KR20020018967A - Paste coating apparatus - Google Patents

Abstract

PURPOSE: To facilitate the data setting for forming a paste pattern of a prescribed shape. CONSTITUTION: For example, when four paste patterns P1-P4 applied and drawn on a substrate 22 have a pattern of have a, data (the coordinate position data of a basic pattern or vector data obtained by converting the segment data of the basic pattern) defining the basic pattern common to the paste patterns P1-P4 are set and pattern data for applying and drawing the paste patterns P1-P4 are generated from t he data. In such a case, the data of a single basic pattern can be made the data of the paste patterns P1-P4 because the patterns have the same shape. However, the coating condition, or the like, has to be corrected at need because the applying and drawing positions of the paste patterns P1-P4 on the substrate 23 are different.

Description

Paste Coating Machine {PASTE COATING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paste spreader, and more particularly, to setting pattern data for applying a paste pattern of a desired shape by ejecting paste from a nozzle on a peripheral surface of a substrate placed on a table.

The paste applicator forms a desired paste pattern on a substrate by changing the relative positional relationship between the substrate and the nozzle in a direction parallel to the circumferential surface of the substrate while discharging the paste filled in the paste container from the discharge port of the nozzle onto the substrate. do.

Conventionally, in setting pattern data indicating a relative positional relationship between a substrate and a nozzle in a direction parallel to the peripheral surface of the substrate, coordinates of relative movement paths of the substrate and the nozzle are input to each paste pattern.

In addition, as the coating conditions, the relative movement speed between the nozzle and the substrate (hereinafter referred to as application speed), relative distance (hereinafter referred to as application height), pressure applied to the paste storage container (hereinafter referred to as application pressure), etc. It is input by setting one by one.

In the conventional paste applicator, each paste pattern is instructed in shape, application speed, application height, application pressure, and the like. Therefore, when a plurality of patterns having the same shape, the same or similar application conditions are formed on one substrate, the patterns are applied. As many data inputs are required, time is required for data input.

In order to have one paste condition (one each, application speed, application height, application pressure, etc.) in another paste pattern, application conditions (application speed, application height, application pressure, etc.) are applied in the middle of one paste pattern. It was difficult to set data to change.

An object of the present invention is to provide a paste coating machine which solves such a problem and makes it possible to easily set pattern data for forming a desired paste pattern.

1 is a configuration diagram showing an embodiment of a paste applicator according to the present invention;

2 is a connection diagram showing an electric system and an air system of the embodiment shown in FIG. 1;

3 is a flowchart showing a pre-process of the paste coating process of the embodiment shown in FIG. 1;

4 is a flowchart showing a specific example of the paste pattern data setting step in FIG. 3;

5 is a view showing one specific example of a paste pattern applied to a substrate in the embodiment shown in FIG. 1;

FIG. 6 is a diagram showing one specific example of a basic pattern used for data setting of the paste pattern shown in FIG. 5; FIG.

FIG. 7 is a diagram showing one specific example of the registration table in setting data of the paste pattern shown in FIG. 5;

FIG. 8 is a diagram showing one specific example of the vector data table of the paste pattern automatically set from the registration table shown in FIG. 7;

FIG. 9 is a diagram showing one specific example of a table of position coordinate data used for setting base data of the basic pattern shown in FIG. 6;

FIG. 10 is a diagram showing one specific example of a vector data table of individual base patterns constituting the basic pattern shown in FIG. 6 automatically created based on the data of the position coordinate table shown in FIG. 9;

11 is a diagram showing one specific example of a relative positional relationship table for setting the positional relationship of individual base patterns constituting the basic pattern shown in FIG. 6;

FIG. 12 is a diagram showing one specific example of the relative positional relationship table for setting the positional relationship on the substrate of the paste pattern shown in FIG. 5 composed of the basic pattern shown in FIG.

In order to achieve the above object, the present invention places the substrate on the table so as to face the discharge port of the nozzle, and paste storage while changing the relative positional relationship between the substrate and the nozzle in a direction parallel to the circumferential surface of the substrate according to the set pattern data. A paste applicator for dispensing and drawing a desired paste pattern according to pattern data on a substrate by discharging a paste filled in a cylinder from a discharge port of a nozzle onto a substrate. The first setting means, the second setting means for setting the data set by the first setting means as a plurality of paste pattern data for coating and drawing on the same substrate, and the coating conditions for each paste pattern for coating drawing, and the coating conditions Third setting means for modifying the number and the second number; And fourth setting means for setting the positional relationship on the substrate of the plurality of paste patterns having the pattern data set thereon, and applying the paste along the trajectory according to the pattern data on the substrate according to the application conditions. It is set as the structure which apply | coats and draws a some paste pattern in a positional relationship.

Further, in coating and drawing a plurality of basic patterns having different paste patterns, the first to fourth setting means set the data defining the respective basic patterns.

When a plurality of nozzles are provided again, the first to fourth setting means set the data for the paste patterns to be applied for drawing the respective nozzles.

According to the present invention, data setting of a desired paste pattern is easy.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described by drawing.

1 is a block diagram showing an embodiment of a paste applicator according to the present invention, where 1 is a mount, 2a, 2b is a substrate conveying conveyor, 3 is a support, 4 is a substrate adsorption plate, 5 is a θ axis shift table, and 6a. 6b is the X-axis movement table, 7 is the Y-axis movement table, 8a and 8b is the servo motor, 9 is the Z-axis movement table, 10 is the servo motor, 11 is the ball screw, 12 is the servo motor, 13 is the nozzle at the tip. Paste paste container (syringe), 14 is a distance meter, 15 is a support plate, 16a, 16b is an image recognition camera, 17 is a control unit, these constitute the device body (M), 18 is a monitor, 19 is a keyboard, 20 Is a personal computer main body having an external memory device, 21a and 21b are cables, 22 is a glass substrate, and 23 is a printer.

