CN102788924B - Conductive image checking device - Google Patents
Conductive image checking device Download PDFInfo
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- CN102788924B CN102788924B CN201210021595.XA CN201210021595A CN102788924B CN 102788924 B CN102788924 B CN 102788924B CN 201210021595 A CN201210021595 A CN 201210021595A CN 102788924 B CN102788924 B CN 102788924B
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- 238000001514 detection method Methods 0.000 claims abstract description 136
- 238000000034 method Methods 0.000 claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims description 20
- 230000001360 synchronised effect Effects 0.000 claims description 7
- 230000000052 comparative effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 18
- 125000006850 spacer group Chemical group 0.000 description 11
- 238000007689 inspection Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/145—Indicating the presence of current or voltage
Abstract
The invention provides a conductive image checking device, which can easily determines wire breaking no matter what distribution method is adopted. The conductive image checking device comprises an application mechanism (12) which applies voltage signal from one end of a conductive image (110) and a sensor (14) detecting the applied voltage signal. The sensor (14) comprises two tracking electrodes (30a) (30b) which are side by side along the Y direction, and a wire-breaking detection electrode (32). A control part (18) controls the position of the sensor (14), with respect to the conductive image (110) in the Y direction, based on the difference of the voltage signal detected by the two tracking electrodes (30a) (30b). It is determined whether the sensor (14) reaches to the wire-breaking place based on the voltage detected by a broken wire detection electrode (32).
Description
Technical field
The present invention relates to the conductive pattern check-up apparatus that a kind of detection is formed at the bad occurrence positions such as position or location of short circuit that for example breaks in the conductive pattern on substrate.
Background technology
In the fields such as previous flat-panel monitor, mostly use the circuit substrate that is equipped with multiple conductive patterns on substrate.In sort circuit substrate, if there is broken string or short circuit in conductive pattern, cannot bring into play original function.Therefore,, in the time manufacturing circuit substrate, each conductive pattern is broken or test for short-circuit.In order to make this inspection simply and tool high precision, multiple inspection technology was previously proposed.
For example, in patent documentation 1,2, disclose a kind of broken string/location of short circuit detection technique, it is judging while having there is broken string or short circuit in conductive pattern, detects where broken string/short circuit has occurred in this conductive pattern.
Particularly, in patent documentation 1, a kind of technology is disclosed, it is to as checking that the conductive pattern of object has applied under the state of specific inspection signal (alternating voltage), the sensor that is provided with multiple electrodes is moved along the conductive pattern that broken string or short circuit have occurred, determine broken string position according to the variation of the ac voltage being brought out by electrode at this moment.
In addition, in patent documentation 2, a kind of technology is disclosed, it provides inspection signal from the one end as the conductive pattern that checks object, and make detecting electrode move along broken string pattern on one side, read inspection signal on one side, and determine broken string/location of short circuit according to the variation of read signal.
[prior art document]
(patent documentation)
[patent documentation 1] Japanese Patent Laid-Open 2008-102031 communique
[patent documentation 2] Japanese Patent Laid-Open 2006-284597 communique
Summary of the invention
But there are the following problems for the technology of recording in described prior art document 1,2: although it is effective every the parallel situation about arranging of specific interval to all conductive patterns, be difficult to be applied to the suitably different situation of angle that arranges of conductive pattern.
For example, for the substrate of flat-panel monitor, be in fact provided with the pixel region of display of visually image.In this pixel region, multiple conductive patterns are every specific interval and parallel arranging.In addition, in the outside of pixel region, multiple conductive patterns are connected with drive IC.Wherein, conventionally, the terminal pitch of drive IC than the conductive pattern in pixel region to arrange spacing much smaller.Therefore,, for multiple conductive patterns are connected in drive IC, in the outside of pixel region, need to sharply reduce the spacing that arranges of conductive pattern.Thereby in the outside of pixel region, multiple conductive patterns tilt to arrange in the mode that arranges spacing and reduce gradually.If from another viewpoint, in the outside of pixel region, each conductive pattern is to arrange with the different angles that arranges.
In order to determine this broken string/location of short circuit arranging in the region that spacing gradually changes by the technology of recording in prior art document 1,2, need to make electrode arrange the conductive pattern that spacing slowly changes and move (tracking) along this.But, as mentioned above, exist the connection of each conductive pattern to arrange angle difference, the problem that cannot follow the tracks of simply.Certainly, also there is the angle that arranges of the each conductive pattern of storage, make the method mobile on angle direction that arranges of electrode in this storage.But, now, there is the very complicated problem of controlling.
Therefore, the object of the present invention is to provide one no matter which kind of conductive pattern adopts arrange mode, all can determine simply the conductive pattern check-up apparatus of broken string or location of short circuit.
In conductive pattern check-up apparatus of the present invention multiple conductive patterns that interval arranges in a first direction on substrate, there is the broken string position in the broken string pattern of conductive pattern of broken string in detection, this device comprises: applying mechanism, applies alternating voltage from one end of described broken string pattern; Sensor, be situated between by gap and described substrate relative to and move, and at least there are two with top electrode; And control part, judge moving direction and the broken string place of described sensor according to the signal detecting by described electrode; Described two at least comprise two tracking electrodes that are disposed on described first direction with top electrode; Described control part according to described two comparative results of following the tracks of the signal that detects of electrodes judge described sensor with respect to described broken string pattern the position on described first direction whether suitable, and determine the moving direction of described sensor according to this judged result.
In preferred mode, described control part moves processing, thereby makes described sensor make it away from described one end at the second party vertical with the described first direction predetermined distance that moves up; Follow the tracks of and process, after described mobile processing, the comparative result of the signal detecting according to described two tracking electrodes is adjusted described sensor position in a first direction, thereby the pattern that makes to break is positioned at described two centres of following the tracks of electrode; And judgement processing, after described tracking is processed, judge whether described sensor arrives broken string place; Described control part carries out above-mentioned processing repeatedly, until described judgement judges in processing that described sensor arrives broken string place.
