TWI279259B - Apparatus for cleaning flat display panel - Google Patents

Abstract

A cleaning apparatus for a flat display panel includes a liquid supplying unit for storing cleaning agent used for cleaning the panel, a gas supplying unit for storing gas used for cleaning the panel, the gas supplying unit being disposed facing the liquid supplying unit, and a spraying unit disposed between the liquid supplying unit and the gas supplying unit to spray a mixture of the cleaning agent and the gas, the cleaning agent and the gas being mixed with each other as the cleaning agent is sucked by the flow of the gas. The spraying unit includes a liquid passage assembly disposed corresponding to the liquid supplying unit and provided with a liquid passage formed by a plurality of thin plates, and a gas passage assembly disposed facing the liquid passage assembly and provided with a gas passage formed by a plurality of thin plates, the gas passage assembly allowing the cleaning agent to be sucked and mixed with the gas by the flow of the gas and allowing the mixture of the cleaning agent and the gas to be sprayed to the display panel.

Description

1279259 IX. INSTRUCTIONS OF THE INVENTION: FIELD OF THE INVENTION The present invention relates to an apparatus for cleaning a flat panel display panel, particularly related to a type that can be sprayed by two or more types such as gases and liquids. A mixture of cleaning agents is applied to a flat panel display panel to clean a flat panel display panel. More particularly, the present invention relates to an apparatus for cleaning a flat panel display panel that is designed to (a) easily form a fluid path through which a cleaning agent can be sprayed through the φ fluid path; (b) A mixture of fluid sprays is used to produce a mixture of fluid sprays to reduce the use of cleaning agents; and (c) to improve spray efficiency and cleaning efficiency. [Prior Art] In general, a cleaning apparatus for a flat display panel is provided to remove foreign matter adhered to a flat display panel using a roller brush. The apparatus is disposed in the cleaning apparatus corresponding to a panel transfer section, i.e., in a bath, separate from the drying apparatus or the like. The cleaning apparatus includes a plurality of nozzles ??? separated from each other in a longitudinal direction of a rectangular body for spraying fluid to a rectangular body mounted to be transverse to a panel conveying section. For example, when the display panel passes through the cleaning section where the cleaning device is installed, the cleaning agent is sprayed on a surface of the display panel via the nozzle to remove the adhesive panel to the display panel. Foreign matter on the surface. Each of the nozzles that are salted on the cleaning device has a fluid shape of a shape of 6 1279259. The cleaning agent sprayed on the surface of the sample has a spray of fluid on the entire surface of the display panel. on. Because:: Uniform people, Golitge*, Shishi clothes back up, therefore, there is a limit on the quality of the monthly washing and the effective spraying efficiency. When the panel is large in size, the spray is applied, which complicates the structure and increases the manufacturing cost.

