KR20020067030A - 플랫 패널 디스플레이의 부품과 같은 물체의 크기 정보를포함한 특성 결정시 산란광 및/또는 투과광을 사용하는시스템과 방법 - Google Patents
플랫 패널 디스플레이의 부품과 같은 물체의 크기 정보를포함한 특성 결정시 산란광 및/또는 투과광을 사용하는시스템과 방법 Download PDFInfo
- Publication number
- KR20020067030A KR20020067030A KR1020027002701A KR20027002701A KR20020067030A KR 20020067030 A KR20020067030 A KR 20020067030A KR 1020027002701 A KR1020027002701 A KR 1020027002701A KR 20027002701 A KR20027002701 A KR 20027002701A KR 20020067030 A KR20020067030 A KR 20020067030A
- Authority
- KR
- South Korea
- Prior art keywords
- light
- line
- aperture
- transmitted
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 claims abstract description 111
- 239000000463 material Substances 0.000 claims description 16
- 230000007547 defect Effects 0.000 claims description 14
- 238000007689 inspection Methods 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims 1
- 238000004458 analytical method Methods 0.000 description 67
- 239000002131 composite material Substances 0.000 description 38
- 230000005540 biological transmission Effects 0.000 description 27
- 238000000149 argon plasma sintering Methods 0.000 description 23
- 238000005259 measurement Methods 0.000 description 17
- 230000005684 electric field Effects 0.000 description 10
- 239000011148 porous material Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000005856 abnormality Effects 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 239000011800 void material Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
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- 208000016169 Fish-eye disease Diseases 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 238000003556 assay Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- BTCSSZJGUNDROE-UHFFFAOYSA-N gamma-aminobutyric acid Chemical compound NCCCC(O)=O BTCSSZJGUNDROE-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 230000002950 deficient Effects 0.000 description 1
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- 239000003989 dielectric material Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/387,632 | 1999-08-31 | ||
| US09/387,632 US6392750B1 (en) | 1999-08-31 | 1999-08-31 | Use of scattered and/or transmitted light in determining characteristics, including dimensional information, of object such as part of flat-panel display |
| PCT/US2000/023192 WO2001016580A1 (en) | 1999-08-31 | 2000-08-22 | Use of scattered and/or transmitted light in determining characteristics, including dimensional information, of object such as part of flat-panel display |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20020067030A true KR20020067030A (ko) | 2002-08-21 |
Family
ID=23530730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020027002701A Withdrawn KR20020067030A (ko) | 1999-08-31 | 2000-08-22 | 플랫 패널 디스플레이의 부품과 같은 물체의 크기 정보를포함한 특성 결정시 산란광 및/또는 투과광을 사용하는시스템과 방법 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6392750B1 (https=) |
| EP (1) | EP1212602A4 (https=) |
| JP (1) | JP4685306B2 (https=) |
| KR (1) | KR20020067030A (https=) |
| AU (1) | AU7067600A (https=) |
| MY (1) | MY133784A (https=) |
| TW (1) | TW548404B (https=) |
| WO (1) | WO2001016580A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6947857B2 (en) * | 2001-03-16 | 2005-09-20 | Mindspeed Technologies, Inc. | Optical sequence time domain reflectometry during data transmission |
| US20030068024A1 (en) * | 2001-10-05 | 2003-04-10 | Jones William W. | Communication system activation |
| US8750341B2 (en) | 2008-01-04 | 2014-06-10 | Mindspeed Technologies, Inc. | Method and apparatus for reducing optical signal speckle |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4678324A (en) * | 1985-12-04 | 1987-07-07 | Thomas De Witt | Range finding by diffraction |
| GB8908871D0 (en) * | 1989-04-19 | 1989-06-07 | Hugle William B | Manufacture of flat panel displays |
| US5559389A (en) | 1993-09-08 | 1996-09-24 | Silicon Video Corporation | Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals |
| US5564959A (en) | 1993-09-08 | 1996-10-15 | Silicon Video Corporation | Use of charged-particle tracks in fabricating gated electron-emitting devices |
| US5538450A (en) * | 1994-04-29 | 1996-07-23 | Texas Instruments Incorporated | Method of forming a size-arrayed emitter matrix for use in a flat panel display |
| JPH08124479A (ja) * | 1994-10-21 | 1996-05-17 | Toppan Printing Co Ltd | シャドウマスクの製造方法 |
| KR100343222B1 (ko) * | 1995-01-28 | 2002-11-23 | 삼성에스디아이 주식회사 | 전계방출표시소자의제조방법 |
| US5766446A (en) | 1996-03-05 | 1998-06-16 | Candescent Technologies Corporation | Electrochemical removal of material, particularly excess emitter material in electron-emitting device |
| US5893967A (en) | 1996-03-05 | 1999-04-13 | Candescent Technologies Corporation | Impedance-assisted electrochemical removal of material, particularly excess emitter material in electron-emitting device |
| JP3588212B2 (ja) * | 1996-12-20 | 2004-11-10 | 株式会社ルネサステクノロジ | 露光用マスク及びその作製方法並びに半導体装置の製造方法 |
| US5920151A (en) | 1997-05-30 | 1999-07-06 | Candescent Technologies Corporation | Structure and fabrication of electron-emitting device having focus coating contacted through underlying access conductor |
| US6010383A (en) * | 1997-10-31 | 2000-01-04 | Candescent Technologies Corporation | Protection of electron-emissive elements prior to removing excess emitter material during fabrication of electron-emitting device |
-
1999
- 1999-08-31 US US09/387,632 patent/US6392750B1/en not_active Expired - Fee Related
-
2000
- 2000-08-22 WO PCT/US2000/023192 patent/WO2001016580A1/en not_active Ceased
- 2000-08-22 EP EP00959338A patent/EP1212602A4/en not_active Withdrawn
- 2000-08-22 JP JP2001520086A patent/JP4685306B2/ja not_active Expired - Fee Related
- 2000-08-22 KR KR1020027002701A patent/KR20020067030A/ko not_active Withdrawn
- 2000-08-22 AU AU70676/00A patent/AU7067600A/en not_active Abandoned
- 2000-08-30 MY MYPI20004029 patent/MY133784A/en unknown
- 2000-11-20 TW TW089117631A patent/TW548404B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW548404B (en) | 2003-08-21 |
| US6392750B1 (en) | 2002-05-21 |
| JP2003508747A (ja) | 2003-03-04 |
| JP4685306B2 (ja) | 2011-05-18 |
| MY133784A (en) | 2007-11-30 |
| AU7067600A (en) | 2001-03-26 |
| EP1212602A1 (en) | 2002-06-12 |
| EP1212602A4 (en) | 2003-04-02 |
| WO2001016580A1 (en) | 2001-03-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20020228 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| N231 | Notification of change of applicant | ||
| PN2301 | Change of applicant |
Patent event date: 20020624 Comment text: Notification of Change of Applicant Patent event code: PN23011R01D |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |