KR20050015977A - Method for manufacturing liquid crystal panel, apparatus therefor and apparatus for applying paste - Google Patents

Abstract

PURPOSE: A method and apparatus for manufacturing an LCD(Liquid Crystal Display) panel and a paste coater are provided to improve production yield of the LCD panel by correcting liquid crystal charging capacity. CONSTITUTION: An apparatus for manufacturing an LCD panel includes a unit for inputting design and production information of an LCD panel, and a unit for varying a seal pattern coating condition based on the input information to control a seal coating cross-section, to thereby correct liquid crystal charging capacity. The design and production information includes a liquid crystal substrate cell design values, color filter height design information, spacer height design information and production error information. Correction items include a seal coating width, seal coating height and correction of coating point.

Description

Manufacturing method of liquid crystal panel, apparatus and paste coating apparatus therefor {METHOD FOR MANUFACTURING LIQUID CRYSTAL PANEL, APPARATUS THEREFOR AND APPARATUS FOR APPLYING PASTE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal drop bonding method, and more particularly, to a manufacturing method of a coating apparatus capable of correcting a coating condition of a sealing agent in consideration of a manufacturing error for a design value up to pretreatment before applying the sealing agent. .

Conventionally, as shown in Japanese Laid-Open Patent Publication No. 2000-284295, a closed rectangular seal pattern is formed on a substrate, liquid crystal is directly dropped therein, and the other substrate is overlapped to precisely position and bonded to perform an LCD. The method of producing panels is practical.

By the way, in the said prior art, the film thickness precision of the color filter etc. formed in the surface of a board | substrate may differ from a design value. In this case, since the volume of the cell changes, there is a problem that excessive shortage of the liquid crystal occurs when the liquid crystal of a predetermined amount is dropped and the substrate is bonded and assembled.

As described above, an object of the present invention is to provide a production method capable of solving such a problem and improving the yield. In the cell assembly process of the liquid crystal, a means for inputting design and production information of the LCD panel is provided. A method for correcting the liquid crystal filling volume by providing a means for changing the sealing pattern application condition from the information and controlling the cross-sectional area of the seal coating, and a method for correcting the liquid filling volume of the paste and the liquid crystal dropping bonding process are provided. It is in doing it.

In order to achieve the above object, the present invention provides a seal application by providing a means for inputting the design and production information of the LCD panel in the cell assembly process of the liquid crystal, and a means for changing the application condition of the seal pattern from the input information. A paste coating machine, a method for correcting a liquid crystal filling volume, and a liquid crystal drop joining step, which can correct a liquid crystal filling volume by controlling the cross-sectional area, are constituted.

The design and production information described above are liquid crystal substrate cell design values, color filter height design information, spacer height design information, and production error information. The correction items are seal application width, seal application height, and application position correction (square seal inner dimension). Correction).

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described using drawing.

Figure 1 shows a control block diagram of a part of the liquid crystal panel manufacturing process of the present invention.

In FIG. 1, a color filter is formed on a substrate in previous steps 100 and 101, or a liquid crystal driving TFT (Thin Film Transistor) is formed on the substrate. This invention relates to the process of dripping a liquid crystal on the board | substrate which completed the previous process, the process of apply | coating a sealing compound, and the bonding process. That is, in the management computer 102, the panel design information 103 (for example, information such as substrate thickness and size, thickness and size of the color filter, size, number, thickness, etc. of TFTs to be formed), and substrate manufacturing A database which stores, as the production information 104 of the panel, a value corresponding to the above design information in the lot unit of the substrate actually produced from the line [CF (color filter) manufacturing line 105, TFT substrate manufacturing line 106). Equipped.

In the board | substrate assembly process 107, the panel bonding 111 process is performed following the seal | sticker coating 108, the electrode coating 109, and the liquid crystal dropping 110 process. The bonded substrate is then conveyed to the module process 112. In the present embodiment, in the case where the error amount exceeds the allowable value by calculating the error between the data of the result of inspecting the substrate manufactured in the substrate manufacturing line and the design data based on the design information, in the next step, The manufacturing conditions are corrected. For example, when data, such as the thickness of a color filter, exceeds the permissible range, it changes the quantity of the sealing compound to apply | coat. If it is not changed, if the amount of the liquid crystal agent to be dropped is a certain amount, the liquid crystal agent may overflow (when the seal height is insufficient), or the liquid crystal agent is insufficient and the space is not evenly distributed on the entire substrate. (Excess amount of coating)] causes a problem. In the present embodiment, the liquid crystal is applied by dropping the liquid crystal by applying a sealing material to the substrate side on which the TFT is formed, but the liquid crystal may be applied onto the substrate on the color filter side to drop the liquid crystal. It is good also as a structure which apply | coats a sealing material.

