KR100625486B1 - Apparatus for treatment works of flat display panel and method - Google Patents

Abstract

The present invention discloses an apparatus and method for strip equipment using a carbonate-based solvent, preferably a chemical solution of ethylene carbonate, which is used in strip equipment for removing a photosensitive film formed on a substrate in a flat panel display manufacturing process. A substrate processing method for a flat panel display of the present invention is a stripping step of applying a photosensitive resin solution on a substrate for forming a circuit pattern on a flat panel display substrate, and removing the photosensitive resin solution applied to the substrate. And a first step of spraying a strip solution including a carbonate solvent on a substrate, a second step of removing a chemical solution reacted with the carbonate solvent, and spraying washing water above a freezing temperature of the carbonate solvent on a substrate. And a fourth step of cleaning the substrate, a fourth step of cleaning the substrate, and a fifth step of drying the substrate. Therefore, in the present invention, ethylene carbonate, which is a carbonate solvent, is used as the strip solution, so that it has excellent solubility and reuse efficiency, and has the advantage of being able to reuse the used chemical solution by irradiating ultraviolet rays (UV), and at the same time, a bath for neutralizing the chemical solution Since it can be omitted, it minimizes the installation area of the bath has the effect of reducing the production cost. In addition, the present invention is excellent in the solubility of ethylene carbonate can be reduced the strip section can reduce the number of strip bath can further reduce the installation area of the bath.

 Flat Panel Displays, Strips, Baths, Cleaning, Ethylene Carbonate, Neutralization

Description

Apparatus for treatment works of flat display panel and method

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the conventional substrate processing apparatus and method for flat panel displays.

2 is a view schematically showing a substrate processing apparatus for a flat panel display for explaining an embodiment according to the present invention.

3 is a view for explaining a main configuration shown by cutting the A-A portion of FIG.

4 is a block diagram for maintaining the temperature of the strip bath above the set value in order to explain the embodiment according to the present invention.

5 is a view showing in detail the air jet nozzle applied to the present invention.

FIG. 6 is a cross-sectional view of the B-B section of FIG. 5;

7 is a view for explaining the operation of the air injection nozzle applied to the present invention.

8 is a view showing a cleaning liquid injection nozzle applied to the present invention.

9 is an exploded cross-sectional view of the cleaning liquid jet nozzle of FIG. 8.

FIG. 10 is a side cross-sectional view for describing an internal structure of the cleaning liquid injection nozzle of FIG. 9.

11 is a partial cross-sectional view for explaining the internal structure of the cleaning liquid jet nozzle according to the present invention.

12 is a plan view for explaining the perforation structure of the laminar flow converting means, which is a main part of FIG. 10.

Fig. 13 is a bottom view for explaining the flow path arrangement of the cleaning liquid jet nozzle applied to the present invention.

Fig. 14 is a plan view showing the spray area corresponding to the substrate during the spraying action of the cleaning liquid spray nozzle applied to the present invention.

15 is a flowchart illustrating a method of treating a substrate while maintaining a constant temperature in a strip bath applied to the present invention.

16 is a view for explaining another example of the cleaning apparatus according to the present invention.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing apparatus and a substrate processing method for a flat panel display. More particularly, the present invention relates to a strip equipment used to remove a photosensitive film formed on a substrate when manufacturing a flat panel display. The present invention relates to a method of performing a stripping process.

In general, a substrate used for a flat panel display (FPD), a semiconductor wafer, an LCD, a glass for a photo mask, and the like is processed through a series of process lines. That is, photo resist coating (P / R), exposure, development, etching, stripping, cleaning, and drying are performed.

1 shows a substrate processing line performing a strip process. As shown, the substrate processing line first withdraws the substrate from the cassette 1 and transfers the substrate to the loader (2), which supplies the substrate to the strip bath (3).

The strip bath 3 is composed of a plurality, preferably four strip baths.

The substrate supplied into the strip bath 3 is subjected to a stripping process. Subsequently, the substrate is supplied to the chemical neutralization unit 4, and the strip chemical is neutralized by an organic solvent such as isopropanol (IPA) or dimethyl sulfoxide (DMSO). The purpose of the neutralization is a strip chemical solution having an amine component itself is a chemical solution containing a large amount of alkaline components when reacted with ultrapure water (DI: De-Ionized Water) in a subsequent washing step, it is changed to a strong alkali, It may react with aluminum used as the wiring material and corrosion may proceed. In other words, since the surface of the metal thin film on the substrate may be damaged, the strip chemical is first neutralized and then cleaned.

Next, the organic solvent that is transferred to the first cleaning unit 6 through the turner 5 and remains on the surface by ultrapure water or the like is removed.

More specifically, the first cleaning unit 6 performs a cleaning operation by transferring a substrate into a bath by a conveyor or the like, and spraying ultrapure water on the substrate through a spray nozzle.

In this way, the substrate from which the organic solvent is first removed is transferred to the second cleaning unit 8 through the turner 7. The second cleaning unit 8 has the same structure as the first cleaning unit 6 and may be formed of two shower bass.

The turners (5) (7) are installed in a dummy (dummy) to transfer the substrate in a '??' shape in order to secure the space efficiency of the strip processing line.

