JPS63186211A - Method for inspecting inter-electrode short circuit - Google Patents
Method for inspecting inter-electrode short circuitInfo
- Publication number
- JPS63186211A JPS63186211A JP62018998A JP1899887A JPS63186211A JP S63186211 A JPS63186211 A JP S63186211A JP 62018998 A JP62018998 A JP 62018998A JP 1899887 A JP1899887 A JP 1899887A JP S63186211 A JPS63186211 A JP S63186211A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- strip
- electrodes
- induced current
- short
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 15
- 238000007689 inspection Methods 0.000 claims abstract description 16
- 238000001514 detection method Methods 0.000 claims description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 11
- 239000000523 sample Substances 0.000 description 14
- 239000011521 glass Substances 0.000 description 9
- 239000004973 liquid crystal related substance Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Abstract
Description
【発明の詳細な説明】
〔概 要〕
共通電極で１本置きに短絡されていない帯状電極の電極
間短絡は、プローブを当接させながらスイープする方法
で検査できない。そこで誘導電流を発生させる駆動ヘッ
ドと誘導電流を検出する検出ヘッドを用い、かかる帯状
電極における短絡を検出可能にしたものである。[Detailed Description of the Invention] [Summary] Short-circuits between electrodes of strip electrodes that are not short-circuited every other time with a common electrode cannot be inspected by a method of sweeping while touching the probe. Therefore, by using a drive head that generates an induced current and a detection head that detects the induced current, it is possible to detect short circuits in such strip electrodes.
本発明は液晶表示パネル等ディスプレイ装置の製造に係
り、特に電極板における電極間の短絡を検査する方法に
関する。The present invention relates to the manufacture of display devices such as liquid crystal display panels, and more particularly to a method for inspecting short circuits between electrodes on an electrode plate.
第２図は液晶表示パネルの構成例である。FIG. 2 shows an example of the structure of a liquid crystal display panel.
図において透明なガラス板１１の表面に透明な帯状電極
１２を形成し、その上にポリイミド樹脂膜やポリビニル
アルコール等の配向膜１３を被着して構成した２枚の基
板１を、電極を形成した方が中になるように対向せしめ
て周縁部をシール材２でシールし、２枚の基板１および
シール材２で形成された空間に、液晶分子３１を含むネ
マチック液晶３を注入している。In the figure, two substrates 1 are formed by forming a transparent band-shaped electrode 12 on the surface of a transparent glass plate 11, and coating an alignment film 13 such as a polyimide resin film or polyvinyl alcohol thereon. The two substrates 1 and 2 are made to face each other so that the two substrates 1 and 2 are facing each other, and the peripheral edges are sealed with a sealing material 2, and a nematic liquid crystal 3 containing liquid crystal molecules 31 is injected into the space formed by the two substrates 1 and the sealing material 2. .
高密度化された液晶表示パネルでは、ガラス板１１の表
面に形成された帯状電極１２の間隔が極めて小さく、帯
状電極１２の間にエツチング残滓があったり小さい金属
粉等が付着したりしていると、電極間の短絡を連じディ
スプレイ装置の表示品位が著しく阻害されるという問題
がある。そこでかかる帯状電極間の短絡を容易に検出で
きる検査方法の実現が望まれている。In a high-density liquid crystal display panel, the intervals between the strip electrodes 12 formed on the surface of the glass plate 11 are extremely small, and etching residue or small metal powders may adhere between the strip electrodes 12. This causes a problem in that short circuits occur between the electrodes and the display quality of the display device is significantly impaired. Therefore, it is desired to realize an inspection method that can easily detect such short circuits between strip electrodes.
第３図は従来の検査方法を示す図である。 FIG. 3 is a diagram showing a conventional inspection method.
第３図（ａ）においてガラス板１１０表面に形成された
帯状電極１２の電極間短絡を検査するに際し、帯状電極
１２の一端は共通電極１４によって１個置きに短絡され
ており、共通電極１４はそれに当接させたプローブ４１
を介してオシロスコープ等の測定器４に接続されている
。測定器４に接続された他のプローブ４２を帯状電極１
２に当接させながら、ガラス板１１の一端から他端まで
スイープさせることによって、第３図山）に示す信号が
プローブ４２を介して測定器４に入力される。In FIG. 3(a), when inspecting short circuits between the strip electrodes 12 formed on the surface of the glass plate 110, one end of the strip electrodes 12 is short-circuited every other time by the common electrode 14, and the common electrode 14 is Probe 41 brought into contact with it
It is connected to a measuring instrument 4 such as an oscilloscope via. Another probe 42 connected to the measuring device 4 is connected to the strip electrode 1.
