JPS63290388A - Heated-article floating transport baking furnace and baking method thereof - Google Patents

Heated-article floating transport baking furnace and baking method thereof

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Publication number
JPS63290388A
JPS63290388A JP12398187A JP12398187A JPS63290388A JP S63290388 A JPS63290388 A JP S63290388A JP 12398187 A JP12398187 A JP 12398187A JP 12398187 A JP12398187 A JP 12398187A JP S63290388 A JPS63290388 A JP S63290388A
Authority
JP
Japan
Prior art keywords
heated
gas
firing
furnace
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12398187A
Other languages
Japanese (ja)
Inventor
行雄 尾崎
岩城 克弘
光井 健治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinagawa Refractories Co Ltd
Original Assignee
Shinagawa Refractories Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinagawa Refractories Co Ltd filed Critical Shinagawa Refractories Co Ltd
Priority to JP12398187A priority Critical patent/JPS63290388A/en
Publication of JPS63290388A publication Critical patent/JPS63290388A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、プラスチック、金属、ガラスあるいはセラミ
ックスで製った多孔体表面から、ガスを噴出させて、被
熱物を浮上・輸送しながら、被熱物を焼成して製品とし
て、抽出するに当り、被熱物の輸送速度を制御しうる構
成とした焼成炉の構造およびその焼成法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is a method of ejecting gas from the surface of a porous body made of plastic, metal, glass, or ceramics to levitate and transport objects to be heated. The present invention relates to the structure of a kiln that can control the transport speed of a heated material when baking a product and extracting it as a product, and to a method for firing the kiln.

従来の技術 この種の従来技術では、(1)被熱物を乗せた棚板ある
いは容器を多段に積み上げた台車をプッシャーを用いて
装入するトンネルキルン方式(2)被熱物を乗せた棚板
あるいは容器を回転ローラを用いて装入するローラハー
スキルン方式(3)被熱物を収容した容器あるいは棚板
を回転キャタピラを用いて、装入するキャタピラ式トン
ネルキルン方式が知られて6る。前記トンネルキルン方
式では、被熱物を多段に積み上げるため、上、中、下段
または各段の中央部あるいは側端部において、被熱物へ
の熱の伝達が均一でない。またローラハースキルン方式
あるいはキャタピラ式トンネルキルン方式では、棚板あ
るいは容器と接触している被熱物下面への熱の伝達が他
の部分に比べて十分でない。
Conventional technology This type of conventional technology consists of (1) a tunnel kiln system in which a pusher is used to load a cart with shelves or containers loaded with objects to be heated; (2) shelves with objects to be heated; Roller hearth kiln method (3) in which plates or containers are charged using rotating rollers; Caterpillar tunnel kiln method (3) in which containers or shelves containing objects to be heated are charged using rotating caterpillars are known6. . In the tunnel kiln method, the objects to be heated are piled up in multiple stages, so that heat is not uniformly transferred to the objects in the upper, middle, and lower tiers, or in the center or side edges of each tier. In addition, in the roller hearth kiln method or the caterpillar tunnel kiln method, heat is not sufficiently transferred to the lower surface of the heated object that is in contact with the shelf board or container than to other parts.

発明が解決しようとする問題点 前述の如き、従来方式の欠陥である、台車の上。The problem that the invention aims to solve As mentioned above, the problem with the conventional method is on the trolley.

中、下段または各段の中央部あるいは側端部に積載され
た被熱物への熱伝達が均一でなく、さらに棚板あるいは
容器と接触している被熱物下面、特に、ローラあるいは
キャタピラと接触している部分への熱伝達が被熱物の他
の部分に比べて悪く、焼成不十分となり、焼けむらの発
生が多く、被熱物全面への熱伝達の均等性を確保するこ
とが必要となる。
Heat transfer to the heated items loaded on the middle or lower tiers or the center or side edges of each tier is not uniform, and the lower surface of the heated items that are in contact with shelves or containers, especially rollers or caterpillars. Heat transfer to the parts in contact is poorer than to other parts of the object to be heated, resulting in insufficient firing and uneven baking, making it difficult to ensure uniform heat transfer to the entire surface of the object to be heated. It becomes necessary.

