KR20040084680A - Adhesive sheet for manufacturing semiconductor device, semiconductor device using the same and method of manufaturing thereof - Google Patents

Adhesive sheet for manufacturing semiconductor device, semiconductor device using the same and method of manufaturing thereof Download PDF

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Publication number
KR20040084680A
KR20040084680A KR1020040019211A KR20040019211A KR20040084680A KR 20040084680 A KR20040084680 A KR 20040084680A KR 1020040019211 A KR1020040019211 A KR 1020040019211A KR 20040019211 A KR20040019211 A KR 20040019211A KR 20040084680 A KR20040084680 A KR 20040084680A
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semiconductor device
adhesive sheet
adhesive
resin component
manufacturing
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KR1020040019211A
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Korean (ko)
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KR100596186B1 (en
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사토다케시
세이아키노리
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가부시키가이샤 도모에가와 세이시쇼
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Publication of KR20040084680A publication Critical patent/KR20040084680A/en
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Publication of KR100596186B1 publication Critical patent/KR100596186B1/en

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    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)
  • Die Bonding (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Laminated Bodies (AREA)

Abstract

PURPOSE: An adhesive sheet for fabricating a semiconductor device is provided to avoid a wire bonding defect, a mold flash and residual paste by fabricating a semiconductor device like QFN(quad flat non-leaded) while using an adhesive sheet. CONSTITUTION: An adhesive sheet for fabricating a semiconductor device is detachably attached to a leadframe(20) or an interconnection substrate. The adhesive sheet has a stacked body including a heat-resistant base material and an adhesive layer. The adhesive layer contains a thermoplastic resin component and a re-peeling property giving component. The adhesive layer contains a thermosetting resin component.

Description

반도체 장치 제조용 접착 시트 및 그것을 이용한 반도체 장치 및 제조 방법{Adhesive sheet for manufacturing semiconductor device, semiconductor device using the same and method of manufaturing thereof}Adhesive sheet for semiconductor device manufacturing, and semiconductor device and manufacturing method using the same {Adhesive sheet for manufacturing semiconductor device, semiconductor device using the same and method of manufaturing

본 발명은, 리드 플레임에 박리 가능하게 점착되고, QFN 등의 반도체 장치(반도체 패키지)를 제조할 때 이용하기에 바람직한 반도체 장치 제조용 접착 시트에 관한 것이다.TECHNICAL FIELD This invention relates to the adhesive sheet for semiconductor device manufacture which is adhere | attached so that peeling is possible to a lead flame, and is suitable for use when manufacturing a semiconductor device (semiconductor package), such as QFN.

최근, 휴대형 퍼스널 컴퓨터, 휴대 전화 등의 전자 기기의 소형화, 다기능화에 따라 전자 기기를 구성하는 전자 부품의 소형화, 고집적화 외에, 전자 부품의 고밀도 실장 기술이 필요하게 되었다. 이러한 배경하에, 종래의 QFP(Quad Flat Package)나 SOP(Small Outline Package) 등의 주변 실장형 반도체 장치를 대신하여, 고밀도 실장이 가능한 CSP(Chip Scale Pakeage) 등의 면실장형 반도체 장치가 주목되어 있다. 또한 CSP 중에서도 특히 QFN(Quad Flat Non-leaded)는, 종래의 반도체 장치의 제조 기술을 적용하여 제조할 수 있기 때문에, 주로 100핀 이하의 소단자형 반도체 장치로서 바람직하게 이용되고 있다.In recent years, with the miniaturization and multifunctionalization of electronic devices such as portable personal computers and mobile phones, in addition to miniaturization and high integration of electronic components constituting electronic devices, high-density packaging technology of electronic components is required. Under such a background, a surface mount semiconductor device such as Chip Scale Pakeage (CSP) capable of high-density mounting has been noted in place of a peripheral-mount semiconductor device such as a conventional quad flat package (QFP) or small outline package (SOP). . Among the CSPs, in particular, QFN (Quad Flat Non-leaded) can be manufactured by applying a conventional semiconductor device manufacturing technique, and thus it is mainly used as a small terminal semiconductor device of 100 pins or less.

종래, QFN의 제조 방법으로서 대체로 하기의 방법이 알려져 있다.Conventionally, the following method is known generally as a manufacturing method of QFN.

우선, 접착 시트 점착 공정에 있어서, 리드 플레임의 일면에 접착 시트를 점착하고, 이어서, 다이 어태치 공정에 있어서, 리드 플레임에 복수개 형성된 반도체 소자 탑재부(다이패드부)에, IC칩 등의 반도체 소자를 각각 탑재한다. 이어서, 와이어 본딩 공정에 있어서, 리드 플레임의 각 반도체 소자 탑재부의 외주를 따라 설치된 복수의 리드와 반도체 소자를 본딩 와이어에 의해 전기적으로 접속한다. 이어서, 수지 봉지공정에 있어서, 리드 플레임에 탑재된 반도체 소자를 봉지 수지에 의해 봉지하고, 그 후, 접착 시트 박리 공정에 있어서, 접착 시트를 리드 플레임으로부터 박리함으로써 복수의 QFN이 배열된 QFN 유니트를 형성할 수 있다. 마지막으로, 다이싱 공정에 있어서, 이 QFN 유닛트를 각 QFN의 외주를 따라 다이싱함으로써 복수의 QFN을 동시에 제조할 수 있다.First, in the adhesive sheet adhesion step, the adhesive sheet is adhered to one surface of the lead frame, and then, in the die attach step, a semiconductor element such as an IC chip is placed on a semiconductor element mounting portion (die pad portion) formed in plural lead frames. Mount each one. Next, in the wire bonding step, a plurality of leads and semiconductor elements provided along the outer periphery of each semiconductor element mounting portion of the lead frame are electrically connected by bonding wires. Subsequently, in the resin encapsulation step, the semiconductor element mounted on the lead frame is encapsulated with the encapsulating resin, and then, in the adhesive sheet peeling step, the QFN unit in which the plurality of QFNs are arranged by peeling the adhesive sheet from the lead frame. Can be formed. Finally, in the dicing step, a plurality of QFNs can be produced simultaneously by dicing this QFN unit along the outer periphery of each QFN.

이 제법에서 사용하는 접착 시트의 접착제로는, 에폭시 수지/NBR계 접착제나 실리콘계 접착제가 일반적이다(예컨대, 특개평 6-181227호 공보 참조).As an adhesive agent of the adhesive sheet used by this manufacturing method, an epoxy resin / NBR adhesive agent and a silicone adhesive agent are common (for example, refer Unexamined-Japanese-Patent No. 6-181227).

그러나, 실리콘계 접착제로는 와이어 본딩성이 낮고, 또한 몰드 플래시가 생기기 쉬운 문제가 있다.However, the silicone adhesive has a problem of low wire bonding property and easy mold flashing.

따라서, 와이어 본딩 공정전에 플라즈마 클리닝을 실시하여 표면에 부착된 불순물을 제거함으로써 와이어 본딩성을 향상시키는 것이 일반화되어 있다. 이 때, 접착 시트의 접착제층의 노출면이 플라즈마 클리닝에 의해 거칠어지고, 접착 시트의 재박리시에, 반도체 패키지의 접속 단자, 몰드 수지면에 접착제 이행(이하 「잔여 페이스트」로 표기함)이 발생되는 일이 있었다. 이러한 잔여 페이스트가 발생한 경우에는, 몰드 수지, 및 그 근방의 리드의 외부 접속 단자 부분에 접착제가 부착되기 때문에, 제조된 반도체 장치를 배선 기판 등에 실장할 때, 접속 불량이 발생할 우려가 있었다.Therefore, it is common to improve the wire bonding property by performing plasma cleaning before a wire bonding process, and removing the impurity adhering to the surface. At this time, the exposed surface of the adhesive layer of the adhesive sheet is roughened by plasma cleaning, and at the time of re-peeling of the adhesive sheet, adhesive transfer (hereinafter referred to as "residual paste") occurs in the connecting terminal of the semiconductor package and the mold resin surface. It happened. When such a residual paste has occurred, since an adhesive agent adheres to the mold resin and the external connection terminal part of the lead in the vicinity, when the manufactured semiconductor device is mounted in a wiring board etc., there existed a possibility of the connection defect.

본 발명은 상기 과제를 해결하기 위해 이루어진 것으로, QFN 등의 반도체 장치의 제조에 이용한 경우, 양호한 와이어 본딩성, 몰드 플래시 특성을 유지한 채, 잔여 페이스트를 방지할 수 있고, 반도체 장치의 불량화를 방지할 수 있는 반도체 장치 제조용 접착 시트, 그것을 이용한 반도체 장치, 그 제조 방법을 제공하는 것을 목적으로 한다.SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and when used in the manufacture of semiconductor devices such as QFN, residual paste can be prevented while maintaining good wire bonding properties and mold flash characteristics, and the semiconductor device can be deteriorated. An object of the present invention is to provide an adhesive sheet for manufacturing a semiconductor device that can be prevented, a semiconductor device using the same, and a method of manufacturing the same.

도 1은, 본 발명의 반도체 장치 제조용 접착 시트를 이용하여 QFN을 제조할 때 이용하기에 알맞은 리드 플레임의 구조를 나타내는 것으로, 반도체 소자를 탑재하는 측에서 본 개략 평면도이다.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows a structure of a lead frame suitable for use in manufacturing a QFN using the adhesive sheet for semiconductor device manufacturing of the present invention, and is a schematic plan view seen from the side on which the semiconductor element is mounted.

도 2A는, 본 발명의 반도체 장치 제조용 접착 시트를 이용하여 QFN을 제조하는 방법의 일예에서의 접착 시트 점착 공정의 도 1의 A-A'선을 따라 절단한 확대 개략 단면도이다.FIG. 2A is an enlarged schematic cross-sectional view taken along the line AA ′ of FIG. 1 of an adhesive sheet sticking step in an example of a method of manufacturing a QFN using the adhesive sheet for semiconductor device manufacture of the present invention. FIG.

도 2B는, 본 발명의 반도체 장치 제조용 접착 시트를 이용하여 QFN을 제조하는 방법의 일예에서의 다이 어태치 공정의 도 1의 A-A'선을 따라 절단한 확대 개략 단면도이다.FIG. 2B is an enlarged schematic cross-sectional view taken along the line AA ′ of FIG. 1 of the die attach step in one example of a method of manufacturing QFN using the adhesive sheet for semiconductor device manufacture of the present invention.

도 2C는, 본 발명의 반도체 장치 제조용 접착 시트를 이용하여 QFN을 제조하는 방법의 일예에서의 와이어 본딩 공정의 도 1의 A-A'선을 따라 절단한 확대 개략 단면도이다.2C is an enlarged schematic cross-sectional view taken along the line AA ′ of FIG. 1 of the wire bonding step in one example of a method of manufacturing QFN using the adhesive sheet for semiconductor device manufacture of the present invention.