In other preferred modes, further there is the difference engine of described two differences of following the tracks of the signal that detects of electrodes of output and with the lock detector that applies signal the output signal from described difference engine is carried out synchronous detection, described control part basis from the output signal of described lock detector judge described sensor with respect to described broken string pattern the position on described first direction whether correct.Now, preferably, described two further comprise and are arranged at described two burn out detection electrodes of following the tracks of between electrode with top electrode, and the signal that described control part detects according to described burn out detection electrode judges whether described sensor arrives broken string place.And, preferably, further have the difference engine of described two differences of following the tracks of the signal that detects of electrodes of output and the rectifier cell that the output signal from described difference engine is carried out to rectification, the variation from the output signal of described rectifier cell when described sensor is moved in a first direction of described control part judges whether described sensor arrives broken string place.
Another kind of conductive pattern check-up apparatus of the present invention is characterised in that: in multiple conductive patterns that interval arranges in a first direction on substrate, there is the location of short circuit in the short circuit pattern of conductive pattern of short circuit in detection, this device has: applying mechanism, apply alternating voltage from one end separately of two adjacent short circuit patterns, and electric current is flowed in the closed circuit that described two short circuit patterns and short circuit part form; Detection coil, is situated between by gap and described substrate relatively and move, and the magnetic field of detection around being formed at is as voltage signal; And control part, the voltage signal detecting with coil according to described detection judges moving direction and short circuit place of described detection coil.Described control part according to the level of described voltage signal judge described detection coil with respect to described short circuit pattern the position on described first direction whether correct, and decide the moving direction of described detection coil according to this judged result.
According to the present invention, because it judges that whether sensor is suitable with respect to short circuit pattern position in a first direction with respect to broken string pattern position or detection coil in a first direction, therefore, no matter which kind of conductive pattern adopts arrange mode, all can make sensor or detection coil move along conductive pattern, result can be determined broken string or location of short circuit simply.
Brief description of the drawings
Fig. 1 is the schematic diagram that represents to check as conduct in the present invention the example of the substrate of object;
Fig. 2 is the structural representation of the conductive pattern check-up apparatus of the first embodiment;
Fig. 3 is the schematic diagram that represents the relation between sensing station and output signal
Fig. 4 is the schematic diagram that represents the relation between sensing station and tracking signal;
Fig. 5 is the process flow diagram that represents the flow process of determining broken string position;
Fig. 6 is the structural representation of the conductive pattern check-up apparatus of the second embodiment;
Fig. 7 is the schematic diagram that represents the relation between sensing station and burn out detection signal;
Fig. 8 is the process flow diagram that represents the flow process of definite broken string position of the second embodiment;
Fig. 9 is the structural representation of the conductive pattern check-up apparatus of the 3rd embodiment;
Figure 10 is the schematic diagram that represents the relation between sensing station and tracking signal and burn out detection signal;
Figure 11 is the structural representation of the conductive pattern check-up apparatus of the 4th embodiment;
Figure 12 represents to detect the schematic diagram by the relation between coil and tracking signal and short-circuit detection signal;
Figure 13 is the process flow diagram that represents the flow process of definite broken string position of the 4th embodiment.
Description of reference numerals
10 conductive pattern check-up apparatus
12 applying mechanisms
14 sensors
16 sensor drive mechanisms
18 control parts
20 contacts
22 AC power
30a, 30b follow the tracks of electrode
32 burn out detection electrodes
34,38,40,62 differential amplifiers
36,44,64 lock detectors
42,58 totalizers
46,52,54,66 diodes
48,50 amplifiers
56 difference engines
60 detection coils
110 conductive patterns
112 conductive spacers
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.The testing fixture of conductive pattern 110 qualities that form on the glass substrate that the conductive pattern check-up apparatus 10 of present embodiment is a kind of inspection for flat-panel monitor etc., especially a kind of structure that can be used for determining broken string position.Before describing this conductive pattern check-up apparatus 10 in detail, in simple declaration present embodiment, conduct checks the structure of the substrate of object.
Fig. 1 is the structural representation for the substrate of flat-panel monitor.In this substrate, by Y-direction, be equipped with on the ground floor, directions X of multiple conductive pattern 110a, be equipped with the second layer of multiple conductive pattern 110b and be present in ground floor and the second layer between insulation course lamination in Z direction and form.
Be formed at the conductive pattern 110a of ground floor and be formed at the conductive pattern 110b (following, in the time not distinguishing both, omission affix letter, is called " conductive pattern 110 ") of the second layer, in pixel region E1, arrange in cross one another mode.Point of crossing by this two-layer conductive pattern 110a, 110b forms 1 pixel, consists of the pixel region E1 of display of visually image the set of these pixels.In this pixel region E1, specific the first spaced and parallel in conductive pattern 110 intervals is arranged.
Each conductive pattern 110, in the outside of pixel region E1, is connected with drive IC (not shown).The splicing ear of this drive IC, arranges the much smaller arranged with interval of spacing with the conductive pattern 110 than in pixel region E1.Therefore,, owing to being connected with drive IC, multiple conductive patterns 110 dwindle greatly in the spacing that arranges in the outside of pixel region E1.Result, in the outside of pixel region E1, form join domain E2 and zone line E3, in described join domain E2, multiple conductive patterns 110 are arranged with the second spaced and parallel less than the first interval, in described zone line E3, the interval between conductive pattern 110 gradually changes to the second interval from the first interval.In this zone line E3, most of conductive pattern 110 tilts to arrange with respect to X-axis or Y-axis, adjacent conductive pattern 110 arrange angle difference.
The other end (end of the side not being connected with drive IC) of each conductive pattern 110 is provided with conductive spacer 112.The width of this conductive spacer 112 is wider than conductive pattern 110, for providing or detect various inspection signals.
Then, with reference to Fig. 2, the structure that checks the conductive pattern check-up apparatus 10 that is formed at the conductive pattern 110 on this substrate is described.Fig. 2 is the structural representation that represents the conductive pattern check-up apparatus 10 of present embodiment.It should be noted that, in Fig. 2, omitted the diagram of the conductive pattern 110b of the second layer.Below, only the principle of broken string position of the conductive pattern 110 of determining ground floor is described according to Fig. 2, but this determines that principle is equally applicable to the conductive pattern 110b of the second layer.
As mentioned above, this conductive pattern check-up apparatus 10 is structures that the broken string position to where there is broken string in definite conductive pattern 110 that broken string has occurred is particularly useful.It should be noted that, below only to determining that broken string position is elaborated, but in conductive pattern check-up apparatus 10, except determining the function of broken string position, can also be written into function, the function of determining location of short circuit etc. that judgement has or not broken string or short circuit.
Conductive pattern check-up apparatus 10 possesses: to the conductive pattern 110 of broken string apply alternating voltage applying mechanism 12, detect the sensor 14 of this alternating voltage applying, the detection signal of sensor 14 carried out to particular procedure and by the sensor drive mechanism 16 of the signal processing circuit of its output, driving sensor 14 and control the control part 18 etc. of described each mechanism.
Applying mechanism 12 is mechanisms that (being conductive spacer 112 present embodiment) applies the alternating voltage for checking from one end of the conductive pattern 110 of broken string.This applying mechanism 12 be by the contact 20 for example contacting with conductive spacer 112, being situated between is provided the AC power 22 etc. of alternating voltage to form to conductive pattern 110 by contact 20.It should be noted that, in the present embodiment, apply voltage with contact with contact 20, but also can use and the electrode of conductive pattern 110 electrostatic couplings, with the contactless voltage that applies.
Sensor 14 detects the alternating voltage applying, and control part 18 is determined moving direction or the broken string position of sensor 14 according to this testing result.Sensor 14 has three electrode 30a, the 30b, 32 in Y-direction of being arranged in (being the direction that arranges of conductive pattern 110).While checking broken string position, this sensor 14 is driven by sensor drive mechanism 16 and moves.Its moving direction as detailed below, according to deciding from each electrode 30a, 30b, 32 detection signal.
In three electrodes, two electrode 30a, 30b of both sides bring into play function as detecting the tracking electrode of the signal that is used for tracking transducer 14.It should be noted that, while not distinguishing both, omit affix letter, be called " following the tracks of electrode 30 ".In addition, for convenience of description, the tracking electrode 30a that is shown in upside in Fig. 2 is called to the first tracking electrode, the tracking electrode 30b that is shown in downside is called to the second tracking electrode.In addition, be disposed in two electrodes 32 of following the tracks of between electrode 30a, 30b and bring into play function as burn out detection electrode, detect the signal that whether broken string occurs for judging between the current location from conductive spacer 112 to sensor 14.
Follow the tracks of the signal that electrode 30 detects, via differential amplifier 34 and lock detector 36, input to control part 18 as tracking signal Sa for two.Differential amplifier 34 amplifies after two differences of following the tracks of the signal that detects of electrodes 30 its output.Lock detector 36 utilizes the signal that puts on conductive pattern 110 to carry out synchronous detection to the output signal from this differential amplifier 34.The tracking signal Sa that control part 18 is exported according to this lock detector 36 make sensor 14 be positioned at conductive pattern 110 directly over follow the tracks of process.
Follow the tracks of electrode 30 and a signal that burn out detection electrode 32 detects, via two differential amplifiers 38,40 and a totalizer 42 and a lock detector 44, as burn out detection signal Sb, input to control part 18 for two.Two differential amplifiers 38,40 amplify difference the output between the detection signal of burn out detection electrode 32 and the detection signal of tracking electrode 30.In present embodiment, the detection signal of burn out detection electrode 32 is connected to negative (-) input side of each differential amplifier.Totalizer 42, is added the output signal from two differential amplifiers 38,40.The signal that lock detector 44 use put on conductive pattern 110 carries out synchronous detection to the output signal from this totalizer 42.The burn out detection signal Sb that control part 18 is exported according to this lock detector 44, judges whether broken string (, whether sensor 14 arrives broken string place) has occurred between the current location from conductive spacer 112 to sensor 14.
Next, to utilizing this conductive pattern check-up apparatus 10 to determine that the principle of broken string when position describes.First with reference to Fig. 3, Fig. 4, to tracking signal, Sa describes.The schematic diagram of the relation between the position that Fig. 3 is expression sensor 14 and the signal Sk that differential amplifier 34 is exported.In addition, Fig. 4 is the schematic diagram that represents the relation between position and the tracking signal Sa of sensor 14.
In present embodiment, be provided with three electrode 30a, 30b, 32 sensor 14, be situated between and configured with respect to substrate by gap, each electrode 30a, 30b, 32 can with relative conductive pattern 110 electrostatic couplings.Therefore, if applied the conductive pattern 110 of voltage be positioned at an electrode under, the conductive pattern 110 that has applied voltage in this electrode, brings out correspondence and executes alive voltage, if, not under an electrode, can bring out voltage in this electrode hardly.
As the situation 1 in Fig. 3, conductive pattern 110 be positioned at the first tracking electrode 30a under time, first follows the tracks of and in electrode 30a, brings out correspondence and execute alive alternating voltage, follows the tracks of in electrode 30b and can bring out hardly voltage away from second of conductive pattern 110.Therefore, in this situation 1, from the detection signal of the first tracking electrode 30a, deducted second and followed the tracks of the signal Sk obtaining after the detection signal of electrode 30b, as shown in the first row of Fig. 3, for the AC signal that applies signal and synchronize.
In contrast, as the situation 3 in Fig. 3, conductive pattern 110 be positioned at the second tracking electrode 30b under time, second follows the tracks of and in electrode 30b, brings out correspondence and execute alive alternating voltage, follows the tracks of in electrode 30a and brings out hardly voltage away from first of conductive pattern 110.Therefore, in this situation 3, signal Sk as Fig. 3 the 3rd row as shown in, for the AC signal that applies signal inversion.
Further, as the situation 2 in Fig. 3, conductive pattern 110 be positioned at burn out detection electrode 32 under time, first, second is followed the tracks of in electrode 30a, 30b and brings out the roughly the same alternating voltage of level., between the detection signal of two tracking electrode 30a, 30b, almost there is no difference.Therefore, in this situation 2, represent two signal Sk that follow the tracks of the difference of electrode 30a, 30b, as shown in the secondary series of Fig. 3, be approximately 0.
Tracking signal Sa, for being multiplied by this signal Sk and applying the pulse signal that signal (alternating voltage) synchronizes (with reference to the 4th row of Fig. 3), carries out the signal after synchronous detection with applying signal to signal Sk.Therefore, as shown in Figure 4, burn out detection electrode 32 be positioned at conductive pattern 110 directly over time, this tracking signal Sa is approximately 0; The first tracking electrode 30a be positioned at conductive pattern 110 directly over time, this tracking signal Sa is positive; The second tracking electrode 30b be positioned at conductive pattern 110 directly over time, this tracking signal Sa is negative value., judge that by the value of tracking signal Sa sensor 14 is with respect to conductive pattern 110 position in the Y direction.
In present embodiment, utilize this principle, follow the tracks of processing, in this processing, judge that sensor 14 is with respect to conductive pattern 110 position in the Y direction, and adjust sensor 14 position in the Y direction so that burn out detection electrode 32 be positioned at conductive pattern 110 directly over.Particularly, repeatedly be handled as follows until the value of the Sa of tracking signal is approximately 0,, when the value of tracking signal Sa is positive number, make sensor 14 slightly mobile to the positive side of Y-direction (first follows the tracks of electrode 30a side), when the value of tracking signal Sa is negative, make sensor 14 slightly mobile to the minus side (second follows the tracks of electrode 30b side) of Y-direction.By carrying out this tracking processing, even for the conductive pattern 110 of the shape of bent intermediate, also can guarantee that sensor 14 is suitable all the time with respect to conductive pattern 110 position in the Y direction.
It should be noted that, in the detection signal of each electrode, conventionally comprise high-frequency noise, this noise will cause measuring precision to be reduced.But in present embodiment, in the time calculating the difference of detection signal of two tracking electrode 30a, 30b, the noise comprising in two detecting electrodes is cancelled out each other.Thereby, can obtain good S/N ratio.
Next, burn out detection signal Sb is described.In present embodiment, make burn out detection electrode 32 be positioned at conductive pattern 110 directly over state under, the signal detecting according to this burn out detection electrode 32, judgement has or not broken string.That is, apply to there is not when broken string between the current location of sensor 14 from signal, burn out detection electrode 32 is relative with the conductive pattern 110 that has applied voltage.As a result, in burn out detection electrode 32, will bring out correspondence and execute alive voltage.On the other hand, in conductive pattern 110, exceed broken string position, do not bring out alternating voltage.Therefore, when sensor 14 exceedes broken string position, in the conductive pattern 110 relative with burn out detection electrode 32, do not bring out alternating voltage, in this burn out detection electrode 32, can not bring out voltage yet.Therefore, can judge whether sensor 14 exceedes broken string position by observing the detection signal of burn out detection electrode 32.
Wherein, as mentioned above, the detection signal of each electrode generally includes high-frequency noise, and this noise will cause measuring precision to be reduced.Therefore, in present embodiment, calculate burn out detection electrode 32 and follow the tracks of the difference between electrode 30a, 30b, offsetting the noise comprising in the detection signal of these electrodes.
In present embodiment, owing to the output signal of burn out detection electrode 32 being inputed to negative (-) input side of differential amplifier 38,40, therefore, do not exceed broken string when position at sensor 14, by output from each differential amplifier 38,40 with apply signal inversion and removed the signal of noise.By by totalizer 42 by this and the signal plus that applies signal inversion and removed noise, and carry out synchronous detection with lock detector 44, export negative signal.,, in present embodiment, when sensor 14 does not exceed broken string position, burn out detection signal Sb is negative value.
On the other hand, when sensor 14 exceedes broken string position, in electrode 30a, 30b, 32, all bring out hardly voltage.As a result, be approximately 0 from the output signal of each differential amplifier 38,40, the burn out detection signal Sb that lock detector 44 is exported is also almost 0.
That is, according to present embodiment, in the time that burn out detection signal Sb is negative, can judge that sensor 14 does not exceed broken string position, at burn out detection signal, Sb is approximately at 0 o'clock, can judge that sensor 14 exceedes to resolve line position.
In present embodiment, utilize these principles break position determine.With reference to Fig. 5, the flow process of concrete definite broken string position is described.Fig. 5 is the process flow diagram that represents the flow process of determining broken string position.
Determine that broken string is when position, first, sensor 14 is moved to occurred the conductive pattern 110 of broken string one end (applying near at signal place) directly over (S10).Then, make sensor 14 to only mobile predetermined distance d (S12) of directions X minus side (away from conductive spacer 112 sides).When this predetermined distance d basis is determined broken string position, desired resolution decides.For example, if use the resolution of 10mm left and right can determine broken string position, predetermined distance d is set as the value slightly lower than this resolution, such as 5mm etc.
If sensor 14 is moved to directions X minus side, then make burn out detection electrode 32 be positioned at conductive pattern 110 directly over tracking processing (S14～S18).That is, as pixel region, when conductive pattern 110 extends in parallel on directions X, even if sensor 14 is moved on directions X, burn out detection electrode 32 be still positioned at conductive pattern 110 directly over.But as zone line, when conductive pattern 110 is not parallel to directions X, if sensor 14 is moved on directions X, burn out detection electrode 32 can be offset with respect to conductive pattern 110 position in the Y direction.Therefore, in present embodiment, while making sensor 14 move to directions X minus side at every turn, all carry out make burn out detection electrode 32 be positioned at conductive pattern 110 directly over tracking processing, make burn out detection electrode 32 be positioned at all the time conduction Figure 110 directly over.
Follow the tracks of in processing, first confirm the value (S14) of tracking signal Sa.When tracking signal Sa is shown as negative value, burn out detection electrode 32 is not directly over conductive pattern 110, and deflection first is followed the tracks of electrode 30a side.Now, make sensor 14 slightly to the positive side of Y-direction (the top direction in Fig. 2) mobile (S16).In addition, when tracking signal Sa is shown as negative value, sensor 14 is partial to the second tracking electrode 30b side.Now, make sensor 14 slightly to Y-direction minus side (the below direction in Fig. 2) mobile (S18).Then, again calculate tracking signal Sa, repeatedly carry out above operation until final tracking signal Sa is approximately 0.
If tracking signal Sa is approximately 0, next carries out and judge whether sensor 14 arrives the judgement processing of broken string position.In judgement is processed, confirm the value (S20) of burn out detection signal Sb.Burn out detection signal Sb is less than at 0 o'clock, judges that sensor 14 does not exceed broken string position, returns to step S12.On the other hand, burn out detection signal Sb is approximately at 0 o'clock, and control part 18 judges that sensor 14 arrives broken string position, is broken string position (S22) by the location positioning of this sensor 14.
