CN100455367C - Apparatus for cleaning planar display panel - Google Patents
Apparatus for cleaning planar display panel Download PDFInfo
- Publication number
- CN100455367C CN100455367C CNB2005100555843A CN200510055584A CN100455367C CN 100455367 C CN100455367 C CN 100455367C CN B2005100555843 A CNB2005100555843 A CN B2005100555843A CN 200510055584 A CN200510055584 A CN 200510055584A CN 100455367 C CN100455367 C CN 100455367C
- Authority
- CN
- China
- Prior art keywords
- gas
- unit
- cleaning device
- cleaning agent
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 59
- 239000012459 cleaning agent Substances 0.000 claims abstract description 64
- 239000007788 liquid Substances 0.000 claims abstract description 52
- 239000007921 spray Substances 0.000 claims abstract description 43
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 238000005507 spraying Methods 0.000 claims abstract description 15
- 239000012530 fluid Substances 0.000 claims description 50
- 238000003860 storage Methods 0.000 claims description 26
- 238000000926 separation method Methods 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 111
- 239000012535 impurity Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F5/021—Fastening articles to the garment to the belt
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45C—PURSES; LUGGAGE; HAND CARRIED BAGS
- A45C11/00—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00
- A45C2011/002—Receptacles for purposes not provided for in groups A45C1/00-A45C9/00 for portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F5/00—Holders or carriers for hand articles; Holders or carriers for use while travelling or camping
- A45F5/02—Fastening articles to the garment
- A45F2005/025—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment
- A45F2005/027—Fastening articles to the garment with a holder or item rotatably connected to the fastening device, e.g. having a rotation axis perpendicular to the garment with a horizontal and parallel rotation axis, i.e. the axis being parallel to the surface of the garment
-
- A—HUMAN NECESSITIES
- A45—HAND OR TRAVELLING ARTICLES
- A45F—TRAVELLING OR CAMP EQUIPMENT: SACKS OR PACKS CARRIED ON THE BODY
- A45F2200/00—Details not otherwise provided for in A45F
- A45F2200/05—Holder or carrier for specific articles
- A45F2200/0516—Portable handheld communication devices, e.g. mobile phone, pager, beeper, PDA, smart phone
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Liquid Crystal (AREA)
- Nozzles (AREA)
Abstract
A cleaning apparatus for a flat display panel includes a liquid supplying unit for storing cleaning agent used for cleaning the panel, a gas supplying unit for storing gas used for cleaning the panel, the gas supplying unit being disposed facing the liquid supplying unit, and a spraying unit disposed between the liquid supplying unit and the gas supplying unit to spray a mixture of the cleaning agent and the gas, the cleaning agent and the gas being mixed with each other as the cleaning agent is sucked by the flow of the gas. The spraying unit includes a liquid passage assembly disposed corresponding to the liquid supplying unit and provided with a liquid passage formed by a plurality of thin plates, and a gas passage assembly disposed facing the liquid passage assembly and provided with a gas passage formed by a plurality of thin plates, the gas passage assembly allowing the cleaning agent to be sucked and mixed with the gas by the flow of the gas and allowing the mixture of the cleaning agent and the gas to be sprayed to the display panel.
Description
Technical field
The present invention relates to a kind of device that is used for cleaning planar display panel.More specifically, relate to and a kind ofly comprise the cleaning device that comes cleaning planar display panel such as the fluid-mixing of two kinds of liquids and gases etc. or two or more cleaning agents by on flat display board, spraying.The invention further relates to a kind of device of cleaning planar display panel, design this device and easily form the fluid passage, can spray cleaning agent by this fluid passage with (a); (b) utilize the jet flow of gas to cause that fluid spray mixes, use cleaning agent thereby reduce; (c) improve spraying efficiency and cleaning efficiency.
Background technology
Usually, the cleaning device that will be used for flat display board is designed to utilize round brush to remove attached to the impurity on the flat display board.This device is arranged in the cleaning equipment, just is placed in the washing trough, with corresponding with the plate translator unit, and partly separates with drying unit etc.
