201248164 L厂 六、發明說明： ' 【發明所屬之技術領域】 ' 本發明係關於一種導電圖案檢查裝置，其係檢測形成 • 於基板上之導電圖案中發生不良的位置，例如檢測斷線位 置或短路位置。 【習知技術】 習知在平板揭示器等領域中，大多使用在基板上設置 複數個導電圖案之電路基板。該電路基板中’當導電圖案 發生斷線或短路時便無法發揮原本之功能。因此，在製造 電路基板時，係對各導電圖案進行關於斷線及短路之檢 查。為了容易且高精度實施該檢查，習知曾提出多種檢查 技術。 例如在專利文獻1及專利文獻2中揭示有當判斷出導 電圖案上發生斷線或短路時，該導電圖案中何處發生斷線 或短路之檢測斷線或短路位置的技術。 具體而言，專利文獻1中係揭示在檢查對象之導電圖 案上施加指定之檢查信號（交流電壓）的狀態下，使設有複數 個電極之感測器沿著發生斷線或短路之導電圖案移動，此 時依據電極中感應之交流電壓值的變化來鑑別斷線位置的 技術。 此外，專利文獻2中係揭示從檢查對象之導電圖案的 一端供應檢查信號，並且使檢測電極沿著斷線圖案移動並 讀取檢查信號，依據讀取信號之變動來鑑別斷線或短路位 201248164 置的技術。 (習知技術文獻） (專利文獻） [專利文獻1]日本特開2008-102031號公報 [專利文獻2]日本特開2006-284597號公報 【發明内容】 (發明所欲解決之問題） 但是，專利文獻1及專利文獻2記載之技術，雖然在 全部的導電圖案係以指定之間隔平行設置時有效，不過存 在著當導電圖案之設置角度適當改變時則有應用困難的問 題。 例如在平板揭示器中使用之基板上，設有實際揭示可 視影像之像素區域。在該像素區域中，複數個導電圖案係 以指定的間隔平行設置。此外，在像素區域之外側，複數 個導電圖案連接於驅動1C。此處，通常驅動1C之端子間距 遠比像素區域中之導電圖案的設置間距小。因此，為了將 複數個導電圖案連接於驅動1C，需要在像素區域之外側， 將導電圖案之設置間距急遽縮窄。結果在像素區域之外 侧，許多導電圖案之設置間距逐漸縮小而傾斜設置。換言 之，在像素區域之外側，各導電圖案係以不同之設置角度 而設置。 為了使用專利文獻1及專利文獻2記載之技術’進行 在如此設置間距逐漸變化之區域的斷線或短路位置之鑑 201248164 • Wf要使電極沿著該設㈣料漸變狀導t圖案 .=縱）。但是如前所述，存在著各導f圖案之連接的設置角 •’而無法輕易追縱的問題。當然亦有記憶各導電圖 =之设置角度’而使電極在其記憶之設置角度方向移動的 方法。但是，此時存在著控制非常複雜之問題。 因此，本發明之目的非關於一種與導電圖案之設置能 而是提供一種可簡易地鑑別斷線或短路位置之導電圖 案檢查裝置。 (解決問題之單元） 本發明之導電圖案檢查裝置係在基板上於第一方向以 二设置於複數個導電圖案中，檢測發生斷線之導電圖荦 的斷線圖案中之斷線位置，其特徵係具有：施加單元圖^ =該斷線圖案之一端施加交流電壓；感測器，其係在該 二板上經由間隙相對而移動’且至少具有兩個以上之電 、° ’及控制部’其係依據該電極所檢測之信號，進 :器之移動方向與斷線部位的判斷；該兩個以上之電極;_ ς具有设置於該第-方向之兩個跟蹤電極，該控制部依據 :::跟縱電極所檢測之信號的比較結果，判斷該感測器 位置對該斷線圖案是否適當，並依據該判 斲釔果決疋該感測器之移動方向。 理想的態樣為該控制部在該判斷處理中反覆實施以下 处理：移動處理’其係使該感測器在與該第一方向正交 =二方向移動蚊距離，而從該—端離開；跟縱處理， "係在該移動處理之後’依據該兩個跟縱電極所檢測之信 201248164 號的比較結果，調整該感測器之第一方向的位置，而 線圖案位於該兩個跟縱電極之中間；及判斷處理，盆 該跟蹤處理之後，判斷該感測器是否到達斷線部位，直至 判斷該感測器已到達斷線部位。 其他理想的態樣係進-步具有：差分器，其係輸出該 兩個跟蹤電極所檢測之信號的差分值；及同步檢波哭，其 係以施加信號同步檢波來自該差分器之輸出信號；該控制 部依據來自該同步檢波器之輸出信號，判斷該感測器之第 -方向的位置對該斷線圖案是否適當。此時，該兩個以上 之電極應進-步包含設於該兩個輯電極之間的一個斷線 檢測電極，該控制部依據該斷線檢測電極所檢測之料， 判斷，則器是否已到達斷線部位。此外，應進一步：：： 差分器，其係輸出該兩個跟縱電極所檢測之信號的差分· =流元件’其係將來自該差分器之輸出信號加以整流| 依據使該感測器在第一方向移動時來自該整流元 件之^信號的變化，判斷該感測器是否已到達斷線部位。 ，、他本發明之導電_檢查裝錢在基板上於第一方 向以間隔設置於複數個導雷圖宏 . 、 短路圖案中檢測短路位置，其特徵係 圖案： :鄰接之兩個短路圖案的各-端施:1::= :::=成之_路心電流· 周 :、Μ 土板上及由間隙相對而移動，檢測形成於 圈所檢測之_信11 依據該檢測線 A進仃該檢測線圈之移動方向與短路 201248164 .·依據該電壓信號之位準，判斷該檢 . ㈣丨°的位置對能路81案是否適當，並依據 . μ 、，、°果決定該檢測線圈之移動方向。 (發明之效果） 依本發明，因為係判斷感測器 否線=或是檢測用線圈之第一方向的位 =’取與導電圖案之設置態樣無關，可使感測器或 =圈沿著導電圖案移動，結果可簡易地鑑別斷線或短 【實施方式】 以下’就本發明之實施態樣參照®式作說明。本實施 樣之導電賴檢查裝置1()制於檢查形成好板顯示器 等使用之玻璃基板的導電圖t 11G是否良好的檢查裝置， 特別是成為有效用於鑑別斷線位置之構成。在該導 檢查裝置1〇詳細制之前，先簡單賴本實施態樣中作為 檢查對象之基板的構成。 第1圖係用於平板顯示器之基板的概略構成圖。該基 板係由將複數個導電圖案110a設置於γ方向之第一層、將 複數個導電圖案110b設置於x方向之第二層、及介於0第一 層與第一層之間的絕緣層以z方向層疊而構成。 形成於第一層之導電圖案110a&形成於第二層之導電 圖案110b(以下，在不區別兩者時，省略添加之英文字母， 而稱為「導電圖案110」）在像素區域E1中彼此交叉地設 201248164201248164 L Factory VI. Description of the Invention: 'Technical Fields of the Invention>> The present invention relates to a conductive pattern inspection apparatus for detecting a position where a defective portion of a conductive pattern formed on a substrate is formed, for example, detecting a broken position or Short circuit position. [Conventional Technology] Conventionally, in the field of a flat panel revealer or the like, a circuit board in which a plurality of conductive patterns are provided on a substrate is often used. In the circuit board, when the conductive pattern is broken or short-circuited, the original function cannot be performed. Therefore, in the manufacture of the circuit board, the respective conductive patterns are inspected for disconnection and short circuit. In order to carry out the inspection easily and with high precision, various inspection techniques have been proposed. For example, Patent Document 1 and Patent Document 2 disclose a technique of detecting a disconnection or a short-circuit position of a disconnection or short-circuit in a conductive pattern when a disconnection or short-circuit occurs in a conductive pattern. Specifically, in Patent Document 1, it is disclosed that a conductive pattern in which a plurality of electrodes are provided along a disconnection or short-circuit is provided in a state where a predetermined inspection signal (AC voltage) is applied to a conductive pattern of an inspection target. Movement, in which a technique of discriminating the position of the disconnection based on a change in the value of the alternating voltage induced in the electrode. Further, Patent Document 2 discloses that an inspection signal is supplied from one end of a conductive pattern of an inspection object, and the detection electrode is moved along the disconnection pattern and the inspection signal is read, and the disconnection or short-circuit bit is discriminated according to the change of the read signal 201248164 Set the technology. (Patent Document 1) [Patent Document 1] JP-A-2008-102031 [Patent Document 2] JP-A-2006-284597 [Summary of the Invention] (Problems to be Solved by the Invention) However, The techniques described in Patent Document 1 and Patent Document 2 are effective when all the conductive patterns are arranged in parallel at a predetermined interval, but there is a problem that application is difficult when the installation angle of the conductive pattern is appropriately changed. For example, on a substrate used in a flat panel revealer, a pixel area that actually reveals a viewable image is provided. In the pixel region, a plurality of conductive patterns are arranged in parallel at a prescribed interval. Further, on the outer side of the pixel region, a plurality of conductive patterns are connected to the driving 1C. Here, the terminal pitch of the driver 1C is usually much smaller than the pitch of the conductive patterns in the pixel region. Therefore, in order to connect a plurality of conductive patterns to the driving 1C, it is necessary to sharply narrow the arrangement pitch of the conductive patterns on the outer side of the pixel region. As a result, on the outer side of the pixel region, the arrangement pitch of many conductive patterns is gradually reduced and inclined. In other words, on the outer side of the pixel area, each of the conductive patterns is disposed at a different set angle. In order to use the technique described in Patent Document 1 and Patent Document 2 to perform the disconnection or short-circuit position in the region where the pitch is gradually changed, 201248164 • Wf is to make the electrode along the set (four) material to guide the t pattern. ). However, as described above, there is a problem that the setting angle of the connection of the respective f-patterns is not easy to trace. Of course, there is also a method of memorizing the respective conductive patterns = setting angles to move the electrodes in the direction in which they are set in the memory. However, at this time there is a problem that the control is very complicated. Accordingly, the object of the present invention is not to provide a conductive pattern inspection apparatus capable of easily discriminating a broken or short-circuited position with respect to an arrangement of a conductive pattern. (Unit for Solving the Problem) The conductive pattern inspection device of the present invention is disposed on the substrate in a plurality of conductive patterns in the first direction, and detects a disconnection position in the disconnection pattern of the conductive pattern in which the disconnection occurs. The characteristic system has: an application unit map ^ = an alternating voltage is applied to one end of the disconnection pattern; a sensor that moves relative to the second plate via a gap and has at least two or more electric, °' and control portions 'Based on the signal detected by the electrode, the direction of movement of the device and the determination of the broken portion; the two or more electrodes; _ ς have two tracking electrodes disposed in the first direction, the control portion is based on ::: Compared with the signal detected by the vertical electrode, it is judged whether the sensor position is appropriate for the disconnection pattern, and the moving direction of the sensor is determined according to the determination result. In an ideal aspect, the control unit repeatedly performs the following processing in the determining process: the moving process is configured to cause the sensor to move the mosquito distance in the direction orthogonal to the first direction=two directions, and to leave from the end; With the vertical processing, " after the movement process, 'the position of the first direction of the sensor is adjusted according to the comparison result of the two signals detected by the vertical electrode 201248164, and the line pattern is located in the two The middle of the vertical electrode; and the judging process, after the tracking process, determine whether the sensor reaches the disconnection portion until it is determined that the sensor has reached the disconnection portion. The other ideal aspect system has: a differentiator that outputs a differential value of the signal detected by the two tracking electrodes; and a synchronous detection