KR20020065092A - Auto Loader for stacking tray in handler - Google Patents

Abstract

PURPOSE: A tray auto loader for a handler is provided, which tests a number of trays at one time by supplying trays to a loading part automatically, by loading the trays on one side of the loading part of the handler at one time. CONSTITUTION: Trays where devices to be tested are accommodated are loaded in a loading part, and a test is performed under a condition by transporting the devices in the loading part to a test site. Then, tested devices are classified according to the test result and then are installed in a tray of an unloading part. According to the auto loader(100), the first loading part(110) is installed on one side of the loading part and are loaded with a plurality of trays(T) where devices are accommodated. The second loading part(150) is installed on one side of the first load part successively and are loaded with a plurality of trays where devices are accommodated. When the trays of the loading part are empty, the trays in the first and the second loading part are supplied to the loading part automatically.

Description

Auto Loader for stacking tray in handler}

The present invention relates to an autoloader for loading and supplying a plurality of trays in a handler. In particular, a tray autoloader for loading and supplying a plurality of trays in which devices are stored in a handler for testing devices such as a semiconductor package. It is about.

In general, devices such as a memory or non-memory semiconductor device, and modules that are appropriately configured on a single substrate, are shipped after undergoing various test procedures after production. Refers to a device that is used to automatically test the same device and module through a predetermined process.

In general, many of these handlers not only perform general performance tests at room temperature, but also create extreme conditions of high and low temperatures through electrothermal heaters and liquefied nitrogen injection systems in closed chambers such that the device and the module can be It is also capable of performing high and low temperature tests, which test whether they can function under extreme temperature conditions.

Referring to the configuration of the handler shown in Figure 1 with respect to the test process performed in the handler as an example, first, the user loads the trays containing the devices to be tested in the loading unit 10 and then operates the handler The first picker robot 31 linearly moving in the XY axis grips the devices of the loading unit 10 and temporarily mounts them in the buffer unit 40. Then, the second picker robot 32 is the buffer unit 40. ) Devices are gripped and transferred to the exchange unit 50 and remounted in a test tray (not shown).

The test tray in which the devices to be tested are remounted is transferred to a chamber unit 70 located behind the handler by a separate transfer means (not shown), thereby providing a plurality of sealed chambers formed in a high temperature or low temperature environment. The test is performed at the test site of the chamber unit 70 under a predetermined temperature.

Then, the tested test tray is transferred to the exchange unit 50 again, and the tested devices are temporarily mounted in the buffer unit 40 by the second picker robot 32, and then again the first picker robot 31. According to the test results are classified and mounted on the predetermined tray of the unloading unit 20 by grade.

By the way, in the conventional handler as described above, the number of trays that can be loaded at one time in the loading unit 10 is limited to about 25, so if you want to load and test a larger number of trays Had to feed the trays continuously while monitoring the test process.

Therefore, while the operator can exist while the test can be performed without a large crowd, there is a problem in that the test efficiency is deteriorated because only the initial number of devices of the tray can be tested when the operator is not present for a long time.

Therefore, the present invention has been made to solve the above problems, by loading a large amount of trays at one side at one side of the loading unit of the handler to automatically supply these trays to the loading unit to test a large amount of trays at once Its purpose is to provide a tray autoloader for a handler.

1 is a plan view schematically showing a configuration of an example of a conventional handler;

FIG. 2 is a plan view showing the configuration of an embodiment of a handler equipped with a tray autoloader according to the present invention.

3 is a front view of a first embodiment of a tray autoloader according to the present invention;

Figure 4 is a perspective view showing the configuration of the lower mounting portion of the autoloader of FIG.

5 is a perspective view showing the configuration of an upper stacking portion of the autoloader of FIG.

6 is a front view of a second embodiment of a tray autoloader according to the present invention;

FIG. 7 is a perspective view illustrating an upper housing part of the autoloader of FIG. 6. FIG.

8 is a perspective view of a third embodiment of a tray autoloader according to the present invention;

FIG. 9 is a partial perspective view of the housing part removed to show a state in which the seating member is drawn out from the autoloader of FIG. 8; FIG.

