KR20050028532A - 액정 표시 장치의 제조를 위한 약액 공급 시스템 - Google Patents
액정 표시 장치의 제조를 위한 약액 공급 시스템 Download PDFInfo
- Publication number
- KR20050028532A KR20050028532A KR1020030064817A KR20030064817A KR20050028532A KR 20050028532 A KR20050028532 A KR 20050028532A KR 1020030064817 A KR1020030064817 A KR 1020030064817A KR 20030064817 A KR20030064817 A KR 20030064817A KR 20050028532 A KR20050028532 A KR 20050028532A
- Authority
- KR
- South Korea
- Prior art keywords
- chemical liquid
- process solution
- liquid supply
- temperature
- supply pipe
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/20—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor
- B05B1/205—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor characterised by the longitudinal shape of the elongated body
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1042—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material provided with means for heating or cooling the liquid or other fluent material in the supplying means upstream of the applying apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Liquid Crystal (AREA)
- Nozzles (AREA)
- Spray Control Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (6)
- 약액을 공급하는 약액 공급 장치,상기 약액 공급 장치 내부의 약액의 온도를 조절하는 제1 온도 조절 장치,상기 약액 공급 장치로부터 공급된 약액을 기판에 분사하는 복수개의 노즐,상기 약액을 상기 약액 공급 장치로부터 상기 노즐로 공급하는 약액 공급관,상기 약액 공급관을 흐르는 약액의 온도를 조절하는 제2 온도 조절 장치를 포함하는 약액 공급 시스템.
- 제1항에서,상기 약액 공급관은 상기 복수개의 노즐이 설치되어 있는 복수개의 노즐바, 상기 복수개의 노즐바와 상기 약액 공급 장치를 연결하는 복수개의 연결바를 포함하는 약액 공급 시스템.
- 제2항에서,상기 제2 온도 조절 장치는 상기 연결바의 주변에 설치되어 있는 복수개의 유체 공급관인 약액 공급 시스템.
- 제3항에서,상기 복수개의 유체 공급관은 상기 연결바와 접촉되어 있는 약액 공급 시스템.
- 제4항에서,상기 복수개의 유체 공급관에는 냉수 또는 온수가 공급되는 약액 공급 시스템.
- 제4항에서,상기 복수개의 유체 공급관에는 냉기 또는 온기가 공급되는 약액 공급 시스템.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030064817A KR100973812B1 (ko) | 2003-09-18 | 2003-09-18 | 액정 표시 장치의 제조를 위한 약액 공급 시스템 |
US10/863,113 US20050074558A1 (en) | 2003-09-18 | 2004-06-07 | Process solution supply system and method |
TW093128405A TW200523611A (en) | 2003-09-18 | 2004-09-20 | Process solution supply system and method |
CNA2004100780423A CN1597134A (zh) | 2003-09-18 | 2004-09-20 | 生产用溶液供给系统及方法 |
JP2004273641A JP2005088003A (ja) | 2003-09-18 | 2004-09-21 | 液晶表示装置製造のための薬液供給システム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030064817A KR100973812B1 (ko) | 2003-09-18 | 2003-09-18 | 액정 표시 장치의 제조를 위한 약액 공급 시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050028532A true KR20050028532A (ko) | 2005-03-23 |
KR100973812B1 KR100973812B1 (ko) | 2010-08-03 |
Family
ID=34386618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020030064817A KR100973812B1 (ko) | 2003-09-18 | 2003-09-18 | 액정 표시 장치의 제조를 위한 약액 공급 시스템 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050074558A1 (ko) |
JP (1) | JP2005088003A (ko) |
KR (1) | KR100973812B1 (ko) |
CN (1) | CN1597134A (ko) |
TW (1) | TW200523611A (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100729093B1 (ko) * | 2005-12-28 | 2007-06-14 | 동부일렉트로닉스 주식회사 | 반도체 장치 제조를 위한 약액 공급 장치 |
KR100914184B1 (ko) * | 2007-12-17 | 2009-08-26 | 세메스 주식회사 | 기판 처리 장치 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5750951B2 (ja) | 2011-03-14 | 2015-07-22 | 富士通株式会社 | エッチングする方法及びエッチング装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US5241325A (en) * | 1991-10-31 | 1993-08-31 | Hewlett-Packard Company | Print cartridge cam actuator linkage |
JP2655098B2 (ja) * | 1994-10-18 | 1997-09-17 | 日本電気株式会社 | 薬液を用いたウエハ表面処理装置 |
JPH08192513A (ja) * | 1995-01-18 | 1996-07-30 | Fujitsu Ltd | 圧電式インクジェットプリンタヘッド |
JPH09164702A (ja) * | 1995-12-18 | 1997-06-24 | Brother Ind Ltd | インクジェット出力機 |
JPH11349872A (ja) * | 1998-06-05 | 1999-12-21 | Sharp Corp | 改質インク粒子およびその製造方法、カラーフィルタおよびその製造方法、カラー表示装置、並びに、改質インク粒子の製造装置 |
US6736869B1 (en) * | 2000-08-28 | 2004-05-18 | Micron Technology, Inc. | Method for forming a planarizing pad for planarization of microelectronic substrates |
US6824083B2 (en) * | 2001-06-12 | 2004-11-30 | Fuji Xerox Co., Ltd. | Fluid jetting device, fluid jetting head, and fluid jetting apparatus |
KR20030003550A (ko) * | 2001-07-03 | 2003-01-10 | 삼성전자 주식회사 | 현상 설비의 현상액 온도 제어 장치 |
JP2003019790A (ja) * | 2001-07-09 | 2003-01-21 | Seiko Epson Corp | インクジェット式記録装置およびインクジェット式記録方法 |
KR20030053948A (ko) * | 2001-12-24 | 2003-07-02 | 삼성전자주식회사 | 스피너장비의 온도제어장치 |
US6953750B1 (en) * | 2002-09-30 | 2005-10-11 | Lam Research Corporation | Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization |
US6908045B2 (en) * | 2003-01-28 | 2005-06-21 | Casio Computer Co., Ltd. | Solution spray apparatus and solution spray method |
-
2003
- 2003-09-18 KR KR1020030064817A patent/KR100973812B1/ko active IP Right Grant
-
2004
- 2004-06-07 US US10/863,113 patent/US20050074558A1/en not_active Abandoned
- 2004-09-20 CN CNA2004100780423A patent/CN1597134A/zh active Pending
- 2004-09-20 TW TW093128405A patent/TW200523611A/zh unknown
- 2004-09-21 JP JP2004273641A patent/JP2005088003A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100729093B1 (ko) * | 2005-12-28 | 2007-06-14 | 동부일렉트로닉스 주식회사 | 반도체 장치 제조를 위한 약액 공급 장치 |
KR100914184B1 (ko) * | 2007-12-17 | 2009-08-26 | 세메스 주식회사 | 기판 처리 장치 |
Also Published As
Publication number | Publication date |
---|---|
US20050074558A1 (en) | 2005-04-07 |
KR100973812B1 (ko) | 2010-08-03 |
CN1597134A (zh) | 2005-03-23 |
JP2005088003A (ja) | 2005-04-07 |
TW200523611A (en) | 2005-07-16 |
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