KR20050035246A - 배출 가스의 처리 방법 및 처리 시스템 - Google Patents

배출 가스의 처리 방법 및 처리 시스템 Download PDF

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Publication number
KR20050035246A
KR20050035246A KR1020057001084A KR20057001084A KR20050035246A KR 20050035246 A KR20050035246 A KR 20050035246A KR 1020057001084 A KR1020057001084 A KR 1020057001084A KR 20057001084 A KR20057001084 A KR 20057001084A KR 20050035246 A KR20050035246 A KR 20050035246A
Authority
KR
South Korea
Prior art keywords
exhaust gas
combustion
solid alkali
gas
alkali compound
Prior art date
Application number
KR1020057001084A
Other languages
English (en)
Korean (ko)
Inventor
미치타카 히시이케
요시노리 다카타
겐지 나가타
Original Assignee
스미또모 세이까 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 스미또모 세이까 가부시키가이샤 filed Critical 스미또모 세이까 가부시키가이샤
Publication of KR20050035246A publication Critical patent/KR20050035246A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/48—Sulfur compounds
    • B01D53/50—Sulfur oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
KR1020057001084A 2002-08-09 2003-07-29 배출 가스의 처리 방법 및 처리 시스템 KR20050035246A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002233122A JP2004066199A (ja) 2002-08-09 2002-08-09 排ガスの処理方法および処理システム
JPJP-P-2002-00233122 2002-08-09

Publications (1)

Publication Number Publication Date
KR20050035246A true KR20050035246A (ko) 2005-04-15

Family

ID=31711854

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057001084A KR20050035246A (ko) 2002-08-09 2003-07-29 배출 가스의 처리 방법 및 처리 시스템

Country Status (5)

Country Link
JP (1) JP2004066199A (zh)
KR (1) KR20050035246A (zh)
CN (1) CN1668365A (zh)
TW (1) TW200415331A (zh)
WO (1) WO2004014525A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5991677B2 (ja) * 2012-09-24 2016-09-14 三菱重工環境・化学エンジニアリング株式会社 排ガス処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03278814A (ja) * 1990-03-28 1991-12-10 F K K Giken Kk 酸性ガス処理装置
US6322756B1 (en) * 1996-12-31 2001-11-27 Advanced Technology And Materials, Inc. Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
JP3699844B2 (ja) * 1998-12-14 2005-09-28 住友精化株式会社 酸化性ガス含有排ガスの処理方法

Also Published As

Publication number Publication date
WO2004014525A1 (ja) 2004-02-19
CN1668365A (zh) 2005-09-14
TW200415331A (en) 2004-08-16
JP2004066199A (ja) 2004-03-04

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