Such cleaning device is included in a plurality of nozzles spaced-apart on the longitudinal direction of rectangular body, with to crossing the rectangular body spray fluid that the plate translator unit is installed.For example, when display board passes the cleaning part that cleaning device is installed, cleaning agent is sprayed on the surface of display board, thereby removes attached to the impurity on the display board by nozzle.
Because each nozzle that is installed on the cleaning device all has circular fluid spray form, the cleaning agent that sprays with this form has and the corresponding limited sprinkling zone of the shape of this form, thereby is difficult to equably fluid spray on the whole surface of display board.Therefore, caused restriction to obtaining satisfied cleaning quality with effective spraying efficiency.
In addition, when display board was large scale, the number of nozzle can increase, thereby made complex structure and increased manufacturing cost.
Applicant of the present invention discloses a kind of for addressing the above problem the cleaning device that designs in Korean unexamined patent application No.10-2002-0021553.
Disclosed cleaning device comprises the rectangular body with rectangular nozzle in this patent; Place separation dividing plate in a longitudinal direction, be divided into cleaning agent storage area and pressed gas storage area with space with rectangular body; The gas that is formed on the top of this atmosphere storage part in a side of separating dividing plate provides the hole; Be installed in the laminar flow conversion unit in the atmosphere storage part, will be converted into laminar flow from the pressed gas that gas provides the hole to introduce; Cleaning agent on the top of the cleaning agent storage area of the opposite side that separates dividing plate provides the hole; Be provided at the bottom of separating dividing plate and be shaped as "
" liquid/gas mix spray unit, be used to spray the mixture of cleaning agent and pressed gas, pressed gas is provided by the vertical channel on the lower end of atmosphere storage part, cleaning agent is provided by the horizontal channel on the lower end of cleaning agent storage area; With at the short-axis direction of nozzle on-line unit, to prevent the opening strain of nozzle in conjunction with nozzle.
Just, it is spaced-apart with cleaning agent storage area and pressed gas storage area to separate dividing plate, and cleaning agent and pressed gas are mixed into liquid/gas mixture mutually in the fluid passage that is used for mixing cleaning agent and pressed gas.Just, pass the nozzles spray pressed gas along vertical channel, in this case, the cleaning agent in the cleaning agent storage area is drawn by the spray flow of pressed gas, mixes mutually with pressed gas along the horizontal channel.The mixture of cleaning agent and pressed gas is by the surface of nozzles spray to display board, thereby the place to go is attached to the impurity on the display board.
But, in this cleaning device, all be whole mutually formation owing to define separation dividing plate, mixture and the nozzle of the flow channel area between storage area, therefore be difficult to produce separation dividing plate, mixture and nozzle with enough accuracy.In addition, according to the positioning states of storage area, the inner space environment of fluid passage can change at an easy rate, thereby is difficult to provide the fluid passage environment of the best.
In addition, when storage area because of thereby when distortion former such as load or external force etc., the fluid passage between storage area also can be out of shape, thereby has reduced sprinkling quality and durability.
And, when the flow channel area local damage, must replace whole storage area unit.When expectation adjust to be sprayed quantity and during with the corresponding spray pressure of shape and size of display board, also needed whole storage area unit is replaced with newly-designed storage area.This has just caused the reduction of operating efficiency.
Summary of the invention
Therefore, the present invention is devoted to solve the problems referred to above of prior art.
Correspondingly, an object of the present invention is to propose a kind of cleaning device, this cleaning device can come cleaning planar display panel by spraying the mixing material of being made up of two kinds of liquids and gases etc. or two or more cleaning agent.
Another object of the present invention is to propose a kind of device that is used for cleaning planar display panel, designs this device and easily forms the fluid passage with (a), can spray cleaning agent by the fluid passage; (b) utilize the jet flow of gas to cause the mixing material spraying, use cleaning agent thereby reduce; (c) improve spraying efficiency and cleaning efficiency.
