KR100911337B1 - Carrier board transferring apparatus for test handler and test handler - Google Patents

Abstract

The present invention relates to a carrier board feeder and a test handler for a test handler. According to the present invention, by using a pulley to transfer the carrier board in the chamber in which the required temperature environment is created, the conveying distance of the carrier board can be precisely controlled while using the flat belt so that the stability of the belt can be achieved. The technique is disclosed.

Test handler, carrier board feeder, test tray feeder

Description

Carrier board feeder and test handler for test handlers {CARRIER BOARD TRANSFERRING APPARATUS FOR TEST HANDLER AND TEST HANDLER}

The present invention relates to a test handler (TEST HANDLER) that is a device that supports the inspection of semiconductor devices by a tester (TESTER), and more particularly relates to a carrier board transfer device for transferring a carrier board provided in the test handler.

The semiconductor device produced is tested by a tester, and then divided into good and defective products, and only good products are shipped. An automated inspection apparatus called a test handler is used to support the test process by the tester. Such a test handler is provided with a plurality of carrier boards (circuit boards provided in the test handler currently produced, which are called test trays) for circulating a predetermined path inside the test handler. The circuit board is docked to the tester at a test point (a point corresponding to the position of the tester) on a predetermined path so that the loaded semiconductor devices can be tested.

1 is a plan view of a carrier board 10 newly developed by the applicant.

As shown in FIG. 1, the carrier board 10 includes a frame plate 11 and a plurality of inserts 12 mounted in a matrix form on the frame plate. For reference, in the insert 12, a seating space (S, two seating spaces are formed in one insert) for seating a semiconductor device, and the test socket of the tester are arranged diagonally on the left and right sides of the seating space S. Guide grooves (G1) and guide grooves (G2) for matching with the pusher of the press unit is formed, the frame plate 11 is formed in the longitudinal direction of the vertical frame (11a) and the lower portion of the insert 12 The expansion jaw 11b is formed to extend in the portion of the vertical frame (11a) to prevent the separation and the locking jaw (11c) is formed to extend in the portion of the vertical frame (11a) to prevent the upper release of the insert. And four inserts 12 are to be mounted to the frame plate 11 by one bolt (13). Although not shown in FIG. 1, a latch structure is formed on the upper and lower sides of the seating space S to prevent separation of the semiconductor device.

As shown in Figure 1, the carrier board 10 is formed only the vertical frame (11a). Since the horizontal frame is not formed, the carrier board 10 may be bent when receiving a force in a direction perpendicular to the surface of the frame plate 11. To prevent this, the Applicant prevents the bending of the carrier board by installing a bar on the upper side of the carrier board to correspond to the pressure of the insert opening device under the carrier board in the loading position or the unloading position.

2 is a schematic plan view of a typical test handler 200.

The general test handler 200, as shown in Figure 2, the loading device 210, the soak chamber 220, Soak Chamber (220), the test chamber (230, Test Chamber), Desoak Chamber (240, Desoak Chamber) And an unloading device 250 and the like.

The loading device 210 loads the semiconductor devices from the customer tray to the carrier board.

In the soak chamber 220, the semiconductor device loaded on the carrier board is preheated or precooled so as to be matched with the test environmental conditions before being tested, and the carrier board is translated to the test chamber 230.

In the test chamber 230, the carrier board is brought into close contact with the tester coupled to the rear of the test chamber 230 (exactly, the test head is coupled) so that the semiconductor device loaded on the carrier board is supplied to the tester (more specifically, the semiconductor device). Test is made by contacting the tester's test socket. In addition, the test chamber 230 has a temperature environment according to test conditions.

In the desock chamber 240, the heated / cooled semiconductor device loaded on the carrier board transferred from the test chamber 230 is de-heated and de-cooled.

The unloading device 250 classifies the semiconductor devices loaded on the carrier board from the desock chamber 240 by test grade and unloads them into an empty customer tray.

