KR20050094933A - Apparatus for cleaning flat display panel - Google Patents

Abstract

A cleaning device that cleans a substrate by a spraying action of a mixed fluid in which two or more cleaning fluids, such as gas or liquid, are mixed. It is not only easy to form a flow path for injecting fluid, but also sprays of gas. The present invention relates to a flat panel display cleaning device capable of drastically reducing the amount of cleaning liquid used for cleaning a substrate by inducing a mixed injection of a liquid by flow, and further improving injection efficiency and cleaning quality.

The cleaning apparatus includes a liquid supply part containing a cleaning liquid for cleaning a substrate, a gas supply part located in a posture facing the liquid supply part and containing a cleaning gas for cleaning the substrate, and the liquid supply part and the gas. And injection means provided between the supply portions and providing a flow path for allowing the cleaning liquid to be mixed and injected by the injection action of the gas as well as the cleaning gas,

The injection means is positioned in a position corresponding to the liquid supply part, and a liquid flow path assembly in which a flow path section for injecting a cleaning liquid is divided by thin plates, and positioned in a position facing the liquid flow path assembly for cleaning. The flow path section for injecting the gas is divided by the thin plates, and when the cleaning gas is injected through the gas flow path, the cleaning liquid is sucked through the liquid flow path by the one-way injection atmosphere of the gas and mixed injection is performed. It includes a gas flow assembly that leads to

Description

Cleaning device for flat panel display {apparatus for cleaning flat display panel}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display cleaning device. More particularly, the present invention relates to a cleaning device for cleaning a substrate by spraying a mixture of two or more types of cleaning fluids such as gas or liquid. Not only can the flow path be easily formed, but also the mixed injection of the liquid is induced by the injection flow of the gas, so that the amount of the cleaning liquid used for cleaning the substrate can be drastically reduced, and further improved injection efficiency and cleaning quality can be obtained. The present invention relates to a flat panel display cleaning device.

In general, the cleaning device by spraying the cleaning fluid is a flat panel display, that is, by removing a single or mixed fluid such as gas or liquid at a constant pressure to remove foreign substances adhering to the surface of the substrate, the substrate cleaning The cleaning area for the substrate is positioned in a transport section of the substrate within the bath and moves in the transport zone.

In addition, the cleaning apparatus includes a plurality of nozzles for spraying a fluid in a rectangular main body installed in a posture crossing the substrate transporting section in the longitudinal direction of the main body, for example, a cleaning section within the transporting section of the substrate. The cleaning fluid is sprayed toward the surface of the substrate through the nozzle when passing through the region of the cleaning apparatus to remove foreign matters stuck to the surface of the substrate by the spraying of the cleaning fluid.

Since a plurality of nozzles installed in the cleaning device are formed in a substantially annular shape for the flow path of the cleaning fluid, the cleaning fluid injected through the flow path is, for example, on the surface of the substrate. Since it has a spray area limited to an annular shape corresponding to the shape of the flow path, it is difficult to uniformly spray the fluid corresponding to the entire surface of the substrate passing the cleaning section, so that the cleaning efficiency of the cleaning fluid is of course satisfactory. There is a limit to getting.

Furthermore, in order to clean a large-area substrate, nozzles for dispensing fluid must be further installed in the cleaning apparatus main body, which is not only complicated in structure, but also requires excessive cost for manufacturing and maintenance. It's hard to expect

Apparatus that supplements the shortcomings of the cleaning device having the above-described injection structure is Patent Application No. 10-2002-0021553 published in October 30, 2003, the patent application by the present applicant.