cry, which synchronously detects an output signal from the differentiator by applying a signal; The control unit determines whether the position of the first direction of the sensor is appropriate for the disconnection pattern based on an output signal from the synchronous detector. In this case, the two or more electrodes should further include a disconnection detecting electrode disposed between the two electrodes, and the control unit determines whether the device has been detected according to the material detected by the disconnection detecting electrode. Arrive at the broken line. In addition, a further::: a differentiator that outputs a difference between the two signals detected by the vertical electrodes, a = stream element, which rectifies the output signal from the differentiator | The change of the signal from the rectifying element when moving in the first direction determines whether the sensor has reached the disconnected portion. The conductive _ inspection charge of the present invention is disposed on the substrate at intervals in the first direction at a plurality of lightning-reducing macros. The short-circuit position is detected in the short-circuit pattern, and the characteristic pattern is: adjacent two short-circuit patterns Each end-end application: 1::=:::= into _ curb current · week:, Μ 及 及 and the relative movement of the gap, the detection is formed in the circle detection _ letter 11 according to the detection line A移动 The direction and the short circuit of the detection coil 201248164. According to the level of the voltage signal, determine the detection. (4) The position of 丨° is appropriate for the energy path 81, and the detection coil is determined according to . μ , , , ° The direction of movement. (Effect of the Invention) According to the present invention, since it is judged that the sensor no line = or the bit of the first direction of the detecting coil = 'takes irrespective of the setting pattern of the conductive pattern, the sensor or = circle can be made The conductive pattern is moved, and as a result, the disconnection or the short can be easily discriminated. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the formula. The conductive-laid inspection apparatus 1 () of the present embodiment is used for inspecting whether or not the conductive pattern t 11G of the glass substrate used for forming a panel display or the like is good, and is particularly effective for discriminating the disconnection position. Before the detailed inspection apparatus 1 is manufactured in detail, the configuration of the substrate to be inspected in the present embodiment will be simplified. Fig. 1 is a schematic configuration diagram of a substrate used for a flat panel display. The substrate is composed of a first layer in which a plurality of conductive patterns 110a are disposed in the γ direction, a second layer in which the plurality of conductive patterns 110b are disposed in the x direction, and an insulating layer interposed between the first layer and the first layer. It is configured by laminating in the z direction. The conductive patterns 110a formed in the first layer and the conductive patterns 110b formed in the second layer (hereinafter, when the two are not distinguished, the added English letters are omitted, and referred to as "conductive patterns 110") are in the pixel region E1. Crossed to set 201248164
的交叉點而形 示可視影像之 間隔平行排列 置藉由该導電圖案110a與導電圖案I〗此 成-個像素’藉^此等像素之集合而構成顯 像素區域E1。導電圖案11〇以所指定的第— 於5亥像素區域E1内。 各導電圖案1Π)在像純域E1之外側連接於驅動 1C(未顯不於圖式中）。該驅動IC之連接端子以遠比像素區 ㈣中之導電圖案110的設置間距小的間距而排列。因而 複數個導電圖111G為了與驅動IC連接，而在像素區域 E1之外侧大幅縮小其設置間距。結果在像素區域ei之外 側形成複數個導電圖案H0以比第一間隔小之第二間隔而 平行排列的連接區域E2、及導電圖案11〇間之間隔從第一 間隔逐漸變化成第一間隔之中間區域E3。在該中間區域E3 中，幾乎所有之導電圖案110係對x軸或γ軸傾斜設置， 且彼此鄰接之導電圖案110的設置角度不同。 在各導電圖案110之另一端（不連接於驅動IC之側的 端部）設有導電焊墊112。該導電焊墊112所形成的寬度比 導電圖案110寬，該導電焊塾112係用作各種檢查用信號 之供應及檢測。 其次’就檢查形成於該基板之導電圖案的導電圖 案檢查裝置10之構成，參照第2圖作說明。第2圖係揭示 本實施態樣之導電圖案檢查裝置10的概略構成圖。另外， 第2圖中省略第二層之導電圖案110b的圖式。以下，依據 該第2圖，僅就第一層之導電圖案110a的斷線位置之鑑別 原理作說明，不過該鑑別原理對第二層之導電圖案ll〇b亦 8 201248164 . 同樣。 如前所述，該導電圖案檢查裝置ίο係特別有效用於構 * 成在發生斷線之導電圖案110中鑑別係在何處發生斷線的 * 斷線位置之鑑別。另外，以下僅就鑑別斷線位置詳細說明， 不過導電圖案檢查裝置10中除了斷線位置之鑑別功能之 外，亦可搭載判斷有無斷線或短路之判斷功能、短路位置 之鑑別功能等。 導電圖案檢查裝置10具有在斷線之導電圖案110中施 加交流電壓的施加機構12、檢測該施加之交流電壓的感測 器14、對感測器14之檢測信號實施指定之處理而輸出的信 號處理電路、驅動感測器14的感測器驅動機構16、及控制 上述構件的控制部18等。 施加機構12係從斷線之導電圖案110的一端（本實施 . 態樣係導電焊墊112)施加檢查用之交流電壓的機構。該施 加機構12例如由接觸於導電焊墊112之接觸端子20,及經 * 由接觸端子20而供應交流電壓至導電圖案110之交流電源 22等構成。另外，本實施態樣係使用接觸端子20以接觸的 方式施加電壓，不過，亦可使用與導電圖案110靜電結合 之電極，以不接觸的方式施加電壓。 感測器14係用於檢測施加之交流電壓，控制部18依 據該檢測結果鑑別感測器14之移動方向或斷線位置。感測 器14具有在Y方向（亦即導電圖案110之設置方向）排列之 三個電極（跟蹤電極30a、跟蹤電極30b與斷線檢測電極 32)。斷線位置檢查時，該感測器14藉由感測器驅動機構 201248164 16而移動。 其移動方向將在後面詳細說明，且係依據來The intersections of the visible images are arranged in parallel with each other. The conductive pixels 110a and the conductive patterns I are formed into a pixel area E1 by the collection of pixels. The conductive pattern 11 is within the specified fifth pixel area E1. Each of the conductive patterns 1) is connected to the drive 1C on the outer side of the image-only domain E1 (not shown in the drawings). The connection terminals of the driver IC are arranged at a pitch far smaller than the arrangement pitch of the conductive patterns 110 in the pixel region (4). Therefore, the plurality of conductive patterns 111G are largely narrowed in the outer side of the pixel area E1 in order to be connected to the driving IC. As a result, a plurality of conductive patterns H0 are formed on the outer side of the pixel region ei, and the interval between the connection regions E2 and the conductive patterns 11 which are arranged in parallel at a second interval smaller than the first interval gradually changes from the first interval to the first interval. Intermediate area E3. In the intermediate portion E3, almost all of the conductive patterns 110 are obliquely disposed to the x-axis or the γ-axis, and the arrangement angles of the conductive patterns 110 adjacent to each other are different. A conductive pad 112 is provided at the other end of each of the conductive patterns 110 (the end not connected to the side of the driving IC). The conductive pad 112 is formed to have a wider width than the conductive pattern 110, and the conductive pad 112 is used for supply and detection of various inspection signals. Next, the configuration of the conductive pattern inspection apparatus 10 for inspecting the conductive pattern formed on the substrate will be described with reference to Fig. 2 . Fig. 2 is a view showing a schematic configuration of a conductive pattern inspection device 10 of the present embodiment. In addition, the pattern of the conductive pattern 110b of the second layer is omitted in FIG. Hereinafter, according to the second figure, only the principle of discrimination of the disconnection position of the conductive pattern 110a of the first layer will be described, but the principle of discrimination is also for the conductive pattern of the second layer 2012bb 8 201248164. As described above, the conductive pattern inspection device ί is particularly effective for constructing the discrimination of the * disconnection position where the disconnection occurs in the conductive pattern 110 in which the disconnection occurs. In addition, the discriminating position of the disconnection is described in detail below. However, in addition to the discriminating function of the disconnection position, the conductive pattern inspection device 10 may be equipped with a judging function for judging whether or not there is a disconnection or a short circuit, an identification function for a short-circuit position, and the like. The conductive pattern inspection device 10 has an application mechanism 12 that applies an alternating voltage to the disconnected conductive pattern 110, a sensor 14 that detects the applied alternating voltage, and a signal that is output by performing a specified process on the detection signal of the sensor 14. The processing circuit, the sensor driving mechanism 16 that drives the sensor 14, the control unit 18 that controls the above-described members, and the like. The applying mechanism 12 is a mechanism for applying an AC voltage for inspection from one end of the disconnected conductive pattern 110 (the present embodiment is a conductive pad 112). The applying mechanism 12 is constituted, for example, by a contact terminal 20 that is in contact with the conductive pad 112, and an AC power source 22 that supplies an AC voltage to the conductive pattern 110 via the contact terminal 20. Further, in the present embodiment, the voltage is applied in a contact manner using the contact terminal 20, but an electrode electrostatically bonded to the conductive pattern 110 may be used to apply a voltage without contact. The sensor 14 is for detecting an applied alternating voltage, and the control unit 18 discriminates the moving direction or the disconnected position of the sensor 14 based on the detection result. The sensor 14 has three electrodes (the tracking electrode 30a, the tracking electrode 30b, and the disconnection detecting electrode 32) arranged in the Y direction (i.e., the direction in which the conductive patterns 110 are disposed). The sensor 14 is moved by the sensor drive mechanism 201248164 16 during the disconnection position check. The direction of its movement will be described in detail later, and it is based on
各電極(跟蹤電極3〇a、跟蹤電極3〇b與斷線檢測電極32) 之檢測信號而決定。 一個電極中，兩側的兩個電極(跟蹤電極30a與跟礙鼋 極30b)發揮檢測用於跟蹤感測器14之信號的跟蹤電極之功 月b另外，此兩個電極不作區別時，省略添加之英文字母 而稱為「跟蹤電極30」。此外，為了方便將第2圖中揭示於 上側的跟蹤電極30a稱為第一跟蹤電極，將揭示於下側的 跟蹤電極30b稱為第二跟蹤電極。此外，配置於兩個跟鞭 電極（跟蹤電極3〇a與跟蹤電極30b)之間的電極32係發撵 功能’其係檢測狀判斷從導電焊塾112 至感測0 14的現在位置之間是否發生斷線的信號。 _兩個跟縱電極30所檢測之信號經由差動放大器34及 同v檢波器36 ’作為跟縱信號Sa而輸入至控制部18。差 動放大益34將兩個跟縱電極3()所檢測之信號的差分敌大 後輸出㈤步檢波器36以施加於導電圖案110之信號同步 檢波來自該差動放大器34之輸出信號。控制部18依據從 “同γ檢波器36輸出之跟縱信號Sa，進行使感測器14位 於導電ϋ案11G之正上方的跟縱處理。 〇兩個跟蹤電極30及一個斷線檢測電極32所檢測之信 唬，經由兩個差動放大器（差動放大器38與差動放大器 40)、一個加法器42及一個.同步檢波器44，作為斷線檢測 信號sb而輪入至控制部18。兩個差動放大器（差動放大器 38與差動放大器40)將斷線檢測電極32之檢測信號與跟縱 10 201248164 之檢難號的差分放大後輸出。本實施態樣將斷線 極32之檢測信號連接於各差動放大器之負輸入。加 2將來自遠兩個差動放大器（差動放大器38與差動放 盗奶)之輪出信號相力口。同步檢波器44以施加於導電圖 ΐδ之^咸同步檢波來自該加法器42之輸出信號。控制 _道依據從該同步檢波器4 4輸出之斷線檢測信號s b，判 始L+電焊墊112至感測器14的現在位置之間是否發生斷 、本換言之’判斷感測器14衫到達斷線部位）。 其次，說明以該導電圖案檢查裝置職別斷線位置時 首先’就跟蹤信號Sa參照第3_4圖作說明。 圖係揭不感測器14之位置與從差動放大器 信號Sk的關係圖。此外，第4圖係揭示感測器^出之 與跟蹤信號Sa的關係圖。 之位置 本實施態樣中，設有三個電極(跟蹤電極3〇& 極3〇b與斷線檢測電極32)之感測器14經由間隙=礙電 相對配置，各電極(輯電極3Ga、跟㈣極3%』基板 測電極32)可與相對之導電圖案11〇靜電結合。因^研線檢 電壓之導電圖案，110位於一個電極之正下方時，此:施加 電極上感麟應於施加電壓之電壓，施加f 2該一個 ho未在一個電極之正下方時’則對該—個 2案 電壓。 戌十不感應 如第3圖中之狀況！，導電圖案11〇位於第一 遍之正下方時，在第一跟蹤電極3〇a巾感應對 電極 ㈣父机電堡，而在從導電圖案UG離開位置 罘二跟爯 11 201248164 電極30b中幾乎不感應電壓。因而，如第3圖之第一階段 所示，在該狀況1中，從第一跟蹤電極30a之檢測信號減 去第二跟蹤電極30b之檢測信號的信號之信號Sk，成為與 施加信號同步之交流信號。 反之，如第3圖中之狀況3,導電圖案110位於第二跟 蹤電極30b之正下方時，在第二跟蹤電極30b中感應對應 於施加電壓之交流電壓，而在從導電圖案110離開位置之 第一跟蹤電極30a中幾乎不感應電壓。因而，如第3圖之 第三階段所示，在該狀況3中，信號Sk成為與施加信號相 反相位之交流信號。 再者，如第3圖中之狀況2,導電圖案110位於斷線檢 測電極32正下方時，在第一跟蹤電極30a與第二跟蹤電極 30b中感應大致相同位準之交流電壓。換言之，兩個跟蹤電 極（第一跟蹤電極30a與第二跟蹤電極30b)之檢測信號中幾 乎無差分。因而，如第3圖之第二階段所示，在該狀況2 中，揭示兩個跟蹤電極（第一跟蹤電極30a與第二跟蹤電極 30b)之差分的信號Sk大致為0。 跟蹤信號Sa係該信號Sk乘以與施加信號（交流電壓） 同步之脈衝信號（參照第3圖之第四階段），並以施加信號同 步檢波信號Sk之信號。因而，該跟蹤信號Sa如第4圖所 示，於斷線檢測電極32位於導電圖案110之正上方時大致 為0,於第一跟蹤電極30a位於導電圖案110之正上方時成 為正值，於第二跟蹤電極30b位於導電圖案110之正上方 時成為負值。換言之，可依跟蹤信號Sa之值來判斷感測器 12 201248164 _· 14對導電圖案110在Y方向的位置。 本實施態樣係利角該原理判 . 110在Υ方向之你番，廿、隹一Β威剛器14對導電圖案 . Υ # fUSL晉,仃3蹤處理，調整感測器14之 γ方向位置，使斷線檢測電極32 斗之 方。具體而言，係反覆進行於跟卿1卢電圖案之正上 感測器14向Y方向正側（第一電二Sa之值為正時，使 跟蹤信號sa之值為負時，使感測侧)微小移動， 跟縱電極通側)微小移動之處理%4向丫方向負側（第二 ==進行此種跟蹤處理： :之=置仍可觸 1外，各電極之檢測信號中含㈣頻之雜訊，此種雜 訊^導致測量精度降低。但是，本實施態樣在取該兩個跟 . ㈣極（第一跟縱電才亟3〇續第二跟蹤電極3〇b)之檢測信號 ♦ 的差分時，抵銷兩檢測電極中所含的雜訊。結果可獲得良 好之S/N比。 其次說明斷線檢測信號sb。本實施態樣係在使斷線檢 測電極32位於導電圖案u〇之正上方的狀態下，依據該斷 線檢測電極32檢測之信號判斷有無斷線。亦即，從信號施 加位置至感測盗14的現在位置之間未發生斷線時’斷線檢 測電極32與施加電壓之導電圖案110相對。結果在斷線檢 測電極32中感應對應於施加電壓之電壓。另外，導電圖案 110中在超過斷線位置之部位不感應交流電壓。因此’感測 器14超過斷線位置時，在與斷線檢測電極32相對之導電 13 201248164 圖案110中不感應交流電壓，該斷線檢測電極32中亦3、 應電壓。因此可藉由觀看斷線檢測電極32之檢測僧號，$ 判斷感測器14是否超過斷線位置。 Λ 不過如上所述’各電極之檢測信號中通常含有高頻 雜訊，此種雜訊會導致測量精度降低。因此，本實施熊之 係取斷線檢測電極32與跟蹤電極30a及跟縱電;3〇:心樣 刀，來抵銷此等電極之檢測信號中所含的雜訊。 本實施恶樣為了將斷線檢測電極32之輸出信鱿 差動放大H 38與差動放大器4G之負輸人，於感別= 超過斷線位置時’係從各差較A||(差動就器 動放大器輸出與施加信號反相且已除去雜訊之，、f 由將此種與施加信號反減已除去雜訊之信號以加法 =错 相加，並以同步檢波器44同步檢波而輸出負的^ 本實施態樣中，於感測器14未超過斷線位 = 檢測信號Sb取負值。 了所綠 另外，感測器已超過斷線位置時， 跟蹤電極30a、第-棋納ίΦ# ^ ^ 一 電極30b斷線檢測電極與32)中幾 乎都不感應電壓。結果係使來自夂 „ ^ ^ , 于便來自各差動放大器（差動放大器 與差減u 4G)之輸㈣鼓致為〇,朗步檢波器 44輸出之斷線檢測信號sb亦大致為〇。 ° 換言之’依本實施態樣，於斷線檢測信號Sb為負時， 可判斷感測器14未超過斷線位置，於斷線檢測信號Sb大 致為0時，可判斷感測器14已超過斷線位置。 本實施態樣係利用此等原理進行斷線位置之鑑別。就 201248164 具體之斷線位置的鑑別流程參照第5圖作說明。第5圖係 揭示鑑別斷線位置之流程的流程圖。 a 在鑑別斷線位置時’首先，使感測器14移動於發生斷 線之導電圖案110 —端（施加信號之部位附近）的正上方 (S10)。其次，使感測器14向χ方向負侧（從導電焊墊112 離開之侧）只移動規定距離d程度（S12)。該規定距離d係依 鑑別斷線位置時要求之分_率來決定。例如斷線位置可以 10mm程度之分辨率來鑑別即可時，只須將規定距離d設定 為比該分辨率稍低之值，例如設定為5mm等即可。 使感測器14向X方向負側移動時，接著，執行使斷線 檢測電極32位於導電圖案11〇正上方之跟蹤處理(SM〜The detection signals of the respective electrodes (the tracking electrode 3A, the tracking electrode 3?b, and the disconnection detecting electrode 32) are determined. In one of the electrodes, two electrodes on both sides (the tracking electrode 30a and the tracking electrode 30b) function to detect the power of the tracking electrode for tracking the signal of the sensor 14. In addition, when the two electrodes are not distinguished, the ellipse is omitted. The English letter is added and is called "tracking electrode 30". Further, in order to facilitate the description of the tracking electrode 30a on the upper side in Fig. 2 as the first tracking electrode, the tracking electrode 30b disclosed on the lower side is referred to as a second tracking electrode. In addition, the electrode 32 disposed between the two whip electrodes (the tracking electrode 3a and the tracking electrode 30b) functions as a function of detecting the relationship between the current position of the conductive pad 112 and the sensing 0 14 Whether the signal of the disconnection occurs. The signals detected by the two vertical electrodes 30 are input to the control unit 18 via the differential amplifier 34 and the same v detector 36' as the vertical signal Sa. The differential amplification 34 combines the differential signals of the signals detected by the two vertical electrodes 3() with the output (5) step detector 36 to synchronously detect the output signal from the differential amplifier 34 with the signal applied to the conductive pattern 110. The control unit 18 performs vertical processing for placing the sensor 14 directly above the conductive pattern 11G from the vertical signal Sa output from the gamma detector 36. The two tracking electrodes 30 and one disconnection detecting electrode 32 are provided. The detected signal is passed to the control unit 18 via the two differential amplifiers (the differential amplifier 38 and the differential amplifier 40), one adder 42 and one synchronous detector 44 as the disconnection detection signal sb. The two differential amplifiers (the differential amplifier 38 and the differential amplifier 40) amplify the difference between the detection signal of the disconnection detecting electrode 32 and the detection signal of the vertical length 10 201248164, and output the disconnected pole 32 in this embodiment. The detection signal is connected to the negative input of each differential amplifier. The addition of 2 takes the wheel-out signal from the far two differential amplifiers (the differential amplifier 38 and the differential thief). The synchronous detector 44 is applied to the conductive The salt 同步 synchronous sync detects the output signal from the adder 42. The control_channel determines the current position of the L+ pad 112 to the sensor 14 based on the disconnection detection signal sb outputted from the synchronous detector 44. Whether it is broken, in other words 'Just the sensor 14 shirt to reach the broken position.> Next, when the position of the disconnection position of the device is checked by the conductive pattern, first, the tracking signal Sa will be described with reference to FIG. 3_4. The position of the sensor 14 is not shown. FIG. 4 is a diagram showing the relationship between the sensor and the tracking signal Sa. In addition, in the present embodiment, three electrodes are provided (tracking electrodes 3 〇 & The sensor 14 of the pole 3〇b and the disconnection detecting electrode 32) is disposed relative to each other via a gap=impedance, and each electrode (the electrode 3Ga, the bottom (four) pole 3% of the substrate measuring electrode 32) can be opposite to the conductive pattern 11 〇Electrostatic bonding. Because the conductive pattern of the voltage is detected, the 110 is located directly under one of the electrodes. This: the applied electrode is applied to the voltage of the applied voltage, and f 2 is applied. At the time of 'the case 2 voltage. 戌10 does not sense the situation as shown in Figure 3!, when the conductive pattern 11〇 is located directly below the first pass, the first tracking electrode 3〇a towel senses the opposite electrode (4) The father electromechanical fortress, while leaving the position from the conductive pattern UG罘The Achilles tendon 11 201248164 hardly induces a voltage in the electrode 30b. Therefore, as shown in the first stage of Fig. 3, in the case 1, the detection signal of the second tracking electrode 30b is subtracted from the detection signal of the first tracking electrode 30a. The signal Sk of the signal becomes an alternating current signal synchronized with the applied signal. Conversely, as in the case 3 of FIG. 3, when the conductive pattern 110 is located directly below the second tracking electrode 30b, the sensing in the second tracking electrode 30b corresponds to An alternating voltage of a voltage is applied, and a voltage is hardly induced in the first tracking electrode 30a from the position where the conductive pattern 110 is separated. Thus, as shown in the third stage of Fig. 3, in the case 3, the signal Sk is applied and applied. The alternating signal of the opposite phase of the signal. Further, as in the case 2 in Fig. 3, when the conductive pattern 110 is located directly below the disconnection detecting electrode 32, an AC voltage of substantially the same level is induced in the first tracking electrode 30a and the second tracking electrode 30b. In other words, there is almost no difference in the detection signals of the two tracking electrodes (the first tracking electrode 30a and the second tracking electrode 30b). Therefore, as shown in the second stage of Fig. 3, in this case 2, the signal Sk showing the difference between the two tracking electrodes (the first tracking electrode 30a and the second tracking electrode 30b) is substantially zero. The tracking signal Sa is a signal obtained by multiplying the signal Sk by a pulse signal synchronized with the applied signal (AC voltage) (refer to the fourth stage of Fig. 3), and synchronizing the signal of the detection signal Sk with the applied signal. Therefore, as shown in FIG. 4, the tracking signal Sa is substantially 0 when the disconnection detecting electrode 32 is located directly above the conductive pattern 110, and becomes a positive value when the first tracking electrode 30a is located directly above the conductive pattern 110. When the second tracking electrode 30b is located directly above the conductive pattern 110, it becomes a negative value. In other words, the position of the conductive pattern 110 in the Y direction of the sensor 12 201248164 _· 14 can be determined according to the value of the tracking signal Sa. This embodiment is based on the principle of the angle of the angle. 110 in the direction of the 之, 廿, 隹 Β Β Β 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 14 Position, so that the wire break detection electrode 32 is on the side of the bucket. Specifically, it is repeated on the positive side of the sensor 14 in the Y direction (the value of the first electric two Sa is positive, and the value of the tracking signal sa is negative, the sense is made Measuring side) small movement, with the longitudinal electrode side) slight movement processing %4 to the negative side of the 丫 direction (second == such tracking processing: : the = can still be touched 1, the detection signal of each electrode Containing (four) frequency noise, this kind of noise ^ leads to a decrease in measurement accuracy. However, in this embodiment, the two followers are taken. (four) poles (the first and the vertical power are only continued to follow the second tracking electrode 3〇b) When the difference of the detection signal ♦ is used, the noise contained in the two detection electrodes is offset. As a result, a good S/N ratio can be obtained. Next, the disconnection detection signal sb is explained. This embodiment is to make the disconnection detection electrode 32 is located directly above the conductive pattern u〇, and judges whether or not there is a disconnection according to the signal detected by the disconnection detecting electrode 32. That is, when there is no disconnection from the signal application position to the current position of the sensing stolen 14 The disconnection detecting electrode 32 is opposed to the conductive pattern 110 to which the voltage is applied. As a result, in the disconnection detecting electrode 32 It should correspond to the voltage of the applied voltage. In addition, the AC voltage is not induced in the portion of the conductive pattern 110 beyond the disconnection position. Therefore, when the sensor 14 exceeds the disconnection position, the conductive electrode 13 is opposite to the disconnection detecting electrode 32 201248164 The AC voltage is not induced in the pattern 110, and the voltage is also applied to the disconnection detecting electrode 32. Therefore, by detecting the detection nickname of the disconnection detecting electrode 32, it is judged whether or not the sensor 14 exceeds the disconnection position. As described above, the detection signals of the electrodes usually contain high-frequency noise, which causes the measurement accuracy to be degraded. Therefore, the bear system takes the break line detecting electrode 32 and the tracking electrode 30a and the vertical power; 〇: a heart-shaped knife to offset the noise contained in the detection signals of the electrodes. In this embodiment, the negative signal of the output signal of the disconnection detecting electrode 32 is differentially amplified by H 38 and the differential amplifier 4G. Person, in the sense of the sense = when the position exceeds the line breakage, the difference from the difference is A||(the differential amplifier output is inverted with the applied signal and the noise is removed, and f is reversed from the applied signal Subtract the signal from the noise to add = Wrong addition, and the synchronous detector 44 synchronously detects the output and outputs a negative value. In the present embodiment, the sensor 14 does not exceed the disconnection position = the detection signal Sb takes a negative value. When the disconnection position has been exceeded, almost no voltage is induced in the tracking electrode 30a, the first-negative ίΦ#^^-electrode 30b disconnection detecting electrode and 32). The result is that the 夂^^^ is derived from each difference. The input of the dynamic amplifier (differential amplifier and differential subtraction u 4G) (4) is caused by the drum, and the disconnection detection signal sb outputted by the step detector 44 is also roughly 〇. ° In other words, according to the embodiment, the disconnection detection is performed. When the signal Sb is negative, it can be determined that the sensor 14 does not exceed the disconnection position, and when the disconnection detection signal Sb is substantially zero, it can be determined that the sensor 14 has exceeded the disconnection position. This embodiment uses these principles to identify the location of the disconnection. The identification process for the specific disconnection position of 201248164 is explained with reference to Fig. 5. Figure 5 is a flow chart showing the flow of identifying the location of the break. a When discriminating the disconnection position First, the sensor 14 is moved directly above the end of the conductive pattern 110 where the disconnection occurs (near the portion where the signal is applied) (S10). Next, the sensor 14 is moved only to the negative side of the χ direction (the side away from the conductive pad 112) by a predetermined distance d (S12). The predetermined distance d is determined based on the required division rate when the disconnection position is discriminated. For example, when the disconnection position can be discriminated by a resolution of about 10 mm, it is only necessary to set the predetermined distance d to a value slightly lower than the resolution, for example, set to 5 mm or the like. When the sensor 14 is moved to the negative side in the X direction, next, tracking processing (SM~) in which the disconnection detecting electrode 32 is positioned directly above the conductive pattern 11 is performed.
S18)。亦即’如像素區域’當導電圖案ι1〇平行延伸於X 方向時，即使使感測器14移動於χ方向，仍是將斷線檢測 • 電極32位於導電圖案110之正上方。但是，如中間區域，S18). That is, when the conductive pattern ι1 〇 extends in the X direction in parallel, even if the sensor 14 is moved in the χ direction, the disconnection detecting electrode 32 is located directly above the conductive pattern 110. But like the middle area,
' 當導電圖案110不與X方向平行時，使感測器14移動於X 方向時’斷線檢測電極32對導電圖案u〇發生γ方向位置 偏移。因此’本實施態樣係每當使感測器14向χ方向負側 移動時，執行使斷線檢測電極32位於導電圖案UG之正上 方的跟縱處理，而使斷線檢測電極32始終位於導電圖案 110之正上方。 跟蹤處理時，首先確認跟縱信號Sa之值(S14)。跟蹤信 唬Sa揭不正的值時’斷線檢測電極32並未在導電圖案ιι〇 之正上方’而向第-跟縱電極3〇a側偏移。此時使感測器 14向Y方向正側（第2圖中之上方向）微小移動⑻幻。此 15 201248164 外，跟蹤信號Sa揭示負的值時，感測器14向第二跟蹤電 極30b側偏移。此時使感測器14向Y方向負側（第2圖中 之下方向）微小移動（S18)。而後，再度求出跟蹤信號Sa， 反覆進行此等動作，直至最後跟蹤信號Sa大致為0。 跟蹤信號Sa大致為0時，接著，執行判斷感測器14 是否到達斷線位置之判斷處理。判斷處理係確認斷線檢測 信號Sb之值（S20)。於斷線檢測信號Sb未達0時，判斷感 測器14未超過斷線位置，返回步驟S12。另外，於斷線檢 測信號Sb大致為0時，控制部18判斷感測器14已到達斷 線位置，而將該感測器14之位置鑑別為斷線位置（S22)。 從以上之說明瞭解，本實施態樣在判斷感測器14是否 到達斷線位置之前，係進行使感測器14位於導電圖案110 之正上方的跟蹤動作。結果，即使將第1圖所示之在中途 彎曲的導電圖案110作為對象時，仍可始終適當地保持感 測器14之位置。而後，藉此與導電圖案110之設置態樣無 關，可簡易地鑑別斷線位置。 此外5本貫施樣因為係將兩個電極所檢測之信號輸 入差動器，所以可抵銷除去兩個檢測信號中所含之雜訊。 結果可獲得良好之S/N比。 其次，就第二種實施態樣，參照第6圖作說明。第6 圖係揭示第二種實施態樣之導電圖案檢查裝置10的概略構 成圖。該導電圖案檢查裝置10係與第一種實施態樣之導電 圖案檢查裝置10相同，其係用於鑑別斷線位置之裝置。不 過，與第一種實施態樣不同的是，本實施態樣在感測器14 16 201248164 ·. ^僅设有兩個跟蹤電極（跟蹤電極30a與跟蹤電極3〇b)，在 . 忒兩個跟蹤電極（跟蹤電極30a與跟蹤電極3〇b)之間並未設 置斷線檢測電極32。 • 而後，本實施態樣與第一種實施態樣同樣地，係將從 兩個跟縱電極（跟縱電極30a與跟蹤電極3〇b)經過差動放大 器34’再從差動放大器34經過同步檢波器％而輸出之信 號作為跟蹤信號Sa，利用於跟蹤處理。此外，與第一種實 樣不同的疋，本實施態樣係將從二個跟縱電極♦施 經過差動放大器34,再從差動放大器34經過二極體而輸出 之信號作為斷線檢測信號sb，利用於判斷有無斷線之判斷 處理。 其次，以該導電圖案檢查裝置1G說明斷線位置之鑑別 原理。本實施態樣所獲得的跟蹤信號Sa具有與使用第3圖 與第4圖所說明之跟縱信號Sa同樣的特性。亦即，感測器 14中央(跟縱電極30a與跟縱電極3%之中間）位於導電圖 案m之正上方時，跟縱信號Sa大致為〇。另外，感測器 14、向第-跟縱電極30,偏移時，跟縱信號Sa為正的值， 感測器14向第二跟蹤電才虽3〇b側偏移時，跟縱信 負的值。控制部18依據該跟蹤信號Sa調整感測；;4之； 方向位置，使感測器14中央位於導電圖案ιι〇之正上方 其次’就本實施態樣之斷線檢測信號％作 ^奢 施態樣之斷線檢職號Sb雜跟㈣極*與^ 30b之差分信號整流的信號。此處，於感測器 位置時，當然在跟蹤電極施與跟縱電極3%中幾乎^ 17 201248164 應電壓，所以獲得之斷線檢測信號Sb亦大致為0。 