2, the board | substrate conveyance conveyors 2a and 2b which are able to raise and lower in parallel in the X-axis direction are provided on the mount 1 in this figure, and the board | substrate 22 is moved forward from the inside of the figure, namely in the X-axis direction. Conveys horizontally. Moreover, the support stand 3 is provided on the mount 1, and the board | substrate adsorption board 4 is mounted on the support stand 3 via the θ-axis movement table 5, and by board | substrate conveying conveyors 2a and 2b. The conveyed board | substrate 22 is mounted on this board | substrate adsorption board 4, and is fixed by adsorption. The θ-axis moving table 5 rotates the substrate adsorption board 4 in the θ direction around the Z axis.

On the mount 1, the X-axis movement tables 6a and 6b are provided in parallel with the X-axis from the outer side of the board | substrate conveying conveyors 2a and 2b again, and are made to span between these X-axis movement tables 6a and 6b. The Y axis moving table 7 is provided. The Y-axis moving table 7 is horizontally conveyed in the X-axis direction by the forward rotation and the reverse rotation of the servomotors 8a and 8b provided in the X-axis movement tables 6a and 6b.

On the Y-axis movement table 7, a Z-axis movement table 9 which moves in the Y-axis direction by the forward and reverse rotation of the ball screw 11 driven by the servomotor 10 is provided. The Z-axis moving table 9 is provided with a support plate 15 for holding and fixing the paste container 13 and the distance meter 14, and the servomotor 12 connects these paste containers 13 and the distance meter 14 to each other. It moves in the Z-axis direction via the movable part of the linear guide not shown provided in the support plate 15. FIG.

The paste storage container 13 is detachably attached to the movable part of such a linear guide. Moreover, the image recognition cameras 16a and 16b for aligning the board | substrate 22 etc. are provided in the ceiling board of the mount 1 toward an upward direction (Z-axis direction).

Inside the mount 1, a control unit 17 for controlling the servo motors 8a, 8b, 10, 12 and the θ-axis movement table 5 and the like, not shown servo motor, is provided. The control unit 17 is connected to the monitor 18, the keyboard 19, and the personal computer main body 20 via a cable 21a, and the data for various processing in the control unit 17 is the keyboard 19 The monitor 18 displays the image inputted from the image recognition cameras 16a and 16b and the processing status of the control unit 17.

In addition, information such as operation condition data such as application shape data and application condition data input from the keyboard 19 and production management data such as the number of production transmitted from an external device (not shown) is supplied to the personal computer main body 20. In the personal computer main body 20, such information is stored and stored in the RAM from an internal storage medium such as a built-in hard disk and an external storage medium such as a floppy disk to be mounted. By the operator's instruction, arbitrary information can be read from these storage media and printed by the printer 23.

2 is a block diagram showing the configuration of the control unit 17 shown in FIG. 1, the control of the air pressure of the paste storage container 13, and the control of the substrate 22, wherein 13a is a nozzle of the paste storage container 13, Microcomputer, 17b is motor controller, 17c1, 17c2 is X1, X2 axis driver, 17d is Y axis driver, 17e is θ axis driver, 17f is Z axis driver, 17g is data communication bus, 17h is external interface, 24 is θ Servo motor for driving the shaft movement table 5 (Fig. 1), 25 to 29 are encoders, 30 is positive pressure source, 30a is positive pressure regulator, 31 is negative pressure source, 31a is negative pressure regulator, 32 is valve unit The same reference numerals are attached to the parts corresponding to FIG. 1.

In the figure, the control unit 17 is a video signal obtained from the microcomputer 17a, the motor controller 17b, the respective axis drivers 17c1 to 17f of the X, Y, Z, and θ, and the image recognition cameras 16a and 16b. And an external interface 17h for signal transmission between the image processing apparatus 17i, the keyboard 19, and the like for processing the data. Moreover, the control part 17 also has the drive control system of the board | substrate conveyance conveyors 2a and 2b, The illustration is abbreviate | omitted here.

Although not shown, the microcomputer 17a includes a ROM which stores a processing flow program for performing application drawing of the main computing section or the paste described later, the processing result of the main computing section, the external interface 17h, and the motor controller 17b. RAM for storing the input data from the above, and an input / output unit for exchanging data with the external interface 17h or the motor controller 17b.

Each servomotor 8a, 8b, 10, 12, 24 is provided with encoders 25 to 29 for detecting the rotation amount, and the detection results are shown for the respective axis drivers 17c1 to 17f of X, Y, Z and θ. The position control is performed by returning to).

The processing flow program for performing application drawing of the paste described later stored in the ROM of the microcomputer 17a can be changed from the personal computer body 20 via the cable 21a as necessary. It is also possible to change from the not-shown network to which the personal computer main body 20 is connected. In this case, however, the program body may be concealed so that the program is not inadvertently rewritten.

The board | substrate 22 is vacuum-sucked by the board | substrate adsorption board 4 (FIG. 1) by the negative pressure distribute | distributed from the negative pressure source 31. As shown in FIG. The servo drive 8a, 8b, 10 is inputted from the keyboard 19 and forward and reverse rotated based on the data described later stored in the RAM of the microcomputer 17a. Move in the direction of Thereby, the nozzle 13a of the paste container 13 mounted in the Z-axis movement table 9 maintains a predetermined distance in the Z-axis direction with the board | substrate 22, and moves to X and Y-axis directions. The movement trajectory in the plane (XY plane) parallel to the peripheral surface of the substrate 22 of this nozzle 13a is determined by the above data. During this movement, the microcomputer 17a controls the valve unit 32 so that a slight air pressure is applied from the positive pressure source 30 to the paste storage container 13 via the positive pressure regulator 30a and the valve unit 32. As a result, the paste is discharged from the discharge port of the tip of the nozzle 13a, and the desired pattern of the paste is applied onto the substrate 22.

