JPH06214201A - Liquid crystal display device and device and method for its inspection - Google Patents

Abstract

PURPOSE:To enable inspection in an early stage of a process and to eliminate such a waste that a defective is supplied to a subsequent process by observing an equivalent circuit constant between an inspection electrode and a transparent electrode, and detecting a short circuit between the transparent electrode and a conductive film. CONSTITUTION:The transparent electrode 23 and inspection electrode form an electric equivalent circuit normally including plural electric capacitances. In this equivalent circuit, a capacitance Cx between the transparent electrode 23 and conductive film 25 and a capacitance Cz between the conductive film 25 and inspection electrode 30 are formed. For the purpose, equivalent circuit constants between the inspection electrode 30 and respective transparent electrodes 23 are observed and then it can be inspected whether or not there is a transparent electrode 23 which short-circuits with the conductive film 25. Consequently, the electric short circuit between the conductive film 25 and transparent electrode 23 can be detected in an all-illumination state to obtain the inspecting method which never exerts adverse influence on the display device without increasing processes.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting a liquid crystal display panel. A liquid crystal display panel is basically configured by two substrates having a plurality of transparent electrodes formed, the surfaces having the transparent electrodes facing each other, sealed with a sealing material, and a liquid crystal material injected into the substrates. The structure may be different depending on the mode such as monochrome, color, segment type, matrix type, active type, passive type or TN, STN or other modes, but the present invention is applicable to any of them. In the following description, STN and a passive matrix type color liquid crystal display device will be described as a representative.

[0002]

2. Description of the Related Art A conventional technique will be described below with reference to the drawings. FIG. 8 is a cross-sectional view showing the structure of a conventional passive matrix array color liquid crystal display panel. First substrate 11
The transparent electrode 13 is provided on the second substrate 21, and the conductive film 25 and the color filter 22 are provided on the second substrate 21.
5, an insulating film 28 is provided on the color filter 22 and the color filter 22, and a transparent electrode 23 is provided on the insulating film 28.
The insulating film 28 has a function of absorbing irregularities of the layer of the color filter 22 and flattening the surface of the transparent electrode 23, and also has a function of insulating the transparent electrode 23 and the conductive film 25.

Although FIG. 8 shows an example in which the insulating film 28 extends to the end of the substrate 21, the insulating film 2 is provided outside the sealing material 24.
In some cases, 8 is removed and the transparent electrode 23 is directly provided on the substrate 21.

The substrate 11 and the substrate 21 are sealed with a sealing material 24, and the liquid crystal 14 is injected therein. Transparent electrode 13
The alignment film is actually provided on the substrate 1 and the substrate 23.
A spacer is sandwiched between the substrate 1 and the substrate 21, and the substrate 1
A polarizing plate is provided outside the substrate 1 and the substrate 21, but these are not shown for simplicity.

The transparent electrodes 13 and 23 are arranged in a cross pattern orthogonal to each other, and the intersecting portions of the two become pixels.
A difference voltage between drive voltages applied to the transparent electrode 23 and the transparent electrode 13 is applied to the liquid crystal in the pixel portion, and the liquid crystal changes its state in relation to its effective voltage and participates in display. Since a normal voltage is not applied to the liquid crystal in the parts other than the pixels, it may cause a display inconvenient state and lower the display contrast. There are cases. This film is non-conductive,
Although it may be conductive, a conductive film is often used in consideration of the effect of the light-shielding property and the film thickness on other properties.

FIG. 8 shows the case where the conductive film 25 is used as a light shielding film. The conductive film 25 is provided in a non-pixel shape in the non-pixel portion of the display portion as described above, and also as a parting near the sealing material 24, and even in a portion other than the display portion for the purpose of matching the substrate interval of the sealing portion with the display. It may be stretched. Figure 8
Shows an example in which the conductive film 25 is extended below the sealing material 24. The total area of the conductive film 25 in this extended portion is overwhelmingly larger than the total area of the conductive film 25 provided in the normal display portion.

