JPH06105274B2 - Electrode short circuit inspection method - Google Patents

Electrode short circuit inspection method

Info

Publication number
JPH06105274B2
JPH06105274B2 JP62018998A JP1899887A JPH06105274B2 JP H06105274 B2 JPH06105274 B2 JP H06105274B2 JP 62018998 A JP62018998 A JP 62018998A JP 1899887 A JP1899887 A JP 1899887A JP H06105274 B2 JPH06105274 B2 JP H06105274B2
Authority
JP
Japan
Prior art keywords
electrode
strip
electrodes
short
short circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62018998A
Other languages
Japanese (ja)
Other versions
JPS63186211A (en
Inventor
俊則 浦出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62018998A priority Critical patent/JPH06105274B2/en
Publication of JPS63186211A publication Critical patent/JPS63186211A/en
Publication of JPH06105274B2 publication Critical patent/JPH06105274B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing

Description

【発明の詳細な説明】 〔概 要〕 共通電極で1本置きに短絡されていない帯状電極の電極
間短絡は、プローブを当接させながらスイープする方法
で検査できない。そこで誘導電流を発生させる駆動ヘッ
ドと誘導電流を検出する検出ヘッドを用い、かかる帯状
電極における短絡を検出可能にしたものである。
DETAILED DESCRIPTION OF THE INVENTION [Summary] A short circuit between electrodes of a strip electrode that is not short-circuited at every other common electrode cannot be inspected by a method of sweeping while abutting a probe. Therefore, a drive head that generates an induced current and a detection head that detects the induced current are used to enable detection of such a short circuit in the strip electrode.

〔産業上の利用分野〕[Industrial application field]

本発明は液晶表示パネル等ディスプレイ装置の製造に係
り、特に電極板における電極間の短絡を検査する方法に
関する。
The present invention relates to manufacturing a display device such as a liquid crystal display panel, and more particularly to a method for inspecting a short circuit between electrodes on an electrode plate.

第2図は液晶表示パネルの構成例である。FIG. 2 shows an example of the structure of a liquid crystal display panel.

図において透明なガラス板11の表面に透明な帯状電極12
を形成し、その上にポリイミド樹脂膜やポリビニルアル
コール等の配向膜13を被着して構成した2枚の基板1
を、電極を形成した方が中になるように対向せしめて周
縁部をシール材2でシールし、2枚の基板1およびシー
ル材2で形成された空間に、液晶分子31を含むネマチッ
ク液晶3を注入している。
In the figure, a transparent strip electrode 12 is formed on the surface of a transparent glass plate 11.
Two substrates 1 formed by forming an alignment film 13 on which an alignment film 13 such as a polyimide resin film or polyvinyl alcohol is formed.
Are made to face each other so that the electrode is formed inside, and the peripheral edge is sealed with the sealing material 2, and the nematic liquid crystal 3 containing the liquid crystal molecules 31 in the space formed by the two substrates 1 and the sealing material 2. Is injecting.

高密度化された液晶表示パネルでは、ガラス板11の表面
に形成された帯状電極12の間隔が極めて小さく、帯状電
極12の間にエッチング残滓があったり小さい金属粉等が
付着したりしていると、電極間の短絡を生じディスプレ
イ装置の表示品位が著しく阻害されるという問題があ
る。そこでかかる帯状電極間の短絡を容易に検出できる
検査方法の実現が望まれている。
In the densified liquid crystal display panel, the interval between the strip electrodes 12 formed on the surface of the glass plate 11 is extremely small, and etching residue or small metal powder adheres between the strip electrodes 12. Then, there is a problem in that a short circuit occurs between the electrodes and the display quality of the display device is significantly impaired. Therefore, it is desired to realize an inspection method capable of easily detecting such a short circuit between the strip electrodes.

〔従来の技術〕[Conventional technology]

第3図は従来の検査方法を示す図である。 FIG. 3 is a diagram showing a conventional inspection method.