其次，參照第7圖說明感測器14未超過斷線位置之情 況。感測器14不超過斷線位置，且感測器14之中央位於 導電圖案110之正上方時，由於來自差動放大器34之輸出 信號大致為0，因此從二極體46輸出之斷線檢測信號Sb 亦大致為0。另外，在感測器14不超過斷線位置之狀態下， 感測器14向第一跟蹤電極30a側或是第二跟蹤電極30b側 偏移時，從差動放大器34輸出一定位準之交流信號。藉由 將該交流信號輸入順方向配置之二極體46加以整流，而獲 得正的斷線檢測信號Sb。換言之，在感測器14未超過斷 線位置時，將感測器14向Y方向移動時，斷線檢測信號 Sb之值變動。 本實施態樣係利用該特性，依據使感測器14移動於Y 方向時斷線檢測信號Sb的變動，來判斷感測器14是否到 達斷線位置。 第8圖係揭示以該導電圖案檢查裝置10鑑別斷線位置 之流程的流程圖。該流程圖中，步驟S10到步驟S18與第 5圖相同。亦即，在鑑別斷線位置時，首先，使感測器14 位於成為對象之導電圖案110 —端的正上方（S10)。接著， 使感測器14向X方向負側只移動規定距離d(S12)。接著， 依據跟蹤信號Sa執行跟蹤動作，調整感測器14之Y方向 位置，使導電圖案110位於感測器14之中央正下方(S14〜 S18)。 跟蹤信號Sa大致為0，可判斷導電圖案110位於感測 18 201248164 器14之中央正下方時，接著，執行判斷處理，判斷感測器 * 14是否到達斷線位置（S20〜S26)。判斷處理中，首先使感 * 測器14向Y方向正側只移動規定距離e(S20)。該規定距離 * e之值並不特別限定，不過應為二個跟蹤電極30a，30b之Y 方向間隔的1/2。藉由採用該值，於步驟S20中，可使跟 蹤電極30b位於導電圖案110之正上方。 使感測器14向Y方向正側移動時，接著，確認此時之 斷線檢測信號Sb(S22)。斷線檢測信號Sb不為0，且為固 定大小以上之正值信號時，控制部18判斷感測器14尚未 到達斷線位置。此時，控制部18使感測器14向Y方向負 側只移動規定距離e(S24)，使導電圖案110位於感測器14 中央正下方後，返回步驟S12。 另外，斷線檢測信號Sb大致為0時，控制部18判斷 . 感測器14已到達斷線位置。此時，控制部18將感測器14 現在之位置鑑別為斷線位置，並結束處理（S26)。 從以上之說明瞭解，本實施態樣亦因為進行使感測器 14位於導電圖案110正上方之跟蹤動作，所以，即使對象 係在中途彎曲之導電圖案110，仍可使感測器14沿著導電 圖案110而移動。然後，藉此與導電圖案110之設置態樣 無關，可簡易地鑑別斷線。When the conductive pattern 110 is not parallel to the X direction, when the sensor 14 is moved in the X direction, the disconnection detecting electrode 32 is displaced in the γ direction from the conductive pattern u 。. Therefore, the present embodiment performs the vertical processing for causing the disconnection detecting electrode 32 to be located directly above the conductive pattern UG whenever the sensor 14 is moved to the negative side in the meandering direction, so that the disconnection detecting electrode 32 is always located. Directly above the conductive pattern 110. At the time of the tracking processing, the value of the vertical signal Sa is first confirmed (S14). When the tracking signal 揭 Sa reveals a value which is not correct, the disconnection detecting electrode 32 is not shifted right above the conductive pattern ι 〇 and is shifted toward the first-longitudinal electrode 3 〇 a side. At this time, the sensor 14 is slightly moved (8) in the Y direction (the upper direction in Fig. 2). In addition to the 15 201248164, when the tracking signal Sa reveals a negative value, the sensor 14 is shifted toward the second tracking electrode 30b side. At this time, the sensor 14 is slightly moved toward the negative side in the Y direction (the direction in the lower direction of Fig. 2) (S18). Then, the tracking signal Sa is again obtained, and these operations are repeated until the last tracking signal Sa is substantially zero. When the tracking signal Sa is substantially 0, next, a determination process of judging whether or not the sensor 14 has reached the disconnection position is performed. The judgment processing confirms the value of the disconnection detection signal Sb (S20). When the disconnection detection signal Sb has not reached 0, it is judged that the sensor 14 has not exceeded the disconnection position, and the flow returns to step S12. Further, when the disconnection detection signal Sb is substantially zero, the control unit 18 determines that the sensor 14 has reached the disconnection position, and discriminates the position of the sensor 14 as the disconnection position (S22). It is understood from the above description that the present embodiment performs a tracking operation for causing the sensor 14 to be positioned directly above the conductive pattern 110 before determining whether the sensor 14 has reached the disconnection position. As a result, even when the conductive pattern 110 bent in the middle shown in Fig. 1 is targeted, the position of the sensor 14 can always be appropriately maintained. Then, regardless of the arrangement of the conductive pattern 110, the disconnection position can be easily discriminated. In addition, since the five signals are input to the differential by the signals detected by the two electrodes, the noise contained in the two detection signals can be offset. As a result, a good S/N ratio can be obtained. Next, with regard to the second embodiment, reference is made to Fig. 6. Fig. 6 is a view showing a schematic configuration of a conductive pattern inspecting apparatus 10 of a second embodiment. The conductive pattern inspection device 10 is the same as the conductive pattern inspection device 10 of the first embodiment, and is a device for discriminating the disconnection position. However, unlike the first embodiment, the present embodiment is provided with only two tracking electrodes (the tracking electrode 30a and the tracking electrode 3〇b) in the sensor 14 16 201248164 ·. The disconnection detecting electrode 32 is not provided between the tracking electrodes (the tracking electrode 30a and the tracking electrode 3〇b). Then, in the same manner as the first embodiment, the present embodiment passes from the two vertical electrodes (with the vertical electrode 30a and the tracking electrode 3〇b) through the differential amplifier 34' and then from the differential amplifier 34. The signal output by the synchronous detector % is used as the tracking signal Sa for the tracking process. In addition, the present embodiment is different from the first one, and the present embodiment is a signal that is output from the two vertical electrodes ♦ through the differential amplifier 34 and then from the differential amplifier 34 through the diode as a disconnection detection. The signal sb is used for judging whether or not there is a disconnection. Next, the principle of discrimination of the disconnection position will be described by the conductive pattern inspection device 1G. The tracking signal Sa obtained in the present embodiment has the same characteristics as the vertical signal Sa described using Figs. 3 and 4. That is, when the center of the sensor 14 (between the vertical electrode 30a and the vertical electrode 3%) is located directly above the conductive pattern m, the vertical signal Sa is substantially 〇. Further, when the sensor 14 is shifted to the first-longitudinal electrode 30, the vertical signal Sa is a positive value, and the sensor 14 is shifted to the second tracking electric power while the 3〇b side is shifted. Negative value. The control unit 18 adjusts the sensing according to the tracking signal Sa; the direction of the position is such that the center of the sensor 14 is located directly above the conductive pattern ιι, and secondly, the % of the disconnection detection signal of the present embodiment is used as a luxury The state of the disconnection inspection number Sb miscellaneous (four) pole * and ^ 30b differential signal rectification signal. Here, in the case of the sensor position, of course, the tracking electrode is applied with almost 3% of the vertical electrode 3%, and the obtained disconnection detection signal Sb is also substantially zero. Next, referring to Fig. 7, the case where the sensor 14 does not exceed the disconnection position will be described. When the sensor 14 does not exceed the disconnection position, and the center of the sensor 14 is directly above the conductive pattern 110, since the output signal from the differential amplifier 34 is substantially zero, the disconnection detection from the output of the diode 46 is performed. The signal Sb is also approximately zero. In addition, when the sensor 14 is shifted to the first tracking electrode 30a side or the second tracking electrode 30b side in a state where the sensor 14 does not exceed the disconnection position, a differential current is output from the differential amplifier 34. signal. The positive disconnection detecting signal Sb is obtained by rectifying the alternating current signal into the diode 46 arranged in the forward direction. In other words, when the sensor 14 is moved in the Y direction when the sensor 14 does not exceed the disconnection position, the value of the disconnection detection signal Sb fluctuates. This embodiment uses this characteristic to determine whether or not the sensor 14 has reached the disconnection position in accordance with the fluctuation of the disconnection detection signal Sb when the sensor 14 is moved in the Y direction. Fig. 8 is a flow chart showing the flow of discriminating the disconnection position by the conductive pattern inspection device 10. In the flowchart, steps S10 to S18 are the same as those in Fig. 5. That is, when discriminating the disconnection position, first, the sensor 14 is placed directly above the end of the conductive pattern 110 to be the object (S10). Next, the sensor 14 is moved only by a predetermined distance d toward the negative side in the X direction (S12). Next, the tracking operation is performed in accordance with the tracking signal Sa, and the Y-direction position of the sensor 14 is adjusted so that the conductive pattern 110 is located directly below the center of the sensor 14 (S14 to S18). The