KR20040051131A - Floating Device for Glass of Liquid Crystal Display - Google Patents
Floating Device for Glass of Liquid Crystal Display Download PDFInfo
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- KR20040051131A KR20040051131A KR1020020078986A KR20020078986A KR20040051131A KR 20040051131 A KR20040051131 A KR 20040051131A KR 1020020078986 A KR1020020078986 A KR 1020020078986A KR 20020078986 A KR20020078986 A KR 20020078986A KR 20040051131 A KR20040051131 A KR 20040051131A
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- floating
- glass substrate
- porous plate
- lower housing
- pressure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Abstract
Description
발명의 분야Field of invention
본 발명은 액정표시장치(Liquid Crystal Display: LCD)의 유리기판(glass)을 부상시켜 반송하기 위한 부상반송장치에 관한 것이다. 보다 구체적으로, 본 발명의 LCD용 유리기판을 반송시키기 전에 부상시키기 위한 부상장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a floating conveying apparatus for floating and conveying a glass substrate of a liquid crystal display (LCD). More specifically, the present invention relates to a floating apparatus for floating before conveying the glass substrate for LCD of the present invention.
발명의 배경Background of the Invention
LCD용 유리기판을 이송하는 경우에는 마찰에 의한 제품의 손상을 예방하기 위하여 유리기판을 부상시킨 후 이송시키는 부상반송장치가 이용되고 있다. 일단 부상장치에 CDA나 DIW를 일정한 압력으로 공급하여 반송하고자 하는 대상물체를 부상시키고, 부상된 대상물체의 양쪽 측부에서 측부 롤러(side roller)를 이용하여 이송시킨다.In the case of conveying the glass substrate for LCD, a floating conveying device is used to inflate and convey the glass substrate in order to prevent product damage due to friction. First, the CDA or DIW is supplied to the flotation device at a constant pressure to injure the object to be conveyed, and then transported by using side rollers on both sides of the injured object.
LCD용 유리기판과 같이 부상시키고자 하는 대상물체를 부상시키기 위하여, 대상물체의 하부쪽 부상장치(1)가 설치된다. 제1도에는 하나의 부상장치만을 도시하였지만, 부상장치는 유리기판(2)과 같은 대상물체가 이동하는 방향을 따라 직렬로 배열되고, 이동방향과 수직되는 방향으로 다시 병렬 배열된다. 즉 대상물체가 원하는 높이로 균일하게 부상되어 이송될 수 있도록 적절한 간격을 유지하면서 직렬 및 병렬배열을 하게 된다.In order to float an object to be floated, such as a glass substrate for an LCD, a lower surface floating apparatus 1 of the object is installed. Although only one floating device is shown in FIG. 1, the floating device is arranged in series along the direction in which the object, such as the glass substrate 2 moves, and arranged in parallel again in the direction perpendicular to the moving direction. That is, the object is arranged in series and parallel while maintaining proper spacing so that the object can be uniformly floated and transported to a desired height.
제1도에 도시된 바와 같이, 부상계에 CDA나 DIW를 공급하기 위한 유체공급계가 도시되어 있다. 유체공급계에는 조절계(regulator), 밸브(valve), 압력계(pressure gauge), 유량계(flowmeter) 등이 설치되어 부상계로 공급되는 유량을 제어하고 체크한다.As shown in FIG. 1, a fluid supply system for supplying CDA or DIW to a flotation system is shown. The fluid supply system is equipped with a regulator, a valve, a pressure gauge, a flow meter, and the like to control and check the flow rate supplied to the flotation system.