第3図(a)においてガラス板11の表面に形成された帯
状電極12の電極間短絡を検査するに際し、帯状電極12の
一端は共通電極14によって1個置きに短絡されており、
共通電極14はそれに当接させたプローブ41を介してオシ
ロスコーブ等の測定器4に接続されている。測定器4に
接続された他のプローブ42を帯状電極12に当接させなが
ら、ガラス板11の一端から他端までスイープさせること
によって、第3図(b)に示す信号がプローブ42を介し
て測定器4に入力される。
When inspecting the inter-electrode short circuit of the strip electrodes 12 formed on the surface of the glass plate 11 in FIG. 3 (a), one end of each strip electrode 12 is short-circuited by the common electrode 14 every other one.
The common electrode 14 is connected to a measuring device 4 such as an oscilloscope via a probe 41 that is brought into contact with the common electrode 14. While the other probe 42 connected to the measuring instrument 4 is brought into contact with the strip electrode 12, the glass plate 11 is swept from one end to the other end so that the signal shown in FIG. It is input to the measuring device 4.

即ちプローブ41を当接させている共通電極14によって短
絡されている帯状電極12Aに、ガラス板11の一端から他
端までスイープさせるプローブ42が当接すると、帯状電
極12Aおよび共通電極14を介してプローブ41とプローブ4
2の間が短絡される。また帯状電極12Bは共通電極14によ
って短絡されていないため、共通電極14で短絡されてい
る帯状電極12Aまたは帯状電極12Cとの間に電極間短絡が
なければ、スイープさせるプローブ42が隣接する帯状電
極12Bに移った場合、帯状電極12Bを介してプローブ41と
プローブ42の間が短絡されることは無い。しかし帯状電
極12Bと帯状電極12Aまたは帯状電極12Cとの間に電極間
短絡があると、帯状電極12Bの短絡部分を介してプロー
ブ41とプローブ42の間が短絡される。
That is, when the probe 42 that sweeps from one end to the other end of the glass plate 11 comes into contact with the strip electrode 12A that is short-circuited by the common electrode 14 that is in contact with the probe 41, through the strip electrode 12A and the common electrode 14. Probe 41 and probe 4
Shorted between two. Further, since the strip electrode 12B is not short-circuited by the common electrode 14, if there is no inter-electrode short circuit between the strip electrode 12A or the strip electrode 12C short-circuited by the common electrode 14, the probe 42 to be swept has the strip electrode adjacent thereto. When moving to 12B, the probe 41 and the probe 42 are not short-circuited via the strip electrode 12B. However, if there is an inter-electrode short circuit between the strip electrode 12B and the strip electrode 12A or the strip electrode 12C, the probe 41 and the probe 42 are short-circuited via the short-circuited portion of the strip electrode 12B.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

液晶表示パネルを構成しそれを駆動回路に接続する場合
は、同一ガラス板11の表面に形成された帯状電極12の全
てが共通電極によって短絡される場合が多い。しかるに
従来の検査方法では電極間短絡を検出するために、帯状
電極の一端を1個置きに共通電極で短絡しなければなら
ない。また帯状電極の表面が露出している場合は検査で
きるが、例えばその表面が配向膜等の絶縁層で覆われる
と検査できないという問題があった。
When configuring a liquid crystal display panel and connecting it to a drive circuit, it is often the case that all of the strip electrodes 12 formed on the surface of the same glass plate 11 are short-circuited by a common electrode. However, in the conventional inspection method, in order to detect a short circuit between electrodes, it is necessary to short-circuit every other one end of the strip electrode with the common electrode. Further, although the inspection can be performed when the surface of the strip electrode is exposed, there is a problem that the inspection cannot be performed when the surface is covered with an insulating layer such as an alignment film.

〔問題点を解決するための手段〕 第1図は本発明になる検査方法を示す原理図である。な
お全図を通し同じ対象物は同一記号で表している。
[Means for Solving Problems] FIG. 1 is a principle diagram showing an inspection method according to the present invention. Note that the same object is denoted by the same symbol throughout the drawings.