問題点を解決するための手段 本発明者等は前述した如き、従来方式の諸欠陥を改良す
べく徨々検肘、実験の結果、本発明の焼成炉および該焼
成法に適用し得る焼成炉の開発に成功したものであり、
本発明焼成法は、プラスチック、金属、ガラスあるいは
セラミックス製多孔体表面から所望ガスを噴出させて、
被熱物を浮上・輸送しながら、輸送速度を制御して、被
熱物を焼成して、製品として、抽出することを特徴とす
る被熱物焼成法であり、この焼成法に適用するトンネル
キルン型の焼成炉は、焼成炉の底部に、プラスチック、
金m、ガラスあるいはセラミックス表多孔体を上面に有
するガス浮上・輸送装置間に1被熱物の輸送方向とは逆
の方向に、所望ガスを噴出させる多数の細孔を有する輸
送速度制御装置を配設した構成からなるものである。
Means for Solving the Problems As mentioned above, the inventors of the present invention have thoroughly investigated and experimented in order to improve the various defects of the conventional method, and as a result, they have developed a firing furnace of the present invention and a firing furnace that can be applied to the firing method. was successfully developed,
The firing method of the present invention involves blowing out a desired gas from the surface of a porous body made of plastic, metal, glass, or ceramic.
It is a method of firing a heated object, which is characterized by levitating and transporting the heated object, controlling the transport speed, firing the heated object, and extracting it as a product, and a tunnel applied to this firing method. A kiln-type firing furnace has plastic,
Between the gas floating and transporting devices having a porous surface made of gold, glass or ceramics on the upper surface, there is provided a transport speed control device having a large number of pores for ejecting the desired gas in the opposite direction to the transporting direction of the heated object. It consists of an arranged configuration.

すなわち、本発明では、被熱物をガス〔予熱ガス、燃焼
ガスあるいは冷却ガス(含常温空気)〕Kよシ浮上させ
ながら、輸送、移動させ、被熱物を全面均一に十分焼成
して、むらのない焼成処理を行い、品質ならびに、表面
仕上シの均一な製品を得るものである。
That is, in the present invention, the object to be heated is transported and moved while being floated through a gas [preheated gas, combustion gas, or cooling gas (including room temperature air)] K, and the object to be heated is uniformly and sufficiently fired over the entire surface. It performs an even firing process to obtain products with uniform quality and surface finish.

添付図面に示す本発明焼成炉の一例に基づき本発明の詳
細な説明する。
The present invention will be described in detail based on an example of the firing furnace of the present invention shown in the accompanying drawings.

第1図は本発明焼成炉の一例の縦断面図、第2図は第1
図のA−A@に沿った横断面図、第3図1はガス浮上輸
送速度制御装置の部分拡大縦断面図、第4図は前記ガス
浮上輸送装置へのガス供給配管系統図である。
FIG. 1 is a longitudinal cross-sectional view of an example of the firing furnace of the present invention, and FIG.
1 is a partially enlarged vertical sectional view of the gas floating transport speed control device, and FIG. 4 is a gas supply piping system diagram to the gas floating transport device.

図示の如く、本発明焼成炉1は焼成炉天井2および側壁
3からなるトンネルキルン型で、予熱帯9側に、被熱物
装入ロアを、冷却帯ll側に製品抽出口8を具備してい
る。焼成炉1の底部には、ガス浮上輸送装置4および輸
送速度制御装置5が配設してあり、該ガス浮上輸塔装散
4および輸送速度制御装置5の詳細は第2図および第3
図に示しである。
As shown in the figure, the firing furnace 1 of the present invention is of a tunnel kiln type consisting of a furnace ceiling 2 and side walls 3, and is equipped with a heating material charging lower on the preheating zone 9 side and a product extraction port 8 on the cooling zone 11 side. ing. A gas flotation transport device 4 and a transport speed control device 5 are disposed at the bottom of the firing furnace 1. Details of the gas flotation transport tower dispersion 4 and transport speed control device 5 are shown in FIGS.
It is shown in the figure.

