TWM549351U - Inspection device for determining quality of conduction pattern - Google Patents
Inspection device for determining quality of conduction pattern Download PDFInfo
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本創作涉及一種用於判定一導電圖案好壞之檢查裝置,尤指一種用於判定一液晶用玻璃基板的導電圖案好壞之檢查裝置。 The present invention relates to an inspection apparatus for determining whether a conductive pattern is good or bad, and more particularly to an inspection apparatus for determining whether a conductive pattern of a liquid crystal substrate is good or bad.
在例如液晶顯示器之玻璃基板上形成導電圖案後有必要對其是否良好進行檢測。亦即,對導電圖案所包含之複數個平行條列式圖案(或複數個彼此間互不導電之子圖案)之導通或斷路需以一檢查裝置逐一檢測。 After forming a conductive pattern on a glass substrate such as a liquid crystal display, it is necessary to detect it well. That is, the conduction or disconnection of a plurality of parallel strip patterns (or a plurality of sub-patterns that are not electrically conductive with each other) included in the conductive pattern is detected one by one by an inspection device.
上述檢查裝置,在例如:液晶顯示器等具有導電圖案之領域中有其重要性,而如何而可使其更加精進是一值得深思之問題。 The above inspection apparatus is important in the field of a conductive pattern such as a liquid crystal display, and how to make it more sophisticated is a problem worth pondering.
職是之故,創作人鑒於習知技術之缺失,乃思及改良創作之意念,終能創作出本案之「用於判定一導電圖案好壞之檢查裝置」。 As a result of his position, the creator, in view of the lack of prior art, is thinking and improving the idea of creation, and can finally create the "inspection device for determining the quality of a conductive pattern" in this case.
本案之主要目的在於提供一種用於判定一導電圖案好壞之檢查裝置,以更精簡之構型來提升該檢查裝置之可靠度與降低該檢查裝置之相關生產與製造成本。 The main purpose of the present invention is to provide an inspection apparatus for determining the quality of a conductive pattern, to improve the reliability of the inspection apparatus and to reduce the associated production and manufacturing costs of the inspection apparatus in a more compact configuration.
本案之又一主要目的在於提供一種用於判定一導電圖案好壞之檢查裝置,其中該導電圖案具有複數個平行圖案,且各該平行圖案具有一第一端、一中點與一第二端,該檢查裝置包含:一直流電源,提供一直流電壓,一供電感測器,接收該直流電壓,耦合於該複數個平行圖案中之一特定平行圖案,與該特定平行圖案之該第一端間具有一預設之第一距離,且提供一施加波形予該第一端,其中該供電感測器與該第一端間因該直流電壓而形成一第一電容值,且該特定平行圖案之該中點與一接地間因該第一電容值而被充電至具有一第二電容值,一電荷放大器,以及一受電感測器,電連接於該電荷放大器,耦合於該特定平行圖案之該第二端,與該第二端間具有一預設之第二距離,和該第二端間因該第二電容值而具有一第三電容值,且輸出一接收波形至該電荷放大器,其中該電荷放大器基於該接收波形而表明該特定平行圖案之好壞,且該檢查裝置基於該特定平行圖案之好壞判定該導電圖案之好壞。 Another main object of the present invention is to provide an inspection apparatus for determining the quality of a conductive pattern, wherein the conductive pattern has a plurality of parallel patterns, and each of the parallel patterns has a first end, a midpoint, and a second end. The inspection device includes: a DC power supply, providing a DC voltage, a power supply sensor, receiving the DC voltage, and coupling to a specific parallel pattern of the plurality of parallel patterns, the first end of the specific parallel pattern Having a predetermined first distance, and providing an applied waveform to the first end, wherein the power supply sensor and the first end form a first capacitance value due to the DC voltage, and the specific parallel pattern The midpoint and a ground are charged to have a second capacitance value due to the first capacitance value, a charge amplifier, and an inductor, electrically connected to the charge amplifier, coupled to the specific parallel pattern. The second end has a predetermined second distance from the second end, and the second end has a third capacitance value due to the second capacitance value, and outputs a receiving waveform to the charge , Wherein the charge amplifier based on the received waveform shows that the quality of the particular pattern of parallel, and the quality inspection device determines good or bad based on the conductive pattern of the particular pattern of parallel.