Another example of providing a conductive film on a substrate is a proposal to use it as a heater for improving the characteristics of liquid crystals at low temperatures. In any case, when a conductive film is provided on the substrate, the insulating film 28 has both the function of flattening the transparent electrode 23 and the function of insulating the transparent electrode 23 and the conductive film 25.

Although the conductive film 25 is insulated from the transparent electrode 23 by the insulating film 28, an electrical short circuit often occurs between the conductive film 25 and the transparent electrode 23 nevertheless, and the yield is greatly reduced. I will let you. The cause thereof is, for example, a fine pinhole generated in the insulating film 28. The insulating film 28 has a large number of pinholes, and the conductive film 25 and the transparent electrode 23 are formed through the pinholes.
It is electrically short-circuited between. Completely eliminating this pinhole is currently very difficult. Another cause is dust.

Due to various causes, the steps in which a short circuit occurs are not the same. If a short circuit already occurs when the transparent electrode 23 is provided on the substrate 21, or if the transparent electrode 23 is pressed during the assembly process with the substrate 11, liquid crystal is injected into the sealed cell to It is considered that this occurs when both substrates 21, 11 are pressed to adjust the thickness of layer 14.

When the process of generating a short circuit is expressed in the state of the substrate 21, the substrate state in which the transparent electrode 23 is provided, the empty cell state in which the liquid crystal is not yet injected, and the liquid crystal is injected and sealed. It can be divided into four states: a state in which display is stopped and display is possible using an inspection jig or the like, and a completed state after steps such as polarizing plate adhesion. In any case, if the occurrence of a short circuit is detected in the earliest possible process and the outflow to the subsequent process is not prevented, all the subsequent processes will be wasted, resulting in a large loss.

Particularly, so-called chip-on-glass (COG)
Therefore, in the method in which the drive integrated circuit is provided on the substrate 21 or 11, if a failure is discovered after the integrated circuit is attached, the expensive integrated circuit is wasted, and the loss is extremely large.

Usually, when the liquid crystal is injected, a step of inspecting the alignment state of the liquid crystal and the quality of the display device such as dust and scratches is performed. At this time, inspection electrodes are set up on each of the plurality of transparent electrodes 23, and a scanning drive voltage is applied to the transparent electrodes 23 to inspect, so that only the transparent electrode 23 portion short-circuited with the conductive layer 25 is different from the other electrode portions. Although different display states are presented and abnormalities can be seen, when the transparent electrodes 23 are fine, it is difficult to set test electrodes on all of the individual transparent electrodes 23, and only some electrodes can be contacted. Or all transparent electrodes 23 with rubber connector etc.
You can only touch the same time.

In this case, the transparent electrode 23 on the substrate 21 is commonly connected to form one common electrode, and the transparent electrode 13 on the substrate 11 is commonly connected to form the other common electrode, which is driven between both common electrodes. A voltage is applied and the liquid crystal is displayed for inspection. However, in this all-lighting inspection, the transparent electrodes 23 are not scanned, and the same voltage is applied to all the transparent electrodes 23 at the same time, so that the entire display is the same and it is difficult to detect a short-circuited portion, and the subsequent steps are performed. In most cases, an abnormality was discovered only when normal driving became possible. If the contact resistance between the rubber connector and each transparent electrode 23 is unstable and there is a part where the contact resistance is high, the transparent electrode 23 may appear as an abnormal line.
It was often mistaken for the occurrence of a short circuit phenomenon.

[0014]

SUMMARY OF THE INVENTION In view of such problems of the prior art, the present invention is capable of detecting an electrical short circuit between the conductive film 25 and the transparent electrode 23 in a fully lit state and increases the number of steps. It is an object of the present invention to provide an inspection method that does not cause adverse effects on the display device without causing it.