도 2D는, 본 발명의 반도체 장치 제조용 접착 시트를 이용하여 QFN을 제조하는 방법의 일예에서의 수지 봉지 공정의 도 1의 A-A'선을 따라 절단한 확대 개략단면도이다.FIG. 2D is an enlarged schematic cross-sectional view taken along the line A-A 'of FIG. 1 of the resin encapsulation step in one example of a method of producing QFN using the adhesive sheet for semiconductor device manufacture of the present invention.

도 2E는, 본 발명의 반도체 장치 제조용 접착 시트를 이용하여 QFN을 제조하는 방법의 일예에서의 접착 시트 박리 공정의 도 1의 A-A'선을 따라 절단한 확대 개략 단면도이다.FIG. 2E is an enlarged schematic cross-sectional view taken along the line AA ′ of FIG. 1 of an adhesive sheet peeling step in one example of a method of manufacturing QFN using the adhesive sheet for semiconductor device manufacture of the present invention.

도 2F는, 본 발명의 반도체 장치 제조용 접착 시트를 이용하여 QFN을 제조하는 방법의 일예에서의 다이싱 공정의 도 1의 A-A'선을 따라 절단한 확대 개략 단면도이다.FIG. 2F is an enlarged schematic cross-sectional view taken along the line AA ′ of FIG. 1 of the dicing step in one example of a method of manufacturing QFN using the adhesive sheet for semiconductor device manufacture of the present invention.

본 발명의 반도체 장치 제조용 접착 시트(이하, 「접착 시트」라 함)은, 내열성 기재의 일면에 접착제층을 적층하고, 리드 플레임 또는 배선 기판에 박리 가능하게 점착되는 접착 시트로서, 상기 접착제층이 열경화성 수지 성분(a)와 열가소성 수지 성분(b)의 혼합물, 또는 열가소성 수지 성분(b) 단독으로 재박리성 부여 성분(c)을 혼합한 접착제임을 특징으로 한다.The adhesive sheet for manufacturing a semiconductor device of the present invention (hereinafter referred to as an "adhesive sheet") is an adhesive sheet in which an adhesive layer is laminated on one surface of a heat resistant substrate, and is adhered to a lead frame or a wiring board so as to be peeled off. The adhesive is a mixture of a thermosetting resin component (a) and a thermoplastic resin component (b), or a re-peelability imparting component (c) in the thermoplastic resin component (b) alone.

재박리성 부여 성분(c)으로는 실리콘 오일이 바람직하다.As re-peelability provision component (c), silicone oil is preferable.

또한, 재박리성 부여 성분(c)이 반응성을 가지고, 열가소성 수지 성분(b), 또는 열경화성 수지 성분(a)과 열가소성 수지 성분(b)의 혼합물과 화학적으로 결합 상태에 있는 것이 바람직하다.In addition, it is preferable that the re-peelability imparting component (c) is reactive and in a chemical bond with the thermoplastic resin component (b) or a mixture of the thermosetting resin component (a) and the thermoplastic resin component (b).

동 또는 금도금한 동에 접착하고, 접착 시트의 경화 후의 150~200℃에서의 박리력이 0.03~5N/cm인 것이 바람직하다.It is preferable that the peeling force in 150-200 degreeC after hardening of an adhesive sheet is adhered to copper or gold-plated copper, and is 0.03-5 N / cm.

접착제층은, 재박리성 부여 성분(c)와 열경화성 수지 성분(a)과 열가소성 수지 성분(b)과의 혼합물을 성막하여 이루어진 것, 또는 재박리성 부여 성분(c)가, 열경화성 수지 성분(a)과 열가소성 수지 성분(b)로 이루어지는 접착제층의 표면에 성막된 것이 바람직하다.The adhesive layer is formed by forming a mixture of the re-peelability imparting component (c), the thermosetting resin component (a) and the thermoplastic resin component (b), or the re-peeling imparting component (c) is a thermosetting resin component ( It is preferable to form into a film on the surface of the adhesive bond layer which consists of a) and a thermoplastic resin component (b).

접착제층의 열경화성 수지 성분(a) 및 열가소성 수지 성분(b)의 중량 비율(a)/(b)가 3.5이하, ((a)+(b))/(c)가 6~2,000인 것이 바람직하다.It is preferable that the weight ratio (a) / (b) of the thermosetting resin component (a) and the thermoplastic resin component (b) of an adhesive bond layer is 3.5 or less, and ((a) + (b)) / (c) is 6-2,000. Do.

열가소성 수지 성분(b)는, 그 중량 평균 분자량이 2,000~1,000,000인 것이 바람직하다.It is preferable that the weight average molecular weights of a thermoplastic resin component (b) are 2,000-1,000,000.

접착제층은, 그 경화 후의 저장 탄성율이 150~250℃에 있어서 1MPa 이상인 것이 바람직하다.It is preferable that the storage elastic modulus after hardening of an adhesive bond layer is 1 Mpa or more in 150-250 degreeC.

내열성 기재는, 글래스 전이 온도가 150℃ 이상이고, 또한 열팽창 계수가 5~50ppm/℃의 내열성 수지 필름, 또는, 열팽창 계수가 5~50ppm/℃의 금속박이 바람직하다.As for a heat resistant base material, the glass transition temperature is 150 degreeC or more, and the heat resistant resin film whose thermal expansion coefficient is 5-50 ppm / degreeC, or metal foil whose thermal expansion coefficient is 5-50 ppm / degreeC is preferable.

접착제층의 일면에 보호 필름이 설치되어 있는 것이 바람직하다.It is preferable that the protective film is provided in one surface of an adhesive bond layer.

동 또는 금도금한 동과 접착하였을 때의 접착 강도가 0.098N/cm 이상인 것이 바람직하다.It is preferable that the adhesive strength at the time of adhering with copper or gold-plated copper is 0.098 N / cm or more.

본 발명의 반도체 장치는, 상술한 반도체 장치 제조용 접착 시트를 이용하여 제조되는 것을 특징으로 한다.The semiconductor device of this invention is manufactured using the adhesive sheet for semiconductor device manufacture mentioned above. It is characterized by the above-mentioned.

본 발명의 반도체 장치의 제조 방법은, 상술한 반도체 장치 제조용 접착 시트를 이용하여 제조하는 것을 특징으로 한다.The manufacturing method of the semiconductor device of this invention is manufactured using the adhesive sheet for semiconductor device manufacture mentioned above.

이하, 본 발명에 대하여 상술하기로 한다.Hereinafter, the present invention will be described in detail.

본 발명의 접착 시트는, 내열성 기재의 일면에, 열가소성 수지 성분(b), 또는, 열경화성 수지 성분(a)과, 재박리성 부여 성분(c)을 더 포함하는 접착제층을 구비하여 구성된 것이다.The adhesive sheet of this invention is equipped with the adhesive bond layer which further contains a thermoplastic resin component (b) or a thermosetting resin component (a) and a removability provision component (c) on one surface of a heat resistant base material.

내열성 기재로는, 내열성 수지 필름이나 금속박 등을 들 수 있다. 본 발명의 접착 시트를 이용하여 QFN 등의 반도체 장치를 제조할 때 접착 시트는 다이 어태치 공정, 와이어 본딩 공정, 수지 봉지 공정에 있어서, 150~250℃의 고온에 노출된다.내열성 기재로서 내열성 수지 필름을 사용하는 경우, 상기 내열성 수지 필름의 열팽창 계수는 글래스 전이 온도(Tg) 이상이 되면 급격히 증가하고, 금속제의 리드 플레임과의 열팽창차가 커지기 때문에, 실온으로 되돌릴 때, 내열성 수지 필름과 리드 플레임에 변형이 발생할 우려가 있다. 그리고, 내열성 수지 필름과 리드 플레임에 변형이 발생한 경우에는, 수지 봉지 공정에 있어서, 금형의 위치 결정 핀에 리드 플레임을 장착할 수 없고, 위치 이탈 불량을 일으킬 우려가 있다.As a heat resistant base material, a heat resistant resin film, metal foil, etc. are mentioned. When manufacturing a semiconductor device such as QFN using the adhesive sheet of the present invention, the adhesive sheet is exposed to a high temperature of 150 ° C to 250 ° C in a die attach step, a wire bonding step, and a resin encapsulation step. In the case of using a film, the coefficient of thermal expansion of the heat-resistant resin film rapidly increases when the glass transition temperature (Tg) or more increases, and the difference in thermal expansion with the lead lead made of metal increases, so that when the film is returned to room temperature, the heat-resistant resin film and the lead flame There is a risk of deformation. And when a deformation | transformation generate | occur | produces in a heat resistant resin film and a lead flame, in a resin sealing process, a lead flame cannot be attached to the positioning pin of a metal mold | die, and there exists a possibility that a defect may arise.

따라서, 내열성 기재로서 내열성 수지 필름을 사용하는 경우, 글래스 전이 온도가 150℃ 이상의 내열성 수지 필름인 것이 바람직하고, 180℃ 이상인 것이 더욱 바람직하다.Therefore, when using a heat resistant resin film as a heat resistant base material, it is preferable that a glass transition temperature is 150 degreeC or more heat resistant resin film, and it is more preferable that it is 180 degreeC or more.

또한 금속제의 리드 플레임과의 열팽창 차는 적은 것이 바람직하기 때문에, 내열성 수지 필름의 150~250℃에서의 열팽창 계수가 5~50ppm/℃인 것이 바람직하고, 10~30ppm/℃인 것이 더욱 바람직하다.Moreover, since it is preferable that the difference of thermal expansion with a metal lead flame is small, it is preferable that the thermal expansion coefficient in 150-250 degreeC of a heat resistant resin film is 5-50 ppm / degrees C, and it is more preferable that it is 10-30 ppm / degree C.

이러한 특성을 가지는 내열성 수지 필름으로는, 폴리이미드, 폴리아미드, 폴리에테르 설폰, 폴리페닐렌설파이드, 폴리에테르케톤, 폴리에테르에테르케톤, 트리아세틸셀룰로오스, 폴리에테르이미드 등으로 이루어지는 필름을 예시할 수 있다.As a heat resistant resin film which has such a characteristic, the film which consists of polyimide, polyamide, polyether sulfone, polyphenylene sulfide, polyether ketone, polyether ether ketone, triacetyl cellulose, polyether imide etc. can be illustrated. .