図示の如く、ガス浮上輸送装置14は、最上面にセラミ
ックス製多孔板4′が配設してセリ、該多孔板4′全面
から、ガスを均質かつ迅速に噴出させるために、該多孔
版4′支持用鋼製フレーム22内に、ステンレス鋼専ガ
ス拡散板23を配設し、前記フレーム22底面には混合
ガス配管13が取シ付けてあシ、該配管13は後述する
ガス供給配管系に接続しである。
As shown in the figure, the gas floating transport device 14 has a ceramic perforated plate 4' disposed on the uppermost surface of the perforated plate 4' to uniformly and quickly eject gas from the entire surface of the perforated plate 4'. 'A stainless steel gas diffusion plate 23 is disposed within the supporting steel frame 22, and a mixed gas piping 13 is attached to the bottom of the frame 22, and the piping 13 is connected to a gas supply piping system to be described later. It is connected to.

前記ガス浮上輸送装置4は傾動可能となっており、被熱
物のMUあるいは形状により、ガス浮上輸送装&4の傾
斜角度を水平方向に対して、変化させるリフター19を
装入ロア側に1抽出口8側に支持装[20を具備し、焼
成時間を調整することができる。また輸送速度制御装置
5は、最上面に、輸送方向とは逆方向に向けて細孔37
を多数穿孔したセラミックス製多孔板36が配設してあ
り、該多孔板36全面から、ガスを均質かつ迅速に噴出
亭せるために1該多孔板36支持用悄製フレーム38内
に、ステンレス鉤裂ガス拡散板39を配設し、前記7レ
一ム38底面には、混合ガス配管17が取シ付けてあシ
、該配管17はガス供給配管系に接続するのはガス浮上
輸送装置4と同様である。
The gas floating transport device 4 is tiltable, and a lifter 19 is installed on the charging lower side to change the inclination angle of the gas floating transport device &4 with respect to the horizontal direction depending on the MU or shape of the object to be heated. A support device [20 is provided on the side of the opening 8, so that the firing time can be adjusted. Further, the transport speed control device 5 has a fine hole 37 on the top surface facing in a direction opposite to the transport direction.
A ceramic perforated plate 36 with a large number of holes is provided, and in order to uniformly and quickly blow out gas from the entire surface of the perforated plate 36, stainless steel hooks are installed in a frame 38 made of stainless steel for supporting the perforated plate 36. A gas diffusion plate 39 is provided, and a mixed gas pipe 17 is attached to the bottom of the seven frames 38, and the pipe 17 is connected to the gas supply pipe system to the gas floating transport device 4. It is similar to

8g4図に示すガス供給配管系は、軸流ターボファン3
0に連通する空気制御弁29を有する空気配管31と空
燃比例制御弁32、ガス遮断弁33およびガス減圧弁3
4を図示の関係位置に有するガス配管35が可燃ガス源
41に連通してあシ、空気配管31とガス配管35とが
ガスミキサー28に接続してあシガスミキサー28で生
成された混合ガスを前記混合ガス配管に送気する構成と
しである。
The gas supply piping system shown in Figure 8g4 is an axial flow turbo fan 3.
An air pipe 31 having an air control valve 29 communicating with 0, an air-fuel proportional control valve 32, a gas cutoff valve 33, and a gas pressure reducing valve 3
A gas pipe 35 having gas pipes 4 in the related positions shown in the figure communicates with a combustible gas source 41, and the air pipe 31 and gas pipe 35 connect to a gas mixer 28 to connect the mixed gas generated by the gas mixer 28. The mixed gas pipe is configured to supply air to the mixed gas pipe.

前述の如き、構成からなる本発明焼成炉によるシリカ−
アルミナ質タイルの焼成処理を以下に説明する。セラミ
ックス製多孔体4からなるガス浮上輸送装置4の表面か
ら、ガス(温風)を放出させながら、タイルを浮上輸送
させ、天井内面に平面バーナー6を配設した焼成帯10
へ到達すると、燃焼ガスで浮上焼成し、焼成終了すると
、ガス(温風)を放出させて、冷却帯11内で浮上輸送
し、製品として、取シ出す構造となっている。前記焼成
炉1の炉床の一単位は、例えば300 L x 300
 WXlooT(m)のセラミックス製多孔板4′を組
み合せて構成される。前述の如く、ガス浮上輸送装置4
は、ガスを多孔板4′全面から均一、かつ速やかに吐出
するため拡散板23が配設されている。
Silica produced by the firing furnace of the present invention having the configuration as described above.
The firing process for alumina tiles will be explained below. A firing zone 10 in which tiles are floated and transported while emitting gas (warm air) from the surface of a gas floating transport device 4 made of a ceramic porous body 4, and a flat burner 6 is arranged on the inner surface of the ceiling.
When the product reaches the temperature, it is fired by floating with combustion gas, and when the firing is completed, the gas (warm air) is released, the product is transported floating in the cooling zone 11, and then taken out as a product. One unit of the hearth of the firing furnace 1 is, for example, 300 L x 300
It is constructed by combining ceramic perforated plates 4' of WXlooT(m). As mentioned above, the gas floating transport device 4
A diffusion plate 23 is provided to uniformly and quickly discharge gas from the entire surface of the porous plate 4'.

流i160 m’/分の軸流ターボファンから供給され
る空気あるいは可燃ガスと混合し、燃焼させたガスを多
孔板4′表面から吐出させ、タイルを0.5n程度浮上
させるものである。さらに、輸送速度制御装置5は、ガ
スを多孔板36全面から、均一、かつ速やかに、吐出す
るため、拡散板39が配設されており、該多孔板36表
面から、タイル輸送方向とは逆方向に、所望のガスを噴
出させてタイルの輸送速度を制御して、焼成時間を調整
するものである。更に1第1図図示の如く天井部にガス
吹込開口を設は輸送速度を調整してもよい。該吹込開口
の角度を適宜変更しうろことは言うまでもないO 焼成炉1の底部圧配設したセラミックス製多孔板4′お
よび5は輸送方向に約2a下シに、傾斜させて、配設し
ている。前記多孔板5は、輸送方向と逆方向の上向きに
約21傾斜させて、細孔37を穿孔している。
The gas is mixed with air or combustible gas supplied from an axial turbo fan at a flow rate of 160 m'/min, and the combusted gas is discharged from the surface of the perforated plate 4' to levitate the tiles by about 0.5 nm. Further, in order to uniformly and quickly discharge gas from the entire surface of the perforated plate 36, the transport speed control device 5 is provided with a diffusion plate 39, which is disposed from the surface of the perforated plate 36 in the opposite direction to the tile transport direction. The firing time is adjusted by ejecting a desired gas in the direction of the tile and controlling the transport speed of the tiles. Furthermore, as shown in FIG. 1, a gas blowing opening may be provided in the ceiling to adjust the transport speed. It goes without saying that the angle of the blowing opening should be changed as appropriate. There is. The perforated plate 5 has pores 37 formed therein so as to be inclined upward by about 21 degrees in the direction opposite to the transportation direction.

前述した焼成炉の炉長け25,000mである。The furnace length of the above-mentioned firing furnace is 25,000 m.

実施例1 被熱物ニジリカーアルミナ質タイル(300x600x
lO(m))焼成温度: 1250”C 予熱(150分)→焼成(180分)→冷却(180分
)炉  圧:  1.Q 〜1.5 m Aq熱 源:
焼成帯天井および底部に配設したセラミックス多孔体く
よるガス燃焼(プロ パンガスと空気との混合ガス) 実施例2 被熱物:食パン[190Lx95Wx85T(m))焼
成温度:  200’C(17分で常温から200℃ま
で昇温)予熱(17分)→焼成(20分)→冷却(8分
)炉 圧: 1.0〜1.5 m Aq e 炉長: 
9,000(tm)尚、熱源としては電気抵抗発熱体又
は赤外線ヒータを併用することもできる。
Example 1 Heated object Nijilikar alumina tile (300x600x
lO (m)) Firing temperature: 1250”C Preheating (150 minutes) → Firing (180 minutes) → Cooling (180 minutes) Furnace pressure: 1.Q ~ 1.5 m Aq heat source:
Gas combustion (mixed gas of propane gas and air) using ceramic porous bodies placed on the ceiling and bottom of the baking zone Example 2 Object to be heated: Bread [190L x 95W x 85T (m)) Baking temperature: 200'C (in 17 minutes) Preheating (17 minutes) → Baking (20 minutes) → Cooling (8 minutes) Furnace pressure: 1.0 to 1.5 m Aq e Furnace length:
9,000 (tm) Note that an electric resistance heating element or an infrared heater can also be used as the heat source.