On the other hand, the carrier board is to be circulated along the circulation path (C) as shown in the loop of Figure 2, for the circulation of the carrier board, the test handler 200 should be provided with a plurality of carrier board transfer device. The present invention is a chamber (hereinafter referred to as a 'chamber') of the plurality of carrier board transfer apparatus is formed a temperature environment according to the required temperature conditions, such as the soak chamber 220, the test chamber 230 and the desoak chamber 240 General term) relates to a carrier board conveying device for conveying the carrier board.

In general, the interior of the chamber is a temperature environment according to the required temperature conditions (high or low temperature) because the operation of the actuators such as cylinders and motors are unstable or impossible to operate. Therefore, as schematically referred to in FIG. 2, the carrier board conveying device 260 for conveying the carrier board in the chamber is configured outside of the chamber in the case of drivers 261 such as a cylinder or a motor to prevent thermal damage. It is possible to prevent the movement, the moving member 262 for moving the gripped carrier board by being moved by the operation of the driver 261 should be configured inside the chamber.

Figure 3 shows a side view of the carrier board conveying apparatus 300 according to the prior art provided for transporting the carrier board located inside the chamber, Figures 4a and 4b respectively the carrier board conveying apparatus 300 of Figure 3 ) Is a schematic view from inside and outside the chamber. For reference, FIG. 3 illustrates a carrier board transfer device for lifting and moving a vertical carryboard in a side docking test handler (a test handler for supplying semiconductor devices to a tester while the carrier board is standing vertically). Doing.

As shown in Figure 3, the carrier board transfer apparatus 300 according to the prior art, the moving member 310 is provided to be movable up and down while holding the carrier board (supporting the lower end of the carrier board) inside the chamber. And a guider 320 for guiding the lifting movement of the moving member 310, and a power providing device for providing the lifting movement force so that the moving member 310 moves up and down within the lifting movement range.

The power supply device is provided with a top pulley 331, a pulley 332, and a driven belt 333 provided inside the chamber, as referred to in FIG. 4A, and an outside of the chamber, as referred to in FIG. 4B. The drive source 334 is comprised.

The upper pulley 331 and the lower pulley 332 are provided to be spaced apart from each other in the vertical direction with a fixed position between the lifting movement range according to the lifting movement, the driven belt 333 and the upper pulley 331 The pulley 332 rotates as a turning point, the moving member 310 is coupled to the driven belt 333.

In addition, the driving source 334 is for supplying a driving force necessary for the lifting movement of the moving member 310, and is composed of an upper pulley 334a, a lower pulley 334b, a driving belt 334c and a cylinder 334d.

The upper pulley 334a is integrally coupled to the upper pulley 331 with the chamber wall W interposed therebetween, and the lower pulley 334b is disposed between the chamber pulley 332 and the chamber wall W. It is integrally coupled to the left to rotate together, the drive belt 334c is rotated by using the upper pulley 334a and the lower pulley 334b as the turning point.

The cylinder 334d is provided as a driver for supplying a driving force, and the end of the cylinder rod 334d1 is coupled to the driving belt 334c.

According to the conventional carrier board transfer apparatus 300 having the above configuration, when the cylinder 334d is operated to raise and lower the cylinder rod 334d1, the driving belt 334c moves the upper pulley 334a and the lower pulley 334b. The rotary turning point is rotated, and the upper pulley 331 and the lower pulley 332 rotate in conjunction with the upper pulley 334a and the lower pulley 334b. Therefore, the driven belt 333 is rotated by using the upper pulley 331 and the lower pulley 332 as the rotation switching point, and the moving member 310 coupled to the driven belt 333 is moved by the guider 320. While being guided, the carrier board held and supported by the moving member 310 may be lifted and lowered.

