KR102803067B1 - 시료상 관찰 장치 및 방법 - Google Patents

시료상 관찰 장치 및 방법 Download PDF

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Publication number
KR102803067B1
KR102803067B1 KR1020237040026A KR20237040026A KR102803067B1 KR 102803067 B1 KR102803067 B1 KR 102803067B1 KR 1020237040026 A KR1020237040026 A KR 1020237040026A KR 20237040026 A KR20237040026 A KR 20237040026A KR 102803067 B1 KR102803067 B1 KR 102803067B1
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South Korea
Prior art keywords
sample
observation
image
irradiation
electron beam
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English (en)
Korean (ko)
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KR20230174258A (ko
Inventor
유따 이마이
다이스께 비젠
준이찌 가따네
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주식회사 히타치하이테크
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H01L22/12—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR1020237040026A 2021-06-04 2021-06-04 시료상 관찰 장치 및 방법 Active KR102803067B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/021390 WO2022254698A1 (ja) 2021-06-04 2021-06-04 試料像観察装置及び方法

Publications (2)

Publication Number Publication Date
KR20230174258A KR20230174258A (ko) 2023-12-27
KR102803067B1 true KR102803067B1 (ko) 2025-05-07

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ID=84322980

Family Applications (1)

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KR1020237040026A Active KR102803067B1 (ko) 2021-06-04 2021-06-04 시료상 관찰 장치 및 방법

Country Status (5)

Country Link
US (1) US20240222065A1 (https=)
JP (1) JP7502563B2 (https=)
KR (1) KR102803067B1 (https=)
TW (1) TWI836437B (https=)
WO (1) WO2022254698A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011016208A1 (ja) 2009-08-07 2011-02-10 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及び試料観察方法
JP2019525408A (ja) 2016-07-19 2019-09-05 バテル メモリアル インスティチュート 分析機器用のまばらなサンプリング方法およびプローブシステム
JP2021085776A (ja) 2019-11-28 2021-06-03 三菱重工業株式会社 開口合成処理装置、開口合成処理方法、及びそのプログラム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63100362A (ja) * 1986-06-27 1988-05-02 Jeol Ltd 材料検査方法
TWI661265B (zh) * 2014-03-10 2019-06-01 美商Ｄ２Ｓ公司 使用多重射束帶電粒子束微影術於表面上形成圖案之方法
NL2013411B1 (en) * 2014-09-04 2016-09-27 Univ Delft Tech Multi electron beam inspection apparatus.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011016208A1 (ja) 2009-08-07 2011-02-10 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡及び試料観察方法
JP2019525408A (ja) 2016-07-19 2019-09-05 バテル メモリアル インスティチュート 分析機器用のまばらなサンプリング方法およびプローブシステム
JP2021085776A (ja) 2019-11-28 2021-06-03 三菱重工業株式会社 開口合成処理装置、開口合成処理方法、及びそのプログラム

Also Published As

Publication number Publication date
JPWO2022254698A1 (https=) 2022-12-08
JP7502563B2 (ja) 2024-06-18
WO2022254698A1 (ja) 2022-12-08
TWI836437B (zh) 2024-03-21
KR20230174258A (ko) 2023-12-27
US20240222065A1 (en) 2024-07-04
TW202249054A (zh) 2022-12-16

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