CA3222923A1 - Trilayer photoresist system and method for patterning organic devices - Google Patents
Trilayer photoresist system and method for patterning organic devicesInfo
- Publication number
- CA3222923A1 CA3222923A1 CA3222923A CA3222923A CA3222923A1 CA 3222923 A1 CA3222923 A1 CA 3222923A1 CA 3222923 A CA3222923 A CA 3222923A CA 3222923 A CA3222923 A CA 3222923A CA 3222923 A1 CA3222923 A1 CA 3222923A1
- Authority
- CA
- Canada
- Prior art keywords
- layer
- organic
- positive
- etching
- base layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
- H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/12—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising dopants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/15—Hole transporting layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/16—Electron transporting layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163217776P | 2021-07-02 | 2021-07-02 | |
| US63/217,776 | 2021-07-02 | ||
| PCT/CA2022/051053 WO2023272400A1 (en) | 2021-07-02 | 2022-06-30 | Trilayer photoresist system and method for patterning organic devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA3222923A1 true CA3222923A1 (en) | 2023-01-05 |
Family
ID=84689780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3222923A Pending CA3222923A1 (en) | 2021-07-02 | 2022-06-30 | Trilayer photoresist system and method for patterning organic devices |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12310165B2 (enExample) |
| JP (1) | JP7790752B2 (enExample) |
| KR (1) | KR102962880B1 (enExample) |
| CN (1) | CN117917209A (enExample) |
| CA (1) | CA3222923A1 (enExample) |
| WO (1) | WO2023272400A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026072534A1 (en) * | 2024-09-24 | 2026-04-02 | Nani Lithography Inc. | Lithography mask methods and composition |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732841A (en) | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
| TW439118B (en) | 2000-02-10 | 2001-06-07 | Winbond Electronics Corp | Multilayer thin photoresist process |
| US7435671B2 (en) | 2006-08-18 | 2008-10-14 | International Business Machines Corporation | Trilayer resist scheme for gate etching applications |
| JP5477547B2 (ja) | 2009-06-22 | 2014-04-23 | ソニー株式会社 | 薄膜トランジスタの製造方法 |
| US9899636B2 (en) | 2014-08-01 | 2018-02-20 | Orthogonal, Inc. | Photolithographic patterning of organic electronic devices |
| JP6712188B2 (ja) | 2015-07-13 | 2020-06-17 | 信越化学工業株式会社 | レジスト下層膜形成用組成物及びこれを用いたパターン形成方法 |
| US10243175B2 (en) | 2016-02-02 | 2019-03-26 | Samsung Display Co., Ltd. | Organic light-emitting apparatus fabricated using a fluoropolymer and method of manufacturing the same |
| KR102490889B1 (ko) | 2016-02-29 | 2023-01-25 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| KR102602193B1 (ko) | 2016-08-12 | 2023-11-15 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| KR102775869B1 (ko) * | 2017-01-03 | 2025-03-05 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| US10049876B1 (en) | 2017-02-13 | 2018-08-14 | International Business Machines Corporation | Removal of trilayer resist without damage to underlying structure |
| KR102278608B1 (ko) * | 2017-03-10 | 2021-07-19 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| CN107863451B (zh) | 2017-10-30 | 2019-06-25 | 武汉华星光电技术有限公司 | 一种oled阳极的制备方法及oled显示装置的制备方法 |
| KR102421575B1 (ko) | 2017-12-01 | 2022-07-18 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
| KR102614588B1 (ko) * | 2018-08-20 | 2023-12-18 | 삼성디스플레이 주식회사 | 표시 장치의 제조 방법 |
| US20200243791A1 (en) | 2019-01-24 | 2020-07-30 | Avalon Holographics Inc. | Capping layer process with low temperature photoresist patterning |
-
2022
- 2022-06-30 KR KR1020247004118A patent/KR102962880B1/ko active Active
- 2022-06-30 WO PCT/CA2022/051053 patent/WO2023272400A1/en not_active Ceased
- 2022-06-30 CA CA3222923A patent/CA3222923A1/en active Pending
- 2022-06-30 JP JP2023575951A patent/JP7790752B2/ja active Active
- 2022-06-30 CN CN202280047383.0A patent/CN117917209A/zh active Pending
- 2022-06-30 US US17/810,240 patent/US12310165B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US12310165B2 (en) | 2025-05-20 |
| US20230006165A1 (en) | 2023-01-05 |
| JP2024527246A (ja) | 2024-07-24 |
| KR20240027834A (ko) | 2024-03-04 |
| CN117917209A (zh) | 2024-04-19 |
| WO2023272400A1 (en) | 2023-01-05 |
| KR102962880B1 (ko) | 2026-05-08 |
| JP7790752B2 (ja) | 2025-12-23 |
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