또한 내열성 기재로서 금속박을 사용하는 경우에 있어서도, 내열성 수지 필름과 동일한 이유에서, 금속박의 150~250℃에서의 열팽창 계수가 5~50ppm/℃인 것이 바람직하고, 10~30ppm/℃인 것이 더욱 바람직하다. 금속으로는, 금, 은, 동, 백금, 알루미늄, 마그네슘, 티타늄, 크롬, 망간, 철, 코발트, 니켈, 아연, 팔라듐, 카드뮴, 인듐, 주석, 납으로 이루어지는 박이나, 이러한 금속을 주성분으로 하는 합금박, 혹은 이들의 도금박을 예시할 수 있다.Moreover, also when using a metal foil as a heat resistant base material, it is preferable that the thermal expansion coefficient of 150-250 degreeC of metal foil is 5-50 ppm / degrees, and it is more preferable that it is 10-30 ppm / degrees for the same reason as a heat resistant resin film. Do. Examples of the metal include gold, silver, copper, platinum, aluminum, magnesium, titanium, chromium, manganese, iron, cobalt, nickel, zinc, palladium, cadmium, indium, tin, and lead, and a metal containing such a metal as a main component. Alloy foil or these plating foil can be illustrated.

또한 본 발명의 접착 시트를 사용하여 반도체 장치를 제조할 때에, 접착 시트 박리 공정에서의 잔여 페이스트를 방지하기 위해서는, 내열성 기재와 접착제층과의 접착 강도 Sa와, 봉지 수지 및 리드 플레임과 접착제층과의 접착 강도 Sb와의 비(접착 강도비) Sa/Sb가 1.5 이상인 것이 바람직하다. Sa/Sb가 1.5 미만인 경우에는, 접착 시트 박리 공정에 있어서 잔여 페이스트가 발생하기 쉽기 때문에 바람직하지 않다. 또한, 접착 강도비 Sa/Sb를 1.5 이상으로 하기 위해서는, 내열성 수지 필름의 경우에는 접착제층을 형성하기 전에, 내열성 수지 필름의 접착제층을 형성하는 측의 표면에, 코로나 처리, 플라즈마 처리, 프라이머 처리, 샌드 블래스트 등의 내열성 수지 필름과 접착제층의 접착 강도 Sa를 높게 하는 처리를 미리 실시해 두는 것이 바람직하다. 또한 금속박의 경우에는, 그 제법으로부터 압연 금속박과전해 금속박으로 분류되는데, 접착 강도비 Sa/Sb를 1.5 이상으로 하기 위해, 전해 금속박을 사용함과 동시에 거칠어진 측의 면에 접착제층을 마련하여 조정하는 것이 바람직하다. 또한 전해 금속박 내에서도 특히, 전해 동박을 사용하는 것이 특히 바람직하다.Moreover, when manufacturing a semiconductor device using the adhesive sheet of this invention, in order to prevent the residual paste in an adhesive sheet peeling process, the adhesive strength Sa of a heat resistant base material and an adhesive bond layer, sealing resin, lead flame, an adhesive bond layer, It is preferable that ratio (adhesive strength ratio) Sa / Sb with adhesive strength Sb of 1.5 is 1.5 or more. If Sa / Sb is less than 1.5, it is not preferable because residual paste is likely to occur in the adhesive sheet peeling step. In addition, in order to make adhesive strength ratio Sa / Sb 1.5 or more, in the case of a heat resistant resin film, before forming an adhesive bond layer, the surface of the side which forms the adhesive bond layer of a heat resistant resin film is corona treatment, a plasma treatment, and a primer treatment. It is preferable to perform previously the process which raises adhesive strength Sa of heat resistant resin films, such as sand blast, and an adhesive bond layer. In addition, in the case of metal foil, it is classified into rolling metal foil and electrolytic metal foil from the manufacturing method, but in order to make adhesive strength ratio Sa / Sb 1.5 or more, by using an electrolytic metal foil and providing an adhesive bond layer in the roughened side and adjusting it, It is preferable. Moreover, it is especially preferable to use an electrolytic copper foil also in electrolytic metal foil.

또한 접착제층과, 동 또는 금도금한 동으로 이루어지는 리드 플레임의 온도가 150~200℃에 있어서, 접착제층과 리드 플레임과의 접착 강도가 0.098N/cm 이상인 것이 바람직하다. 0.098N/cm 이상의 경우에는 몰드 플래시 방지 성능이 충분하다고 할 수 있기 때문이다.Moreover, when the temperature of the lead flame which consists of an adhesive bond layer and copper or gold plating copper is 150-200 degreeC, it is preferable that the adhesive strength of an adhesive bond layer and a lead flame is 0.098 N / cm or more. This is because mold flash prevention performance is sufficient in the case of 0.098 N / cm or more.

접착제층은, 열가소성 수지 성분(b)과 재박리성 부여 성분(c)을 필수 성분으로서, 더 바람직하게는, 열경화성 수지 성분(a)을 갖는다. 이 경우, 열경화성 수지 성분(a)과 열가소성 수지 성분(b)의 중량비(a)/(b)는 3.5 이하가 바람직하고, (a)/(b)는 0.3~3.5가 더 바람직하며, 0.3~2.5가 더욱 바람직하고, 1~2.5가 가장 바람직하다.As for an adhesive bond layer, a thermoplastic resin component (b) and a re-peelability provision component (c) are essential components, More preferably, it has a thermosetting resin component (a). In this case, 3.5 or less are preferable, and, as for (a) / (b), 0.3-3.5 are more preferable, and, as for the weight ratio (a) / (b) of a thermosetting resin component (a) and a thermoplastic resin component (b), 0.3- 2.5 is more preferable, and 1-2.5 are the most preferable.

(a)/(b)가 3.5보다 큰 경우, 접착제층의 가요성이 저하되기 때문에, 플라즈마 클리닝 공정을 거친 접착 시트가 부착된 리드 플레임은, 수지 봉지 공정에 있어서 접착 시트의 접착력이 저하되고, 리드 플레임과 접착 시트가 부분적으로 벗겨져 몰드 플래시가 발생하며, 또한 잔여 페이스트가 발생하기 쉬어진다. 한편, (a)/(b)가 0.3 미만이 되면, 탄성율의 저하에 수반되는 와이어 본딩 불량이 발생하기 쉬워지므로 바람직하지 않다.When (a) / (b) is larger than 3.5, since the flexibility of the adhesive layer is lowered, the lead frame with the adhesive sheet which has been subjected to the plasma cleaning step is deteriorated in the resin sealing step, The lead frame and the adhesive sheet are partially peeled off, which causes mold flash, and residual paste is more likely to occur. On the other hand, when (a) / (b) becomes less than 0.3, since the wire bonding defect accompanying a fall of an elasticity modulus becomes easy to produce, it is unpreferable.

열경화성 수지 성분(a)과 열가소성 수지 성분(b)의 혼합물, 또는 열가소성수지 성분(b)의 단독인 접착제 성분과 재박리성 부여 성분(c)의 중량비((a)+(b))/(c), 또는 (b)/(c)는 6~2,000인 것이 바람직하다. 또한 ((a)+(b))/(c), 또는(b)/(c)는 1O~1,OOO이 더 바람직하다.A mixture of the thermosetting resin component (a) and the thermoplastic resin component (b) or the weight ratio ((a) + (b)) / ( c) or (b) / (c) is preferably 6 to 2,000. Moreover, as for ((a) + (b)) / (c) or (b) / (c), 10-1, OOO is more preferable.

((a)+(b))/(c), 또는 (b)/(c)가 6 미만인 경우, 리드 플레임과 접착 시트의 접착력이 저하되기 때문에, 수지 봉지 공정에 있어서, 리드 플레임과 접착 시트가 부분적으로 벗겨져 몰드 플래시가 발생하고, 잔여 페이스트가 발생하기 쉬워진다. ((a)+(b))/(c), 또는 (b)/(c)가 2,000보다 큰 경우, 플라즈마 클리닝 공정을 거친 접착 시트가 부착된 리드 플레임을 사용하면, 리드 플레임과 접착 시트의 접착력이 증가하기 때문에, 반도체 제조용 접착 시트를 재박리할 때에 잔여 페이스트가 발생하기 쉬워진다.When ((a) + (b)) / (c) or (b) / (c) is less than 6, since the adhesive force of a lead flame and an adhesive sheet falls, in a resin sealing process, a lead flame and an adhesive sheet Is partially peeled off, mold flashing occurs, and residual paste is likely to occur. If ((a) + (b)) / (c), or (b) / (c) is greater than 2,000, using a lead frame with an adhesive sheet that has been subjected to a plasma cleaning process, Since the adhesive force increases, residual paste tends to occur when the adhesive sheet for semiconductor production is re-peeled.

접착제층의 성분으로서, 열경화성 수지 성분(a)이 적량 포함되어 있으면, 와이어 본딩성, 몰드 플래시 특성을 향상할 수 있다. 열경화성 수지 성분(a)으로는, 요소 수지, 멜라민 수지, 벤조구아나민 수지, 아세트 구아나민 수지, 페놀 수지, 레소시놀 수지, 크실렌 수지, 퓨란 수지, 불포화 폴리에스테르 수지, 디아릴프탈레이트 수지, 이소시아네이트 수지, 에폭시 수지, 말레이미드 수지, 나디이미드 수지 등을 예시할 수 있다. 또한, 이들 수지는 단독으로 사용해도 되고, 2종 이상을 병용해도 된다. 그 중에서도 특히 에폭시 수지와 페놀 수지의 적어도 1종을 함유함으로써, 와이어 본딩 공정에서의 처리 온도하에 고탄성율을 가짐과 동시에, 수지 봉지 공정에서의 처리 온도 하에서 리드 플레임과의 접착 강도가 높은 접착제층이 얻어지기 때문에 바람직하다.As a component of an adhesive bond layer, when a suitable amount of thermosetting resin component (a) is contained, wire bonding property and mold flash characteristic can be improved. As the thermosetting resin component (a), urea resin, melamine resin, benzoguanamine resin, acet guanamine resin, phenol resin, resorcinol resin, xylene resin, furan resin, unsaturated polyester resin, diaryl phthalate resin, isocyanate Resin, an epoxy resin, maleimide resin, nadiimide resin, etc. can be illustrated. In addition, these resin may be used independently and may use 2 or more types together. In particular, by containing at least one of an epoxy resin and a phenol resin, an adhesive layer having a high elastic modulus under the treatment temperature in the wire bonding process and having a high adhesive strength with the lead flame under the treatment temperature in the resin encapsulation process It is preferable because it is obtained.