本案之另一主要目的在於提供一種用於判定一導電圖案好壞之檢查裝置,其中該導電圖案具有複數個平行圖案,且各該平行圖案具有一第一端與一第二端,該檢查裝置包含:一供電感測器,自一直流電源接收一直流電壓,耦合於該複數個平行圖案中之一特定平行圖案且提 供一直流檢查訊號予該特定平行圖案之該第一端,一電荷放大器,以及一受電感測器,耦合於該特定平行圖案之該第二端,電連接於該電荷放大器,且輸出一接收波形至該電荷放大器以表明該特定平行圖案之好壞,且該檢查裝置基於該特定平行圖案之好壞判定該導電圖案之好壞。 Another main object of the present invention is to provide an inspection apparatus for determining the quality of a conductive pattern, wherein the conductive pattern has a plurality of parallel patterns, and each of the parallel patterns has a first end and a second end, the inspection device The method includes: a power supply sensor, receiving a DC voltage from a DC power source, coupling to a specific parallel pattern of the plurality of parallel patterns and providing The first end of the specific parallel pattern is supplied to the first end of the specific parallel pattern, a charge amplifier, and an inductor, coupled to the second end of the specific parallel pattern, electrically connected to the charge amplifier, and outputted to receive A waveform is applied to the charge amplifier to indicate the quality of the particular parallel pattern, and the inspection device determines whether the conductive pattern is good or bad based on the quality of the particular parallel pattern.
本案之下一主要目的在於提供一種用於判定一導電圖案好壞之檢查裝置,其中該導電圖案具有複數個彼此間互不導電之子圖案,且各該子圖案具有一第一端與一第二端,該檢查裝置包含:一供電感測器,自一直流電源接收一直流電壓,耦合於該複數個子圖案中之一特定子圖案且提供一直流檢查訊號予該特定子圖案之該第一端,一電荷放大器,以及一受電感測器,耦合於該特定子圖案之該第二端,電連接於該電荷放大器,且輸出一接收波形至該電荷放大器以表明該特定子圖案之好壞,且該檢查裝置基於該特定子圖案之好壞判定該導電圖案之好壞。 A primary object of the present invention is to provide an inspection apparatus for determining whether a conductive pattern is good or not, wherein the conductive pattern has a plurality of sub-patterns that are mutually non-conductive, and each of the sub-patterns has a first end and a second End, the inspection device includes: a power supply sensor, receiving a DC voltage from the DC power source, coupling to a specific sub-pattern of the plurality of sub-patterns, and providing a DC test signal to the first end of the specific sub-pattern a charge amplifier, and an inductor, coupled to the second end of the particular sub-pattern, electrically coupled to the charge amplifier, and outputting a receive waveform to the charge amplifier to indicate the quality of the particular sub-pattern, And the inspection device determines whether the conductive pattern is good or bad based on the quality of the specific sub-pattern.
為了讓本創作之上述目的、特徵、和優點能更明顯易懂,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下: In order to make the above objects, features, and advantages of the present invention more comprehensible, the preferred embodiments are described below, and the accompanying drawings are described in detail as follows:
1‧‧‧檢查裝置 1‧‧‧Checking device
10‧‧‧直流電源 10‧‧‧DC power supply
11‧‧‧供電感測器 11‧‧‧Power sensor
12‧‧‧受電感測器 12‧‧‧Inductance detector
13‧‧‧電荷放大器 13‧‧‧Charger amplifier
2‧‧‧導電圖案 2‧‧‧ conductive pattern
21‧‧‧特定平行圖案 21‧‧‧Specific parallel patterns
C1‧‧‧第一等效電容 C1‧‧‧First equivalent capacitance
C2‧‧‧第二等效電容 C2‧‧‧Second equivalent capacitance
C3‧‧‧第三等效電容 C3‧‧‧ third equivalent capacitance
第一圖:其係顯示一依據本創作構想之較佳實施例的檢查裝置依序逐一檢測一導電圖案之複數個平行圖案的示意 圖。 The first figure shows a schematic diagram of detecting a plurality of parallel patterns of a conductive pattern one by one according to the inspection apparatus of the preferred embodiment of the present invention. Figure.
第二圖:其係顯示一依據本創作構想之較佳實施例的檢查裝置耦合於所檢測之導電圖案的一特定平行圖案之示意圖。 Second Figure: A schematic diagram showing a particular parallel pattern of an inspection device coupled to a detected conductive pattern in accordance with a preferred embodiment of the present inventive concept.