Then, the substrate passing through the second cleaning unit 8 is dried while passing through the Aqua Knife 9 and the Air Knife 10.

The substrate, which has undergone such a process, is transferred to an unloader 11 and transferred to the cassette 1 through a mechanism such as a robot.

However, there is a problem in that the manufacturing cost due to the increase in cost increases due to the addition of the neutralizing liquid used for the purpose of neutralizing the strip chemical liquid required for the process.

In addition, the strip process line was formed in the shape of '??' to secure space efficiency, but there is a limit in the trend of the large-area substrate.

In order to solve this problem, the development of a strip equipment for maximizing the space efficiency and the development of a new strip chemical that does not react with the wiring material.

Therefore, the present invention has been proposed to solve the above problems, and an object of the present invention is to reduce the number of baths in the process of processing a substrate applied to a flat panel display to reduce the production cost as well as to be used in expensive strip process It is to provide a substrate processing apparatus and substrate processing method for a flat panel display to reduce the production cost by recycling the solution.

In order to achieve the above object, the present invention provides a strip bath including an injection nozzle for injecting a strip chemical having a carbonate-based solvent as a main component; Atmosphere blocking means disposed inside the exit side of the strip bath to block the atmosphere with the cleaning bath; And it provides a substrate processing apparatus for a flat panel display comprising a cleaning bath disposed on the exit side of the strip bath.

Moreover, this invention is a strip process which apply | coats the photosensitive resin solution on this board | substrate, and removes the photosensitive resin solution apply | coated to this board | substrate in order to make a circuit pattern on the board | substrate for flat panel displays,

The strip process may include a first step of spraying a strip solution including a carbonate on a substrate, a second step of removing a chemical liquid reacted with the carbonate, and washing water above a freezing temperature of the ethylene carbonate on a substrate. A third step of spraying and a fourth step of cleaning the substrate; And it provides a substrate processing method for a flat panel display comprising a fifth step of drying the substrate.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, the strip chemical liquid used in the strip equipment of the present invention is a carbonate-based solvent, preferably a chemical liquid containing ethylene carbonate (EC), wherein the EC is a solvent such as fibers, polymers, oils, paints, synthetic resins, and the like. In addition to being used, it is also used as an electrolyte material for secondary batteries and fuel cells, which are recently attracting much attention.

The present invention intends to use the above-described EC as a stripping solution for stripping the photoresist using a strip chemical in the LCD manufacturing process.

EC is environmentally friendly, non-alkali and highly reusable, but it needs to be kept above the freezing temperature because it freezes below a certain temperature (preferably around 45 degrees). This can have a significant effect on the screen quality of the LCD.

2 is a diagram showing strip equipment using the EC according to an embodiment of the present invention. FIG. 3 is a schematic diagram illustrating a cutaway portion A-A of FIG. 2, which illustrates a strip device in which stripping is performed and a cleaning device in which cleaning is performed. Typically, the strip process is performed, followed by the cleaning process, so that the whole process can be seen as a single strip process. However, for convenience, embodiments of the present invention will be described by dividing the strip process or the apparatus performing the same and the cleaning process or the apparatus performing the same.

The strip device for performing the strip process, the strip bath 100, disposed inside the strip bath 100 is a carbonate-based solvent on the substrate (G) is preferably ethylene carbonate (hereinafter referred to as ethylene carbonate) Chemical liquid supply nozzle 110 for supplying and supplying the strip solution, and the temperature of the air curtain so as to prevent the temperature from being lowered by external influences to maintain the temperature of the strip bath 100 uniformly. It includes an air spray nozzle 120 to serve.

Although one chemical liquid supply nozzle 110 is illustrated in the drawing, the chemical liquid supply nozzle 110 may be formed in plural.

In addition, the strip device includes a strip bath temperature maintaining means 130 (shown in FIG. 4) for maintaining the temperature of the strip bath 100 above a set value.

The strip bath 100 is provided with a space for accommodating the chemical liquid supply nozzle 110, the air injection nozzle 120, and the substrate G therein, and the passage 100a through which the substrate G enters. ) And a passage 100b that can be discharged after the strip process is made.

In the strip bath 100, a plurality of transfer rollers R are disposed to transfer the substrate G so that the substrate G may enter or exit through the passages 100a and 100b. The transfer rollers R are rotated by a separate driving source (not shown) to have a conventional structure capable of transferring the substrate G.

Although the transfer rollers R illustrate an example of transferring the substrate G horizontally in the drawing, the present invention is not limited thereto. In general, the transfer rollers R may be transferred in a state where a predetermined inclination is performed. It is also possible to include means which can be.

The chemical liquid supply nozzle 110, which is disposed inside the strip bath 100 and preferably sprays ethylene carbonate with a carbonate-based solvent into a strip solution to enable a strip process, is a chemical liquid by a conventional chemical liquid supply device 112. It may have a structure that can be supplied to spray to the substrate (G) side.

The chemical liquid supply nozzle 110 may be formed in any structure as long as it can receive a strip solution containing a carbonate-based solvent from the chemical liquid supply device 112 and spray it onto the substrate G to perform the strip process.

