KR20070077985A - Supporting unit and pick-up apparatus having the same - Google Patents

Abstract

A support unit and a pickup apparatus with the same are provided to eject and pick up a variety of workpiece quickly and stably without the damage of the workpiece. A support unit includes a body, a support part, and a multi eject part. The body has a driving portion. The support part(35) is installed at the body to support a protection layer, wherein the protection layer is attached to a workpiece. The multi eject part(40) is used for separating the workpiece from the protection layer by pressurizing sequentially the protection layer. The multi eject part is protruded from the support part by the operation of the driving portion.

Description

SUPPORTING UNIT AND PICK-UP APPARATUS HAVING THE SAME}

1 is a front view of the pickup apparatus of the present invention,

2 is an exploded perspective view showing main parts of the support unit;

3 is a cross-sectional view of FIG.

4 is a schematic diagram showing a relationship between a cam and a cam follower,

5 is a control block diagram showing a control process of the pickup apparatus;

6 to 10 are cross-sectional views showing the ejection and gripping process of the workpiece.

Explanation of symbols on the main parts of the drawings

1: pickup device 10: transfer unit

11: gripper 15: the workpiece

16: protective film 20: support unit

30: main body 31: base

33: main body housing 35: support

37: adsorption hole 40: multi-stage ejection unit

50: first ejection unit 51: upper housing

52: lower housing 53: lift limit unit

55: catching part 56: engrave part

57: first pin 59: first pin receiving portion

60: second ejection unit 61: internal housing

63: outer housing 65: the first elastic member

66: lifting rod ball 67: the second pin

69: second pin receiving portion 70: third ejection portion

71: lifting rod 73: support protrusion

75: second elastic member 80: drive unit

81: drive motor 83: motion conversion means

85: Cam 87: Cam Followers

89: lift transmission shaft 90: control unit

91: setting input unit 93: transfer unit

The present invention relates to a support unit and a pickup apparatus having the same, and to a support unit capable of preventing damage to a workpiece and to eject and pick up various workpieces quickly and stably, and to a pickup apparatus having the same. .

Pick-up devices generally pick up various parts and transfer them between processes or transfer parts.

One type of pickup device is a die bonder of a die bonder that attaches a die, such as a wafer, to a substrate. Here, the die is wrapped in a protective film such as vinyl to prevent scratches and the like during transportation or storage. Wafers tend to become thinner and smaller in response to demands for high integration, high density, and multifunction.

Such a pickup device includes a die transfer for picking up a die by using a predetermined vacuum pressure, a holder for supporting the die to separate the die and the protective film attached to the die, and the die to be picked up. And an ejector having one pin that is raised and raised to protrude.

This configuration raises the pin accommodated inside the holder while the vinyl-attached die is supported by the holder of the ejector, thereby reducing the contact area between the die and the vinyl, thereby reducing the adhesive strength between the die and the vinyl. Thus, the die is separated from the vinyl and the die transfer picks up the die and transfers it to a predetermined position on the substrate.

However, in the prior art, since the protective film is pressed by one pin to separate the vinyl from the die, there is a fear of damaging a very thin die or the like. In addition, there is a problem that can not respond quickly and simply to a die of various sizes provided by one pin.

Accordingly, it is an object of the present invention to provide a support unit and a pick-up apparatus having the same, which can prevent damage to a workpiece and can eject and pick up various workpieces quickly and stably.

The above object is, according to the present invention, a support unit for supporting a workpiece with a protective film, comprising: a main body having a drive unit; A support part provided in the main body to support the protective film attached to the workpiece; And a multi-stage ejection portion which protrudes from the plate surface of the support portion by driving the drive portion to sequentially pressurize the protective film to separate the workpiece from the protective film.

The multi-stage ejection unit may include: a first ejection unit accommodated in the main body of the support unit to protrude from the support plate surface; A second ejection portion disposed below the first ejection portion and accommodated in the main body and protruding from the plate surface of the first ejection portion; It is preferable to include a third ejection portion which is guided up and down by the first ejection portion and the second ejection portion to protrude from the plate surface of the first ejection portion.

In addition, it is preferable to include a plurality of first pins accommodated on one side of the first ejection portion, supported on the other side of the first ejection portion, and protruding from the plate surface of the support portion.