During the movement of the z-axis movement table 9 (FIG. 1) in the X and Y-axis directions, the distance meter 14 measures the distance (coating height) between the paste discharge port of the nozzle 13a and the substrate 22, The servomotor 12 is controlled by the Z-axis driver 17f so that this distance is always kept constant.

In the standby state in which the paste is not applied, the microcomputer 17a controls the valve unit 32 so that the negative pressure source 31 is connected to the paste container 13 through the negative pressure regulator 31a and the valve unit 32. The paste drawn out from the paste discharge port of the nozzle 13a is pulled back into the paste storage container 13 through this. As a result, the expansion of the paste from the paste discharge port can be prevented. In addition, the negative pressure source 31 may communicate with the paste storage container 13 only when the discharge port of this nozzle 13a is monitored by the image recognition camera which is not shown in figure.

FIG. 3 is a flowchart showing the whole paste coating (drawing) process of the embodiment shown in FIG.

In the figure, first, when the power supply of the personal computer main body 20 connected to the paste spreader is turned on (step 100), the paste pattern data setting step is executed (step 200).

One or more paste patterns are applied to the substrate 22 (hereinafter referred to as the actual substrate) to which the paste pattern is to be drawn, but in this paste pattern data setting step (step 200), data for each paste pattern (hereinafter, referred to as follows) is first applied. , The paste pattern data), the positional data of the actual substrate 22, and the relative speed between the actual substrate 22 and the nozzle 13a when the paste is actually applied to the actual substrate 22 (this is referred to as an application speed). However, the application speed in this case is referred to as the initial application speed, in particular, and the height of the paste ejection outlet of the nozzle 13a from the surface of the substrate 22 (this is referred to as the application height, in which case the application height in this case is particularly initial). The pressure applied to the paste storage container 13 which determines the set coating height) and the paste ejection amount from the nozzle 13a (this is called the coating pressure, but the coating pressure in this case is particularly the initial application coating pressure). Various data). Such data is input from the keyboard 19 (FIG. 1), and the input data is stored in a RAM in the personal computer main body 20. FIG.

4 is a flowchart showing one specific example of this paste pattern data setting step (step 200). Here, the case where the paste application of the eight paste patterns 23a to 23h having the shape shown in Fig. 5 is performed on the actual substrate 22 will be described as an example. However, the four paste patterns 23a, 23c, 23e, and 23g are patterns having the same shape, size, and dimension, and such a pattern is called a pattern of the same shape. The other four paste patterns 23b, 23d, 23f, and 23h also have the same shape. Here, the paste patterns 23a and 23b are paired to form the paste pattern P1, the paste patterns 23c and 23d are paired to form the paste pattern P2, and the paste patterns 23e and 23f are paired. The paste pattern P3 is formed, and the paste patterns 23g and 23h are paired to form the paste pattern P4.

Therefore, these paste patterns P1 to P4 form the same shape, and the basic pattern BP is as shown in FIG. Here, the basic pattern BP is composed of two base patterns BP1 and BP2 which can be drawn by handwriting, respectively, and the face patterns BP1 are paste patterns 23a, 23c, and 23e in FIG. , 23g) and the base pattern BP2 are the basic patterns of the paste patterns 23b, 23d, 23f, and 23h in FIG.

First, the base pattern setting process (step 201) of FIG. 4 prepares the basic pattern BP shown in FIG. 6 of the paste patterns P1 to P4 actually formed, and sets the data setting (input) of this basic pattern BP. Before setting the data of the basic pattern BP, the setter knows the paste patterns P1 to P4 and the basic pattern BP to be applied to the actual substrate 22. A registration table (MDT) relating to these patterns as shown is created. Data to be registered in the registration item table MDT is paste patterns P1 to P4 shown in FIG. 5 and these basic patterns BP shown in FIG. 6 as an example. "Number of patterns" is a paste to be applied to the actual substrate 22. In this case, since the paste patterns P1 to P4 are four in this case, the number is 4, and the " base data number " constitutes the base pattern number constituting each paste pattern P1 to P4, that is, the basic pattern BP. In this case, the number of base patterns is 2 because the base patterns BP1 and BP2 are used. The number of vectors is a vectorization of a straight portion forming the basic pattern BP as described later, but the number of vectors (that is, the number of straight portions) is the vector number of the base pattern BP1, BP2). Base data numbers are assigned for each base pattern of the base pattern BP, and in the case of FIG. 6, base data numbers 1 and 2 are assigned to the base patterns BP1 and BP2 of the base pattern BP, respectively. The number of vectors of "base data number 1" is seven, and the number of vectors of "base data number 2" is three from the number of straight portions.

In addition, the vector data table MVDT as shown in Fig. 8 is prepared by the microcomputer 17a (Fig. 2) in accordance with the setting of the registration table MDT. The vector data table MVDT is prepared for each pattern to be applied to the actual substrate 22 based on the data of the registration table MDT. In this case, the "pattern number" and " Number of base data "is determined, and the vector data table MVDT to be prepared is determined. 5 and 6, the number of patterns to be applied to the actual substrate 22 is 8 (= 4 x 2) because the "number of patterns" in the registration item table MDT is 4 and the number of base data is 2. The eight vector data tables MVDT are prepared and assigned to the paste patterns P1, P2, P3, and P4 two by one, and one of the two vector data tables MVDT allocated to each paste pattern is The other is assigned to the base data BD1 of one base pattern BP1 of the basic pattern BP and the other to the base data BD2 of the other base pattern BP2 of the basic pattern BP. The vector data table MVDT of the base data BD1 corresponds to the base data number 1) in the registration table MDT, and the vector data table MVDT of the base data BD2 is the registration table MDT. Corresponds to base data number 2 in.