[0015]

Means to be used by the present invention for achieving the above-mentioned object is that the other side of the substrate 21 provided with the conductive film 25, the insulating film 28, and the transparent electrode 23 on one surface thereof. A conductive inspection electrode 30 is arranged directly or indirectly on the surface, and an equivalent circuit constant between the inspection electrode 30 and the transparent electrode 23 is observed for inspection.

[0016]

The transparent electrode 23 and the inspection electrode usually form an electric equivalent circuit including a plurality of electric capacitors. In this equivalent circuit, a capacitance Cx between the transparent electrode 23 and the conductive film 25 and a capacitance Cz between the conductive layer 25 and the inspection electrode 30 are formed. Therefore, observing the equivalent circuit constant between the inspection electrode 30 and each transparent electrode 23, the transparent electrode 23 short-circuited with the conductive film 25 is observed.
It can be inspected for

[0017]

EXAMPLES Various methods of observing the equivalent circuit constant between the inspection electrode 30 and each transparent electrode 23 can be considered depending on the state of the display device. Embodiments of the present invention will be described below with reference to the drawings, but the drawings show only the structure and not the dimensions or the like. Further, the alignment film, the polarizing plate and the like on the transparent electrode 23 are not shown.

FIG. 1 is a sectional view and an inspection circuit diagram of a substrate 21 showing a first embodiment of the present invention when the display device is in a state after liquid crystal is injected. In FIG. 1, a substrate 21 having a conductive film 25, an insulating film 28, and a transparent electrode 23 on one surface
The inspection electrode 30 is arranged on the other surface of the above so as to face the conductive film 25 and is used as one common electrode A. In this case, the inspection electrode 30
If there is a risk that the surface of the substrate 21 will be damaged, a thin protective film may be provided between the substrate 21 and the inspection electrode 30. On the other hand, the transparent electrode 1 on the other substrate 11 not shown.
3 is commonly used as the other common electrode B, and a voltage E higher than usual is applied between A and B. In this case, the voltage E may be direct current or alternating current (sinusoidal wave or rectangular wave), but alternating current is desirable to prevent deterioration of the liquid crystal.

FIG. 2A is a circuit diagram showing an ordinary equivalent circuit of the configuration of FIG. 1, in which the number of transparent electrodes 23 is n. In FIG. 2A, Cx is the capacitance between each transparent electrode 23 and the conductive film 25, Cz is the capacitance between the conductive film 25 and the inspection electrode 30, and Cy is each transparent. It is the capacitance between the electrode 23 and the transparent electrode 13 on the substrate 11.

In this equivalent circuit, assuming that each Cy, that is, the voltage Ey applied to the liquid crystal layer, Ey = (E · Cz · Cx) / H where H = (n · Cx · Cy + Cx · Cz + Cy + Cy + Cy C
z) is required.

FIG. 2B shows k of n transparent electrodes 23.
It is an equivalent circuit diagram when the book is short-circuited with the conductive film 25. In this case, assuming that the voltage applied to the liquid crystal on the transparent electrode 23 without short circuit is Eym and the voltage applied to the liquid crystal on the transparent electrode 23 with short circuit is Eyk, Eym = (E · Cz · Cx) / (H + k · Cy · Cy) Eyk = (E · Cz · (Cx + Cy)) / (H + k · C
y · Cy) is obtained.

It can be seen from the simple trial calculation that the relationship between Ey, Eym, and Eyk is Eyk>Ey> Eym. That is, if E is constant, the transparent electrode 2
A voltage higher than usual is applied to a portion where 3 is short-circuited with the conductive film 25, and a voltage lower than usual is applied to a portion which is not short-circuited, and the difference is recognized as a clear difference in display state. It In this case, needless to say, a polarizing plate or the like is used if necessary. This inspection can be performed visually or automatically using a photo transistor or the like.