The air injection nozzle 120 is sprayed with air to serve as a kind of air curtain, and hot air is supplied from the strip bath temperature maintaining unit 130 to maintain the temperature inside the strip bath 100 above a set value. Play a role.

The air jet nozzle 120 is preferably installed inside the strip bath 100 on the side from which the substrate G is discharged.

As shown in FIGS. 5 to 7, the air jet nozzle 120 may be disposed in a state having a direction (indicated by a solid arrow) and an inclination angle θ that are moved on one side of the substrate G. .

The air injection nozzles 120 are fastened by fastening means such as bolts and nuts to the first and second plates 123 and 125 having a predetermined width. Between the portions to which the first and second plates 123 and 125 are coupled is provided a conduit 127 through which hot air, that is, a fluid, may be injected.

In addition, the second plate 125 has a tip portion shorter as indicated by L than the length of the tip portion of the first plate 123. In addition, the air jet nozzle 120 is preferably the second plate 125 is disposed on the side of the movement direction of the substrate (G). Although not shown, the length of the tip end of the first plate 3 may be shorter than the length of the tip end of the second plate 5 when the direction of the substrate G is changed. The direction can also be reversed.

The conduit 127 provided between the first and second plates 123 and 125 may be formed by grooves in the first and second plates 123 and 125, and the first and second plates 123 and 125. 125 may be configured by inserting a separate gap maintaining member (not shown) and the like by a fastening means.

Referring to the operation of the present invention made in this way in detail as follows.

First, the air jet nozzle 1 is disposed on one side of the substrate G, which is conveyed by the roller R, or the like, with an inclination angle θ (shown in FIG. 125 is arrange | positioned so that it may be located in the direction to which the board | substrate G is conveyed (indicated by a solid arrow). In this state, when the fluid is injected through the conduit 127, the fluid velocity of the middle portion of the conduit becomes slower than the center portion due to the frictional force of the conduit (A, the length of the arrow The speed of the fluid at the tip of the pipe in which the fluid is injected is rapidly increased by releasing the frictional force with the first plate 125 as it passes through the tip of the second plate 125 (B, The length of the arrow indicates the velocity of the fluid).

Therefore, the fluid passing through the tip of the first and second plates 3 and 5 is bent toward the first plate 123 with a longer length of the tip and sprayed. In addition, since the air injection nozzle 120 itself is disposed in an inclined state with the direction in which the substrate G is moved, the injected fluid is sprayed in a direction opposite to the direction in which the substrate G is moved.

Therefore, the fluid can be prevented from being injected to the lower portion side of the second plate 5 or to the portion where the substrate G is moved. Therefore, in the substrate of the portion where the first plate 125 is located, the generation of vortex and negative pressure is suppressed to prevent the shaking of the substrate G and the like, and the substrate G is stably moved.

In this way, the fluid is sprayed only in the opposite direction to which the substrate G is transported, thereby maintaining the temperature of the entire large area substrate G uniformly.

In addition, even when the air jet nozzle 120 is disposed in an inclined position adjacent to the substrate G, the distance between the front end portion of the substrate G and the second plate 125 can be maintained to the maximum, and the roller R or the like can be used. Even if a small shake occurs, the defect of the substrate G can be prevented by reducing the possibility that the substrate G can come into contact with the air jet nozzle 120.

In the present invention, the air injection nozzle 120 is not limited to the above-described example, and may be configured to have a structure in which air is vertically sprayed with respect to the substrate G so as to act as an air curtain.

On the other hand, the carbonate solvent preferably ethylene carbonate used in the strip solution in the present invention is excellent in solubility, excellent reuse efficiency, and has the advantage that it can be easily reused by irradiating ultraviolet (UV). . However, since the ethylene carbonate freezes at about 45 ° C. or less, it is necessary to maintain the temperature inside the strip bath 100 at a higher temperature.

The strip bath temperature maintaining unit 130 supplies hot air to the strip bath 100 to maintain a temperature above a set value, and injects hot air to the air injection nozzle 120 to serve as an air curtain. This is to maintain the internal temperature of the strip bath 100 above the set value.

The strip bath temperature maintaining means 130, one or more heaters 132 to increase the temperature of the air to supply hot air to the strip bath 100 or the air injection nozzle 120, the air injection nozzle 120 Compressor 134 for compressing air to send compressed air to the air and passing through the heater 132 to supply air to the air injection nozzle 120 or strip bath 100, and strip bath ( 100) a temperature sensor 136 (shown in FIG. 4) for sensing a temperature therein.

In addition, the strip bath temperature maintaining means 130 further includes a controller (C) for receiving a signal sensed by the temperature sensor 136 to control the heater 132. Meanwhile, the controller C may be electrically connected to a temperature control switch 138 (shown in FIG. 4) for setting the internal temperature of the strip bath 100.

A stripping process performed by the stripping device thus formed will be described with reference to FIG. 15.

The substrate G to be stripped is introduced through the passage 100a of the strip bath 100. At this time, the substrate G is transferred by the transfer rollers R rotated by a driving source, and the transfer of the substrate G may be realized by a conventional transfer method.