第三圖:其係顯示對應於第二圖之一等效電路之電路圖。 Third figure: It shows a circuit diagram corresponding to an equivalent circuit of one of the second figures.
第四圖(a):其係顯示一依據本創作構想之較佳實施例的檢查裝置耦合於所檢測之導電圖案的一特定平行圖案且該特定平行圖案的兩端間彼此連通時之電路示意圖。 Figure 4 (a) is a schematic diagram showing a circuit in which an inspection apparatus according to a preferred embodiment of the present invention is coupled to a specific parallel pattern of the detected conductive pattern and the two ends of the specific parallel pattern are in communication with each other. .
第四圖(b):其係顯示一依據本創作構想之較佳實施例的檢查裝置耦合於所檢測之導電圖案的一特定平行圖案且該特定平行圖案的兩端間彼此斷路時之電路示意圖。 FIG. 4(b) is a circuit diagram showing a method in which an inspection apparatus according to a preferred embodiment of the present invention is coupled to a specific parallel pattern of the detected conductive pattern and the ends of the specific parallel pattern are disconnected from each other .
本創作的構想是提出一種檢查裝置,藉由提供直流的檢查信號(具有一施加波形)給例如:液晶顯示器之玻璃基板上所設置的複數個平行條列式圖案(Pattern)其中之一的一端,在該特定平行條列式圖案對應的另一端藉由檢出信號(具有一接收波形)以研判該特定平行條列式圖案是否導通或斷路,俾據以判定該導電圖案的好壞。 The idea of the present invention is to provide an inspection apparatus for providing one end of one of a plurality of parallel strip patterns provided on a glass substrate of a liquid crystal display by providing a direct current inspection signal (having an applied waveform). At the other end corresponding to the specific parallel strip pattern, a detection signal (having a received waveform) is used to determine whether the specific parallel strip pattern is turned on or off, thereby determining whether the conductive pattern is good or bad.
第一圖是顯示一依據本創作構想之較佳實施例的檢查裝置依序逐一檢測一導電圖案之複數個平行圖案的示意圖。如第一圖所示,該檢查裝置包含一供電感測器11與一受電感測器12,且該檢查裝置按照箭頭所示方 向,由上到下依序逐一檢測該導電圖案2之各該平行圖案21的左右兩端間是彼此導通或者具有斷路。 The first figure is a schematic diagram showing a plurality of parallel patterns of a conductive pattern sequentially inspected by an inspection apparatus according to a preferred embodiment of the present invention. As shown in the first figure, the inspection device includes a power sensor 11 and a sensor 12, and the device is indicated by an arrow. The left and right ends of each of the parallel patterns 21 of the conductive pattern 2 are detected to be electrically connected to each other or have an open circuit in order from the top to the bottom.
第二圖是顯示一依據本創作構想之較佳實施例的檢查裝置耦合於所檢測之導電圖案的一特定平行圖案之示意圖。在第二圖中,該檢查裝置1包含一直流電源10、一供電感測器11、一受電感測器12與一電荷放大器13。 The second figure is a schematic diagram showing a particular parallel pattern of an inspection device coupled to the detected conductive pattern in accordance with a preferred embodiment of the present inventive concept. In the second figure, the inspection apparatus 1 includes a DC power supply 10, a power supply sensor 11, a sensed detector 12, and a charge amplifier 13.