In FIG. 1, the inspection electrode 30 is connected to the conductive film 25.
Although the case where the inspection electrodes 3 are arranged in all the portions facing the conductive film 25 is shown in this case.
It is not necessary to provide 0, and in the case where the extended portion having a large area is provided near the sealing portion, the counter electrode is not provided in the display portion, and only the portion facing the conductive film 25 near the sealing portion is provided. The inspection electrode 30 may be provided. If you do this, C
Since the value of z becomes small, the common electrode A (that is, the inspection electrode 3
0) and the common electrode B (that is, the transparent electrode 13 on the substrate 11) need to be increased in value to be applied.

Further, in the inspection method of the first embodiment, since the display state of the liquid crystal is observed, at least a part of the inspection electrode 30 facing the display pixel portion needs to transmit light, which is an opaque conductive material. If a member is used, it is necessary to open a window in the inspection electrode 30, but if the inspection electrode 30 is a material that transmits light, it is not necessary to open a window. For example, the inspection electrode 30 can be configured by a transparent electrode provided on a transparent substrate.

In this case, since the electric field is applied to the portion without the conductive film 25, the detection capability is slightly lower than that in the case where the inspection electrode 30 is arranged only in the portion facing the conductive film 25. Since the alignment between the substrate 21 and the substrate 21 is not necessary, and the inspection electrodes do not need to be changed even if the specifications of the display device to be inspected are different, efficiency is high.

As a result of actually performing a short-circuit test by the method shown in FIG. 1, it was possible to detect the short-circuit very clearly at E = 80 to 100 V (effective value of sine wave).

FIG. 3 shows a second embodiment of the present invention.
(A) is a cross-sectional view and an inspection circuit diagram of the display device. Figure 3
In (a), a transparent inspection electrode substrate 3 is provided outside the substrate 11.
1. A transparent inspection electrode 32 provided above the transparent inspection electrode 32 (W) is arranged between the transparent inspection electrode 32 (W) and the inspection electrode 30 (A).
To be applied.

FIG. 3B is an equivalent circuit diagram in the case of the configuration of FIG. 3A, where Cw is the capacitance between the transparent inspection electrode 32 and the surface of the substrate 11 on which the transparent electrode 13 is provided. Indicates. Since the drive voltage E is divided by Cw, it is necessary to make the voltage higher, but contact with the transparent electrode 13 on the substrate 11 is unnecessary, and the inspection can be performed more easily than in the first embodiment. .

Although the above-mentioned embodiment is concerned with the inspection after the liquid crystal is injected, the inspection in the state of the empty cell before the liquid crystal injection or the substrate 21 alone before the assembly with the substrate 11 is performed. The same method can be used for inspection.
In the following, the inspection electrode 30 will be described as that shown in FIG.

FIG. 4A is a constitutional view showing a third embodiment of the present invention in the case where the inspection is performed only in the empty cell state or the substrate 21. In FIG. 4A, the transparent electrode 23 is assumed to be separated into n individual electrodes. One transparent electrode 2
Set a needle on 3 and call this point F. A load ZL is connected between the points F and G, a voltage E is applied between the inspection electrode 30 (A) and the point G, and the voltage appearing across the load ZL is observed by the measuring instrument M.

In the case of this embodiment, the contact electrodes are brought into contact with the individual electrodes, and the contact electrodes are switched and inspected, or one contact electrode is mechanically swept so that all the transparent electrodes 23.
The whole is inspected by touching.

FIG. 4 (b) is an equivalent circuit of the configuration of FIG. 4 (a). In FIG. 4 (b), the load ZL is connected to the capacitance CL.
Then, the voltage ECL appearing across CL is ECL = E.Cz.Cx / (Cx.CL + Cx.Cz + unless the transparent electrode 23 and the conductive film 25 are short-circuited.
CL.Cz), and if the transparent electrode 23 and the conductive film 25 are short-circuited, ECL = E.Cz / (Cz + CL). Therefore, the short-circuit can be detected by detecting the voltage difference between them. . Also in this case, the voltage E can be either DC or AC. The load ZL may be a resistor, for example, when a transient phenomenon is observed. The load ZL, the measuring device M, and the driving voltage source E can be replaced with a capacitance meter.