The perspective view of the whole structure of a paste applicator is shown in FIG.

In the figure, on the mount 1, an X-axis movement table 3 is provided, and the Y-axis movement table ( 5) can be moved in the X-axis direction. On the Y-axis movement table 5, a θ-axis movement table 8 is provided and moved in the Y-axis direction by the Y-axis servomotor 6. The substrate holding mechanism 7 holding the substrate 9 is provided on the θ axis moving table 8.

Moreover, on the mount 1, the Z-axis table support stand 2 is provided so that it may ride over the board | substrate holding mechanism 7 (in the door shape). The Z-axis movement table support bracket 10 is provided in the substantially center portion on the Z-axis table support stand 2. The Z-axis moving table support bracket 10 is provided with a Z-axis moving table 11. The Z-axis movement table 11 allows the paste storage container (cylinder) 13 and the like to be moved in the Z-axis direction (up and down direction) by the Z-axis servomotor 12. The nozzle holder 14 is provided in the paste container 13, and it is set as the structure which discharges the paste in the paste container 13 from a nozzle tip. In addition, a mirror-pass image recognition camera 15 having a light source capable of being illuminated so as to move in the Z-axis direction along with the paste storage container (cylinder) 13 is provided. In addition, the rangefinder 16 is provided so that it can move to a Z-axis direction with the paste container 13.

The main control unit 17 is provided below the mount 1, and controls various drive systems based on various sensor information provided in the apparatus to draw a predetermined paste on the substrate. The sub control unit 18 is connected to the main control unit 17 with a signal cable 21 to store control information and the like in the external storage device 18a. In addition, the monitor 19 or the keyboard 20 is connected to the sub-control unit 18 so that the control change and the operation of each device can be monitored. Data input from the keyboard 20 is stored in a storage medium such as a hard disk 18a or a floppy disk 18b which is an external storage device. Although not shown in the figure, the management computer 102 shown in FIG. 1 is connected to the main control unit 17. The main control unit 17 has a function of correcting the discharge amount of the paste, the distance between the nozzle and the substrate, and the like based on the information from the management computer.

In addition, as illustrated in FIG. 4, the negative pressure source 22, the negative pressure regulator 22a, the positive pressure source 23, the positive pressure regulator 23a, the valve unit 24, and the paste pattern inner circumference (inner area) are measured. A camera 26 (two-dimensional CCD camera or one-dimensional line sensor camera) is provided.

In addition, the paste storage container 13 is detachably attached to the movable part of the linear guide which is not shown in figure. In addition, the mirror pass image recognition camera 15 provided with the illuminable light source is provided so as to face the substrate 9 for alignment of the substrate 9, shape recognition of a paste pattern, and the like.

FIG. 3 is an enlarged perspective view showing portions of the paste container 13 and the rangefinder 16 in FIG. 2, wherein 13a is a nozzle, 9 is a substrate, and the same reference numerals are attached to the parts corresponding to FIG.

3, the distance meter 16 has a triangular notch at the lower end, and the light emitting element and the plurality of light receiving elements are provided at the notch. The nozzle 13a is located below the notch of the rangefinder 16.

The rangefinder 16 measures the distance from the front-end | tip part of the nozzle 13a to the surface (upper surface) of the board | substrate 9 which consists of glass by a noncontact triangular method. That is, a light emitting element is provided on one inclined surface in the triangular notched portion, and the laser light L emitted from the light emitting element is reflected at the measurement point S on the substrate 9 to the other inclined surface on the notched portion. The light is received by any one of the plurality of light receiving elements provided. Therefore, the laser beam L is not interrupted by the paste container 13 or the nozzle 13a.