如第二圖所示為一用於判定一導電圖案好壞之檢查裝置1,其中該導電圖案(參看第一圖中所示之導電圖案2)具有複數個平行圖案21,且各該平行圖案21具有一第一端、一中點與一第二端,該檢查裝置1的該直流電源10提供一直流電壓,該供電感測器11接收該直流電壓、耦合於該複數個平行圖案中之一特定平行圖案21、與該特定平行圖案21之該第一端間具有一預設之第一距離、且提供一施加波形(其為一直流檢查信號)予該第一端,其中該供電感測器11與該第一端間因該直流電壓而形成一第一電容值(該供電感測器11與該第一端間具有一第一等效電容C1),且該特定平行圖案之該中點與一接地間因該第一電容值而被充電至具有一第二電容值(該特定平行圖案之該中點與該接地間具有一第二等效電容C2),該受電感測器12電連接於該電荷放大器13、耦合於該特定平行圖案21之該第二端、與該第二端間具有一 預設之第二距離、和該第二端間因該第二電容值而具有一第三電容值(該受電感測器12和該第二端間具有一第三等效電容C3)、且輸出一接收波形至該電荷放大器13;其中該電荷放大器13基於該接收波形而可表明該特定平行圖案21之好壞,且該檢查裝置1基於該特定平行圖案21之好壞判定該導電圖案2之好壞。亦即,當依序經過逐一之檢查而獲知:該複數個平行圖案21的所有的各該第一端與對應之該第二端間均為連通時,則該導電圖案2是正常的(或者是好的)。而當該複數個平行圖案21的至少其中之一的該第一端與對應之該第二端間為斷路時,則該導電圖案是不正常的(或者是壞的)。 As shown in the second figure, an inspection apparatus 1 for determining whether a conductive pattern is good or not, wherein the conductive pattern (see the conductive pattern 2 shown in the first figure) has a plurality of parallel patterns 21, and each of the parallel patterns 21 has a first end, a midpoint and a second end, the DC power source 10 of the inspection device 1 provides a DC voltage, and the power sensor 11 receives the DC voltage and is coupled to the plurality of parallel patterns. a specific parallel pattern 21, having a predetermined first distance from the first end of the specific parallel pattern 21, and providing an applied waveform (which is a DC test signal) to the first end, wherein the power supply sense A first capacitance value is formed between the detector 11 and the first end due to the DC voltage (the first power supply sensor 11 and the first end have a first equivalent capacitance C1), and the specific parallel pattern The midpoint and a ground are charged to have a second capacitance value due to the first capacitance value (the second equivalent capacitor C2 between the midpoint of the specific parallel pattern and the ground), the inductive detector 12 electrically connected to the charge amplifier 13 and coupled to the specific parallel pattern 21 Between the second end and the second end The preset second distance and the second end have a third capacitance value due to the second capacitance value (the third inductance capacitor C3 is connected between the inductor 12 and the second end), and Outputting a received waveform to the charge amplifier 13; wherein the charge amplifier 13 can indicate the quality of the specific parallel pattern 21 based on the received waveform, and the inspection device 1 determines the conductive pattern 2 based on the quality of the specific parallel pattern 21 Good or bad. That is, when the inspection is performed one by one, it is known that when all the first ends of the plurality of parallel patterns 21 are in communication with the corresponding second end, the conductive pattern 2 is normal (or It's good). When the first end of at least one of the plurality of parallel patterns 21 is disconnected from the corresponding second end, the conductive pattern is abnormal (or bad).
第三圖是顯示對應於第二圖之一等效電路之電路圖。在第三圖中顯示該直流電源10與該特定平行圖案21間具有該第一等效電容C1,該特定平行圖案21與該接地間具有該第二等效電容C2,且該特定平行圖案21與該電荷放大器13間具有該第三等效電容C3。 The third figure is a circuit diagram showing an equivalent circuit corresponding to one of the second figures. In the third figure, the DC power supply 10 and the specific parallel pattern 21 have the first equivalent capacitance C1. The specific parallel pattern 21 and the ground have the second equivalent capacitance C2, and the specific parallel pattern 21 The third equivalent capacitance C3 is provided between the charge amplifier 13 and the charge amplifier 13.
第四圖(a)是顯示一依據本創作構想之較佳實施例的檢查裝置耦合於所檢測之導電圖案的一特定平行圖案且該特定平行圖案的兩端間彼此連通時之電路示意圖。如前所述,各該特定平行圖案21為複數個平行條列式之圖案的其中之一(其在一不同之較佳實施例中亦可為複數個彼此間互不導電之子圖案的其中之一),該導電圖 案2是設置於例如:一液晶顯示器所包含之一玻璃基板上。該供電感測器11對該特定平行圖案21提供一施加波形,且該受電感測器12自該特定平行圖案21接收一接收波形。 The fourth diagram (a) is a circuit diagram showing a method in which an inspection apparatus according to a preferred embodiment of the present invention is coupled to a specific parallel pattern of the detected conductive pattern and both ends of the specific parallel pattern are in communication with each other. As described above, each of the specific parallel patterns 21 is one of a plurality of parallel strip patterns (which in a different preferred embodiment may also be a plurality of sub-patterns that are mutually non-conductive with each other). a), the conductive map Case 2 is disposed on, for example, a glass substrate included in a liquid crystal display. The power supply sensor 11 provides an applied waveform to the specific parallel pattern 21, and the sensed sensor 12 receives a received waveform from the specific parallel pattern 21.