In addition, it is preferable to include a plurality of second pins accommodated in the first and second ejection portions, supported by the second ejection portion, and protruding from the first pins.

In addition, the first ejection portion is preferably formed through the first pin receiving portion and the second pin receiving portion for guiding each of the lifting and receiving the first pin and the second pin.

In addition, the first pin and the second pin can be lifted relatively stable, characterized in that the cross-sectional area of the upper portion is formed less than the cross-sectional area of the lower portion, respectively.

In addition, the first pin receiving portion and the second pin receiving portion preferably correspond to the first pin and the second pin, the cross-sectional area of the upper portion is preferably less than the cross-sectional area of the lower portion.

In addition, the first ejection unit, the upper housing which is accommodated in the main body to move up and down; It is preferable to include a lower housing having a lift limiting unit for limiting the lifting range relative to the body.

In addition, the lift limiting unit, the engaging portion provided in any one of the lower housing and the main body; It is preferred that the lower housing and the other one of the main body is provided with a bite engaging the engaging portion.

The second ejection unit may include: an outer housing disposed below the first ejection unit and accommodated in the first ejection unit; An inner housing accommodated in the outer housing and provided to be elevated; It is preferable to include a first elastic member interposed between the lower housing and the outer housing.

In addition, the third ejection unit, the lifting rod which is accommodated to guide the lifting up and down the central region of the first ejection portion and the second ejection portion; It is preferable to include a second elastic member interposed between the lifting rod and the inner housing to press the lifting rod toward the driving unit side.

In addition, the main body, the base for supporting the drive unit; One side is provided with a support, the other side is preferably coupled to the base includes a main body housing for receiving the multi-stage ejection.

In addition, the support portion preferably has adsorption holes penetrated to adsorb the protective film to the plate surface by a predetermined vacuum pressure.

The drive unit may include a drive motor; Motion conversion means for converting the rotational motion of the drive motor into linear motion; It is preferable to have a lifting transmission shaft coupled to the motion conversion means and the multi-stage ejection unit and connected to each other, and to transmit a linear motion to the multi-stage ejection unit.

In addition, the motion conversion means, the cam is connected to the drive motor to rotate; It is preferable to include a cam follower (Cam follower) in engagement with the cam to move in the pressing direction of the protective film.

In addition, it is preferable to include a control unit for controlling the operation of the drive unit to adjust the height protruding from the support plate surface of the multi-stage ejection unit.

On the other hand, an object of the present invention is a pickup device for holding a workpiece with a protective film, the transfer unit having a gripping portion for holding the workpiece; It is achieved by a pickup device comprising a support unit of claim 1 for supporting a protective film of the workpiece.

In addition, it is preferable to include a control unit for controlling the gripping portion is raised and lowered corresponding to the height of the multi-stage ejection portion protruding from the plate surface of the support in a state that the gripping portion gripping the workpiece.

Hereinafter, with reference to the accompanying drawings will be described a support unit and a pickup device having the same according to an embodiment of the present invention.

The present invention relates to a support unit 20 and a pickup device having the same, the pickup device 1 according to the present invention, as shown in Figures 1 to 3, to hold the workpiece 15 It includes a transfer unit 10 having a grip 11, and a support unit 20 for supporting the workpiece 15 to which the protective film 16 is attached. The pick-up apparatus 1 is raised and lowered in response to a height at which the multi-stage ejection portion 40 protrudes from the plate surface of the support portion 35 while the grip portion 11 grips the workpiece 15. It includes a control unit 90 to control to.

1 and 6, the transfer unit 10 has a grip portion 11 for holding the workpiece 15 and a transfer portion 93 for lifting and lowering the grip portion 11. . The transfer unit 10 may include a form such as a robot.

The workpiece 15 has a circular shape, as shown in FIGS. 1 and 2, and includes a shape such as a square as necessary. The workpiece 15 is particularly small and thin and includes a die mounted on a substrate that is susceptible to damage, such as breakage, during separation and gripping from the protective film 16. Thus, the workpiece 15 is preferably separated in stages from the protective film 16.