tracking signal Sa is substantially 0, and it can be judged that the conductive pattern 110 is located directly below the center of the sensing 18 201248164, and then the determination processing is executed to determine whether the sensor * 14 has reached the disconnection position (S20 to S26). In the judging process, first, the sensor 14 is moved by a predetermined distance e toward the positive side in the Y direction (S20). The value of the prescribed distance * e is not particularly limited, but should be 1/2 of the interval between the two tracking electrodes 30a, 30b in the Y direction. By using this value, the tracking electrode 30b can be positioned directly above the conductive pattern 110 in step S20. When the sensor 14 is moved to the positive side in the Y direction, next, the disconnection detection signal Sb at this time is confirmed (S22). When the disconnection detection signal Sb is not 0 and is a positive value signal of a fixed size or more, the control unit 18 determines that the sensor 14 has not reached the disconnection position. At this time, the control unit 18 moves the sensor 14 by a predetermined distance e toward the negative side in the Y direction (S24), and the conductive pattern 110 is positioned directly below the center of the sensor 14, and then returns to step S12. Further, when the disconnection detection signal Sb is substantially zero, the control unit 18 determines that the sensor 14 has reached the disconnection position. At this time, the control unit 18 discriminates the current position of the sensor 14 as the disconnection position, and ends the processing (S26). It is understood from the above description that the present embodiment also performs the tracking action of positioning the sensor 14 directly above the conductive pattern 110. Therefore, even if the object is bent in the middle of the conductive pattern 110, the sensor 14 can be caused to follow along. The conductive pattern 110 moves. Then, regardless of the arrangement of the conductive pattern 110, the disconnection can be easily discriminated.
此外，如本實施態樣，即使僅有兩個電極，仍可正確 地判斷有無斷線。再者，本實施態樣亦與第一種實施態樣 同樣地，因為係將兩個電極所檢測之信號輸入差動器，所 以可抵銷除去兩檢測信號中所含之雜訊，可獲得良好之S/N 19 201248164 比。 其次，就第三種實施態樣，參照第9圖作說明。第9 · 圖係揭示第三種實施態樣之導電圖案檢查裝置1〇的概略褥· 成圖。該導電圖案檢查裝置1〇係與第一種實施態樣及第k · 種實施態樣之導電圖案檢查裝置10相同，其係用於鑑別斷 線位置之裝置。不過，與第一種實施態樣不同的是，本實 施態樣在感測器14中僅設有跟蹤電極3〇a與跟蹤電極 3〇b，在該跟蹤電極3〇a與跟蹤電極3〇b之間未設置斷線檢 測電極32。此外，本實施態樣與第一、第二種實施態樣不 同的是，不通過差動放大器而構成。 亦即’本實施態樣係以放大器48放大來自第一跟縱電 極30a之輸出信號，並以順方向配置之第一二極體52將其 放大信號予以整流。此外，以放大器50放大來自第二跟蹤 電極3〇b之輸出信號，並以反方向配置之第二二極體54將 其放大信號予以整流。而後，將來自第一二極體52與第二· 二極體54之輸出信號以加法器58相加的信號作為跟蹤信-唬Sa。此外，將從第一二極體52之輸出信號減去來自第二 二極體54之輸出信號的差分信號作為斷線檢測信號外。 第10圖係揭示本實施態樣之感測器的位置與跟縱 信號Sa及斷線檢測信號Sb之關係圖。首先就跟蹤信號％ 作說明。考慮感測器14不超過斷線位置，且感測器14之 中央位於導電圖案11〇之正上方的情況。此時，從各二極 體52’ 54輸出之信號均為G。因此，將來自該第—二極體 52與第二二極體54的輸出信號相加的跟蹤信號％亦大致 20 201248164 為o 〇 * 另外，當第一跟蹤電極30a位於導電圖案110之正上 * 方時，成為在第一跟蹤電極30a中感應對應於施加電壓之 * 交流電壓，而在第二跟蹤電極30b中幾乎不施加電壓的狀 態。此時，從第一二極體52輸出指定位準之正的信號，而 從第二二極體54輸出大致為0之信號。而後，將此等兩個 信號相加的跟蹤信號Sa成為正的值。反之，當第二跟蹤電 極30b位於導電圖案110之正上方時，從第一二極體52輸 出大致為0之信號，而從第二二極體54輸出指定位準之負 的信號。而後，將此等兩個信號相加的跟蹤信號Sa成為負 的值。 因此，感測器14未超過斷線位置時，跟蹤信號Sa理 論上如第10圖之右側以粗線所揭示，當感測器14之中央 . 位於導電圖案110之正上方時大致為0，當感測器14偏移 於Y方向時，成為依其偏移量之大小，且依偏移方向之正 或負的信號。不過，本實施態樣因為並未取跟蹤電極30a 與跟蹤電極30b之檢測信號的差分，所以跟蹤信號Sa中仍 然殘留各電極之檢測信號中所含的雜訊。因此，實際獲得 之跟縱信號Sa成為如第10圖之右側細線所揭示的含有雜 訊之信號。 其次，就斷線檢測信號Sb作說明。當感測器· 14超過 斷線位置時，與感測器14之Y方向位置無關，各電極無法 與施加電壓之導電圖案110相對。因而，此時與感測器14 之Y方向位置無關，獲得之斷線檢測信號Sb大致為0。 21 201248164 此外，感測器14未超過斷線位置，且感測器14之中 央位於導電圖案110之正上方時，亦因為各電極從導電圖 案110離開，所以各電極中感應之電壓降低。因此，此畴 亦為各電極檢測之信號大致為0，所獲得之斷線檢測信k Sb亦大致為0。 另外，考慮感測器14未超過斷線位置，且第一跟蹤電 極30a位於導電圖案110之正上方的情況。此時，在第一 跟蹤電極30a中感應一定位準之交流電壓，而在第二跟蹤 電極30b中幾乎不感應電壓。結果，從第一二極體52輸出 正的信號，而從第二二極體54輸出大致為0的信號。而後， 此等差分信號之斷線檢測信號Sb成為正的信號。 此外，考慮感測器14未超過斷線位置，且第二跟蹤電 極30b位於導電圖案110之正上方的情況。此時，在第二 跟蹤電極30b中感應一定位準之交流電壓，而在第一跟蹤 電極30a中幾乎不感應電壓。結果，從第二二極體54輸出 負的信號，而從第一二極體52輸出大致為0的信號。而後， 因為來自該第二二極體54之輸出連接於差分器56之負輸 入，所以從差分器56輸出正的信號作為斷線檢測信號Sb。 因此，在感測器14未超過斷線位置情況下，斷線檢測 信號Sb理論上如第10圖之中央以粗線所揭示，當感測器 14中央位於導電圖案110之正上方時，成為大致為0的信 號，當感測器14對導電圖案110偏移於Y方向情況下，成 為正的信號。不過如該，本實施態樣因為並未取跟蹤電極 30a與跟縱電極30b之檢測信號的差分，所以實際在斷線檢 22 201248164 測信號Sb中，如第10圖之中央以細線所標示地殘留雜訊。 ' 控制部18進行跟蹤處理，依據該跟蹤信號Sa調整感 • 測器14之Y方向位置，並進行判斷處理，依據斷線檢測信 • 號Sb判斷感測器14是否到達斷線位置。而後，藉由反覆 進行此等跟蹤處理、判斷處理及使感測器14移動於X方向 的移動處理，來鑑別斷線位置。因為鑑別斷線位置之具體 流程與第8圖相同，所以此處省略詳細說明。 總之，本實施態樣亦因為進行跟蹤動作，使感測器14 位於導電圖案110之正上方，所以即使對象為在中途彎曲 之導電圖案110，仍可使感測器14沿著導電圖案110而移 動。然後，藉此與導電圖案110之設置態樣無關，可簡易 地鑑別斷線。 其次，就第四種實施態樣參照第11圖作說明。第11 . 圖係揭示第四種實施態樣之導電圖案檢查裝置10的概略構 成圖。該導電圖案檢查裝置10係與第一到第三種實施態樣 之導電圖案檢查裝置10不同，其係用於鑑別短路位置之裝 置。 該導電圖案檢查裝置10具有在彼此短路之兩個導電圖 案110中施加交流電壓的施加機構12 ;及在基板上經由間 隙相對而移動之檢測線圈60。施加機構12例如由接觸於導 電圖案110 —端（本實施態樣係導電焊墊112)之兩個接觸端 子（接觸端子20a與接觸端子20b);及經由接觸端子20a與 接觸端子20b在導電圖案110上供應交流電壓之交流電源 22等構成。藉由經由兩個接觸端子(接觸端子20a與接觸端 23 201248164 子20b)施加交流電壓，而形成由彼此短路之兩個導電圖案 110及短路部分構成的封閉電路（第11圖中以粗線表示之電 路）’並在該封閉電路内流入電流。而後’措由電流流入.’ 在兩個導電圖案110之周圍形成依電流方向及大小的磁場。 檢測線圈6 0係檢測形成於導電圖案110之周圍的磁場 作為電壓值之線圈60。亦即，使檢測線圈60位於形成於導 電圖案110周圍之磁場内時.，在檢測線圈60中流入對應於 該磁場之電流。而後，在檢測線圈60中感應對應於該電流 大小之電壓。 檢測線圈60之一端連接於差動放大器62的正輸入， 檢測線圈60之另一端連接於差動放大器62的負輸入。同 步檢波器64以施加信號同步檢波來自該差動放大器62之 輸出信號。來自該同步檢波器64之輸出信號作為跟蹤信號 Sa而輸入控制部18。 此外，來自差動放大器62之輸出信號以順方向配置之 二極體66加以整流。該整流後之信號作為利用於判斷有無 短路時之短路檢測信號Sb而輸入控制部18。控制部18依 據跟蹤信號Sa控制檢測線圈60之Y方向位置，並依據短 路檢測信號Sb判斷檢測線圈60是否超過短路部位。 第12圖係揭示該檢測線圈60之位置與獲得之信號的 關係圖，且分別在圖之右側揭示跟蹤信號Sa，在中央揭示 短路檢測信號Sb。 首先，就跟蹤信號Sa作說明。如第11圖所示，彼此 短路之兩個導電圖案110周圍產生的磁場方向，成為彼此 24 201248164 相反方向。因而’在兩個導電圖案110中間產生磁場之抵 銷。因此’當檢測線圈6 0位於兩個導電圖案110之中間時’ ' 檢測線圈60中感應之電壓大致為0。另外，當檢測線圈60 • 偏移於任何一方導電圖案110側時，在該檢測線圈60周圍 不產生磁場之抵銷，因而在檢測線圈60中感應一定位準之 交流電壓。結果，跟蹤信號Sa於檢測線圈60偏移於一方 導電圖案110侧（第11圖上側之導電圖案110側）時，成為 正的信號，檢測線圈60偏移於另一方導電圖案110側（第 11圖下側之導電圖案110側）時，成為負的信號。控制部 18依據該原理控制檢測用線圈60之Y方向位置，使跟蹤 信號Sa之值大致為0。 其次，就短路檢測信號Sb作說明。如前所述，當檢測 線圈60位於兩個導電圖案110中間時，檢測線圈60中感 . 應之電壓大致為0。另外，當檢測線圈60偏移於任何一方 導電圖案110侧時，在檢測線圈60中感應一定位準之交流 電壓。該交流電壓在通過順方向配置之二極體的過程變換 成正的信號。因而，結果短路檢測信號Sb於檢測線圈60 偏移時，成為依該偏移量大小之正的信號。另外，當然， 於檢測線圈60超過短路部位時，因為該檢測線圈60中幾 乎不感應電壓，所以短路檢測信號Sb亦大致為0。控制部 18依據該原理使檢測線圈60移動於Y方向，此時獲得之 短路檢測信號中有變動時，判斷為不超過短路部位；短路 檢測信號幾乎不變動時，判斷為已超過短路部位。 第13圖係揭示本實施態樣之短路位置的鑑別流程之流 25 201248164 程圖。在鑑別短路位置時，首先，使檢測線圈60位於彼此 短路之兩個導電圖案110之間，且在端部附近（導電焊墊112 附近)(S10)。在其狀態下，使檢測線圈60向X方向負側（從 導電焊墊112離開之側）只移動規定距離d(S12)。 使檢測線圈60移動於X方向負側時，接著，執行跟蹤 處理，使檢測線圈60位於二個導電圖案110之間（S14〜 S18)。具體而言，係確認跟蹤信號Sa之值(S14)。確認結果， 跟蹤信號Sa大致為0時，判斷檢測線圈60在適當位置。 另外，跟蹤信號Sa係正的值時，使檢測線圈60向Y方向 負側；跟蹤信號Sa係負的值時向Y方向正側分別移動微小 距離（S16、S18)。而後，再度反覆進行確認跟蹤信號Sa之 值的作業，直至跟蹤信號Sa大致為0。 跟蹤信號Sa大致為0,可判斷檢測線圈60位於兩個導 電圖案110之間時，接著，執行判斷處理，判斷檢測線圈 60是否到達短路部位。具體而言，係將檢測線圈60移動於 Y方向正側（S20)。該移動量應為導電圖案110之設置間距 的1/2,在步驟S22中使檢測線圈60位於一方導電圖案110 之正上方。而後，在其狀態下，確認短路檢測信號Sb之值 (S22)。確認結果，短路檢測信號Sb並非大致為0時，判 斷檢測線圈60尚未到達短路部位。此時，使檢測線圈60 移動於Y方向負側（S24)，返回原來位置後，再返回步驟 S12。另外，短路檢測信號Sb大致為0時，判斷檢測線圈 60已到達短路部位，鑑別此時刻檢測線圈60之位置為短路 部位（S26)。 26 201248164 m, • ，，從以上之說明瞭解，即使在鑑別短路位置時，因為 . 係進行跟軸作，使檢測線圈6 G之位置位於兩個導電圖 • 110之間’所以，即使對象是中途彎曲之導電圖案11〇,仍 可使檢測線圈60沿著導電圖案11〇而移動。然後，藉此虚 導電圖案110之設置態樣無關，可簡易地鑑別短路位曰置Γ 【圖式簡單說明】 第1圖係揭示本發明之作為檢查對象的基板之範例 圖。 第2圖係第-種實施態樣之導電圖案檢查裝置的概略 構成圖。 第3圖係揭示感測器位置與輸出信號之關係圖。 第4圖係揭不感測器位置與跟蹤信號之關係圖。 4 第5圖係揭示鑑別斷線位置之流程的流程圖。 • 帛6圖得、第二種實施態樣之導電圖案檢查裝置的概略 構成圖。 第7圖係揭示感測器位置與斷線檢測信號之關係圖。 第8圖係揭示第二種實施態樣中之鑑別斷線位置的流 程之流程圖。 第9圖係第二種實施態樣之導電圖案檢查裝置的概略 構成圖。 第10圖係揭示感測器位置與跟蹤信號及斷線檢測信號 之關係圖。 第11圖係第四種實施態樣之導電圖案檢查裝置的概略 27 201248164 構成圖。 苐12圖係揭不檢測用線圈與跟縱信號及短路檢測信號 之關係圖。 第13圖係揭示第四種實施態樣中之鑑別斷線位置的流 程之流程圖。 【主要元件符號說明】 10 導電圖案檢查裝置 12 施加機構 14 感測器 16 感測器驅動機構 18 控制部 20, 20a, 20b 接觸端子 22 交流電源 30a, 30b 跟蹤電極 32 斷線檢測電極 34 差動放大器 36 同步檢波器 38, 40 差動放大器 42 加法器 44 同步檢波器 46 二極體 48 放大器 50 放大器 28 201248164 52 第一二極體 54 第二二極體 56 差分器 58 加法器 60 檢測線圈 62 差動放大器 64 同步檢波器 66 二極體 110, 110a, 110b 導電圖案 112 導電焊墊 El 像素區域 E2 連接區域 E3 中間區域 S10-S26 步驟 Sa 跟縱信號 Sb 斷線檢測信號 Sk 信號 d 規定距離 e 規定距離 29Further, as in the present embodiment, even if there are only two electrodes, it is possible to correctly judge the presence or absence of the disconnection. Furthermore, the present embodiment is also similar to the first embodiment in that the signals detected by the two electrodes are input to the differential, so that the noise contained in the two detection signals can be offset and obtained. Good S/N 19 201248164 ratio. Next, with regard to the third embodiment, reference is made to Fig. 9. Fig. 9 is a schematic view showing the outline of the conductive pattern inspection device 1 of the third embodiment. The conductive pattern inspection device 1 is the same as the conductive pattern inspection device 10 of the first embodiment and the k-th embodiment, and is a device for discriminating the disconnection position. However, unlike the first embodiment, in the present embodiment, only the tracking electrode 3A and the tracking electrode 3B are provided in the sensor 14, and the tracking electrode 3a and the tracking electrode 3 are disposed. The disconnection detecting electrode 32 is not provided between b. Further, this embodiment differs from the first and second embodiments in that it is constructed without a differential amplifier. That is, the present embodiment amplifies the output signal from the first vertical electrode 30a with the amplifier 48, and rectifies the amplified signal by the first diode 