KR20050004046A - Device for inspecting conductive pattern - Google Patents

Abstract

PURPOSE: A conductive pattern inspection apparatus is provided to increase a ratio of supplying alternating current to a conductive pattern and to increase a fidelity of an inspection operation using a low voltage current signal. CONSTITUTION: A conductive pattern inspection apparatus includes a sensor electrode(18), an electricity supply electrode(16), a signal applier(20), a current value detector(22), and a defect detector. The sensor electrode is electrically coupled with one terminal of a pattern to be inspected. The electricity supply electrode is electrically coupled with the other terminal of at least two consecutive conductive patterns(14) having the pattern to be inspected. The signal applier includes the sensor electrode and the electricity supply electrode to apply an alternating signal to a target pattern. The current value detector detects a current flowing from a source of the signal applier to the sensor electrode or the electricity supply electrode. The defect detector detects a short circuit or a disconnection of the conductive pattern based on a detected current value.

Description

Conductive pattern inspection device {DEVICE FOR INSPECTING CONDUCTIVE PATTERN}

The present invention relates to a conductive pattern inspection device for inspecting a state of a conductive pattern formed on a substrate.

BACKGROUND ART As a method of inspecting a state of a conductive pattern formed on a substrate, a method of contacting a pin probe at both ends of the conductive pattern is known. This flows current through one pin probe and detects a voltage value with the other pin probe. The disconnection and short of the conductive pattern are detected by obtaining the resistance value of the conductive pattern from the detected value.

However, this method has a problem that the pin probe must be replaced according to the damage of the conductive pattern due to the contact of the pin probe or the pitch of the conductive pattern.

Therefore, Japanese Patent Application Laid-Open No. 2002-365325 discloses a circuit pattern inspection apparatus for inspecting a state of a conductive pattern in a non-contact manner. This feeds an AC signal to the conductive pattern from an electrical supply electrode which is electrostatic capacitory coupled with one end of the conductive pattern. Then, this signal is detected by two types of sensor electrodes capacitively coupled to the other end of the conductive pattern, and the state of the conductive pattern is examined based on the detected signal.

According to this, since a non-contact inspection can be performed, it does not damage a pattern and does not need to replace a probe according to pitch.

In this inspection apparatus, however, the fed signal forms a current path flowing from the electric supply electrode to the conductive pattern and from the conductive pattern to the ground. Therefore, the voltage value induced on the conductive pattern is quite small, and is susceptible to noise. Therefore, highly reliable inspection could not be performed. Moreover, it is necessary to supply a signal of high voltage, and measures for discharge and the like are necessary.

Therefore, an object of the present invention is to provide a conductive pattern inspection apparatus that can more easily and easily perform highly reliable inspection.

1 is a schematic side view of a pattern inspection apparatus which is an embodiment of the present invention.

2 is a schematic plan view of a pattern inspection apparatus which is an embodiment of the present invention.

3 is a diagram illustrating the principle of disconnection position detection.

4 is a diagram illustrating a principle of short circuit position detection.

5 is a schematic plan view of a pattern inspection apparatus according to another embodiment.

6 is a schematic plan view of a pattern inspection apparatus according to another embodiment.

7 is a diagram illustrating the principle of disconnection position detection.

8 is a diagram showing the principle of short circuit position detection.

9 is a schematic plan view of a pattern inspection apparatus according to another embodiment.

Fig. 10 shows the principle of short circuit position detection.

11 is a diagram illustrating the principle of disconnection position detection.

12 is a schematic plan view of a pattern inspection apparatus according to another embodiment.

13 is a schematic plan view of a pattern inspection apparatus according to another embodiment.

♣ Explanation of symbols for main part of drawing ♣

10: pattern inspection device 14: conductive pattern

16: Electric supply electrode 18, 36, 62: Sensor electrode

20, 40, 42, 64, 66: power supply 22: current detector

30: common bar 32: first electrode

34: second electrode 44: voltage value detector

50: gate pattern 52: Cs pattern

56: electrode for gate 60: electrode for Cs

82: lead-out electrode

A conductive pattern inspection apparatus according to the present invention is a conductive pattern inspection apparatus for inspecting a state of a plurality of conductive patterns disposed on a substrate, the apparatus comprising: a sensor electrode electrostatically coupled to one end of the inspection object pattern and an inspection object pattern; An electric supply electrode electrically connected to the other end of two or more consecutive conductive patterns, a signal applying means for applying an AC signal to the target pattern via the electric supply electrode and the sensor electrode, a power supply of the signal applying means, the sensor electrode or the electric And current detection means for detecting the current value flowing between the supply electrodes, and defect detection means for detecting the presence or absence of disconnection and short circuit of the conductive pattern based on the detected current value.

Another conductive pattern inspection apparatus according to the present invention is a conductive pattern inspection apparatus for inspecting a state of a plurality of conductive patterns disposed on a substrate, and includes both ends of at least three conductive patterns including a target pattern and conductive patterns on both sides thereof; A pair of electrically connected first electrodes, a pair of electrodes disposed on the conductive patterns on both sides of the target pattern, a pair of second electrodes electrostatically coupled to the conductive patterns on both sides, and a pair of first electrodes First application means for applying an AC signal of a first frequency to the conductive pattern, second application means for applying an AC signal of a second frequency to the conductive pattern via a pair of second electrodes, and on the target pattern. The electrode includes a sensor electrode electrostatically coupled to a target pattern, voltage detection means for detecting a voltage value for each frequency in the sensor electrode, and the presence or absence of disconnection and short circuit on the basis of the detected voltage value. It is characterized in that it has a fault detection means.