上記問題点は開口部51を有する環状鉄芯52、および環状
鉄芯52に巻回してなるコイル53からなる駆動ヘッド5
と、開口部61を有する環状鉄芯62、および環状鉄芯62に
巻回してなるコイル63からなる検出ヘッド6を用い、少
なくとも2個の帯状電極12A、12Bを平行に形成してなる
電極板1の検査に際して、絶縁層7を介して駆動ヘッド
5を電極板1上に配設し、開口部51の中間に位置する一
方の帯状電極12Aに誘導電流を発生させると共に、絶縁
層7を介して検出ヘッド6を電極板1上に配設し、開口
部61の中間に位置する他方の帯状電極12Bから、誘導電
流を検出する本発明の電極間短絡検査方法によって解決
される。
The above problem is caused by the drive head 5 including the annular iron core 52 having the opening 51 and the coil 53 wound around the annular iron core 52.
And an annular iron core 62 having an opening 61, and a detection head 6 including a coil 63 wound around the annular iron core 62, and at least two strip electrodes 12A and 12B are formed in parallel to each other. In the inspection of No. 1, the drive head 5 is arranged on the electrode plate 1 via the insulating layer 7 to generate an induced current in the one strip electrode 12A located in the middle of the opening 51, and at the same time via the insulating layer 7. This is solved by the inter-electrode short-circuit inspection method of the present invention in which the detection head 6 is disposed on the electrode plate 1 and the induced current is detected from the other strip electrode 12B located in the middle of the opening 61.

〔作用〕[Action]

第1図において駆動ヘッド5と検出ヘッド6を電極板1
上に配設し、開口部51の中間に位置する一方の帯状電極
12Aに誘導電流を発生させると共に、開口部61の中間に
位置する他方の帯状電極12Bから誘導電流を検出するこ
とによって、帯状電極12Aと帯状電極12Bとの間に電極間
短絡があると、帯状電極12Aに発生した誘導電流が短絡
個所を介して帯状電極12Bに流れ、検出ヘッド6によっ
て検出された誘導電流が増幅されてオシロスコープ等の
測定器に入力される。
In FIG. 1, the driving head 5 and the detection head 6 are connected to the electrode plate 1.
One strip-shaped electrode disposed above and located in the middle of the opening 51
By generating an induced current in 12A and detecting the induced current from the other strip-shaped electrode 12B located in the middle of the opening 61, if there is an inter-electrode short circuit between the strip-shaped electrode 12A and the strip-shaped electrode 12B, the strip-shaped The induced current generated in the electrode 12A flows to the strip electrode 12B via the short-circuited portion, and the induced current detected by the detection head 6 is amplified and input to a measuring instrument such as an oscilloscope.

かかる原理に基づいた本発明になる検査方法によれば、
検査のために帯状電極の一端を1個置きに共通電極で短
絡する必要がない。また帯状電極の表面が絶縁層で覆わ
れていても電極間短絡を検査することができる。
According to the inspection method of the present invention based on such a principle,
It is not necessary to short-circuit every other end of the strip electrode with the common electrode for inspection. Even if the surface of the strip electrode is covered with an insulating layer, a short circuit between electrodes can be inspected.

〔実施例〕〔Example〕

以下第1図により本発明の実施例について説明する。 An embodiment of the present invention will be described below with reference to FIG.

図において駆動ヘッド5は開口部51を有する環状鉄芯52
とそれに巻回されたコイル53からなり、コイル53には発
振器81から出力される高周波電流が印加される。また検
出ヘッド6は開口部61を有する環状鉄芯62とそれに巻回
されたコイル63からなり、コイル63には増幅器82を介し
てオシロスコープ等の測定器83が接続されている。
In the figure, the drive head 5 is an annular iron core 52 having an opening 51.
And a coil 53 wound around it, and a high frequency current output from an oscillator 81 is applied to the coil 53. The detection head 6 comprises an annular iron core 62 having an opening 61 and a coil 63 wound around the iron core 62, and a measuring instrument 83 such as an oscilloscope is connected to the coil 63 via an amplifier 82.

液晶表示パネルを構成する電極板1は透明なガラス板11
と、ガラス板11の表面に平行に形成された帯状電極12か
らなり、帯状電極12の一端は全て共通電極14で短絡され
ている。2個の帯状電極12A、12Bの間の電極間短絡を検
査するに際して、絶縁層7を介して駆動ヘッド5を電極
板1上に配設し、開口部51の中間に位置する一方の帯状
電極12Aに誘導電流を発生させる。また絶縁層7を介し
て検出ヘッド6を電極板1上に配設し、開口部61の中間
に位置する他方の帯状電極12Bから誘導電流を検出す
る。
The electrode plate 1 constituting the liquid crystal display panel is a transparent glass plate 11
And a strip electrode 12 formed parallel to the surface of the glass plate 11, and one end of the strip electrode 12 is short-circuited by a common electrode 14. When inspecting an electrode short circuit between the two strip electrodes 12A and 12B, the drive head 5 is disposed on the electrode plate 1 through the insulating layer 7, and one strip electrode positioned in the middle of the opening 51 is provided. Generate an induced current at 12A. Further, the detection head 6 is disposed on the electrode plate 1 via the insulating layer 7, and the induced current is detected from the other strip electrode 12B located in the middle of the opening 61.