10 is a perspective view showing the configuration of a mounting member of the autoloader of FIG.

FIG. 11 is a partial perspective view of the mounting member and the housing part removed to show the internal structure of the autoloader of FIG. 8; FIG.

* Description of reference numerals in the main parts of the drawings *

110, 210, 310-Lower stack 111, 211, 311-Lower housing

112, 212-Lower seat plate 113-Elevating block

114-LM Guide 115-Ballscrew

116-Door Bar 117-Slide Rails

150, 250, 350-Upper stack 151, 251-Upper housing

152, 252-Upper seat plate 153-Pneumatic cylinder block

154-Support T-Tray

321-seating member

In order to achieve the above object, the present invention loads the trays containing the devices to be tested in the loading unit, transfers the devices of the loading unit to the test site, performs a test under predetermined conditions, and then performs the tested devices. A handler configured to be classified according to a test result and mounted on a predetermined tray of the unloading part, the handler comprising: a first loading part installed on one side of the loading part, in which a plurality of trays containing devices are stacked in a stacked structure; And a second stacking unit in which the plurality of trays in which the devices are stored are stacked and stacked on top of the stacking unit so as to sequentially supply trays of the first stacking unit and the second stacking unit to the loading unit. Provides a tray autoloader for handlers.

According to an aspect of the present invention, the first loading portion has a lower housing for receiving trays therein, the upper and front surfaces of which are formed in an open box shape, and are installed to be liftable in the lower housing, and the trays are stacked. And a lower mounting plate to be placed and lifting means for elevating the lower mounting plate up and down to the lower end of the second loading part.

And, the lifting means for elevating the lower seating plate, a guide rail is installed up and down on one side surface portion of the lower housing, the lifting block is installed to be movable along the guide rail and the lower seating plate is mounted, the lifting block It is coupled to the drive unit is configured to drive the lifting block up and down, the drive unit is installed in parallel with the guide rail and may be composed of a ball screw coupled to the lifting block, and an electric motor for rotating the ball screw. .

In addition, the lower seating plate is coupled to the lifting block via a slide rail may be configured to be pulled out and retracted through the open front surface of the lower housing while slidingly moving forward and backward with respect to the lifting block.

In addition, according to the present invention, the second loading portion, the upper housing which is installed in the lower housing upper part of the first loading portion in succession to accommodate the tray therein, and the upper seating plate for loading the trays at the lower end of the upper housing And, the lower end of the upper housing is composed of a support for supporting the upper seating plate releasably.

The support part is composed of a support for releasably supporting each corner portion of the upper seating plate from below, and a pneumatic cylinder coupled to the support to operate the support to the upper seating plate support position and release position.

And, the upper housing is formed so that the front surface thereof is open, the seating plate may be configured to be withdrawable through the open front surface of the upper housing.

On the other hand, according to another embodiment of the present invention, the first loading portion is provided to be pulled out through the lower housing, the front surface and the upper surface is opened, and the front surface open to the lower end of the lower housing, a plurality of trays An open box-shaped seating member, which is stacked in a stacked structure, a tray lifting means for lifting up and down the trays mounted on the seating member in a lower housing, and vertically installed at each corner of the seating member. Supporting each corner portion of the trays mounted on the seating member, and characterized in that it comprises a guide bar for guiding the trays in the vertical movement of the trays by the tray lifting means.

Hereinafter, embodiments of a tray autoloader for a handler according to the present invention will be described in detail with reference to the accompanying drawings.

2 shows an example of a handler configuration in which a tray autoloader is installed according to the present invention. The configuration of the handler shown in this figure is identical to the handler configuration described in FIG. 1 except for the autoloader 100. And detailed description of the operation is omitted.

As shown in FIG. 2, the tray autoloader 100 of the present invention is installed on one side of the loading unit 10 in a state of loading a plurality of trays in which the devices to be tested are stored, When the devices of the stacked trays are all tested and the loading unit 10 is empty, the trays loaded in the autoloader 100 are continuously supplied to the loading unit 10 so that the test operation can be continued for a long time without interruption. It is supposed to be.

