KR20010051105A - 유체 분배 방법 및 장치 - Google Patents
유체 분배 방법 및 장치 Download PDFInfo
- Publication number
- KR20010051105A KR20010051105A KR1020000061355A KR20000061355A KR20010051105A KR 20010051105 A KR20010051105 A KR 20010051105A KR 1020000061355 A KR1020000061355 A KR 1020000061355A KR 20000061355 A KR20000061355 A KR 20000061355A KR 20010051105 A KR20010051105 A KR 20010051105A
- Authority
- KR
- South Korea
- Prior art keywords
- pressure
- pump
- piston
- motor
- pump chamber
- Prior art date
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 97
- 238000000034 method Methods 0.000 title claims abstract description 62
- 239000012528 membrane Substances 0.000 claims abstract description 51
- 238000005086 pumping Methods 0.000 claims abstract description 25
- 238000005096 rolling process Methods 0.000 claims abstract description 12
- 238000009826 distribution Methods 0.000 claims description 41
- 238000012544 monitoring process Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 abstract description 50
- 230000008859 change Effects 0.000 abstract description 8
- 238000012545 processing Methods 0.000 description 36
- 230000006870 function Effects 0.000 description 23
- 238000004519 manufacturing process Methods 0.000 description 19
- 238000006073 displacement reaction Methods 0.000 description 18
- 239000004065 semiconductor Substances 0.000 description 14
- 229920001721 polyimide Polymers 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000004642 Polyimide Substances 0.000 description 9
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000011109 contamination Methods 0.000 description 6
- 238000012937 correction Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000003389 potentiating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000010891 toxic waste Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B7/00—Piston machines or pumps characterised by having positively-driven valving
- F04B7/02—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated
- F04B7/0266—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated the inlet and discharge means being separate members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/03—Pressure in the compression chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/10—Selectively engageable hub to shaft connection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/55—Member ends joined by inserted section
- Y10T403/551—Externally bridged
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
Description
Claims (3)
- 롤링 멤브레인 펌핑 시스템을 활용하여 유체의 정확한 양을 분배하기 위한 방법에 있어서,특정 분배가 제 1 분배 이외의 것이라면 적어도 부분적으로 예측된 멤브레인 가요성에 의거하여 분배를 변화시키기 위한 양을 계산하는 단계를 포함하고, 상기 예측된 멤브레인 가요성은 상기 제 1 분배 중에 적어도 부분적으로 최대 펌프실 압력에 의거하고,특정 분배가 제 1 분배라면 적어도 부분적으로 상기 멤브레인의 형상에 의거하여 분배를 변화시키기 위한 양을 계산하는 단계와,적어도 부분적으로 상기 계산된 양에 의거하여 상기 펌핑 시스템내로 피스톤을 이동시키는 단계와,상기 펌핑 시스템의 출구 밸브를 개방하는 단계와,상기 펌핑 시스템에서 기계적인 오류를 나타내기 위해 상기 펌프실 압력의 감작스러운 감소를 감지하도록 상기 펌프실 압력을 감시하는 단계 및,상기 피스톤의 이동중에 상기 펌프실에서 최대 압력을 결정하는 단계를 또한 포함하는 방법.
- 제 1 항에 있어서, 출구 밸브를 개방하는 단계는 상기 펌프 시스템의 메인 콘트롤러에 의해 실행되는 방법.
- 제 1 항에 있어서, 상기 펌프실내의 최대 압력은 펌프실 압력 센서를 주기적으로 판독하고 상기 펌프실 압력 센서로부터 판독된 압력의 최대값을 기억함으로써 결정되는 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16021999P | 1999-10-18 | 1999-10-18 | |
US60/160,219 | 1999-10-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010051105A true KR20010051105A (ko) | 2001-06-25 |
KR100754342B1 KR100754342B1 (ko) | 2007-09-03 |
Family
ID=22576009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000061355A KR100754342B1 (ko) | 1999-10-18 | 2000-10-18 | 유체 분배 방법 및 장치 |
Country Status (4)
Country | Link |
---|---|
US (2) | US6478547B1 (ko) |
JP (1) | JP3958926B2 (ko) |
KR (1) | KR100754342B1 (ko) |
TW (1) | TW466301B (ko) |
Cited By (3)
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KR100809516B1 (ko) * | 2006-01-23 | 2008-03-04 | 가부시끼가이샤 도시바 | 처리 장치 및 처리 방법 |
US9170246B2 (en) | 2004-10-25 | 2015-10-27 | Entegris, Inc. | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
WO2022245712A1 (en) * | 2021-05-21 | 2022-11-24 | Applied Materials, Inc. | Consistent known volume liquid metal or metal alloy transfer from atmospheric to vacuum chamber |
Families Citing this family (57)
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US8172546B2 (en) * | 1998-11-23 | 2012-05-08 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
US6325932B1 (en) * | 1999-11-30 | 2001-12-04 | Mykrolis Corporation | Apparatus and method for pumping high viscosity fluid |
CA2658772C (en) | 2000-02-29 | 2013-07-30 | Gen-Probe Incorporated | Fluid dispense and liquid surface verification system and method |
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US6857543B2 (en) * | 2001-12-01 | 2005-02-22 | Shipley Company, L.L.C. | Low volume dispense unit and method of using |
DE10161132A1 (de) | 2001-12-12 | 2003-06-26 | Siemens Ag | Membranpumpe mit integriertem Drucksensor |
US7350423B2 (en) * | 2004-01-14 | 2008-04-01 | International Business Machines Corporation | Real time usage monitor and method for detecting entrapped air |
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JP4704710B2 (ja) * | 2004-08-26 | 2011-06-22 | 武蔵エンジニアリング株式会社 | 液体定量吐出装置 |
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CN102143775B (zh) * | 2008-10-22 | 2017-03-08 | 生物技术公司 | 具有用于功能异常检测的集成式压力传感器的微电子机械系统流体阀 |
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-
2000
- 2000-10-18 US US09/691,627 patent/US6478547B1/en not_active Expired - Lifetime
- 2000-10-18 KR KR1020000061355A patent/KR100754342B1/ko active IP Right Grant
- 2000-10-18 JP JP2000318343A patent/JP3958926B2/ja not_active Expired - Lifetime
-
2001
- 2001-01-09 TW TW089121812A patent/TW466301B/zh not_active IP Right Cessation
-
2002
- 2002-11-11 US US10/065,701 patent/US6742993B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US9170246B2 (en) | 2004-10-25 | 2015-10-27 | Entegris, Inc. | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
KR100809516B1 (ko) * | 2006-01-23 | 2008-03-04 | 가부시끼가이샤 도시바 | 처리 장치 및 처리 방법 |
WO2022245712A1 (en) * | 2021-05-21 | 2022-11-24 | Applied Materials, Inc. | Consistent known volume liquid metal or metal alloy transfer from atmospheric to vacuum chamber |
Also Published As
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JP3958926B2 (ja) | 2007-08-15 |
JP2001203196A (ja) | 2001-07-27 |
US20030062382A1 (en) | 2003-04-03 |
US6478547B1 (en) | 2002-11-12 |
US6742993B2 (en) | 2004-06-01 |
KR100754342B1 (ko) | 2007-09-03 |
TW466301B (en) | 2001-12-01 |
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