52 arranged in the forward direction. Further, the output signal from the second tracking electrode 3〇b is amplified by the amplifier 50, and the amplified signal is rectified by the second diode 54 disposed in the reverse direction. Then, a signal obtained by adding the output signals of the first diode 52 and the second diode 54 to the adder 58 is used as a tracking signal - 唬 Sa. Further, the differential signal from the output signal of the second diode 52 is subtracted from the output signal of the first diode 52 as a disconnection detection signal. Fig. 10 is a view showing the relationship between the position of the sensor of the present embodiment and the vertical signal Sa and the disconnection detection signal Sb. First, the tracking signal % is explained. Consider the case where the sensor 14 does not exceed the disconnection position and the center of the sensor 14 is located directly above the conductive pattern 11A. At this time, the signals output from the respective diodes 52' 54 are all G. Therefore, the tracking signal % of the output signals from the second diode 52 and the second diode 54 is also approximately 20 201248164 is o 〇 * In addition, when the first tracking electrode 30a is located directly above the conductive pattern 110 In the case of the square, the AC voltage corresponding to the applied voltage is induced in the first tracking electrode 30a, and the voltage is hardly applied to the second tracking electrode 30b. At this time, a positive signal of the designated level is output from the first diode 52, and a signal of substantially zero is output from the second diode 54. Then, the tracking signal Sa obtained by adding these two signals becomes a positive value. On the other hand, when the second tracking electrode 30b is located directly above the conductive pattern 110, a signal of substantially zero is output from the first diode 52, and a negative signal of the designated level is output from the second diode 54. Then, the tracking signal Sa to which these two signals are added becomes a negative value. Therefore, when the sensor 14 does not exceed the disconnection position, the tracking signal Sa is theoretically as shown by a thick line on the right side of FIG. 10, and is substantially 0 when the center of the sensor 14 is located directly above the conductive pattern 110. When the sensor 14 is shifted in the Y direction, it becomes a signal according to the magnitude of the offset and positive or negative depending on the offset direction. However, in this embodiment, since the difference between the detection signals of the tracking electrode 30a and the tracking electrode 30b is not taken, the noise contained in the detection signals of the respective electrodes remains in the tracking signal Sa. Therefore, the actually obtained vertical signal Sa becomes a signal containing noise as revealed by the thin line on the right side of Fig. 10. Next, the disconnection detection signal Sb will be described. When the sensor 14 exceeds the disconnection position, regardless of the position of the sensor 14 in the Y direction, each electrode cannot be opposed to the conductive pattern 110 to which the voltage is applied. Therefore, at this time, regardless of the position of the sensor 14 in the Y direction, the obtained disconnection detection signal Sb is substantially zero. 21 201248164 In addition, when the sensor 14 does not exceed the disconnection position, and the center of the sensor 14 is directly above the conductive pattern 110, also because the electrodes are separated from the conductive pattern 110, the induced voltage in each electrode is lowered. Therefore, the domain also detects that the signal detected by each electrode is substantially zero, and the obtained disconnection detection signal k Sb is also substantially zero. In addition, it is considered that the sensor 14 does not exceed the disconnection position, and the first tracking electrode 30a is located directly above the conductive pattern 110. At this time, a positioning AC voltage is induced in the first tracking electrode 30a, and a voltage is hardly induced in the second tracking electrode 30b. As a result, a positive signal is output from the first diode 52, and a signal of substantially zero is output from the second diode 54. Then, the disconnection detection signal Sb of the differential signals becomes a positive signal. Further, it is considered that the sensor 14 does not exceed the disconnection position, and the second tracking electrode 30b is located directly above the conductive pattern 110. At this time, a positioning AC voltage is induced in the second tracking electrode 30b, and a voltage is hardly induced in the first tracking electrode 30a. As a result, a negative signal is output from the second diode 54, and a signal of substantially zero is output from the first diode 52. Then, since the output from the second diode 54 is connected to the negative input of the differentiator 56, a positive signal is output from the differentiator 56 as the disconnection detection signal Sb. Therefore, in the case where the sensor 14 does not exceed the disconnection position, the disconnection detection signal Sb is theoretically disclosed as a thick line in the center of FIG. 10, and when the center of the sensor 14 is located directly above the conductive pattern 110, A signal of substantially zero is a positive signal when the sensor 14 is offset from the Y direction by the conductive pattern 110. However, in this embodiment, since the difference between the detection signals of the tracking electrode 30a and the vertical electrode 30b is not taken, the actual detection signal Sb in the disconnection detection 22 201248164 is indicated by a thin line in the center of FIG. Residual noise. The control unit 18 performs tracking processing, adjusts the position of the sensor 14 in the Y direction based on the tracking signal Sa, and performs determination processing to determine whether the sensor 14 has reached the disconnection position based on the disconnection detection signal Sb. Then, by performing such tracking processing, determination processing, and movement processing for moving the sensor 14 in the X direction, the disconnection position is discriminated. Since the specific flow for discriminating the disconnection position is the same as that of Fig. 8, the detailed description is omitted here. In summary, in this embodiment, the sensor 14 is located directly above the conductive pattern 110 because the tracking operation is performed, so that even if the object is the conductive pattern 110 bent in the middle, the sensor 14 can be along the conductive pattern 110. mobile. Then, regardless of the arrangement of the conductive patterns 110, the disconnection can be easily discriminated. Next, the fourth embodiment will be described with reference to FIG. Fig. 11 is a view showing a schematic configuration of a conductive pattern inspecting apparatus 10 of a fourth embodiment. The conductive pattern inspection device 10 is different from the conductive pattern inspection device 10 of the first to third embodiments in that it is a device for identifying a short-circuit position. The conductive pattern inspection device 10 has an application mechanism 12 that applies an alternating voltage in two conductive patterns 110 short-circuited to each other; and a detection coil 60 that moves relative to each other via a gap on the substrate. The application mechanism 12 is, for example, two contact terminals (contact terminal 20a and contact terminal 20b) that are in contact with the end of the conductive pattern 110 (the conductive pad 112 of the present embodiment); and the conductive pattern via the contact terminal 20a and the contact terminal 20b. 110 is composed of an AC power source 22 that supplies an AC voltage. By applying an alternating voltage via two contact terminals (contact terminal 20a and contact terminal 23 201248164 sub 20b), a closed circuit composed of two conductive patterns 110 and short-circuit portions short-circuited to each other is formed (indicated by a thick line in FIG. 11) The circuit) 'and flows current into the closed circuit. Then, the current flows in. The magnetic field in the direction and magnitude of the current is formed around the two conductive patterns 110. The detecting coil 60 detects a magnetic field formed around the conductive pattern 110 as a coil 60 of a voltage value. That is, when the detecting coil 60 is placed in the magnetic field formed around the conductive pattern 110, a current corresponding to the magnetic field flows into the detecting coil 60. Then, a voltage corresponding to the magnitude of the current is induced in the detecting coil 60. One end of the detecting coil 60 is connected to the positive input of the differential amplifier 62, and the other end of the detecting coil 60 is connected to the