Briefly describing the structure of the cleaning device, a rectangular body having a rectangular nozzle,

A separating partition wall provided along the long axis of the body at an inner center of the body to separate the inside of the body into an atmospheric pressure washing liquid storage unit and a pressure gas storage unit;

A gas supply port provided at an upper portion of the gas storage part at one side of the separation partition wall;

Laminar flow converting means installed in the gas reservoir to convert the pressure gas flowing from the gas supply port into laminar flow;

A cleaning liquid supply port provided in an upper portion of the cleaning liquid storage part on the other side of the separation partition wall;

“??” provided on the bottom surface of the separation partition wall to mix the cleaning liquid and the pressure gas supplied from the horizontal flow path provided at the bottom of the cleaning liquid storage unit and the vertical flow path provided at the bottom of the gas storage unit, and spray them to the flat panel display side through the nozzle. And a streamlined mechanism having equal intervals for engaging the nozzle in the minor axis direction of the nozzle to prevent elastic deformation of the nozzle-shaped liquid gas mixing sprayer and the nozzle gap.

That is, in the cleaning apparatus having the above-described structure, a separation partition for fluid mixing and injection is formed between the cleaning liquid storage unit and the pressure gas storage unit and is located at the lower end of the partition wall, and a flow path section for mixing liquid and gas in the storage units. Liquid gas mixer having a gas flow path, that is, when the pressure gas of the gas supply part is injected through the nozzle along a vertical flow path with the partition interposed therebetween, the liquid flow of the liquid storage part is sucked by the injection flow of the gas and is pressed along the horizontal flow path. After mixing with gas, the mixture is sprayed through a nozzle to remove foreign substances adhering to the surface of the substrate by the spraying action of the cleaning fluid.

However, in the conventional washing apparatus having a rectangular fluid injection nozzle, it is difficult to manufacture the flow path because the flow path region located between the two reservoirs, that is, the partition, the mixer, and the nozzle are integrally formed with the reservoirs. In addition, satisfactory precision and the like cannot be obtained, and since the environment inside the flow path can be easily changed according to the setting state of the storage units, there is a structural limitation in providing an optimal flow path environment.

In addition, when the shape deformation of the surface such as bending or torsion occurs, for example, by load or external force in the storage part, the shape of the flow path formed between the two storage parts is also deformed together to obtain satisfactory durability and spray quality. Can't expect

Further, even when the nozzle is fastened with streamlined mechanisms in the short axis direction, the elastic deformation of the gap between the nozzle parts is easily caused by the shape deformation of the storage parts or the injection pressure of the cleaning fluid, so that the injection efficiency and quality of the cleaning fluid can be further improved. It is one factor that lowers.

In addition, if a partial breakage of the flow path region occurs, the entire storage portion must be replaced. To adjust the injection amount or pressure of the cleaning fluid according to the size or shape of the substrate, the storage portion having a corresponding shape can be replaced or newly manufactured. It is difficult to expect satisfactory work compatibility and efficiency

The present invention has been made to solve the conventional problems as described above, the object of the present invention is to clean the substrate by their injection action using two or more cleaning fluids, in particular, Since the flow path region for injection is divided by thin plates having respective flow path sections, it is easy to manufacture, and to provide a flat panel display cleaning apparatus which can obtain more improved durability and injection quality.

In order to realize the object of the present invention as described above, a liquid supply portion containing a cleaning liquid for cleaning the substrate, and a gas containing a cleaning gas for cleaning the substrate is located in a position facing the liquid supply portion And a spraying means positioned between the liquid supplying portion and the gas supplying portion and providing a flow path for mixing the spraying liquid with the cleaning gas as well as the cleaning gas.

The injection means is positioned in a position corresponding to the liquid supply part, and a liquid flow path assembly in which a flow path section for injecting a cleaning liquid is divided by thin plates, and positioned in a position facing the liquid flow path assembly for cleaning. The flow path section for injecting the gas is divided by the thin plates, and when the cleaning gas is injected through the gas flow path, the cleaning liquid is sucked through the liquid flow path by the one-way injection atmosphere of the gas and mixed injection is performed. It provides a cleaning device for a flat panel display comprising a gas flow path assembly to guide the.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described in more detail.

1, 2, and 3, the liquid supply part 2 in which the cleaning liquid W for cleaning the substrate G is contained, and the substrate G is positioned in a position facing the liquid supply part 2. ) Is located between the gas supply part 4, which contains the pressure gas A for cleaning, and between the liquid supply part 2 and the gas supply part 4, as well as the pressure gas A. Injecting means 6 for causing the cleaning liquid W to be mixed and sprayed by the spray action, in the present embodiment, the substrate for cleaning the substrate G, for example, inside the cleaning bath as shown in FIG. Corresponding to the moving section of the substrate (G) to move along the transfer device (M) may be installed in the same attitude as in the figure.

The liquid supply part 2 is formed in the form of a box having a space part 2a in which the cleaning liquid W for cleaning the substrate G is contained, and corresponds to the injection means 6 described later as in FIG. 1. It has a rectangular shape, and may be a structure in which one side is opened so that a separate cover C is detachably coupled to a fastening member such as a bolt on the open side.

The material of the liquid supply part 2 may be a synthetic resin or a metal having excellent durability, chemical resistance, and workability. In addition, when the internal space 2a is configured to be opened or closed with a separate cover C as described above, the maintenance of the inside of the liquid supply part 2 is easy, but the internal cleaning liquid W is moved to the outside. For example, it should be manufactured so that the seal can be sufficiently maintained by installing a conventional rubber ring or the like for the seal.

As the cleaning liquid W stored in the liquid supply part 2, a well-known cleaning solvent such as pure water may be used, for example, to quickly decompose and remove foreign substances or particles existing on the surface of the substrate G. In addition, the cleaning liquid W may have a structure flowing through the liquid supply pipe P1 connected to the liquid supply unit 2 as shown in FIG. 1.

For example, the liquid supply part 2 may contain the cleaning liquid W at atmospheric pressure therein. For example, although the liquid supply part 2 is not contained in the drawing, when the cleaning liquid W is contained in a predetermined amount or more through the liquid supply pipe P1, the liquid supply part 2 may be discharged. It is set so as to overflow again so that a constant head pressure is always maintained in the space portion 2a inside the liquid supply portion 2.

Inside the liquid supply part 2, there is formed a discharge hole 2b through which the cleaning liquid W contained in the space 2a can flow to the injection means 6 described later, and the hole 2b is formed in the space part ( For example, at a position as shown in FIGS. 3 and 4 so that the cleaning liquid W may flow horizontally in correspondence with the bottom surface of 2a), a plurality of spaced apart in the longitudinal direction of the liquid supply part 2 may be formed. Can be formed.

The gas supply part 4 is to allow the pressure gas A for cleaning the substrate G to be supplied at a constant pressure to the injection means 6 to be described later, and the space for the pressure gas A to pass through. It is manufactured in the form of a box having a portion 4a. In the present embodiment, the gas supply part 4 has a rectangular shape corresponding to the liquid supply part 2 as shown in FIGS. 1 and 2, and a separate cover C is formed at the opening side of the space part 4a. An example of a structure that is detachably coupled to a fastening member such as a bolt is shown.

The material of the gas supply part 4 is a metal having excellent durability and chemical resistance so as to prevent deformation or breakage due to pressure or the like when the pressure gas A is discharged while passing through the internal space 4a. Or synthetic resins may be used.

The material of the gas supply unit 4 may be, for example, a metal material such as SUS series or a synthetic resin such as engineering plastic. And, in order to prevent the pressure gas (A) from being lost to the opening side of the space portion (4a) that the cover (C) is detachably coupled, such as a rubber ring for sealing, such as the liquid supply portion (2) By using a sufficient seal can be maintained.

In addition, when the pressure gas A supplied to the gas supply part 4 is injected and mixed with the cleaning liquid W, for example, the cleaning liquid is injected as well as foreign matter from the surface of the substrate G by a blowing action ( As W) can be quickly removed, for example, a well known cleaning gas such as Clean Dry Air (CDA) or the like can be used.

The gas supply unit 4 may be connected to the gas supply pipe (P2) as shown in Figure 1 may be a structure in which the pressure gas (A) flows from the supply pipe (P2), the pressure gas (A) supplied as described above Via the space portion 4a is made to be supplied directly to the injection means 6 to be described later through the discharge hole 4b as shown in FIG.

Referring to FIG. 3, in the space portion 4a of the gas supply unit 4, a means for converting the pressure gas A introduced from the gas supply pipe P2 from the turbulent state to the laminar flow state is formed as shown in the drawing. Can be. This means is provided with a blocking film 8 as shown in FIGS. 3 and 4 corresponding to a section in which the pressure gas A flows in the space portion 4a of the gas supply portion 4, so that the single space portion 4a is formed. ) Is divided into two spaces divided up and down, that is, the upper space portion 10a and the lower space portion 10b, and the blocking film 8 includes a plurality of spaces for converting the pressure gas A from turbulent flow to laminar flow. Holes 12 may be perforated.

In this case, the plurality of holes 12 formed in the blocking film 8 may be perforated in the arrangement as shown in FIG. 5, and the holes 12 may be divided into two space parts 10a and 10b. When the pressure gas A flowing while passing through the hole 12 passes through the hole 12 region, for example, it is formed within a size range that can be smoothly converted from turbulent flow to laminar flow by the diameter difference of the flow path.

The laminar flow converting means of the above structure, the pressure gas (A) flowing through the gas supply pipe (P2) is introduced into the upper space portion (10a) is converted into a laminar flow from turbulent flow is stored first, in this state When passing through the holes 12 formed in the blocking film 8, the structure is converted into turbulent flow into laminar flow and stored secondly. In detail, the laminar flow converting process will be described in detail. As it is uniformly compressed by the pressure according to the diameter difference of the flow path when passing through the holes 12 of), the pressure gas A which is easily converted into laminar flow having a uniform pressure by this action and converted into laminar flow is Since the cross-sectional area is rapidly expanded in the lower space portion 10b, the velocity decreases and the pressure energy relatively increases with the decrease of the velocity energy, thereby passing through the barrier film 8 by such an action. Is the ability to be easily converted into a laminar flow of high-pressure pressurized gas (A).

On the other hand, the injection means 6 is provided between the liquid supply part 2 and the gas supply part 4, the structure of such means will be described in detail with reference to the accompanying drawings.

Referring to FIGS. 2 and 3, the spray means 6 is positioned in a position corresponding to the liquid supply part 2 and sprays the cleaning liquid W while the divided sections are connected by the combination of the thin plates F1. The liquid flow path assembly 14, which provides a single flow path H1, and is positioned in a position facing the liquid flow path assembly 14, and a section divided by the combination of the thin plates F2 is connected to the pressure gas ( In addition to forming a flow path H2 for injecting A), when the pressure gas A is injected in one direction through the flow path H2, the washing liquid W is sucked through the liquid flow path H1 and mixed. It includes a gas flow path assembly 16 for inducing to be injected, in the present embodiment, the four thin plates (P1) in the liquid flow path assembly 14 side is composed of one set, three on the gas flow path assembly 16 side As an example, the thin plates P1 consist of one set. It is.

The thin plates F1 of the liquid flow path assembly 14 have a rectangular shape corresponding to the liquid supply part 2 as shown in FIG. 2, and the lower side of the thin plates F1 is divided to allow the cleaning liquid W to flow. Flow path grooves 20a providing the flow path section are spaced apart as shown in the figure.

As the flow path grooves 20a formed in the thin plate F1 are connected to four sections divided by the flow path grooves 20a as shown in FIGS. 3 and 4, a single flow path H1 as shown in FIG. In the present embodiment, the flow path groove 20a of the thin plate F1 adjacent to the liquid supply part 2 is perforated in a circular shape, and the remaining three thin plates F1 are formed in a perforated structure to be formed. For example, a structure in which the lower side is opened, for example, is perforated in a '∩' shape to form a single flow path region corresponding to the discharge hole 2b of the liquid supply part 2 is shown as an example.