The temperature controller 138 is then operated to set the set temperature. At this time, it is preferable to set the temperature to set at least 45 degreeC or more, More preferably, it sets to about 50-70 degreeC. This is to prevent a sudden drop below the freezing point of ethylene carbonate even if the temperature decreases to some extent.

Then, the temperature sensor 136 detects the temperature in the strip bath 100 (ST2) and transmits the detected sensing value to the controller (C).

At this time, the controller C determines whether the sensing value transmitted from the temperature sensor 136 is equal to or higher than a set temperature (ST5). When the temperature in the strip bath 100 is less than or equal to the set value, the heater 132 is operated (ST7) to inject hot air into the strip bath 100 to increase the temperature. However, the temperature rise in the strip bath 100 is not necessarily limited to injecting hot air, and the heater 132 is disposed inside the strip bath 100 to directly raise the temperature in the strip bath 100. It is possible.

When the internal temperature of the strip bath 100 is greater than or equal to a set value, air of hot air is injected to the substrate G through the air injection nozzle 120 (ST9). This process allows the controller C to operate by controlling the heater 132, and the compressed air of the compressor 134 may be supplied to the air injection nozzle 120 while passing through the heater 132. In particular, the supply of hot air to the air injection nozzle 120 is to prevent the ethylene carbonate used as the strip solution to solidify the temperature inside the strip bath 100 is lower than the set value for stably stripping proceeds will be.

Subsequently, ethylene carbonate, which is a strip solution, is injected onto the substrate G through the chemical liquid spray nozzle 110 (ST11).

Subsequently, the substrate G, which has been stripped, enters the cleaning bath 200 through the passages 200a of the cleaning bath 200 after passing through the passages 100b of the strip bath 100 through the transfer rollers R.

Then, the process proceeds to the cleaning process performed by the cleaning apparatus described later.

The cleaning apparatus for performing the cleaning process after performing the above-described strip process may include a cleaning bath 200, a cleaning liquid spray nozzle 300 disposed inside the cleaning bath 200, and spraying the cleaning liquid onto the substrate G. And it includes a dry air jet nozzle 400 for drying the cleaned substrate (G). Of course, the spray nozzle 400 in the drying may be arranged in another bath.

As the dry air spray nozzle 400, a conventional apparatus for drying the substrate G supplied with air by the conventional air supply apparatus 450 may be used.

The cleaning bath 200 is provided with a space for accommodating the cleaning liquid injection nozzle 300 and the dry air injection nozzle 400 and the substrate (G), the substrate (G) may enter A passage 200a and a passage 200b that may be discharged after the cleaning process is performed.

In addition, a plurality of transfer rollers R are disposed in the cleaning bath 200 to transfer the substrate G so that the substrate G may enter or exit through the passages 100a and 100b. The transfer rollers R have a conventional structure that can be rotated by a separate driving source (not shown) to transfer the substrate G.

Referring to FIGS. 8 to 10, the cleaning liquid spray nozzle 300, in which the cleaning liquid is supplied from the separate cleaning liquid supply device 350 and sprays the cleaning liquid, is a liquid containing the cleaning liquid W for cleaning the substrate G. A gas supply part 304, a gas supply part 304 positioned in a position facing the liquid supply part 302 and containing a pressure gas A for cleaning the substrate G, and the liquid supply part 312 and the gas. Located between the supply unit 304 and the pressure gas (A), as well as the injection means 306 for causing a mixed injection of the cleaning liquid (W) by the injection action of the gas (A), in this embodiment a substrate ( For example, as shown in FIG. 8, an area for the cleaning of G) may be installed in a washing bath corresponding to a moving section of the substrate G moving along the substrate transfer device M as shown in FIG. 8. have.

The liquid supply part 302 is formed in a box shape having a space part 302a in which the cleaning liquid W for cleaning the substrate G is contained, and has a rectangular shape corresponding to the injection means 306 as shown in FIG. 8. It is made of a shape, one side is open may be a structure in which a separate cover (C) is detachably coupled to a fastening member such as a bolt on the open side.

The material of the liquid supply part 302 may be a synthetic resin or a metal material having excellent durability, chemical resistance, and workability. In addition, when the internal space 302a has a structure that can be opened or closed by a separate cover C as described above, the maintenance of the inside of the liquid supply unit 302 is easy, but the cleaning liquid W therein is moved to the outside. Since it may be lost, for example, a conventional rubber ring or the like for the seal should be installed so that the seal can be sufficiently maintained.

As the cleaning liquid W stored in the liquid supply unit 302, a well-known cleaning solvent such as pure water, which can quickly decompose and remove foreign substances or particles present on the surface of the substrate G, may be used. The cleaning liquid W may have a structure flowing through the liquid supply pipe P1 connected to the liquid supply unit 302 as shown in FIG. 8.

The liquid supply part 302 may contain the cleaning liquid W at atmospheric pressure therein, for example. It is set to overflow again so that a constant head pressure is always maintained in the space portion 302a inside the liquid supply portion 302.

In the liquid supply part 302, a discharge hole 302b through which the cleaning liquid W contained in the space part 302a flows toward the injection means 306 is formed, and the hole 302b is formed in the space part 302a. In order to flow the cleaning liquid (W) in a horizontal direction corresponding to the bottom surface of the for example, in the form of a hole, for example, in the form of a long hole to be formed in the longitudinal direction of the liquid supply unit 302 apart Can be.

The gas supply unit 304 is to allow the pressure gas (A) for cleaning the substrate (G) to be supplied to the injection means 306 at a constant pressure, and the space portion for the pressure gas (A) to pass through ( 304a) is manufactured in the form of a box. In the present embodiment, the gas supply unit 304 has a rectangular shape corresponding to the liquid supply unit 302 as shown in FIGS. 8 and 9, and a separate cover C is formed at the opening side of the space unit 304a. An example of a structure that is detachably coupled to a fastening member such as a bolt is illustrated.

The material of the gas supply part 304 is a metal having excellent durability and chemical resistance so as to prevent deformation or breakage due to pressure or the like when the pressure gas A is discharged while passing through the internal space part 304a. Or synthetic resins may be used.

The material of the gas supply unit 304 may be, for example, a metal material such as SUS series or a synthetic resin such as engineering plastic. In addition, the rubber ring for the seal, such as the liquid supply unit 302 in order to prevent the pressure gas (A) is lost to the opening side of the space portion 304a to which the cover (C) is detachably coupled. By using a sufficient seal can be maintained.

In addition, when the pressure gas A supplied to the gas supply unit 304 is mixed and injected with the cleaning liquid W, for example, the foreign matter is not only foreign matter on the surface of the substrate G by blowing, but also the cleaning liquid W is injected. ) Can be removed quickly, for example, a well-known cleaning gas such as clean dry air (CDA) or the like can be used.

The gas supply unit 304 may be connected to the gas supply pipe (P2) as shown in FIG. 8 so that the pressure gas (A) flows from the supply pipe (P2), the pressure gas (A) supplied as described above Via the space portion 304a is made to be supplied directly to the injection means 306 through the discharge hole 304b as shown in FIG.

Referring to FIG. 10, in the space portion 304a of the gas supply unit 304, a means for converting the pressure gas A introduced from the gas supply pipe P2 into a laminar flow state from a turbulent state is formed as shown in the drawing. Can be. This means is provided with a blocking film 308 as shown in Figs. 10 and 11 corresponding to the section in which the pressure gas A flows in the space portion 304a of the gas supply portion 304, so that the single space portion 304a is formed. ) Is divided into two spaces divided up and down, that is, the upper space portion 310a and the lower space portion 310b, and the blocking film 308 includes a plurality of spaces for converting the pressure gas A from turbulent flow to laminar flow. Four holes 312 may be perforated.

In this case, the plurality of holes 312 formed in the blocking layer 308 may be perforated in the arrangement as shown in FIG. 12, and the holes 312 may be divided into two space portions 310a and 310b as described above. When the pressure gas A flowing while passing through the hole 312 region passes through the hole 312, it is formed within a size range that can be smoothly converted from turbulent flow to laminar flow by, for example, a difference in diameter of the flow path.

The laminar flow converting means of the above structure, the pressure gas (A) flowing through the gas supply pipe (P2) is introduced into the upper space portion (310a) is converted into a laminar flow from turbulent flow is stored first, in this state As it passes through the holes 312 formed in the blocking film 308, the structure is converted into turbulent flow into laminar flow so as to be stored secondarily. In detail, the laminar flow converting process will be described in detail. When passing through the holes 312 of the) is uniformly compressed by the pressure according to the difference in the diameter of the flow path pressure gas (A) is easily converted to laminar flow having a uniform pressure by this action, and also converted to laminar flow Since the cross-sectional area is rapidly expanded in the lower space portion 310b, the velocity decreases and the pressure energy increases rapidly as the velocity energy decreases. The pressure gas (A) passing through a 308 will easily can be converted into a laminar flow of the high pressure.

Meanwhile, an injection means 306 is installed between the liquid supply part 302 and the gas supply part 304, which will be described in detail with reference to the accompanying drawings.

9 and 10, the spraying means 306 is positioned in a position corresponding to the liquid supply part 302, and the cleaning liquid W is sprayed while the divided sections are connected by the combination of the thin plates F1. The liquid flow path assembly 314 which provides a single flow path H1 to be positioned, and is positioned in a position facing the liquid flow path assembly 314 and is divided into a section divided by the combination of the thin plates F2, is connected to the pressure gas ( In addition to forming a flow path H2 for injecting A), when the pressure gas A is injected in one direction through the flow path H2, the washing liquid W is sucked through the liquid flow path H1 and mixed. It includes a gas flow path assembly 316 to induce to be injected, in the present embodiment, the four thin plates (P1) is made of one set on the side of the liquid flow path assembly 314, three on the side of the gas flow path assembly 316 One example that the thin plates (P1) made of a set It represents.

The thin plates F1 of the liquid flow path assembly 314 have a rectangular shape corresponding to the liquid supply part 302 as shown in FIG. 8, and the lower side of the thin plates F1 is divided to allow the cleaning liquid W to flow. Flow path grooves 320a that provide flow path sections are formed apart as shown in the drawing.