The protective film 16 is to protect the surface of the workpiece 15 in order to prevent damage due to scratches or the like during transportation or storage of the workpiece 15 and includes a material such as vinyl, and may be provided with various kinds of films. Can be. The protective film 16 is supported by the vacuum pressure formed in the adsorption hole 37 of the support part 35. In the process of separating the workpiece 15 from the protective film 16, in particular, when the workpiece 15 is small, the workpiece 15 should be separated from the protective film 16 in a sequential order and with minimal force in a state where the protective film 16 and the adhesive force are weakened. Damage to the workpiece 15 can be prevented.

The support unit 20 supports the protective film 16 and has a main body 30 having a driving unit 80, and a supporting unit 35 provided in the main body 30 to support the protective film 16 attached to the workpiece 15. And a multi-stage ejection portion 40 which protrudes from the plate surface of the support portion 35 by the driving of the driving portion 80 and sequentially presses the protective film 16 to separate the workpiece 15 from the protective film 16. . Thus, the workpiece 15 is sequentially removed from the protective film 16 and the adhesive force is removed step by step to be separated from each other with minimal force to prevent damage due to impact due to separation.

As shown in FIGS. 2 and 3, the main body 30 includes a base 31 supporting the driving unit 80, a support unit 35 on one side thereof, and the other side coupled to the base 31 to eject the multi-stage. And a support part 35 having a main body housing 33 accommodating the part 40 and adsorption holes 37 formed therethrough so as to adsorb the protective film 16 to the plate surface by a predetermined vacuum pressure.

Base 31, as shown in Figure 1, the main body housing 33 is coupled to one side and one side is coupled to the drive unit 80 and provided in a plate shape may have a variety of shapes. Here, the base 31 may include a through hole (not shown) in communication with the adsorption hole 37 of the support part 35.

2 and 3, the main body housing 33 is provided with a support part 35 on one side and coupled to the base 31 on the other side to accommodate the multi-stage ejection part 40. The main body housing 33 may include a circular shape and may have various shapes corresponding to the shape of the workpiece 15. The main housing 33 accommodates the multi-stage ejection portion 40 in the central region, and the suction hole 37 penetrates the edge thereof. It has a support 35.

As shown in FIG. 3, the support part 35 has a plurality of suction holes 37 at the edges of the main body housing 33. The adsorption hole 37 communicates with the base 31 and adsorbs the protective film 16 by a predetermined vacuum pressure.

As shown in FIG. 2, the multi-stage ejection unit 40 is accommodated in the central region of the main body housing 33 and protrudes from the plate surface of the support unit 35 by driving the driving unit 80 to sequentially pass the protective film 16. Press to separate the workpiece 15 from the protective film 16. Thus, the workpiece 15 is sequentially and stably separated from the protective film 16 to prevent damage to the workpiece 15 in the process of separating and gripping the workpiece 15.

As shown in FIGS. 2 and 3, the first ejection portion 50 has a first pin 57 that is accommodated in the main body housing 33 of the support unit 20 and protrudes from the plate surface of the support portion 35. . The first ejection portion 50 is accommodated in the main body housing 33 and the upper housing 51 accommodating the first pin 57 and the range in which the first pin 57 is lifted with respect to the main body housing 33. It includes a lower housing 52 having a lift limiting unit 53 for limiting. Accordingly, the workpiece 15 may be separated from the protective film 16 by pressing the protective film 16 to a predetermined height from the support 35 surface.

The upper housing 51 is provided in a plate shape to accommodate the first pin 57 in one region and accommodate the first pin 57, and the second pin accommodation portion to accommodate the second pin 67 in the other region ( 69a and elevating rod holes 66a for receiving and elevating the elevating rod 71 in the central region are respectively formed therethrough.

The lower housing 52 is provided below the upper housing 51, and the upper plate surface supports the first pin 57, and the second pin receiving portion 69b and the lifting rod hole 66b correspond to the upper housing 51. Each is formed through.

The lift limiting unit 53 limits the range in which the lower housing 52 is lifted and lowered with respect to the main body housing 33 while the lower housing 52 is elevated by the driving of the driving unit 80. It can limit the protruding range of. The lifting limiting unit 53 has a catching portion 55 provided in the lower housing 52 and a catching portion 56 formed in the main body housing 33 so as to engage with the catching portion 55. 55 and the engaging portion 56 may be formed in the main body housing 33 and the lower housing 52, respectively. Here, the locking portion 55 is coupled to the lower housing 52 to be adjustable in length. Therefore, it is possible to limit the height of the first ejection portion 50 protruding from the plate surface of the support portion 35.