Can be had a clear understanding of by above explanation, in present embodiment, before judging whether sensor 14 arrives broken string position, make sensor 14 be positioned at conductive pattern 110 directly over tracking operation.As a result, even during using the conductive pattern of bent intermediate as shown in Figure 1 110 as object, also can guarantee that the position of sensor 14 is suitable all the time.Thereby no matter which kind of conductive pattern 110 adopts arrange mode, all can determine simply broken string position.
In addition, in present embodiment, because the signal that two electrodes are detected inputs to differentiator, therefore can offset and remove the noise comprising in two detection signals.Therefore, can obtain good S/N ratio.
Next, with reference to Fig. 6, the second embodiment is described.Fig. 6 is the structural representation that represents the conductive pattern check-up apparatus 10 of the second embodiment.This conductive pattern check-up apparatus 10 is the same with the conductive pattern check-up apparatus 10 of the first embodiment, is a kind of for determining the device of broken string position.Wherein, different from the first embodiment, in present embodiment, in sensor 14, be only provided with two and follow the tracks of electrode 30a, 30b, follow the tracks of between electrode 30a, 30b for these two burn out detection electrode 32 is not set.
And, in present embodiment, the same with the first embodiment, export differential amplifier 34, the signal exported via lock detector 36 from differential amplifier 34 again to by following the tracks of electrode 30a, 30b from two, as tracking signal Sa, for following the tracks of processing.In addition, different from the first embodiment, in present embodiment, export differential amplifier 34, the signal via diode output from differential amplifier 34 again to by following the tracks of electrode 30a, 30b from two, as burn out detection signal Sb, have or not the judgement of broken string to process for judging.
Secondly, describe utilizing this conductive pattern check-up apparatus 10 to carry out definite principle to broken string position.The tracking signal Sa obtaining in this example has the characteristic identical with the tracking signal Sa that uses Fig. 3,4 explanations.That is, if the central authorities of sensor 14 (following the tracks of the centres of electrode 30a, 30b for two) be positioned at conductive pattern 110 directly over, tracking signal Sa is approximately 0.On the other hand, if sensor 14 is partial to the first tracking electrode 30a side, tracking signal Sa is positive; If sensor 14 is partial to the second tracking electrode 30b side, tracking signal Sa is negative value.Control part 18 is according to this tracking signal Sa, adjusts sensor 14 position in the Y direction so that the central authorities of sensor 14 be positioned at conductive pattern 110 directly over.
Next, the burn out detection signal Sb of present embodiment is described.The burn out detection signal Sb of present embodiment is to the signal after the difference signal rectification of two tracking electrode 30a, 30b.Wherein, when sensor 14 exceedes broken string position, follow the tracks of in electrode 30a, 30b for two and certainly can bring out hardly voltage, therefore, the burn out detection signal Sb obtaining is also approximately 0.
Next the situation that, with reference to Fig. 7, sensor 14 is not exceeded to the position of breaking describes.Sensor 14 do not exceed broken string position, and the central authorities of sensor 14 be positioned at conductive pattern 110 directly over time, be approximately 0 from the output signal of differential amplifier 34, therefore, the burn out detection signal Sb exporting from diode 46 is also approximately 0.On the other hand, do not exceed at sensor 14 under the state of the position of breaking, when sensor 14 is partial to the first tracking electrode 30a side or the second tracking electrode 30b side, will export the AC signal of certain level from differential amplifier 34.Carry out rectification by this AC signal being inputed in the diode 46 of forward configuration, can obtain positive burn out detection signal Sb.That is, sensor 14 does not exceed broken string when position, if movable sensor 14 in the Y direction, the value of burn out detection signal Sb will change.
In present embodiment, utilize this characteristic, the variation of the burn out detection signal Sb when sensor 14 is moved in the Y direction, judges whether sensor 14 arrives broken string position.
Fig. 8 is the process flow diagram that represents the flow process of the definite broken string position in this conductive pattern check-up apparatus 10.In this process flow diagram, identical with Fig. 5 of step S10～step S18.That is, determine that broken string is when position, first make sensor 14 be positioned at as directly over one end of the conductive pattern 110 of object (S10).Then, make sensor to only mobile predetermined distance d (S12) of directions X minus side.Then, carry out and follow the tracks of operation, that is, according to tracking signal Sa, adjust position in the Y direction of sensor 14, so that conductive pattern 110 is positioned at (S14～S18) under sensor 14 central.
Tracking signal Sa is approximately 0, can judge when conductive pattern 110 is positioned under sensor 14 central, then carries out and judge whether sensor 14 arrives the judgement processing (S20～S26) of the position of breaking.In judgement is processed, first, make sensor 14 to only mobile predetermined distance e (S20) of the positive side of Y-direction.The value of this predetermined distance e is not particularly limited, and follows the tracks of 1/2 of electrode 30a, 30b interval in the Y direction but be preferably two.By being set as this value, in step S20, can make to follow the tracks of electrode 30b be positioned at conductive pattern 110 directly over.
If make sensor 14 to the positive side shifting of Y-direction, then confirm burn out detection signal Sb (S22) now.Burn out detection signal Sb is not 0 and during for a certain size above positive number signal, control part 18 judges that sensor 14 does not arrive the position of breaking.Now, control part 18 makes sensor 14 to only mobile predetermined distance e (S24) of Y-direction minus side, and after making conductive pattern 110 be positioned under sensor 14 central, returns to step S12.
On the other hand, burn out detection signal Sb is approximately at 0 o'clock, and control part 18 judges that sensor 14 arrives broken string position.Now, the current location of sensor 14 is defined as the position of breaking by control part 18, end process (S26).
Can be had a clear understanding of by above explanation, in present embodiment, due to make sensor 14 be positioned at conductive pattern 110 directly over tracking operation, therefore, even taking the conductive pattern 110 of bent intermediate as object, also can make sensor 14 move along conductive pattern 110.Thereby no matter which kind of conductive pattern 110 adopts arrange mode, all can determine simply broken string position.
