KR102962880B1 - 유기 장치 패터닝을 위한 삼층 포토레지스트 시스템 및 방법 - Google Patents
유기 장치 패터닝을 위한 삼층 포토레지스트 시스템 및 방법Info
- Publication number
- KR102962880B1 KR102962880B1 KR1020247004118A KR20247004118A KR102962880B1 KR 102962880 B1 KR102962880 B1 KR 102962880B1 KR 1020247004118 A KR1020247004118 A KR 1020247004118A KR 20247004118 A KR20247004118 A KR 20247004118A KR 102962880 B1 KR102962880 B1 KR 102962880B1
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- organic
- etching
- substrate
- base layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/12—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising dopants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/15—Hole transporting layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/16—Electron transporting layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
- H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163217776P | 2021-07-02 | 2021-07-02 | |
| US63/217,776 | 2021-07-02 | ||
| PCT/CA2022/051053 WO2023272400A1 (en) | 2021-07-02 | 2022-06-30 | Trilayer photoresist system and method for patterning organic devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20240027834A KR20240027834A (ko) | 2024-03-04 |
| KR102962880B1 true KR102962880B1 (ko) | 2026-05-08 |
Family
ID=84689780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020247004118A Active KR102962880B1 (ko) | 2021-07-02 | 2022-06-30 | 유기 장치 패터닝을 위한 삼층 포토레지스트 시스템 및 방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12310165B2 (enExample) |
| JP (1) | JP7790752B2 (enExample) |
| KR (1) | KR102962880B1 (enExample) |
| CN (1) | CN117917209A (enExample) |
| CA (1) | CA3222923A1 (enExample) |
| WO (1) | WO2023272400A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026072534A1 (en) * | 2024-09-24 | 2026-04-02 | Nani Lithography Inc. | Lithography mask methods and composition |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011003842A (ja) | 2009-06-22 | 2011-01-06 | Sony Corp | 薄膜トランジスタおよびその製造方法 |
| US20190173046A1 (en) | 2017-12-01 | 2019-06-06 | Samsung Display Co., Ltd. | Organic light-emitting apparatus and method of manufacturing the same |
| US10431743B2 (en) | 2017-10-30 | 2019-10-01 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Manufacturing method of an OLED anode and an OLED display device thereof |
| US10930875B2 (en) | 2016-08-12 | 2021-02-23 | Samsung Display Co., Ltd. | Organic light-emitting display apparatus and method of manufacturing the same |
| US20220052305A1 (en) | 2016-02-02 | 2022-02-17 | Samsung Display Co., Ltd. | Organic light-emitting apparatus and method of manufacturing the same |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732841A (en) | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
| TW439118B (en) | 2000-02-10 | 2001-06-07 | Winbond Electronics Corp | Multilayer thin photoresist process |
| US7435671B2 (en) | 2006-08-18 | 2008-10-14 | International Business Machines Corporation | Trilayer resist scheme for gate etching applications |
| US9899636B2 (en) | 2014-08-01 | 2018-02-20 | Orthogonal, Inc. | Photolithographic patterning of organic electronic devices |
| JP6712188B2 (ja) | 2015-07-13 | 2020-06-17 | 信越化学工業株式会社 | レジスト下層膜形成用組成物及びこれを用いたパターン形成方法 |
| KR102490889B1 (ko) | 2016-02-29 | 2023-01-25 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| KR102775869B1 (ko) * | 2017-01-03 | 2025-03-05 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| US10049876B1 (en) | 2017-02-13 | 2018-08-14 | International Business Machines Corporation | Removal of trilayer resist without damage to underlying structure |
| KR102278608B1 (ko) * | 2017-03-10 | 2021-07-19 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| KR102614588B1 (ko) * | 2018-08-20 | 2023-12-18 | 삼성디스플레이 주식회사 | 표시 장치의 제조 방법 |
| US20200243791A1 (en) | 2019-01-24 | 2020-07-30 | Avalon Holographics Inc. | Capping layer process with low temperature photoresist patterning |
-
2022
- 2022-06-30 KR KR1020247004118A patent/KR102962880B1/ko active Active
- 2022-06-30 WO PCT/CA2022/051053 patent/WO2023272400A1/en not_active Ceased
- 2022-06-30 CA CA3222923A patent/CA3222923A1/en active Pending
- 2022-06-30 JP JP2023575951A patent/JP7790752B2/ja active Active
