereafter, as shown in FIG. 8 , the carriage unit 20 is moved in the positive Y-axis direction, and the droplet discharge head 24 is arranged above the wiping roller 91 of the wiping unit 90 . Next, the carriage unit 20 is moved to the Y-axis positive direction side, and at the same time, the wiper roller 91 is brought into contact with the nozzle surface of the droplet discharge head 24 to wipe the nozzle surface.

之後,結束吸引單元110的吸引處理與擦拭單元90的擦拭處理的載架單元20,從維護區域A4移動至處理區域A2,結束液滴吐出頭24的維護。Thereafter, the carriage unit 20 having completed the suction processing by the suction unit 110 and the wiping processing by the wiping unit 90 moves from the maintenance area A4 to the processing area A2, and the maintenance of the droplet discharge head 24 is completed.

接著,說明關於維護工程的詳細。圖9為表示維護工程中的控制流程的一例的圖。圖9所示之例中,機能液為墨水、第1洗淨液為墨水的溶劑、第2洗淨液為異丙醇(以下「IPA」)、第3洗淨液為純水。Next, details about the maintenance process will be described. FIG. 9 is a diagram showing an example of a control flow in a maintenance process. In the example shown in FIG. 9, the functional liquid is ink, the first cleaning liquid is ink solvent, the second cleaning liquid is isopropyl alcohol (hereinafter "IPA"), and the third cleaning liquid is pure water.

首先,使載架單元20移動至吸引單元110,進行液滴吐出頭24的吸引。此時,關閉處理液供應部25(圖1)的機能液供應管26b與醇供應管28b的閥門,僅開放溶劑供應管27b的閥門進行吸引。藉此,在液滴吐出頭24填充的墨水被置換成溶劑(步驟S100)。藉由進行從墨水向溶劑的置換,能夠使附著於液滴吐出頭24的吐出噴嘴內的固形物之中容易溶解於溶劑的固形物溶解同時向吐出噴嘴外排出。First, the carriage unit 20 is moved to the suction unit 110, and the droplet discharge head 24 is suctioned. At this time, the valves of the functional liquid supply pipe 26b and the alcohol supply pipe 28b of the treatment liquid supply part 25 ( FIG. 1 ) are closed, and only the valve of the solvent supply pipe 27b is opened for suction. Thereby, the ink filled in the droplet discharge head 24 is replaced with the solvent (step S100). By displacing the ink with the solvent, among the solids adhering to the discharge nozzles of the liquid droplet discharge head 24 , the solids that are easily dissolved in the solvent can be discharged out of the discharge nozzles while being dissolved.

接著,從擦拭單元90的洗淨液吐出噴嘴101(圖3)吐出墨水的溶劑,對擦拭片92供應墨水的溶劑。接著,使載架單元20向擦拭單元90移動,藉由以墨水的溶劑濕潤的狀態下的擦拭片92擦拭液滴吐出頭24的噴嘴面24a(步驟S101)。藉此,能夠使附著於噴嘴面24a的固形物之中容易溶解於墨水的溶劑的固形物溶解同時進行拭取。Next, the ink solvent is discharged from the cleaning liquid discharge nozzle 101 ( FIG. 3 ) of the wiping unit 90 , and the ink solvent is supplied to the wiping sheet 92 . Next, the carriage unit 20 is moved to the wiping unit 90, and the nozzle surface 24a of the droplet discharge head 24 is wiped with the wiping sheet 92 wetted with the ink solvent (step S101). Thereby, among the solid matter adhering to the nozzle surface 24a, it is possible to wipe off while dissolving the solid matter which is easily dissolved in the solvent of the ink.

之後,停止來自洗淨液吐出噴嘴101的溶劑的供應,以乾燥的擦拭片92拭取在噴嘴面24a殘留的溶劑(步驟S102)。Thereafter, the supply of the solvent from the cleaning liquid discharge nozzle 101 is stopped, and the solvent remaining on the nozzle surface 24 a is wiped off with the dry wiping sheet 92 (step S102 ).

接著,使載架單元20移動至吸引單元110,再度進行液滴吐出頭24的吸引。此時,關閉處理液供應部25(圖1)的機能液供應管26b與溶劑供應管27b的閥門,僅開放醇供應管28b的閥門進行液滴吐出頭24的吸引。藉此,在液滴吐出頭24填充的溶劑被置換成IPA(步驟S103)。藉由進行從墨水的溶劑向IPA的置換,能夠使附著於液滴吐出頭24的吐出噴嘴內的固形物之中容易溶解於IPA的固形物溶解同時向吐出噴嘴外排出。Next, the carriage unit 20 is moved to the suction unit 110, and the droplet discharge head 24 is sucked again. At this time, the valves of the functional liquid supply pipe 26b and the solvent supply pipe 27b of the processing liquid supply unit 25 ( FIG. 1 ) are closed, and only the valve of the alcohol supply pipe 28b is opened to suction the droplet discharge head 24 . Thereby, the solvent filled in the droplet discharge head 24 is replaced with IPA (step S103). By substituting the solvent of the ink with IPA, among the solids adhering to the discharge nozzles of the droplet discharge head 24 , the solids that are easily dissolved in IPA can be discharged out of the discharge nozzles while being dissolved.

接著,從擦拭單元90的洗淨液吐出噴嘴101(圖3)吐出IPA,對擦拭片92供應IPA。接著,使載架單元20向擦拭單元90移動,藉由以IPA濕潤的狀態下的擦拭片92擦拭液滴吐出頭24的噴嘴面24a(步驟S104)。藉此,能夠使附著於噴嘴面24a的固形物之中容易溶解於IPA的固形物溶解同時進行拭取。Next, IPA is discharged from the cleaning solution discharge nozzle 101 ( FIG. 3 ) of the wiping unit 90 , and the IPA is supplied to the wiping sheet 92 . Next, the carriage unit 20 is moved to the wiping unit 90, and the nozzle surface 24a of the droplet discharge head 24 is wiped with the wiping sheet 92 in a state wetted with IPA (step S104). Thereby, among the solid matter adhering to the nozzle surface 24a, the solid matter which dissolves easily in IPA can be wiped off, dissolving.

之後,停止來自洗淨液吐出噴嘴101的IPA的供應,以乾燥的擦拭片92拭取在噴嘴面24a殘留的IPA(步驟S105)。Thereafter, the supply of IPA from the cleaning liquid discharge nozzle 101 is stopped, and the IPA remaining on the nozzle surface 24a is wiped off with the dry wiping sheet 92 (step S105).

接著,使載架單元20移動至吸引單元110,再度進行液滴吐出頭24的吸引。此時,關閉處理液供應部25(圖1)的機能液供應管26b與醇供應管28b的閥門,僅開放溶劑供應管27b的閥門進行液滴吐出頭24的吸引。藉此,在液滴吐出頭24填充的IPA被置換成溶劑(步驟S106)。Next, the carriage unit 20 is moved to the suction unit 110, and the droplet discharge head 24 is sucked again. At this time, the valves of the functional liquid supply pipe 26b and the alcohol supply pipe 28b of the processing liquid supply unit 25 ( FIG. 1 ) are closed, and only the valve of the solvent supply pipe 27b is opened to suction the droplet discharge head 24 . Thereby, the IPA filled in the droplet discharge head 24 is replaced with the solvent (step S106).

接著,從擦拭單元90的洗淨液吐出噴嘴101(圖3)吐出純水,對擦拭片92供應純水。接著,使載架單元20向擦拭單元90移動,藉由以純水濕潤的狀態下的擦拭片92擦拭液滴吐出頭24的噴嘴面24a(步驟S107)。藉此,能夠使附著於噴嘴面24a的固形物之中容易溶解於純水的固形物溶解同時進行拭取。Next, pure water is discharged from the cleaning liquid discharge nozzle 101 ( FIG. 3 ) of the wiping unit 90 , and the pure water is supplied to the wiping sheet 92 . Next, the carriage unit 20 is moved to the wiping unit 90, and the nozzle surface 24a of the droplet discharge head 24 is wiped with the wiping sheet 92 wetted with pure water (step S107). Thereby, among the solid matter adhering to the nozzle surface 24a, the solid matter which dissolves easily in pure water can be wiped off while dissolving.

之後,停止來自洗淨液吐出噴嘴101的純水的供應,以乾燥的擦拭片92拭取在噴嘴面24a殘留的純水(步驟S108)。Thereafter, the supply of pure water from the cleaning liquid discharge nozzle 101 is stopped, and the pure water remaining on the nozzle surface 24a is wiped off with the dry wiping sheet 92 (step S108).