In addition, as in this embodiment, even if only establish two electrodes, also can judge exactly and have or not broken string.Further, present embodiment is the same with the first embodiment, and the signal that two electrodes are detected inputs to differentiator, therefore, can offset and remove the noise comprising in two detection signals, and can obtain good S/N ratio.
Then, with reference to Fig. 9, the 3rd embodiment is described.Fig. 9 is the structural representation that represents the conductive pattern check-up apparatus 10 of the 3rd embodiment.This conductive pattern check-up apparatus 10 is the same with the conductive pattern check-up apparatus 10 of first, second embodiment, is a kind of for determining the device of broken string position.Wherein, different from the first embodiment, in present embodiment, in sensor 14, be only provided with two and follow the tracks of electrode 30a, 30b, follow the tracks of between electrode 30a, 30b for these two burn out detection electrode 32 is not set.In addition, in present embodiment, different from first, second embodiment, it is the structure that does not use differential amplifier.
That is, in present embodiment, amplify the output signal from the first tracking electrode 30a with amplifier 48, this amplifying signal is carried out to rectification with the first diode 52 of forward configuration.And, use amplifier 50 to amplify the output signal from the second tracking electrode 30b, this amplifying signal is carried out to rectification with the second diode 54 of reverse configuration.Then, use totalizer 58 that the output signal from the first diode 52, the second diode 54 is added, and using the signal after addition as tracking signal Sa.In addition, will from the output signal of the first diode 52, deduct difference signal after the output signal of the second diode 54 as burn out detection signal Sb.
Figure 10 represents the position of sensor 14 of present embodiment and the schematic diagram of the relation of tracking signal Sa and burn out detection signal Sb.First tracking signal Sa is described.Consider sensor 14 do not exceed broken string position, and the central authorities of sensor 14 be positioned at conductive pattern 110 directly over situation.Now, be 0 from the signal of each diode 52,54 outputs.Therefore, the output signal from these two diodes 52,54 is added to the rear tracking signal Sa obtaining and is also approximately 0.
On the other hand, first follow the tracks of electrode 30a be positioned at conductive pattern 110 directly over time, will be formed as following state: first follows the tracks of and in electrode 30a, bring out correspondence and execute alive alternating voltage, second follows the tracks of in electrode 30b and does not almost apply voltage.Now, export the positive number signal of particular level from the first diode 52, be approximately 0 signal from the second diode 54 outputs.And, be positive by the tracking signal Sa obtaining after these two signal plus.Otherwise, second follow the tracks of electrode 30b be positioned at conductive pattern 110 directly over time, be approximately 0 signal from the first diode 52 outputs, export the negative signal of particular level from the second diode 54.And, be negative value by the tracking signal Sa obtaining after these two signal plus.
Therefore, sensor 14 does not exceed broken string when position, tracking signal Sa in theory as shown in the part representing with thick line in the right side of Figure 10, if the central authorities of sensor 14 be positioned at conductive pattern 110 directly over, tracking signal Sa is approximately 0; If when skew occurs sensor 14 in the Y direction, be size to should side-play amount and be the positive number of corresponding offset direction or the signal of negative.Wherein, in present embodiment, owing to not calculating two differences of following the tracks of the detection signal of electrode 30a, 30b, therefore, the noise comprising in the detection signal of each electrode still remains in tracking signal Sa.Therefore the tracking signal, in fact obtaining is the signal of the noise that represents with fine rule of the right side that comprises Figure 10.
Next, burn out detection signal Sb is described.When sensor 14 exceedes broken string position, the position regardless of sensor 14 in Y-direction, each electrode all cannot be relative with the conductive pattern 110 that has applied voltage.Therefore, the now position in Y-direction regardless of sensor 14, the burn out detection signal Sb obtaining is all approximately 0.
In addition, sensor 14 do not exceed broken string position, the central authorities of sensor 14 be positioned at conductive pattern 110 directly over time, because each electrode is away from conductive pattern 110, therefore, the lower voltage bringing out in each electrode.Therefore, the signal that now each electrode detects is approximately 0, and the burn out detection signal Sb obtaining is also approximately 0.
On the other hand, consider that sensor 14 does not exceed broken string position, first follow the tracks of electrode 30a be positioned at conductive pattern 110 directly over situation.Now, first follow the tracks of the alternating voltage that brings out certain level in electrode 30a; In the second tracking electrode 30b, bring out hardly voltage.As a result, export positive number signal from the first diode 52, be approximately 0 signal from the second diode 54 outputs.And, for their the burn out detection signal Sb of difference signal is positive number signal.
In addition, consider that sensor 14 does not exceed broken string position, second follow the tracks of electrode 30b be positioned at conductive pattern 110 directly over situation.Now, second follow the tracks of the alternating voltage that brings out certain level in electrode 30b; In the first tracking electrode 30b, bring out hardly voltage.As a result, export negative signal from the second diode 54, be approximately 0 signal from the first diode 52 outputs.And, because the output of this second diode 54 and the negative input side of difference engine 56 are connected, therefore, export positive number signal as burn out detection signal Sb from difference engine 56.
Therefore, sensor 14 does not exceed broken string when position, burn out detection signal Sb in theory as shown in the part that the centre of Figure 10 represents with thick line, if the central authorities of sensor 14 be positioned at conductive pattern 110 directly over, burn out detection signal Sb is approximately 0 signal; Sensor 14 is with respect to conductive pattern 110, and while there is skew in the Y direction, burn out detection signal Sb is positive number signal.Wherein, as mentioned above, in present embodiment, owing to not calculating two differences of following the tracks of the detection signal of electrode 30a, 30b, therefore, actual burn out detection signal Sb, as shown in the part that the central authorities of Figure 10 represent with fine rule, remains noise.
Control part 18 is adjusted the tracking processing of sensor 14 position in the Y direction according to this tracking signal Sa, and judges according to burn out detection signal Sb whether sensor 14 arrives the judgement processing of broken string position.And, follow the tracks of by repeatedly carrying out these mobile processing of processing, judging processing and sensor 14 is moved on directions X, determine the position of breaking.The idiographic flow of determining broken string position is identical with Fig. 8, therefore, does not repeat them here.