열가소성 수지 성분 (b)로는, 아크릴로니트릴-부타디엔 공중합체(NBR), 아크릴로니트릴-부타디엔-스틸렌 수지(ABS), 스틸렌-부타디엔-스틸렌 수지(SEBS), 스틸렌-부타디엔-스틸렌 수지(SBS), 폴리부타디엔, 폴리아크릴로니트릴, 폴리비닐부티랄, 폴리아미드, 폴리아미드이미드, 폴리이미드, 폴리에스테르, 폴리우레탄, 폴리디메틸실록산 등을 들 수 있는데, 그 중에서도 특히 아미드 결합을 갖는 폴리아미드나 폴리아미드이미도나, 아크릴로니트릴부타디엔 공중합체 수지가 내열성에 뛰어나기 때문에 바람직하다.As the thermoplastic resin component (b), acrylonitrile-butadiene copolymer (NBR), acrylonitrile-butadiene-styrene resin (ABS), styrene-butadiene-styrene resin (SEBS), styrene-butadiene-styrene resin (SBS) , Polybutadiene, polyacrylonitrile, polyvinyl butyral, polyamide, polyamideimide, polyimide, polyester, polyurethane, polydimethylsiloxane, and the like, among others, polyamide or poly having an amide bond Amideimido and acrylonitrile butadiene copolymer resin are preferable because they are excellent in heat resistance.

또한 열가소성 수지 성분 (b)의 중량 평균 분자량이 2,000~1,000,000, 바람직하게는 5,000~800,000, 더욱 바람직하게는 10,000~500,000이다.이 범위 내라면, 접착제층의 응집력을 높일 수 있고, 접착 시트 박리 공정에서의 잔여 페이스트를 더욱 방지할 수 있다.The weight average molecular weight of the thermoplastic resin component (b) is 2,000 to 1,000,000, preferably 5,000 to 800,000, more preferably 10,000 to 500,000. Within this range, the cohesion force of the adhesive layer can be increased, and the adhesive sheet peeling step Residual paste in can be further prevented.

재박리성 부여 성분(c)으로는 실리콘 오일, 변성 실리콘 오일을 들 수 있다.실리콘 오일로서, 디메틸폴리실록산 타입, 메틸하이드로겐폴리실록산 타입, 메틸 페닐폴리실록산 타입 등을 들 수 있다. 변성 실리콘 오일은, 반응성 실리콘 오일로서, 아미노 변성 타입, 에폭시 변성 타입, 카르복실 변성 타입, 카르비놀 루변성 타입, 메타크릴 변성 타입, 메르캅토 변성 타입, 페놀 변성 타입, 비반응성 실리콘 오일로서, 폴리에테르 변성 타입, 메틸 스틸 변성 타입,알킬 변성 타입, 지방산 에스테르 변성 타입, 알콕시 변성 타입, 불소 변성 타입 등을 예시할 수 있다. 또한, 이러한 실리콘 오일은, 단독으로 사용해도 되고, 2종 이상 병용해도 된다.Examples of the re-peelability imparting component (c) include silicone oil and modified silicone oil. Examples of the silicone oil include a dimethyl polysiloxane type, a methylhydrogen polysiloxane type, and a methyl phenylpolysiloxane type. The modified silicone oil is, as a reactive silicone oil, an amino modified type, epoxy modified type, carboxyl modified type, carbinol lu modified type, methacryl modified type, mercapto modified type, phenol modified type, non-reactive silicone oil, Ether modified type, methyl steel modified type, alkyl modified type, fatty acid ester modified type, alkoxy modified type, fluorine modified type, etc. can be illustrated. In addition, these silicone oils may be used independently and may be used together 2 or more types.

이 중에서도 특히 반응성 실리콘 오일은, 열가소성 수지 성분(b)이나, 열경화성 수지 성분(a) 및 열가소성 수지 성분(b)의 혼합물과 화학적으로 결합된 상태가 됨으로써 재박리시에 실리콘 오일의 패키지로의 이행이 없어지기 때문에 특히 바람직하다.In particular, the reactive silicone oil is chemically bonded to the thermoplastic resin component (b), or a mixture of the thermosetting resin component (a) and the thermoplastic resin component (b), thereby transferring the silicone oil to the package upon re-peeling. It is especially preferable because it disappears.

또한 접착제층의 열팽창 계수, 열전도율, 표면 턱, 접착성 등을 조정하기 위해, 접착제층에 무기, 또는 유기 필러를 첨가하는 것이 바람직하다. 여기서, 무기 필러로는, 분쇄형 실리카, 용융형 실리카, 알루미나, 산화 티타늄, 산화 베릴륨, 산화 마그네슘, 탄산 칼슘, 질화 티타늄, 질화규소, 질화붕소, 붕화티타늄, 붕화텅스텐, 탄화 규소, 탄화 티타늄, 탄화 지르코늄, 탄화 몰리브덴, 마이카, 산화 아연, 카본 블랙, 수산화 알루미늄, 수산화 칼슘, 수산화 마그네슘, 3산화 안티몬 등으로 이루어지는 필러, 혹은 이들 표면에 트리메틸실록실기 등을 도입한 것 등을 예시할 수 있다. 또한 유기 필러로는, 폴리이미드, 폴리아미드이미도, 폴리에테르에테르케톤, 폴리에테르이미드, 폴리에스테르이미드, 나일론, 실리콘 수지 등으로 이루어지는 필러를 예시할 수 있다.In addition, in order to adjust the thermal expansion coefficient, thermal conductivity, surface tuck, adhesiveness, etc. of an adhesive bond layer, it is preferable to add an inorganic or organic filler to an adhesive bond layer. As the inorganic filler, pulverized silica, fused silica, alumina, titanium oxide, beryllium, magnesium oxide, calcium carbonate, titanium nitride, silicon nitride, boron nitride, titanium boride, tungsten boride, silicon carbide, titanium carbide, carbide The filler which consists of zirconium, molybdenum carbide, a mica, zinc oxide, carbon black, aluminum hydroxide, calcium hydroxide, magnesium hydroxide, antimony trioxide, etc., or what introduce | transduced trimethylsiloxane group etc. into these surfaces can be illustrated. Moreover, as an organic filler, the filler which consists of polyimide, polyamide-imido, polyether ether ketone, polyether imide, polyester imide, nylon, a silicone resin, etc. can be illustrated.

반도체 패키지를 제조하기 위한 수지 봉지 공정에 있어서는, 150~200℃로 가열하면서, 5~10GPa의 압력을 걸어 반도체 소자를 수지 봉지에 의해 봉지한다. 그 때문에, 접착 시트의 접착제층이 고온에 노출되고 그 결과, 접착제층의 접착력(접착제층과 리드 플레임의 접착 강도)가 저하되어, 봉지 수지의 압력에 의해 접착제층이 리드 플레임으로부터 부분적으로 벗겨져 몰드 플래시가 발생하는 경우가 있는데, 본 발명의 접착제층을 이용한 접착 시트에서는 접착제층의 접착력이 저하되기 어렵고, 몰드 플래시가 발생하기 어렵다.In the resin sealing process for manufacturing a semiconductor package, while heating at 150-200 degreeC, the pressure of 5-10 GPa is applied and a semiconductor element is sealed by resin sealing. Therefore, the adhesive bond layer of an adhesive sheet is exposed to high temperature, As a result, the adhesive force (adhesive strength of an adhesive bond layer and a lead flame) of an adhesive bond falls, and an adhesive bond layer peels partially from a lead flame by the pressure of sealing resin, and a mold Although a flash may generate | occur | produce, in the adhesive sheet using the adhesive bond layer of this invention, the adhesive force of an adhesive bond layer is hard to fall and a mold flash hardly arises.

내열성 기재의 일면에 접착제층을 형성하는 방법으로는, 내열성 기재 상에 직접, 접착제를 도포하고, 건조하는 캐스팅법이나, 접착제를 이형성 필름 상에 일단 도포하고, 건조시킨 후, 내열성 기재 상에 전사시키는 라미네이트법 등이 바람직하다. 또한, 열경화성 수지 성분 (a), 열가소성 수지 성분 (b), 재박리성 부여 성분 (c)은 모두 유기 용제, 예컨대 톨루엔, 크실렌, 크롤벤젠 등의 방향족계 용제, 아세톤, 메틸에틸케톤, 메틸이소부틸케톤 등의 케톤계 용제, 디메틸포름아미드, 디메틸아세트아미드, N- 메틸피롤리돈 등의 비프로톤계 극성 용제, 테트라하이드로퓨란 등의 단독 혹은 혼합물에 대하여 1중량% 이상, 바람직하게는 5중량% 이상 용해하여 접착제 도포액으로서 사용하는 것이 바람직하다.As a method of forming an adhesive layer on one surface of a heat resistant base material, the adhesive method is apply | coated directly on a heat resistant base material, and the casting method which dries, or the adhesive agent is apply | coated once on a release film, dried, and then transferred to a heat resistant base material The lamination method to make it preferable. The thermosetting resin component (a), the thermoplastic resin component (b), and the re-peelability imparting component (c) are all organic solvents such as aromatic solvents such as toluene, xylene, crawlbenzene, acetone, methyl ethyl ketone, and methyl iso 1 weight% or more, Preferably it is 5 weights with respect to ketone system solvents, such as butyl ketone, aprotic polar solvents, such as dimethylformamide, dimethylacetamide, and N-methylpyrrolidone, and tetrahydrofuran, etc. individually or in mixture. It is preferable to melt | dissolve more than% and to use as an adhesive coating liquid.

접착제층은, 재박리성 부여 성분(c)과 열가소성 수지 성분(b) 또는 열경화성 수지 성분(a)으로 혼합물을 조제하고, 그 혼합물을 성막한 외에, 열가소성 수지 성분(b) 또는 열경화성 수지 성분(a)에 의해 접착제층을 더 형성하고, 그 후 그 표면에 재박리성 부여 성분(c)을 성막하여 전체적으로 접착제층으로 해도 된다. 재박리성 부여 성분(c)을 나중에 성막한 경우에는, 사전에 혼합물로서 둔 경우보다, 소량의 재박리성 부여 성분(c)의 사용량으로 재박리성 기능을 얻을 수 있으므로 바람직하다.The adhesive layer is prepared from a re-peelability imparting component (c) and a thermoplastic resin component (b) or a thermosetting resin component (a), and the mixture is formed into a film, and the thermoplastic resin component (b) or the thermosetting resin component ( By a), an adhesive bond layer is further formed, a re-peelability provision component (c) may be formed into a film on the surface after that, and you may make it an adhesive bond layer as a whole. In the case where the re-peelability imparting component (c) is later formed, the re-peelability function can be obtained by using a small amount of the re-peelability imparting component (c) than when it is previously set as a mixture.