In addition, although the measurement point S of the laser beam L on the board | substrate 9 and the position just under the nozzle 13a are shifted by some distance (DELTA) X, (DELTA) Y on the board | substrate 9, this slight distance ( Since there is no difference in the unevenness of the surface of the substrate 9 at the deviation of ΔX, ΔY, the distance between the measurement result of the rangefinder 16 and the distance from the distal end of the nozzle 13a to the surface (upper surface) of the substrate 28. The car on rarely exists. Therefore, the Z-axis servomotor 12 is controlled based on the measurement result of the distance meter 16 so that the front end of the nozzle 13a can be adjusted to the surface (upper surface) of the nozzle 13a in accordance with the unevenness of the surface of the substrate 9. The distance (interval) can be kept constant.

In this manner, the distance (interval) from the distal end of the nozzle 13a to the surface (upper surface) of the substrate 9 is kept constant, and the amount of paste per unit time discharged from the nozzle 13a is quantitatively maintained, thereby maintaining the substrate ( 9) The paste pattern applied and drawn on the image becomes the same in width and thickness.

Next, the control method in the present embodiment will be described.

4 is a block diagram showing a configuration of a control unit in FIG. 2. The main controller 17 has a microcomputer 17a, a motor controller 17b, an external interface 17d, and an image recognition device 17e connected to the data communication bus 17c, respectively, and the motor controller 17b. Each of the X, Y, Z, and θ drivers connected to the X-axis driver 17f, the Y-axis driver 17g, the θ-axis driver 17h, and the Z-axis driver 17i is connected to each drive motor. have. For example, the θ-axis driver 17h is connected to the θ-axis servomotor 8a. The same reference numerals are attached to parts corresponding to FIG. In addition, although not shown in FIG. 1, the camera 26 which measures the inner periphery (inner area) of the drawn paste pattern is also provided.

In the figure, the main control unit 17 is a video signal obtained by the microcomputer 17a, the motor controller 17b, the axis drivers 17f to 17i of X, Y, θ, and Z, and the image recognition camera 15. Control of the signal processing and regulators 22a and 23a, the valve unit 24, and the rangefinder 16 between the image processing apparatus 17e, the sub-controller 18, and the management computer 102, not shown. The external interface 17d for inputting is built in.

Although not shown in the microcomputer 17a, a ROM is provided which stores a processing program for executing the application drawing and the main computing unit or the following, from the processing result of the main computing unit or the external interface 17d and the motor controller 17b. And an input / output unit for exchanging data with the external interface 17d or the motor controller 17b.

Each servomotor 4, 6, 8a, 12 has a built-in encoder which detects the rotation amount, and returns the detection result to each of the axis drivers 17f to 17i of X, Y, Z and θ for position control. have.

The servomotors 4, 6, 8a, and 12 rotate forward and backward based on the data input from the keyboard 20 and stored in the RAM of the microcomputer 17a. Thereby, the nozzle 13a in which the board | substrate 9 hold | maintained in the board | substrate holding mechanism 7 (FIG. 2) is provided in the paste container 13 provided in the Z-axis movement table 11 (FIG. 2) (FIG. 3). Move arbitrary distance in the X, Y-axis direction with respect to During the movement of the substrate 9, a slight atmosphere is continuously applied to the paste storage cylinder 13, the paste is discharged from the discharge port of the tip of the nozzle 13a, and the desired paste pattern is applied to the substrate 9.

The distance meter 14 measures the distance between the nozzle 13a and the board | substrate 9 while the board | substrate 9 hold | maintained by the board | substrate holding mechanism 7 moves horizontally to a X, Y-axis direction. The microcomputer 17a transmits a control command to the Z-axis driver 17i which drives and controls the servomotor 12 so as to keep the nozzle 13a and the substrate gap constant at all times based on the measurement result. In addition, in the present embodiment, the Z-axis movement table is described as moving only in the Z-axis direction, but the Z-axis movement table support bracket 10 is moved so as to move the upper portion of the Z-axis table support mount 2 in the X-axis direction. You may comprise. In addition, it is possible to configure the Z-axis table support stand 2 to move in the Y-axis direction, thereby replacing the above-described X, Y-axis moving table.

Next, the operation of the apparatus of this embodiment will be described with reference to FIG.

In Fig. 5, power is first turned on (step 100). When the power is turned on, the initial setting of the applicator is executed (step 200). In this initial setting process, the servomotors 4, 6, 8a, and 12 which drive each table shown in FIG. 2 are driven. As a result, the substrate holding mechanism 7 is moved in the X, Y, and θ directions to position it at a predetermined reference position, and the nozzle 13a (Fig. 3) is positioned at the paste discharge port at which the paste discharge port starts to apply paste (i.e., And the paste coating start point). In addition, paste pattern data, substrate position data, and paste discharge end position data are set.