As the flow path grooves 320a formed in the thin plate F1 are connected to four sections divided by the flow path grooves 320a as shown in FIGS. 10 and 11, a single flow path H1 as shown in FIG. In the present embodiment, the flow path groove 320a of the thin plate F1 adjacent to the liquid supply unit 302 is perforated in a circular shape, and the remaining three thin plates F1 are formed in a perforated structure to be formed. For example, a structure in which a lower side is opened, for example, is drilled in a “∩” shape to form a single flow path region corresponding to the discharge hole 302b of the liquid supply part 302 is shown as an example.

At this time, the liquid flow path (H1) section formed by the four thin plates (F1) as described above gradually toward the boundary point with the gas flow path assembly 316 from the liquid supply unit 302 side as shown in FIG. It may be formed to be inclined or may have a structure having a section in which the inlet side and the outlet side are horizontal to each other, although not shown.

Referring to FIG. 10, the section length L1 of the liquid flow path H1 formed by the bonding of the thin plates F1 is made in a range of about 0.1 mm to 0.2 mm, and the thickness of the thin plate F1 is According to the number of thin plates F set in the liquid flow path assembly 314, the flow path section having the length range as described above is formed within the corresponding range.

In addition, since the flow path groove 320a is difficult to physically cut in consideration of the thickness of the thin plate F1, for example, the flow path groove 320a may be formed by a corrosive action such as photo etching, and the like. As the material, any one of materials suitable for such an etching process and excellent in durability may be used.

The gas flow path assembly 316 is made of thin plates F2 having a rectangular shape corresponding to the gas supply unit 304 as shown in FIG. 9, and a pressure gas A flows through the lower sides of the thin plates F2. Flow path grooves 320b for providing divided flow path sections for the separation are formed as shown in the drawing.

The flow path grooves 320b formed in the thin plate F2 are perforated to form a single gas flow path H2 while the sections divided by the three flow path grooves 320b are connected as shown in FIGS. 10 and 11. As shown in FIG. 9, the flow path groove 320b of the thin plate F2 adjacent to the gas supply unit 304 is punched in a circular shape in the present embodiment, and the bottom two sides of the remaining two thin plates F2 are lowered. For example, a structure in which a single gas flow path H2 as shown in the drawing is formed to correspond to the discharge hole 304b of the gas supply part 304 by being punched in the shape of “open”, for example, is shown. .

At this time, the gas flow path (H2) section formed by the three thin plates (F2) is one-way flow of the gas (A) when the pressure gas (A) is injected through the flow path (H2) as shown in FIG. It guides the cleaning liquid (W) is sucked through the liquid flow path (H1) by, and as shown in the drawing so that the discharge side and the predetermined section of the liquid flow path (H1) to communicate with each other two fluids in this communication section Is formed to allow the flow and action of a fluid such as, for example, a venturi tube, to allow a mixed injection.

In addition, the flow path groove 320b perforated in the shape of “∩” has a concave shape while the middle portion between the upper side and the lower side of the perforation area is connected in a streamline shape as shown in FIG. 9. When the flow path groove 320b is formed in such a structure, when the pressure gas A passes through the gas flow path H2 from the gas supply part 304, the flow path H2 is in this area. The pressure of the pressure gas (A) is increased by the difference in the diameter of the structure is to further improve the injection efficiency.

As described above, the section length L2 of the gas flow path H2 formed by the bonding of the thin plates F2 is made within the range of about 0.1 mm to 0.2 mm, the same as the section length of the liquid flow path H1.

In addition, the flow path groove 320b of the thin plate F2 may be formed in the same manner as the thin plate F1 of the liquid flow path assembly 314 by, for example, photo etching or the like. Any material suitable for the same etching process and the like and excellent in durability may be used.

The flow paths H1 and H2 formed in the liquid flow path assembly 314 and the gas flow path assembly 316 having the above-described structures have sections as shown in the figure with their boundary points therebetween as shown in FIG. As shown in FIG. 8, in the direction crossing the substrate G moving in one direction in the cleaning region, a plurality of substrates are formed apart as shown in FIG. 13 to pass through the cleaning section. The fluid has a rectangular spray area and is configured to be uniformly sprayed (see FIG. 14).

When the liquid flow path assembly 314 and the gas flow path assembly 316 are set between the liquid supply part 302 and the gas supply part 304, for example, the liquid flow path H1 side thin plate F1. The thin plate F2 on the side of the gas flow path H2 is fitted to the guide pin 322 as shown in FIGS. 10 and 11, and the guide pin 322 is a sidewall surface of the liquid supply part 302 and the gas supply part 304. It may be a structure fixed to the fitting coupling.

The coupling of the liquid supply part 302 and the gas supply part 304 and the injection means 306 positioned therebetween is such that, for example, a fastening member such as a bolt and a nut is connected to the liquid supply part 302 as shown in FIG. 9. The injection means 306 and the gas supply unit 304 may be fastened in a horizontal position to be firmly set in the shape and arrangement as shown in FIG. 10.

The substrate G moved from the strip bath 100 is cleaned through the cleaning liquid jet nozzle 300 formed as described above (ST13, shown in FIG. 15).

The cleaning liquid jet nozzle according to the present invention having the above-described structure has the following effect when the substrate G moves through the cleaning section while moving in one direction by the substrate transfer device M in the cleaning region as shown in FIG. The surface of the substrate G is thereby cleaned.