By the way, the lifting position (position of upper and lower points) of a carrier board is determined with respect to the engagement position of a tester. Therefore, when raising and lowering the carrier board, the lifting position must be accurate, so the carrier board conveying apparatus 300 according to the prior art secures the accuracy of the lifting position by configuring the driving belt 334c and the driven belt 333 as timing belts. there was.

However, since the driven belt 333 provided inside the chamber is often broken due to damage caused by an extreme temperature environment (ultra high temperature or cryogenic temperature) inside the chamber, the service life of the carrier board transfer device 300 is ultimately lost. There is a problem of shortening. However, if the driven belt is to be configured as a relatively stable flat belt, it is difficult to accurately control the lifting position due to the sliding of the flat belt.

The present invention has been made to solve the above-described problems, the object of the present invention is to provide a carrier belt with a flat belt by using a pulley, while the carrier board transport can be precisely controlled lifting position (moving position) It is to provide a description of the device.

Carrier board transfer apparatus for a test handler according to the present invention for achieving the above object, the movable member is provided to be movable within the moving range to move the gripped carrier board; A pulley fixedly coupled to the movable member and provided to be movable integrally with the movable member; And a power providing device for providing a moving force to the moving pulley such that the moving member moves within the moving range. Characterized in that it comprises a.

The power supply device, the drive pulley is provided to be fixed in position; One side is wound or unwinded to the drive pulley according to the rotation of the drive pulley and the other side is fixed, driven belt passing through the pulley; And a driving source provided to rotate the driving pulley so that the driven belt can be wound or released on the driving pulley. It includes a more specific feature to include.

The driven belt is another feature that the belt is a flat belt.

In addition, the test handler according to the present invention for achieving the above object, the carrier board that can be transported in a state that the semiconductor elements are loaded; A loading device for loading semiconductor elements from a customer tray into the carrier board; At least one chamber provided therein to accommodate the carrier board transported after the loading is completed by the loading device, and to maintain the semiconductor devices loaded on the carrier board accommodated therein at a required temperature state; An unloading device for unloading the semiconductor devices from the carrier board transferred to the empty customer tray after the test of the stacked semiconductor devices via the at least one chamber is completed; And a carrier board transfer device for transferring a carrier board accommodated in the at least one chamber. The carrier board transfer apparatus includes a moving member provided to be movable within a moving range to move the gripped carrier board, and disposed in the at least one chamber; A pulley fixedly coupled to the movable member and provided to be movable integrally with the movable member; And a power providing device for providing a moving force to the moving pulley such that the moving member moves within the moving range. Characterized in that it comprises a.

The power supply device, the drive pulley is provided to be fixed in position; One side is wound or unwinded to the drive pulley according to the rotation of the drive pulley and the other side is fixed, driven belt passing through the pulley; And a driving source provided to rotate the driving pulley so that the driven belt can be wound or released on the driving pulley. The drive pulley and the driven belt are disposed inside the at least one or more chambers, and the drive source is further characterized in that it is disposed outside the at least one or more chambers.

The driven belt is another feature that the belt is a flat belt.

According to the present invention as described above, by using the movable pulley can be applied to the flat belt while the movement position can be accurately controlled, there is an effect that can be extended (semi-permanently) to extend the life of the carrier board transfer device.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of a carrier board conveying device (hereinafter, referred to as "carrier board conveying device") for the test handler according to the present invention as described above will be described in more detail.

FIG. 5 is a schematic side view of a carrier board conveying apparatus 500 according to a preferred embodiment of the present invention, and FIGS. 6A and 6B respectively show the carrier board conveying apparatus 500 of FIG. 5 as viewed from the inside and outside of the chamber. Schematic diagram.

The carrier board transfer apparatus 500 according to the present embodiment includes a moving member 510, a guider 520, a pulley 530, a power supply device, and the like, as referenced in FIGS. 5 and 6. do.

The moving member 510 is provided in the form of a long rail in the transverse direction, and is provided inside the chamber to move up and down to move up and down within the lifted movement range (L).

The guider 520 is provided inside the chamber, and is provided in pairs on the left and right sides of the moving member 510 to guide the lifting movement of the moving member 510. This guider 520 may be provided as an LM guide.

The movable pulley 530 is rotatably fixed to the stop of the movable member 510 so that the movable member 510 can be moved up and down integrally with the movable member 510.

The power supply device provides a moving force to the pulley 530 so that the moving member 510 can be moved within the lifting movement range (L). This power supply device will be described in more detail.

As shown in FIG. 6A, the power supply device includes a drive pulley 541, a fixed pulley 542, and a driven belt 543 provided inside the chamber, and a drive source provided outside the chamber as referenced in FIG. 6B. 544 and the like.

The drive pulley 541 and the fixed pulley 542 are provided so that their positions are fixed in the vertical direction with the lifting movement range L of the moving member 510 interposed therebetween. The high pulley 542 is not a required configuration here. As can be seen in the carrier board feeder 600 of FIG. 6c to which the carrier board feeder 500 of FIG. 5 is applied, when the drive pulley 641 is positioned above the chamber, a separate fixed pulley is required. Because there is no.

One side of the driven belt 543 is wound or unwound by the drive pulley 541 according to the rotation of the drive pulley 541, and the other side is fixed at a position that can secure the lifting movement interval of the pulley 530. have. In this embodiment, the pulley 530 is fixed to the upper side of the chamber with the lifting movement range (L) of the moving member 510 between the drive pulley 541. The driven belt 543 is installed to pass through the fixed pulley 541 and the moving pulley 530 as referred to in FIG. 6A. Of course, when following the application example as shown in Figure 6c is not provided with a separate pulley, there is no reason for the driven belt 643 to pass through the pulley.

The drive source 544 is provided to rotate the drive pulley 541 so that one side of the driven belt 543 can be wound or unwound by the drive pulley 541. As shown in FIG. 6B, the pulley a 544a is provided. And a pulley b 544b, a drive belt 544c, a cylinder 544d, and the like.

The pulley a 544 a is integrally coupled to the drive pulley 541 with the chamber wall W therebetween, so that the pulley a 544 a also rotates when the pulley a 544 a rotates. Here, the radius of the drive pulley 541 is preferably provided larger than the radius of the pulley a (544a). Because the movement range of the cylinder rod 544d1 corresponds to the lifting movement range L of the moving member 510, the cylinder 544d if the radius of the drive pulley 541 is equal to or smaller than the radius of the pulley a 544a. This is because the movement range of the rod must be secured at least twice as much as the lifting movement range L of the moving member 510, thereby bringing a restriction on the installation space of the driving source 544.

Pulley b (544b) is provided to be fixed to the position spaced apart from the pulley a (544a) should be disposed at a position spaced apart at least by the interval to ensure the lifting movement range (L) of the movable member 510.

The driving belt 544c is provided to rotate with the pulley a 544a and the pulley b 544b as the rotation turning points. The driving belt 544c is provided with a timing belt so as to accurately control the amount of rotation of the pulley a 544a.

The cylinder 544d is provided as a driver for supplying a driving force for rotating the pulley a 544a, and the end of the cylinder rod 544d1 is coupled to the drive belt 544c. Of course, depending on the implementation, the driving source may be configured as a motor, in which case the motor will be implemented to directly rotate the pulley a 544a.

Hereinafter, the operation of the carrier board transfer apparatus 500 according to the present embodiment will be described with reference to the operation state diagram of FIG. 7A.

When the carrier board is gripped by the movable member 510 while the movable member 510 is located at the lower point B, the cylinder 544d is operated to lower the cylinder rod 544d1, as shown in FIG. 7A. The drive belt 544c is rotated in the solid arrow direction. As the driving belt 544c rotates, the pulley a 544a is rotated in the direction of the dotted arrow as shown in FIG. 7A, and in conjunction with this, the drive pulley 541 is also dotted in the arrow direction. Direction of rotation. Therefore, one side of the driven belt 543 is wound on the drive pulley 541, the pulley 530 is raised and the movable member 510 integrally coupled with the pulley 530 is also raised together with the cylinder rod 544d1. When d) is lowered by a predetermined amount, ultimately, as shown in FIGS. 8a and b, the movable member 510 is positioned in the shop T to raise the gripped carrier board. Of course, the lowering of the movable member 510 and the gripped carrier board may be made as the piston rod 544d1 of the cylinder 544d rises.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings. However, since the above-described embodiments have only been described with reference to preferred examples of the present invention, the present invention is limited to the above embodiments. It should not be understood that the scope of the present invention is to be understood by the claims and equivalent concepts described below.

1 is a plan view of a carrier board recently developed by the applicant.

2 is a plan view of a general test handler.

Figure 3 is a schematic side view of the carrier board transfer apparatus according to the prior art.

4A and 4B are schematic views of the carrier board transfer device of FIG. 3 as viewed from inside and outside the chamber, respectively.

Figure 5 is a schematic side view of a carrier board transfer apparatus according to an embodiment of the present invention.

6A and 6B are schematic views of the carrier board transfer device of FIG. 5 as viewed from the inside and outside of the chamber, respectively.

Figure 6c is a schematic diagram showing an application example for the carrier board conveying apparatus of Figure 5;

7A and 7B and 8A and 8B are operation state diagrams for explaining the operation of the carrier board transfer apparatus of FIG.

* Description of the symbols for the main parts of the drawings *

500: carrier board feeder

510: moving member

520: guider

530: pulley

541: driving pulley

542: high pulley

543: driven belt

544: driving source

544a: Pulley a

544b: Pulley b

544c: Driving belt

544d: Cylinder

Claims (6)

delete A moving member provided to be movable within a moving range to move the held carrier board; A pulley fixedly coupled to the movable member and provided to be movable integrally with the movable member; And A power providing device for providing a moving force to the moving pulley such that the moving member moves within the moving range; Including; The power supply device, A drive pulley provided with a fixed position; One side is fixed to a position that can be wound or unwinded on the drive pulley according to the rotation of the drive pulley and the other side is fixed to a position to secure the lifting range of the pulley, the driven belt via the pulley; And A drive source provided to rotate the drive pulley so that the driven belt can be wound or unwound by the drive pulley; Characterized in that it comprises Carrier board feeder for test handler. The method of claim 2, The driven belt is characterized in that the flat belt Carrier board feeder for test handler. delete A carrier board capable of being transported in a state in which semiconductor elements are stacked; A loading device for loading semiconductor elements from a customer tray into a carrier board; At least one chamber provided therein to accommodate the carrier board transferred after the loading is completed by the loading device, and to maintain the semiconductor devices loaded on the carrier board accommodated therein at a required temperature state; An unloading device for unloading the semiconductor devices from the carrier board transferred to the empty customer tray after the test of the stacked semiconductor devices via the at least one chamber is completed; And A carrier board transfer device for transferring a carrier board accommodated in the at least one chamber; Including; The carrier board transfer device, A movable member provided to be movable within a moving range to move the gripped carrier board and disposed in the at least one chamber; A pulley fixedly coupled to the movable member and provided to be movable integrally with the movable member; And A power providing device for providing a moving force to the moving pulley such that the moving member moves within the moving range; Including, The power supply device, A drive pulley provided with a fixed position; One side is wound or unwinded to the drive pulley according to the rotation of the drive pulley and the other side is fixed, driven belt passing through the pulley; And A drive source provided to rotate the drive pulley so that the driven belt can be wound or unwound by the drive pulley; Including; The drive pulley and the driven belt are disposed inside the at least one chamber, and the drive source is disposed outside the at least one chamber. Test handler. The method of claim 5, The driven belt is characterized in that the flat belt Test handler.

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