FIG. 5 is a sectional view and an inspection circuit diagram showing a fourth embodiment of the present invention. In FIG. 5, another inspection liquid crystal display device H is used for the load ZL in FIG. That is, if the inspection liquid crystal display device H is connected between the points F and G, the voltage E is applied between the inspection electrode 30 (A) and the point G, and the voltage E is appropriately adjusted, the transparent electrode 23 becomes conductive. It is possible to provide a difference in the display state of the inspection liquid crystal display device H depending on whether the film 25 is short-circuited or not.

The difference in the display state of the inspection liquid crystal display device H may be visually observed, but it can also be automatically determined. In FIG. 5, a lamp L is arranged on one side of an inspection liquid crystal display device H, and a photodetector T such as a phototransistor is arranged on the other side, and the output of the photodetector T is measured by a measuring device M. It should be measured with.

Since the display characteristics of the liquid crystal display device have a threshold value with respect to the driving voltage and have a steep rising characteristic, the liquid crystal display device reacts very sensitively to a minute change in the driving voltage, and thus has a high inspection capability. You can get it. in this case,
It is desirable to use an STN type liquid crystal display device having a steeper rising characteristic.

FIG. 6 is a sectional view of a substrate showing a fifth embodiment of the present invention. In FIG. 6, the inspection electrode 30 is formed of a conductive film provided on the inspection electrode substrate 33 larger than the substrate 21 by the vapor deposition method or the sputtering method. If necessary, a protective film corresponding to the insulating film 28 may be provided on the inspection electrode 30. In this case, the protective film is removed from the extraction electrode 34.

As described above, if the conductive film is transparent, it is not always necessary to pattern it, but if it is opaque, it is necessary to pattern it by etching or the like. For patterning the inspection electrode 30, the conductive film 2 is formed on the substrate 21.
The same mask used to form 5 can be used.
In this case, the portion of the extraction electrode 34 of the inspection electrode 30 may be attached separately, but if the extraction electrode 34 of the inspection electrode 30 is prefabricated and placed on the mask for forming the conductive film 25, an extra mask is required. However, it is also desirable in terms of cost.

As a matter of course, at least a part of the pattern corresponding to the extraction electrode 34 is also patterned on the conductive film 25 on the substrate 21. The insulating film 28 is the substrate 2
1 is provided up to one end, the pattern is covered with the insulating film 28 on the surface of the substrate 21.
It is exposed to the outside at the cut surface of. If the insulating film 28 is removed outside the sealing material 24, the substrate 2
This pattern is exposed even on one side.

If the conductive film 25 is left exposed to the outside, static electricity generated by various causes is taken into the conductive film 25, and the potential of the conductive film 25 becomes transparent.
As a result of fluctuating independently of the above, it affects the state of the liquid crystal and adversely affects the display state, and in some cases, the transparent electrode 2
In some cases, a discharge may occur between 3 and the conductive film 25, destroying the transparent electrode 23. Therefore, for example, as shown in FIG. 6, by covering the exposed portion of the pattern with an adhesive 26 or the like, this problem is solved.

FIG. 7 is a plan view of a substrate showing a sixth embodiment of the present invention. In a relatively small liquid crystal display device,
Usually, a plurality of substrates 21 are often obtained from a large single mother substrate 40. The mother substrate 40 is cut into a strip shape including a plurality of substrates 21 in the middle of the process, and finally separated into individual substrates 21. In this case, as shown in FIG. 7, if a plurality of conductive films 25 on the mother substrate 40 are connected in common by the connection pattern 41, the inspection in each step becomes easy. That is, if a common inspection electrode 30 is provided so as to correspond to each conductive film 25 of the plurality of substrates 21, it is possible to perform the inspection even in a state including the plurality of substrates 21.