First, when the pressure gas A flows into the gas supply unit 304 through the gas supply pipe P2, the pressure gas A is supplied to the gas flow path assembly 316 as shown in FIG. ) Is injected with a constant pressure in the same direction as shown in the drawing via the section.

At this time, in the section in which the gas flow path (H2) and the liquid flow path (H1) are in communication, when the pressure gas (A) passes through, the one-way flow of the pressure gas (A) to the atmospheric pressure state in the liquid supply unit 302 The stored cleaning liquid W is sucked along the liquid flow path assembly 314, that is, the liquid flow path H1, and the pressure gas in the communication section between the liquid flow path H1 and the gas flow path H2 as shown in FIG. 10. After mixing with A), foreign matter containing ethylene carbonate component which may remain on the surface of the substrate G by spraying the cleaning fluid because it is sprayed at a constant pressure toward the surface of the substrate G as shown in the drawing. You can easily remove them.

In addition, air is injected through the drying air injection nozzle 400 (ST15, as shown in FIG. 15) to dry the substrate G, and to the outside through the passage 200b of the cleaning bath 200. Will come out.

The cleaning liquid spray nozzle 300 may be easily cleaned of the substrate by the injection means for providing a flow path for mixing the two or more cleaning fluids, such as liquid and gas, the injection means is a plurality of thin plates As the divided sections are connected to each other, a single flow path for flowing the cleaning liquid and gas is formed and the cleaning liquid is sucked by the flow atmosphere of the cleaning pressure gas so that they are mixed and sprayed. Not only easy but also improved durability and injection efficiency can be obtained, it is possible to easily set the spraying environment of the cleaning fluid to correspond to this according to the size or shape of the substrate can further improve work compatibility and cleaning quality.

16 is a view showing another embodiment according to the present invention, which shows a cleaning bath 200 formed of a strip bath 100 and a straight (meaning that the bath is arranged in a straight line). In other embodiments of the present invention, only the differences from the above-described embodiment will be described, and the same parts will be replaced with the description of the above-described embodiment.

The strip bath 100 includes chemical spray nozzles 110 and air spray nozzles 160 to spray a carbonate-based solvent, preferably ethylene carbonate, to perform a strip process of the substrate G, and the substrate is inclined. It may further include a feed roller that can be transferred to. The substrate transfer to the inclined state is to minimize the ethylene carbonate component in the next process by quickly removing the liquid removed by the reaction of the ethylene carbonate and the photosensitive film. Here, the chemical liquid injection nozzles 110 may have the same structure as the above-described embodiment.

In addition, the air injection nozzle 160 is disposed at an outlet side in the strip bath 100 to perform a role of an air curtain by injecting air in a vertical direction with respect to the substrate. By supplying hot air to maintain above the freezing point temperature of ethylene carbonate, the temperature in the strip bath can be prevented from falling.

In the above-described embodiment of the present invention, an example in which the cleaning liquid injection nozzle 300 is provided in the cleaning bath 200 is described, but is not limited to the above-described configuration, and the cleaning bath 200 in the present embodiment may be the strip bath. Injecting the washing water to the substrate (G) passing through the (100), the first bath 250 for spraying the washing water having a temperature above the freezing temperature of ethylene carbonate, the substrate is disposed on the exit side of the first bath 250 (G) a cleaning solution spray nozzle 300 disposed between the second bath 260 for drying the washing water, and the cleaning solution spray nozzle 300 disposed between the first and second baths 250 and 260 to spray the cleaning solution. It is equally given) includes a third bath 270 having. That is, the first bath 250 is continuously connected to the strip bath 100, and cleaning liquid spray nozzles 252 for spraying a high temperature cleaning liquid are installed. A separate high temperature cleaning liquid supply device (not shown) may be connected to the cleaning liquid spray nozzles 252 for spraying the high temperature cleaning liquid so that the cleaning liquid having a temperature higher than the freezing point temperature of the carbonate solvent, preferably ethylene carbonate, may be injected. . In addition, like the strip bath 100, the substrate may be tilted.

The high temperature cleaning liquid supply device may be the same as that described in the above-described example, and may be any structure as long as it can supply high temperature cleaning liquid to the cleaning liquid injection nozzles 252. In addition, an air jet nozzle 120 may be disposed at the exit side of the substrate G of the first bath 250 to remove the cleaning liquid and simultaneously serve as an air curtain.

In the present invention, the air jet nozzle 120 is the same as the above-described embodiment, it is possible to inject hot air to the entire area of the substrate (G) to prevent the temperature from dropping in a specific portion of the substrate (G) good cleaning Although an effect can be acquired, it is not limited to this. That is, when rinsing water having a temperature higher than the freezing temperature of ethylene carbonate is injected and flowed in an inclined state of the substrate, the ethylene carbonate component is removed, so that normal clean dry air (CDA) that is not warmed during air injection may be supplied.

The dry air spray nozzle 400 described in the above-described embodiment is disposed in the second bath 270, which has the same function as the above-described embodiment.