In a word, in present embodiment, due to also make sensor 14 be positioned at conductive pattern 110 directly over tracking operation, therefore, even taking the conductive pattern 110 of bent intermediate as object, also can make sensor 14 move along conductive pattern 110.And thus, no matter which kind of conductive pattern 110 adopts arrange mode, all can determine simply broken string position.
Next, with reference to Figure 11, the 4th embodiment of the present invention is described.Figure 11 is the structural representation that represents the conductive pattern check-up apparatus 10 of the 4th embodiment.This conductive pattern check-up apparatus 10 is different to the conductive pattern check-up apparatus 10 of the 3rd embodiment from first, is a kind of for determining the device of location of short circuit.
This conductive pattern check-up apparatus 10 has: to two of mutual short circuit conductive patterns 110 apply the applying mechanism 12 of alternating voltage and be situated between by gap and substrate relative to and the coil 60 for detection that moves.Applying mechanism 12 by for example with the formation such as one end of conductive pattern 110 (being conductive spacer 112 in present embodiment) two contact 20a, 20b that contact and the AC power 22 that alternating voltage is provided to conductive pattern 110 via contact 20a, 20b.By applying alternating voltage via two contact 20a, 20b to conductive pattern 110, form the closed circuit (circuit representing with thick line in Figure 11) being formed by two conductive patterns 110 and the short circuit part (short circuit electric bridge) of mutual short circuit, and make there is current flowing in this closed circuit.And, by current flowing, around two conductive patterns 110, form the magnetic field of corresponding current direction and size.
Detect with coil 60 are the coils 60 that detect the magnetic field forming around conductive pattern 110 and be used as magnitude of voltage.That is, detect be positioned at the magnetic field that conductive pattern 110 forms around with coil 60 if make, detection will have current flowing that should magnetic field with coil 60 is interior.And, detect with coil 60 is interior and will bring out voltage that should size of current.
Detect and use one end of coil 60 and the positive input side of differential amplifier 62 to be connected, the other end is connected with the negative input side of differential amplifier 62.Lock detector 64 uses apply signal the output signal from this differential amplifier 62 are carried out to synchronous detection.Output signal from this lock detector 64 is inputed in control part 18 as tracking signal Sa.
In addition, use the diode 66 of forward configuration to carry out rectification to the output signal from differential amplifier 62.Signal after this rectification, as for judging that the short-circuit detection signal Sb while having or not short circuit inputs to control part 18.Control part 18, according to tracking signal Sa, is controlled and is detected with coil 60 position in the Y direction, and according to short-circuit detection signal Sb, judges whether detection coil 60 exceedes short circuit place.
Figure 12 be represent the position of this detection coil 60 and the signal that obtains between the schematic diagram of relation, expression tracking signal Sa is divided in the right side of figure, the center section of figure represents short-circuit detection signal Sb.
First tracking signal Sa is described.The opposite direction in the magnetic field that as shown in figure 11, two conductive patterns 110 of short circuit mutually around produce.Therefore, in the centre of two conductive patterns 110, magnetic field cancellation.Therefore, detect while being positioned at two conductive patterns 110 middle with coil 60, detection is approximately 0 with the voltage bringing out in coil 60.On the other hand, while detecting by coil 60 any one conductive pattern 110 side of deflection, this detection will not occur by the magnetic field cancellation of the surrounding of coil 60, detect with the alternating voltage that brings out certain level in coil 60.As a result, tracking signal Sa, in the time that detection is partial to conductive pattern 110 sides (conductive pattern 110 sides of the upside of Figure 11) with coil 60, is positive number signal; In the time detecting by coil 60 another conductive pattern 110 sides of deflection (conductive pattern 110 sides of the downside of Figure 11), it is negative signal.Control part 18, according to this principle, is controlled and is detected with coil 60 position in the Y direction, so that the value of tracking signal Sa is approximately 0.
Next, short-circuit detection signal Sb is described.As mentioned above, detect while being positioned at two conductive patterns 110 middle with coil 60, detection is approximately 0 with the voltage bringing out in coil 60.On the other hand, while detecting by coil 60 any one conductive pattern 110 side of deflection, detect with the alternating voltage that brings out certain level in coil 60.This alternating voltage, in the diode process configuring by forward, is converted into positive number signal.Therefore, result, short-circuit detection signal Sb is detecting while being offset with coil 60, for size is to positive number signal that should side-play amount.In addition, certainly, if detection exceedes short circuit place with coil 60, this detection is with bringing out hardly voltage in coil 60, and therefore, short-circuit detection signal Sb is also approximately 0.Control part 18 is according to this principle mobile detection with coil 60 in the Y direction, and when the short-circuit detection signal that obtained at this moment changes, judgement does not exceed short circuit place, and in the time that short-circuit detection signal changes hardly, judgement has exceeded short circuit place.
Figure 13 is the process flow diagram that represents the flow process of definite location of short circuit of present embodiment.While determining location of short circuit, first, make to detect that (near conductive spacer 112) (S10) near the end between two conductive patterns 110 of mutually short circuit with coil 60.Under this state, make to detect with coil 60 to only mobile predetermined distance d (S12) of directions X minus side (away from conductive spacer 112 sides).
After detection is moved to directions X minus side with coil 60, then carry out and make to detect with coil 60 the tracking processing (S14～S18) between two conductive patterns 110.Particularly, confirm the value (S14) of tracking signal Sa.The result of confirming is: if tracking signal Sa is approximately 0, judgement detection is positioned at suitable position with coil 60.On the other hand, if when tracking signal Sa is positive, detection coil 60 is slightly moved to Y-direction minus side; If when tracking signal Sa is negative value, make to detect with coil 60 slightly to the positive side shifting of Y-direction (S16, S18).Then, again repeat the operation of the value of confirming tracking signal Sa, until tracking signal Sa is approximately 0.
Tracking signal Sa is approximately 0, can judge and detect with coil 60 between two conductive patterns 110, then, carries out and judges whether detection coil 60 arrives the judgement processing of short circuit place.Particularly, detect with coil 60 (S20) to the positive side shifting of Y-direction.Preferably, what this amount of movement was made as to conductive pattern 110 arranges 1/2 of spacing, in step S22, make to detect with coil 60 be positioned at a conductive pattern 110 directly over.Then, under this state, confirm the value (S22) of short-circuit detection signal Sb.The result of confirming is: short-circuit detection signal Sb is not approximately 0 o'clock, and judgement detection does not arrive short circuit place with coil 60.Now, detection is moved to (S24) with coil 60 to Y-direction minus side, be back to behind original position, be back to step S12.On the other hand, short-circuit detection signal Sb is approximately at 0 o'clock, and judgement detection arrives short circuit place with coil 60, is short circuit place (S26) by detection now with the location positioning of coil 60.