As shown in FIGS. 2 and 3, the first pin 57 is accommodated in the first pin accommodating part 59 penetrating through the first ejecting part 50 to form an upper plate surface of the second ejecting part 60. It is supported by and is provided in multiple numbers so that it may protrude from the plate surface of the support part 35 by lifting of the 1st ejection part 50. As shown in FIG. The first pin 57 has a top cross-sectional area smaller than the bottom cross-sectional area to be moved more stably in the lifting process. The first pin 57 has a circular shape and may have various shapes such as a quadrangle. Protruding height of the first pin (57) can be adjusted by adjusting the length of the locking portion 55 of the lower housing (52). Here, the height, the number, the arrangement position, etc. of the first pin 57 is prepared and arranged in consideration of the characteristics, the thickness of the protective film 16 material, the size, the thickness of the workpiece 15, and the like. You can respond quickly. However, since the first pin 57 does not have a higher protruding height than the second pin 67, the first pin 57 is formed on the outer side of the upper housing 51 than the second pin 67, so that the passivation layer 16 is formed. When the pressurization of the protective film 16 or the workpiece 15 due to excessive pressurization can be prevented. Accordingly, the first pin 57 protrudes together with the second pin 67 and the lifting rod 71 at a predetermined height from the plate surface of the support part 35 to press the passivation layer 16, and the workpiece 15 may pass through the passivation layer ( 16) to allow for easy separation.

The first pin accommodating part 59 is formed through the upper housing 51 so as to receive the first pin 57 and guide the lifting and lowering. The first pin accommodating part 59 has an upper cross-sectional area smaller than the lower cross-sectional area corresponding to the shape of the first pin 57.

The second ejection unit 60 is provided below the first ejection unit 50 and accommodated in the first ejection unit 50, and the second pin 67 provided to protrude from the plate surface of the first ejection unit 50. Have The second ejection unit 60 includes an outer housing 63 accommodated in the lower housing 52, an inner housing 61 accommodated in the outer housing 63 so as to be elevated relative to the main housing 33, and an outer housing. The first elastic member 65 is interposed between the 63 and the inner housing 61. Accordingly, the second pin 67 and the lifting rod 71 protrude from the plate surface of the support part 35 to protrude more than the first pin 57 to press the passivation layer 16, thereby protecting the workpiece 15 with the passivation layer 16. Can be separated sequentially from.

The inner housing 61 is accommodated in the outer housing 63 and can be lifted with respect to the main body housing 33. An upper plate surface of the inner housing 61 supports the second pin 67, and the lifting rod hole 66d is formed in the center area so that the lifting rod 71 of the third ejection unit 70 is lifted and guided. .

The outer housing 63 is accommodated in the lower housing 52. The outer housing 63 has a second pin receiving portion 69c for receiving the second pin 67 to guide the lifting of the second pin 67. The lifting rod hole 66c is formed in the center area of the outer housing 63 so that the lifting rod 71 of the third ejection unit 70 is lifted and guided.

The first elastic member 65 is interposed between the lower housing 52 and the outer housing 63 to limit the height of protrusion of the second pin 67 with respect to the first pin 57. That is, when the driving unit 80 is driven and the second ejection unit 60 is lifted and lift of the lower housing 52 is restricted, the first pin 57, the second pin 67, and the lifting rod 71 are supported by the support unit ( 35) It protrudes at the same height from the plate surface, and presses the protective film 16. Here, when the driving unit 80 is further driven to raise and lower the elevating transmission shaft 89, the outer housing 63 presses the lower housing 52 to overcome the elastic force of the first elastic member 65 and the first elastic member ( Rises by the contracted length of 65). Accordingly, the second pin 67 may protrude further by the contracted height of the first elastic member 65 than the first pin 57 to press the passivation layer 16. Here, the type, elastic force, etc. of the first elastic member 65 may be provided in various forms in consideration of the thickness of the protective film 16 and the workpiece 15, the contracted height, and the like, and the first elastic member 65. The elastic force of the second elastic member 75 is selected in consideration of the elastic force. That is, the elastic force of the first elastic member 65 may be weaker than the elastic force of the second elastic member 75 so that the second elastic member 75 is pressed after the first elastic member 65 is pressed.