Another conductive pattern inspection apparatus according to the present invention is a plurality of Cs patterns arranged in a columnar shape on a substrate, the Cs pattern having one end connected to a common bar for Cs, and alternately in a column shape with the Cs pattern. A conductive pattern inspection device for inspecting a plurality of arranged gate patterns, comprising: a target Cs pattern via an electrode for Cs electrostatically coupled to the other end of at least one Cs pattern including the target Cs pattern, a common bar for Cs, and an electrode for Cs A pair of gate electrodes electrically connected to both ends of at least one gate pattern including the target gate pattern adjacent to the target Cs pattern, the means for applying Cs to the AC signal at the first frequency, and a pair of gates Gate applying means for applying an AC signal of a second frequency to the target gate pattern via the electrode; a sensor electrode electrostatically coupled to the target Cs pattern or the target gate pattern; And a voltage value detecting means for detecting a voltage value for each frequency in the pole and a defect detecting means for detecting a defect in the Cs pattern and the gate pattern based on the detected voltage value.

Another conductive pattern inspection apparatus according to the present invention is a plurality of Cs patterns arranged in a columnar shape on a substrate, the plurality of Cs patterns having one end connected to a common bar for Cs and a plurality of Cs patterns alternately arranged in a column shape. A conductive pattern inspection device for inspecting a gate pattern of a device, comprising: a Cs electrode electrostatically coupled to at least one other end of at least one Cs pattern including a target Cs pattern, and an AC signal to the target Cs pattern via a Cs common bar and a Cs electrode; A target gate via a pair of gate electrodes electrically connected to both ends of at least one gate pattern including the target gate pattern adjacent to the target Cs pattern, a pair of gate electrodes, and a pair of gate electrodes Gate applying means for applying an alternating current signal to the pattern, and an electrode electrostatically coupled to the target Cs pattern or the target gate pattern, the applying means for Cs and the applying means for gate A sensor electrode connected to the power supply, a current value detecting means for detecting a current value between the power supply and the sensor electrode, and a current value detecting means for detecting short circuit and disconnection of the Cs pattern and the gate pattern based on the detected current value. It features.

The substrate is preferably a glass substrate used for a liquid crystal display panel or the like, but may be another substrate as long as the substrate is provided with a plurality of conductive patterns arranged in a column shape. The conductive pattern includes a conductive pattern called a gate pattern, a Cs pattern, a data pattern, or the like.

According to the present invention, the application rate of the AC signal to the conductive pattern is improved, and even a low voltage AC signal can be inspected with high reliability. Therefore, a highly reliable test | inspection can be performed more simply and easily.

According to another invention, the application rate of the AC signal to the gate pattern and the Cs pattern is improved, and even a low voltage AC signal can be inspected with high reliability. Therefore, the gate pattern and the Cs pattern having high reliability can be inspected more simply and easily.

Example 1

EMBODIMENT OF THE INVENTION Hereinafter, the Example of this invention is described with reference to drawings. In the following description, the conductive pattern arranged on the glass substrate used especially for a liquid crystal display panel etc. is made into the inspection object. However, the present invention is not limited to this, and may have different conductive patterns as long as they have mutually independent thermal conductive patterns.

A schematic side view of the pattern inspection apparatus 10 which is an embodiment of the present invention in FIG. 1 and a schematic plan view in FIG. 2 are shown.

The apparatus 10 inspects the state of the conductive pattern 14 disposed on the glass substrate 12. The glass substrate 12 is fixed on the base 24 by adsorption means (not shown). On the glass substrate 12, the conductive patterns 14 are arranged in a plurality of rows. In the normal state, these conductive patterns 14 are independent of each other and do not contact adjacent conductive patterns 14. Moreover, it is arrange | positioned in substantially the same pitch and the position of the both ends is substantially the same. However, even the glass substrate which has a conductive pattern of an uneven pitch and an uneven length can respond by adjusting the magnitude | size of two types of electrodes mentioned later.

Above the glass substrate 12, two types of electrodes 16 and 18 are provided with a predetermined space. The electric supply electrode 16 is a conductive plate positioned above one end of the conductive pattern 14 at the time of inspection. It has a width covering the end of the entire pattern, and is capacitively coupled with one end of the entire conductive pattern 14. However, the electric supply electrode 16 may be another width as long as it covers the edge part of two or more patterns. In that case, the electric supply electrode 16 may move also in accordance with the movement of the sensor electrode 18 mentioned later to the Y direction.

The sensor electrode 18 is a conductive plate of approximately one pattern width. This is positioned above the other end of the conductive pattern 14 to be inspected when there is a defect such as disconnection or short circuit. In addition, at the time of detection of a defect position, it moves (in the X direction) along the conductive pattern 14 of an inspection object. The sensor electrode 18 is also electrostatically coupled to the conductive pattern 14. The positional information of the sensor electrode 18 at the time of movement is sent to and stored in the control apparatus which is not shown in figure.

The power source 20 is an AC power source for applying an AC signal to the conductive pattern 14. Both ends of the power supply 20 are connected to the sensor electrode 18 and the electric supply electrode 16. Therefore, the AC signal generated and output from the power supply 20 is applied to the conductive pattern 14 via the sensor electrode 18 and the electric supply electrode 16 electrostatically coupled to the conductive pattern 14.

Here, the electrode applied to the conductive pattern 14 is divided by the ratio of the capacitances of the two electrodes 16 and 18 to the conductive pattern 14. Since the capacitances of the sensor electrode 18 and the electric supply electrode 16 are substantially the same for one pattern, the voltage applied to the conductive pattern 14 is about one half of the applied AC voltage. Therefore, the voltage can be efficiently applied, and the voltage of the signal output from the power supply 20 is sufficient even at a low voltage such as several volts to several tens of volts.

Between the power supply 20 and the sensor electrode 18, a current detector 22 for detecting a current value is provided. The current value detected by this current detector 22 is sent to the control device and stored together with the positional information of the sensor electrode 18. In the current detector 22, for example, a transformer can be used, and the detection sensitivity can be adjusted by adjusting the number of turns of the coil to be wound. Alternatively, the voltage drop of the resistor may be detected by a differential amplifier.

Next, the conductive pattern inspection principle in the pattern inspection apparatus 10 will be described. When inspecting the presence or absence of defects (disconnection and short circuit) of the conductive pattern 14, the sensor electrode 18 is placed above the one end of the conductive pattern 14 to be inspected, and the electrical supply electrode 16 is placed above the other end. Positioning is performed, and an AC signal is output from the power supply 20. The output AC signal is applied to the conductive pattern 14 via the sensor electrode 18 and the electric supply electrode 16.

