KR20000076724A - 웨이퍼 수납 캐리어 및 웨이퍼 반송 장치 및 웨이퍼 반송방법 - Google Patents

웨이퍼 수납 캐리어 및 웨이퍼 반송 장치 및 웨이퍼 반송방법 Download PDF

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Publication number
KR20000076724A
KR20000076724A KR1020000009116A KR20000009116A KR20000076724A KR 20000076724 A KR20000076724 A KR 20000076724A KR 1020000009116 A KR1020000009116 A KR 1020000009116A KR 20000009116 A KR20000009116 A KR 20000009116A KR 20000076724 A KR20000076724 A KR 20000076724A
Authority
KR
South Korea
Prior art keywords
wafer
carrier
support part
support
supporting
Prior art date
Application number
KR1020000009116A
Other languages
English (en)
Korean (ko)
Inventor
오까모또다다히로
Original Assignee
아끼구사 나오유끼
후지쯔 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아끼구사 나오유끼, 후지쯔 가부시끼가이샤 filed Critical 아끼구사 나오유끼
Publication of KR20000076724A publication Critical patent/KR20000076724A/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
KR1020000009116A 1999-05-17 2000-02-24 웨이퍼 수납 캐리어 및 웨이퍼 반송 장치 및 웨이퍼 반송방법 KR20000076724A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP99-135955 1999-05-17
JP11135955A JP2000332097A (ja) 1999-05-17 1999-05-17 ウェーハ収納キャリア及びウェーハ搬送装置及びウェーハ搬送方法

Publications (1)

Publication Number Publication Date
KR20000076724A true KR20000076724A (ko) 2000-12-26

Family

ID=15163758

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000009116A KR20000076724A (ko) 1999-05-17 2000-02-24 웨이퍼 수납 캐리어 및 웨이퍼 반송 장치 및 웨이퍼 반송방법

Country Status (3)

Country Link
JP (1) JP2000332097A (zh)
KR (1) KR20000076724A (zh)
TW (1) TW475233B (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4330761B2 (ja) 2000-04-17 2009-09-16 信越ポリマー株式会社 ウェーハ輸送容器のサポート具
KR100946442B1 (ko) * 2002-10-10 2010-03-10 하이디스 테크놀로지 주식회사 기판 적재용 카세트
JP4543959B2 (ja) * 2005-02-22 2010-09-15 凸版印刷株式会社 カラーフイルタ基板用収納カセット
JP4680657B2 (ja) * 2005-04-08 2011-05-11 株式会社アルバック 基板搬送システム
JP4895635B2 (ja) * 2006-02-20 2012-03-14 セイコーインスツル株式会社 搬送装置
JP5473691B2 (ja) * 2010-03-16 2014-04-16 株式会社ディスコ 収容カセット
JP5663260B2 (ja) * 2010-10-13 2015-02-04 ラピスセミコンダクタ株式会社 基板の撓み補正装置および基板の取り出し方法
TWI549881B (zh) * 2014-11-14 2016-09-21 Chung King Entpr Co Ltd Substrate storage container and its manufacturing method
NL2022185B1 (nl) * 2018-12-12 2020-07-02 Suss Microtec Lithography Gmbh Substratkassette
JP7349784B2 (ja) * 2018-12-26 2023-09-25 東京エレクトロン株式会社 基板処理システム、および基板処理方法
CN114438600A (zh) * 2020-11-06 2022-05-06 长鑫存储技术有限公司 晶舟结构和具有其的晶舟组件和扩散炉
KR102446066B1 (ko) * 2021-04-22 2022-09-23 주식회사 삼에스코리아 패널 수납용기에 설치되는 트레이

Also Published As

Publication number Publication date
JP2000332097A (ja) 2000-11-30
TW475233B (en) 2002-02-01

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