発明の効果 1)燃焼ガスで浮上輸送しながら、輸送方向と逆方向に
輸送速度制御装置からガスを一噴出させて、輸送速度を
制御し、焼成時間が調整可能なため、被熱物全面均一に
むらなく焼成できた。
Effects of the invention 1) While floating and transporting with combustion gas, the transport speed is controlled by ejecting gas from the transport speed control device in the opposite direction to the transport direction, and the firing time can be adjusted, so that the object to be heated can be uniformly distributed over the entire surface. I was able to bake it evenly.

2)ガス浮上輸送装置を任意に傾動可能、さらに、輸送
方向と逆方向に、ガスを噴出させて、輸送速度を制御可
能としたため、被熱物の極類あるいは形状に応じて、焼
成時間を調整でき、ゆっくりと連続的に輸送する構造と
したため、コン、6クト化できた。
2) The gas floating transport device can be tilted arbitrarily, and the transport speed can be controlled by ejecting gas in the opposite direction to the transport direction, so the firing time can be adjusted depending on the polarity or shape of the object to be heated. Because it was designed to be able to be adjusted and transported slowly and continuously, it was possible to make it into a six-piece container.

3)予熱帯あるいは冷却帯に設置されているガス浮上輸
送装置より、燃焼排ガスを回収し、これを冷風(常温の
空気等)を加えて、温度調整した温風を吐出させれば被
熱物の急熱急冷を避け、じっくり予熱したシあるいは徐
冷することか可能となった。
3) Collect combustion exhaust gas from a gas flotation transport device installed in the preheating zone or cooling zone, add cold air (room temperature air, etc.) to it, and discharge the temperature-adjusted warm air. It is now possible to avoid rapid heating and cooling, and instead use slow preheating or gradual cooling.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明焼成炉の縦断面図、第2図は第1図のA
−A線に沿った横断面図、第3図はガス浮上輸送速度制
御装置の部蒜拡大縦断面図、第4図は前記ガス浮上輸送
装置へのガス供給配管系統図である。図中の記号は次の
通シ。 l・・・焼成炉、2・・・焼成炉天井、3・・・側壁、
4・・・ガス浮上輸送装置、4′・・・セラミックス多
孔板、5・・・ガス浮上輸送速度制御装置、6・・・平
面燃焼バーナー、7・・・被熱物装入口、8・・・製品
抽出ci伊・・・予熱帯、10・・・焼成帯、11・・
・冷却帯、  12,14,16゜18・・・ガス配管
、  13,15,16・・・混合ガス配管。 19・・・リフター、20・・・支持装置、21・・・
被熱物。 22.24,38・・・フレーム、  23,25.3
9・・・ガス拡散板。 26・・・基礎、27・・・混合ガス、28・・・ガス
ミキサー、29・・・空気制御弁、30・・・軸流ター
ボファン。 31・・・空気配管、32・・・空燃比例制御弁、33
・・・ガス遮断弁、34・・・ガス減圧弁、35・・・
可燃ガス配管、36・・・セラミックス多孔板、37・
・・細孔。 40・・・・被熱物輸送方向、41・−・可燃ガス源。
Figure 1 is a longitudinal sectional view of the firing furnace of the present invention, and Figure 2 is A of Figure 1.
3 is an enlarged vertical sectional view of a portion of the gas floating transport speed control device, and FIG. 4 is a diagram of the gas supply piping system to the gas floating transport device. The symbols in the diagram are as follows. l... firing furnace, 2... firing furnace ceiling, 3... side wall,
4... Gas floating transport device, 4'... Ceramic porous plate, 5... Gas floating transport speed control device, 6... Planar combustion burner, 7... Heat object charging port, 8...・Product extraction ci Italy...preparation zone, 10...firing zone, 11...
・Cooling zone, 12, 14, 16° 18... Gas piping, 13, 15, 16... Mixed gas piping. 19... Lifter, 20... Support device, 21...
Heated object. 22.24,38...Frame, 23,25.3
9...Gas diffusion plate. 26... Foundation, 27... Mixed gas, 28... Gas mixer, 29... Air control valve, 30... Axial flow turbo fan. 31...Air piping, 32...Air-fuel proportional control valve, 33
...Gas cutoff valve, 34...Gas pressure reducing valve, 35...
Combustible gas piping, 36... Ceramic perforated plate, 37.
··pore. 40... Heat target transport direction, 41... Combustible gas source.