In the case where the conductive pattern 14 is a normal pattern without disconnection and short circuit, a closed circuit including the conductive pattern 14 is formed. Therefore, the electric current of predetermined value (greater than 0) flows in the conductive pattern 14 according to the voltage of the applied signal and the resistance in a circuit. This current value is detected by the current detector 22.

On the other hand, in the case of the disconnection pattern 14a with disconnection A, no current flows. Therefore, a current value of almost zero is detected in the current detector 22. Moreover, in the case of the short circuit pattern 14b with the short circuit B, the resistance value of the whole becomes low, and the electric current higher than the normal conductive pattern 14 is detected.

Therefore, the current value as shown on the right side of FIG. 2 is obtained by moving the sensor electrode 18 in the direction perpendicular to the pattern (Y direction in FIG. 2). That is, when the sensor electrode 18 is on the normal conductive pattern 14, a current value of a predetermined value is on the disconnection conductive pattern 14a, and a current value of almost zero is the short circuit pattern 14b. In the case of a phase, a current value higher than a predetermined value is detected respectively.

This current value and the positional information of the sensor electrode 18 are sent to the control apparatus, and the control apparatus specifies a conductive pattern with a short circuit and a disconnection based on these information. That is, the conductive pattern that is electrostatically coupled to the sensor electrode 18 when a current value of almost zero is detected is a disconnection pattern, and the conductive pattern that is electrostatically coupled to the sensor electrode 18 when a current value of a predetermined value or more is detected. Is detected as a short circuit pattern.

At this time, as described above, since an AC signal is applied to the conductive pattern 14 via substantially the same capacitance at both ends, a high current value can be detected even when a low voltage signal is applied. Therefore, it is hard to be influenced by noise and the like, and the inspection can be performed with high accuracy even at low voltage. Moreover, since it is low voltage, the countermeasure of discharge etc. becomes unnecessary, and it can test easily and easily. In addition, the sensor electrode 18 can be inspected for disconnection and short circuit at the same time only by moving the sensor electrode 18 once in the direction perpendicular to the conductive pattern 14.

Next, the principle of detecting the position of a defect is demonstrated using FIG. 3, FIG. 3 is a diagram showing the principle of disconnection position detection, and FIG. 4 is a diagram showing the principle of short circuit position detection. Respectively, the current value detected by the current detector 22 is shown below.

When the disconnection position or the short circuit position is detected, the sensor electrode 18 is moved along the disconnection pattern 14a or the short circuit pattern 14b.

When the sensor electrode 18 is moved along the disconnection pattern 14a, the current value as shown in the lower side of FIG. 3 is detected. That is, while the sensor electrode 18 is in front of the disconnection A (left side in the figure), a value of almost zero is detected because no current flows. When the sensor electrode 18 has crossed the disconnection position, a current value of a predetermined value is detected. Further, the closer the electric supply electrode 16 is to the closer, the lower the total resistance value, so that the current value increases. This current value and the positional information of the sensor electrode 18 are sent to the controller, and the controller detects the disconnection position based on these information. That is, the position of the sensor electrode 18 when the current value changes from almost zero to a predetermined value is detected as the disconnection position.

On the other hand, when the sensor electrode 18 is moved along the short circuit pattern 14b, the current value as shown in the lower side of FIG. 4 is detected. That is, the current value gradually increases while the sensor electrode 18 is in front of the short circuit B, and becomes substantially constant at the time when the short circuit B is crossed. Then, when the sensor electrode 18 is brought closer to the electric supply electrode 16, the gradual increase starts again. The control device detects the position of the sensor electrode 18 as a short circuit position when a transition point from a moderate increase to a constant occurs.

Thus, the position of a defect can be specified by moving a sensor electrode along a defective conductive pattern, and detecting a current value at that time.

In this embodiment, the sensor electrode 18 is moved, but the glass substrate 12 may be moved. Incidentally, the detection of the defect position may be performed after the completion of the inspection of the presence or absence of a defect on all the patterns, or may be performed each time a defect pattern is detected.

Example 2

Next, a case where a common bar is used as the electric supply electrode will be described.

In general, some conductive patterns 14 are connected to one end of all conductive patterns by a conductive plate called a common bar in order to prevent damage of the conductive pattern by static electricity. In the case of such a glass substrate, this common bar can be used as an electric supply electrode.

Specifically, as shown in FIG. 5, an AC signal is applied to the conductive pattern 14 via the sensor electrode 18 and the common bar 30. At this time, the power supply to the common bar 30 may use, for example, a 1-pin contact probe or the like. Since the common bar 30 is electrically and physically connected to one end of all the patterns, the common bar 30 moves like the above-described electric supply electrode.

Therefore, when the sensor electrode 18 is moved in the Y direction, the current value detected by the current detector 22 becomes as shown on the right side of FIG. That is, a current value that is substantially zero on the disconnection pattern 14a and larger than a predetermined value is detected on the short circuit pattern 14b. In addition, when detecting the position of the disconnection A or the short circuit B, the sensor electrode 18 may be moved along the defective conductive pattern.

By using the common bar 30 as the electric supply electrode in this manner, the pattern inspection can be performed more easily. In addition, since the power supply to the conductive pattern 14 can be more surely performed, more accurate inspection can be performed.

Example 3

Next, another embodiment will be described with reference to the drawings.

6 is a schematic plan view of a pattern inspection apparatus 10 as another embodiment. In the pattern inspection apparatus 10, a pair of first electrodes 32 provided on both ends of the pattern and a pair of second electrodes 34 provided on both patterns of the inspection target pattern are used as the electric supply electrodes. . Moreover, defect inspection is performed based on the voltage value in the sensor electrode 36 provided on the inspection object pattern.