For achieving the above object, the invention provides a kind of cleaning device that is used for flat display board, comprising: liquid provides the unit, and storage is used for the cleaning agent of cleaner plate; Gas provides the unit, and storage is used for the gas of cleaner plate, and this gas provides elemental area to provide the unit to arrange to liquid; And be arranged in liquid and provide unit and gas that spray unit between the unit is provided, the mixture of this spray unit spraying liquid and gas, when cleaning agent was drawn by air-flow, cleaning agent and gas mixed mutually.This spray unit comprises: provide the fluid passage assembly of the corresponding layout in unit with liquid, this fluid passage assembly provides the fluid passage that is formed by a plurality of thin plates; With gas passage assembly in the face of the fluid passage arrangement of components, this gas passage assembly provides the gas passage that is formed by a plurality of thin plates, this gas passage assembly allows air-flow absorption cleaning agent and cleaning agent is mixed with gas, and allows to spray to display board the mixture of cleaning agent and gas.
Description of drawings
The following drawings is used for further understanding the present invention, and comprises in this application, constitutes the application's a part, embodiments of the invention has been carried out diagram, and with specification principle of the present invention has been made an explanation.Wherein:
Fig. 1 is the overall perspective of the cleaning device that is used for flat display board of one embodiment of the invention;
Fig. 2 is the decomposition diagram of cleaning device among Fig. 1;
Fig. 3 shows the sectional view of cleaning device internal structure according to an embodiment of the invention;
Fig. 4 is the partial sectional view of cleaning device among Fig. 3;
Fig. 5 is the integrally-built plane of circulationization unit, Fig. 3 middle level;
Fig. 6 is the upward view that the fluid passage of cleaning device is according to an embodiment of the invention arranged;
Fig. 7 is the plane that shows sprinkling zone corresponding with display board when cleaning device is in spraying operation;
Fig. 8 is for being used for the perspective view of the cleaning device of flat display board according to another embodiment of the present invention; With
Fig. 9 is the perspective view according to the cleaning device that is used for flat display board of further embodiment of this invention.
The specific embodiment
To the example of these preferred embodiments be shown in the accompanying drawing to a preferred embodiment of the present invention will be described in detail below.Adopt identical reference number to represent identical or similar parts as much as possible in institute's drawings attached.
At first referring to figs. 1 through Fig. 3, cleaning device of the present invention comprises: liquid provides unit 2, and storage is used to clean the cleaning agent W of display board G; In the face of liquid provides the gas of unit 2 that unit 4 is provided, storage is used to clean the pressed gas A of display board G; And be arranged in liquid and provide unit 2 and gas that spray unit 6 between the unit 4 is provided, this spray unit is sprayed the mixture of cleaning agent W and gas A.The cleaning device of present embodiment is installed in (cleaning area of plate G) in the washing trough, and in response to the translator unit of plate G, M moves (see figure 1) along substrate transfer device.
Liquid provides unit 2 to be box-like, defines the interior chamber that is used to store cleaning agent W, and wherein cleaning agent W is used for cleaner plate G.Just, as shown in Figure 1, liquid provides unit 2 to be and spray unit 6 corresponding rectangular shapes described later.Liquid provides unit 2 to have by the separable lid openend that C covered, and will cover C by fixed components such as bolts and fix.
Liquid provides unit 2 to be made of resin or the metal with good durability, anti-chemistry and processing attribute.When separable lid C seals openend that liquid provides unit 2 with sealed inside chamber 2a, very convenient maintain internal chamber 21.But, because the possibility that has cleaning agent W to leak preferably further provides the sealing auxiliary part such as rubber ring, so that more reliable sealing to be provided.
Being stored in liquid provides cleaning agent in the unit 2 can promptly dissolve and remove attached to the known material of the impurity on plate G surface by pure water etc. to form.As shown in Figure 1, can provide the liquid of unit 2 to provide pipe P1 to introduce cleaning agent by being connected to liquid.
In order under atmospheric pressure to provide storage cleaning agent W among the chamber 2a of unit 2 at liquid, when providing pipe P1 to include the cleaning agent W of predetermined amount by liquid, cleaning agent W overflows by discharge pipe, keeps predefined hydraulic pressure among the chamber 2a of unit 2 thereby can provide at liquid.