即ち図において帯状電極12Aと帯状電極12Bとの間に電極
間短絡12Dが無ければ、帯状電極12A、共通電極14、およ
び帯状電極12Bからなる回路は開放状態で、電極板1上
に配設された駆動ヘッド5のコイル53に高周波電流を印
加しても、開口部51の中間に位置する一方の帯状電極12
Aに誘導電流が発生することは無い。
That is, in the figure, if there is no inter-electrode short circuit 12D between the strip electrodes 12A and 12B, the circuit composed of the strip electrodes 12A, the common electrode 14, and the strip electrodes 12B is placed on the electrode plate 1 in an open state. Even if a high-frequency current is applied to the coil 53 of the drive head 5, one of the strip electrodes 12 located in the middle of the opening 51
No induced current is generated in A.

しかし帯状電極12Aと帯状電極12Bとの間に電極間短絡12
Dがあると、帯状電極12A、共通電極14、および帯状電極
12Bからなる回路は電極間短絡12Dによって閉鎖され、電
極板1上に配設された駆動ヘッド5のコイル53に高周波
電流を印加すると、開口部51の中間に位置する一方の帯
状電極12Aに誘導電流が発生する。その誘導電流は同図
に破線で示す如く電極間短絡12Dを介して帯状電極12Bに
流れ、検出ヘッド6によって検出された誘導電流が増幅
されてオシロスコープ等の測定器に入力される。
However, an electrode-to-electrode short circuit 12 occurs between the strip electrodes 12A and 12B.
With D, strip electrode 12A, common electrode 14, and strip electrode
The circuit composed of 12B is closed by a short circuit between electrodes 12D, and when a high-frequency current is applied to the coil 53 of the drive head 5 arranged on the electrode plate 1, induction is made to one of the strip electrodes 12A located in the middle of the opening 51. Electric current is generated. The induced current flows to the strip electrode 12B via the inter-electrode short circuit 12D as shown by the broken line in the figure, and the induced current detected by the detection head 6 is amplified and input to a measuring instrument such as an oscilloscope.

また電極板1上に配設された駆動ヘッド5と検出ヘッド
6の位置を順次移動させることによって、電極板1上に
形成された全ての帯状電極12について、隣接する帯状電
極との間の電極間短絡を検出することが可能である。
Further, by sequentially moving the positions of the driving head 5 and the detection head 6 arranged on the electrode plate 1, for all the band-shaped electrodes 12 formed on the electrode plate 1, electrodes between adjacent band-shaped electrodes are formed. It is possible to detect an inter-circuit short circuit.

このように本発明になる検査方法によれば、検査のため
に帯状電極の一端を1個置きに共通電極で短絡する必要
がない。また帯状電極の表面が絶縁層で覆われていても
電極間短絡を検査することができる。
As described above, according to the inspection method of the present invention, it is not necessary to short-circuit every other one end of the strip electrode with the common electrode for the inspection. Even if the surface of the strip electrode is covered with an insulating layer, a short circuit between electrodes can be inspected.