Guo Wei: = The cleaning equipment designed to solve the above problems is disclosed in Korean Patent Application No. 10_2002_0021553, and the applicant for the patent is the same as the applicant in this case. A broken cleaning device is not included in the patent case. The cleaning device includes a rectangular body having a moment of a mouth; a separate spacer member is disposed to be disposed from one of the gas storage sections. a vertical passage on the square end and a mixture of cleaning agent and pressurized gas supplied at a horizontal passage provided on the lower end of the cleaning agent storage section; the turbulent line device is attached to the nozzle One of the short axis 上面 上面 = = tr longitudinal direction 'to divide a space of the rectangular body into a / month screening storage section and a pressure gas storage part; a gas supply orifice '丨Forming an upper portion of the body storage section on the side of one of the barrier members for separation of the f; a laminar flow conversion unit, which is used in the gas storage section to serve as a gas supply The pressure of the orifice is converted into a laminar flow; a clearing agent supply orifice is formed over the upper portion of the cleaning agent storage section at the other side of the separation barrier ; a liquid/gas mixture Sprinkling means, which is formed into a line - "Ή" shape, and is provided on the bottom of one of the separation barrier, spray 71279259 meal 'for preventing the opening of the nozzle is elastically deformed. The 'cleanant storage section and the pressurized gas storage section are separated from each other by the separation barrier, and the cleaning agent and the pressurized gas system are in a fluid passage for mixing the cleaning agent's rush gas. Mix with each other to form a liquid/gas mixture. In other words, the pressurized gas system is sprayed along the vertical channel through the nozzle. At this time, the two detergents in the detergent storage section are sucked by the spray flow of the pressurized gas for use along with = The pressure gas of the horizontal channel is mixed. The mixture of cleaning agent and pressurized gas is sprayed through the nozzle to the surface of the display panel to remove foreign matter adhering to the display panel. 8. However, among the cleaning devices, since the separation barriers, the mixture, and the nozzles which are located between the storage sections to define the fluid passage area are integrally formed with each other, with sufficient precision It is difficult to manufacture it. Furthermore, depending on the positioning energy of one of the storage sections, the environmental system of the internal space of the fluid passage may be easily changed, and it is difficult to provide an optimum fluid passage environment. In addition, when the storage sections are deformed by, for example, a load or an external force, the fluid passage formed between the storage sections is also deformed, thereby causing spray quality and durability. deterioration. Furthermore, when the fluid passage area is partially damaged, the entire unit that stores the damage must be replaced. The entire unit that is sprayed with force to correspond to the size and shape of the display panel must also be replaced with a newly designed storage portion. Sub°: The system will cause a deterioration in work efficiency. 1279259 [Disclosure] The problem is therefore that 'the present invention (4) is applied in an effort to solve the above-mentioned invention according to the present invention. The object of the present invention is to provide a cleaning and injury, and to obtain a fine enough to be sprayed by two kinds. Or a mixture of a plurality of types of cleaning agents such as gases and liquids to clean a flat panel. The "Others" purpose is to provide a device for cleaning a flat display = panel, which is designed to (a) form a fluid: diameter, and the cleaning agent can be passed through the fluid path. (b) Hunting is a mixture of fluid sprays generated by the use of a spray of gas to reduce the use of cleaning agents; m (C) improving spray efficiency and cleaning efficiency. To achieve the above object, the present invention provides A cleaning device for a flat panel display panel, comprising: a liquid supply unit for storing a cleaning agent used for cleaning a panel; a gas supply early for use in storage for use Cleaning the gas of the panel, the gas supply unit is disposed to face the liquid supply unit; and a spray unit is disposed between the liquid supply unit and the gas supply unit for spraying the cleaning agent Mixture with gas 'When the cleaning agent is pumped by the flow of the two bodies, the cleaning agent and the gas system are mixed with each other. The spray unit includes: a liquid passage assembly disposed to correspond to the liquid supply unit 'and provided with a liquid passage formed by a plurality of two plates; and a gas passage assembly that is fastened Positioned to face the liquid channel assembly' and provided with a gas passage formed by a plurality of 1,279,259 sheets that allow the cleaning agent to be pumped and mixed with the gas by the flow of the gas And allowing a mixture of cleaning agent and gas to be sprayed onto the display panel. [Embodiment] A preferred embodiment of the present invention will now be described with reference to the accompanying drawings. Where possible, the same component symbols will be used throughout the drawings to identify the same or similar components. Referring first to the first to third figures, the cleaning apparatus of the present invention includes a liquid supply unit 2, a gas supply unit 4, and a f-unit 6' liquid supply unit 2 stored for use in cleaning. _ panel G of the lotion w, the gas supply unit 4 is facing the liquid supply and stores the pressure gas A used to clean the panel G, and the element: the early 6 series is placed between the liquid supply unit 2 and the gas supply Single =. The 丄 is used to spray the mixture of the pressurized gas A and the cleaning (4):: The cleaning device of the embodiment corresponds to the conveying of the panel G which is moved by the ampere * # B ) along a panel conveying device Section 'in a bath (one of the cleaning areas of panel G). Out two =! Unit 2 is formed into a box shape, which defines W. In other words, the chamber 2 3 is formed by storing a cleaning agent used to clean the panel G, corresponding to a spray sheet which will be described in the rectangular shape of the liquid supply unit as shown in FIG. - Two demolition: The supply unit 2 has an open end, which is made up of - a fixed element? The cover C is covered, and the detachable cover C is fixed thereto by a cow such as a bolt. 10 1279259 The liquid supply unit 2 can be formed of a resin or resin having good durability and chemical resistance of 2 p < When the open end of the liquid supply unit is closed by the removable cover type C to seal the inner valley to 2 a, the maintenance of the inner side ,9, .. 2 2 a is convenient. . However, there is a possibility that the cleaning agent W leaks (4), and it is preferable that an auxiliary sealing member such as a rubber ring coating system is further provided to provide a sure sealing condition.