Of course, as shown in FIG. 7, the extraction electrode 3 for inspection is used as a mask for forming the conductive film 25 on the mother substrate 40.
It is possible to carry out the fifth embodiment shown in FIG. 6 by using this mask with the pattern of No. 4 provided.

[0042]

As is apparent from the above description, the transparent electrode 2
In a liquid crystal display device or a substrate for a liquid crystal display device having a conductive film 25 between the substrate 3 and the substrate 21, the present invention is used for inspecting a short circuit between the transparent electrode 23 and the conductive film 25. Is obtained.

(1) Conductive film 25 and insulating film 2 on one surface
8 and the transparent electrode 23 are provided on the other side of the substrate 21, and the conductive inspection electrode 30 is directly or indirectly arranged on the other side.
By observing an equivalent circuit constant between the inspection electrode 30 and the transparent electrode 23 to detect a short circuit between the transparent electrode 23 and the conductive film 25, inspection can be performed at an early stage of the process, and a defective product is detected. The waste flowing to the subsequent process is eliminated.

(2) In a state where the liquid crystal is injected, a voltage is applied between the transparent electrode 13 on the counter substrate 11 facing the substrate 21 and the inspection electrode 30, and the substrate 21 and the counter substrate 11 are applied. By observing and displaying the display state based on the state of the liquid crystal 14 sandwiched between the two, the inspection can be easily performed without making any contact with the transparent electrode 23 of the substrate 21.

(3) By making the inspection electrode 30 a transparent electrode, it is not necessary to align the inspection electrode 30 and the substrate 21, and it is not necessary to change the inspection electrode every time the specifications of the inspection object are different, so that the efficiency is improved. A good inspection is possible.

(4) The inspection electrode substrate 31 provided with the transparent inspection electrode 32 on the outer surface of the substrate 11 is arranged, and a voltage is applied between the transparent inspection electrode 32 and the inspection electrode 30 to display the liquid crystal 14. The transparent electrode 2 of the substrate 21
3 and the transparent electrode 13 of the substrate 11 can be inspected easily without any contact.

(5) In the state of an empty cell in which liquid crystal is not injected or before being combined with the substrate 11, the transparent electrodes 23 are individually or scanningly applied to contact electrodes to form the individual transparent electrodes 23. A short circuit accident can be found by observing the equivalent circuit constant between the inspection electrode 30 and the inspection electrode 30.

(6) In the above (5), the transparent electrode 23
One electrode of the inspection liquid crystal display device is connected to, and a voltage is applied between the other electrode of the inspection liquid crystal display device and the inspection electrode 30 to observe the display state of the inspection liquid crystal display device. By doing so, it is possible to detect a short circuit accident with high detection capability.

(7) By forming the inspection electrode 30 using a mask for forming the conductive film 25 on the substrate 21, the manufacturing cost of the inspection electrode 30 can be reduced.

(8) From a single mother substrate 40 to a plurality of substrates 2
In the liquid crystal display device which obtains 1, 2 is formed on the mother substrate 40.
By electrically connecting the conductive film 25 on the substrate 21 as described above, the inspection can be performed even in a state including a plurality of substrates 21.

(9) In the above (7), when the conductive film 25 on the substrate 21 is exposed, the accident due to static electricity can be prevented by covering it with an adhesive or the like.

(10) The above items (2) and (3) can also be used for inspecting the quality of the display device such as the conventional alignment state of liquid crystal, dust and scratches.

[Brief description of drawings]

FIG. 1 is a sectional view and a measurement circuit diagram of a substrate and an inspection electrode substrate according to a first embodiment of the present invention.

FIG. 2 is an equivalent circuit diagram in the first embodiment of the present invention,
(A) shows the case where none of the n transparent electrodes 23 is short-circuited with the conductive film 25, and (b) shows the case where the k transparent electrodes 23 are short-circuited with the conductive film 25.