At this time, the liquid flow path (H1) section formed by the four thin plates (F1) as described above gradually toward the boundary point with the gas flow path assembly 16 on the liquid supply part 2 side as shown in FIG. It may be formed to be inclined or may have a structure in which the inlet side and the outlet side are horizontal to each other, although not shown.

Referring to FIG. 3, the section length L1 of the liquid flow path H1 formed by the bonding of the thin plates F1 is made in the range of about 0.1 mm to 0.2 mm, and the thickness of the thin plate F1 is According to the number of thin plates F set in the liquid flow path assembly 14 region, the flow path section having the length range as described above is formed within the corresponding range.

In addition, since the flow path groove 20a is difficult to physically cut in consideration of the thickness of the thin plate F1, for example, the flow path groove 20a may be formed by a corrosive action such as photo etching, and the like. As the material, any one of materials suitable for such an etching process and excellent in durability may be used.

The gas flow path assembly 16 is formed of thin plates F2 having a rectangular shape corresponding to the gas supply unit 4 as shown in FIG. 2, and a pressure gas A flows through the lower sides of the thin plates F2. Flow path grooves 20b for providing divided flow path sections are spaced apart as shown in the drawing.

The flow path grooves 20b formed in the thin plate F2 are perforated to form a single gas flow path H2 while the sections divided by the three flow path grooves 20b are connected as shown in FIGS. 3 and 4. As shown in FIG. 2, the flow path groove 20b of the thin plate F2 adjacent to the gas supply unit 4 is punched in a circular shape in the present embodiment, and the lower two sides of the thin plate F2 are lowered. For example, a structure in which a single gas flow path H2 is formed as shown in the drawing in correspondence with the discharge hole 4b of the gas supply part 4 is punched in the shape of the opening, for example. .

At this time, the gas flow path (H2) section formed by the three thin plates (F2) is one-way flow of the gas (A) when the pressure gas (A) is injected through the flow path (H2) as shown in FIG. It guides the cleaning liquid (W) is sucked through the liquid flow path (H1) by, and as shown in the drawing so that the discharge side and the predetermined section of the liquid flow path (H1) to communicate with each other two fluids in this communication section Is formed to allow the flow and action of a fluid such as, for example, a venturi tube, to allow a mixed injection.

In addition, the flow path groove 20b perforated in the shape of “∩” in the shape is recessed while the middle portion between the upper side and the lower side of the perforation area is connected in a streamline shape as shown in the figure. When the flow path groove 20b is formed in such a structure, when the pressure gas A passes through the gas flow path H2 from the gas supply part 4, the flow path H2 is in this area. Since the pressure of the pressure gas (A) is increased by the diameter difference of, it becomes a structure that can further improve the injection efficiency.

As described above, the section length L2 of the gas flow path H2 formed by the bonding of the thin plates F2 is made within the range of about 0.1 mm to 0.2 mm, the same as the section length of the liquid flow path H1.

The flow path groove 20b of the thin plate F2 may be formed in the same manner as the thin plate F1 of the liquid flow path assembly 14 by, for example, photo etching or the like. Any material suitable for the same etching process and the like and excellent in durability may be used.

The flow paths H1 and H2 formed in the liquid flow path assembly 14 and the gas flow path assembly 16 having the above-described structures have sections as shown in FIG. 3 with their boundary points therebetween. As shown in FIG. 1, in the direction crossing the substrate G moving in one direction in the cleaning region, as shown in FIG. 6, a plurality of spaces are formed to correspond to the surface of the substrate G passing through the cleaning section. The fluid has a rectangular spray area and is configured to be uniformly sprayed (see FIG. 7).

When the liquid flow path assembly 14 and the gas flow path assembly 16 are set between the liquid supply part 2 and the gas supply part 4, for example, the liquid flow path H1 side thin plate F1 and The thin plate F2 on the side of the gas flow path H2 is fitted to the guide pin 22 as shown in FIGS. 3 and 4, and the guide pin 22 is attached to the side wall surface of the liquid supply part 2 and the gas supply part 4. It may be a structure that is fixed by fitting engagement.