> The cleaning agent stored in the liquid supply unit 2 can be formed of a material such as pure water, which can quickly dissolve and remove foreign matter adhered to the surface of the panel G. The cleaning agent can be supplied via a liquid supply tube that is connected to the liquid supply unit 2? It is imported, as shown in the first figure. In order to store the cleaning agent W in the chamber 2a of the liquid supply unit 2 under atmospheric pressure, when the cleaning agent w is accommodated for a predetermined amount via the liquid supply tube member, the cleaning agent w is discharged through a discharge. The tube overflows so that a predetermined water pressure can be maintained in the chamber 2a of the liquid supply unit 2. The liquid supply unit 2 is provided with a plurality of discharge orifices 2b, and the cleaning agent w accommodated in the chamber 2a can be guided through the discharge orifices 2b to reach the spray unit 6. Each of the orifices 2b is formed in an oval shape, so that the cleaning agent W can be horizontally flowed (see the third and fourth figures). The discharge orifices 2b are disposed in the longitudinal direction of the liquid supply unit 2 and are separated from each other. The gas supply unit 4 is designed to supply the pressurized gas A to the spray sheet 11 1279259. The gas supply unit 4 is formed in a box shape which is bounded by a chamber 4a for the Lili gas A. In this embodiment, as shown in the first and second figures, the gas supply unit 4 is formed into a rectangular shape in the liquid supply unit 2, which has an open end. Covered by a detachable outer cover c, the detachable outer cover C is fixed thereto by a bolt. The gas supply unit 4 can be formed of a resin or a metal having good durability and chemical resistance t so that deformation does not occur when the pressure body A passes through the chamber 4a. More preferably, the gas supply unit 4 can be formed of a metal or engineering plastic based on sus. Since there is a possibility of leakage of the cleaning agent w, it is preferred that a sealing auxiliary member such as a rubber ring system is further provided to provide a sure sealing condition. The pressurized gas A supplied to the gas supply unit 4 is sprayed in a state of being mixed with the cleaning agent, which acts to remove foreign matter adhered to the surface of the panel G, and is quickly removed to be sprayed. The cleaning agent W on the surface of the panel g. The pressurized gas a can be formed by clean dry air (CDA). As shown in the first figure, the gas supply unit 4 can be connected to a gas supply pipe member P 2 for receiving the pressure gas A from the gas supply pipe member P2. As shown in the third figure, the pressurized gas A is directly supplied to the spray unit 6 through the discharge chamber 4a through the discharge port 4b. Referring to the third figure, a conversion unit for converting the pressure gas A guided from the gas supply pipe member p 2 and 12 1279259 is formed in the chamber 4a of the gas supply unit 4. In other words, the conversion unit converts the pressurized gas a from a turbulent flow to a one-layer flow. The conversion unit is designed to have a barrier member 8 (see the second and fourth figures) corresponding to a pressure gas flow section in the chamber of the gas supply unit 4 for dividing the chamber 4a into Upper and lower chambers 1 〇a and 1 0 b. The barrier member 8 can be provided with a plurality of orifices 12 for converting the pressurized gas a from turbulent flow to laminar flow.

As such, the hole formed on the barrier member 8 is configured as shown in the fifth figure. The orifices 1 2 are sized such that the flow of the pressurized gas A flowing through the chambers 1 〇 a and 1 〇 b can be converted from turbulent flow to laminar flow by the difference in diameter of the fluid passages.

The flow conversion unit is designed to convert the flow of the pressurized gas A induced through the gas supply pipe P 2 from the turbulent flow when it is guided to the upper chamber i 〇 a and first stored in the upper chamber 10a The laminar flow and the flow of the pressurized gas A to be stored in the upper chamber i 〇a are converted from a strenuous flow to a laminar flow as it passes through the orifice formed on the barrier member 8 and then stored. In more detail, when the force gas a passes through the orifice 1 of the resisting member 8, the pressure gas A is uniformly compressed by the pressure caused by the straight coma of the fluid passage, thereby being more easily (4) Edited. The velocity energy of the laminar pressure gas A is lowered by the rapid increase in the cross-sectional area at the lower: to 1 ◦ b. By the decrease in the velocity energy, the pressure energy is rapidly increased, thereby converting the flow of the pressure gas A passing through the barrier member 8 into a high pressure laminar flow. 13 1279259 At this time, the spraying unit 6 is again in the < between the liquid supply unit 2 and the gas supply unit 4. This will be described in more detail below and below in conjunction with the schema. Referring to the first figure and the third figure, sprinkling and leaving ~p, selecting early 70 6 series corresponding to the liquid supply