In each vector data table MVDT, an item relating to a pattern to which this is assigned is set. That is, a storage unit that stores data of the "x component" or "y component" of the vector for each vector number described later, and a storage unit that stores the dimension (curvature radius) of the corner of the base pattern in the same manner, and the coating conditions (set coating speed). And a storage unit for storing the data of the set coating pressure and the set coating height. The number of such vector numbers is determined by "vector number" of "base data number" in the registration table MDT for each vector data table MVDT. In addition, since the dimension r and application conditions of the said corner can be determined beforehand, it inputs after preparation of the vector data table MVDT.

When the registration table MDT is set as described above, each vector data table MVDT is automatically prepared, but the paste patterns P1 to P4 for application drawing on the actual substrate 22 as shown in FIG. The base data setting (step 201) is performed, but the base data is not set for each of the paste patterns P1 to P4, but the basic patterns as shown in Fig. 6 of these paste patterns P1 to P4 are shown. Base data relating to (BP) is set.

Here, in the basic pattern BP shown in FIG. 6, G0 is used as the origin, and ends and bent portions of the base patterns BP1 and BP2 with respect to the origin G0 (paste patterns P1 to P4 in FIG. 5). Each position of [corresponding to a corner] is made into points A1, A2, A3, ..., A8 and points B1, B2, B3, B4 sequentially from their ends. In the case of paste application, the position A1 is applied to the base pattern BP1 as the coating start point, and the position A8 is the coating end point, and the position B1 is applied to the base pattern BP2. The starting point and position B4 are the end points of the coating.

The data (base data) of the basic pattern BP is based on G0 as the origin and the points A1 to A8 are coordinates of position An (xan, yan), and the positions B1 to B4 are Bm (xbm, ybm). Specify each position directly by the position coordinate of). 6, n = 1, 2,... … , 8, m = 1, 2, 3, 4. Here, in the case of the basic pattern BP shown in FIG. 6, the position coordinate data of each point A1 to A8, B1 to B4 is A1 (xa1, ya1), A2 (xa2, ya2), A3 (xa3, ya3), … … , A8 (xa8, ya8), point B1 (xb1, yb1), B2 (xb2, yb2), B3 (xb3, yb3), and B4 (xb4, yb4).

In addition, if the pattern is complicated, the positional variables (n, m) are increased or the number of base patterns is increased.

Such positional coordinate data is stored in the positional coordinate data table BDT provided in the RAM built in the personal computer main body 20 (FIG. 1) in association with the points A1 to A8 and the points B1 to B4, respectively. It is registered (first setting means). FIG. 9 schematically shows one specific example of such a table. FIG. 9 (a) shows the position coordinate data table BDT1 of the base pattern BP1, and FIG. 9 (b) shows the position pattern of the base pattern BP2. The position coordinate data table BDT2 is shown, respectively.

The above is the process of the base data setting process (step 201) in FIG. 4, and when this process is completed, each linear part (line segment) of the base patterns BP1 and BP2 is next to the vector having the direction and the size (length). The relative vector conversion process (step 202) is performed.

The base pattern BP is shown by the base patterns BP1 and BP2 based on a straight line as shown in Fig. 6, and the line segments (straight line portions) between the respective position coordinates are oriented to be vectors to paste the line segments. The direction to apply | coat an application and the distance to apply | coat can be indicated. Thus, the process of converting the line segment of the basic pattern BP into a vector based on the data of the position coordinate data table BDT as shown in FIG. 9 is this relative vector conversion process (step 202). This step will be described below.

Between the positions [(A1-A2), (A2-A3) of the base pattern BP1 shown in FIG. … ], The vector numbers (a1, a2, ..... an-1) (n = 8 in FIG. 6) are set to the vector set with respect to the line segment, and the position shown in FIG. On the basis of the position coordinate data of the coordinate data table BDT1, the vector component for each such vector number, i.e., the component (x component) Δxi in the X-axis direction of the magnitude (distance between the position coordinates) of the vector and the Y-axis direction The component (y component) Δyi (where i = 1, 2, ..., n-1) is obtained. As an example, the vector component for the line segment between A1-A2 is

Δx1 = xa2-xa1

Δy1 = ya2-ya1

Becomes In this way, the vector components Δxi and Δyi for each vector number ai obtained for the base pattern BP1 are registered in the vector data table VDT1 as shown in Fig. 10A.

Similarly, with respect to the base pattern BP2 shown in FIG. 6, between positions B1-B2, between (B2-B3),... … ], The vector numbers b1, b2, ..., bm-1 (where m = 4 in FIG. 6) are set in the order of the vectors set for the line segments, and the positions shown in FIG. Based on the positional coordinate data of the coordinate data table BDT2, the vector components Δxj, Δyj (where j = 1, 2, ..., m-1) are obtained for each of these vector numbers. In this way, the vector components Δxj and Δyj for each vector number bj obtained for the base pattern BP2 are registered in the vector data table VDT2 as shown in Fig. 10B.