부상장치(1)는 상부의 다공판(porous plate)(10)과 하부의 하우징(13), 그리고 그 내부공간(2)으로 이루어진다. 주입구(14)를 통하여 내부공간(20)으로 CDA나 DIW가 공급되고 이들 유체는 다공판(10)을 통하여 상부쪽으로 분출되고, 그 분출되는 압력에 의하여 유리기판(2)이 부상한다. LCD용 유리기판을 이송하기 위한 부상장치에서는, 유리기판이 다공판으로부터 약 0.1∼2.0㎜의 간격을 유지하면서 부상되는 것이 바람직하다.The flotation device 1 consists of a porous plate 10 on the upper side, a housing 13 on the lower side, and an inner space 2 thereof. CDA or DIW is supplied to the internal space 20 through the inlet 14, and these fluids are ejected upward through the porous plate 10, and the glass substrate 2 is floated by the ejected pressure. In the floating apparatus for conveying the glass substrate for LCD, it is preferable that the glass substrate be floated while maintaining a distance of about 0.1 to 2.0 mm from the porous plate.
부상장치(1)에서 사용되고 있는 이제까지의 다공판(10)으로는 SUS 다공판, 청동 다공판 및 세라믹 다공판이 있다. 이들 다공판은 각각 여러 가지 문제점을 안고 있다.The conventional porous plate 10 used in the floating apparatus 1 includes a SUS porous plate, a bronze porous plate, and a ceramic porous plate. Each of these perforated plates has various problems.
SUS 다공판은 내열성이 양호하지만, 가격이 비싸고 가공성이 나쁘며 다공조절이 어렵고 경도가 이송물체인 유리기판보다 높다는 결점이 있다. 청동 다공판은 내열성이 양호하고 표면 가공성이 우수하지만, 가격이 비싸고 다공조절이 어려우며 역시 경도가 유리기판보다 높은 결점이 있다. 알루미나로 제조되는 세라믹 다공판은 내화학성이 양호하지만, 가격이 비싸고 내충격성이 약하며 경도가 유리기판보다 높다.Although SUS porous plate has good heat resistance, it has the disadvantage that it is expensive, poor processability, difficult to control porosity, and hardness is higher than glass substrate which is a conveying object. Bronze porous plate has good heat resistance and excellent surface workability, but it is expensive, difficult to control porosity, and also has the disadvantage of higher hardness than glass substrate. Ceramic porous plates made of alumina have good chemical resistance, but are expensive, have low impact resistance, and have higher hardness than glass substrates.
상기와 같은 기존의 다공판들이 유리기판보다 경도가 높다는 것은 치명적인 결함으로 여겨지고 있다. 유리기판이 다공판보다 경도가 낮기 때문에 취급과정 중에 마찰에 의한 스크래치(scratch)와 같이 손상이 발생하기 때문이다. 따라서 다공판의 경도가 유리기판보다 낮아야 마찰에 의한 손상을 예방할 수 있음에도 불구하고 이제까지 그러한 재질은 개발되지 못한 실정이다. 물론 유리기판보다 낮은 경도를 갖는 재질은 많이 있지만 다공을 형성하기가 또한 어려운 상황이었기 때문이다.It is considered that the above-mentioned conventional porous plates have higher hardness than glass substrates, which is a fatal defect. This is because the glass substrate has a lower hardness than the porous plate, so that damage may occur, such as scratches caused by friction during handling. Therefore, even though the hardness of the porous plate is lower than the glass substrate to prevent damage due to friction, such a material has not been developed until now. Of course, there are many materials with lower hardness than glass substrates, but it was also difficult to form pores.
본 발명자들은 상기와 같은 종래의 문제점을 해결하고자 특정한 사이즈를 갖는 폴리에틸렌 다공판이 LCD용 유리기판의 부상장치용 다공판에 적합하다는 것을 연구하여 본 발명을 개발하기에 이른 것이다.The present inventors came to develop the present invention by studying that a polyethylene porous plate having a specific size is suitable for the floating plate for the floating device of the glass substrate for LCD in order to solve the conventional problems as described above.