接著,使載架單元20移動至吸引單元110,再度進行液滴吐出頭24的吸引。此時,關閉處理液供應部25(圖1)的溶劑供應管27b與醇供應管28b的閥門,僅開放機能液供應管26b的閥門進行液滴吐出頭24的吸引。藉此,在液滴吐出頭24填充的溶劑被置換成墨水(步驟S109)。Next, the carriage unit 20 is moved to the suction unit 110, and the droplet discharge head 24 is sucked again. At this time, the valves of the solvent supply pipe 27b and the alcohol supply pipe 28b of the treatment liquid supply unit 25 ( FIG. 1 ) are closed, and only the valve of the functional liquid supply pipe 26b is opened to suction the droplet discharge head 24 . Thereby, the solvent filled in the droplet discharge head 24 is replaced with ink (step S109).

最後,使載架單元20向擦拭單元90移動,以乾燥後的擦拭片92擦拭附著於噴嘴面24a的剩餘的墨水(步驟S110)。Finally, the carriage unit 20 is moved to the wiping unit 90, and the remaining ink adhering to the nozzle surface 24a is wiped off with the dried wiping sheet 92 (step S110).

藉由以上的工程,結束液滴吐出頭24的維護工程。Through the above process, the maintenance process of the droplet discharge head 24 is completed.

本實施形態的液滴吐出裝置1中,將在液滴吐出頭24填充的機能液置換成溶劑後,再置換成IPA,進行液滴吐出頭24的清理。附著在液滴吐出頭24內的固形物,因為墨水成份的析出等各種原因而產生,推測在每種固形物有不同的成份及對處理液的溶解性,但在液滴吐出裝置1中,因為將特性不同的洗淨液供應至液滴吐出頭24,能夠以任一種洗淨液使固形物溶解。亦即,根據本實施形態的液滴吐出裝置1,能夠有效地除去附著於液滴吐出頭24的吐出噴嘴內的固形物。藉此,能夠提升液滴吐出頭24的清理性能,能夠抑制從液滴吐出頭24吐出的液滴的彎曲及噴嘴阻塞。In the droplet discharge device 1 of the present embodiment, the liquid droplet discharge head 24 is cleaned after replacing the functional liquid filled in the droplet discharge head 24 with a solvent and then with IPA. The solid matter adhering to the droplet discharge head 24 is produced due to various reasons such as the precipitation of ink components. It is estimated that each solid substance has different components and solubility to the treatment liquid, but in the droplet discharge device 1, Since cleaning liquids having different properties are supplied to the droplet discharge head 24, solid matter can be dissolved with any cleaning liquid. That is, according to the droplet discharge device 1 of the present embodiment, solid matter adhering to the discharge nozzles of the droplet discharge head 24 can be effectively removed. Thereby, the cleaning performance of the droplet discharge head 24 can be improved, and bending of the liquid droplets discharged from the droplet discharge head 24 and nozzle clogging can be suppressed.

如同上述從使附著於液滴吐出頭24的固形物溶解於墨水的溶劑或IPA的觀點來看,雖也可以將液滴吐出頭24的機能液置換成IPA後再置換成溶劑,但如圖9那樣將機能液置換成溶劑後再置換成IPA較佳。因墨水成份的析出等產生的固形物的多數,因為容易溶解於非極性溶劑,從相對極性小的洗淨液依序置換,能夠有效率地使固形物溶解。再來,以溶劑、IPA的順序進行洗淨液的置換,因為從後供應表面張力相對大的洗淨液,能夠使在液滴吐出頭24的吐出噴嘴內難以產生氣泡。As mentioned above, from the viewpoint of dissolving the solid matter adhering to the droplet discharge head 24 in the solvent or IPA of the ink, it is also possible to replace the functional liquid of the droplet discharge head 24 with IPA and then replace it with a solvent, but as shown in FIG. 9 It is better to replace the functional fluid with a solvent and then replace it with IPA. Most of the solids generated by the precipitation of ink components are easily dissolved in non-polar solvents, and the solids can be efficiently dissolved by sequentially replacing them with relatively less polar cleaning solutions. Furthermore, since the replacement of the cleaning solution is performed in the order of solvent and IPA, since the cleaning solution with relatively high surface tension is supplied from the rear, it is possible to make it difficult to generate air bubbles in the discharge nozzles of the droplet discharge head 24 .