The pair of first electrodes 32 are conductive plates positioned above both ends of the conductive pattern 14 at the time of inspection, and function as electrical supply electrodes for disconnection inspection. The first electrode 32 has a width covering the ends of all the patterns, and is electrostatically coupled to the ends of all the conductive patterns 14. However, the first electrode 32 may have another width as long as it covers an end portion of three or more patterns including the inspection target pattern and the conductive patterns on both sides thereof. In this case, the first electrode 32 may also move in accordance with the movement of the sensor electrode 36 to be described later in the Y direction.

The pair of second electrodes 34 is a conductive plate positioned above both patterns of the inspection target pattern at the time of inspection, and functions as an electrical supply electrode for short circuit inspection. The second electrode 34 has a width almost equal to one pattern, and is electrostatically coupled to the conductive patterns 14 on both sides of the inspection target pattern. The second electrode 34 can move in accordance with the movement of the sensor electrode 36 described later.

The sensor electrode 36 is a conductive plate of approximately one pattern width. This is positioned at a position shifted by a predetermined distance from the center of the conductive pattern 14 to be inspected when there is a defect such as disconnection or short circuit. In addition, at the time of detection of a defect position, it moves along the conductive pattern 14 of a test object. The sensor electrode 36 is also electrostatically coupled with the conductive pattern 14. The positional information of the sensor electrode 36 at this time is sent to a control device (not shown) and stored.

The first power source 40 and the second power source 42 generate and output AC signals of the first frequency f1 and the second frequency f2 which are different frequencies, respectively. Both ends of the first power source 40 are connected to the pair of first electrodes 32, and both ends of the second power source 42 are connected to the pair of second electrodes 34. Accordingly, the AC signals of the two frequencies f1 and f2 generated and output from the first power source 40 and the second power source 42 may be connected to the pair of first electrode 32 and the second electrode 34, respectively. It is applied to the conductive pattern 14 through it.

Here, the capacitance formed between the pair of first electrodes 32 and the conductive pattern 14 is substantially the same at both ends. Therefore, the voltage of the first frequency f1 applied to the conductive pattern 14 is about one half of the applied AC voltage. As a result, the voltage can be efficiently applied, so that the voltage of the signal output from the power supply 40 is sufficient even at a low voltage such as several volts to several tens of volts. In addition, since the capacitance formed by the pair of second electrodes 34 is substantially the same on both sides, the voltage of the signal output from the second power supply 42 is sufficient even at a low voltage such as several volts to several tens of volts. . It is preferable that the 1st power supply 40 and the 2nd power supply 42 are center-earthed using a transformer together.

The sensor electrode 36 is connected with a voltage value detector 44 which detects a voltage value for each frequency. It consists of an amplifier 46 for amplifying the AC signal detected by the sensor electrode 36 and a discrimination filter 48 (discriminating filter) for taking out a signal for each frequency. Thereby, the voltage value for every frequency can be detected. In addition, a phase detector (not shown) capable of discriminating the polarity of the detected signal is provided.

Next, the conductive pattern inspection principle in the pattern inspection apparatus 10 will be described.

When inspecting the presence or absence of a defect (disconnected or shorted) of the conductive pattern 14, the sensor electrode 36 is positioned at a position shifted from the center of the conductive pattern 14 to be inspected, and the first power source 40 AC signal is output from This AC signal is applied to the conductive pattern 14 via the pair of first electrodes 32.

Since the 1st power supply 40 is center-earthed, the voltage of the signal applied via the pair of 1st power supply 40 has 180 degree phase difference in the both ends. Therefore, the voltage value induced in the normal conductive pattern 14 becomes almost zero at the center of the pattern due to cancellation, and gradually increases or decreases as it approaches the both ends. Therefore, when the conductive pattern 14 is normal without disconnection and short-circuit, since the sensor electrode 36 is located at a position shifted from the center of the conductive pattern 14, a voltage of a predetermined value is applied to the sensor electrode. This voltage value is detected by the voltage value detector 44.

On the other hand, in the case of the disconnection pattern 14a with the disconnection A, there is no cancellation of the voltage of the reverse phase applied from the left and right of the conductive pattern 14. Therefore, in the sensor electrode 36 shifted from the center position, the voltage value applied from one end is detected as it is (without phase cancellation). This voltage value is higher than the voltage value detected by the normal conductive pattern 14. Therefore, when the voltage of the frequency f1 higher than a predetermined voltage value is detected, it can detect as a disconnection pattern.

On the other hand, in the case of inspecting the presence or absence of a short circuit, the sensor electrode 36 is positioned at a position shifted from the center of the inspection target conductive pattern 14, and the AC signal of the second frequency f2 from the second power source 42 is positioned. Outputs When the conductive pattern 14 is normal without a short circuit, the sensor electrode 36 receives a voltage having a predetermined value of the frequency f2. This voltage value is detected by the voltage value detector 44. On the other hand, in the case of the short circuit pattern 14b with the short circuit B, since the balance of the voltage applied from both sides collapses, the voltage of a higher value than usual is detected. Therefore, when the voltage of the frequency f2 higher than a predetermined voltage value is detected, it can detect as a short circuit pattern.

Therefore, the voltage value as shown on the right side of FIG. 6 is obtained by moving the sensor electrode 36 to the direction (Y direction in FIG. 6) which goes directly to a pattern. That is, the voltage value of the frequency f1 becomes a predetermined value when the sensor electrode 36 is on the normal conductive pattern 14 and is higher than the predetermined value when the sensor electrode 36 is on the disconnection pattern 14a. The voltage value of is detected. On the other hand, the voltage value of the frequency f2 is a voltage value of a predetermined value when the sensor electrode 36 is on the normal conductive pattern 14, and is higher than a predetermined value when the sensor electrode 36 is on the short circuit pattern 14b. High voltage values are detected.

This current value and the positional information of the sensor electrode 18 are sent to the control device, and the control device specifies a defective conductive pattern based on these information. That is, when the voltage value of the predetermined frequency f1 or more is detected, the pattern which is electrostatically coupled with the sensor electrode 36 is detected as a disconnection pattern. In addition, when the voltage value of the frequency f2 of predetermined or more is detected, the pattern which is electrostatically coupled with the sensor electrode 36 is detected as a short circuit pattern.

