CN100455367C - Apparatus for cleaning planar display panel - Google Patents
Apparatus for cleaning planar display panel Download PDFInfo
- Publication number
- CN100455367C CN100455367C CNB2005100555843A CN200510055584A CN100455367C CN 100455367 C CN100455367 C CN 100455367C CN B2005100555843 A CNB2005100555843 A CN B2005100555843A CN 200510055584 A CN200510055584 A CN 200510055584A CN 100455367 C CN100455367 C CN 100455367C
- Authority
- CN
- China
- Prior art keywords
- gas
- unit
- cleaning device
- cleaning agent
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 59
- 239000012459 cleaning agent Substances 0.000 claims abstract description 64
- 239000007788 liquid Substances 0.000 claims abstract description 52
- 239000007921 spray Substances 0.000 claims abstract description 43
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 238000005507 spraying Methods 0.000 claims abstract description 15
- 239000012530 fluid Substances 0.000 claims description 50
- 238000003860 storage Methods 0.000 claims description 26
- 238000000926 separation method Methods 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 111
- 239000012535 impurity Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F5/021—Fastening articles to the garment to the belt
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45C—PURSES; LUGGAGE; HAND CARRIED BAGS
- A45C11/00—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00
- A45C2011/002—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00 for portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F2005/025—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment
- A45F2005/027—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment with a horizontal and parallel rotation axis, i.e. the axis being parallel to the surface of the garment
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F2200/00—Details not otherwise provided for in A45F
- A45F2200/05—Holder or carrier for specific articles
- A45F2200/0516—Portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
Landscapes
- Liquid Crystal (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Nozzles (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040019568 | 2004-03-23 | ||
KR1020040019568A KR100591475B1 (en) | 2004-03-23 | 2004-03-23 | apparatus for cleaning flat display panel |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1672820A CN1672820A (en) | 2005-09-28 |
CN100455367C true CN100455367C (en) | 2009-01-28 |
Family
ID=35045738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100555843A Expired - Fee Related CN100455367C (en) | 2004-03-23 | 2005-03-16 | Apparatus for cleaning planar display panel |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4099488B2 (en) |
KR (1) | KR100591475B1 (en) |
CN (1) | CN100455367C (en) |
TW (1) | TWI279259B (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100783763B1 (en) | 2007-01-04 | 2007-12-07 | 주식회사 디엠에스 | Substrate cleaning apparatus |
KR101328722B1 (en) | 2007-04-02 | 2013-11-11 | 주식회사 디엠에스 | substrate cleaning apparatus |
KR100888190B1 (en) * | 2007-09-28 | 2009-03-10 | 주식회사 디엠에스 | Air curtain |
KR101303808B1 (en) * | 2011-12-07 | 2013-09-04 | 주식회사 케이씨텍 | Auto Shutter |
CN103537457B (en) * | 2013-10-21 | 2016-06-01 | 中航三鑫太阳能光电玻璃有限公司 | The clearing device of liquid is piled up on a kind of liquid film tail limit |
CN105068285A (en) * | 2015-09-01 | 2015-11-18 | 武汉华星光电技术有限公司 | Conveying device and cleaning device with same |
JP6841633B2 (en) * | 2016-11-08 | 2021-03-10 | 東洋熱工業株式会社 | Gas-liquid dust remover |
JP2018089548A (en) * | 2016-11-30 | 2018-06-14 | 独立行政法人国立高等専門学校機構 | Nozzle mechanism of washing machine |
KR101894088B1 (en) | 2017-03-23 | 2018-09-04 | 가천대학교 산학협력단 | Quality test management system, request system for quality test and method thereof |
KR102179851B1 (en) * | 2019-04-09 | 2020-11-17 | 주식회사 디엠에스 | Substrate processing apparatus and in line type substrate processing system using the same |
CN111921955B (en) * | 2020-08-10 | 2021-12-10 | 哈尔滨工业大学 | Air knife device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08294679A (en) * | 1995-04-27 | 1996-11-12 | Shimada Phys & Chem Ind Co Ltd | Precise washing apparatus |