By sweeping the glass plate 11 from one end to the other while making contact with the probe 2, a signal shown in FIG.
即ちプローブ４１を当接させている共通電極１４によっ
て短絡されている帯状電極１２Ａに、ガラス板１１の一
端から他端までスイープさせるプローブ４２が当接する
と、帯状電極１２Ａおよび共通電極１４を介してプロー
ブ４１とプローブ４２の間が短絡される。That is, when the probe 42 that sweeps from one end of the glass plate 11 to the other end comes into contact with the strip electrode 12A that is short-circuited by the common electrode 14 that the probe 41 is in contact with, the Probe 41 and probe 42 are short-circuited.
また帯状電極１２Ｂは共通電極１４によって短絡されて
いないため、共通電極１４で短絡されている帯状電極１
２Ａまたは帯状電極１２Ｃとの間に電極間短絡がなけれ
ば、スイープさせるプローブ４２が隣接する帯状電極１
２Ｂに移った場合、帯状電極１２Ｂを介してプローブ４
１とプローブ４２の間が短絡されることは無い。しかし
帯状電極１２Ｂと帯状電極Ｌ２Ａまたは帯状電極１２Ｃ
との間に電極間短絡があると、帯状電極１２Ｂの短絡部
分を介してプローブ４１とプローブ４２の間が短絡され
る。Further, since the strip electrode 12B is not short-circuited by the common electrode 14, the strip electrode 12B is short-circuited by the common electrode 14.
2A or the strip electrode 12C, if there is no short circuit between the electrodes, the probe 42 to be swept is adjacent to the strip electrode 1.
2B, the probe 4 is connected via the strip electrode 12B.
1 and the probe 42 are never short-circuited. However, the strip electrode 12B and the strip electrode L2A or the strip electrode 12C
If there is an inter-electrode short circuit between the probes 41 and 42, the probe 41 and the probe 42 will be short-circuited via the short-circuited portion of the strip electrode 12B.
液晶表示パネルを構成しそれを駆動回路に接続する場合
は、同一ガラス板１１の表面に形成された帯状電極１２
の全てが共通電極によって短絡される場合が多い。しか
るに従来の検査方法では電極間短絡を検出するために、
帯状電極の一端を１個置きに共通電極で短絡しなければ
ならない。また帯状電極の表面が露出している場合は検
査できるが、例えばその表面が配向膜等の絶縁層で覆わ
れると検査できないという問題があった。When constructing a liquid crystal display panel and connecting it to a drive circuit, a strip electrode 12 formed on the surface of the same glass plate 11 is used.
are often all shorted by a common electrode. However, in conventional testing methods, in order to detect short circuits between electrodes,
One end of every other strip electrode must be short-circuited with a common electrode. In addition, if the surface of the strip electrode is exposed, it can be inspected, but if the surface is covered with an insulating layer such as an alignment film, it cannot be inspected.
第１図は本発明になる検査方法を示す原理図である。な
お企図を通し同じ対象物は同一記号で表している。FIG. 1 is a principle diagram showing the inspection method according to the present invention. The same objects are represented by the same symbols throughout the plan.
上記問題点は開口部５１を有する環状鉄芯５２、および
環状鉄芯５２に巻回してなるコイル５３からなる駆動ヘ
ッド５と、開口部６１を有する環状鉄芯６２、および環
状鉄芯６２に巻回してなるコイル６３からなる検出ヘッ
ド６を用い、少なくとも２個の帯状電極１２Ａ、１２Ｂ
を平行に形成してなる電極板１の検査に際して、絶縁層
７を介して駆動ヘッド５を電極板１上に配設し、開口部
５１の中間に位置する一方の帯状電極１２Ａに誘導電流
を発生させると共に、絶縁層７を介して検出ヘンドロを
電極板１上に配設し、開口部６１の中間に位置する他方
の帯状電極１２Ｂから、誘導電流を検出する本発明の電
極間短絡検査方法によって解決される。The above problem is caused by the drive head 5 consisting of an annular iron core 52 having an opening 51, a coil 53 wound around the annular iron core 52, an annular iron core 62 having an opening 61, and a coil 53 wound around the annular iron core 62. At least two strip electrodes 12A, 12B are detected using a detection head 6 consisting of a rotating coil 63.