在第四圖(a)中所示之該施加波形為具有一大於零之電位之一步級函數(step function),而在第四圖(a)中所示之該接收波形具有一上升邊與一大於零之上升時間,當該接收波形具有該上升邊與該大於零之上升時間時,則該特定平行圖案21之該第一端與該第二端間是正常連通的。 The applied waveform shown in the fourth diagram (a) is a step function having a potential greater than zero, and the received waveform shown in the fourth diagram (a) has a rising edge and A rise time greater than zero, when the received waveform has the rising edge and the rising time greater than zero, the first end of the specific parallel pattern 21 is normally in communication with the second end.
第四圖(b)是顯示一依據本創作構想之較佳實施例的檢查裝置耦合於所檢測之導電圖案的一特定平行圖案且該特定平行圖案的兩端間彼此斷路時之電路示意圖。同樣的,該供電感測器11對該特定平行圖案21提供一施加波形,且該受電感測器12自該特定平行圖案21接收一接收波形。 The fourth diagram (b) is a circuit diagram showing a method in which an inspection apparatus according to a preferred embodiment of the present invention is coupled to a specific parallel pattern of the detected conductive pattern and the ends of the specific parallel pattern are disconnected from each other. Similarly, the power supply sensor 11 provides an applied waveform to the specific parallel pattern 21, and the sensed device 12 receives a received waveform from the specific parallel pattern 21.
在第四圖(b)中所示之該施加波形亦為具有一大於零之電位之一步級函數(step function),而在第四圖(b)中所示之該接收波形為一零態響應(zero state response)。當該接收波形為該零態響應(其具有一零電位)時,則可知該特定平行圖案21之該第一端與該第二端間是斷路。 The applied waveform shown in the fourth diagram (b) is also a step function having a potential greater than zero, and the received waveform shown in the fourth diagram (b) is a zero state. Zero state response. When the received waveform is the zero state response (which has a zero potential), it can be seen that the first end of the specific parallel pattern 21 is disconnected from the second end.
實施例: Example:
1.一種用於判定一導電圖案好壞之檢查裝置,其中該導電圖案具有複數個平行圖案,且各該平行圖案具有一第一端、一中點與一第二端,該檢查裝置包含:一直流電源,提供一直流電壓;一供電感測器,接收該直流電壓,耦合於該複數個平行圖案中之一特定平行圖案,與該特定平行圖案之該第一端間具有一預設之第一距離,且提供一施加波形予該第一端,其中該供電感測器與該第一端間因該直流電壓而形成一第一電容值,且該特定平行圖案之該中點與一接地間因該第一電容值而被充電至具有一第二電容值;一電荷放大器;以及一受電感測器,電連接於該電荷放大器,耦合於該特定平行圖案之該第二端,與該第二端間具有一預設之第二距離,和該第二端間因該第二電容值而具有一第三電容值,且輸出一接收波形至該電荷放大器,其中該電荷放大器基於該接收波形而表明該特定平行圖案之好壞,且該檢查裝置基於該特定平行圖案之好壞判定該導電圖案之好壞。 An inspection apparatus for determining the quality of a conductive pattern, wherein the conductive pattern has a plurality of parallel patterns, and each of the parallel patterns has a first end, a midpoint and a second end, and the inspection apparatus comprises: a DC power supply for providing a DC voltage; a power supply sensor receiving the DC voltage coupled to one of the plurality of parallel patterns and having a predetermined pattern between the first end of the specific parallel pattern a first distance, and providing an applied waveform to the first end, wherein the power supply sensor and the first end form a first capacitance value due to the DC voltage, and the midpoint of the specific parallel pattern and the The grounding ground is charged to have a second capacitance value due to the first capacitance value; a charge amplifier; and an inductor detector electrically connected to the charge amplifier coupled to the second end of the specific parallel pattern, and The second end has a predetermined second distance, and the second end has a third capacitance value due to the second capacitance value, and outputs a receiving waveform to the charge amplifier, wherein the charge amplifier base This indicates that the quality of the received waveform and a particular pattern of parallel, and the quality inspection device determines good or bad based on the conductive pattern of the particular pattern of parallel.