Liquid provides unit 2 to have a plurality of tap 2b, by these taps, the cleaning agent W among the 2a of chamber can be guided to spray unit 6.Each hole 2b is oval, thereby makes cleaning agent W to cross (seeing Fig. 3 and Fig. 4) by horizontal flow.Tap 2b provides at liquid on the longitudinal direction of unit 2 and arranges, and is spaced from each other.
Provide unit 4 to be designed to provide pressed gas A gas to spray unit 6.Gas provides unit 4 to be box-like, defines the 4a of interior chamber that is used to store pressed gas.In this embodiment, as depicted in figs. 1 and 2, gas provides unit 4 for providing unit 2 corresponding rectangular shape with liquid, and has by the separable lid openend that C covered, and will cover C by bolt and fix.
Gas provides unit 4 or to have good durability and the metal of anti-chemistry constitutes by resin, thereby can not be out of shape when pressed gas A passes chamber 4a.
More preferably, gas provides unit 4 to be made of stainless steel-based (SUS-based) metal or engineering plastics.Because the possibility that has cleaning agent W to leak preferably further provides the sealing auxiliary part such as rubber ring, so that more reliable sealing to be provided.
Offering gas provides the pressed gas A of unit 4 to spray with the state that has mixed cleaning agent, plays impurity and the quick function of removing the cleaning agent that be sprayed at plate G surface of removal attached to the surface of plate G.Pressed gas A can be made of clean dry air (CDA).
As shown in Figure 1, gas provides unit 4 can be connected to gas pipe P2 is provided, to manage P2 reception pressed gas A from providing.As shown in Figure 3, via chamber 4a with by tap 4b, directly provide pressed gas A to spray unit 6.
With reference to Fig. 3, in gas provides the chamber 4a of unit 4, conversion unit is arranged, being used to transform from gas provides the pipe pressed gas A that P2 introduces.Just, conversion unit changes into laminar flow with pressed gas A by turbulent flow.Conversion unit is designed to indoorly have a dividing plate 8 (seeing Fig. 3 and Fig. 4) that forms in response to pressed gas stream part what gas provided unit 4, chamber 4a is divided into chamber 10a and following chamber 10b.Dividing plate 8 can have a plurality of holes 12, is used for pressed gas A is changed into laminar flow by turbulent flow.
In this, can arrange the hole 12 that is formed on the dividing plate 8 as shown in Figure 5.The size in hole 12 makes the difference of diameter of fluid passage the air-flow via the pressed gas A of chamber 10a and chamber 10b can be changed into laminar flow by turbulent flow.
The circulation unit is designed to: when providing pipe P2 that pressed gas A is incorporated into chamber 10a and at first is stored in chamber 10a through gas, the circulationization unit is converted into laminar flow with the stream of pressed gas A by turbulent flow, when the gas pressure that is stored in chamber 10a was passed in the hole 12 on the dividing plate 8 and stores once more, the circulationization unit was converted into laminar flow with the stream of pressed gas A by turbulent flow.Illustrate in greater detail, when pressed gas A passed the hole 12 of dividing plate 8, the pressure that the diameter difference of fluid passage is caused evenly compressed pressed gas A, thereby was easy to change into laminar flow.Because in the quick growth of 10b place, chamber sectional area down, the speed energy of laminar flow pressed gas A reduces.By reducing the speed energy, pressure energy increases fast, thereby the pressed gas circulation that will pass dividing plate 8 turns to the high pressure laminar flow.
Simultaneously, spray unit 6 is installed in liquid provides unit 2 and gas to provide between the unit 4, will be described in more details this point with reference to accompanying drawing below.
With reference to Fig. 2 and Fig. 3, provide the unit 2 location spray unit 6 corresponding to liquid, spray unit 6 comprises fluid passage assembly 14 and faces the gas passage assembly 16 of fluid passage assembly.Fluid passage assembly 14 has by the interconnected separating part in conjunction with thin plate F1, and is provided for spraying the individual passage H1 of cleaning agent W.Gas passage assembly 16 has by the interconnected separating part in conjunction with thin plate F2, and is formed for the passage H2 of spray pressure gas A.When passing through the direction spray pressure gas A of passage H2, gas passage assembly 16 is by drawing the mixture of introducing liquid and pressed gas by the cleaning agent W of fluid passage H1.In this embodiment, one group 4 thin plate P1 is arranged on the fluid passage assembly 14, one group 3 thin plate P2 is arranged on the gas passage assembly 16.