此外,圖9所示之例中,除了液滴吐出頭24的填充的處理液的置換以外,也進行擦拭片92所致的噴嘴面24a的擦拭,但使上述液滴吐出頭24的吐出噴嘴內的固形物溶解的效果,是藉由液滴吐出頭24的處理液的置換得到的效果。換言之,從得到該效果的觀點來看,不實施例如圖9所示的步驟S101、S104、S107的擦拭也可以。又例如,洗淨液彼此混合造成的污染物的產生的懸念小的情形中,不實施乾燥的擦拭片92所致的噴嘴面24a的擦拭也可以。亦即,不實施圖9所示的步驟S102、S105、S108的擦拭也可以。In addition, in the example shown in FIG. 9 , in addition to the replacement of the filled processing liquid of the droplet discharge head 24, the nozzle surface 24a is also wiped by the wiper sheet 92, but the discharge nozzles of the above-mentioned droplet discharge head 24 are The effect of dissolving the solid matter inside is obtained by the replacement of the treatment liquid in the droplet discharge head 24 . In other words, from the viewpoint of obtaining this effect, for example, the wiping off in steps S101, S104, and S107 shown in FIG. 9 may not be performed. For another example, when there is little concern about contamination due to the mixing of cleaning solutions, the nozzle surface 24 a may not be wiped by the dry wiper sheet 92 . That is, the wiping off in steps S102, S105, and S108 shown in FIG. 9 may not be performed.

另一方面,除了除去液滴吐出頭24的吐出噴嘴內的固形物的效果外,為了也得到除去附著於噴嘴面24a的固形物的效果,如圖9那樣進行特性不同的洗淨液所致的噴嘴面24a的擦拭(濕式擦拭)也可以。此時,供應至擦拭片92的洗淨液的供應順序,不限於機能液的溶劑、IPA、純水的順序,根據與前述液滴吐出頭24的處理液的置換相同的理由,從極性小的洗淨液依序供應較佳。On the other hand, in addition to the effect of removing the solid matter in the discharge nozzle of the droplet discharge head 24, in order to obtain the effect of removing the solid matter adhering to the nozzle surface 24a, cleaning liquids having different characteristics are performed as shown in FIG. Wiping (wet wiping) of the nozzle surface 24a is also possible. At this time, the supply order of the cleaning liquid supplied to the wiping sheet 92 is not limited to the order of the solvent of the functional liquid, IPA, and pure water. For the same reason as the replacement of the processing liquid of the droplet discharge head 24, the order of the polarity is small. It is better to supply the cleaning solution sequentially.

又,進行噴嘴面24a的擦拭時,如步驟S101及步驟S104那樣,供應至擦拭片92的洗淨液,與填充至液滴吐出頭24的洗淨液相同較佳。藉此,能夠使特性不同的洗淨液不在噴嘴面24a混合,能夠抑制污染物的產生。In addition, when wiping the nozzle surface 24a, as in steps S101 and S104, it is preferable that the cleaning liquid supplied to the wiping sheet 92 is the same as the cleaning liquid filled in the droplet discharge head 24 . This prevents cleaning liquids having different properties from mixing on the nozzle surface 24a, thereby suppressing the generation of contamination.

此外,能夠以溶劑與IPA所致的擦拭充分除去附著於噴嘴面24a的固形物的情形,省略步驟S107那種純水所致的擦拭也可以。In addition, when the solid matter adhering to the nozzle surface 24a can be sufficiently removed by wiping with a solvent and IPA, the wiping with pure water as in step S107 may be omitted.