Claims (3)

【特許請求の範囲】[Claims] (1)プラスチック、金属、ガラス、あるいはセラミッ
クス製多孔体表面から、所望ガスを噴出させて、被熱物
を浮上、輸送しながら、被熱物を焼成して、製品として
、抽出するトンネルキルン型の焼成炉において、前記焼
成炉の底部に、プラスチック、金属、ガラスあるいはセ
ラミックス製多孔体を、上面に有するガス浮上輸送装置
間に、被熱物の輸送方向とは逆の方向に、所望ガスを噴
出させる多数の細孔を有する輸送速度制御装置を配設し
たことを特徴とする被熱物焼成炉。
(1) Tunnel kiln type in which a desired gas is ejected from the surface of a porous body made of plastic, metal, glass, or ceramics, the object to be heated is floated and transported, and the object to be heated is fired and extracted as a product. In a firing furnace, a desired gas is supplied between a gas floating transport device having a porous body made of plastic, metal, glass, or ceramics on the top surface at the bottom of the firing furnace in the opposite direction to the transport direction of the object to be heated. What is claimed is: 1. A furnace for firing objects to be heated, characterized in that a transport speed control device having a large number of pores for ejecting heat is disposed.
(2)前記焼成炉の焼成帯天井下面に多数の平面燃焼バ
ーナーを配設してなる特許請求の範囲第1項記載の焼成
炉。
(2) The firing furnace according to claim 1, wherein a large number of flat combustion burners are arranged on the lower surface of the firing band ceiling of the firing furnace.
(3)プラスチック、金属、ガラス、あるいはセラミッ
クス製多孔体表面から、所望ガスを噴出させて、被熱物
を浮上、輸送しながら、被熱物を焼成して、製品として
抽出するに当り被熱物の下面あるいは上面に所望ガスを
吹付けて、被熱物の輸送速度を制御することを特徴とす
る被熱物焼成法。
(3) A desired gas is ejected from the surface of a porous body made of plastic, metal, glass, or ceramics, and while the object to be heated is floated and transported, the object to be heated is fired, and the object to be heated is extracted as a product. A method for firing a heated object characterized by controlling the transport speed of the heated object by spraying a desired gas onto the lower or upper surface of the object.
JP12398187A 1987-05-22 1987-05-22 Heated-article floating transport baking furnace and baking method thereof Pending JPS63290388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12398187A JPS63290388A (en) 1987-05-22 1987-05-22 Heated-article floating transport baking furnace and baking method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12398187A JPS63290388A (en) 1987-05-22 1987-05-22 Heated-article floating transport baking furnace and baking method thereof

Publications (1)

Publication Number Publication Date
JPS63290388A true JPS63290388A (en) 1988-11-28

Family

ID=14874091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12398187A Pending JPS63290388A (en) 1987-05-22 1987-05-22 Heated-article floating transport baking furnace and baking method thereof

Country Status (1)

Country Link
JP (1) JPS63290388A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100490971B1 (en) * 2002-12-12 2005-05-23 (주)에스티아이 Floating Device for Glass of Liquid Crystal Display
JP2008180433A (en) * 2007-01-24 2008-08-07 Ngk Insulators Ltd Heat-treating furnace for tabular member
JP2013538441A (en) * 2010-07-07 2013-10-10 レフィテック ベー.フェー. Method and apparatus for advancing a substrate without contact

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100490971B1 (en) * 2002-12-12 2005-05-23 (주)에스티아이 Floating Device for Glass of Liquid Crystal Display
JP2008180433A (en) * 2007-01-24 2008-08-07 Ngk Insulators Ltd Heat-treating furnace for tabular member
JP2013538441A (en) * 2010-07-07 2013-10-10 レフィテック ベー.フェー. Method and apparatus for advancing a substrate without contact

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