The processing of the relative vector conversion process (step 202) in FIG. 4 or the above-described setting registration of base data as described above is confirmed (step 203). This confirmation is automatically performed based on the data in the registration table MDT shown in FIG. In other words, since the number of base data is 2 in the registration table MDT, two vector data tables VDT are created as shown in FIG. 10, but the vector for one of the base data numbers 1 is set. Whether the number of vectors becomes "vector number" = 7 set in the registration table MDT in the data table VDT1 (Fig. 10 (a)), and the vector data for the other "base data number 2"; In the table VDT1 (Fig. 10 (b)), it is determined whether or not the number of vectors has reached " vector number " = 3, which is set in the registration information table MDT. If these are satisfied at the same time, it is determined that the registration of the base data has been completed, but at least one of the vector data tables VDT1, 2 is assumed to have an error in the number of base data input in the setting of the base data (step 201). If this is not satisfied, the process returns to step 201, where the base data cannot be registered. In this case, the position coordinate data in the basic pattern BP as shown in FIG. 6 is input again as base data, and the position coordinate data table BDT as shown in FIG. 9 is set again.

In FIG. 4, the above steps 201 to 203 are processed in order for each of the base patterns BP1 and BP2, so that only the same number of steps as the number of base patterns (that is, two) is 201 to 203. It is to be repeated and the end of the registration of the base data is confirmed in step 203 for each base pattern BP1 and BP2, but the base data setting process (step 201) is performed for all the base data. The position coordinate data table BDT of the base pattern may be created, and then the process of step 202 may be performed for each position coordinate data table BDT to create the vector data table VDT in the order of the base pattern. In this case, after the vector data table VDT of all the base patterns is created, the confirmation process of step 203 is performed.

In addition, the vector data table VDT shown in FIG. 10 is created based on the data of the position coordinate data table BDT shown in FIG. 9, and a vector component is obtained for each line segment from the base pattern of the reference pattern BP. This may be done as long as it can be directly inputted and registered on the vector data tables VDT1 and VDT2.

When the base data registration end confirmation step (step 203) is completed in this manner, the same number of vector data tables (VDT) as the number of base patterns are registered in the RAM of the personal computer 20, but the registration end is confirmed. At the same time, the vector data table for the pattern data P1 base data BD1 as shown in FIG. 8 in which the vector components Δxi and Δyi of the respective vector numbers of the vector data table VDT1 are prepared as described above. The recorded vector components Δxi and Δyi are automatically transplanted into the vector data table MVDT for the base data BD1 of the other paste patterns P2, P3 and P4. Similarly, the vector data table MVDT for the base data BD2 of the pattern data P1 as shown in FIG. 8 in which the vector components Δxj and Δyj of the vector numbers of the vector data table VDT2 are prepared in advance. The recorded vector components DELTA xj and DELTA YJ are automatically transplanted into the vector data table MVDT for the other paste patterns P2, P3 and P4 base data BD2. Therefore, the vector components Δxi and Δyi of the respective vector numbers of the same vector data table VDT1 are stored in the vector data table MVDT for the base data BD1 for the paste patterns P1, P2, P3 and P4. The vector components? Xj and? Yj of the respective vector numbers of the same vector data table VDT2 are stored in the vector data table MVDT for the base data BD2 of (P1, P2, P3, P4).

In addition, the data of the dimension (r) of the corner and the coating condition previously inputted are also stored in the vector data table (MVDT) for the BD1 of the paste pattern (P1), but these stored data are stored in another vector data table (MVDT). ) Are also automatically transplanted to all of them. Accordingly, data of the same dimension r and coating conditions are stored in all the vector data tables MVDT.

In each of the paste patterns 23a to 23h shown in FIG. 5, the joints are rounded at the joints of the straight portions, that is, the corners (parts corresponding to the positions A2 to A7, B2 and B3 in the basic pattern BP). As a result, not only these corners are smooth, but also the relative positional change of the nozzle 13a and the substrate 22 in this portion is smoothed. In other words, the mechanical vibrations caused by such rapid speed fluctuations at the corners of the paste patterns 23a to 23h are reduced. As a result, the application speed can be increased, thereby improving the productivity and the shape defect of the paste pattern due to vibration. It is also connected to the reduction of defective substrates caused by.

On the other hand, the basic pattern BP shown in FIG. 6 is composed of only the straight portion, and in order to attach the roundness of the predetermined radius r to the corners of the paste patterns 23a to 23h actually applied and drawn on the real substrate 22, As described above, the data of the dimension r of the corner is input and registered in the vector data table MVDT as shown in FIG. As a result, when the paste patterns 23a to 23h are applied and drawn onto the real substrate 22 using the vector data table MVDT, the personal computer main body 20 uses the data of the dimension r of this corner to produce the vector. The linear part by the X component and the y component of is automatically connected at the overlapping position on the circumference of the radius r.

After the above processing is performed, the process proceeds to the next step, that is, the group data setting step (step 204).

Here, the paste patterns 23a and 23b constituting the paste pattern P1 in FIG. 5 form one group (pair), and the paste patterns 23c and 23d constituting the paste pattern P2 are similarly paste. The paste patterns 23e and 23f constituting the pattern P3 form one group of the paste patterns 23g and 23h constituting the paste pattern P4, respectively. In the group data setting step (step 204), data indicating the positional relationship between the paste patterns forming these groups (i.e., group data) is set.

As the group data for the paste patterns P1 to P4, the base patterns BP1 and BP2 in the basic pattern BP as shown in FIG. 6 may be set. As the group data indicating the positional relationship of the base patterns BP1 and BP2, referring to FIG. 6, the tip ends of the base patterns BP1 and BP2 with respect to the origin G0 of the base pattern BP are shown in FIG. Relative to the starting point of application of the paste pattern).

The group data setting step (step 204) inputs and sets data indicating such a relative positional relationship. When this is input, it is set in the RAM of the personal computer main body 20 in the next group data registration step (step 205). 11 is registered in the relative positional relationship table BPRPT as shown in FIG.