3 to 5 illustrate the configuration of the first embodiment of the autoloader 100 as described above. The autoloader 100 according to the first embodiment has a bottom in which trays in which devices to be tested are largely stacked are stacked. It is composed of two parts of the stacking unit 110 and the upper stacking unit 150, which is installed in succession immediately above the lower stacking unit 110, and also trays are stacked in a stacked structure.

The lower stacking unit 110 is formed in a box shape in which the front surface and the upper surface are open so that the lower housing 111 accommodates the trays in a stacked structure therein, and the lower housing 110 is movable up and down within the lower housing 111. It is provided with a lower seating plate 112 on which the trays T are placed.

In addition, elevating means is provided on one inner wall of the lower housing 111 to move the lower seat plate 112 up and down, and the elevating means is one inner wall of the lower housing 111. A pair of LM guides 114 installed in the vertical direction; An elevating block 113 installed to elevate up and down along the LM guide 114, and the lower seating plate 112 mounted on an upper surface thereof; Ball screw 115 disposed in parallel with them between the LM guide 114 and coupled to the elevating block 113; And elevating the elevating block 113 up and down by operating the ball screw 115 It consists of an electric motor (not shown).

Here, the elevating block 113 is configured to move from the lower end of the lower housing 111, which is the tray stacking position, to the lower end of the upper stacking unit 150.

In addition, a sensor (not shown) is installed on the inner side of the lower housing 111 to detect when the stacked tray T comes to a predetermined position.

The lower seat plate 112 is coupled to the elevating block 113 via a slide rail 117 so as to be slidable in the front and rear directions, whereby the lower seat plate 112 is formed of the lower housing 111. Withdrawal and withdrawal are possible through the open front face.

In addition, the lower seating plate 112 and the trays mounted on the lower seating plate 112 are provided at both corners of the front surface of the lower housing 111 for the front surface of the lower housing 111 due to some cause during work. In order to prevent being drawn out of the housing through the door bar 116 for opening and closing both sides of the housing front surface is rotatably installed, and by fixing and releasing the door bar 116 to the lower end of the lower housing 111 The clamp 118 which controls opening / closing of the bar 116 is provided.

On the other hand, the upper mounting portion 150 is formed in the upper end of the lower housing 111, the upper housing 151 and the upper housing (151) formed to open the lower surface and accommodate the tray therein, and the upper housing ( An upper seat plate 152 for loading trays at the lower end of the 151, where the upper seat plate 152 is supported to be freely separated from the upper housing (151).

On both sides of the lower end of the upper housing 151, the support 154 supporting the upper mounting plate 152 by walking in a free state, and the support 154 is laterally moved to support and release the upper mounting plate 152. A pneumatic cylinder block 153 for actuating is provided.

Here, each support 154 is inserted into a locking groove (not shown) formed at a corresponding position on both sides of the upper seat plate 152 to support the upper seat plate 152 by walking.

Meanwhile, positioning pins 119 and 159 corresponding to grooves T1 formed on one side of the front edge of the trays placed on the front edges of the lower seating plate 112 and the upper seating plate 152. This is detachably screwed together.

Accordingly, when the trays are incorrectly placed on the upper and lower seating plates 112, the grooves T1 of the trays and the positioning pins 119 and 159 do not correspond, and the trays are inclined. You will be able to modify the orientation of the tray.

The positioning pins 119 and 159 may be selectively coupled to the left side or the right side of each seating plate 112 or 152 according to circumstances.

The autoloader according to the first embodiment of the present invention configured as described above operates as follows.

The operator loads the trays containing the devices to be tested in the loading unit 10 before starting the handler, and then loads the trays containing the devices to be tested in the upper stack 150 and the lower stack 110 of the autoloader. First, the operator releases the clamp 118 of the lower housing 111 to open both side door bars 116, and then the lower seat plate 112 along the slide rail 117 to the lower housing 111. Withdraw through the front face.