Meanwhile, a third water 270 is disposed between the first and second baths 250 and 260, and a washing water spray nozzle 300 for spraying the washing water is disposed, and the washing water spray nozzle 300 is described above. The contents of an embodiment may be applied.

According to another embodiment of the present invention, the ethylene carbonate is solidified on the substrate G at a temperature below the freezing point in the process of cleaning the ethylene carbonate that may remain on the strip substrate 100 in the strip bath 100. This is to further reduce the case where a defect may occur in the substrate G.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

As described above, the present invention has an advantage that ethylene carbonate is preferably used as the carbonate solvent as the strip solution, so that it has excellent solubility and reuse efficiency, dissolves the photosensitive solution, and reuses the used chemical solution by irradiating ultraviolet (UV) light. At the same time, it is possible to omit the bath to neutralize the chemical liquid has the effect of reducing the production cost by minimizing the installation area of the bath.

In addition, the present invention is excellent in the solubility of the carbonate solvent, preferably ethylene carbonate can be reduced the strip section can be reduced the number of strip bath can further reduce the installation area of the bath.

In addition, a high pressure cleaning liquid jet nozzle is installed on the substrate to enter the cleaning section to maximize the cleaning efficiency.

In addition, since a bath atmosphere can be formed above the freezing temperature of ethylene carbonate and stable substrate processing can be achieved, it can greatly contribute to substrate yield improvement.

Claims (16)

A strip bath including a spray nozzle for spraying a strip chemical having a carbonate-based solvent as a main component; Atmosphere blocking means disposed inside the exit side of the strip bath to block the atmosphere with the cleaning bath; And A cleaning bath disposed at the exit side of the strip bath; Substrate processing apparatus for a flat panel display comprising a. The cleaning apparatus of claim 1, wherein the cleaning bath comprises: a first bath controlling and spraying the temperature of the washing water above the freezing temperature of the carbonate-based solvent; A second bath disposed at the first bath outlet side to dry the washing water on the substrate; Substrate processing apparatus for a flat panel display comprising a. The method of claim 2, And a third bath provided with a cleaning liquid spray nozzle for spraying cleaning water between the first and second baths. The substrate processing apparatus for a flat panel display according to claim 2, further comprising an air injection nozzle on the first bath outlet side for spraying air toward the substrate to maintain the temperature. The method of claim 1, And the atmosphere blocking means is a means for injecting air in a direction perpendicular to the substrate. The method of claim 1, The method according to claim 4 or 5, And said air injection nozzle or said atmosphere blocking means injects hot air. The method of claim 1, And the strip bath includes a transfer roller means to move the substrate in an inclined state. The method of claim 4, wherein The air spray nozzle is a first plate; A second plate coupled to the first plate in a state in which a conduit through which fluid can pass is provided by a fastening means; The first and second plates are substrate processing apparatus for a flat panel display, the length of the tip portion to which the fluid is injected is made different. The flat panel display substrate processing apparatus according to claim 8, wherein a portion of the first and second plates having a shorter tip portion is disposed toward the moving direction of the substrate. The method of claim 3, The cleaning liquid injection nozzle A liquid supply portion containing a cleaning liquid for cleaning the substrate, a gas supply portion positioned in a position facing the liquid supply portion, containing a cleaning gas for cleaning the substrate, and positioned between the liquid supply portion and the gas supply portion for cleaning. And a jetting means for providing a flow path for allowing the mixing liquid to be jetted by the jetting action of the gas as well as the gas, The injection means is positioned in a position corresponding to the liquid supply part, and a liquid flow path assembly in which a flow path section for injecting a cleaning liquid is divided by thin plates, and positioned in a position facing the liquid flow path assembly for cleaning. The flow path section for injecting the gas is formed by the thin plates, and when the cleaning gas is injected through the gas flow path, the cleaning liquid is sucked through the liquid flow path by the one-way injection atmosphere of the gas and mixed injection is performed. Substrate processing apparatus for a flat panel display comprising a gas flow path assembly for inducing. The substrate processing apparatus for a flat panel display according to claim 1 or 2, wherein the carbonate solvent is made of ethylene carbonate. As a strip process which apply | coats the photosensitive resin solution on this board | substrate, and removes the photosensitive resin solution apply | coated to this board | substrate in order to make a circuit pattern on the board | substrate for flat panel displays, The strip process, Spraying a strip solution containing a carbonate solvent onto a substrate; A second step of removing the chemical liquid reacted with the carbonate solvent; Spraying washing water above the freezing temperature of the carbonate solvent onto a substrate; A fourth step of cleaning the substrate; And A fifth step of drying the substrate; Substrate processing method for a flat panel display comprising a. The method of claim 12, The second step of removing the chemical liquid reacted with the carbonate solvent, Inclining the transport means for transporting the substrate; And spraying air in a vertical direction of the substrate. The method of claim 12, And injecting a clean dry air (CDA) warmed between the third step and the fourth step onto the substrate. The method of claim 12, The fourth step is a substrate processing method for a flat panel display, characterized in that for cleaning the substrate by spraying the washing water on the substrate in order to remove the carbonate solvent component. The substrate processing method for flat panel display according to any one of claims 12, 13 and 15, wherein the carbonate solvent is ethylene carbonate.

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