Here, in this relative positional relationship table BPRPT, "base data number BD1" shows the base pattern BP1 in the basic data BP of FIG. 6, and its "relative position" (Bx, By) is respectively shown in FIG. The x component and the y component (and thus relative positional relationship) of the distance from the origin G0 to the tip A1 of the base pattern BP1 are shown. Similarly, the "base data number BD2" indicates the base pattern BP2 in the basic data BP of FIG. 6, and the "relative positions" (Bx, By) respectively indicate the base from the origin G0 in FIG. The x component and the y component (hence the relative positional relationship) of the distance to the tip B1 of the pattern BP2 are shown.

The "relative positions" (Bx, By) of the "base data number BD1" are relative to the two paste patterns constituting them for each paste pattern P1, P2, P3, P4 in the real substrate 22 shown in FIG. The positional relationship is shown. That is, such a "relative position" (Bx, By) represents the X component and the y component of the distance between the center position (x1, y1) and the start point of application of the paste pattern 23a for the paste pattern P1. At the same time, for the paste pattern P2, the x component and the y component of the distance between the center positions x2 and y2 and the start point of the application of the paste pattern 23c, and the center positions x3, The x component and the y component of the distance between y3) and the start point of the application of the paste pattern 23e are represented by the distance between the center positions x4 and y4 and the start point of the application of the paste pattern 23g for the paste pattern P4. The x component and the y component of the distance are shown, respectively.

Similarly, the "relative position" (Bx, By) of the "base data number BD2" is the x component of the distance between the center position (x1, y1) and the start point of application of the paste pattern 23b for the paste pattern P1. In addition, the y component is shown, and for the paste pattern P2, the x component and the y component of the distance between the center positions x2 and y2 and the application start point of the paste pattern 23d are added to the paste pattern P3. For the paste pattern P4, the x component and the y component of the distance between the center positions x3 and y3 and the starting point of the application of the paste pattern 23f are shown. For the paste pattern P4, the center positions x4 and y4 and the paste pattern 23h are shown. X component and y component of the distance between the start points of application) are respectively shown.

Whether or not such group data registration has been completed is determined whether registration has been performed for each of the relative position relationship table BPRPT (FIG. 11) base data numbers BD1 and 2, and the registration table shown in FIG. It determines using the data of "the number of base data" of (MDT). In the case of the basic pattern BP shown in Fig. 6, the "base data number" of the registration table MDT is 2, so if two group data are registered in the relative position relationship table BPRPT, it is determined that the registration of the group data has been completed. do. If there is a remaining base pattern for which the group data setting has not been completed, the processes of steps 204 and 205 are repeated for each base pattern in order to set and register the group data for the remaining base pattern.

When the above-mentioned group data registration process ends, it progresses to a pattern data setting process (step 207). This defines the positional relationship of each paste pattern P1, P2, P3, P4 on the real substrate 22, which is the origin of the real substrate 22 and the paste patterns P1, P2, P3, It is expressed by the relative positional relationship with the center position of P4).

The pattern data setting process (step 207) inputs and sets data (called pattern data) representing such a relative positional relationship. When this is input, the personal computer main body 20 is subjected to the next pattern data registration process (step 208). Is registered in the relative positional relationship table MPRPT as shown in FIG.

In this relative position relationship table MPRPT, "pattern numbers P1, P2, P3, and P4" are numbers assigned to the paste patterns P1, P2, P3, and P4 in FIG. Px and Py are the center positions (x1, y1) of the paste patterns P1, P2, P3, and P4 from the origin SBO of the actual substrate shown in FIG. 5, respectively, whose coordinate positions are (0, 0). and x component, y component (and therefore relative positional relationship) of the distances to (x2, y2), (x3, y3), and (x4, y4).

In the next pattern data registration termination step (step 209), whether or not the registration of such pattern data has been completed is determined by the pattern number P1, P2, P3, P4 of the relative position relationship table MPRPT (Fig. 12). It is determined using the data of "pattern number" in the registration item table MDT shown in FIG. 7 which has already been set whether or not data has been registered. In the case of the four paste patterns P1, P2, P3, and P4 that the paste pattern applied to the actual substrate 22 is drawn and plotted in Fig. 5, the "number of patterns" of the registration table MDT is 4, so the relative position relation table When four pattern data are registered in (MPRPT), it is determined that registration of the pattern data is completed. If there are remaining paste patterns for which the pattern data setting has not been completed, the processes of steps 207 and 208 are repeated for each paste pattern in order to set and register the pattern data for the remaining application patterns.

After setting and registering the pattern data for all the paste patterns as described above (step 209), the process proceeds to the next all data text registration process (step 210), and registers each table in the RAM of the personal computer main body 20. The data is stored in a storage medium such as a floppy disk in an external storage device of the personal computer main body 20 as text data which can be edited by an arbitrary text editor in order to reuse these operating conditions for the next operation.

In all data text registration processes (step 210), the vector data table MVDT (FIG. 8), the relative positional relationship table BPRPT (FIG. 11), and the MPRPT (FIG. 12) obtained before storing as text data are thus monitored. (18) (FIG. 1) can be made to confirm their registration. In this case, for example, if the registration contents (e.g., corner dimensions (r), application conditions, etc.) of a predetermined paste pattern are desired to be modified and changed as necessary, the keyboard 19 (FIG. 1) is desired. Corrective changes can be made by inputting data.

In addition, the registered data is displayed on the monitor 18 together with the completion of the registration of the respective data for each of the steps 203, 206, and 209, and the registered contents are required by operating the keyboard 19. You can also make appropriate changes according to your needs.