In addition, detection of the presence or absence of this disconnection and a short circuit may naturally be performed simultaneously. Since the voltage value detector 44 has the discrimination filter 48 for detecting the voltage value for each frequency, even when the voltages f1 and f2 are applied to the conductive pattern 14, the respective voltage values can be detected. have. Therefore, short circuit and disconnection can be detected simultaneously by moving the sensor electrode 36 and the 2nd electrode 34. FIG.

At this time, as described above, since the AC signal is applied to the conductive pattern 14 via substantially the same capacitance at both ends, the signal application rate is high. Therefore, even if the signal is low voltage, a sufficiently detectable voltage is induced, and even if the signal is low voltage, it is difficult to be affected by noise and the like, and the inspection can be performed with high precision. Moreover, since it is low voltage, it does not need to take countermeasures, such as discharge, and can test | inspect simply and easily. Further, both the disconnection A and the short circuit B can be detected simultaneously by only moving the sensor electrode 36 and the second electrode 34 once in the direction parallel to the conductive pattern 14.

In addition, when the sensor electrode is immediately in the disconnection position or between the disconnection and the disconnection, the sensor electrode cannot detect the voltage value. However, in that case, it is not a predetermined voltage value, and a voltage value of zero is detected. Therefore, the conductive pattern in which almost zero voltage value was detected can be detected as a disconnection pattern.

In the present embodiment, the power source is used as the center earth, and the sensor electrode is positioned at a position shifted from the center. This is for reliably detecting the voltage value of 0 as abnormal. However, it is not necessary to do this, and since there is a change in voltage value in a normal pattern and a defective pattern, what is necessary is just to detect the pattern as a defect pattern.

Next, the principle of detecting the position of a disconnection or a short circuit is demonstrated using FIG. 7, FIG.

7 is a diagram illustrating the principle of disconnection position detection, and FIG. 8 is a diagram illustrating the principle of short circuit position detection. Respectively, the voltage value detected by the voltage value detector 44 is shown below.

When the disconnection position is detected, the sensor electrode 36 is moved along the disconnection pattern 14a. In this case, the voltage value as shown at the bottom of FIG. 7 is detected. That is, while the sensor electrode 36 is in front of the disconnection A (left side in the drawing), the voltage value of the signal applied from one side (left side in the drawing) is detected. When the sensor electrode 36 exceeds the disconnection position, the phase changes by 180 degrees, and the voltage value of the signal applied from the opposite side (right side in the drawing) is detected. Therefore, the polarity of the signal detected by the sensor electrode 36 can be determined by the phase detector, and the position where the polarity is reversed can be detected as the disconnection position. The detection result and the positional information of the sensor electrode 36 are sent to the control device, and the control device detects the disconnection position based on these information. As a result, the position of the sensor electrode 36 when the phase of the voltage is changed by 180 degrees is detected as the disconnection position.

On the other hand, when the sensor electrode 36 is moved along the short circuit pattern 14b, the voltage value as shown in the lower side of FIG. 8 is detected. That is, the sensor electrode 36 is a voltage value of a predetermined value in front of the short circuit B, and the closer to the short circuit position, the more the balance collapses, and thus the peak rapidly rising and falling when the sensor electrode 36 comes above the short circuit position. After the short circuit (B), the flow returns to the voltage value of the predetermined value again. That is, the peak of a voltage value is detected in the position of the short circuit B. FIG. The control device detects the position of the sensor electrode 36 as the short circuit position when the voltage value of this peak is detected.

Thus, the position of a defect can be specified by moving a sensor electrode along a defective conductive pattern, and detecting the voltage value at that time.

In this embodiment, the sensor electrode 36 is moved, but the glass substrate 12 may be moved. In addition, the detection of the defect position may be performed after the completion of the inspection for the presence or absence of defects for all the patterns. You may carry out every time a defect pattern is detected. In addition, when the common bar is connected to the conductive pattern 14, the common bar may be used as the first electrode.

Example 4

Next, the pattern inspection apparatus 10 which is another Example is demonstrated.

This pattern inspection apparatus 10 is used for inspection of the gate pattern and Cs pattern especially arrange | positioned at the glass substrate used for a liquid crystal display panel.

In the manufacturing process of the liquid crystal display panel, first, the gate pattern and the Cs pattern are simultaneously disposed on the glass substrate 12. The gate pattern is a conductive pattern arranged in a plurality in a column shape on the glass substrate. The Cs pattern is a conductive pattern that is alternately arranged in a column shape. Since the distance between this gate pattern and Cs pattern is extremely small (for example, several tens of micrometers), a short circuit is likely to occur. The pattern inspection apparatus 10 particularly suitable for this short circuit inspection will be described.

9 shows a rough plan view of the pattern inspection apparatus 10.

On the glass substrate 12 to be inspected, the gate pattern 50 and the Cs pattern 52 are disposed adjacent to each other. In addition, one end of the gate pattern 50 and the Cs pattern 52 are connected together by the common bars 54 and 58.

Above the glass substrate 12, a gate electrode 56 and a Cs electrode 60 are provided as electric supply electrodes. The sensor electrode 62 is provided on the conductive pattern to be inspected.

The gate electrode 56 is a conductive plate provided at one end of the gate pattern 50 on the opposite side to the gate common bar 54 at the time of inspection. This has a width covering one end of all the gate patterns 50 and is electrostatically coupled to one end of the all gate patterns 50. However, as long as it covers the width | variety which covers one or more gate patterns containing the gate pattern of an inspection object, they may be another width. In that case, the sensor electrode 62 may be moved in accordance with the movement in the Y direction described later.

The Cs electrode 60 is a conductive plate provided at one end of the Cs pattern 52 on the side opposite to the Cs common bar 58 at the time of inspection. This is also electrostatically coupled to the Cs pattern 52 and has a width covering one end of the entire Cs pattern 52. Of course, as long as it covers the width | variety which covers one or more Cs patterns containing a target Cs pattern, it may be another width.