As shown in Figure 2, the thin plate F1 of fluid passage assembly 14 is for providing the rectangle of unit 2 corresponding to liquid.Be formed with the channel slot 20a of the channel part that defines separation in the bottom of thin plate F1, be used to guide flowing of cleaning agent W.
As shown in Figure 3 and Figure 4, when 4 sheet section by channel slot 20a in conjunction with the time, the channel slot 20a that forms on thin plate F1 defines independent passage H1.With reference to Fig. 2, the channel slot 20a of thin plate F1 that unit 2 is provided near liquid is for circular, and the channel slot 20a of other thin plate F1 is ∩ shape, to define the corresponding independent fluid passage H1 of tap 2b that unit 2 is provided with liquid.
In this, as shown in Figure 3, because the fluid passage H1 part that is formed by 4 thin plate F1 provides the point of interface of unit 2 side direction and gas passage assembly 16 to move from liquid, fluid passage H1 partly forms downward-sloping.Alternatively, the part of inlet side parallels with the part of outlet side.
With reference to Fig. 3, the scope of the length L by the fluid passage H1 that forms in conjunction with thin plate F1 is set to 0.1-0.2mm, and according to the quantity of thin plate each gauge of sheet is set, so that the fluid passage of this length range to be provided.
Consider the thickness of thin plate F1,, can form channel slot 20a by photoetching treatment owing to be difficult to mechanical treatment channel slot 20a.Therefore, can constitute thin plate F1 by the material that durability well is suitable for photoetching treatment.
As shown in Figure 2, gas passage assembly 16 comprises thin plate F2, and each thin plate F2 is for providing the unit 4 corresponding rectangles with gas.Form channel slot 20b to define the channel part of separation in the bottom of thin plate F1, be used for flowing of guide pressure gas A.
As shown in Figure 3 and Figure 4, when 3 sheet section by channel slot 20b in conjunction with the time, the channel slot 20b that forms at thin plate F2 defines independent passage H2.With reference to Fig. 2, the channel slot 20b of thin plate F2 that unit 4 is provided near gas is for circular, and the channel slot 20b of other thin plate F2 is ∩ shape, to define the corresponding independent gas passage H2 of tap 4b that unit 4 is provided with gas.
In this, as shown in Figure 3, the gas passage H2 that is formed by 3 thin plate F2 partly plays the effect of guide pressure gas A, so that draw cleaning agent W by fluid passage H1.Gas passage H2 plays the effect of Venturi tube (venturi), and this Venturi tube allows the part that preestablishes of gas passage H2 to communicate with fluid passage H1, thereby can be in the part that communicates with cleaning agent and mixed gases and sprinkling.
The channel slot 20b of each ∩ shape can have the upper and lower that mutually combines with sweeping style.Mid portion is protruding, and the upper and lower is recessed into.As a result, when pressed gas A passed through gas passage H2, the pressure that the diameter official post of gas passage gets pressed gas A increased, thereby can further improve spraying efficiency.
Can form channel slot 20a by photoetching treatment.Therefore, can form thin plate F1 by the material that durability well is suitable for photoetching treatment.
As shown in Figure 3, be formed with boundary member being respectively formed between passage H1 on fluid passage assembly 14 and the gas channel components 16 and the H2.In addition, as shown in Figure 1, passage H1 and H2 move on the cleaning region direction of a plurality of spaced points and pass across plate G, thereby can spray cleaning agent (referring to Fig. 6 and Fig. 7) with corresponding rectangular area, plate G surface.