又,以上的實施形態中,擦拭單元90與吸引單元110雖設於X軸載台10的外側(Y軸負方向側),但該等擦拭單元90與吸引單元110,與沖洗單元50及吐出檢查單元60一同配置於X軸載台10上,搭載於第2X軸滑動器70也可以。具體上,在第2X軸滑動器70上,沖洗單元50、擦拭單元90、吐出檢查單元60、及吸引單元110從工件載台40側在X軸方向依序配置也可以。此時,在擦拭單元90,在Y軸方向排列設置複數(例如與載架23同數的10個)擦拭滾輪91。此外,在擦拭單元90中設置1個擦拭滾輪91,該擦拭滾輪91在Y軸方向移動自如也可以。Also, in the above embodiment, although the wiping unit 90 and the suction unit 110 are arranged on the outside of the X-axis stage 10 (Y-axis negative direction side), these wiping units 90 and the suction unit 110 are connected to the flushing unit 50 and the discharge unit. The inspection unit 60 is arranged together on the X-axis stage 10 and may be mounted on the second X-axis slider 70 . Specifically, on the second X-axis slider 70 , the flushing unit 50 , the wiping unit 90 , the discharge inspection unit 60 , and the suction unit 110 may be sequentially arranged in the X-axis direction from the workpiece stage 40 side. At this time, in the wiping unit 90 , a plurality of (for example, 10 as many as the carriage 23 ) wiping rollers 91 are arranged in a row in the Y-axis direction. In addition, one wiping roller 91 may be provided in the wiping off unit 90, and this wiping roller 91 may be movable freely in the Y-axis direction.

<液滴吐出裝置的適用例> 液滴吐出裝置1例如適用於形成有機發光二極體的有機EL層的基板處理系統。具體上液滴吐出裝置1適用於在作為工件W的玻璃基板上塗佈用以形成電洞注入層的有機材料的塗佈裝置、在玻璃基板(電洞注入層)上塗佈用以形成電洞輸送層的有機材料的塗佈裝置、在玻璃基板(電洞輸送層)上塗佈用以形成發光層的有機材料的塗佈裝置。此外,在基板處理系統中,除了形成有機發光二極體的電洞注入層、電洞輸送層及發光層以外,也形成電子輸送層與電子注入層時,液滴吐出裝置1也能夠適用於該等電子輸送層與電子注入層的塗佈處理。 <Application example of droplet discharge device> The droplet discharge device 1 is applicable to, for example, a substrate processing system for forming an organic EL layer of an organic light emitting diode. Specifically, the droplet ejection device 1 is suitable for use as a coating device for coating an organic material for forming a hole injection layer on a glass substrate as a workpiece W, and for coating a glass substrate (hole injection layer) for forming a hole injection layer. An organic material coating device for the hole transport layer, and a coating device for coating an organic material for forming a light-emitting layer on a glass substrate (hole transport layer). In addition, in the substrate processing system, in addition to forming the hole injection layer, the hole transport layer, and the light-emitting layer of the organic light-emitting diode, when the electron transport layer and the electron injection layer are also formed, the droplet discharge device 1 can also be applied to Coating treatment of the electron transport layer and the electron injection layer.

又,液滴吐出裝置1除了適用於形成上述的有機發光二極體的有機EL層時以外,例如也適用於製造彩色濾光器、液晶顯示裝置、電漿顯示器(PDP裝置)、電子放出裝置(FED裝置、SED裝置)等電光學裝置(平面顯示器:FPD)時、或也適用於製造金屬配線形成、透鏡形成、光阻形成、及光擴散體形成等。Moreover, the droplet discharge device 1 is also applicable to the manufacture of color filters, liquid crystal display devices, plasma displays (PDP devices), electron emission devices, etc. (FED device, SED device) and other electro-optical devices (flat-panel display: FPD), or also suitable for manufacturing metal wiring formation, lens formation, photoresist formation, and light diffuser formation.

應注意這次揭示的實施形態全部的點都是例示,並非用來限制者。上述實施形態,在不脫離申請專利範圍及其主旨的情況下,也能夠以各種形態進行省略、置換、變更。It should be noted that the embodiments disclosed this time are illustrations in all points and are not intended to be restrictive. The above-mentioned embodiments can be omitted, substituted, and changed in various forms without departing from the scope of the patent application and the gist thereof.

1:液滴吐出裝置 24:液滴吐出頭 24a:噴嘴面 25:處理液供應部 150:控制部 W:工件 1: Droplet discharge device 24: Droplet discharge head 24a: Nozzle face 25:Processing liquid supply department 150: control department W: Workpiece