The sensor electrode 62 is a conductive plate positioned above the gate pattern 50 or the Cs pattern 52 to be inspected at the time of inspection, and is electrostatically coupled thereto. The sensor electrode 62 can move in the Y direction or the X direction at the time of inspection, and the positional information at that time is sent to a control device (not shown) and stored.

The voltage value detector 76 is provided in the sensor electrode 62, and the electrode value in the position of the sensor electrode 62 is detected. The detected voltage value is sent to the controller with the positional information of the sensor electrode 62 and stored.

The voltage detecting device 76 is composed of an amplifier 78 for amplifying an AC signal detected by the sensor electrode 62 and a discrimination filter 80 for extracting a signal for each frequency. Therefore, the voltage value for every frequency can be detected. In addition, a phase detector (not shown) capable of discriminating the polarity of the detected signal is provided.

An AC signal of frequency f1 is applied to the gate pattern 50 via the gate electrode 56 and the gate common bar 54. This is applied by the gate power supply 64 having one end connected to the gate electrode 56 and the other end connected to the gate common bar 54. On the other hand, an AC signal of frequency f2 is applied to the Cs pattern 52 by the Cs power supply 66 via the Cs electrode 60 and the Cs common bar 58. The gate power supply 64 and the Cs power supply 66 are center-weighted together.

Next, the detection principle of the short circuit A and the disconnection B between the gate pattern 50 and the Cs pattern 52 will be described. In this case, the sensor electrode 62 is positioned on the gate pattern 50 or the Cs pattern 52 to be inspected. At this time, it is preferable that the sensor electrode 62 is located at a position slightly shifted from the center of the pattern.

In this state, AC signals of frequencies f1 and f2 are applied from the gate power supply 64 and the Cs power supply 66. The voltage value for each frequency in the sensor electrode 62 is detected by the voltage value detector 76.

At this time, the voltage of the frequency f1 (frequency of the gate power supply) is induced in the normal gate pattern 50 without the short circuit A or the disconnection B, but the frequency f2 (frequency of the Cs power supply) is induced. The voltage of is not induced. Moreover, the voltage of the frequency f2 (frequency of the Cs power supply) is induced in the normal Cs pattern 52, but the voltage of the frequency f1 (frequency of the gate power supply) is not induced.

On the other hand, in the gate pattern 50a with the short circuit A, the voltage of the frequency f2 is induced together with the voltage of the frequency f1. Also in the Cs pattern 52a having a short circuit A, the voltages of both frequencies f1 and f2 are induced. As a result, it can be determined that a short circuit occurs in the gate pattern in which the voltage of the frequency f2 (frequency of the Cs power supply) is induced and the Cs pattern in which the voltage of the frequency f1 (frequency of the gate power supply) is induced.

Next, detection of the presence or absence of disconnection B is demonstrated. In the case of detecting the presence or absence of disconnection B, attention is paid to the detected voltage value. When either the gate pattern 50 or the Cs pattern 52 is a normal pattern, a voltage value of a predetermined value is detected. This is because an antiphase voltage is applied from both sides of the pattern. Since there is a cancellation of the phase of the voltage, the voltage value becomes almost zero at the center of the pattern, and gradually increases (lower) as it approaches both ends. Therefore, at the position of the sensor electrode 62 which is slightly shifted from the center, a predetermined voltage value (0 or more) is detected.

On the other hand, in the case of patterns 50b and 52b with disconnection, since there is no phase cancellation, a voltage value higher than a predetermined value is detected. As a result, the pattern in which the voltage value higher than the predetermined value is detected can be detected as the disconnection patterns 50b and 52b.

In addition, when the sensor electrode is immediately in the disconnection position or between the disconnection and the disconnection, the sensor electrode cannot detect the voltage value. However, in that case, it is not a predetermined voltage value, and a voltage value of zero is detected. Therefore, the conductive pattern in which almost zero voltage value was detected can be detected as a disconnection pattern.

By moving the sensor electrode 62 in the Y direction, a voltage value as shown on the right side in FIG. 9 is obtained. That is, when the sensor electrode 62 is on the Cs pattern 52a or the gate pattern 50a in which the short circuit A is occurring, a predetermined value is detected at either of the voltages f1 and f2. do.

On the other hand, when it is on the gate pattern 50b in which disconnection has arisen, the voltage value of the frequency f1 becomes high. Moreover, when it exists on the Cs pattern 52b in which disconnection has arisen, the voltage value with a high frequency f2 is detected.

This voltage value and the positional information of the sensor electrode 62 are sent to the controller, and the controller detects the short circuit pattern and the disconnection pattern based on these information. That is, the Cs pattern 52 in which the voltage of frequency f1 is detected or the gate pattern 50 in which the voltage of frequency f2 is detected is detected as a short circuit pattern. Moreover, the pattern in which the voltage value higher than the predetermined value or 0 was detected is detected as a disconnection pattern.

Next, the case where the position of a defect is detected is demonstrated. When detecting the defect position, the sensor electrode 62 is moved along the defect pattern.

When the sensor electrode 62 is moved along the short circuit patterns 50a and 52a, the maximum voltage value is detected when the sensor electrode 62 comes above the short circuit A (Fig. 10). On the other hand, if the sensor electrode 62 is moved along the disconnection patterns 50b and 52b, the phase is reversed 180 degrees when the sensor electrode 62 comes above the disconnection B (Fig. 11). The control device detects the position of the short circuit or disconnection based on the voltage value (phase detection result) and the phase information of the sensor electrode 62.

Thus, according to this embodiment, since the AC signal is applied from both ends of the pattern, the signal application rate is high. Therefore, the signal to be detected is less likely to be affected by noise, and the inspection with high accuracy is possible. In addition, since the inspection can be performed even with an AC signal having a low voltage, no countermeasure against discharge or the like is required, and the inspection can be performed simply and easily.

Moreover, the short circuit of the gate pattern and Cs pattern which a short circuit easily generate | occur | produces can be detected easily. In addition, by moving the sensor electrode 62 in the Y direction, it is possible to simultaneously check whether there is a short circuit or a disconnection.