2.根據實施例1所述之檢查裝置,其中各該平行圖案為一平行條列式之圖案,該導電圖案是設置於一液晶顯示器所包含之一玻璃基板上,該施加波形為具有一大於零之電位之一步級函數(step function),當該接收波形為 一零態響應(zero state response)時,該特定平行圖案之該第一端與該第二端間是斷路,而當該接收波形具有一上升邊與一大於零之上升時間時,該特定平行圖案之該第一端與該第二端間是正常連通的。 2. The inspection apparatus according to embodiment 1, wherein each of the parallel patterns is a parallel strip pattern, the conductive pattern is disposed on a glass substrate included in a liquid crystal display, and the applied waveform has a larger than One of the zero potential steps function, when the received waveform is a zero state response, the first end of the particular parallel pattern is open between the second end, and the specific parallel when the received waveform has a rising edge and a rise time greater than zero The first end of the pattern is in normal communication with the second end.
3.根據實施例1或2所述之檢查裝置,更包括一第一等效電容、一第二等效電容與一第三等效電容,其中該第一等效電容具有該第一電容值且電連接於該供電感測器與該特定平行圖案之該第一端之間,該第二等效電容具有該第二電容值且電連接於該特定平行圖案之該中點與該接地間,而該第三等效電容具有該第三電容值且電連接於該受電感測器與該特定平行圖案之該第二端之間。 3. The inspection apparatus according to embodiment 1 or 2, further comprising a first equivalent capacitor, a second equivalent capacitor and a third equivalent capacitor, wherein the first equivalent capacitor has the first capacitor value And electrically connected between the power supply sensor and the first end of the specific parallel pattern, the second equivalent capacitance has the second capacitance value and is electrically connected to the midpoint of the specific parallel pattern and the ground And the third equivalent capacitor has the third capacitance value and is electrically connected between the inductor and the second end of the specific parallel pattern.
4.根據以上任一實施例所述之檢查裝置,其中當該複數個平行圖案的至少其中之一的該第一端與對應之該第二端間為斷路時,則該導電圖案是不正常的。 4. The inspection apparatus according to any of the above embodiments, wherein the conductive pattern is abnormal when the first end of at least one of the plurality of parallel patterns is disconnected from the corresponding second end of.
5.根據以上任一實施例所述之檢查裝置,其中當該複數個平行圖案的所有的各該第一端與對應之該第二端間均為連通時,則該導電圖案是正常的。 5. The inspection apparatus according to any of the preceding embodiments, wherein the conductive pattern is normal when all of the first ends of the plurality of parallel patterns are in communication with the corresponding second end.
6.根據以上任一實施例所述之檢查裝置,其中該複數個平行圖案之各該平行圖案被依序檢查是否是正常的。 6. The inspection apparatus according to any of the above embodiments, wherein the parallel patterns of the plurality of parallel patterns are sequentially checked to see if they are normal.
7.一種用於判定一導電圖案好壞之檢查裝置,其中該導電圖案具有複數個平行圖案,且各該平行圖案具有一第一端與一第二端,該檢查裝置包含:一供電感測器,自一直流電源接收一直流電壓,耦合於該複數個平行圖案中之一特定平行圖案且提供一直流檢查訊號予該特定平行圖案之該第一端;一電荷放大器;以及一受電感測器,耦合於該特定平行圖案之該第二端,電連接於該電荷放大器,且輸出一接收波形至該電荷放大器以表明該特定平行圖案之好壞,且該檢查裝置基於該特定平行圖案之好壞判定該導電圖案之好壞。 7. An inspection apparatus for determining the quality of a conductive pattern, wherein the conductive pattern has a plurality of parallel patterns, and each of the parallel patterns has a first end and a second end, the inspection device comprising: a power supply sensing Receiving a DC voltage from a DC power source, coupling to a specific parallel pattern of the plurality of parallel patterns and providing a DC test signal to the first end of the specific parallel pattern; a charge amplifier; and an inductor a second end coupled to the specific parallel pattern, electrically coupled to the charge amplifier, and outputting a receive waveform to the charge amplifier to indicate the quality of the particular parallel pattern, and the inspection device is based on the particular parallel pattern Good or bad determines whether the conductive pattern is good or bad.