Such data is input from the keyboard 20 (FIG. 2), and the input data is stored in the RAM built in the microcomputer 17a (FIG. 4) as described above.

When this initial setting process (step 200) is complete | finished, it moves to step 300 continuously, and the main control part 17 communicates design and production information with the management computer 102. FIG.

Specifically, as shown in FIG. 1, panel design information 103 data stored in the management computer 102, for example, liquid crystal substrate cell design values, color filter height design information, spacer height design values, and the like, are produced in panels. The data of the inspection result for the design value of the substrate manufactured as the information 104 data is received and stored in the memory (RAM) and the storage in the external storage device 18 of the control system of the paste applicator.

Subsequently, in step 350, the discharge conditions and the correction value of the seal pattern for drawing the coating on the substrate are calculated from the design value and the information of the inspection result.

Here, the correction of the seal application width, the seal application height, and the application position (correction of the square seal inner dimension), which are correction items, will be described as an example. In this case, the amount of liquid crystal charged in the panel is made constant within the allowable range.

As shown in FIG. 6, when a plurality of panels are formed on one substrate, a quadrangular seal pattern closed on the outer periphery of the panel display area is drawn. The cross-sectional area of application and the application position of the seal pattern determine the volume of the cell filling the liquid crystal.

That is, in the coating myohoek position of the sealing pattern on the substrate as shown in Fig. 7, the shape of the post-application (H _0, W ₀₎ is shaped after bonded by performing the compositing processing rolled-up the substrate, the shape (H _1, W ₁ ), and the space formed thereby becomes a space for filling the liquid crystal. Therefore, in order to make the liquid crystal filling volume constant, it is necessary to correct the height and width (coating amount) as the application position and application shape of the seal pattern according to the formation state of the color filter or the like.

The state at the time of panel bonding and the enlarged view of a color filter part are shown in FIG. As shown in FIG. 9A, in the present embodiment, the color filter 53 and the alignment film 52 are formed on the upper substrate 59, and the alignment film 52 is formed on the TFT array 57 on the lower substrate 9. ), The seal pattern PP1 is formed in a ring shape, the spacer 55 is dispersedly disposed therein, and a predetermined amount of the liquid crystal 56 is dropped. These upper and lower substrates 9 and 59 are held by the lower substrate holder 50 and the upper substrate holder 51, respectively, and after positioning the upper and lower substrates in a vacuum, the upper substrate holder 51 is lowered and joined. This is done.

By the way, as shown in the enlarged view of Fig. 9 (b), the color filter 53 is formed with the unevenness in the thickness direction, and there is no problem if the unevenness is within the allowable value of the design. In some cases, more than the allowable value is created. Disposing of anything that exceeds the allowable value as a defective substrate greatly reduces the production yield. Therefore, when the allowable value is exceeded, the manufacturing error is absorbed by changing the manufacturing conditions of the next step. In this embodiment, the error is absorbed by changing (correcting) the coating amount or coating pattern of the sealing compound in the coating step.

Therefore, the drawing of the paste pattern is performed under the application conditions of the seal pattern with the correction as described above. In order to increase the coating height, the data is corrected to adjust the nozzle height data so as to operate the nozzle line unit value with respect to the substrate, and conversely, when the coating height is lowered, the data is corrected to lower the nozzle height. Also, by lowering the coating pressure data, correction can be made in a direction of decreasing the coating height.

As shown in FIG. 8, it is also possible to adjust a volume by changing a coating width partially. When the coating width is widened, the coating pressure data is corrected (raised) in the direction of widening the coating width. On the contrary, when the coating width is thinned, the coating pressure data is corrected (lower), and the coating width is corrected in the thinning direction.

Further, by applying the application position data in the direction of widening the inner area of the square seal pattern, the application position of the seal pattern can be adjusted to increase the filling volume of the liquid crystal. On the contrary, the filling volume can be narrowed by data correction in the direction of narrowing the inner area.