Then, the upper seating plate 152 is placed on the lower seating plate 112 and placed thereon, and the trays are stacked on the lower seating plate 112, and then drawn into the lower housing 111.

Subsequently, when the elevating block 113 and the lower seat plate 112 are raised to the lower end of the upper housing 151 by operating the electric motor (not shown) and the ball screw 115 coupled thereto, the upper housing 151 Pneumatic cylinder block 153 of the operation to support the upper seating plate 152 while each support 154 is inserted into each engaging groove (not shown) of the upper seating plate 152 placed on the lower seating plate 112. Thus, the operation of loading the tray in the upper housing 151 is terminated.

Subsequently, when only the lower seat plate 112 is lowered and positioned at the lower end of the lower housing 111 while the upper seat plate 152 is supported by the upper housing 151 and is separated, the operator places the lower seat plate ( 112 is advanced along the slide rail 117 to be drawn out through the front surface of the lower housing, and then the trays are stacked thereon, and then the lower seating plate 112 loaded with the tray is introduced into the lower housing 111. Close doorbar 116 and secure with clamp 118. This completes loading the tray into the autoloader and begins testing the handler.

As the test operation of the handler progresses, the devices of the trays loaded in the loading unit 10 are all tested and the loading unit 10 becomes empty, the tray transfer (not shown) installed in the front of the handler is autoloader. The upper housing of the lower housing 111 is moved toward the loading unit 10 one by one from the uppermost tray.

At this time, in the lower stacking unit 110, the lifting block 113 is raised by one step each time the trays are transferred to the loading unit 10 one by one so that the tray transfer (not shown) can hold the tray. The step of raising and stopping the lifting block 113 is detected and controlled by a sensor (not shown) for detecting the position of the uppermost tray.

On the other hand, if all the trays loaded on the lower loading unit 110 through the above process is transferred to the loading unit 10 side, the lower seating plate 112 is immediately the upper seating plate 152 of the upper housing 151 At the same time, the support 154, which was supporting the upper seat plate 152, moves upward to the outside by the operation of the pneumatic cylinder block 153, thereby releasing the supporting state of the upper seat plate 152, and lower seating. It is placed on the plate (112).

Subsequently, as the lifting block 113 descends again, the lower seat plate 112 and the upper seat plate 152 descend, and thus the trays loaded on the upper housing 151 are located in the lower housing 111. .

In this state, the trays are sequentially transferred to the loading unit 10 by a tray transfer (not shown) as described above.

6 and 7 illustrate a second embodiment of the autoloader according to the present invention. In this second embodiment, the lower stacker 210 is configured in the same manner as the first embodiment, but the upper stacker 250 ) Is configured such that the upper seat plate 252 is retractable to the outside through the front surface of the upper housing 251.

That is, in the second embodiment, the upper seating plate 252 is configured to be pulled out to the front surface of the upper housing 251, so that the upper seating plate 252 may be mounted on the upper housing 251 without performing an operation of stacking the tray through the lower housing 211. The tray can be loaded directly.

In the second embodiment, the configuration of the upper housing 251 will be described in more detail. The lower ends of the upper housing 251 are provided with slide rails 253 along the edges at both sides thereof, and these slide rails. Fixing portions 254 are attached to the lower portions of the front and rear surfaces of 253.

In addition, each of the fixing parts 254 supports and releases the support 256 supporting the upper mounting plate 252 in a free state and the upper mounting plate 252 by moving the support unit 256 laterally. The pneumatic cylinder block 255 is provided.

In addition, the front surface of the upper housing 251 is open, and the front and rear sides of the front and rear opening and closing device for opening and closing the front surface is provided, the opening and closing device, both sides of the front surface of the upper housing 251. It is composed of a pair of opening and closing bar 257 and the pneumatic cylinder 258 coupled to each of the opening and closing bar 257 to perform the opening and closing operation of the opening and closing bar 257.