JP2003145064A (en) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | Two-fluid jet nozzle and substrate cleaning device |
CN1451490A (en) * | 2002-04-19 | 2003-10-29 | 株式会社显像制造服务 | Cleaning device with liquid mixing nozzle for mfg. panel display |
JP2003332401A (en) * | 2002-05-09 | 2003-11-21 | Hugle Electronics Inc | Substrate conveying and dust cleaning device |
JP2004074021A (en) * | 2002-08-19 | 2004-03-11 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus and substrate cleaning unit |
-
2004
- 2004-03-23 KR KR1020040019568A patent/KR100591475B1/en active IP Right Grant
-
2005
- 2005-03-01 TW TW094106047A patent/TWI279259B/en not_active IP Right Cessation
- 2005-03-16 CN CNB2005100555843A patent/CN100455367C/en not_active Expired - Fee Related
- 2005-03-18 JP JP2005080440A patent/JP4099488B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08294679A (en) * | 1995-04-27 | 1996-11-12 | Shimada Phys & Chem Ind Co Ltd | Precise washing apparatus |
JP2003145064A (en) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | Two-fluid jet nozzle and substrate cleaning device |
CN1451490A (en) * | 2002-04-19 | 2003-10-29 | 株式会社显像制造服务 | Cleaning device with liquid mixing nozzle for mfg. panel display |
JP2003332401A (en) * | 2002-05-09 | 2003-11-21 | Hugle Electronics Inc | Substrate conveying and dust cleaning device |
JP2004074021A (en) * | 2002-08-19 | 2004-03-11 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus and substrate cleaning unit |
Also Published As
Publication number | Publication date |
---|---|
JP2005279643A (en) | 2005-10-13 |
KR20050094933A (en) | 2005-09-29 |
CN1672820A (en) | 2005-09-28 |
TWI279259B (en) | 2007-04-21 |
JP4099488B2 (en) | 2008-06-11 |
TW200537181A (en) | 2005-11-16 |
KR100591475B1 (en) | 2006-06-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100455367C (en) | Apparatus for cleaning planar display panel | |
CN104299928B (en) | For handling the apparatus and method of microelectronic workpiece | |
CN1563483A (en) | Bilayer inlet gas spray nozzle in use for metal-organic chemical vapor deposition device | |
CN104755174A (en) | Film-forming apparatus | |
KR100742678B1 (en) | Apparatus for treating substrates | |
CN105190833B (en) | Entrance and the reaction system with the entrance | |
CN100551554C (en) | The suction unit assembly that is used for panel processing system | |
CN103619458B (en) | Applying device | |
JP5881268B2 (en) | Nozzle and humidifier equipped with the nozzle | |
KR20200056045A (en) | Two-liquids jetting nozzle | |
US7152613B2 (en) | Cleaning apparatus having fluid mixing nozzle for manufacturing flat-panel display | |
CN208555227U (en) | Base plate cleaning device | |
JP2007059416A (en) | Substrate treatment device | |
CN212120439U (en) | Wafer surface particle cleaning nozzle | |
CN101657582B (en) | Flotation cell , injector for flotation cell and method for providing flow to flotation cell | |
CN220633691U (en) | Dewatering device and waterfall ion bottle with same | |
CN215612656U (en) | Spray gun cleaning device | |
CN206627758U (en) | Substrate developing apparatus | |
JP3243875U (en) | quick connector cleaning machine | |
CN217569213U (en) | Integrated developing tank sprayer and developing equipment | |
CN108735637B (en) | Improved atomizing spray structure | |
JP2000084341A (en) | Gas treating device | |
SU1572671A1 (en) | Contact device for vertical heat-mass exchange apparatus | |
KR101617347B1 (en) | Block type bubble jet nozzle | |
SU1052795A1 (en) | Device for treating air in air conditioning plants |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Assignor: DMS Co.,Ltd. Contract record no.: 2012990000113 Denomination of invention: Apparatus for cleaning planar display panel Granted publication date: 20090128 License type: Exclusive License Open date: 20050928 Record date: 20120316 |
|
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: DMS Co.,Ltd. Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090128 |