KR20070085534A - 내구력이 있는 고성능 레이저 파장 변환을 위한 비선형결정 변형 - Google Patents
내구력이 있는 고성능 레이저 파장 변환을 위한 비선형결정 변형 Download PDFInfo
- Publication number
- KR20070085534A KR20070085534A KR1020077012118A KR20077012118A KR20070085534A KR 20070085534 A KR20070085534 A KR 20070085534A KR 1020077012118 A KR1020077012118 A KR 1020077012118A KR 20077012118 A KR20077012118 A KR 20077012118A KR 20070085534 A KR20070085534 A KR 20070085534A
- Authority
- KR
- South Korea
- Prior art keywords
- wavelength
- medium
- laser
- overlay
- exit surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 20
- 238000006243 chemical reaction Methods 0.000 title claims description 47
- 230000003287 optical effect Effects 0.000 claims abstract description 149
- 239000007787 solid Substances 0.000 claims abstract description 63
- 230000005855 radiation Effects 0.000 claims description 38
- 239000002131 composite material Substances 0.000 claims description 33
- 238000000576 coating method Methods 0.000 claims description 22
- 239000011248 coating agent Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052594 sapphire Inorganic materials 0.000 claims description 10
- 239000010980 sapphire Substances 0.000 claims description 10
- 238000009792 diffusion process Methods 0.000 claims description 9
- 239000005350 fused silica glass Substances 0.000 claims description 9
- 239000010453 quartz Substances 0.000 claims description 6
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 5
- 230000003667 anti-reflective effect Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000005459 micromachining Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 238000005553 drilling Methods 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 230000000644 propagated effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 19
- 238000012986 modification Methods 0.000 description 8
- 239000006117 anti-reflective coating Substances 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 230000013011 mating Effects 0.000 description 6
- 230000010287 polarization Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 235000019796 monopotassium phosphate Nutrition 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 2
- WBPWDGRYHFQTRC-UHFFFAOYSA-N 2-ethoxycyclohexan-1-one Chemical compound CCOC1CCCCC1=O WBPWDGRYHFQTRC-UHFFFAOYSA-N 0.000 description 1
- DJHGAFSJWGLOIV-UHFFFAOYSA-K Arsenate3- Chemical compound [O-][As]([O-])([O-])=O DJHGAFSJWGLOIV-UHFFFAOYSA-K 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- -1 KTiOAsO 4 ) Chemical compound 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- SXBYYSODIPNHAA-UHFFFAOYSA-N [Bi+3].[Bi+3].[Bi+3].[O-]B([O-])[O-].[O-]B([O-])[O-].[O-]B([O-])[O-] Chemical compound [Bi+3].[Bi+3].[Bi+3].[O-]B([O-])[O-].[O-]B([O-])[O-].[O-]B([O-])[O-] SXBYYSODIPNHAA-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229940000489 arsenate Drugs 0.000 description 1
- XBJJRSFLZVLCSE-UHFFFAOYSA-N barium(2+);diborate Chemical compound [Ba+2].[Ba+2].[Ba+2].[O-]B([O-])[O-].[O-]B([O-])[O-] XBJJRSFLZVLCSE-UHFFFAOYSA-N 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000000087 laser glass Substances 0.000 description 1
- VCZFPTGOQQOZGI-UHFFFAOYSA-N lithium bis(oxoboranyloxy)borinate Chemical compound [Li+].[O-]B(OB=O)OB=O VCZFPTGOQQOZGI-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 229940082569 selenite Drugs 0.000 description 1
- MCAHWIHFGHIESP-UHFFFAOYSA-L selenite(2-) Chemical compound [O-][Se]([O-])=O MCAHWIHFGHIESP-UHFFFAOYSA-L 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/001,486 US20060114946A1 (en) | 2004-11-30 | 2004-11-30 | Nonlinear crystal modifications for durable high-power laser wavelength conversion |
| US11/001,486 | 2004-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20070085534A true KR20070085534A (ko) | 2007-08-27 |
Family
ID=35841911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020077012118A Ceased KR20070085534A (ko) | 2004-11-30 | 2005-11-15 | 내구력이 있는 고성능 레이저 파장 변환을 위한 비선형결정 변형 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20060114946A1 (enExample) |
| JP (1) | JP2008522432A (enExample) |
| KR (1) | KR20070085534A (enExample) |
| CN (1) | CN101103501A (enExample) |
| DE (1) | DE112005003025T5 (enExample) |
| GB (1) | GB2435125A (enExample) |
| TW (1) | TW200627738A (enExample) |
| WO (1) | WO2006060160A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7809222B2 (en) | 2005-10-17 | 2010-10-05 | Imra America, Inc. | Laser based frequency standards and their applications |
| US7542490B2 (en) * | 2006-04-25 | 2009-06-02 | R. J. Dwayne Miller | Reduction of surface heating effects in nonlinear crystals for high power frequency conversion of laser light |
| GB0609599D0 (en) * | 2006-05-15 | 2006-06-21 | Fundaci Privada Inst De Ci Nci | Optical parametric oscillator |