The coupling of the liquid supply part 2 and the gas supply part 4 and the injection means 6 located therebetween is such that, for example, a fastening member such as a bolt and a nut is connected to the liquid supply part 2 as shown in FIG. 2. The injection means 6 and the gas supply part 4 may be fastened horizontally to be firmly set in the shape and arrangement as shown in FIG. 3.

The flat panel display cleaning apparatus according to the present invention having the above structure has the following effects when the substrate G is moved in one direction by the substrate transfer device M in the cleaning region and passes through the cleaning section as shown in FIG. The surface of the substrate G is cleaned by this.

First, when the pressure gas A flows into the gas supply unit 4 through the gas supply pipe P2, the pressure gas A is supplied to the gas flow path assembly 16 as shown in FIG. ) Is injected with a constant pressure in the same direction as shown in the drawing via the section.

At this time, in the section where the gas flow path (H2) and the liquid flow path (H1) are in communication, when the pressure gas (A) passes through the one-way flow of the pressure gas (A) to the atmospheric pressure state in the liquid supply unit (2) The stored cleaning liquid W is sucked along the liquid flow path assembly 14, that is, the liquid flow path H1, and the pressure gas A is in communication with the liquid flow path H1 and the gas flow path H2 as shown in FIG. 3. ) And then sprayed at a constant pressure toward the surface of the substrate (G) as shown in the drawing, it is possible to easily remove the foreign matter adhering to the surface of the substrate (G) by the injection action of the cleaning fluid.

In the above, the thin plate (F1, F2) for forming the liquid and gas flow path (H1, H2) on the liquid flow path assembly 14 and the gas flow path assembly 16 side as shown in Fig. Although the sections divided by the flow path grooves 20a and 20b formed in the thin plates F1 and F2 are connected to each other to form a single liquid and gas flow path H1 and H2 as an example, the description and the drawing are shown. It is not limited to this.

For example, although not shown in the drawings, two or more pieces may be formed in one pair corresponding to the liquid flow path assembly 14 or the gas flow path assembly 16, and of course, the length of the flow path may be different from that of the above-described embodiment. It is formed in the same length range, that is, 0.1mm to 0.2mm range, the formation of such a flow path section may be set by manufacturing a thin plate having a divided thickness corresponding to the length of this section.

In the above description, the flat panel display cleaning apparatus according to the present invention is provided as one example in an attitude capable of cleaning the upper surface corresponding to the transfer direction of the substrate G in the cleaning region, but is not limited thereto.

For example, two or more spaces may be spaced apart from each other as shown in FIG. 8 to correspond to the transfer section of the substrate G. In addition, cleaning is not limited to one side of the substrate G. It may be set as shown in FIG. 9 to enable it.

 In the above, a preferred embodiment of the flat panel display cleaning apparatus according to the present invention has been described, but the present invention is not limited thereto, and various modifications are made within the scope of the claims and the detailed description of the invention and the accompanying drawings. It is possible and this also belongs to the scope of the present invention.

As described above, the flat panel display cleaning apparatus according to the present invention can easily clean the substrate by the injection means for providing a flow path for mixing and spraying two or more kinds of cleaning fluids such as liquid and gas. The means is formed by connecting the sections divided by the plurality of thin plates to form a single flow path for the cleaning liquid and the gas flow, and the cleaning liquid is sucked by the flow atmosphere of the cleaning pressure gas so that they are mixed and sprayed together. As it is the structure, it is not only easy to manufacture the flow path, but also more improved durability and spraying efficiency can be obtained, and it is possible to easily set the spraying environment of the cleaning fluid according to the size and shape of the substrate. It can be further improved.

1 is an overall perspective view showing an installation state of a cleaning device for a flat panel display according to the present invention.

Figure 2 is an overall exploded perspective view for explaining the structure of the cleaning device for a flat panel display according to the present invention.

Figure 3 is a side cross-sectional view for explaining the internal structure of the cleaning device for a flat panel display according to the present invention.