If the color filter is formed thicker than the error range of the design value, if the seal pattern is formed at the height and width of the design value, the filling volume of the liquid crystal is reduced by that amount, and the amount of liquid crystal to be charged is the value as it is. When used, the charged liquid crystal flows out and the liquid crystal is wasted, and the yield decreases due to a poor sealing or affects the display with high precision. If the thickness of the color filter is smaller than the error range of the design value, the application of the seal pattern at the value of the design value increases the liquid crystal filling volume, and the liquid crystal does not spread into the panel, or in some cases, a space is formed between the substrates. It will not be possible to display with high precision. Therefore, the formation of the seal pattern is corrected as described above.

When this correction is completed, the substrate 9 is next mounted on the substrate adsorption mechanism 7 (FIG. 2) and held (step 400).

Subsequently, a substrate prepositioning process (step 500) is performed. In this process, the positioning mark of the substrate 9 mounted on the substrate holding mechanism 7 is photographed by the image recognition camera 15, the center position of the positioning mark is obtained by image processing, and θ of the substrate 9 is obtained. The tilt in the direction is detected, and accordingly, the servo a (Fig. 4) is driven to correct the tilt in the θ direction.

In addition, when there are few remaining pastes in the paste storage container 13, the paste storage container 13 is replaced with the nozzle 13a beforehand in the following paste application | coating operation so that paste may not be cut off in the middle of this operation | work. By the way, when the nozzle 13a is replaced, the position shift may occur. For this reason, twelve drawing is performed using the new nozzle 13a which replaced the part of the board | substrate 9 in which the paste pattern was not formed. The center position of the twelve drawing intersections is obtained by image processing, and the distance between the center position and the center position of the positioning mark on the substrate 9 is calculated. The determined distance is stored in the RAM built into the microcomputer 17a as the position shift amounts dx and dy of the paste discharge port of the nozzle 13a. This completes the substrate preliminary positioning process (step 500). The position shift amounts dx and dy of the nozzle 13a are corrected at the time of the operation of drawing the coating of the paste pattern to be performed later.

Next, a paste pattern drawing process (step 600) is performed. In this process, the substrate 9 is moved in order to position the discharge port of the nozzle 13a at the application start position, and the nozzle position is compared and adjusted. For this reason, the position shift amount (dx, dy) of the nozzle 13a obtained in the board | substrate preliminary positioning process (step 500) previously stored in the RAM of the microcomputer 17a of the nozzle 13a shown in FIG. It is judged whether or not the position shift amount is within the allowable ranges ΔX and ΔY. If it is within the permissible range (ΔX ≥ dx and ΔY ≥ dy), it is left as it is. If outside the permissible range (ΔX <dx or ΔY <dy), the substrate 9 is moved on the basis of this positional displacement amount dx, dy so that the gap between the paste discharge port of the nozzle 13a and the desired position of the substrate 9 is reduced. The shift is eliminated and the nozzle 13a is positioned at a desired position.

Next, the height of the nozzle 13a is set to the paste pattern drawing height. The nozzle 13a is lowered by the initial moving distance based on the initial moving distance data of the nozzle. In the subsequent operation, the surface height of the substrate 9 is measured by the distance meter 14 to confirm whether the tip of the nozzle 13a is set to the height at which the paste pattern is drawn. As a result, when it is not set to the drawing height, the nozzle 13a is lowered to the drawing height.

In practice, the above-described measurement of the surface of the substrate 9 and the small distance drop of the nozzle 13a are repeatedly performed, and the tip of the nozzle 13a is set so as to have a height at which the paste pattern is applied and drawn. In addition, when the paste container 13 is not replaced, the data of the position shift amount dx, dy of the nozzle 13a is not recorded. For this reason, the height setting of the nozzle 13a demonstrated above is performed immediately in the place which entered the paste pattern drawing process (step 600).

After the above process is finished, the servomotors 4 and 6 are driven based on the paste pattern data stored in the RAM of the microcomputer 17a. Thereby, while the paste discharge port of the nozzle 13a opposes the board | substrate 28, the board | substrate 9 moves to X, Y direction according to this paste pattern data, and a little air pressure is applied to the paste container 13 Is applied to start discharging the paste from the paste discharge port of the nozzle 13a. Thereby, application drawing of the paste pattern to the board | substrate g is started.