negative input of the differential amplifier 62. The sync detector 64 synchronously detects the output signal from the differential amplifier 62 with an applied signal. The output signal from the synchronous detector 64 is input to the control unit 18 as a tracking signal Sa. Further, the output signal from the differential amplifier 62 is rectified by the diode 66 arranged in the forward direction. The rectified signal is input to the control unit 18 as a short-circuit detection signal Sb for determining whether or not there is a short circuit. The control unit 18 controls the position of the detection coil 60 in the Y direction based on the tracking signal Sa, and determines whether or not the detection coil 60 exceeds the short-circuited portion based on the short-circuit detection signal Sb. Fig. 12 is a view showing the relationship between the position of the detecting coil 60 and the obtained signal, and revealing the tracking signal Sa on the right side of the figure and the short-circuit detecting signal Sb in the center. First, the tracking signal Sa is explained. As shown in Fig. 11, the directions of the magnetic fields generated around the two conductive patterns 110 short-circuited to each other become opposite directions to each other 24 201248164. Thus, a magnetic field offset is generated between the two conductive patterns 110. Therefore, the voltage induced in the detecting coil 60 is substantially zero when the detecting coil 60 is located between the two conductive patterns 110. Further, when the detecting coil 60 is offset from the side of any one of the conductive patterns 110, no offset of the magnetic field is generated around the detecting coil 60, so that a sensed alternating voltage is induced in the detecting coil 60. As a result, the tracking signal Sa becomes a positive signal when the detection coil 60 is shifted to the side of one of the conductive patterns 110 (on the side of the conductive pattern 110 on the upper side in FIG. 11), and the detection coil 60 is shifted to the side of the other conductive pattern 110 (11th) When the conductive pattern 110 side of the lower side is shown, it becomes a negative signal. The control unit 18 controls the position of the detecting coil 60 in the Y direction in accordance with this principle so that the value of the tracking signal Sa is substantially zero. Next, the short-circuit detection signal Sb will be described. As described above, when the detecting coil 60 is located between the two conductive patterns 110, the sense voltage in the detecting coil 60 is substantially zero. Further, when the detecting coil 60 is shifted to the side of any one of the conductive patterns 110, a positioning AC voltage is induced in the detecting coil 60. The AC voltage is converted to a positive signal during the process of passing through the diodes arranged in the forward direction. Therefore, as a result, when the detection coil 60 is shifted, the short-circuit detection signal Sb becomes a positive signal according to the magnitude of the offset. Further, of course, when the detecting coil 60 exceeds the short-circuited portion, since the detecting coil 60 hardly induces a voltage, the short-circuit detecting signal Sb is also substantially zero. The control unit 18 moves the detection coil 60 in the Y direction according to the principle. When the short-circuit detection signal obtained at this time fluctuates, it is determined that the short-circuit portion is not exceeded. When the short-circuit detection signal hardly changes, it is determined that the short-circuit portion has been exceeded. Figure 13 is a flow chart showing the process of identifying the short-circuit position of the present embodiment. In the discrimination of the short-circuit position, first, the detecting coil 60 is placed between the two conductive patterns 110 short-circuited to each other, and in the vicinity of the end portion (near the conductive pad 112) (S10). In this state, the detection coil 60 is moved by a predetermined distance d toward the negative side in the X direction (the side away from the conductive pad 112) (S12). When the detecting coil 60 is moved to the negative side in the X direction, tracking processing is then performed so that the detecting coil 60 is positioned between the two conductive patterns 110 (S14 to S18). Specifically, the value of the tracking signal Sa is confirmed (S14). As a result of the confirmation, when the tracking signal Sa is substantially zero, it is judged that the detection coil 60 is at an appropriate position. Further, when the tracking signal Sa is a positive value, the detection coil 60 is made to the negative side in the Y direction; and when the tracking signal Sa is a negative value, the small distance is shifted to the positive side in the Y direction (S16, S18). Then, the operation of confirming the value of the tracking signal Sa is repeated again until the tracking signal Sa is substantially zero. The tracking signal Sa is substantially 0, and when it is judged that the detecting coil 60 is located between the two conductive patterns 110, next, a determination process is performed to determine whether or not the detecting coil 60 has reached the short-circuited portion. Specifically, the detecting coil 60 is moved to the positive side in the Y direction (S20). The amount of movement should be 1/2 of the pitch of the conductive pattern 110, and the detecting coil 60 is placed directly above one of the conductive patterns 110 in step S22. Then, in its state, the value of the short detection signal Sb is confirmed (S22). As a result of the confirmation, when the short-circuit detection signal Sb is not substantially zero, it is judged that the detection coil 60 has not yet reached the short-circuited portion. At this time, the detection coil 60 is moved to the negative side in the Y direction (S24), and returns to the original position, and then returns to step S12. Further, when the short-circuit detecting signal Sb is substantially zero, it is judged that the detecting coil 60 has reached the short-circuited portion, and the position of the detecting coil 60 is identified as the short-circuited portion (S26). 26 201248164 m, • , , From the above description, even if the short-circuit position is identified, because the axis is made, the position of the detection coil 6 G is between the two conductive patterns • 110, so even if the object is The conductive pattern 11〇 bent in the middle can still move the detecting coil 60 along the conductive pattern 11〇. Then, the short-circuit position can be easily identified by the setting of the dummy conductive pattern 110. [Schematic Description of the Drawing] Fig. 1 is a view showing an example of a substrate to be inspected of the present invention. Fig. 2 is a schematic configuration diagram of a conductive pattern inspecting apparatus of the first embodiment. Figure 3 is a diagram showing the relationship between sensor position and output signal. Figure 4 is a diagram showing the relationship between the sensor position and the tracking signal. 4 Figure 5 is a flow chart showing the flow of identifying the location of the break. • A schematic diagram of a conductive pattern inspection device of the second embodiment, which is shown in Fig. 6. Figure 7 is a diagram showing the relationship between the position of the sensor and the wire breakage detection signal. Fig. 8 is a flow chart showing the flow of the discrimination disconnection position in the second embodiment. Fig. 9 is a schematic configuration diagram of a conductive pattern inspecting apparatus of a second embodiment. Figure 10 is a diagram showing the relationship between the sensor position and the tracking signal and the disconnection detection signal. Figure 11 is a schematic view of a conductive pattern inspecting apparatus of a fourth embodiment. The 苐12 diagram reveals the relationship between the detection coil and the vertical signal and the short-circuit detection signal. Fig. 13 is a flow chart showing the flow of the discrimination disconnection position in the fourth embodiment. [Main component symbol description] 10 Conductive pattern inspection device 12 Application mechanism 14 Sensor 16 Sensor drive mechanism 18 Control portion 20, 20a, 20b Contact terminal 22 AC power source 30a, 30b Tracking electrode 32 Wire breakage detecting electrode 34 Differential Amplifier 36 Synchronous Detector 38, 40 Differential Amplifier 42 Adder 44 Synchronous Detector 46 Diode 48 Amplifier 50 Amplifier 28 201248164 52 First Diode 54 Second Dipole 56 Differentiator 58 Adder 60 Detector Coil 62 Differential amplifier 64 synchronous detector 66 diode 110, 110a, 110b conductive pattern 112 conductive pad El pixel area E2 connection area E3 intermediate area S10-S26 step Sa and vertical signal Sb disconnection detection signal Sk signal d prescribed distance e Specified distance 29