When inspecting the electrode plate 1 formed in parallel with each other, the drive head 5 is placed on the electrode plate 1 via the insulating layer 7, and an induced current is applied to one of the strip electrodes 12A located in the middle of the opening 51. The inter-electrode short circuit inspection method of the present invention involves arranging a detection handle on the electrode plate 1 via the insulating layer 7 and detecting the induced current from the other strip-shaped electrode 12B located in the middle of the opening 61. solved by.
第１図において駆動ヘッド５と検出へフド６を電極板１
上に配設し、開口部５１の中間に位置する一方の帯状電
極１２Ａに誘導電流を発生させると共に、開口部６１の
中間に位置する他方の帯状電極１２Ｂから誘導電流を検
出することによって、帯状電極１２Ａと帯状電極１２Ｂ
との間に電極間短絡があると、帯状電極１２Ａに発生し
た誘導電流が短絡個所を介して帯状電極１２Ｂに流れ、
検出ヘッド６によって検出された誘導電流が増幅されて
オシロスコープ等の測定器に入力される。In Fig. 1, the drive head 5 and the detection hood 6 are connected to the electrode plate 1.
By generating an induced current in one strip-shaped electrode 12A disposed above and located in the middle of the opening 51, and detecting the induced current from the other strip-shaped electrode 12B located in the middle of the opening 61, the strip-shaped Electrode 12A and strip electrode 12B
If there is a short circuit between the electrodes, the induced current generated in the strip electrode 12A flows to the strip electrode 12B via the short circuit,
The induced current detected by the detection head 6 is amplified and input to a measuring instrument such as an oscilloscope.
かかる原理に基づいた本発明になる検査方法によれば、
検査のために帯状電極の一端を１個置きに共通電極で短
絡する必要がない。また帯状電極の表面が絶縁層で覆わ
れていても電極間短絡を検査することができる。According to the inspection method of the present invention based on this principle,
There is no need to short-circuit one end of every other strip electrode with a common electrode for inspection. Further, even if the surface of the strip electrode is covered with an insulating layer, short circuits between the electrodes can be inspected.
以下第１図により本発明の実施例について説明する。 An embodiment of the present invention will be described below with reference to FIG.
図において駆動ヘッド５は開口部５１を有する環状鉄芯
５２とそれに巻回されたコイル５３からなり、コイル５
３には発振器８１から出力される高周波電流が印加され
る。また検出ヘッド６は開口部６１を有する環状鉄芯６
２とそれに巻回されたコイル６３からなり、コイル６３
には増幅器８２を介してオシロスコープ等の測定器８３
が接続されている。In the figure, the drive head 5 consists of an annular iron core 52 having an opening 51 and a coil 53 wound around the annular iron core 52.
3 is applied with a high frequency current output from an oscillator 81. Further, the detection head 6 has an annular iron core 6 having an opening 61.
2 and a coil 63 wound around it, the coil 63
A measuring instrument 83 such as an oscilloscope is connected via an amplifier 82.
is connected.
液晶表示パネルを構成する電極板１は透明なガラス板１
１と、ガラス板１１の表面に平行に形成された帯状電極
１２からなり、帯状電極１２の一端は全て共通電極１４
で短絡されている。２個の帯状電極１２Ａ、１２Ｂの間
の電極間短絡を検査するに際して、絶縁層７を介して駆
動ヘッド５を電極板ｌ上に配設し、開口部５１の中間に
位置する一方の帯状電極１２Ａに誘導電流を発生させる
。また絶縁層７を介して検出ヘッド６を電極板１上に配
設し、開口部６１の中間に位置する他方の帯状電極１２
Ｂから誘導電流を検出する。The electrode plate 1 constituting the liquid crystal display panel is a transparent glass plate 1
1 and a strip electrode 12 formed parallel to the surface of the glass plate 11, one end of the strip electrode 12 is all connected to a common electrode 14.
is shorted. When inspecting the short circuit between the two strip electrodes 12A and 12B, the drive head 5 is placed on the electrode plate l via the insulating layer 7, and one strip electrode located in the middle of the opening 51 is Generate an induced current of 12A. Further, the detection head 6 is disposed on the electrode plate 1 via the insulating layer 7, and the other strip-shaped electrode 12 is located in the middle of the opening 61.
Detect the induced current from B.