It should be positioned in unit 2, which includes right plus > I. It is estimated that there is a liquid channel assembly 14 and a gas channel assembly 1 6, and the liquid channel component 14 has a coupling. The sheets F 1 are connected to each other and provided with a single passage H丄 to spray the separation section of the cleaning agent W while the gas passage groups 6 face the liquid passage assembly and have (4) separate sections in which the sheets F 2 are connected to each other. Forming a passage H 2 for spraying the pressurized gas eight, and causing the cleaning agent W to be sucked through the liquid passage Η 1 when the repeated force gas is sprayed in a direction passing through the passage η2 Spraying of a mixture of liquid and pressurized gas. In this embodiment, a set of four sheets F 1 are formed on the liquid passage assembly 14 and a set of three sheets F 2 are formed on the gas passage assembly 16. As shown in the second figure, the thin plate F 1 of the liquid passage assembly i 4 is formed into a rectangular shape corresponding to the liquid supply unit 2. A channel groove 2a defining a separation passage section to guide the flow of the cleaning agent w is formed on a lower portion of the thin plate f1. As shown in the second and fourth figures, when the four sections are connected by the channel groove 2 〇a, the channel groove 2 〇a formed on the thin plate F丄 is defined. Single channel]^;!^. Referring to the second figure, the channel groove 20a of the thin plate F1 close to the liquid supply unit 2 is formed into a circular shape, and the remaining channel groove 2 〇3 of the thin plate F i is formed by 14 1279259. It is an n-shaped shape for defining a single gas passage completion corresponding to the discharge orifice 2b of the liquid supply unit 2. In this connection, as shown in the third figure, the liquid passage H i section formed by the four thin plates F 1 is formed to be inclined downward to travel from the liquid supply unit 2 side to the gas The boundary point of channel component i 6 . Or, the intake side has a section that is parallel to the section on the discharge side. The length L 1 of the liquid passage η 1 formed by the light-bonding thin plate F 1 is set in the range of 01_0·2 mm, and the thickness of each of the thin plates F 1 is set to provide A liquid passage Η 1 according to the length of the number of sheets F. Considering the thickness of the thin plate F1, it is difficult to mechanically treat the channel trench 2a, which can be formed by a photolithography process. Therefore, the sheet F 1 image can be formed of a material which is excellent in durability suitable for use in photoetching treatment. As shown in the second figure, the gas passage assembly 16 is constituted by a thin plate F 2 each of which is formed into a rectangular shape corresponding to the gas supply unit 4. A channel groove 2 〇 b defining a partition passage section to guide the flow of the pressurized gas A is formed on the lower portion of the thin plate F 1 . As shown in the third and fourth figures, when the three segments are connected by the channel grooves 20b, the channel grooves 2b defined on the sheets F, 2 are defined A single channel η 2 is produced. Referring to the second figure, the channel groove 2 〇b of the thin plate F 2 close to the gas supply unit 4 is formed into a circular shape by the shape 15 1279259, and the remaining channel groove 2 0 b of the thin plate F 2 is formed. It is an n-shaped shape for defining a single gas passage Η 2 corresponding to the discharge orifice 4b of the gas supply unit 4. As such, 'as shown in the third figure, the gas passage η 2 section formed by the three sheets F 2 is circumferentially guided to guide the pressure gas A ' so that the cleaning agent w can be sucked through Liquid channel η i. The gas passage H2 acts as a venturi which allows a predetermined section of the gas passage H2 to communicate with the liquid passage ,, whereby the cleaning agent and the gas system can be mixed with each other and sprayed at the communication section . Each of the n-shaped channel grooves 2 〇 b may be formed to have upper and lower portions which are connected to each other in the form of a pilot line. The middle portion is concave and the upper and lower portions are convex. Therefore, when the pressurized gas A passes through the gas passage η 2 , the house force of the pressurized gas A is increased by the difference in diameter of the gas passage, and the spraying efficiency can be further improved. y The length of the gas passage H2 formed by the joining of the thin plate F2 is set in the range of 0.1 - 2 mm. The channel trench 2 〇 a can be formed by a photolithography process. Therefore, the seesaw F 1 system can be formed of a material suitable for the first-lasting treatment and the right; 13⁄4 excellent durability. 〃, 桎 are formed in the individual liquid and gas channel components between the ports 1 and H 2 and the lines on the ancient and the fine 16 are formed with a far boundary section as shown. In addition, as shown in the first brother's picture, the 诵 Μ η Η 2 system is formed to face the surface 16 1279259 plate G in the direction of one of the months of the moon. At a plurality of spaced points, a seventh map corresponding to the surface of the panel G). 'The cleaning agent can be sprayed in the shaped area (see Figure 6 and

In the liquid wall assembly, the liquid and gas supply unit 2 and the four thin plates F1 and the gas passage H guide pins 2 2 are disposed as in the third drawing and the guide pins 2 2 are fitted in the liquid side walls. And the gas passage assembly 16 at the time, the thin plate F 2 for the liquid passage Η 1 of 2 is assembled as shown in the introduction and the fourth diagram, and the gas supply units 2 and 4 and sprayed The coupling of unit 6 is completed. The bolts are horizontally and horizontally, and the gas supply unit 4, the liquid and gas supply units 2 and 4 pass through the liquid supply unit 2, the sprinkler unit by a fixing member such as a screw and a nut (as in the third figure) In the above-described cleaning apparatus for a flat panel display device, when the panel G is moved in one direction to pass through the cleaning area, the panel is cleaned by the following operations.

First, when the pressurized gas train is introduced into the gas supply unit 4 via the gas supply pipe Ρ 2, the pressurized gas A is supplied to the gas passage assembly 16' as shown in the third figure. * Next, the pressure gas Δ is sprayed at a predetermined pressure via the gas pressure H2 section. In this connection, in the section where the gas passage H 2 is in communication with the liquid passage h, the cleaning agent W stored in the liquid supply unit 2 and under atmospheric pressure is subjected to the pressure gas A. The flow is sucked along the liquid passage Η 1 of the liquid passage assembly 14 and mixed by a predetermined pressure 17 1279259 to remove the foreign matter adhered to the panel G. In the above embodiment, although the liquid passage H is formed by the passage grooves 2 〇 a formed on the four thin plates F, the gas passage h 2 is a passage groove by the three thin plates F 2 2 Q b is formed, and the present invention is not limited thereto. For example, the number of sheets is variable as long as the channel length is in the range of 0.1-0.2 mm. Further, although only one cleaning device unit is provided corresponding to the panel conveying section, the present invention is not limited thereto. For example, as shown in the eighth figure, two or more cleaning devices can be installed to be separated from one another by a predetermined distance. Additionally, two unit units can be installed to spray the cleaning agent to both sides of the display panel G, as shown in the ninth figure. Among the cleaning apparatuses for display panels, since a spray unit having a passage for spraying a mixture of a liquid and a gas is formed, the panel can be effectively cleaned. Since the spray unit provides a single passage formed by coupling a plurality of sheets, it is easy to form the passage. Further, since the cleaning agent is sucked by the flow of the pressurized gas and mixed with the pressurized gas, the mixture can be effectively sprayed through the passage. In addition, the spray environment can be easily changed by simply changing the thickness of the panel according to the size and shape of the panel, thereby improving the cleaning quality and the efficiency of the supply. It will be appreciated by those skilled in the art that various modifications and variations can be practiced in the present invention. Thus, the invention is based on the scope of the invention and the equivalents thereof (5), which are included in the accompanying application. All modifications and variations in the circumstance 様 [Simple Description of the Drawings] are included to provide a reference to the present invention and constitute part of the case == step by step and are incorporated in this embodiment, and together with the description - Solution: The actual drawings of the present invention explain the principles of the present invention. The first figure is an overall perspective view of a cleaning apparatus for a flat panel according to an embodiment of the present invention; the first drawing is depicted in the first figure; Decompose a three-dimensional cross-sectional view, and you describe the internal structure of a cleaning device according to one embodiment of the present invention; & a see the fourth figure is depicted in the first = The third picture of the cleaning equipment in the picture of the 闽·隹弟一 is a partial sectional perspective view; the entire fifth picture of the laminar flow conversion unit is a plan view depicted in a structure; The bottom view of the body passage arrangement of the invention-embodiment; the seventh figure is a plan view, the straight line is at 啧:Μ # ^ . , and the system is clear that when a cleaning equipment is at /%%/丽刼When the surface of one of the panels is used for one plane display, the eighth diagram is a perspective view of a cleaning apparatus according to another embodiment of the present invention 19 1279259; and the ninth diagram is A flat panel display according to another embodiment of the present invention Perspective view of the cleaning apparatus of the plate. [Main component symbol description]