Here, the opening and closing bar 257 is linked to the front side both sides of the upper housing 251, the pneumatic cylinder 257 is a mediated link bar 258a at the middle of the opening and closing bar 257. The bar bar 258a rotates according to the operation of the pneumatic cylinder 258, while the opening and closing operation is made by turning the opening and closing bar 257 inward and outward.

Therefore, when the worker wants to load the tray directly on the upper housing 251, the operator operates the pneumatic cylinder 258 to move the opening and closing bar 258 to the outside to open the upper side by hand in a state of opening the front surface. When the front portion of the plate 252 is grasped and pulled forward, the upper seat plate 252 is drawn out through the housing front surface along the slide rail 253.

In this way, the upper seating plate 252 is pulled out, and the tray is stacked thereon, and the upper seating plate 252 is pushed back into the upper housing 251, and then the opening and closing bar 257 is operated to close the front surface. By doing so, the loading operation is made.

Since the transfer operation to the loading unit 10 of the tray according to the operation of the handler is made in the same manner as the first embodiment described above, a detailed description thereof will be omitted.

Meanwhile, FIGS. 8 to 11 show a third embodiment of the autoloader according to the present invention. The autoloader of the third embodiment has the same configuration as that of the upper stacker 350 of the first embodiment. And only the configuration of the lower stacking portion 310 is modified, bar description of the upper stacking portion 350 will be omitted in the description of the third embodiment will be described only for the lower stacking portion (310).

As shown in FIGS. 8 to 11, the lower stacking portion 310 of the third embodiment has a lower housing 311 having a front surface and an upper surface open, and a front surface opened at a lower end of the lower housing 311. It is installed to be pulled out through a plurality of trays to be tested is provided with a seating member 321 of the open box form.

Here, the seating member 321 is formed so that one side, the upper surface and the rear surface is open, the other side and the lower surface, respectively, the lower surface and side portion of the lower housing 311 via the slide rails (323a, 323b), respectively Is coupled to.

In addition, seating bars 321a and 321b on which the trays are placed and supported are installed at the front and rear ends of the open upper surface of the seating member 321.

Vertical 'L' shaped guide bars 322a and 322b are installed at each corner portion of the seating member 321 to move the corners of the trays seated on the seating member 321 to be movable. Of these guide bars 322a and 322b, the guide bars 322a located on the front side of the seating member 321 are lower than the guide bars 322b located on the rear side, and preferably the rear guide bars. It is formed to be about 1/2 of the height of the (322b), so that the operator can easily load when loading the trays on the seating member 321.

The locking lever 324 is pivotally installed on the front surface of the seating member 321, and the locking lever 324 is a locking mechanism installed inside the front surface of the seating member 321. When the locking lever 324 is rotated 90 degrees in a clockwise or counterclockwise direction, the seating member 321 is fixed at the position by the action of the locking mechanism. 321 is prevented from being drawn out.

Such a locking mechanism can be easily configured by adopting known locking mechanisms.

In addition, the lock lever 324 is used as a handle when the user releases the locking mechanism and withdraws the seating member 321 to the outside through the front surface of the lower housing 311.

On the other hand, one side of the lower housing 311 is provided with a pair of LM guide 314 disposed in the vertical direction, the ball screw 315 is installed between the LM guide 314, the LM guide ( The lifting block 313 and the lifting plate 312 are coupled to the 314 and the ball screw 315 for lifting up and down the trays seated on the seating member 321.

In addition, the lower end of the rear housing 311 is provided with an electric motor 316 coupled to the lower end of the ball screw 315 and the belt 316a to rotate the ball screw 315.

When the lifting plate 312 is initially positioned at the lower end of the lower housing 311, the lifting plate 312 is positioned directly below the upper surface of the seating member 321, and the front and rear lengths of the lifting plate 312 are seating members 321. It has a length slightly smaller than the distance between the mounting bar (321a, 321b) of.

Therefore, when the lifting block 313 is raised by the ball screw 315 after the trays are mounted on the seating member 321, the lifting plate 312 raises the trays on the seating member 321. will be.

The third embodiment of the autoloader configured as described above operates as follows.