As shown in Figure 3 and Figure 4, when providing unit 2 and gas to provide at liquid fluid passage assembly 14 and gas channel components 16 are set between the unit 4, the thin plate F1 of fluid passage H1 and the thin plate F2 of gas passage H2 are assemblied in chute pin 22, and chute pin 22 is assemblied in liquid and provides in the sidewall that unit 2 and gas provides unit 4.
By such as fixed components such as bolt or screws, realize that liquid provides unit 2 and gas that the combination of unit 4 is provided.As shown in Figure 3, bolt flatly penetrates liquid in order provides unit 2, spray unit 6 and gas that unit 4 is provided.
The described in the above cleaning device that is used for flat display board cleans the zone along with substrate transfer device M moves through plate G along certain direction, just can clean this plate by following operating process.
At first, when pressed gas A provides pipe P2 to be incorporated into gas unit 4 is provided through gas, provide pressed gas A to gas passage assembly 16 as shown in Figure 3.Then, with predefined pressure via gas passage H2 part spray pressure gas A.
In this, the part that communicates at gas passage H2 and fluid passage H1, by flowing of pressed gas A, provide the cleaning agent W in the unit 2 partly to draw with under atmospheric pressure being stored in liquid along the fluid passage H1 of fluid passage assembly 14, and mix mutually, thereby remove attached to the impurity on the plate G with predefined pressure.
In the above-described embodiments, though fluid passage H1 is formed by the channel slot 20a on 4 thin plate F, gas passage H2 is formed by the channel slot 20b on 3 thin plate F, and the present invention is not limited thereto.
For example, if the scope of passage length within 0.1-0.2mm, the number of thin plate can change so.
In addition, though have only a cleaning device corresponding to the plate translator unit, the present invention is not limited thereto.
For example, as shown in Figure 8, can spaced-apart predefined distance be installed by two or more cleaning device unit.In addition, as shown in Figure 9, two cleaning device unit can be installed, make and all to spray cleaning agent to two faces of display board G.
Be used for this cleaning device of display board, owing to be formed with spray unit, and spray unit has the passage that is used for spraying liquid and admixture of gas, therefore can clean this plate effectively.Because spray unit provides the individual passage that forms by in conjunction with a plurality of thin plates, therefore be easy to form passage.In addition, because pressed gas stream is drawn cleaning agent, and mixes cleaning agent mutually with pressed gas, therefore can spray this mixture effectively by passage.In addition, by changing thin plate easily, can change at an easy rate according to the size and dimension of plate and spray environment, thereby improve cleaning quality and operating efficiency.
Obviously, those skilled in the art can modifications and variations of the present invention are.Therefore, present invention resides in claims and coverage of equal value thereof interior any variation and modification.
Claims (14)
1, a kind of cleaning device that is used for flat display board comprises:
Liquid provides the unit, and storage is used to clean the cleaning agent of described plate;
Gas provides the unit, and storage is used to clean the gas of described plate, and described gas provides elemental area to provide the unit to arrange to liquid; With
Being arranged in liquid provides unit and gas that spray unit between the unit is provided, the mixture of described spray unit spraying liquid and gas, and when cleaning agent was drawn by air-flow, cleaning agent and gas mixed mutually,
It is characterized in that described spray unit comprises:
The fluid passage that provides the fluid passage assembly of the corresponding layout in unit, described fluid passage assembly to provide to form with liquid by a plurality of thin plates and
Gas passage assembly in the face of the fluid passage arrangement of components, described gas passage assembly provides the gas passage that is formed by a plurality of thin plates, described gas passage assembly allows air-flow absorption cleaning agent and cleaning agent is mixed with gas, and allows to spray to display board the mixture of cleaning agent and gas.
2, cleaning device according to claim 1, the chamber that wherein said liquid provides the unit to have rectangular shape is with the storage cleaning agent.
3, cleaning device according to claim 1, the chamber that wherein said gas provides the unit to have rectangular shape is with storage gas.
4, cleaning device according to claim 1, wherein said gas provides the unit to comprise the circulationization unit, be used for air-flow is converted into laminar flow from turbulent flow, the dividing plate that provides the chamber of unit to be divided into two chambers gas is provided in described circulation unit, and described dividing plate has a plurality of holes that are used to transform air-flow.