본 발명의 접착 시트의 접착제층 상에 박리 가능한 보호 필름을 점착하고, 반도체 장치의 제조 직전에 보호 필름을 박리하는 구성으로 해도 된다. 이 경우에는, 접착 시트가 제조되고 나서 사용되기 까지의 동안에 접착제층이 손상되는 것을 방지할 수 있다. 보호 필름으로는 이형성을 가지는 것이라면 어떠한 필름을 사용해도 무방하지만, 예컨대 폴리에스테르, 폴리에틸렌, 폴리프로필렌, 폴리에틸렌텔레프탈레이트 등의 필름이나, 이들 필름의 표면을 실리콘 수지 또는 불소 화합물로 이형 처리한 필름 등을 예시할 수 있다.It is good also as a structure which sticks the protective film which can peel on the adhesive bond layer of the adhesive sheet of this invention, and peels a protective film immediately before manufacture of a semiconductor device. In this case, the adhesive layer can be prevented from being damaged from the time the adhesive sheet is produced until it is used. As the protective film, any film may be used as long as it has a releasability property. For example, a film such as polyester, polyethylene, polypropylene, polyethylene terephthalate, or a film in which the surface of these films are released by a silicone resin or a fluorine compound may be used. It can be illustrated.

또한 150℃~250℃의 온도 범위 전체에서의 접착제층의 경화 후의 저장 탄성율은, 1MPa 이상, 바람직하게는 10MPa 이상, 더욱 바람직하게는 50MPa 이상이다. 또한, 여기서 말하는 경화후란, 다이 어태치 공정에서 가열 처리된 상태에서의 접착제층을 말한다. 저장 탄성율의 측정 조건 등에 대해서는 실시예에서 설명하기로 한다. 반도체 패키지를 제조하기 위한 와이어 본딩 공정에 있어서는, 본딩 와이어를 이용하여 반도체 소자와 리드 플레임을 접속하기 위해 상기 본딩 와이어의 양단을 150~250℃로 가열하여 60~120kHz의 초음파로 융착할 때, 리드 플레임의 직하방에 위치하는 접착 시트의 접착제층은 상기 가열에 의한 고온에 노출되어 저탄성화되어 초음파를 흡수하기 쉬어지고, 그 결과 리드 플레임이 진동되어 와이어 본딩 불량이 발생하기 쉽지만, 상기 저장 탄성율을 갖는 접착제층으로 구성된 본 발명의 접착 시트의 경우는, 이러한 문제가 잘 발생하지 않는다. 저장 탄성율을 1MPa 이상으로 하기 위해서는, 예컨대 열경화성 수지 성분(a)/열 가소성 수지 성분(b)의 중량비를 0.3 이상으로 조정하면 된다.Moreover, the storage elastic modulus after hardening of an adhesive bond layer in the whole temperature range of 150 degreeC-250 degreeC is 1 Mpa or more, Preferably it is 10 Mpa or more, More preferably, it is 50 Mpa or more. In addition, after hardening here means the adhesive bond layer in the state heat-processed by the die attach process. Measurement conditions and the like of storage modulus will be described in the Examples. In the wire bonding process for manufacturing a semiconductor package, when the both ends of the bonding wire is heated to 150 to 250 ° C and fused with ultrasonic waves of 60 to 120 kHz in order to connect the semiconductor device and the lead frame using a bonding wire, The adhesive layer of the adhesive sheet located directly below the flame is exposed to the high temperature by the heating, is low elasticity, and easily absorbs the ultrasonic waves. As a result, the lead flame is vibrated, and wire bonding defects are likely to occur. In the case of the adhesive sheet of this invention comprised with the adhesive bond layer which has, such a problem does not arise easily. In order to make storage elastic modulus 1 Mpa or more, what is necessary is just to adjust the weight ratio of a thermosetting resin component (a) / thermoplastic resin component (b) to 0.3 or more.

동 또는 금도금한 동에 첨부한 접착 시트의 경화 후의 150~200℃에서의 박리력은 0.03~5N/cm인 것이 바람직하다. 박리력이 0.03N/cm 미만의 경우에서는 접착력 부족에 의해, 몰드 수지 봉지시에 몰드 플래시의 문제가 발생하는 경우가 있다. 한편, 5N/cm을 넘은 경우에는, 박리시에 접착 시트가 찢어지는 등의 문제가 발생하여박리가 곤란하게 된다.It is preferable that the peeling force in 150-200 degreeC after hardening of the adhesive sheet attached to copper or gold-plated copper is 0.03-5 N / cm. In the case where the peeling force is less than 0.03 N / cm, the problem of the mold flash may occur at the time of encapsulation of the mold resin due to lack of adhesive force. On the other hand, when it exceeds 5 N / cm, problems, such as an adhesive sheet tearing at the time of peeling, arise, and peeling becomes difficult.

(반도체 장치의 제조 방법)(Manufacturing Method of Semiconductor Device)

이어서, 도 1, 도 2A~2F를 참조하여, 본 발명의 접착 시트를 사용하여 반도체 장치를 제조하는 방법의 일예에 대하여 설명하기로 한다. 이하, 반도체 장치로서 QFN을 제조하는 경우를 예로서 설명하기로 한다.Next, an example of a method of manufacturing a semiconductor device using the adhesive sheet of the present invention will be described with reference to FIGS. 1 and 2A to 2F. Hereinafter, the case where QFN is manufactured as a semiconductor device is demonstrated as an example.

먼저, 도 1에 도시한 개략적인 구성의 리드 플레임(20)을 준비한다. 리드 플레임(20)은, IC 칩 등의 반도체 소자를 탑재하는 섬모양의 복수의 반도체 소자 탑재부(다이패드부)(21)을 구비하고, 각 반도체 소자 탑재부(21)의 외주를 따라 다수의 리드(22)가 설치된 것이다. 이어서, 도 2A에 도시한 바와 같이, 접착 시트 점착 공정에 있어서, 리드 플레임(20)의 일면 상에, 본 발명의 접착 시트(10)를 접착제층(미도시)측이 리드 플레임(20)측이 되도록 점착한다.First, the lead frame 20 of the schematic structure shown in FIG. 1 is prepared. The lead frame 20 includes a plurality of island-like semiconductor element mounting portions (die pad portions) 21 for mounting semiconductor elements such as IC chips, and includes a plurality of leads along the outer periphery of each semiconductor element mounting portion 21. (22) is installed. Subsequently, as shown in FIG. 2A, in the adhesive sheet sticking step, on one surface of the lead flame 20, the adhesive layer (not shown) side of the adhesive sheet 10 of the present invention is on the lead flame 20 side. Adhesion so as to be.

또한, 접착 시트(10)를 리드 플레임(20)에 점착하는 방법으로는, 라미네이트법 등이 바람직하다.Moreover, as a method of sticking the adhesive sheet 10 to the lead flame 20, the lamination method etc. are preferable.

이어서, 도 2B에 도시한 바와 같이, 다이 어태치 공정에 있어서, 리드 플레임(20)의 반도체 소자 탑재부(21)에, 접착 시트(10)가 점착되어 있지 않은 측으로부터 IC 칩 등의 반도체 소자(30)를, 다이어태치재(미도시)를 이용하여 탑재한다.Subsequently, as shown in FIG. 2B, in the die attach step, semiconductor elements such as IC chips or the like are formed from the side where the adhesive sheet 10 is not adhered to the semiconductor element mounting portion 21 of the lead frame 20. 30) is mounted using a die attach material (not shown).

이어서, 와이어 본딩 직전까지 걸리는 열 이력으로, 접착 시트나, 다이어태치제 등으로부터 발생하는 아웃 가스 성분이 리드 플레임에 부착되어, 와이어의 접합 불량에 의한 수율이 저하되는 것을 방지하기 위하여, 와이어 본딩 공정 실시전에 접착 시트, 다이어태치제, IC 칩이 탑재된 리드 플레임을 플라즈마 클리닝한다.Subsequently, the wire bonding step is performed in order to prevent the outgas component generated from the adhesive sheet, the die attach agent, or the like from being adhered to the lead frame by the heat history applied immediately before the wire bonding, so that the yield due to the poor bonding of the wires is lowered. Plasma cleaning is performed on the lead frame on which the adhesive sheet, the die attach agent, and the IC chip are mounted.

이어서, 도 2C에 도시한 바와 같이, 와이어 본딩 공정에 있어서, 반도체 소자(30)와 리드 플레임(20)의 리드(22)를, 금 와이어 등의 본딩 와이어(31)을 통하여 전기적으로 접속한다. 이어서, 도 2D에 도시한 바와 같이, 수지 봉지 공정에 있어서, 도 2C에 도시한 제조 도중의 반도체 장치를 금형 내에 재치하고, 봉지 수지(몰드재)를 이용하여 트랜스퍼 몰드(금형 성형)함으로써 반도체 소자(30)를 봉지 수지(40)에 의해 봉지한다.Next, as shown in FIG. 2C, in the wire bonding step, the semiconductor element 30 and the lead 22 of the lead frame 20 are electrically connected through bonding wires 31 such as gold wire. Subsequently, as shown in FIG. 2D, in the resin encapsulation step, the semiconductor device in the middle of manufacturing shown in FIG. 2C is placed in a mold, and the semiconductor element is transferred by using a encapsulating resin (molding material) to transfer mold (molding). The 30 is sealed by the sealing resin 40.

이어서, 도 2E에 도시한 바와 같이, 접착 시트 박리 공정에 있어서, 접착 시트(10)를 봉지 수지(40) 및 리드 플레임(20)으로부터 박리함으로써 복수의 QFN(50)이 배열된 QFN 유니트(60)을 형성할 수 있다. 마지막으로, 도 2F에 도시한 바와 같이, 다이싱 공정에 있어서, QFN 유니트(60)를 각 QFN(50)의 외주를 따라 다이싱함으로써 복수의 QFN(50)을 제조할 수 있다.Subsequently, as shown in FIG. 2E, in the adhesive sheet peeling step, the adhesive sheet 10 is peeled from the encapsulating resin 40 and the lead frame 20 so that the QFN unit 60 in which the plurality of QFNs 50 is arranged is arranged. ) Can be formed. Finally, as illustrated in FIG. 2F, in the dicing step, the plurality of QFNs 50 can be manufactured by dicing the QFN units 60 along the outer periphery of each QFN 50.

이와 같이 본 발명의 접착 시트(10)를 이용하여 QFN 등의 반도체 장치를 제조함으로써 열경화형 접착제의 와이어 본딩성, 몰드 플래시 방지성을 유지한 채 상기 접착 시트가 플라즈마 클리닝 공정을 거친 상태에서도, 잔여 페이스트를 방지할 수 있고, 반도체 장치의 불량화를 방지할 수 있다.As described above, by manufacturing a semiconductor device such as QFN using the adhesive sheet 10 of the present invention, the adhesive sheet remains in the plasma cleaning process while maintaining the wire bonding property and the mold flash prevention property of the thermosetting adhesive. The paste can be prevented and deterioration of the semiconductor device can be prevented.

실시예Example

이어서, 본 발명에 따른 실시예 및 비교예에 대하여 설명하기로 한다.Next, Examples and Comparative Examples according to the present invention will be described.

각 실시예, 비교예에 있어서, 접착제를 조제하여 접착 시트를 제작하고, 얻어진 접착제층이나 접착 시트의 평가를 행하였다. 또한, 아래 표 1, 2에서의 배합비는 중량비이다.In each Example and the comparative example, the adhesive agent was prepared, the adhesive sheet was produced, and the obtained adhesive bond layer and the adhesive sheet were evaluated. In addition, the compounding ratio in Table 1, 2 below is a weight ratio.

실시예 1Example 1

표 1에 나타내는 조성 및 배합비에 테트라하이드로퓨란에 혼합하여 접착제 용액을 제작하였다. 이어서, 내열성 기재로서 폴리이미드 수지 필름(도우레 듀폰사 제품 상품명:카프톤 100EN, 두께 25μm, 글래스 전이 온도 300℃ 이상, 열팽창 계수 16ppm/℃)를 이용하고, 건조 후의 두께가 6μm가 되도록, 상기 접착제 용액을 도포한 후, 120℃에서 5분간 건조시키고, 접착제층을 가지는 본 발명의 접착 시트를 얻었다.It mixed with tetrahydrofuran in the composition and compounding ratio shown in Table 1, and produced the adhesive solution. Subsequently, the polyimide resin film (trade name: Dopton DuPont Co., Ltd. product name: Kafton 100EN, thickness 25 micrometers, glass transition temperature 300 degreeC or more, thermal expansion coefficient 16 ppm / degreeC) is used as a heat resistant base material, and the thickness after drying is set to 6 micrometers. After apply | coating an adhesive solution, it dried at 120 degreeC for 5 minutes, and obtained the adhesive sheet of this invention which has an adhesive bond layer.

또한, 열경화성 수지 성분(a)/열 가소성 수지 성분(b)의 중량비는 1.5, 및(열경화성 수지 성분(a)+열가소성 수지 성분(b))/(재박리성 부여 성분(c))의 중량비는 28.57이다.In addition, the weight ratio of the thermosetting resin component (a) / the thermoplastic resin component (b) is 1.5, and the weight ratio of (thermosetting resin component (a) + thermoplastic resin component (b)) / (repeelability-providing component (c)) Is 28.57.

실시예 2Example 2

접착제 용액을 표 1에 나타내는 조성 및 배합비로 변경한 이외에는 실시예 1과 같이 하여 본 발명의 접착 시트를 얻었다.Except having changed the adhesive solution into the composition and compounding ratio shown in Table 1, it carried out similarly to Example 1, and obtained the adhesive sheet of this invention.

또한, 열경화성 수지 성분(a)/열 가소성 수지 성분(b)의 중량비는 1.5, 및(열경화성 수지 성분(a)+열가소성 수지 성분(b))/(재박리성 부여 성분(c))의 중량비는 33.33이다.In addition, the weight ratio of the thermosetting resin component (a) / the thermoplastic resin component (b) is 1.5, and the weight ratio of (thermosetting resin component (a) + thermoplastic resin component (b)) / (repeelability-providing component (c)) Is 33.33.

실시예 3Example 3

열경화성 수지 성분(a), 열가소성 수지 성분(b) 및 경화 촉진제를 표 1에 나타내는 조성 및 배합비로 테트라하이드로퓨란에 혼합하여 접착제 용액을 제작하였다. 이어서, 내열성 기재로서 폴리이미드 수지 필름(도우레 듀폰사 제품 상품명:카프톤 100EN, 두께 25μm, 글래스 전이 온도 300℃ 이상, 열팽창 계수 16ppm/℃)를 이용하고, 건조 후의 두께가 6μm가 되도록, 상기 접착제 용액을 도포하였다, 100℃에서 3분간 건조시킨 접착제를 얻은 후, 재박리성 부여 성분(c) 1중량부를 테트라하이드로퓨란 50중량부로 희석한 용액을 표 1에 나타내는 배합비가 되도록 접착제 표면에 도포하고, 또한 120℃에서 5분간 건조시킨 접착제층을 갖는 본 발명의 접착 시트를 얻었다.The thermosetting resin component (a), the thermoplastic resin component (b), and a hardening accelerator were mixed with tetrahydrofuran in the composition and compounding ratio shown in Table 1, and the adhesive solution was produced. Subsequently, the polyimide resin film (trade name: Dopton DuPont Co., Ltd. product name: Kafton 100EN, thickness 25 micrometers, glass transition temperature 300 degreeC or more, thermal expansion coefficient 16 ppm / degreeC) is used as a heat resistant base material, and the thickness after drying is set to 6 micrometers. The adhesive solution was apply | coated, and after obtaining the adhesive dried at 100 degreeC for 3 minutes, the solution which diluted 1 weight part of re-peelability provision component (c) with 50 weight part of tetrahydrofuran was apply | coated to the adhesive surface so that the compounding ratio shown in Table 1 may become. And the adhesive sheet of this invention which has an adhesive bond layer dried at 120 degreeC for 5 minutes was obtained.

또한, 열경화성 수지 성분(a)/열 가소성 수지 성분(b)의 중량비는 1.5이다.In addition, the weight ratio of a thermosetting resin component (a) / thermoplastic resin component (b) is 1.5.

실시예 4Example 4

접착제 용액을 표 1에 나타내는 조성 및 배합비로 변경한 이외에는 실시예 3과 같이 하여 본 발명의 접착 시트를 얻었다.Except having changed the adhesive solution into the composition and compounding ratio shown in Table 1, it carried out similarly to Example 3, and obtained the adhesive sheet of this invention.

또한, 열경화성 수지 성분(a)/열 가소성 수지 성분(b)의 중량비는 1.5이다.In addition, the weight ratio of a thermosetting resin component (a) / thermoplastic resin component (b) is 1.5.

실시예 5Example 5

실시예 1과 같은 조성 및 배합비로 접착제 용액을 제작하고, 이어서 내열성 기재로서 동박(미츠이 금속 광업사 제품 상품명:3EC-VLP, 두께 25μm, 열팽창 계수 20ppm/℃)을 사용하고, 그 거친면 상에 건조 후의 두께가 8μm가 되도록 상기 접착제 용액을 도포하고, 120℃에서 5분간 건조시켜 접착제층을 가지는 본 발명의 접착 시트를 얻었다.The adhesive solution was produced by the composition and compounding ratio similar to Example 1, and it used copper foil (Mitsui Metal Co., Ltd. brand name: 3EC-VLP, thickness 25 micrometers, thermal expansion coefficient 20ppm / degreeC) as a heat resistant base material, on the rough surface The said adhesive solution was apply | coated so that thickness after drying might be set to 8 micrometers, and it dried at 120 degreeC for 5 minutes, and obtained the adhesive sheet of this invention which has an adhesive bond layer.

실시예 6Example 6

표 1에 나타내는 조성 및 배합비에서 N~메틸 피롤리돈에 혼합하여 접착제 용액을 제작하였다. 이어서 내열성 기재로서 동박(미츠이 금속 광업사 제품상품명:3EC-VLP, 두께 25μm)을 사용하고, 그 거친면 상에 건조 후의 접착제 두께가 6μm가 되도록 상기 접착제 용액을 도포하고, 180℃에서 10분간 건조시켜 접착제층을 가지는 본 발명의 접착 시트를 얻었다.The adhesive solution was produced by mixing with N-methyl pyrrolidone in the composition and compounding ratio shown in Table 1. Subsequently, copper foil (Mitsui Metal Co., Ltd. product name: 3EC-VLP, thickness 25 micrometers) is used as a heat resistant base material, the said adhesive solution is apply | coated so that the adhesive thickness after drying may be 6 micrometers on the rough surface, and it dried at 180 degreeC for 10 minutes. The adhesive sheet of this invention which has an adhesive bond layer was obtained.

또한, 열가소성 수지 성분(b)/(재박리성 부여 성분(c))의 중량비는 33.33이다.In addition, the weight ratio of the thermoplastic resin component (b) / (repeelability provision component (c)) is 33.33.

실시예1Example 1 실시예2Example 2 실시예3Example 3 실시예4Example 4 실시예5Example 5 실시예6Example 6 1층째The first floor 2층째2nd floor 1층째The first floor 2층째2nd floor 열경화성 수지 성분(a)Thermosetting Resin Component (a) 에폭시수지(대일본잉크화학공업사 제품 HP-7200)Epoxy Resin 4040 4040 4040 페놀수지(일본화약사 제품 TPM)Phenolic Resin (TPM, manufactured by Nippon Chemical Co., Ltd.) 2020 2020 2020 에폭시수지(자판에폭시레진사 제품 에피코트 828)Epoxy Resin (Epicoat 828, manufactured by Epoxy Resin, Inc.) 3030 3030 페놀수지(소화고분자사 제품 CKM 2400)Phenolic resin (CKM 2400 made by Digestion Polymer Co., Ltd.) 3030 3030 열가소성 수지 성분(b)Thermoplastic resin component (b) 아크릴로니트릴부타디엔공중합체수지(일본제온사 제품 Nipol 1001중량평균분자량 30-,000)Acrylonitrile butadiene copolymer resin (Nipol 1001 weight average molecular weight 30-, 000 made by Nippon Zeon) 4040 4040 4040 폴리아미드수지(헨켈자판사 제품 마크로멜트 6238중량평균분자량 40-,000)Polyamide resin (Macromel 6238 weight average molecular weight 40-, 000 made by Henkel Judge) 4040 4040 폴리이미드수지(도모에가와 제지소제품 실록산함유방향족폴리이미드중량평균분자량 50-,000)Polyimide Resin (Aromatic Polyimide Weight-average Molecular Weight 50-, 000 by Tomogawa Paper Mill) 100100 재박리성 부여 성분(c)Re-peelability imparting component (c) 변성실리콘오일(도우레 다우 코닝사 제품 SF8413)Modified silicone oil (SF8413 from Dow Dow Corning) 3.53.5 0.30.3 3.53.5 변성실리콘오일(신에츠실리콘사 제품 KF105)Modified silicone oil (KF105 from Shin-Etsu Silicone Co., Ltd.) 33 0.20.2 변성실리콘오일(신에츠실리콘사 제품 KF861)Modified Silicone Oil (KF861, manufactured by Shin-Etsu Silicone Co., Ltd.) 33 기타Etc 경화촉진제(시코쿠카세이사 제품2-에틸4-메틸이미다졸)Curing accelerator (2-ethyl4-methylimidazole from Shikoku Kasei Co., Ltd.) 1One 1One 1One 1One 1One

비교예1Comparative Example 1

접착제 용액을 표 2에 나타내는 조성 및 배합비로 혼합한 접착제 용액으로 변경한 이외에는 실시예 1과 같이 하여 비교용 접착 시트를 얻었다.A comparative adhesive sheet was obtained in the same manner as in Example 1 except that the adhesive solution was changed to the adhesive solution mixed with the composition and blending ratio shown in Table 2.

또한, 열경화성 수지 성분(a)/열 가소성 수지 성분(b)의 중량비는 1.5이다.In addition, the weight ratio of a thermosetting resin component (a) / thermoplastic resin component (b) is 1.5.

비교예 2Comparative Example 2

접착제 용액을 표 2에 나타내는 조성 및 배합비로 변경한 이외에는 실시예 1과 같이 하여 비교용 접착 시트를 얻었다.A comparative adhesive sheet was obtained in the same manner as in Example 1 except that the adhesive solution was changed to the composition and compounding ratio shown in Table 2.

또한, 열경화성 수지 성분(a)/열 가소성 수지 성분(b)의 중량비는 1.5이다.In addition, the weight ratio of a thermosetting resin component (a) / thermoplastic resin component (b) is 1.5.

비교예 1Comparative Example 1 비교예 2Comparative Example 2 열경화성 수지 성분(a)Thermosetting Resin Component (a) 에폭시수지(대일본잉크화학공업사 제품 HP-7200)Epoxy Resin 4040 페놀수지(일본화약사 제품 TPM)Phenolic Resin (TPM, manufactured by Nippon Chemical Co., Ltd.) 2020 에폭시수지(자판에폭시레진사 제품 에피코트 828)Epoxy Resin (Epicoat 828, manufactured by Epoxy Resin, Inc.) 3030 페놀수지(소화고분자사 제품 CKM 2400)Phenolic resin (CKM 2400 made by Digestion Polymer Co., Ltd.) 3030 열 가소성 수지 성분(b)Thermoplastic resin component (b) 아크릴로니트릴부타디엔공중합체수지(일본제온사 제품 Nipol 1001중량평균분자량 30-,000)Acrylonitrile butadiene copolymer resin (Nipol 1001 weight average molecular weight 30-, 000 made by Nippon Zeon) 4040 폴리아미드수지(헨켈자판사 제품 마크로멜트 6238중량평균분자량 40-,000)Polyamide resin (Macromel 6238 weight average molecular weight 40-, 000 made by Henkel Judge) 4040 폴리이미드수지(도모에가와 제지소제품 실록산함유방향족폴리이미드중량평균분자량 50-,000)Polyimide Resin (Aromatic Polyimide Weight-average Molecular Weight 50-, 000 by Tomogawa Paper Mill) 재박리성 부여 성분(c)Re-peelability imparting component (c) 변성실리콘오일(도우레 다우 코닝사 제품 SF8413))Modified silicone oil (SF8413 from Dow Dow Corning) 변성실리콘오일(신에츠실리콘사 제품 KF105)Modified silicone oil (KF105 from Shin-Etsu Silicone Co., Ltd.) 변성실리콘오일(신에츠실리콘사 제품 KF861)Modified Silicone Oil (KF861, manufactured by Shin-Etsu Silicone Co., Ltd.) 기타Etc 경화촉진제(시코쿠카세이사 제품 2-에틸4-메틸이미다졸)Curing accelerator (2-ethyl4-methylimidazole from Shikoku Chemical Co., Ltd.) 1One 1One

(저장 탄성율의 측정)(Measurement of storage modulus)

실시예 및 비교예에서 얻어진 접착제 용액을 이형필름 상에 도포한 후, 접착 시트를 제작할 때와 같은 건조 조건으로 건조하고, 또한 다이 어태치 공정의 열처리 조건(175℃에서 2시간)에서 열처리를 행하여 접착제층이 부착된 이형성 필름을 제작하였다. 또한, 건조 후의 두께가 O.lmm가 되도록 접착제의 도포, 건조를 행하였다.After applying the adhesive solution obtained in Examples and Comparative Examples on the release film, and dried under the same drying conditions as when producing the adhesive sheet, and further subjected to heat treatment under the heat treatment conditions (2 hours at 175 ℃) of the die attach process The release film with an adhesive bond layer was produced. Moreover, the adhesive agent was apply | coated and dried so that the thickness after drying might be 0.1 mm.

얻어진 샘플을 5mm×30mm로 절단하고, 탄성율 측정 장치(오리엔테크사 제품 레오바이브론 DDV-II)를 이용하여 주파수 1lHz, 승온속도 3℃/min, 측정 온도 범위 150℃~250℃에서 측정을 행하였다. 그 결과를 표 3에 나타내었다. 또한, 표 3의 수치는, 측정 온도 범위 150℃~250℃에서의 저장 탄성율의 최소치를 나타낸다.The obtained sample was cut into 5 mm x 30 mm, and the measurement was performed at a frequency of 1 lHz, a heating rate of 3 ° C / min, and a measurement temperature range of 150 ° C to 250 ° C using an elastic modulus measuring device (Leovibronn DDV-II manufactured by Orientech Co., Ltd.). It was. The results are shown in Table 3. In addition, the numerical value of Table 3 shows the minimum value of the storage elastic modulus in the measurement temperature range 150 degreeC-250 degreeC.

(접착 시트의 평가)(Evaluation of adhesive sheet)

1. 와이어 본딩 불량1. Bad wire bonding

각 실시예 및 비교예에 있어서 얻어진 접착 시트를, 바깥치수 200mm×60mm의 QFN용 리드 플레임(Au-Pd-Ni 도금 Cu 리드 플레임, 4×6개(합계 64개)의 매트릭스 배열, 패키지 사이즈 10mm×10mm, 84핀)에 라미네이트법에 의해 점착하였다.The adhesive sheets obtained in the examples and the comparative examples were made of QFN lead frames (Au-Pd-Ni-plated Cu lead frames, 4 x 6 (64 in total) matrix arrangement, package size 10 mm, having an outer dimension of 200 mm x 60 mm. 10 mm, 84 pins) by the lamination method.

그것들의 반수에 대하여 플라즈마 클리닝을 실시하였다.Plasma cleaning was performed on half of them.

이어서, 에폭시계 다이어태치제를 사용하여 알루미늄이 증착된 더미칩(6mm×6mm, 두께 0.4mm)을 리드 플레임의 반도체 소자 탑재부에 탑재한 후, 와이어 본더(신카와사 제품, UTC-470BI)를 이용하여, 가열 온도를 210℃, US POWER를 30, 하중을 0.59N, 처리 시간을 1Omsec/핀으로 하여, 더미칩과 리드를 금와이어에 의해 전기적으로 접속하였다.Subsequently, a dummy chip (6 mm x 6 mm, thickness 0.4 mm) in which aluminum was deposited using an epoxy die attach agent was mounted on the semiconductor element mounting part of the lead frame, and then a wire bonder (Shinkawa Co., Ltd., UTC-470BI) was mounted. The dummy chip and the lead were electrically connected by gold wires using a heating temperature of 210 ° C., US POWER of 30, a load of 0.59 N, and a processing time of 10 msec / pin.

얻어진 패키지 64개를 검사하고, 리드측 접속 불량이 발생한 패키지수를, 와이어 본딩 불량의 발생 개수로서 검출하고, 그 결과를 표 3에 나타내었다.64 obtained packages were inspected, the number of packages in which the lead-side connection failure occurred was detected as the number of occurrences of the wire bonding failure, and the results are shown in Table 3.

2, 몰드 플래시2, mold flash

와이어 본딩 불량 평가 후의 리드 플레임을 이용하여 몰드 플래시의 평가를 행하였다. 우선 플라즈마 클리닝을 실시한 플레임과 실시하지 않은 플레임으로 나누고, 각각 에폭시계 몰드제(비페닐에폭시계, 필러량 85중량%)를 이용하여, 가열 온도를 180℃, 압력을 10MPa, 처리 시간을 3분간으로 하고, 트랜스퍼 몰드(금형 성형)에 의해, 더미칩을 봉지 수지로 봉지하였다.The mold flash was evaluated using the lead frame after wire bonding failure evaluation. First, the plasma cleaning and non-flaming flames were divided into epoxy-based molds (biphenyl epoxy clock, filler amount of 85% by weight), and the heating temperature was 180 ° C, the pressure was 10 MPa, and the treatment time was 3 minutes. The dummy chip was sealed with a sealing resin by a transfer mold (molding).

수지 봉지후의 패키지(64)개를 검사하고, 리드의 외부 접속용 부분(리드의 접착 시트측의 면)에 봉지 수지가 부착되어 있는 패키지수를, 몰드 플래시의 발생 개수로서 검출하고, 그 결과를 표 3에 나타내었다.The package 64 after resin encapsulation is inspected, and the number of packages in which the encapsulating resin is attached to the external connection portion of the lid (the surface on the adhesive sheet side of the lead) is detected as the number of occurrences of the mold flash, and the result is determined. Table 3 shows.

3. 잔여 페이스트3. Residual Paste

플라즈마 클리닝의 유무를 포함하는 몰드 플래시의 평가 후의 리드 플레임을 사용하여 잔여 페이스트의 평가를 행하였다. 우선 접착 시트를 리드 플레임으로부터 박리 속도 500mm/min의 조건으로 박리하였다.The residual paste was evaluated using the lead frame after evaluation of the mold flash including the presence or absence of plasma cleaning. First, the adhesive sheet was peeled from the lead frame under conditions of a peel rate of 500 mm / min.

접착 시트의 박리 후의 패키지 64개를 검사하고, 리드의 외부 접속용 부분, 몰드 수지면을 포함하는 접착 시트 박리면에 접착제가 부착되어 있는 패키지 개수를 잔여 페이스트의 발생수로서 표 3에 나타내었다.The 64 packages after the peeling of the adhesive sheet were inspected, and the number of packages in which the adhesive was attached to the adhesive sheet peeling surface including the external connection portion of the lid and the mold resin surface was shown in Table 3 as the number of remaining pastes.

