KR20050029215A - 시험 장치를 피시험체에 연결하기 위한 조립체 - Google Patents

시험 장치를 피시험체에 연결하기 위한 조립체 Download PDF

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Publication number
KR20050029215A
KR20050029215A KR1020057000799A KR20057000799A KR20050029215A KR 20050029215 A KR20050029215 A KR 20050029215A KR 1020057000799 A KR1020057000799 A KR 1020057000799A KR 20057000799 A KR20057000799 A KR 20057000799A KR 20050029215 A KR20050029215 A KR 20050029215A
Authority
KR
South Korea
Prior art keywords
electrical
contactor
assembly
inclusion
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020057000799A
Other languages
English (en)
Korean (ko)
Inventor
리치먼드도날드피2세
요바노비치요반
위르프랭크오
Original Assignee
에어 테스트 시스템즈
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/197,104 external-priority patent/US6867608B2/en
Priority claimed from US10/197,133 external-priority patent/US6853209B1/en
Application filed by 에어 테스트 시스템즈 filed Critical 에어 테스트 시스템즈
Publication of KR20050029215A publication Critical patent/KR20050029215A/ko
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020057000799A 2002-07-16 2003-07-15 시험 장치를 피시험체에 연결하기 위한 조립체 Ceased KR20050029215A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/197,104 US6867608B2 (en) 2002-07-16 2002-07-16 Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component
US10/197,133 2002-07-16
US10/197,104 2002-07-16
US10/197,133 US6853209B1 (en) 2002-07-16 2002-07-16 Contactor assembly for testing electrical circuits

Publications (1)

Publication Number Publication Date
KR20050029215A true KR20050029215A (ko) 2005-03-24

Family

ID=30117843

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057000799A Ceased KR20050029215A (ko) 2002-07-16 2003-07-15 시험 장치를 피시험체에 연결하기 위한 조립체

Country Status (6)

Country Link
EP (1) EP1523685A2 (enExample)
JP (1) JP2005533254A (enExample)
KR (1) KR20050029215A (enExample)
CN (1) CN100523826C (enExample)
AU (1) AU2003249276A1 (enExample)
WO (1) WO2004008163A2 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI339737B (en) 2005-04-27 2011-04-01 Aehr Test Systems Contactor assembly, cartridge, and apparatus and method for testing integrated circuit of device
CN101051067B (zh) * 2006-04-03 2010-08-11 航天科工防御技术研究试验中心 电连接器综合检测控制装置设计方法
MY152599A (en) 2007-02-14 2014-10-31 Eles Semiconductor Equipment S P A Test of electronic devices at package level using test boards without sockets
EP1959265A1 (en) * 2007-02-16 2008-08-20 Eles Semiconductor Equipment S.P.A. Testing integrated circuits on a wafer with a cartridge leaving exposed a surface thereof
US7557594B2 (en) * 2007-08-14 2009-07-07 Electro Scientific Industries, Inc. Automated contact alignment tool
US7800382B2 (en) 2007-12-19 2010-09-21 AEHR Test Ststems System for testing an integrated circuit of a device and its method of use
CN101545926B (zh) * 2008-03-25 2011-05-11 旺矽科技股份有限公司 探针测试装置
DE102009012021B4 (de) * 2009-03-10 2011-02-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messvorrichtung zur elektrischen Vermessung einer einseitig an einer Messseite elektrisch kontaktierbaren Messstruktur
US8030957B2 (en) 2009-03-25 2011-10-04 Aehr Test Systems System for testing an integrated circuit of a device and its method of use
TWI440412B (zh) * 2011-12-28 2014-06-01 巨擘科技股份有限公司 超薄多層基板之封裝方法
CN103808969A (zh) * 2012-11-08 2014-05-21 富泰华工业（深圳）有限公司 用于承载待测试电子装置的治具
CN103808979A (zh) * 2012-11-08 2014-05-21 富泰华工业（深圳）有限公司 用于承载待测试电子装置的治具
CN105548859A (zh) * 2015-12-09 2016-05-04 上海精密计量测试研究所 用于环境测试的测试设备及方法
KR20250123227A (ko) 2016-01-08 2025-08-14 에어 테스트 시스템즈 일렉트로닉스 테스터 내의 디바이스들의 열 제어를 위한 방법 및 시스템
CN106200239B (zh) * 2016-09-14 2019-03-15 海信集团有限公司 光机照明系统
US10782316B2 (en) * 2017-01-09 2020-09-22 Delta Design, Inc. Socket side thermal system
KR20240146697A (ko) 2017-03-03 2024-10-08 에어 테스트 시스템즈 카트리지, 테스트 피스 및 하나 이상의 전자 디바이스들을 테스팅하는 방법
EP4517349A3 (en) 2020-10-07 2025-06-04 AEHR Test Systems Electronics tester
WO2023278632A1 (en) 2021-06-30 2023-01-05 Delta Design, Inc. Temperature control system including contactor assembly

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148103A (en) * 1990-10-31 1992-09-15 Hughes Aircraft Company Apparatus for testing integrated circuits
JPH0763788A (ja) * 1993-08-21 1995-03-10 Hewlett Packard Co <Hp> プローブおよび電気部品／回路検査装置ならびに電気部品／回路検査方法
US6483328B1 (en) * 1995-11-09 2002-11-19 Formfactor, Inc. Probe card for probing wafers with raised contact elements
US6028437A (en) * 1997-05-19 2000-02-22 Si Diamond Technology, Inc. Probe head assembly
US6137297A (en) * 1999-01-06 2000-10-24 Vertest Systemsn Corp. Electronic test probe interface assembly and method of manufacture
JP2001013208A (ja) * 1999-06-30 2001-01-19 Mitsubishi Electric Corp 半導体テスト治工具

Also Published As

Publication number Publication date
AU2003249276A1 (en) 2004-02-02
WO2004008163A2 (en) 2004-01-22
CN100523826C (zh) 2009-08-05
WO2004008163A3 (en) 2004-06-10
EP1523685A2 (en) 2005-04-20
JP2005533254A (ja) 2005-11-04
AU2003249276A8 (en) 2004-02-02
CN1668929A (zh) 2005-09-14

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