The second pin 67 is accommodated in the second pin accommodation portion 69 penetrating the first ejection portion 50 and the outer housing 63, respectively, and is supported by the upper plate surface of the inner housing 61. It protrudes more than the pin 57. The second pin 67 has a circular shape in which the upper cross-sectional area is smaller than the lower cross-sectional area, and may have various shapes such as a quadrangle. Here, the height, the number, the arrangement position, etc. of the second pin 67 is provided in consideration of the characteristics and the thickness of the material of the protective film 16 and the size and thickness of the workpiece 15, etc. Can respond. However, since the second fin 67 has a higher protruding height than the first fin 57, the second fin 67 is formed inside the upper housing 51 than the first fin 57, so that the protective film 16 When pressing, it is possible to prevent damage to the protective film 16 or the workpiece 15 due to excessive pressurization. Accordingly, since the second pin 67 presses the protective film 16 further from the support 35 than the first pin 57, the workpiece 15 may be more easily separated from the protective film 16. .

The second pin receiving portions 69a to 69c are formed in the inner regions of the upper housing 51, the lower housing 52, and the outer housing 63, respectively, to receive and guide the second pin 67. The second pin accommodating part 69 is formed to have an upper cross-sectional area smaller than the lower cross-sectional area corresponding to the shape of the second pin 67.

The third ejection portion 70 is guided up and down by the first ejection portion 50 and the second ejection portion 60 to protrude from the plate surface of the support portion 35. The third ejection unit 70 includes an elevating rod 71 provided to elevate the central regions of the first ejection unit 50 and the second ejection unit 60, and between the elevating rod 71 and the inner housing 61. The second elastic member 75 is interposed to elastically press the lifting rod 71 toward the driving unit 80 side.

The elevating rod 71 is accommodated in the elevating rod holes 66a to 66d formed through the central regions of the first and second ejection portions 50 and 60 to guide the elevating rod to protrude higher than the second pin 67. Here, the protruding height of the lifting rod 71 may be adjusted by controlling the cam 85 shape of the driving unit 80 and the rotation angle of the driving motor 81. The elevating rod 71 has a cross-sectional area of the upper portion less than the cross-sectional area of the lower portion and has a support protrusion 73 supporting the second elastic member 75.

The second elastic member 75 is supported by the support protrusion 73 of the elevating rod 71 and is interposed between the support protrusion 73 and the inner housing 61 to move the elevating rod 71 toward the driving unit 80. Pressurize elastically. Accordingly, the lifting rod 71 may be easily lowered when the third ejection unit 70 descends by driving the driving unit 80. The second elastic member 75 is selected in consideration of the first elastic member 65 and the elastic force. Like the first elastic member 65, the second elastic member 75 may include various shapes such as a coil spring or a leaf spring. The elastic force of the second elastic member 75 is greater than the elastic force of the first elastic member 65. Thus, after the second pin 67 protrudes, the end of the elevating rod 71 protrudes to press the protective film 16 apart from the support part 35 so that the workpiece 15 is separated from the protective film 16. It can be done easily.

As shown in FIGS. 1 and 2, the driving unit 80 includes a drive motor 81, a motion conversion means 83 for converting the rotational motion of the drive motor 81 into a linear motion, and a motion conversion means. Interposed between the 83 and the multi-stage ejection unit 40 has a lifting transmission shaft (89) provided to be connected to each other to transmit a linear motion to the multi-stage ejection unit (40). Accordingly, the driving unit 80 provides a driving force to convert the rotary motion into a linear motion so that the multi-stage ejection unit 40 can be elevated.

As shown in FIG. 1, the driving motor 81 includes a motor that is supported by the base 31 and provides a driving force to rotate. The drive motor 81 includes a speed reducer that rotates at a predetermined speed.