In addition, in this embodiment, although the glass substrate 12 with the gate common bar 54 was used, the glass substrate 12 without the gate common bar 54 may be sufficient. When there is no gate common bar 54, a pair of gate electrodes 56 which are electrostatically coupled to the ends of the gate pattern may be provided at both ends of the gate pattern 50.

Example 5

Next, another Example is described using FIG. This is also a pattern inspection apparatus 10 suitable for detecting a short circuit between the gate pattern and the Cs pattern.

This is to detect the presence or absence of a defect based on the current value.

In this pattern inspection apparatus 10, the sensor electrode 62 is connected to the midpoint of the gate electrode 64 and the Cs power supply 66.

Next, the inspection for the presence or absence of a defect (short circuit or disconnection) using the pattern inspection apparatus 10 will be described.

In this case, the sensor electrode 62 is positioned on the gate pattern 50 or the Cs pattern 52 to be inspected. The AC signal is applied to the gate pattern 50 and the Cs pattern 52 through the electrodes 56 and 60 and the common bars 54 and 58, respectively. At this time, the sensor electrode 62 is connected to the midpoint of the two electrodes 64 and 66. In this case, two circuits IR and IL are formed by lines connecting the sensor electrodes 62 and the power sources 64 and 66. The current values flowing through the IR and IL are almost the same as long as they are normal patterns without short circuits (A) and disconnections (B). Therefore, in the case of a normal pattern, a current value of almost zero is detected in the current detectors 68 and 70.

However, when the sensor electrode 62 is on the patterns 50a and 52b in which the short circuit A occurs, the voltage balance collapses (the current values in the IR and IL become uneven). In both current detectors 68 and 70, a high current value is detected. The current value at this time is stored in the control device together with the positional information of the sensor electrode 62.

In addition, even when there is a disconnection B, a high current value is detected. However, in this case, in the current detector for the pattern different from the pattern in which the disconnection B has occurred, the current value is almost zero. As a result, when there is a disconnection in the gate pattern, a high current value is detected in the gate current detector 68, and a current value of almost zero is detected in the current detector 70 for Cs. On the contrary, when there is a disconnection in the Cs pattern, a high current value is detected in the Cs current detector 70 and a current value of almost zero is detected in the gate current detector 68.

Therefore, when a high current value is detected in both the gate current detector 68 and the Cs current detector 70, only the short circuit, the gate current detector 68, and the Cs current detector 70 are detected. When a high current value is detected, it can be judged as disconnection.

Therefore, by moving the sensor electrode 62 in the Y direction, the presence or absence of a short circuit and a disconnection can be simultaneously performed.

When specifying the disconnection position, the sensor electrode 62 may be moved along the pattern with disconnection. Since the voltage of the reverse phase is applied from both sides of the pattern, the phase is different from the disconnection position. Therefore, the disconnection position can be specified by looking at the phase change by a phase detector (not shown) or the like. In the disconnection position, since the current value becomes almost zero, a position at which a voltage value of almost zero is detected may be specified as the disconnection position.

Thus, according to this embodiment, since the AC signal is applied from both ends of the pattern, the signal application rate is high. Therefore, the signal to be detected is less likely to be affected by noise, and the inspection with high accuracy is possible. In addition, since the inspection can be performed even with an AC signal having a low voltage, the inspection can be performed simply and easily without requiring countermeasures such as discharge.

Moreover, the short circuit of the gate pattern and Cs pattern which a short circuit easily generate | occur | produces can be detected easily.

Example 6

Next, another Example is described using FIG. This is for detecting the short circuit of a gate pattern and a Cs pattern more easily.

The inspection apparatus 10 detects a short circuit between the gate pattern 50 having the lead electrode 82 and the Cs pattern 52 having one end connected by the common bar 58.

Both ends of the power supply 64 for outputting and generating AC signals are connected to the sensor electrode 62 and the common bar 58. The sensor electrode 62 is a conductive plate having a width substantially the same as that of the lead-out electrode. Upon detection of a short circuit, the sensor electrode 62 is positioned above the lead-out electrode 82 connected to the conductive pattern to be inspected. Electrostatically coupled.

One end of the power supply 64 is connected to the common bar 58 and the other end is connected to the sensor electrode 62. Between the common bar 58 and the power supply 64, a current detector 68 for detecting a current value is provided.

Next, the short circuit detection principle in the pattern inspection apparatus 10 will be described. When detecting the presence or absence of a short circuit, the sensor electrode 62 is positioned above the lead electrode 82 connected to the gate pattern 50 to be inspected. Then, an AC signal is output from the power supply 64. One end of the power supply 20 is connected to the common bar 58 and the other end is connected to the sensor electrode 62.

At this time, the common bar 58 is electrically and physically connected to the Cs pattern 52. The sensor electrode 62 is electrically connected to the gate pattern 50 via the lead electrode 82. Therefore, when the gate pattern 50 and the Cs pattern 52 do not short-circuit, no current flows. Therefore, when the sensor electrode 62 is on a normal pattern, a current value of almost zero is detected.

On the other hand, when the gate pattern 50 and the Cs pattern 52 are short-circuited, the current flows through the short circuit portion A. Therefore, when the sensor electrode 62 is on the pattern which is short-circuited, a high current value is detected.

Therefore, when the sensor electrode 62 is moved in the Y direction, the current value as shown on the right side of FIG. 13 is detected. That is, in the case of the normal gate pattern 50, almost 0 is detected, and in the case of the gate pattern 50a where a short circuit occurs, a high current value is detected. The control device detects the presence or absence of a short circuit based on the current value at this time and the positional information of the sensor electrode 62. That is, the gate pattern electrically connected to the sensor electrode 62 when a high current value is detected. (50) is detected as a pattern with a short circuit.

As described above, according to the present embodiment, it is possible to detect the presence or absence of a short circuit with one power supply.

According to the present invention, the application rate of the AC signal to the conductive pattern is improved, and even a low voltage AC signal can be inspected with high reliability. Therefore, a highly reliable test | inspection can be performed more simply and easily.

According to another invention, the application rate of the AC signal to the gate pattern and the Cs pattern is improved, and even a low voltage AC signal can be inspected with high reliability. Therefore, the gate pattern and the Cs pattern having high reliability can be inspected more simply and easily.

Claims (15)

A conductive pattern inspection device for inspecting a state of a plurality of conductive patterns disposed on a substrate, A sensor electrode electrostatically coupled to one end of the pattern to be inspected, An electrical supply electrode electrically connected to the other end of at least two consecutive conductive patterns including the inspection pattern; Signal applying means for applying an AC signal to the target pattern via the electric supply electrode and the sensor electrode; Current value detecting means for detecting a current value flowing between the power supply of the signal applying means and the sensor electrode or the electric supply electrode; Defect detection means for detecting the presence or absence of disconnection and short circuit of the conductive pattern based on the detected current value; Conductive pattern inspection apparatus characterized in that it has a. The method of claim 1, further comprising: Moving means for moving the sensor electrode along the conductive pattern in which disconnection or short circuit is detected; Position detecting means for detecting the position of disconnection or short circuit from the change of the current value in movement; Conductive pattern inspection apparatus characterized in that it has a. The method according to claim 1 or 2, The electrical supply electrode is a conductive pattern inspection apparatus, characterized in that the electrode plate is electrostatically coupled to the other end. The method according to claim 1 or 2, The electrical supply electrode is a conductive pattern inspection apparatus, characterized in that the common bar provided on the other end of the conductive pattern. A conductive pattern inspection device for inspecting a state of a plurality of conductive patterns disposed on a substrate, A pair of first electrodes electrically connected to both ends of at least three conductive patterns including a target pattern and conductive patterns on both sides thereof; A pair of electrodes disposed on the conductive patterns on both sides of the target pattern, the pair of second electrodes respectively electrostatically coupled to the conductive patterns on both sides, First applying means for applying an AC signal of a first frequency to the conductive pattern via a pair of first electrodes; Second applying means for applying an AC signal of a second frequency to the conductive pattern via a pair of second electrodes; An electrode provided on the target pattern, the sensor electrode electrostatically coupled to the target pattern; Voltage detection means for detecting a voltage value for each frequency in the sensor electrode; Defect detection means for detecting the presence of disconnection and short circuit on the basis of the detected voltage value, Conductive pattern inspection apparatus characterized in that it has a. The method of claim 5, And the voltage detecting means has discriminating means for discriminating and detecting the unit of the sensor electrode by frequency. The method according to claim 5 or 6, The power supply pattern of at least one of the first application means and the second application means is the middle ground, and the sensor electrode is located at a position shifted from the center of the target pattern. The method of claim 5, further comprising: Moving means for moving the sensor electrode along the conductive pattern in which disconnection or short circuit is detected; Position detecting means for detecting the position of disconnection or short circuit from the change of the voltage value in the movement; Conductive pattern inspection apparatus characterized in that it has a. A plurality of gate patterns arranged in a columnar shape on the substrate, A plurality of Cs patterns arranged in a column shape adjacent to the gate pattern, the plurality of Cs patterns having one end connected to a common bar for Cs, As a conductive pattern inspection device for inspecting A pair of gate electrodes electrically connected to both ends of at least one gate pattern including the target gate pattern; Gate applying means for applying an AC signal of a first frequency to a target gate pattern via a pair of gate electrodes; An electrode for Cs electrostatically coupled to the other end of at least one Cs pattern including the target Cs pattern adjacent to the target gate pattern; Cs applying means for applying an AC signal of a second frequency to the target Cs pattern via a common bar for Cs and an electrode for Cs; An electrode electrostatically coupled to the target gate pattern or the target Cs pattern, Short circuit detecting means for detecting a voltage value of the sensor electrode; Defect detection means for detecting defects in the gate pattern and the Cs pattern based on the detected voltage value, Conductive pattern inspection apparatus characterized in that it has a. The method of claim 9, further comprising: Moving means for moving the sensor electrode along a target pattern in which disconnection or short circuit is detected; Position detecting means for detecting the position of disconnection or short circuit from the change of the voltage value in the movement; Conductive pattern inspection apparatus characterized in that it has a. The method according to claim 9 or 10, The power supply of the gate applying means and the Cs applying means is center-weighted, The electrode for sensors is in the position shifted from the center position of the target pattern, The conductive pattern inspection apparatus characterized by the above-mentioned. A plurality of gate patterns arranged in a columnar shape on the substrate, A plurality of Cs patterns arranged in a column shape adjacent to the gate pattern, the plurality of Cs patterns having one end connected to a common bar for Cs, As a conductive pattern inspection device for inspecting A pair of gate electrodes electrically connected to both ends of at least one gate pattern including the target gate pattern; Gate applying means for applying an AC signal to the target gate pattern via a pair of gate electrodes; An electrode for Cs electrostatically coupled to the other end of at least one Cs pattern including the target Cs pattern adjacent to the target gate pattern; Cs applying means for applying an AC signal to the target Cs pattern through the common bar for Cs and the electrode for Cs; An electrode electrostatically coupled to the target gate pattern or the target Cs pattern, the sensor electrode being connected to a power source of the gate applying means and the Cs applying means, Current value detecting means for detecting a current value flowing between the power supply and the sensor electrode; Defect detection means for detecting defects in the Cs pattern and the gate pattern based on the detected current value, Conductive pattern inspection apparatus characterized in that it has a. The method of claim 12, The sensor electrode is connected to the midpoint of the power supply of the gate applying means and the Cs applying means, and is at the center of the target pattern. The method of claim 9 or 12, The conductive pattern inspection apparatus, wherein one of the pair of gate electrodes is a common bar for the gate. The method of claim 9 or 12, At least one of a pair of gate electrodes is connected by the gate pattern and the electrostatic coupling, The conductive pattern inspection apparatus characterized by the above-mentioned.