8.根據實施例7所述之檢查裝置,其中各該平行圖案更包括一中點,該直流檢查訊號為具有一大於零之電位之一步級函數(step function),該供電感測器與該特定平行圖案之該第一端間具有一預設之第一距離,該供電感測器與該特定平行圖案之該第一端間形成一第一電容值,且該特定平行圖案之該中點與一接地間因該第一電容值而被充電至具有一第二電容值,該受電感測器與該特定平行圖案之該第二端間具有一預設之第二距離,且該受電感測器和該特定平行圖案之該第二端間因該第二電容值而具有一第三電容值。 8. The inspection apparatus of embodiment 7, wherein each of the parallel patterns further comprises a midpoint, the DC scan signal being a step function having a potential greater than zero, the power sensor and the Between the first end of the specific parallel pattern having a predetermined first distance, the power sensor and the first end of the specific parallel pattern form a first capacitance value, and the midpoint of the specific parallel pattern And a ground is charged to have a second capacitance value due to the first capacitance value, and the received inductor and the second end of the specific parallel pattern have a predetermined second distance, and the inductor is inductive The detector and the second end of the particular parallel pattern have a third capacitance value due to the second capacitance value.
9.根據實施例7或8所述之檢查裝置,其中當 所有該複數個平行圖案的該第一端與對應之該第二端間均為連通時,則該導電圖案是正常的。 9. The inspection apparatus according to embodiment 7 or 8, wherein When all of the first ends of the plurality of parallel patterns are in communication with the corresponding second ends, the conductive pattern is normal.
10.根據以上任一實施例所述之檢查裝置,其中當該複數個平行圖案的至少其中之一的該第一端與對應之該第二端間為斷路時,則該導電圖案是不正常的。 10. The inspection apparatus according to any of the above embodiments, wherein the conductive pattern is abnormal when the first end of at least one of the plurality of parallel patterns is disconnected from the corresponding second end of.
11.一種用於判定一導電圖案好壞之檢查裝置,其中該導電圖案具有複數個彼此間互不導電之子圖案,且各該子圖案具有一第一端與一第二端,該檢查裝置包含:一供電感測器,自一直流電源接收一直流電壓,耦合於該複數個子圖案中之一特定子圖案且提供一直流檢查訊號予該特定子圖案之該第一端;一電荷放大器;以及一受電感測器,耦合於該特定子圖案之該第二端,電連接於該電荷放大器,且輸出一接收波形至該電荷放大器以表明該特定子圖案之好壞,且該檢查裝置基於該特定子圖案之好壞判定該導電圖案之好壞。 11. An inspection apparatus for determining the quality of a conductive pattern, wherein the conductive pattern has a plurality of sub-patterns that are mutually non-conductive, and each of the sub-patterns has a first end and a second end, the inspection device comprising a power supply sensor for receiving a DC voltage from a DC power source, coupling to a specific sub-pattern of the plurality of sub-patterns, and providing a DC test signal to the first end of the specific sub-pattern; a charge amplifier; An inductive detector coupled to the second end of the specific sub-pattern, electrically coupled to the charge amplifier, and outputting a receive waveform to the charge amplifier to indicate the quality of the particular sub-pattern, and the inspection device is based on the The quality of the specific sub-pattern determines whether the conductive pattern is good or bad.
綜上所述,本創作提供一種用於判定一導電圖案好壞之檢查裝置,以更精簡之構型來提升該檢查裝置之可靠度與降低該檢查裝置之相關生產與製造成本,故其確實具有進步性與新穎性。 In summary, the present invention provides an inspection apparatus for determining whether a conductive pattern is good or bad, and improves the reliability of the inspection apparatus and reduces the related production and manufacturing costs of the inspection apparatus in a more compact configuration, so Progressive and novel.
是以,縱使本案已由上述之實施例所詳細敘 述而可由熟悉本技藝之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。 Therefore, even though the case has been detailed in the above examples It can be modified by those skilled in the art, and is not intended to be protected by the scope of the patent application.
1‧‧‧檢查裝置 1‧‧‧Checking device
10‧‧‧直流電源 10‧‧‧DC power supply
11‧‧‧供電感測器 11‧‧‧Power sensor
12‧‧‧受電感測器 12‧‧‧Inductance detector
13‧‧‧電荷放大器 13‧‧‧Charger amplifier
21‧‧‧特定平行圖案 21‧‧‧Specific parallel patterns
C1‧‧‧第一等效電容 C1‧‧‧First equivalent capacitance
C2‧‧‧第二等效電容 C2‧‧‧Second equivalent capacitance
C3‧‧‧第三等效電容 C3‧‧‧ third equivalent capacitance
Claims (11)
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