[圖1]示意表示實施形態的液滴吐出裝置的構造的概略的側視圖。 [圖2]示意表示實施形態的液滴吐出裝置的構造的概略的平面圖。 [圖3]示意地表示實施形態的擦拭單元的構造的概略的側視圖。 [圖4]說明在實施形態的液滴吐出裝置的處理動作的說明圖。 [圖5]說明在實施形態的液滴吐出裝置的處理動作的說明圖。 [圖6]說明在實施形態的液滴吐出裝置的處理動作的說明圖。 [圖7]說明在實施形態的液滴吐出裝置的處理動作的說明圖。 [圖8]說明在實施形態的液滴吐出裝置的處理動作的說明圖。 [圖9]實施形態的維護工程的控制流程。 [ Fig. 1] Fig. 1 is a schematic side view schematically showing the structure of a liquid droplet discharge device according to an embodiment. [ Fig. 2] Fig. 2 is a schematic plan view schematically showing the structure of the droplet discharge device according to the embodiment. [ Fig. 3] Fig. 3 is a schematic side view schematically showing the structure of the wiping unit according to the embodiment. [ Fig. 4] Fig. 4 is an explanatory diagram for explaining processing operations in the droplet discharge device according to the embodiment. [ Fig. 5] Fig. 5 is an explanatory diagram for explaining processing operations in the droplet discharge device according to the embodiment. [ Fig. 6] Fig. 6 is an explanatory view for explaining processing operations in the droplet discharge device according to the embodiment. [ Fig. 7] Fig. 7 is an explanatory diagram for explaining processing operations in the liquid droplet discharge device according to the embodiment. [ Fig. 8] Fig. 8 is an explanatory diagram for explaining processing operations in the droplet discharge device according to the embodiment. [ Fig. 9 ] The control flow of the maintenance process of the embodiment.

1:液滴吐出裝置 1: Droplet discharge device

10:X軸載台 10: X-axis stage

11:Y軸載台 11: Y-axis stage

12:X軸導引軌道 12: X-axis guide track

13:Y軸導引軌道 13: Y-axis guide track

20:載架單元 20: Shelf unit

21:載架平板 21: carrier plate

22:載架轉動機構 22: Carrier rotation mechanism

23:載架 23: carrier

24:液滴吐出頭 24: Droplet discharge head

24a:噴嘴面 24a: Nozzle face

25:處理液供應部 25:Processing liquid supply department

26a:機能液供應源 26a: Functional fluid supply source

26b:機能液供應管 26b: Functional fluid supply pipe

27a:溶劑供應源 27a: Solvent supply source

27b:溶劑供應管 27b: Solvent supply tube

28a:醇供應源 28a: Alcohol supply source

28b:醇供應管 28b: Alcohol supply pipe

29:合流配管 29: Confluent piping

30:攝像單元 30: camera unit

31:吐出檢查攝影機 31: Spit inspection camera

32:描繪檢查攝影機 32:Delineate inspection camera

33:基底 33: base

34:基底 34: base

40:工件載台 40: Workpiece carrier

41:載台轉動機構 41: Stage rotation mechanism

42:第1X軸滑動器 42: 1st X-axis slider

50:沖洗單元 50: flushing unit

51:沖洗回收台 51: Rinse recovery station

60:吐出檢查單元 60: Spit out inspection unit

61:檢查台 61: Examination table

62:檢查片 62: Inspection piece

70:第2X軸滑動器 70: 2nd X-axis slider

150:控制部 150: control department

W:工件 W: Workpiece

Claims (12)

一種液滴吐出裝置,係對工件吐出機能液的液滴並進行描繪,具有: 對前述工件吐出液滴的液滴吐出頭; 對前述液滴吐出頭,供應前述機能液的溶劑即第1洗淨液或醇系的第2洗淨液的處理液供應部; 控制前述處理液供應部的控制部; 前述控制部,執行:將填充於前述液滴吐出頭的前述機能液,置換成前述第1洗淨液及前述第2洗淨液的任一洗淨液後,置換成另一洗淨液的控制。 A droplet discharge device, which discharges and draws droplets of a functional liquid on a workpiece, and has: a liquid drop discharge head for discharging liquid droplets to the aforementioned workpiece; A treatment liquid supply unit that supplies the solvent of the functional liquid, that is, the first cleaning liquid or the alcohol-based second cleaning liquid to the droplet discharge head; a control unit that controls the aforementioned treatment liquid supply unit; The control unit executes: replacing the functional liquid filled in the droplet discharge head with any one of the first cleaning liquid and the second cleaning liquid, and then replacing it with another cleaning liquid. control. 如請求項1記載的液滴吐出裝置,其中,前述一洗淨液為前述第1洗淨液,前述另一洗淨液為前述第2洗淨液。The droplet discharge device according to claim 1, wherein the one cleaning liquid is the first cleaning liquid, and the other cleaning liquid is the second cleaning liquid. 如請求項1或2記載的液滴吐出裝置,具備:進行前述液滴吐出頭的噴嘴面的擦拭的擦拭部; 前述擦拭部,具有: 擦拭構件; 使前述噴嘴面及前述擦拭構件相互接觸並擦拭前述噴嘴面的擦拭機構; 對前述擦拭構件供應前述第1洗淨液或前述第2洗淨液的洗淨液供應部; 前述控制部,控制前述洗淨液供應部與前述擦拭機構的動作,執行:使供應前述第1洗淨液及前述第2洗淨液的任一洗淨液的前述擦拭構件與前述噴嘴面接觸並擦拭該噴嘴面後,使供應另一洗淨液的前述擦拭構件與前述噴嘴面接觸並擦拭該噴嘴面的控制。 The droplet discharge device according to claim 1 or 2, comprising: a wiping unit for wiping the nozzle surface of the droplet discharge head; The aforementioned wiping unit has: Wipe components; a wiping mechanism for bringing the nozzle surface and the wiping member into contact with each other and wiping the nozzle surface; a cleaning solution supply unit that supplies the first cleaning solution or the second cleaning solution to the wiping member; The control unit controls the operation of the cleaning solution supply unit and the wiping mechanism, and executes: bringing the wiping member supplying any one of the first cleaning solution and the second cleaning solution into contact with the nozzle surface. And after wiping the nozzle surface, the control of wiping the nozzle surface is brought into contact with the wiping member supplied with another cleaning liquid. 如請求項3記載的液滴吐出裝置,其中,供應至前述擦拭構件的洗淨液,與進行前述噴嘴面的擦拭時填充至前述液滴吐出頭的洗淨液為相同洗淨液。The droplet discharge device according to claim 3, wherein the cleaning liquid supplied to the wiping member is the same cleaning liquid as the cleaning liquid filled into the droplet discharge head when wiping the nozzle surface. 如請求項3記載的液滴吐出裝置,其中,前述洗淨液供應部,具有對前述擦拭構件供應以水為主成份的第3洗淨液的構造; 前述控制部,執行控制進行: 以供應前述第1洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 以供應前述第2洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 以供應前述第3洗淨液的前述擦拭構件擦拭前述噴嘴面的工程。 The droplet discharge device according to claim 3, wherein the cleaning solution supply unit has a structure for supplying a third cleaning solution mainly composed of water to the wiping member; In the aforementioned control unit, execution control is carried out: A process of wiping the surface of the nozzle with the wiping member for supplying the first cleaning solution; A process of wiping the surface of the nozzle with the wiping member for supplying the second cleaning liquid; A process of wiping the nozzle surface with the wiping member supplying the third cleaning solution. 如請求項5記載的液滴吐出裝置,其中,前述控制部,執行控制依序進行: 將填充於前述液滴吐出頭的前述機能液置換成前述第1洗淨液的工程; 以供應前述第1洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 將填充於前述液滴吐出頭的前述第1洗淨液置換成前述第2洗淨液的工程; 以供應前述第2洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 將填充於前述液滴吐出頭的前述第2洗淨液置換成前述第1洗淨液的工程; 以供應前述第3洗淨液的前述擦拭構件擦拭前述噴嘴面的工程。 The droplet discharge device as described in claim 5, wherein the aforementioned control unit executes the control sequentially: A process of replacing the functional liquid filled in the droplet discharge head with the first cleaning liquid; A process of wiping the surface of the nozzle with the wiping member for supplying the first cleaning solution; A process of replacing the first cleaning solution filled in the droplet discharge head with the second cleaning solution; A process of wiping the surface of the nozzle with the wiping member for supplying the second cleaning liquid; A process of replacing the second cleaning solution filled in the droplet discharge head with the first cleaning solution; A process of wiping the nozzle surface with the wiping member supplying the third cleaning solution. 