4. 접착 강도4. adhesive strength

각 실시예 및 비교예에서 얻어진 접착 시트를 1cm 폭으로 절단하고, 50mm×100mm×0.25mmt의 동판(미츠비시 메텍스사 제품 상품명:MF-202), 및 동판에 금도금한 판에 롤 라미네이션에 의해 압착시켰다. 이어서 다이어태치 큐어(175℃ 1시간), 몰드 수지 큐어(180℃ 4시간)로 상당한 열이력후 상온으로 되돌렸다. 이들 판을 150℃로 가열하고, 얻어진 적층체의 접착제층을 판자에 대하여 90° 방향으로 떼어 냈을 때의 박리 강도를 측정하였다.The adhesive sheet obtained by each Example and the comparative example was cut | disconnected by 1 cm width, and crimped | bonded by roll lamination to 50 mm x 100 mm x 0.25 mmt copper plate (Mitsubishi Metex company brand name: MF-202), and the plate | board gold-plated. I was. Subsequently, the die attach cure (175 ° C. for 1 hour) and the mold resin cure (180 ° C. for 4 hours) were returned to room temperature after considerable heat history. These boards were heated to 150 degreeC, and the peeling strength at the time of peeling the adhesive bond layer of the obtained laminated body with respect to a board | substrate in the 90 degree direction was measured.

또한, 이 박리 강도의 측정을 판의 가열 온도를 150℃에서 200℃까지 5℃마다 상승시켜 행하였다. 그리고, 150~200℃의 각 측정 온도에서의 박리 강도 중 최소치를 접착 시트의 접착 강도로 하고, 그 결과를 표 3에 나타내었다. 이 경우, 실용상 필요로 하는 동판으로의 접착력은, 금도금의 유무를 불문하고 0.098N/cm 이상이다.In addition, the measurement of this peeling strength was performed by raising the heating temperature of a board every 5 degreeC from 150 degreeC to 200 degreeC. And the minimum value in peeling strength in each measurement temperature of 150-200 degreeC was made into the adhesive strength of an adhesive sheet, and the result was shown in Table 3. In this case, the adhesive force to the copper plate practically required is 0.098 N / cm or more with or without gold plating.

저장탄성율(MPa)Storage modulus (MPa) 와이어본딩불량(개)Bad wire bonding () 몰드플래시(개)Mold Flash (pcs) 잔여페이스트발생(개)Remaining Paste () 접착강도(N/cm)Adhesive strength (N / cm) 플라즈마없음No plasma 플라즈마있음With plasma 플라즈마없음No plasma 플라즈마있음With plasma 플라즈마없음No plasma 플라즈마있음With plasma 플라즈마없음No plasma 플라즈마있음With plasma 실시예1Example 1 3030 00 00 00 00 00 00 0.780.78 0.290.29 실시예2Example 2 4040 00 00 00 00 00 00 0.590.59 0.390.39 실시예3Example 3 3030 00 00 00 00 00 00 0.590.59 0.390.39 실시예4Example 4 4545 00 00 00 00 00 00 0.340.34 0.250.25 실시예5Example 5 3030 00 00 00 00 00 00 0.490.49 0.390.39 실시예6Example 6 5050 00 00 00 00 00 00 0.290.29 0.290.29 비교예1Comparative Example 1 3030 00 00 00 00 00 2525 2.92.9 0.490.49 비교예2Comparative Example 2 40-40- 00 00 00 00 00 3939 0.590.59 0.490.49

표 3에 나타내는 바와 같이, 본 발명의 접착 시트는 플라즈마 클리닝을 실시한 리드 플레임에 있어서도, 와이어본딩 불량, 몰드 플래시 및 잔여 페이스트가 전혀 발생하지 않았다. 이에 비해, 재박리성 부여 성분(c)을 함유하지 않는 비교예에서는 잔여 페이스트가 다수 발생하였다.As shown in Table 3, even in the lead flame subjected to plasma cleaning, the adhesive sheet of the present invention did not generate any defective wire bonding, mold flash, and residual paste. On the other hand, in the comparative example which does not contain re-peelability provision component (c), many residual paste generate | occur | produced.

상술한 바와 같이, 본 발명의 반도체 장치 제조용 접착 시트에 있어서는, 접착제층이 플라즈마 클리닝에 노출되더라도 적절한 박리성을 유지하여 잔여 페이스트가 발생하지 않는다. 이 때문에, 본 발명의 접착 시트를 이용하여 QFN 등의 반도체 장치를 제조함으로써 와이어 본딩 불량, 몰드 플래시는 물론 잔여 페이스트를 방지할 수 있고, 반도체 장치의 불량화를 방지할 수 있다.As described above, in the adhesive sheet for manufacturing a semiconductor device of the present invention, even when the adhesive layer is exposed to plasma cleaning, proper peelability is maintained and no residual paste is generated. For this reason, manufacturing a semiconductor device, such as QFN, using the adhesive sheet of this invention can prevent a wire bonding defect, a mold flash, and a residual paste, and can prevent a defect of a semiconductor device.

Claims (17)

리드 플레임 또는 배선 기판에 박리 가능하게 점착되는 반도체 장치 제조용 접착 시트에 있어서,In the adhesive sheet for semiconductor device manufacture which sticks so that peeling is possible to a lead flame or a wiring board, 내열성 기재와 접착제층을 갖는 적층체를 가지며, 상기 접착제층이 열가소성 수지 성분(b) 및 재박리성 부여 성분(c)을 함유하는 것을 특징으로 하는 반도체 장치 제조용 접착 시트.It has a laminated body which has a heat resistant base material and an adhesive bond layer, The said adhesive bond layer contains a thermoplastic resin component (b) and a re-peelability provision component (c), The adhesive sheet for semiconductor device manufacture characterized by the above-mentioned. 제 1 항에 있어서, 상기 접착제층이 열경화성 수지 성분(a)을 함유하는 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for manufacturing a semiconductor device according to claim 1, wherein the adhesive layer contains a thermosetting resin component (a). 제 1 항에 있어서, 상기 재박리성 부여 성분(c)이 실리콘 오일인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for manufacturing a semiconductor device according to claim 1, wherein the re-peelability imparting component (c) is silicone oil. 제 1 항에 있어서, 상기 재박리성 부여 성분(c)이 반응성을 가지며, 열가소성 수지 성분(b)과 화학적으로 결합 상태에 있는 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for manufacturing a semiconductor device according to claim 1, wherein the re-peelability imparting component (c) is reactive and chemically bonded to the thermoplastic resin component (b). 제 2 항에 있어서, 상기 재박리성 부여 성분(c)이 반응성을 가지며, 열경화성 수지 성분(a)과 열가소성 수지 성분(b)의 혼합물과 화학적으로 결합 상태에 있는 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive for semiconductor device manufacture according to claim 2, wherein the re-peelability imparting component (c) is reactive and chemically bonded to a mixture of the thermosetting resin component (a) and the thermoplastic resin component (b). Sheet. 제 1 항에 있어서, 동 또는 금도금한 동에 접착하고, 경화후의 150~200℃에서의 박리력이 0.03~5N/cm인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for semiconductor device manufacture according to claim 1, wherein the adhesive force is bonded to copper or gold plated copper and the peeling force at 150 to 200 ° C after curing is 0.03 to 5 N / cm. 제 2 항에 있어서, 상기 접착제층은, 재박리성 부여 성분(c)과 열경화성 수지 성분(a)과 열가소성 수지 성분(b)과의 혼합물을 성막하여 이루어진 것을 특징으로 하는 반도체 장치 제조용 접착 시트.3. The adhesive sheet for manufacturing a semiconductor device according to claim 2, wherein the adhesive layer is formed by forming a mixture of a repeelability imparting component (c), a thermosetting resin component (a), and a thermoplastic resin component (b). 제 2 항에 있어서, 상기 접착제층의 열경화성 수지 성분(a) 및 열가소성 수지 성분(b)의 중량 비율(a)/(b)가 3.5 이하, ((a)+(b))/(c)가 6~2,000인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The weight ratio (a) / (b) of the thermosetting resin component (a) and the thermoplastic resin component (b) of the adhesive layer is 3.5 or less, ((a) + (b)) / (c). Is 6-2,000, The adhesive sheet for semiconductor device manufacture characterized by the above-mentioned. 제 2 항에 있어서, 재박리성 부여 성분(c)이 열경화성 수지 성분(a)과 열가소성 수지 성분(b)으로 이루어지는 접착제층의 표면에 성막된 것임을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for manufacturing a semiconductor device according to claim 2, wherein the re-peelability imparting component (c) is formed on the surface of the adhesive layer made of the thermosetting resin component (a) and the thermoplastic resin component (b). 제 1 항에 있어서, 열가소성 수지 성분(b)의 중량 평균 분자량이 2,000~1,000,O00인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for semiconductor device manufacture of Claim 1 whose weight average molecular weights of a thermoplastic resin component (b) are 2,000-1,000,000. 상기 접착제층의 경화 후의 저장 탄성율이 150~250℃에 있어서 1MPa 이상인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The storage elastic modulus after hardening of the said adhesive bond layer is 1 Mpa or more in 150-250 degreeC, The adhesive sheet for semiconductor device manufacture characterized by the above-mentioned. 제 1 항에 있어서, 상기 내열성 기재는 글래스 전이 온도가 150℃ 이상이고, 또한 열팽창 계수가 5~50ppm/℃의 내열성 수지 필름인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The said heat resistant base material is a heat resistant resin film whose glass transition temperature is 150 degreeC or more, and a thermal expansion coefficient is 5-50 ppm / degreeC, The adhesive sheet for semiconductor device manufacture of Claim 1 characterized by the above-mentioned. 제 1 항에 있어서, 상기 내열성 기재는 열팽창 계수가 5~50ppm/℃의 금속박인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for manufacturing a semiconductor device according to claim 1, wherein the heat resistant base material is a metal foil having a thermal expansion coefficient of 5 to 50 ppm / ° C. 제 1 항에 있어서, 상기 접착제층의 일면에 보호 필름이 설치되어 있는 것을 특징으로 하는 반도체 장치 제조용 접착 시트.The adhesive sheet for manufacturing a semiconductor device according to claim 1, wherein a protective film is provided on one surface of the adhesive layer. 제 1 항에 있어서, 동 또는 금도금한 동과 접착시켰을 때의 접착 강도가 0.098N/cm 이상인 것을 특징으로 하는 반도체 장치 제조용 접착 시트.2. The adhesive sheet for manufacturing a semiconductor device according to claim 1, wherein the adhesive strength when the substrate is bonded with copper or gold-plated copper is 0.098 N / cm or more. 제 1 항 내지 제 15 항 중 어느 한 항에 기재된 반도체 장치 제조용 접착 시트를 이용하여 제조된 것을 특징으로 하는 반도체 장치.The semiconductor device manufactured using the adhesive sheet for semiconductor device manufacture in any one of Claims 1-15. 제 1 항 내지 제 15 항 중 어느 한 항에 기재된 반도체 장치 제조용 접착 시트를 이용하여 제조하는 것을 특징으로 하는 반도체 장치의 제조 방법.It manufactures using the adhesive sheet for semiconductor device manufacture in any one of Claims 1-15, The manufacturing method of the semiconductor device characterized by the above-mentioned.
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