And microcomputer 17a inputs the measurement data of the space | interval of the paste discharge port of the nozzle 13a and the surface of the board | substrate 9 from the distance meter 14, as previously demonstrated with this, and shows the surface of the board | substrate 9 surface. The set height of the nozzle 13a from the surface of the board | substrate 9 is kept constant by measuring the undulation and driving the Z-axis drive servomotor 12 according to this measured value.

In this way, drawing of a paste pattern is performed. During this operation, it is judged whether or not the paste discharge port of the nozzle 13a is the end of the drawing pattern determined by the paste pattern data on the substrate 9, and if not the end, the process returns to the measurement of surface relief of the substrate again. Repeat the above application drawing. In this manner, the paste pattern formation is continued until the end of the drawing pattern is reached.

When the end of the drawing pattern is reached, the servomotor 12 is driven to raise the nozzle 13a, and the paste pattern drawing process (step 600) is completed.

When the above process is complete | finished, it progresses to the board | substrate discharge process (step 700) next, releases the holding | maintenance of the board | substrate 9 in FIG. 2, and discharges it out of an apparatus.

Then, if there is a substrate to be coated next (step 800) to form a paste film in the same pattern elsewhere, the process is repeated from step 300. When all of the substrates have completed such a series of processes, the operation is completed. End (step 900).

In the above description, the substrate on which the color filter is formed has been described as an example, but the same correction can be performed on the substrate on which the TFT is formed.

As described above, according to the present invention, in the cell assembly process of liquid crystal, a means for inputting the design and production information of the LCD panel is provided, and a means for changing the application condition of the seal pattern from the inputted information is provided for the seal application. By controlling the cross-sectional area, the liquid crystal filling volume can be corrected, and a paste applicator, a method for correcting the liquid crystal filling volume, and a liquid crystal drop joining step, which can improve the production yield of the LCD panel, can be constructed.

1 is a schematic block diagram of an assembling process of a liquid crystal substrate of the present invention;

2 is a perspective view showing an embodiment of a paste applicator according to the present invention;

3 is a perspective view showing an arrangement relationship between a paste container and a rangefinder in the embodiment shown in FIG. 1;

4 is a block diagram showing a control system in the embodiment shown in FIG. 1;

5 is a flowchart showing the overall operation of the embodiment shown in FIG. 1;

6 is a diagram illustrating a paste pattern applied and drawn on a substrate;

7 is a diagram illustrating a state of a paste pattern at the time of bonding;

8 is a view for explaining a volume correction method by pattern correction;

9 is an enlarged view of the state of substrate bonding and the color filter unit.

Claims (6)

By changing the relative positional relationship between one substrate and the nozzle, a paste pattern is drawn on the one substrate, and a liquid crystal is dropped into the drawn paste pattern, and then the liquid crystal panel is bonded in a vacuum to face the other substrate. In the manufacturing method of the liquid crystal panel to manufacture, In the case where the paste is applied to the one panel, when the manufacturing error due to the pretreatment exceeds the reference value based on the design value of the one or the other substrate in the pretreatment until the paste is applied and the actual production result. And coating is performed by correcting the application conditions of the paste. The method of claim 1, The method of manufacturing a liquid crystal panel according to claim 5, wherein the correction of the paste pattern changes the paste amount or pattern shape to be discharged according to the error amount when the unevenness of the color filter formed in the pretreatment exceeds the reference value. The method of claim 1, The method of manufacturing a liquid crystal panel according to the present invention, wherein the correction of the paste pattern changes the paste amount or pattern shape to be discharged according to the error amount when the unevenness of the surface of the TFT substrate formed in the pretreatment exceeds the reference value. A liquid crystal produced by applying a paste in a ring shape to one of the substrate on which the TFT is formed and the substrate on which the color filter is formed, by dropping a predetermined amount of liquid crystal into the inside of the paste coated in the ring shape, and bonding both substrates in a vacuum. In the manufacturing apparatus of the panel, When the unevenness of the color filter formed on the substrate is measured before applying the paste, and the comparison means for comparing the value with the reference range set at the time of design, and detecting that the comparison means exceeds the reference range And a correction unit for correcting the coating amount or pattern shape of the paste. Receiving and storing inspection information and design information of the substrate processed by the pretreatment apparatus, determining whether the stored inspection information is within the reference range of the design information, and determining the determination function outside the reference range. And a correction function for correcting the paste amount or pattern to be applied in the case of forming a paste. The method of claim 4, wherein And said inspection information is unevenness of the color filter provided on the substrate.