5, cleaning device according to claim 4, wherein each hole shape becomes circle or polygonal shape.
6, cleaning device according to claim 1, wherein each of a plurality of thin plates of fluid passage assembly has a plurality of channel slots that define the channel part of separation, and the channel part of the described separation on described a plurality of thin plates interosculates to define independent fluid passage.
7, cleaning device according to claim 6, wherein said a plurality of thin plates are made up of two or more thin plates.
8, cleaning device according to claim 1, wherein each of a plurality of thin plates of gas passage assembly has a plurality of channel slots that define the channel part of separation, and the channel part of the described separation on described a plurality of thin plates interosculates to define independent gas passage.
9, cleaning device according to claim 8, wherein said a plurality of thin plates are made up of two or more thin plates.
10, cleaning device according to claim 1, wherein said fluid passage assembly and gas passage interconnect at outlet side.
11, cleaning device according to claim 1, the boundary of wherein said fluid passage between fluid passage assembly and gas channel components be in the face of gas passage, and each passage is downward-sloping or facing on the horizontal plane on border.
12, cleaning device according to claim 1, wherein the length range of each fluid passage and gas passage is 0.1-0.2mm.
13, cleaning device according to claim 1, wherein fluid passage and gas channel bit be in the horizontal direction of display board direction of transfer, thereby in response to the rectangular shape spraying mixture of described plate.
14, cleaning device according to claim 1, one side or two corresponding layouts of face of wherein said cleaning device and display board.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040019568 | 2004-03-23 | ||
| KR1020040019568A KR100591475B1 (en) | 2004-03-23 | 2004-03-23 | apparatus for cleaning flat display panel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1672820A CN1672820A (en) | 2005-09-28 |
| CN100455367C true CN100455367C (en) | 2009-01-28 |
Family
ID=35045738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100555843A Expired - Fee Related CN100455367C (en) | 2004-03-23 | 2005-03-16 | Apparatus for cleaning planar display panel |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4099488B2 (en) |
| KR (1) | KR100591475B1 (en) |
| CN (1) | CN100455367C (en) |
| TW (1) | TWI279259B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100783763B1 (en) | 2007-01-04 | 2007-12-07 | 주식회사 디엠에스 | Substrate cleaning apparatus |
| KR101328722B1 (en) | 2007-04-02 | 2013-11-11 | 주식회사 디엠에스 | substrate cleaning apparatus |
| KR100888190B1 (en) * | 2007-09-28 | 2009-03-10 | 주식회사 디엠에스 | Air curtain |
| KR101303808B1 (en) * | 2011-12-07 | 2013-09-04 | 주식회사 케이씨텍 | Auto Shutter |
| CN103537457B (en) * | 2013-10-21 | 2016-06-01 | 中航三鑫太阳能光电玻璃有限公司 | The clearing device of liquid is piled up on a kind of liquid film tail limit |
| CN105068285A (en) * | 2015-09-01 | 2015-11-18 | 武汉华星光电技术有限公司 | Conveying device and cleaning device with same |
| JP6841633B2 (en) * | 2016-11-08 | 2021-03-10 | 東洋熱工業株式会社 | Gas-liquid dust remover |
| JP2018089548A (en) * | 2016-11-30 | 2018-06-14 | 独立行政法人国立高等専門学校機構 | Nozzle mechanism of washing machine |
| KR101894088B1 (en) | 2017-03-23 | 2018-09-04 | 가천대학교 산학협력단 | Quality test management system, request system for quality test and method thereof |
| KR102179851B1 (en) * | 2019-04-09 | 2020-11-17 | 주식회사 디엠에스 | Substrate processing apparatus and in line type substrate processing system using the same |
| CN111921955B (en) * | 2020-08-10 | 2021-12-10 | 哈尔滨工业大学 | Air knife device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08294679A (en) * | 1995-04-27 | 1996-11-12 | Shimada Phys & Chem Ind Co Ltd | Precise washing apparatus |
| JP2003145064A (en) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | Two-fluid jet nozzle and substrate cleaning device |
| CN1451490A (en) * | 2002-04-19 | 2003-10-29 | 株式会社显像制造服务 | Cleaning device with liquid mixing nozzle for mfg. panel display |
| JP2003332401A (en) * | 2002-05-09 | 2003-11-21 | Hugle Electronics Inc | Substrate conveying and dust cleaning device |
| JP2004074021A (en) * | 2002-08-19 | 2004-03-11 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus and substrate cleaning unit |
-
2004
- 2004-03-23 KR KR1020040019568A patent/KR100591475B1/en active IP Right Grant
-
2005
- 2005-03-01 TW TW094106047A patent/TWI279259B/en not_active IP Right Cessation
- 2005-03-16 CN CNB2005100555843A patent/CN100455367C/en not_active Expired - Fee Related
- 2005-03-18 JP JP2005080440A patent/JP4099488B2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08294679A (en) * | 1995-04-27 | 1996-11-12 | Shimada Phys & Chem Ind Co Ltd | Precise washing apparatus |
| JP2003145064A (en) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | Two-fluid jet nozzle and substrate cleaning device |
| CN1451490A (en) * | 2002-04-19 | 2003-10-29 | 株式会社显像制造服务 | Cleaning device with liquid mixing nozzle for mfg. panel display |
| JP2003332401A (en) * | 2002-05-09 | 2003-11-21 | Hugle Electronics Inc | Substrate conveying and dust cleaning device |
| JP2004074021A (en) * | 2002-08-19 | 2004-03-11 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus and substrate cleaning unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005279643A (en) | 2005-10-13 |
| KR20050094933A (en) | 2005-09-29 |
| CN1672820A (en) | 2005-09-28 |
| TWI279259B (en) | 2007-04-21 |
| JP4099488B2 (en) | 2008-06-11 |
| TW200537181A (en) | 2005-11-16 |
| KR100591475B1 (en) | 2006-06-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100455367C (en) | Apparatus for cleaning planar display panel | |
| CN104299928B (en) | For handling the apparatus and method of microelectronic workpiece | |
| CN1563483A (en) | Bilayer inlet gas spray nozzle in use for metal-organic chemical vapor deposition device | |
| CN104755174A (en) | Film-forming apparatus | |
| KR100742678B1 (en) | Apparatus for treating substrates | |
| CN105190833B (en) | Entrance and the reaction system with the entrance | |
| CN100551554C (en) | The suction unit assembly that is used for panel processing system | |
| CN103619458B (en) | Applying device | |
| JP5881268B2 (en) | Nozzle and humidifier equipped with the nozzle | |
| KR20200056045A (en) | Two-liquids jetting nozzle | |
| US7152613B2 (en) | Cleaning apparatus having fluid mixing nozzle for manufacturing flat-panel display | |
| CN208555227U (en) | Base plate cleaning device | |
| JP2007059416A (en) | Substrate treatment device | |
| CN212120439U (en) | Wafer surface particle cleaning nozzle | |
| CN101657582B (en) | Flotation cell , injector for flotation cell and method for providing flow to flotation cell | |
| CN220633691U (en) | Dewatering device and waterfall ion bottle with same | |
| CN215612656U (en) | Spray gun cleaning device | |
| CN206627758U (en) | Substrate developing apparatus | |
| JP3243875U (en) | quick connector cleaning machine | |
| CN217569213U (en) | Integrated developing tank sprayer and developing equipment | |
| CN108735637B (en) | Improved atomizing spray structure | |
| JP2000084341A (en) | Gas treating device | |
| SU1572671A1 (en) | Contact device for vertical heat-mass exchange apparatus | |
| KR101617347B1 (en) | Block type bubble jet nozzle | |
| SU1052795A1 (en) | Device for treating air in air conditioning plants |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Assignor: DMS Co.,Ltd. Contract record no.: 2012990000113 Denomination of invention: Apparatus for cleaning planar display panel Granted publication date: 20090128 License type: Exclusive License Open date: 20050928 Record date: 20120316 |
|
| ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: DMS Co.,Ltd. Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090128 |