1 and 4, the motion converting means 83 converts the rotational motion of the drive motor 81 into linear motion, and is connected to the drive motor 81 to rotate the cam 85, The cam follower 87 is engaged with the cam 85 and moves up and down in the pressing direction of the protective film 16. Thus, the motion converting means 83 may convert the rotational motion of the drive motor 81 into the lifting linear motion of the multi-stage ejection unit 40. That is, as shown in FIG. 4, the portion spaced farthest from the center of the cam 85 (see "B") is positioned in the X direction (not shown) on the horizontal axis, and the driving motor 81 rotates to Y. Position (see "B '") in the direction (not shown) raises and lowers the position of the cam follower 87 by the height "H". Here, the initial position and the final lift height of the multi-stage ejection unit 40 may be adjusted by adjusting the shape of the cam 85 or the rotation angle of the driving motor 81 as necessary. In addition, although the motion converting means 83 is provided with the cam 85 and the cam follower 87 in an Example, a well-known means, such as a crank and a crankshaft, can be selected.

1 and 2, the lifting transmission shaft 89 is interposed between the motion converting means 83 and the multi-stage ejection unit 40 and connected to each other to transmit a linear motion to the multistage ejection unit 40. It is shaped like a long rod.

As shown in FIG. 5, the controller 90 adjusts the height of the protrusion of the first pin 57, the second pin 67, and the lifting rod 71 from the support 35 surface. 81 is controlled to drive. The control unit 90 sets an initial position of the first pin 57, the second pin 67, and the lifting rod 71, and a setting input unit for setting the height so as to adjust the final protrusion height of the lifting rod 71. Has 91. The controller 90 may control the operation of the vacuum generator not shown to control the vacuum to be formed in the support part 35 and the grip part 11. The control unit 90 corresponds to a height at which the multi-stage ejection unit 40 protrudes from the plate surface of the support unit 35 while the grip unit 11 of the transfer unit 10 holds the workpiece 15. 11) control to rise. Thus, the control unit 90 can adjust the initial position and the final lift height of the multi-stage ejection unit 40 relatively simply.

By such a configuration, the gripping and supporting process of the pickup device 1 according to the present invention will be described with reference to FIGS. 6 to 10.

First, when power is applied to the pickup device 1, as shown in Figure 6, the control unit 90 is the transfer unit 93 so that the holding unit 11 of the transfer unit 10 gripping the workpiece 15 And a predetermined vacuum pressure is formed in the adsorption holes 37 of the support unit 35 of the support unit 20 to control the control unit 90 to supply a vacuum pressure to support the protective film 16.

When the driving motor 81 is driven and the cam 85 rotates, as shown in FIG. 7, the locking portion 55 of the lower housing 52 is engaged with the biting portion 56 so that the first ejection portion 50 may be rotated. The rise is limited. Accordingly, the lower housing 52 supporting the first pin 57 at the lower portion of the upper housing 51 also stops rising so that the first pin 57, the second pin 67, and the lifting rod 71 have the same height. The workpiece 15 is somewhat separated from the protective film 16 by protruding from the furnace support 35 to pressurize the protective film, thereby reducing the adhesive area. In this case, the control unit 90 may control the holding unit 11 to rise by the height of the protrusion of the first pin 57 in the support unit 35, and may maintain the holding pressure for holding the workpiece 15 constant.

When the driving motor 81 is further rotated and the cam 85 is further rotated, the outer housing 63 presses the first elastic member 65 while the lower housing 52 is lifted and restrained as shown in FIG. 8. do. The outer housing 63 is raised by a distance from which the first elastic member 65 is contracted. Accordingly, the second pin 67 supported on the upper portion of the inner housing 61 and the elevating rod 71 coupled to the elevating transmission shaft 89 are raised higher than the first pin 57 to further increase the passivation layer 16. Pressurized to be spaced apart from the support (35). As a result, the area in which the workpiece 15 is separated from the protective film 16 is widened so that the adhesion area between the workpiece 15 and the protective film 16 is reduced.

As the driving motor 81 rotates further and the cam 85 rotates further, as shown in FIG. 9, the lifting rod 71 is further raised to move the center region of the protective layer 16 to the second elastic member 75. When the elastic force is overcome and the pressure is further increased, the lifting rod 71 protrudes more than the second pin 67. Thus, the central area of the workpiece 15 is further spaced apart from the protective film 16 such that the adhesion area of the workpiece 15 and the protective film 16 is significantly reduced, thereby greatly reducing mutual adhesion.

Next, as shown in FIG. 10, the holding portion 11 of the transfer unit 10 significantly reduces the adhesion between the protective film 16 and the work 15 to easily separate the work 15 from the protective film 16. 15) damage can be prevented.

