KR20010032101A - 석영 유리로 제조된 광소자 및 그 제조 방법 - Google Patents

석영 유리로 제조된 광소자 및 그 제조 방법 Download PDF

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Publication number
KR20010032101A
KR20010032101A KR1020007005233A KR20007005233A KR20010032101A KR 20010032101 A KR20010032101 A KR 20010032101A KR 1020007005233 A KR1020007005233 A KR 1020007005233A KR 20007005233 A KR20007005233 A KR 20007005233A KR 20010032101 A KR20010032101 A KR 20010032101A
Authority
KR
South Korea
Prior art keywords
quartz glass
hydrogen
less
molecules
content
Prior art date
Application number
KR1020007005233A
Other languages
English (en)
Korean (ko)
Inventor
우에빙브루노
퀸보도
Original Assignee
게르하르트 빌스마이어
헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
마쯔자끼히로시
신에쯔 세끼에이 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 게르하르트 빌스마이어, 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지, 마쯔자끼히로시, 신에쯔 세끼에이 가부시키가이샤 filed Critical 게르하르트 빌스마이어
Publication of KR20010032101A publication Critical patent/KR20010032101A/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C4/00—Compositions for glass with special properties
    • C03C4/0085—Compositions for glass with special properties for UV-transmitting glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/21—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with molecular hydrogen
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/21—Doped silica-based glasses containing non-metals other than boron or halide containing molecular hydrogen
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/23—Doped silica-based glasses containing non-metals other than boron or halide containing hydroxyl groups
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/40—Gas-phase processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
KR1020007005233A 1998-09-14 1999-05-14 석영 유리로 제조된 광소자 및 그 제조 방법 KR20010032101A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19841932A DE19841932A1 (de) 1998-09-14 1998-09-14 Optisches Bauteil aus Quarzglas und Verfahren für seine Herstellung
DE19841932.5 1998-09-14
PCT/EP1999/003342 WO2000015570A1 (de) 1998-09-14 1999-05-14 Optisches bauteil aus quarzglas und verfahren für seine herstellung

Publications (1)

Publication Number Publication Date
KR20010032101A true KR20010032101A (ko) 2001-04-16

Family

ID=7880849

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007005233A KR20010032101A (ko) 1998-09-14 1999-05-14 석영 유리로 제조된 광소자 및 그 제조 방법

Country Status (5)

Country Link
EP (1) EP1049654A1 (de)
JP (1) JP2002524382A (de)
KR (1) KR20010032101A (de)
DE (1) DE19841932A1 (de)
WO (1) WO2000015570A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140007761A (ko) * 2012-07-10 2014-01-20 신에쓰 가가꾸 고교 가부시끼가이샤 나노임프린트 몰드용 합성 석영 유리 및 그의 제조 방법

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19850736C2 (de) 1998-11-04 2003-04-17 Heraeus Tenevo Ag Kernglas für eine Vorform für eine optische Faser, unter Verwendung des Kernglases hergestellte Vorform, sowie Verfahren zur Herstellung des Kernglases einer Vorform für eine optische Faser
DE10142893B4 (de) * 2001-09-03 2005-07-07 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zum Tempern eines Rohlings für ein optisches Bauteil aus Quarzglas
US7534733B2 (en) 2004-02-23 2009-05-19 Corning Incorporated Synthetic silica glass optical material having high resistance to laser induced damage
DE102004015766B4 (de) * 2004-03-23 2016-05-12 Asahi Glass Co., Ltd. Verwendung eines SiO2-TiO2-Glases als strahlungsresistentes Substrat
DE102004024808B4 (de) 2004-05-17 2006-11-09 Heraeus Quarzglas Gmbh & Co. Kg Quarzglasrohling für ein optisches Bauteil zur Übertragung extrem kurzwelliger ultravioletter Strahlung
EP1866257A1 (de) * 2005-03-29 2007-12-19 Asahi Glass Company, Limited Quarzartiges glas und zugehöriges herstellungsverfahren
DE102010052685A1 (de) 2010-11-26 2012-05-31 J-Fiber Gmbh Verfahren zur Herstellung von strahlungsresistentem Quarzglasmaterial und danach hergestellte Quarzglaskörper
DE102013215292A1 (de) 2013-08-02 2015-02-05 Carl Zeiss Smt Gmbh Verfahren zum Beladen eines Rohlings aus Quarzglas mit Wasserstoff, Linsenelement und Projektionsobjektiv

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8905966D0 (en) * 1989-03-15 1989-04-26 Tsl Group Plc Improved vitreous silica products
EP0401845B2 (de) * 1989-06-09 2001-04-11 Heraeus Quarzglas GmbH & Co. KG Optische Teile und Rohlinge aus synthetischem Siliziumdioxidglas und Verfahren zu ihrer Herstellung
JP2588447B2 (ja) * 1991-06-29 1997-03-05 信越石英株式会社 エキシマレーザー用石英ガラス部材の製造方法
JP2784708B2 (ja) * 1992-12-28 1998-08-06 信越石英株式会社 エキシマレーザー用光学石英ガラス部材及びその製造方法
JP3705501B2 (ja) * 1994-08-03 2005-10-12 信越化学工業株式会社 エキシマレーザ光学素材用合成石英ガラス部材の製造方法
US5707908A (en) * 1995-01-06 1998-01-13 Nikon Corporation Silica glass
EP0780345A1 (de) * 1995-12-22 1997-06-25 Corning Incorporated Optisches Element für UV-Transmission
JP2980094B2 (ja) * 1997-05-16 1999-11-22 住友電気工業株式会社 石英ガラス物品及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140007761A (ko) * 2012-07-10 2014-01-20 신에쓰 가가꾸 고교 가부시끼가이샤 나노임프린트 몰드용 합성 석영 유리 및 그의 제조 방법

Also Published As

Publication number Publication date
EP1049654A1 (de) 2000-11-08
JP2002524382A (ja) 2002-08-06
WO2000015570A1 (de) 2000-03-23
DE19841932A1 (de) 2000-03-16

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E902 Notification of reason for refusal
E601 Decision to refuse application