- 2022-06-30 CN CN202280047383.0A patent/CN117917209A/zh active Pending
- 2022-06-30 US US17/810,240 patent/US12310165B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011003842A (ja) | 2009-06-22 | 2011-01-06 | Sony Corp | 薄膜トランジスタおよびその製造方法 |
| US20220052305A1 (en) | 2016-02-02 | 2022-02-17 | Samsung Display Co., Ltd. | Organic light-emitting apparatus and method of manufacturing the same |
| US10930875B2 (en) | 2016-08-12 | 2021-02-23 | Samsung Display Co., Ltd. | Organic light-emitting display apparatus and method of manufacturing the same |
| US10431743B2 (en) | 2017-10-30 | 2019-10-01 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Manufacturing method of an OLED anode and an OLED display device thereof |
| US20190173046A1 (en) | 2017-12-01 | 2019-06-06 | Samsung Display Co., Ltd. | Organic light-emitting apparatus and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| US12310165B2 (en) | 2025-05-20 |
| US20230006165A1 (en) | 2023-01-05 |
| JP2024527246A (ja) | 2024-07-24 |
| KR20240027834A (ko) | 2024-03-04 |
| CN117917209A (zh) | 2024-04-19 |
| WO2023272400A1 (en) | 2023-01-05 |
| JP7790752B2 (ja) | 2025-12-23 |
| CA3222923A1 (en) | 2023-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1653628B (zh) | 有机光电子和电子器件的制备方法以及由此获得的器件 | |
| US9231211B2 (en) | Method for forming a multicolor OLED device | |
| CN105742495B (zh) | 制造高分辨率有机薄膜图案的方法 | |
| KR100919353B1 (ko) | 유기 ｅｌ 소자 및 그 제조 방법 | |
| US20130084531A1 (en) | Method of producing organic electroluminescence display device | |
| Lee et al. | Nondestructive direct photolithography for patterning quantum dot films by atomic layer deposition of ZnO | |
| US20060116001A1 (en) | Patterning method | |
| KR20180017163A (ko) | 플루오로폴리머 뱅크 구조들을 갖는 유기 전자 디바이스들 | |
| US20140329354A1 (en) | Process for imprint patterning materials in thin-film devices | |
| JP2015057772A (ja) | 疎水性バンク | |
| KR20140019341A (ko) | 박막 장치에서 재료를 패터닝하는 공정 | |
| CN100385704C (zh) | 结构化电极的制造方法 | |
| US20200243791A1 (en) | Capping layer process with low temperature photoresist patterning | |
| US6221563B1 (en) | Method of making an organic electroluminescent device | |
| JP7790752B2 (ja) | 有機デバイスをパターニングするための三層感光システム及び方法 | |
| JP2015043319A (ja) | フィルムプロファイル | |
| KR102461906B1 (ko) | 고해상도를 갖는 유기발광디스플레이용 플렉시블 포토-패턴 마스크 및 이의 제조방법 | |
| TW567736B (en) | Method of manufacturing electroluminescent device | |
| KR20230112668A (ko) | Oled 광 추출을 위한 리소그래피에 의한 선택적 필러 패터닝 | |
| KR102626607B1 (ko) | 유기층의 미세 패턴화 방법 및 그 방법으로 형성된 디스플레이용 rgb 픽셀 구조체 | |
| WO2022190194A1 (ja) | Ｅｌ素子の製造方法、およびｅｌ素子 | |
| HK1073531B (en) | Method of preparation of organic optoelectronic and electronic devices and devices thereby obtained |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| E13-X000 | Pre-grant limitation requested |
St.27 status event code: A-2-3-E10-E13-lim-X000 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| PA0302 | Request for accelerated examination |
St.27 status event code: A-1-2-D10-D16-exm-PA0302 |
|
| D21 | Rejection of application intended |
Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D21-EXM-PE0902 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| R18 | Changes to party contact information recorded |
Free format text: ST27 STATUS EVENT CODE: A-3-3-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-3-3-R10-R18-oth-X000 |
|
| P11 | Amendment of application requested |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| D22 | Grant of ip right intended |
Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D22-EXM-PE0701 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| F11 | Ip right granted following substantive examination |
Free format text: ST27 STATUS EVENT CODE: A-2-4-F10-F11-EXM-PR0701 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U12-oth-PR1002 Fee payment year number: 1 |
|
| U12 | Designation fee paid |
Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U12-OTH-PR1002 (AS PROVIDED BY THE NATIONAL OFFICE) Year of fee payment: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| Q13 | Ip right document published |
Free format text: ST27 STATUS EVENT CODE: A-4-4-Q10-Q13-NAP-PG1601 (AS PROVIDED BY THE NATIONAL OFFICE) |