Can be had a clear understanding of by above explanation, determining in location of short circuit, owing to making to detect the operation of the tracking between two conductive patterns 110 with coil 60, therefore, even taking the conductive pattern 110 of bent intermediate as object, also can make to detect and move along conductive pattern 110 with coil 60.And thus, no matter which kind of conductive pattern 110 adopts arrange mode, all can determine simply location of short circuit.
Claims (5)
1. a conductive pattern check-up apparatus, it is characterized in that, described device on substrate in a first direction interval arrange and with mutual different arranging in multiple conductive patterns that angle arranges, there is the broken string position in the broken string pattern of conductive pattern of broken string in detection, described conductive pattern check-up apparatus comprises:
Applying mechanism, applies alternating voltage from one end of described broken string pattern;
Sensor, be situated between by gap and described substrate relative to and move, to follow the tracks of described conductive pattern, and at least there is plural electrode; And
Control part, judges moving direction and the broken string place of described sensor according to the signal detecting by described electrode; And
Described two at least comprise two tracking electrodes that are disposed at described first direction with top electrode; The comparative result of the signal that described control part detects according to described two tracking electrodes, judge described sensor with respect to described broken string pattern the position on described first direction whether suitable, and determine to be followed the tracks of by described sensor the moving direction of the required described sensor of described conductive pattern according to described judged result.
2. conductive pattern check-up apparatus according to claim 1, is characterized in that, described control part is handled as follows repeatedly:
Mobile processing, makes described sensor at the second party vertical with the described first direction predetermined distance that moves up, so that it is away from described one end;
Follow the tracks of and process, after described mobile processing, the comparative result of the signal detecting according to described two tracking electrodes is adjusted described sensor position in a first direction, so that described broken string pattern is positioned at described two centres of following the tracks of electrode; And
Judgement is processed, and after described tracking is processed, judges whether described sensor arrives broken string place;
Until described judgement judges in processing that described sensor arrives broken string place.
3. conductive pattern check-up apparatus according to claim 1, is characterized in that, described device further comprises:
Difference engine, exports described two differences of following the tracks of the signal that detects of electrodes; And
Lock detector, use applies signal the output signal from described difference engine is carried out to synchronous detection;
Described control part is according to the output signal from described lock detector, judge described sensor with respect to described broken string pattern the position on described first direction whether correct.
4. conductive pattern check-up apparatus according to claim 1, is characterized in that, described plural electrode further comprises burn out detection electrodes that are arranged between described two tracking electrodes; And
The signal that described control part detects according to described burn out detection electrode judges whether described sensor arrives broken string place.
5. conductive pattern check-up apparatus according to claim 1, is characterized in that, described device further comprises:
Difference engine, exports described two differences of following the tracks of the signal that detects of electrodes; And
Rectifier cell, carries out rectification to the output signal from described difference engine;
The variation of the output signal of exporting from described rectifier cell when described control part basis moves described sensor in a first direction, judges whether described sensor arrives broken string place.
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| JP2011-113628 | 2011-05-20 | ||
| JP2011113628A JP5432213B2 (en) | 2011-05-20 | 2011-05-20 | Pattern inspection device |
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| JP (1) | JP5432213B2 (en) |
| KR (1) | KR101264765B1 (en) |
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| JP5417651B1 (en) * | 2013-01-08 | 2014-02-19 | オー・エイチ・ティー株式会社 | Circuit pattern inspection device |
| CN103308817B (en) * | 2013-06-20 | 2015-11-25 | 京东方科技集团股份有限公司 | Array base palte line detection apparatus and detection method |
| CN103728515B (en) | 2013-12-31 | 2017-01-18 | 深圳市华星光电技术有限公司 | Device and method for detecting circuit of array substrate with wires densely arranged |
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| CN1720458A (en) * | 2002-11-30 | 2006-01-11 | Oht株式会社 | Circuit pattern inspection device and circuit pattern inspection method |
| CN101107536A (en) * | 2005-01-19 | 2008-01-16 | Oht株式会社 | Circuit pattern inspection device and method thereof |
| CN101107535A (en) * | 2005-01-19 | 2008-01-16 | Oht株式会社 | Circuit pattern inspection device and method thereof |
| CN101246267A (en) * | 2006-10-19 | 2008-08-20 | 株式会社东京阴极研究所 | Inspection apparatus for pattern |
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| JPH06105274B2 (en) * | 1987-01-29 | 1994-12-21 | 富士通株式会社 | Electrode short circuit inspection method |
| JP4008949B2 (en) * | 2002-11-30 | 2007-11-14 | オー・エイチ・ティー株式会社 | Circuit pattern inspection apparatus and circuit pattern inspection method |
| TWI247904B (en) * | 2002-11-30 | 2006-01-21 | Oht Inc | Circuit pattern inspection device and circuit pattern inspection method |
| JP5387818B2 (en) * | 2008-12-11 | 2014-01-15 | オー・エイチ・ティー株式会社 | Circuit pattern inspection device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1720458A (en) * | 2002-11-30 | 2006-01-11 | Oht株式会社 | Circuit pattern inspection device and circuit pattern inspection method |
| CN101107536A (en) * | 2005-01-19 | 2008-01-16 | Oht株式会社 | Circuit pattern inspection device and method thereof |
| CN101107535A (en) * | 2005-01-19 | 2008-01-16 | Oht株式会社 | Circuit pattern inspection device and method thereof |
| CN101246267A (en) * | 2006-10-19 | 2008-08-20 | 株式会社东京阴极研究所 | Inspection apparatus for pattern |
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| CN102788924A (en) | 2012-11-21 |
| JP5432213B2 (en) | 2014-03-05 |
| KR101264765B1 (en) | 2013-05-15 |
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| TW201248164A (en) | 2012-12-01 |
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