본 발명의 목적은 유리기판보다 경도가 낮은 다공판을 개발하여 마찰에 의한 제품의 손상을 예방할 수 있는 부상장치를 제공하기 위한 것이다.An object of the present invention is to provide a flotation device that can prevent damage to the product by friction by developing a porous plate having a lower hardness than the glass substrate.
본 발명의 다른 목적은 CDA나 DIW와 같은 유체가 주입되는 주입구(14)에서의 다공판(10)과 하부하우징(12)사이에 격판(15)을 설치하여 다공판에 균일한 압력으로 유체를 분출시킬 수 있는 부상장치를 제공하기 위한 것이다.Another object of the present invention is to install a diaphragm 15 between the porous plate 10 and the lower housing 12 in the inlet 14, the fluid such as CDA or DIW is injected to the fluid at a uniform pressure on the porous plate To provide a flotation device that can be ejected.
본 발명의 상기 및 기타의 목적들은 하기 설명되는 본 발명에 의하여 모두 달성될 수 있다.The above and other objects of the present invention can be achieved by the present invention described below.
제1도는 액정표시장치용 유리기판을 부상시키기 위하여 부상유체(CDA(Clean Dry Air) 또는 DIW(Deionized Water))를 부상장치(1)로 공급하기 위한 유체공급계와 부상장치로부터 분출되는 유체압에 의하여 액정표시장치용 유리기판을 부상시키는 부상계를 개략적으로 도시한 시스템 구성도이다.1 is a fluid supply system for supplying a floating fluid (CDA (Clean Dry Air) or DIW (Deionized Water)) to the floating device 1 to float a glass substrate for a liquid crystal display device, and the fluid pressure ejected from the floating device. Is a system configuration diagram schematically showing a flotation system for floating a glass substrate for a liquid crystal display device.
제2도는 본 발명에 따른 부상장치의 평면도이다.2 is a plan view of the flotation device according to the present invention.
제3도는 제2도의 A-A선에 따른 개략적인 단면도이다.3 is a schematic cross-sectional view taken along the line A-A of FIG.
* 도면의 주요 부호에 대한 간단한 설명 *Brief description of the main symbols in the drawings
1 : 부상장치 2 : LCD용 유리기판1: Floating device 2: LCD glass substrate
10 : 다공판11 : 상부 하우징10: perforated plate 11: upper housing
12 : 하부 하우징13 : 볼트12 lower housing 13 bolt
14 : 부상유체 주입구15 : 격판14: floating fluid inlet 15: diaphragm
16, 17 : 격판 지지부20 : 내부공간16, 17: diaphragm support 20: internal space
발명의 요약Summary of the Invention
본 발명은 LCD용 유리기판(2)을 부상시켜 이송하는 부상반송장치에 있어서, 약 0.1∼0.5㎛의 포아 사이즈(pore size)를 갖고 약 5∼15㎜의 두께를 갖는 폴리에틸렌 다공판(10)으로 이루어지는 부상장치(1)에 관한 것이다.According to the present invention, a polyethylene porous plate (10) having a pore size of about 0.1 to 0.5 탆 and a thickness of about 5 to 15 mm in a floating conveying apparatus for floating and transporting an LCD glass substrate (2). It relates to a floating device (1) consisting of.
상기 부상장치는 폴리에틸렌 다공판(10), 상부하우징(11) 및 하부하우징(12)으로 이루어지며, 상기 상부하우징과 하부하우징은 볼트(13)로써 조립되고, 부상유체 주입구(14)부위의 압력을 분산시켜 내부공간(20)의 압력을 균일화하기 위하여 상기 다공판과 하부하우징 사이에 격판(15)이 설치되는 것을 특징으로 한다.The floating device is composed of a polyethylene porous plate 10, the upper housing 11 and the lower housing 12, the upper housing and the lower housing is assembled with a bolt 13, the pressure of the floating fluid inlet 14 In order to uniformize the pressure in the inner space 20 by dispersing the diaphragm 15 is provided between the perforated plate and the lower housing.
이하 첨부된 도면을 참고로 본 발명의 내용을 하기에 상세히 설명한다.Hereinafter, with reference to the accompanying drawings will be described in detail the contents of the present invention.
발명의 구체예에 대한 상세한 설명Detailed Description of the Invention
제1도는 액정표시장치용 유리기판을 부상시키기 위하여 CDA나 DIW를 부상장치(1)로 공급하기 위한 유체공급계와 부상장치로부터 분출되는 유체압에 의하여 액정표시장치용 유리기판을 부상시키는 부상계를 개략적으로 도시한 시스템 구성도이다. 본 발명은 상기 부상반송 시스템에 있어서, 부상장치에 관한 것이다.1 is a flotation system for floating a glass substrate for a liquid crystal display device by a fluid supply system for supplying a CDA or DIW to the flotation device 1 to float the glass substrate for a liquid crystal display device and a fluid pressure ejected from the flotation device. It is a system block diagram schematically showing. The present invention relates to a floating apparatus in the above-mentioned floating conveying system.
제1도에 도시된 바와 같이, 부상계에 유체를 공급하기 위하여 조절계(regulator), 밸브(valve), 압력계(pressure gauge), 유량계(flowmeter) 등이 구비되는 유체공급계가 설치된다. 유체로는 CDA나 DIW가 사용된다. 유체공급계에서는 부상계로 공급되는 유량을 제어하고 체크하여 항상 균일한 압력으로 유량을 공급할 수 있도록 한다.As shown in FIG. 1, a fluid supply system is provided that is provided with a regulator, a valve, a pressure gauge, a flow meter, and the like for supplying fluid to the flotation system. CDA or DIW may be used as the fluid. In the fluid supply system, the flow rate to the flotation system is controlled and checked so that the flow rate is always supplied at a uniform pressure.
부상장치(1)는 상부의 다공판(porous plate)(10)과 하부의 하우징(13), 그리고 그 내부공간(2)으로 이루어진다. 주입구(14)를 통하여 내부공간(20)으로 CDA나 DIW가 공급되고 이들 유체는 다공판(10)을 통하여 상부쪽으로 분출되고, 그 분출되는 압력에 의하여 유리기판(2)이 부상한다. LCD용 유리기판을 이송하기 위한 부상장치에서는, 유리기판이 다공판으로부터 약 0.2∼2.0㎜의 간격을 유지하면서 부상되는 것이 바람직하다. 이 간격은 유량의 압력에 의하여 조절될 수 있다.The flotation device 1 consists of a porous plate 10 on the upper side, a housing 13 on the lower side, and an inner space 2 thereof. CDA or DIW is supplied to the internal space 20 through the inlet 14, and these fluids are ejected upward through the porous plate 10, and the glass substrate 2 is floated by the ejected pressure. In the floating apparatus for conveying the glass substrate for LCD, it is preferable that the glass substrate floats while maintaining a distance of about 0.2 to 2.0 mm from the porous plate. This interval can be adjusted by the pressure of the flow rate.
제2도는 본 발명에 따른 부상장치의 평면도이고, 제3도는 제2도의 A-A선에 따른 개략적인 단면도이다.2 is a plan view of the flotation apparatus according to the present invention, and FIG. 3 is a schematic cross-sectional view taken along the line A-A of FIG.
본 발명은 LCD용 유리기판(2)을 부상시켜 이송하는 부상반송장치에 있어서, 새로운 재질과 구조를 갖는 다공판으로 이루어지는 부상장치(1)에 관한 것이다. 본 발명의 다공판은 약 0.1∼0.5㎛의 포아 사이즈(pore size)를 갖는 폴리에틸렌으로 제조되고, 약 5∼15㎜의 두께를 갖는 것이 바람직하다. 본 발명에서는 다공판이 폴리에틸렌으로 제조되기 때문에 휘어지는 현상이 발생한다. 따라서 이러한 현상을 예방하기 위하여 충분한 두께를 갖는 것이 중요하다. 이러한 관점에서 본 발명에서는 약 5∼15㎜의 두께를 갖는 것이 바람직하다.The present invention relates to a flotation device (1) comprising a porous plate having a new material and structure in a flotation transport device for floating and transporting an LCD glass substrate (2). The porous plate of the present invention is preferably made of polyethylene having a pore size of about 0.1 to 0.5 mu m, and preferably has a thickness of about 5 to 15 mm. In the present invention, since the porous plate is made of polyethylene, a warpage phenomenon occurs. Therefore, it is important to have a sufficient thickness to prevent this phenomenon. From this point of view, the present invention preferably has a thickness of about 5 to 15 mm.
상기 부상장치는 폴리에틸렌 다공판(10), 상부하우징(11) 및 하부하우징(12)으로 이루어지며, 상기 상부하우징과 하부하우징은 복수 개의 볼트(13)로써 조립된다. 상부하우징과 하부하우징이 접촉하는 부위에는 CDA나 DIW가 누출되지 않도록 실링(sealing)재를 첨가하여 밀봉하는 것이 바람직하다.The floating apparatus is composed of a polyethylene porous plate 10, the upper housing 11 and the lower housing 12, the upper housing and the lower housing is assembled with a plurality of bolts (13). It is preferable to seal the site where the upper housing and the lower housing contact by adding a sealing material so that CDA or DIW does not leak.
CDA 또는 DIW 주입구(14) 부위의 압력을 분산시켜 내부공간(20)의 압력을 균일화하기 위하여 상기 다공판과 하부하우징 사이에 격판(15)이 설치되는 것을 특징으로 한다. 주입구(14) 상부쪽에 격판이 없는 경우에는 주입구로 주입되는 유체의 압력이 직접 다공판(10)에 미치기 때문에 그 부분의 압력이 다른 부분에 비하여 높아져서 부상장치 전반에 걸쳐 압력의 불균일을 초래한다. 이러한 분출압의 불균일을 해소할 목적으로 격판(15)을 설치한다. 격판은 격판지지부(16, 17)에 의하여 다공판과 하부하우징 중간에 위치하도록 설치된다. 격판은 주입구로 주입되는 유체를 확산시킬 정도의 크기로 설치되며, 이는 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에 의하여 용이하게 실시될 수 있다.The diaphragm 15 is installed between the porous plate and the lower housing in order to equalize the pressure in the inner space 20 by dispersing the pressure of the CDA or DIW inlet 14. If there is no diaphragm in the upper portion of the inlet 14, since the pressure of the fluid injected into the inlet is directly applied to the perforated plate 10, the pressure of the portion is higher than that of other portions, resulting in pressure unevenness throughout the floating device. The diaphragm 15 is provided for the purpose of eliminating this nonuniformity of jet pressure. The diaphragm is installed to be positioned between the perforated plate and the lower housing by the diaphragm support parts 16 and 17. The diaphragm is installed to a size sufficient to diffuse the fluid injected into the inlet, which can be easily carried out by those skilled in the art.
일단 부상장치에 유체를 일정한 압력으로 공급하여 반송하고자 하는 대상물체를 부상시키고, 부상된 대상물체의 양쪽 측부에서 측부 롤러(side roller)를 이용하여 이송시킨다.Once the fluid is supplied to the flotation device at a constant pressure, the object to be conveyed is floated and transported using side rollers on both sides of the object to be injured.
본 발명의 부상장치는, 종래의 부상장치와 같이, 유리기판(2)과 같은 대상물체가 이동하는 방향을 따라 직렬로 배열되고, 이동방향과 수직되는 방향으로 다시 병렬 배열된다. 즉 대상물체가 원하는 높이로 균일하게 부상되어 이송될 수 있도록 적절한 간격을 유지하면서 직렬 및 병렬배열을 하게 된다.The floating apparatus of the present invention, like the conventional floating apparatus, is arranged in series along the direction in which a target object such as the glass substrate 2 moves, and is arranged in parallel again in a direction perpendicular to the moving direction. That is, the object is arranged in series and parallel while maintaining proper spacing so that the object can be uniformly floated and transported to a desired height.
본 발명은 유리기판보다 경도가 낮은 다공판을 개발하여 마찰에 의한 제품의 손상을 예방할 수 있고, CDA와 같은 유체가 주입되는 주입구(14)에서의 다공판(10)과 하부하우징(12) 사이에 격판(15)을 설치하여 다공판에 균일한 압력으로 유체를분출시킬 수 있는 부상장치를 제공하는 발명의 효과를 갖는다.According to the present invention, a porous plate having a hardness lower than that of a glass substrate can be developed to prevent damage to the product due to friction, and between the porous plate 10 and the lower housing 12 at the injection hole 14 into which fluid such as CDA is injected. By installing the diaphragm 15 to the floating plate has the effect of the invention to provide a flotation device that can eject the fluid at a uniform pressure.
본 발명의 단순한 변형 내지 변경은 이 분야의 통상의 지식을 가진 자에 의하여 용이하게 실시될 수 있으며, 이러한 변형이나 변경은 모두 본 발명의 영역에 포함되는 것으로 볼 수 있다.Simple modifications or changes of the present invention can be easily carried out by those skilled in the art, and all such modifications or changes can be seen to be included in the scope of the present invention.
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0078986A KR100490971B1 (en) | 2002-12-12 | 2002-12-12 | Floating Device for Glass of Liquid Crystal Display |
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| Application Number | Priority Date | Filing Date | Title |
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| KR10-2002-0078986A KR100490971B1 (en) | 2002-12-12 | 2002-12-12 | Floating Device for Glass of Liquid Crystal Display |
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| KR100490971B1 KR100490971B1 (en) | 2005-05-23 |
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| KR100816392B1 (en) * | 2006-04-06 | 2008-03-26 | 주식회사 에스에프에이 | Apparatus for transferring substrate |
| KR101097042B1 (en) | 2009-09-16 | 2011-12-22 | (주)동부로봇 | Apparatus for Substrate Processing |
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| JP2524991B2 (en) * | 1987-02-19 | 1996-08-14 | 株式会社ナべヤ | Levitation device |
| JPS63273781A (en) * | 1987-05-01 | 1988-11-10 | 品川白煉瓦株式会社 | Floating and transport baking method of article to be heated and baking furnace thereof |
| JPS63290388A (en) * | 1987-05-22 | 1988-11-28 | 品川白煉瓦株式会社 | Heated-article floating transport baking furnace and baking method thereof |
| JPH01167582A (en) * | 1987-12-23 | 1989-07-03 | Shinagawa Refract Co Ltd | Levitating and transporting burning furnace for substance to be heated and burning method therefor |
| JPH0274567A (en) * | 1988-09-06 | 1990-03-14 | Nec Corp | Setter for calcination of ceramic substrate |
| US5839722A (en) * | 1996-11-26 | 1998-11-24 | Xerox Corporation | Paper handling system having embedded control structures |
| JP2000062951A (en) * | 1998-08-19 | 2000-02-29 | Daiichi Shisetsu Kogyo Kk | Conveying apparatus |
| JP2000062950A (en) * | 1998-08-19 | 2000-02-29 | Daiichi Shisetsu Kogyo Kk | Flotation apparatus |
| JP2000136024A (en) * | 1998-10-30 | 2000-05-16 | Daiichi Shisetsu Kogyo Kk | Float up device |
| JP2000256074A (en) * | 1999-03-06 | 2000-09-19 | Kiyohisa Yamaguchi | Air permeable ceramic sintered compact substrate for floating object and its production |
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