即ち図において帯状電極１２Ａと帯状電極１２Ｂとの間
に電極間短絡１２Ｄが無ければ、帯状電極１２Ａ１共通
電極１４、および帯状電極１２Ｂからなる回路は開放状
態で、電極板１上に配設された駆動ヘッド５のコイル５
３に高周波電流を印加しても、開口部５１の中間に位置
する一方の帯状電極１２Ａに誘導電流が発生することは
無い。That is, in the figure, if there is no inter-electrode short circuit 12D between the strip electrode 12A and the strip electrode 12B, the circuit consisting of the strip electrode 12A, the common electrode 14, and the strip electrode 12B is in an open state and is disposed on the electrode plate 1. Coil 5 of drive head 5
Even if a high frequency current is applied to the electrode 3, no induced current is generated in one of the strip electrodes 12A located in the middle of the opening 51.
しかし帯状電極１２Ａと帯状電極１２Ｂとの間に電極間
短絡１２Ｄがあると、帯状電極１２Ａ、共通電極１４、
および帯状電極１２Ｂからなる回路は電極間短絡１２Ｄ
によって閉鎖され、電極板１上に配設された駆動へ７ド
５のコイル５３に高周波電流を印加すると、開口部５１
の中間に位置する一方の帯状電極１２Ａに誘導電流が発
生する。その誘導電流は同図に破線で示す如く電極間短
絡１２Ｄを介して帯状電極１２Ｂに流れ、検出ヘンドロ
によって検出された誘導電流が増幅されてオシロスコー
プ等の測定器に入力される。However, if there is an inter-electrode short circuit 12D between the strip electrode 12A and the strip electrode 12B, the strip electrode 12A, the common electrode 14,
and the circuit consisting of the strip electrode 12B has an inter-electrode short circuit 12D.
When a high frequency current is applied to the coil 53 of the driving electrode 5 disposed on the electrode plate 1, the opening 51
An induced current is generated in one of the strip electrodes 12A located in the middle. The induced current flows to the strip electrode 12B via the inter-electrode short circuit 12D as shown by the broken line in the figure, and the induced current detected by the detection handle is amplified and input to a measuring instrument such as an oscilloscope.
また電極板１上に配設された駆動ヘッド５と検出ヘッド
６の位置を順次移動させζことによって、電極板１上に
形成された全ての帯状電極１２について、隣接する帯状
電極との間の電極間短絡を検出することが可能である。In addition, by sequentially moving the positions of the driving head 5 and the detection head 6 disposed on the electrode plate 1, all of the strip electrodes 12 formed on the electrode plate 1 can be separated from adjacent strip electrodes. It is possible to detect short circuits between electrodes.
このように本発明になる検査方法によれば、検査のため
に帯状電極の一端を１個置きに共通電極で短絡する必要
がない。また帯状電極の表面が絶縁層で覆われていても
電極間短絡を検査することができる。As described above, according to the inspection method of the present invention, there is no need to short-circuit one end of every other strip electrode with a common electrode for inspection. Further, even if the surface of the strip electrode is covered with an insulating layer, short circuits between the electrodes can be inspected.
上述の如く本発明によれば検査のために電極を共通電極
で１本置きに短絡する必要がなく、しかも表面が絶縁層
で覆われていても検査が可能な電極間短絡検査方法を提
供することができる。As described above, the present invention provides an inter-electrode short-circuit inspection method that does not require short-circuiting every other electrode with a common electrode for inspection, and allows inspection even if the surface is covered with an insulating layer. be able to.