The paste pattern data obtained as described above can be easily reused as a database, and by modifying the base data, the shape and application conditions of all the paste patterns using the base data can be collectively changed, and only for a specific paste pattern. In the case of making a change, it is easy to change the data of a specific paste pattern by designating and changing the registration name of the base data.

In this way, the operation data is simultaneously stored in the RAM of the personal computer main body 20 and in a separate storage medium, so that the paste pattern data registered in the storage medium regardless of the state (during stopping or operating) of the apparatus main body M can be obtained. It is possible to confirm or change the operation data and to create the next operation data, thereby improving productivity in data creation, remotely editing paste pattern data and managing the operation status of the device body M through a network (not shown). It can also be done.

In addition, the paste pattern data can be created by editing text data registered in a storage medium such as a floppy disk, so that a driver such as a CAD application, a table calculation application, or a database application can be used to edit the data. Ripe application programs can be used to facilitate the creation of data.

3, when the above paste pattern data setting process (step 200) ends, power is supplied to the paste applicator (step 300), and the initial setting is executed (step 400).

In this initial setting step (step 400), by driving the servomotors 8a, 8b, and 10 in Fig. 1, the z-axis movement table 9 is moved in the X and Y directions to position at a predetermined reference position. (13a) (FIG. 2) is set at a predetermined home position so that the paste discharging opening is positioned at the position at which the paste discharge starts to be discharged (i.e., the paste application start point).

Further, the coating data transfer process between the personal computer main body 20 and the apparatus main body M is automatically performed, and the previously set pattern data and the like are set in the RAM in the control unit 17 of the apparatus main body M as operation data. Recording is carried out in a storage medium not shown in the control unit 17.

When the above initial setting step (step 400) is completed, the actual substrate 22 is mounted on the substrate adsorption board 4 (FIG. 1) and held by adsorption (step 500). In this substrate mounting step (step 500), the actual substrate 22 is conveyed to the upper side of the substrate adsorption board 4 in the X-axis direction by the substrate conveying conveyors 2a and 2b (Fig. 1), and the lifting means (not shown) is shown. By lowering these substrate conveyance conveyors 2a and 2b, the real substrate 22 is mounted on the substrate adsorption board 4.

Subsequently, a substrate pre-positioning process (step 600) is performed. In this step, the alignment of the real substrate 22 in the X and Y directions is performed by a positioning chuck not shown in FIG. In addition, the image recognition cameras 16a and 16b photograph the positioning marks of the actual substrate 22 mounted on the substrate adsorption board 4, and the center positions of these positioning marks are obtained by image processing. Is inclined in the θ direction, and the servomotor 24 (FIG. 3) is thus driven to correct the inclination in the θ direction.

Next, the process proceeds to the pattern application step (step 700), and the vector data stored in the RAM of the personal computer main body 20 in the order of the paste patterns in the order of the pattern numbers, for example, the paste patterns P1, P2, P3, and P4. The paste pattern application drawing operation is performed using the data of the table MVDT (FIG. 8), the relative position relationship table BPRPT (FIG. 11), and the relative position relationship table MPRPT (FIG. 12). In this step, the nozzle (at the starting position of the application of the paste patterns 23a to 23h of the paste patterns P1, P2, P3, and P4 is used by using the data of the relative position relation table BPRPT and the relative position relation table MPRPT). The discharge port of 13a) is positioned, and the application height of the nozzle 13a is set from the data of the application conditions of the vector data table MVDT. The setting of the coating height is such that the distance from the discharge port of the nozzle 13a to the surface of the real substrate 22 is the thickness of the paste to be coated.

The application starting positions of the paste patterns 23a to 23h are set by correcting the positional data of the relative positional relationship table BPRPT with the data of the relative positional relationship table MPRPT. For example, the paste pattern 23a on the real substrate 22 is set to (xa1, ya1) as the position coordinates of the starting point A1 of the base pattern BP1 as shown in FIG. 9 (a). Registered as relative position (Bx, By) with respect to the base data number BD1 in the relative positional relationship table BPRPT shown in Fig. 12), and the pattern number P1 in the relative positional relationship table MPRPT shown in Fig. 12. When the relative position data (Px, Py), that is, the origin position with respect to the origin (GBO) of the actual substrate 22 is (x1, y1), the application starting position of the paste pattern 23a on the actual substrate 22 Is

(x1 + xa1, y1 + ya1)

Shall be. However, instead of these relative positional relationship tables BPRPT and relative positional relationship tables MPRPT, such modified data is stored in the RAM of the personal computer main body 20 as a coating start position table, and the paste patterns 23a to 23h are used. May be set based on the data of this coating start position table.

After the above processing is finished, the servomotors 8a, 8b, 10 (FIG. 1) are driven based on the paste pattern data stored in the RAM of the microcomputer 17a (FIG. 2), whereby the nozzle 13a ) Is discharged in the X and Y direction in accordance with the paste pattern data in the state where the paste discharge port is opposed to the actual substrate 22, and the paste discharge container 13 is slightly moved from the positive pressure source 30 (FIG. 2). Air pressure is applied and the paste starts to be discharged from the paste discharge port of the nozzle 13a.

In addition to drawing such a paste pattern, the microcomputer 17a inputs actual measurement data of the distance (application height) of the distance between the paste discharge port of the nozzle 13a and the surface of the real substrate 22 from the rangefinder 14. By measuring the curvature of the surface of 22 and driving the servomotor 12 according to this measurement value, the set height of the nozzle 13a from the surface of the real board | substrate 22 is maintained to be constant, and the application of the paste pattern is drawn out. Is done.