Figure 4 is a cross-sectional perspective view for explaining the internal structure of the cleaning device for flat panel display according to the present invention.

5 is a plan view for explaining the perforation structure of the laminar flow converting means of FIG.

Figure 6 is a bottom view for explaining the flow path arrangement of the cleaning device for flat panel display according to the present invention.

7 is a plan view showing a spraying area corresponding to a substrate during the spraying operation of the flat panel display cleaning apparatus according to the present invention.

Figure 8 is a perspective view for explaining another embodiment of the flat panel display cleaning apparatus according to the present invention.

Figure 9 is a perspective view for explaining another embodiment of the flat panel display cleaning apparatus according to the present invention.

Claims (14)

A liquid supply portion containing a cleaning liquid for cleaning the substrate, a gas supply portion positioned in a position facing the liquid supply portion, containing a cleaning gas for cleaning the substrate, and positioned between the liquid supply portion and the gas supply portion for cleaning. And a jetting means for providing a flow path for allowing the mixing liquid to be jetted by the jetting action of the gas as well as the gas, The injection means is positioned in a position corresponding to the liquid supply part, and a liquid flow path assembly in which a flow path section for injecting a cleaning liquid is divided by thin plates, and positioned in a position facing the liquid flow path assembly for cleaning. The flow path section for injecting the gas is formed by the thin plates, and when the cleaning gas is injected through the gas flow path, the cleaning liquid is sucked through the liquid flow path by the one-way injection atmosphere of the gas and mixed injection is performed. Cleaning device for flat panel display including a gas flow path assembly to guide. The cleaning device for a flat panel display according to claim 1, wherein the liquid supply unit has a rectangular space portion for storing the cleaning liquid. The cleaning apparatus for a flat panel display according to claim 1, wherein the gas supply unit has a rectangular space portion for storing the cleaning gas. The method of claim 1, wherein the gas supply unit further comprises a laminar flow conversion means for converting the inlet gas from the turbulent state to the laminar flow state, the conversion means for dividing the space portion into two corresponding to the inlet and outlet section of the gas and In addition, the cleaning device for a flat panel display in which holes for laminar flow conversion of gas are perforated in these boundary regions. The cleaning device for a flat panel display according to claim 4, wherein the holes have a circular or polygonal shape and a plurality of holes are spaced apart from each other at the boundary of the two divided spaces. The flat panel display cleaning apparatus of claim 1, wherein flow path grooves having divided flow path sections are formed in the thin plates of the liquid flow path assembly, and the divided sections are connected to form a single liquid flow path. The cleaning apparatus for a flat panel display according to claim 6, wherein two or more thin plates are installed in the liquid flow path assembly region. The flat panel display cleaning apparatus of claim 1, wherein flow path grooves having divided flow path sections are formed in the thin plates of the gas flow path assembly, and the divided sections are connected to form a single gas flow path. The apparatus of claim 8, wherein two or more of the thin plates are provided in the gas flow path assembly region. The cleaning device for a flat panel display according to claim 1, wherein the liquid flow path and the gas flow path are set such that the discharge side of these flow path sections has a single section in communication with each other. The method of claim 1, wherein the liquid flow path and the gas flow path is formed in a posture facing each other with a boundary area between the liquid flow path assembly and the gas flow path assembly, the flow path section is horizontally or gradually downward toward the boundary area. Cleaning device for a flat panel display formed to have a discharge section in the form of a picture. The cleaning device for a flat panel display according to claim 1, wherein the length of the flow path sections of the liquid flow path assembly and the gas flow path assembly is in the range of 0.1 mm to 0.2 mm, respectively. The cleaning apparatus for a flat panel display according to claim 1, wherein a plurality of flow paths of the liquid flow path assembly and the gas flow path assembly are spaced apart from each other so as to have a rectangular spray area in a direction crossing the substrate passing through the cleaning section. The cleaning device for a flat panel display according to claim 1, wherein the cleaning device is one or more spaced apart from each other to allow the surface to be cleaned in a cleaning area corresponding to one or both sides of the substrate.