第１図は本発明になる検査方法を示す原理図、第２図は
液晶表示パネルの構成例、
第３図は従来の検査方法を示す図、
である。図において
１は電極板、 ５は駆動ヘッド、
６は検出ヘッド、 ７は絶縁層、
１１はガラス板、 １２．１２Ａ、１２Ｂは帯状電極
、１２Ｄは電極間短絡、１４は共通電極、５１．６１は
開口部、 ５２．６２は環状鉄芯、５３．６３はコイル
、 ８１は発振器、８２は増幅器、 ８３は測定器
、
をそれぞれ表す。
２トイし萌になう樒、査ｊ法と才、事骨３里図第 １
図
液晶表示バ享ルｆ）腓チ列
第２ｍFIG. 1 is a principle diagram showing the inspection method according to the present invention, FIG. 2 is a configuration example of a liquid crystal display panel, and FIG. 3 is a diagram showing a conventional inspection method. In the figure, 1 is an electrode plate, 5 is a drive head, 6 is a detection head, 7 is an insulating layer, 11 is a glass plate, 12.12A, 12B are strip electrodes, 12D is a short circuit between electrodes, 14 is a common electrode, 51.61 52 and 62 are an opening, 52 and 62 are annular iron cores, 53 and 63 are coils, 81 is an oscillator, 82 is an amplifier, and 83 is a measuring device, respectively. 2. How to become Moe with toys, investigation method and talent, facts 3. Rizu No. 1
Figure LCD display bar f) Cross row 2nd m
Claims (1)
該環状鉄芯（５２）に巻回してなるコイル（５３）から
なる駆動ヘッド（５）と、開口部（６１）を有する環状
鉄芯（６２）、および該環状鉄芯（６２）に巻回してな
るコイル（６３）からなる検出ヘッド（６）を用い、少
なくとも２個の帯状電極（１２Ａ、１２Ｂ）を平行に形
成してなる電極板（１）の検査に際して、絶縁層（７）
を介して該駆動ヘッド（５）を該電極板（１）上に配設
し、該開口部（５１）の中間に位置する一方の該帯状電
極（１２Ａ）に誘導電流を発生させると共に、絶縁層（
７）を介して該検出ヘッド（６）を該電極板（１）上に
配設し、該開口部（６１）の中間に位置する他方の該帯
状電極（１２Ｂ）から、誘導電流を検出することを特徴
とした電極間短絡検査方法。 ２）電極板（１）上に配設した駆動ヘッド（５）と検出
ヘッド（６）の位置を順次移動せしめ、該電極板（１）
上に形成された全帯状電極（１２）間の短絡を検査する
、特許請求の範囲第１項記載の電極間短絡検査方法。[Claims] 1) A drive head (5) comprising an annular iron core (52) having an opening (51) and a coil (53) wound around the annular iron core (52); (61) and a coil (63) wound around the annular iron core (62), at least two strip electrodes (12A, 12B) When inspecting the electrode plate (1) formed in parallel with the insulating layer (7)
The driving head (5) is arranged on the electrode plate (1) through layer(
7), the detection head (6) is disposed on the electrode plate (1), and the induced current is detected from the other strip-shaped electrode (12B) located in the middle of the opening (61). A method for inspecting short circuits between electrodes. 2) Sequentially move the positions of the drive head (5) and detection head (6) disposed on the electrode plate (1), and
The inter-electrode short-circuit inspection method according to claim 1, which inspects for short-circuits between all the strip-shaped electrodes (12) formed above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62018998A JPH06105274B2 (en) | 1987-01-29 | 1987-01-29 | Electrode short circuit inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62018998A JPH06105274B2 (en) | 1987-01-29 | 1987-01-29 | Electrode short circuit inspection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63186211A true JPS63186211A (en) | 1988-08-01 |
| JPH06105274B2 JPH06105274B2 (en) | 1994-12-21 |
Family
ID=11987222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62018998A Expired - Lifetime JPH06105274B2 (en) | 1987-01-29 | 1987-01-29 | Electrode short circuit inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06105274B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1055932A2 (en) * | 1999-05-24 | 2000-11-29 | Nidec-Read Corporation | Apparatus and method for inspecting wiring on board |
| JP2002189050A (en) * | 2000-12-21 | 2002-07-05 | Oht Inc | Method and device for inspection |
| JP2012242283A (en) * | 2011-05-20 | 2012-12-10 | Union Arrow Technologies Inc | Pattern inspection device |
-
1987
- 1987-01-29 JP JP62018998A patent/JPH06105274B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1055932A2 (en) * | 1999-05-24 | 2000-11-29 | Nidec-Read Corporation | Apparatus and method for inspecting wiring on board |
| US6459272B1 (en) | 1999-05-24 | 2002-10-01 | Nidec-Read Corporation | Apparatus and method for inspecting wiring on board |
| EP1055932A3 (en) * | 1999-05-24 | 2004-03-31 | Nidec-Read Corporation | Apparatus and method for inspecting wiring on board |
| JP2002189050A (en) * | 2000-12-21 | 2002-07-05 | Oht Inc | Method and device for inspection |
| JP4512264B2 (en) * | 2000-12-21 | 2010-07-28 | オー・エイチ・ティー株式会社 | Inspection method and inspection apparatus |
| JP2012242283A (en) * | 2011-05-20 | 2012-12-10 | Union Arrow Technologies Inc | Pattern inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06105274B2 (en) | 1994-12-21 |
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