〔発明の効果〕〔The invention's effect〕

上述の如く本発明によれば検査のために電極を共通電極
で1本置きに短絡する必要がなく、しかも表面が絶縁層
で覆われていても検査が可能な電極間短絡検査方法を提
供することができる。
As described above, according to the present invention, there is provided an inter-electrode short circuit inspection method that does not require shorting every other electrode with a common electrode for inspection, and can perform inspection even if the surface is covered with an insulating layer. be able to.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明になる検査方法を示す原理図、 第2図は液晶表示パネルの構成例、 第3図は従来の検査方法を示す図、 である。図において 1は電極板、5は駆動ヘッド、 6は検出ヘッド、7は絶縁層、 11はガラス板、12、12A、12Bは帯状電極、 12Dは電極間短絡、14は共通電極、 51、61は開口部、52、62は環状鉄芯、 53、63はコイル、81は発振器、 82は増幅器、83は測定器、 をそれぞれ表す。 FIG. 1 is a principle diagram showing an inspection method according to the present invention, FIG. 2 is a configuration example of a liquid crystal display panel, and FIG. 3 is a diagram showing a conventional inspection method. In the figure, 1 is an electrode plate, 5 is a driving head, 6 is a detection head, 7 is an insulating layer, 11 is a glass plate, 12, 12A and 12B are strip electrodes, 12D is a short circuit between electrodes, 14 is a common electrode, 51 and 61. Is an opening, 52 and 62 are annular iron cores, 53 and 63 are coils, 81 is an oscillator, 82 is an amplifier, and 83 is a measuring instrument.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】開口部(51)を有する環状鉄芯(52)、お
よび該環状鉄芯(52)に巻回してなるコイル(53)から
なる駆動ヘッド(5)と、開口部(61)を有する環状鉄
芯(62)、および該環状鉄芯(62)に巻回してなるコイ
ル(63)からなる検出ヘッド(6)を用い、 少なくとも2個の帯状電極(12A、12B)を平行に形成し
てなる電極板(1)の検査に際して、絶縁層(7)を介
して該駆動ヘッド(5)を該電極板(1)上に配設し、
該開口部(51)の中間に位置する一方の該帯状電極(12
A)に誘導電流を発生させると共に、 絶縁層(7)を介して該検出ヘッド(6)を該電極板
(1)上に配設し、該開口部(61)の中間に位置する他
方の該帯状電極(12B)から、誘導電流を検出すること
を特徴とした電極間短絡検査方法。
1. A drive head (5) comprising an annular iron core (52) having an opening (51) and a coil (53) wound around the annular iron core (52), and an opening (61). At least two strip-shaped electrodes (12A, 12B) are arranged in parallel by using a detection head (6) including a ring-shaped iron core (62) having a coil and a coil (63) wound around the ring-shaped iron core (62). When inspecting the formed electrode plate (1), the drive head (5) is disposed on the electrode plate (1) through an insulating layer (7),
One of the strip electrodes (12) located in the middle of the opening (51)
In addition to generating an induced current in (A), the detection head (6) is disposed on the electrode plate (1) through the insulating layer (7), and the other one located in the middle of the opening (61). An inter-electrode short-circuit inspection method characterized by detecting an induced current from the strip electrode (12B).
【請求項2】電極板(1)上に配設した駆動ヘッド
(5)と検出ヘッド(6)の位置を順次移動せしめ、該
電極板(1)上に形成された全帯状電極(12)間の短絡
を検査する、特許請求の範囲第1項記載の電極間短絡検
査方法。
2. The entire strip electrodes (12) formed on the electrode plate (1) by sequentially moving the positions of a driving head (5) and a detection head (6) arranged on the electrode plate (1). The short-circuit inspection method between electrodes of Claim 1 which inspects the short circuit between electrodes.
JP62018998A 1987-01-29 1987-01-29 Electrode short circuit inspection method Expired - Lifetime JPH06105274B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62018998A JPH06105274B2 (en) 1987-01-29 1987-01-29 Electrode short circuit inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62018998A JPH06105274B2 (en) 1987-01-29 1987-01-29 Electrode short circuit inspection method

Publications (2)

Publication Number Publication Date
JPS63186211A JPS63186211A (en) 1988-08-01
JPH06105274B2 true JPH06105274B2 (en) 1994-12-21

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Application Number Title Priority Date Filing Date
JP62018998A Expired - Lifetime JPH06105274B2 (en) 1987-01-29 1987-01-29 Electrode short circuit inspection method

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JP (1) JPH06105274B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3285568B2 (en) 1999-05-24 2002-05-27 日本電産リード株式会社 Board wiring inspection apparatus and wiring inspection method
JP4512264B2 (en) * 2000-12-21 2010-07-28 オー・エイチ・ティー株式会社 Inspection method and inspection apparatus
JP5432213B2 (en) * 2011-05-20 2014-03-05 株式会社ユニオンアロー・テクノロジー Pattern inspection device

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Publication number Publication date
JPS63186211A (en) 1988-08-01

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