In this way, the drawing drawing of the paste pattern proceeds, but the determination of whether to continue or end the drawing drawing operation of the paste pattern is determined by determining whether the coating point is the end of the paste pattern to be applied, which is determined by the paste pattern data. If not, the process returns to the curvature measurement process on the surface of the real substrate 22 again, and the above steps are repeated until the application of the paste pattern is reached until the paste application operation is continued.

The paste pattern coating operation is performed on all of the n pieces of paste pattern data set. When the end of the paste pattern is reached by the paste pattern data of the last number n, the servo motor 12 is driven to drive the nozzle 13a. ) Is raised, and the paste pattern application process (step 700) is completed.

Next, proceed to the substrate discharge process (step 800). In this process, the adsorption | suction of the real board | substrate 22 to the board | substrate adsorption board 4 is canceled | released, the board | substrate conveying conveyors 2a and 2b are raised, the real board | substrate 22 is moved to this, and it is this state. It is discharged out of the apparatus main body M by the board | substrate conveyance conveyors 2a and 2b.

Then, it is determined whether or not all the above steps have been completed (step 900). When the paste pattern is applied to the plurality of actual substrates using the same paste pattern data, the operation is repeated from the substrate mounting process (step 500) to the separate real substrate 22. Then, when such a series of processing is finished for all the actual substrates 22, all the work ends (step 1000).

In addition, in this embodiment, although the nozzle 13a was movable and the board | substrate 22 was fixed, this invention is not limited to this, The nozzle 22 may be fixed and the board | substrate 22 may be moved.

In this embodiment, the setting of the paste pattern data is made from the base data. However, the storage is stored in an internal storage medium such as a hard disk in the personal computer main body 20 or an external storage medium such as a floppy disk. Calling up the data and performing the production operation based on the registered data, correcting the registered data and re-registering it as new operation data, and performing the production operation using this, the apparatus main body M newly Since it is possible to create or modify the data transmitted as production data, the data creation process is more efficiently processed by reading data from the apparatus body M side and re-registering and reusing the data. Can be completed.

Moreover, when apply | coating with a some nozzle, you may make it possible to perform the same setting for every application | coating nozzle.

In this embodiment, as shown in Fig. 5, the case of coating and drawing four identical shape paste patterns P1 to P4 on the same substrate 22 is exemplified, but a plurality of same shape other than one or four is illustrated. The same applies to the case of coating and drawing the paste pattern.

In addition, in this embodiment, all the paste patterns P1 to P4 to draw are all made into the same shape pattern, but it is not limited to this, A part may form a different shape. For example, in FIG. 5, when the paste patterns P1 to P3 are of the same shape and the paste pattern P4 is a pattern having a different shape from these, the basic patterns (for the paste patterns P1 to P3) are used. The pattern data may be created as described above using BP), and a separate paste pattern may be formed for the paste pattern P4. Also in this case, these pattern data are registered in the vector data table (MVDT) shown in FIG. For example, in Fig. 5, even when the paste patterns P1 and P2 are the same shape patterns, the shapes of the paste patterns P1 and P2 are different from each other, but the paste patterns P3 and P4 are also the same shape patterns. As described above, the pattern data is created and registered in the same vector data table (MVDT).

As described above, according to the present invention, data setting of a desired paste pattern is easy.

Claims (8)

Placing the substrate on the table so as to face the discharge port of the nozzle and changing the relative positional relationship between the substrate and the nozzle in a direction parallel to the main surface of the substrate according to the set pattern data, the paste filled in the paste container is In a paste applicator for coating and drawing a desired paste pattern according to the pattern data on the substrate by discharging onto the substrate from the discharge port of the nozzle, First setting means for setting data defining a basic pattern of the paste pattern to be applied and drawn; Second setting means for setting the data set by said first setting means as pattern data of a plurality of said paste patterns applied and drawn on the same substrate; Third setting means for setting a coating condition for each of the paste patterns to be applied and drawing the coating pattern, and allowing the coating condition to be corrected; Fourth setting means for setting a positional relationship on the substrate of the plurality of paste patterns in which the pattern data is set by the second means, And applying the paste according to the trajectory according to the pattern data on the substrate according to the application conditions to apply the drawing pattern of the plurality of paste patterns in the positional relationship set by the fourth means. The method of claim 1, The basic pattern is composed of a plurality of base patterns, And said first setting means sets data for defining it for each of said base patterns. The method according to claim 1 or 2, And said data set by said first setting means is represented by a coordinate position of a point on said basic pattern or a vector on coordinates of line segments constituting said basic pattern. The method according to claim 1 or 2, The third setting means is a paste condition for setting the relative moving speed between the nozzle and the substrate, the relative distance, and the pressure applied to the paste storage container as application conditions set for each paste pattern to be applied and drawn. Abandonment. The method according to claim 1 or 2, And said third setting means displays a coating condition set for each paste pattern to be applied and drawn on the monitor, and makes it possible to correct the coating condition with data input from a keyboard. The method according to claim 1 or 2, In coating and drawing a plurality of basic patterns having different paste patterns, The first setting means sets data defining the pattern for each of the basic patterns, The second setting means sets the data set for each of the basic patterns as the first setting means as pattern data of a plurality of paste patterns applied and drawn on the same substrate; The third setting means is for setting the application conditions for each of the basic patterns for each of the basic patterns and for modifying the application conditions, And the fourth setting means sets the positional relationship of the paste pattern on the substrate for each of the basic patterns on which pattern data is set by the second means. The method of claim 1, And a plurality of the nozzles, and the first to fourth setting means sets respective data for the paste pattern to be applied and drawn for each nozzle. The method of claim 3, wherein The bent portion of the line segments constituting the basic pattern is connected in a round shape, and the third setting means sets the radius of the roundness as an application condition.