In the above-described embodiment, only the ejector formed in three stages has been described, but the present invention is not limited thereto and may include an ejector having various stages such as four stages and five stages.

Thus, according to the present invention, it is possible to easily separate the workpiece from the protective film, it is possible to reduce the damage by minimizing the impact on the workpiece during separation. In addition, by adjusting the number, height, etc. of the pin can quickly and easily respond to a variety of workpieces.

As described above, according to the present invention, it is possible to prevent the damage to the product by separating the workpiece from the protective film simply by minimizing the impact.

In addition, it is possible to eject and grip relatively quickly and simply in response to various workpieces.

Claims (18)

In the support unit for supporting the workpiece with a protective film, A main body having a driving unit; A support part provided in the main body to support the protective film attached to the workpiece; And a multi-stage ejection portion protruding from the plate surface of the support portion by driving of the driving portion to sequentially press the protective film to separate the workpiece from the protective film. The method of claim 1, The multi-stage eject unit, A first ejection part accommodated in the main body of the support unit and protruded from the support plate surface; A second ejection portion disposed below the first ejection portion and accommodated in the main body and protruding from the plate surface of the first ejection portion; And a third ejection portion which is guided up and down by the first and second ejection portions to protrude from the plate surface of the first ejection portion. The method of claim 2, And a plurality of first pins accommodated on one side of the first ejection part and supported on the other side of the first ejection part to protrude from the plate surface of the support part. The method of claim 3, And a plurality of second pins accommodated in the first and second ejection portions, supported by the second ejection portion, and protruding from the first pins. The method of claim 4, wherein The first ejection unit is a support unit, characterized in that the first pin receiving portion and the second pin receiving portion to guide the lifting and receiving respectively the first pin and the second pin is formed through. The method of claim 5, Each of the first pin and the second pin is a support unit, characterized in that the cross-sectional area of the upper portion is formed less than the cross-sectional area of the lower portion. The method of claim 6, The first pin receiving portion and the second pin receiving portion support unit, characterized in that the cross-sectional area of the upper portion is formed less than the cross-sectional area of the lower portion respectively corresponding to the first pin and the second pin. The method of claim 2, The first ejection unit, An upper housing accommodated in the main body and lifted therein; And a lower housing having a lift limiting unit for limiting a range lifted with respect to the main body. The method of claim 8, The lifting limit unit, A catching part provided in any one of the lower housing and the main body; A support unit, characterized in that provided in the other of the lower housing and the main body has a bite to engage the engaging portion. The method of claim 2, The second eject unit, An outer housing disposed below the first ejection portion and accommodated in the first ejection portion; An inner housing accommodated in the outer housing and provided to be elevated; And a first elastic member interposed between the lower housing and the outer housing. The method of claim 2, The third ejection unit, An elevating rod accommodated to elevate and guide the central regions of the first and second ejection portions; And a second elastic member interposed between the elevating rod and the inner housing to press the elevating rod toward the driving unit side. The method of claim 1, The main body, A base supporting the drive unit; One side is provided with a support, the other side is coupled to the base support unit, characterized in that it comprises a main body housing for receiving the multi-stage ejection unit. The method of claim 1, And the support portion has adsorption holes formed therethrough so as to adsorb the protective film to the plate surface by a predetermined vacuum pressure. The method of claim 1, The driving unit, A drive motor; Motion conversion means for converting the rotational motion of the drive motor into linear motion; And a lifting transmission shaft coupled to the movement converting means and the multi-stage ejection unit and connected to each other and configured to transmit a linear motion to the multi-stage ejection unit. The method of claim 14, The motion conversion means, A cam connected to the drive motor and rotating; And a cam follower which is engaged with the cam and lifts in the pressing direction of the protective film. The method of claim 1, And a control unit for controlling the operation of the drive unit to adjust the height protruding from the support plate surface of the multi-stage ejection unit. In the pickup device for holding a workpiece with a protective film, A transfer unit having a gripper for holding the workpiece; Pick-up device comprising the support unit of claim 1 for supporting the protective film of the workpiece. The method of claim 17, And a control unit for controlling the holding unit to move up and down corresponding to a height at which the multi-stage ejection unit protrudes from the plate surface of the support unit while the holding unit holds the workpiece.

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