FIG. 3 shows a second embodiment of the present invention, (a) is a cross-sectional view of a substrate and an inspection electrode substrate and a measurement circuit diagram, and (b) is a diagram.
Is an equivalent circuit diagram thereof.

FIG. 4 shows a third embodiment of the present invention, in which (a) is a sectional view and a measurement circuit diagram of a substrate and an inspection electrode substrate, and (b) is a sectional view.
Is an equivalent circuit diagram thereof.

FIG. 5 is a sectional view and a measurement circuit diagram of a substrate and an inspection electrode substrate showing a fourth embodiment of the present invention.

FIG. 6 is a sectional view of a substrate and an inspection electrode substrate showing a fifth embodiment of the present invention.

FIG. 7 is a plan view of a mother substrate according to a sixth embodiment of the present invention.

FIG. 8 is a cross-sectional view showing a structure of a conventional liquid crystal display device.

[Explanation of symbols]

 21 Substrate 22 Color Filter 23 Transparent Electrode 25 Conductive Film 28 Insulating Film 26 Adhesive etc. 30 Inspection Electrode 32 Transparent Inspection Electrode

Claims (11)

[Claims] 1. A substrate 21 having a conductive film 25, an insulating film 28, and a transparent electrode 23 formed on one surface thereof is provided with a conductive inspection electrode 30 directly or indirectly on the other surface thereof. An inspection device for a liquid crystal display device, characterized by observing and inspecting an equivalent circuit constant between the inspection electrode 30 and the transparent electrode 23. 2. A voltage is applied between the transparent electrode 13 on the substrate 11 facing the substrate 21 and the inspection electrode 30, and the substrate 2
The inspection device for a liquid crystal display device according to claim 1, wherein a display state of the liquid crystal 14 between the substrate 1 and the substrate 11 is observed and inspected. 3. The inspection device for a liquid crystal display device according to claim 1, wherein the inspection electrode 30 is a transparent electrode. 4. A transparent inspection electrode 32 is provided on the outer surface of the substrate 11 facing the substrate 21, and a voltage is applied between the transparent inspection electrode 32 and the inspection electrode 30 so that the substrate 21 and the substrate 11 can be connected to each other.
The inspection device for a liquid crystal display device according to claim 1, wherein the display state of the liquid crystal 14 sandwiched between the two is observed and inspected. 5. The transparent electrode 23 is individually or scanned to apply a contact electrode, and an equivalent circuit constant between each transparent electrode 23 and the inspection electrode 30 is observed for inspection. The inspection device for a liquid crystal display device described in 1. 6. The transparent electrode 23 is connected to one electrode of the inspection liquid crystal display device, and a voltage is applied between the other electrode of the inspection liquid crystal display device and the inspection electrode 30 to perform the inspection. The inspection apparatus for a liquid crystal display device according to claim 1, wherein the display state of the liquid crystal display device is observed and inspected. 7. The inspection electrode 30 is a conductive film 2 on a substrate 21.
The inspection device for a liquid crystal display device according to claim 1, wherein the inspection device has the same or substantially the same pattern as 5. 8. A substrate 21 having a conductive film 25, an insulating film 28, and a transparent electrode 23 on one surface thereof is provided with a conductive inspection electrode 30 directly or indirectly on the other surface thereof. A method for inspecting a liquid crystal display device, which comprises inspecting by observing an equivalent circuit constant between the inspection electrode 30 and the transparent electrode 23. 9. A liquid crystal display device in which a plurality of substrates 21 are obtained from a single mother substrate 40, and conductive films 25 on two or more substrates 21 are electrically connected on the mother substrate 40. Liquid crystal display device. 10. A liquid crystal display device, wherein a conductive film 25 extends to a fractured surface of a substrate 21. 11. A liquid crystal display device, wherein the exposed portion of the conductive film 25 on the substrate 21 is covered with an adhesive or the like.