First, when the operator wants to load the trays in the autoloader, turn the locking lever 324 of the seating member 321 to release the lock, and then pull the seating member 321 along the slide rails 323a and 323b. It is drawn out through the front surface of the lower housing 311.

Subsequently, the worker loads the trays on the top of the seating member 321 drawn out. At this time, the trays mounted on the seating member 321 are stably supported by the guide bars 322a and 322b.

When the tray stacking operation is completed, the operator inserts the seating member 321 into the lower housing 311 again, locks the locking lever 324, and then operates the electric motor 316 to rotate the ball screw 315. As a result, the elevating block 313 and the elevating plate 312 are raised to transfer the trays on the seating member 321 to the upper stacking unit 350, and then load the trays in the same manner as described in the first embodiment. The block 313 and the elevating plate 312 are lowered to return to the initial position.

Then, the mounting member 321 is again taken out to load the trays and then drawn in the same process as described above, and the tray stacking operation of the lower stacking unit 310 is completed.

Subsequently, the trays loaded on the upper and lower stacking units 350 and 310 are supplied to the loading unit 10 of the handler in the same manner as described in the first embodiment.

As described above, according to the present invention, it is possible to load a large number of trays at one side of the loading unit of the handler and automatically supply these trays to the loading unit, so that a large number of trays can be tested at one time even in the absence of an operator. do.

Claims (9)

The trays containing the devices to be tested are loaded in the loading unit, the devices of these loading units are transferred to the test site, the test is performed under predetermined conditions, and the tested devices are classified according to the test results. In a handler that is intended to be mounted on A first stacking unit installed on one side of the loading unit and having a plurality of trays in which the devices are stored, stacked in a stacking structure, and a plurality of trays stacked on one side of the first stacking unit and stacked in a stacking structure And a second loading part which is configured to supply the trays of the first loading part and the second loading part automatically to the loading part sequentially when the tray of the loading part becomes empty. The tray autoloader for a handler as claimed in claim 1, wherein the second loading part is installed in succession on an upper part of the first loading part. The lower housing according to claim 1 or 2, wherein the first loading portion has a box shape having an upper surface and a front surface open to accommodate trays therein, and is provided to be movable up and down within the lower housing. And a lifting means for raising and lowering the lower seating plate and the lower seating plate, which are stacked and placed, from the lower housing lower end to the lower end of the second loading part. According to claim 3, The lifting means for elevating the lower seat plate, the guide rail is installed up and down on one side surface portion of the lower housing, and the lifting block is installed to be movable along the guide rail and the lower seat plate is mounted; The tray autoloader for a handler comprising: a driving unit coupled to the lifting block and configured to move the lifting block up and down. According to claim 4, The lower seat plate is coupled to the lifting block via a slide rail through the sliding movement forward and backward with respect to the lifting block and is capable of withdrawal and withdrawal through the open front surface of the lower housing. Tray autoloader for handlers. According to claim 3, The second loading portion, the upper housing that is installed in succession on the lower housing upper portion of the first loading portion to accommodate the tray therein, and the upper seating plate for loading the trays at the lower end of the upper housing and And Tray autoloader for handlers, characterized in that the lower portion of the upper housing comprises a support for supporting the upper mounting plate releasably. According to claim 6, wherein the support portion is supported by a support to release each corner portion of the upper seat plate from below, and a pneumatic cylinder coupled to the support to move the support to the upper seat plate support position and release position Tray autoloader for handlers, characterized in that configured. 7. The tray autoloader according to claim 6, wherein the upper housing is formed such that its front face is opened, and the upper seat plate is retractable through the open front face of the upper housing. The plurality of trays of claim 1 or 2, wherein the first loading part is installed to be pulled out through a lower housing having an open front surface and an upper surface and a front surface opened at a lower end of the lower housing. An open box-shaped seating member loaded in a structure, a tray lifting means for raising and lowering the trays mounted on the seating member up and down in the lower housing, and vertically installed at each corner of the seating member And a guide bar for supporting each corner of the trays loaded in the tray and guide the trays when the trays are moved up and down by the tray lifting means.