一種液滴吐出方法,係對工件吐出機能液的液滴,具有: 對前述工件吐出前述機能液進行描繪處理的工程; 進行液滴吐出頭的維護的工程; 進行前述維護的工程,具有: 將填充於前述液滴吐出頭的前述機能液,置換成該機能液的溶劑即第1洗淨液或醇系的第2洗淨液的任一洗淨液的工程; 將前述一洗淨液置換成另一洗淨液的工程;將填充於前述液滴吐出頭的前述第1洗淨液或前述第2洗淨液置換成前述機能液的工程。 A droplet discharge method, which is to discharge droplets of functional liquid to a workpiece, having: The process of drawing the aforementioned functional fluid on the aforementioned workpiece; Process for performing maintenance of droplet discharge head; The aforementioned maintenance projects shall have: A process of replacing the functional liquid filled in the droplet discharge head with any one of the solvent of the functional liquid, that is, the first cleaning liquid or the second alcohol-based cleaning liquid; A process of replacing the one cleaning liquid with another cleaning liquid; a process of replacing the first cleaning liquid or the second cleaning liquid filled in the droplet discharge head with the functional liquid. 如請求項7記載的液滴吐出方法,其中,前述一洗淨液為前述第1洗淨液,前述另一洗淨液為前述第2洗淨液。The droplet discharge method according to claim 7, wherein the one cleaning solution is the first cleaning solution, and the other cleaning solution is the second cleaning solution. 如請求項7或8記載的液滴吐出方法,其中,進行前述維護的工程,具有: 使供應前述第1洗淨液或前述第2洗淨液的擦拭構件與前述液滴吐出頭的噴嘴面接觸並擦拭該噴嘴面的工程; 前述第1洗淨液與前述第2洗淨液之中,使供應在擦拭前述噴嘴面的工程中未使用的洗淨液的前述擦拭構件與前述噴嘴面接觸並擦拭該噴嘴面的工程。 The droplet discharge method as described in Claim 7 or 8, wherein the process for performing the aforementioned maintenance includes: A process of bringing the wiping member supplying the first cleaning solution or the second cleaning solution into contact with the nozzle surface of the droplet discharge head and wiping the nozzle surface; Among the first cleaning solution and the second cleaning solution, the process of wiping the nozzle surface by bringing the wiping member supplying the cleaning solution not used in the process of wiping the nozzle surface into contact with the nozzle surface. 如請求項9記載的液滴吐出方法,其中,供應至前述擦拭構件的洗淨液,與進行前述噴嘴面的擦拭時填充至前述液滴吐出頭的洗淨液為相同洗淨液。The droplet discharge method according to claim 9, wherein the cleaning liquid supplied to the wiping member is the same cleaning liquid as the cleaning liquid filled into the droplet discharge head when wiping the nozzle surface. 如請求項9記載的液滴吐出方法,其中,進行前述維護的工程,具有: 以供應前述第1洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 以供應前述第2洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 以供應以水為主成份的第3洗淨液的前述擦拭構件擦拭前述噴嘴面的工程。 The liquid droplet discharge method as described in Claim 9, wherein the engineering for performing the aforementioned maintenance includes: A process of wiping the surface of the nozzle with the wiping member for supplying the first cleaning solution; A process of wiping the surface of the nozzle with the wiping member for supplying the second cleaning liquid; A process of wiping the surface of the nozzle with the wiping member supplied with the third cleaning solution mainly composed of water. 如請求項11記載的液滴吐出方法,其中,進行前述維護的工程,依序進行: 將填充於前述液滴吐出頭的前述機能液置換成前述第1洗淨液的工程; 以供應前述第1洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 將填充於前述液滴吐出頭的前述第1洗淨液置換成前述第2洗淨液的工程; 以供應前述第2洗淨液的前述擦拭構件擦拭前述噴嘴面的工程; 將填充於前述液滴吐出頭的前述第2洗淨液置換成前述第1洗淨液的工程; 以供應前述第3洗淨液的前述擦拭構件擦拭前述噴嘴面的工程。 The droplet discharge method as described in Claim 11, wherein the aforementioned maintenance works are performed sequentially: A process of replacing the functional liquid filled in the droplet discharge head with the first cleaning liquid; A process of wiping the surface of the nozzle with the wiping member for supplying the first cleaning solution; A process of replacing the first cleaning solution filled in the droplet discharge head with the second cleaning solution; A process of wiping the surface of the nozzle with the wiping member for supplying the second cleaning liquid; A process of replacing the second cleaning solution filled in the droplet discharge head with the first cleaning solution; A process of wiping the nozzle surface with the wiping member supplying the third cleaning liquid.
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