A Pressure gas C Removable cover F 1 Banking plate F 2 Laying plate G Display panel HI Liquid channel Η 2 Channel 面板 Panel conveyor PI liquid supply fitting Ρ 2 Gas supply fitting W Cleaner 2 Liquid supply unit 2 a inner chamber 2 b discharge orifice 4 gas supply unit 4 a chamber 4 b discharge orifice 6 spray unit 8 barrier 1 〇 a upper chamber 20 1279259 1 0 b 12 14 16 2 0a 2 0b 2 2 below Chamber orifice liquid channel assembly gas channel assembly channel groove channel groove guide pin

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Claims (1)

1279259 X. Patent application scope: 1 cleaning device for flat display panel, which includes a liquid supply unit for storing the cleaning agent used for cleaning the panel; 'It is used to store the gas used to clean the panel, the gas supply unit is disposed to face the liquid supply unit; and a spray / deer, which is placed between the liquid supply unit and the gas The supply unit is a mixture of money cleaning agent and gas. When the cleaning agent is sucked by the flow of the gas, the cleaning agent and the gas system are mixed with each other, wherein the spraying unit comprises: ... a liquid channel assembly that is disposed to correspond to the liquid supply unit and is provided with a liquid passage formed by a plurality of sheets, and a gas passage group, Gan A, ▲ The tethered quilt is placed in the liquid channel group of the cow JL and is extracted from the gas channel formed by a plurality of thin plates. The hull body channel assembly allows the cleaning agent to be pumped and mixed with the gas by the flow of the gas, and it is possible that the mixture of the cleaning agent and the gas can be sprayed onto the display panel. 2. According to the application for patent||图楚Ί j dry sibling 1 of the cleaning equipment, wherein the liquid 彳 彳 系 has a _ address ^ is formed into a rectangular shape of the chamber for storing cleaning agent . 3. The cleaning apparatus according to claim 1, wherein the gas supply unit has a chamber formed into a rectangular shape for storing a gas. 4. The cleaning apparatus according to claim 1, wherein the gas supply unit comprises a flow conversion unit for converting a gas flow from a turbulent flow to a laminar flow. The flow conversion unit includes A spacer member is used to divide the chamber of the gas supply unit into two chambers, and the barrier member is provided with a plurality of orifices for converting the flow of the gas. 5. The cleaning apparatus according to claim 4, wherein each of the orifices is formed in a circular or polygonal shape. 6. The cleaning apparatus of claim 1, wherein the four sheets of the liquid channel assembly are provided with a plurality of channel grooves defining the separation channel segments, the separation channel segments being They are combined with each other to define a single liquid passage. The cleaning apparatus of claim 6, wherein the fascia is composed of two or more. The cleaning apparatus of claim 1, wherein each of the thin plates of the β: channel assembly is provided with a plurality of channel grooves defining the separation channel segments, the separation channel segments The systems are combined with one another to define a single gas channel. The cleaning apparatus according to claim 8, wherein the sheet of the crucible is composed of two or more. 2. The cleaning apparatus according to the scope of the application of the patent application, wherein the liquid passage and the gas passage are connected to each other at a side of the outlet thereof. 1 1. The cleaning device according to the application of the scope of the patent application, wherein the liquid passage faces the gas passage at an it boundary between the liquid passage assembly and the gas passage miscellaneous member, the passage system Towards the boundary, it is inclined toward the 卞 or above a horizontal plane. 12. The cleaning apparatus of claim 1, wherein the length of each of the liquid and gas passages is in the range of G i_G 2 mm. The cleaning apparatus of claim 1, wherein the gas and liquid passages are positioned in a lateral direction relative to a direction in which the display panel is conveyed so that the same can correspond to a rectangular shape of the panel. Shape to spray the mixture. The cleaning apparatus of claim 1, wherein the cleaning apparatus is disposed to correspond to one or both sides of the display panel. XI, schema ·· as the next page. twenty four