| US8194708B2 (en) * | 2006-12-15 | 2012-06-05 | Ellex Medical Pty Ltd | Laser |
| US7881159B2 (en) | 2006-12-18 | 2011-02-01 | Pgs Geophysical As | Seismic streamers which attentuate longitudinally traveling waves |
| US7725271B2 (en) * | 2007-11-13 | 2010-05-25 | Gilbarco Inc. | Nozzle snap flow compensation |
| JP2011192961A (ja) * | 2010-02-19 | 2011-09-29 | Komatsu Ltd | レーザ装置、極端紫外光生成装置、およびメンテナンス方法 |
| WO2012166572A1 (en) | 2011-05-27 | 2012-12-06 | Imra America, Inc. | Compact optical frequency comb systems |
| JP2014032300A (ja) * | 2012-08-03 | 2014-02-20 | Oxide Corp | 非線形波長変換素子 |
| CN102944963B (zh) * | 2012-11-08 | 2015-05-13 | 北京国科世纪激光技术有限公司 | 一种用于外腔倍频紫外激光器的非线性晶体组件 |
| US9912114B2 (en) * | 2013-03-14 | 2018-03-06 | Ipg Photonics Corporation | Highly efficient, single-pass, harmonic generator with round output beam |
| EP2973897B1 (en) * | 2013-03-14 | 2019-09-11 | IPG Photonics Corporation | Highly efficient, single-pass, harmonic generator with round output beam |
| US9509112B2 (en) | 2013-06-11 | 2016-11-29 | Kla-Tencor Corporation | CW DUV laser with improved stability |
| CN104078832A (zh) * | 2014-07-02 | 2014-10-01 | 温州大学 | 中红外波段自级联光学参量振荡激光器 |
| CN104218440A (zh) * | 2014-09-19 | 2014-12-17 | 福州紫凤光电科技有限公司 | 半导体侧泵浦腔内倍频紫外激光器 |
| CN104716552A (zh) * | 2015-03-31 | 2015-06-17 | 无锡庆源激光科技有限公司 | 光纤端面泵浦布儒斯特角腔内选频355nm紫外激光器用谐振腔 |
| US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
| JP7081094B2 (ja) | 2017-08-22 | 2022-06-07 | セイコーエプソン株式会社 | 波長変換素子、光源装置及びプロジェクター |
| US10921261B2 (en) * | 2019-05-09 | 2021-02-16 | Kla Corporation | Strontium tetraborate as optical coating material |
| CN110286542B (zh) * | 2019-07-26 | 2024-07-09 | 南京钻石激光科技有限公司 | 激光辐射三倍率产生的装置 |
| US11101614B1 (en) * | 2020-02-26 | 2021-08-24 | Coherent Lasersystems Gmbh & Co. Kg | Second-harmonic generation crystal |
| CN111636099A (zh) * | 2020-05-29 | 2020-09-08 | 福建科彤光电技术有限公司 | 一种非线性晶体防潮解的方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5049762A (en) * | 1988-09-14 | 1991-09-17 | Fuji Photo Film Co., Ltd. | Optical wavelength converter system |
| JPH02219032A (ja) * | 1989-02-21 | 1990-08-31 | Sony Corp | 光波長変換素子 |
| US5052780A (en) * | 1990-04-19 | 1991-10-01 | The Aerospace Corporation | Dichroic beam splitter |
| JP2821710B2 (ja) * | 1990-07-27 | 1998-11-05 | 浜松ホトニクス株式会社 | 発振光の波長変換装置 |
| JPH09292638A (ja) * | 1996-04-25 | 1997-11-11 | Sony Corp | 高出力紫外線レーザー光発生装置 |
| US5742626A (en) * | 1996-08-14 | 1998-04-21 | Aculight Corporation | Ultraviolet solid state laser, method of using same and laser surgery apparatus |
| US5850407A (en) * | 1997-11-25 | 1998-12-15 | Lightwave Electronics Corporation | Third-harmonic generator with uncoated brewster-cut dispersive output facet |
| US5953354A (en) * | 1998-02-03 | 1999-09-14 | General Electric Co. | Laser resonator optical alignment |
| WO2000071342A1 (en) * | 1999-05-26 | 2000-11-30 | Ii-Vi Incorporated | Contacted crystal surface protector and method |
| US6424454B1 (en) * | 2001-02-12 | 2002-07-23 | The United States Of America As Represented By The Secretary Of The Air Force | Brewster-cut crystal for nonlinear frequency conversion |
| US6697391B2 (en) * | 2002-03-28 | 2004-02-24 | Lightwave Electronics | Intracavity resonantly enhanced fourth-harmonic generation using uncoated brewster surfaces |
-
2004
- 2004-11-30 US US11/001,486 patent/US20060114946A1/en not_active Abandoned
-
2005
- 2005-11-15 WO PCT/US2005/041379 patent/WO2006060160A1/en not_active Ceased
- 2005-11-15 CN CNA2005800460220A patent/CN101103501A/zh active Pending
- 2005-11-15 JP JP2007544368A patent/JP2008522432A/ja not_active Abandoned
- 2005-11-15 DE DE112005003025T patent/DE112005003025T5/de not_active Withdrawn
- 2005-11-15 KR KR1020077012118A patent/KR20070085534A/ko not_active Ceased
- 2005-11-17 TW TW094140379A patent/TW200627738A/zh unknown
-
2007
- 2007-05-30 GB GB0710284A patent/GB2435125A/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| TW200627738A (en) | 2006-08-01 |
| GB0710284D0 (en) | 2007-07-11 |
| CN101103501A (zh) | 2008-01-09 |
| GB2435125A (en) | 2007-08-15 |
| WO2006060160A1 (en) | 2006-06-08 |
| JP2008522432A (ja) | 2008-06-26 |
| US20060114946A1 (en) | 2006-06-01 |
| DE112005003025T5 (de) | 2007-10-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20070529 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20080528 Comment text: Request for Examination of Application |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20100303 Patent event code: PE09021S01D |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 20100531 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 20100303 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |