JPWO2022254698A1 - - Google Patents
Info
- Publication number
- JPWO2022254698A1 JPWO2022254698A1 JP2023525317A JP2023525317A JPWO2022254698A1 JP WO2022254698 A1 JPWO2022254698 A1 JP WO2022254698A1 JP 2023525317 A JP2023525317 A JP 2023525317A JP 2023525317 A JP2023525317 A JP 2023525317A JP WO2022254698 A1 JPWO2022254698 A1 JP WO2022254698A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/222—Image processing arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
- H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
- H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/021390 WO2022254698A1 (ja) | 2021-06-04 | 2021-06-04 | 試料像観察装置及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022254698A1 true JPWO2022254698A1 (https=) | 2022-12-08 |
| JP7502563B2 JP7502563B2 (ja) | 2024-06-18 |
Family
ID=84322980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023525317A Active JP7502563B2 (ja) | 2021-06-04 | 2021-06-04 | 試料像観察装置及び方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240222065A1 (https=) |
| JP (1) | JP7502563B2 (https=) |
| KR (1) | KR102803067B1 (https=) |
| TW (1) | TWI836437B (https=) |
| WO (1) | WO2022254698A1 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63100362A (ja) * | 1986-06-27 | 1988-05-02 | Jeol Ltd | 材料検査方法 |
| WO2011016208A1 (ja) * | 2009-08-07 | 2011-02-10 | 株式会社日立ハイテクノロジーズ | 走査型電子顕微鏡及び試料観察方法 |
| JP2019525408A (ja) * | 2016-07-19 | 2019-09-05 | バテル メモリアル インスティチュート | 分析機器用のまばらなサンプリング方法およびプローブシステム |
| JP2021085776A (ja) * | 2019-11-28 | 2021-06-03 | 三菱重工業株式会社 | 開口合成処理装置、開口合成処理方法、及びそのプログラム |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI661265B (zh) * | 2014-03-10 | 2019-06-01 | 美商Ｄ２Ｓ公司 | 使用多重射束帶電粒子束微影術於表面上形成圖案之方法 |
| NL2013411B1 (en) * | 2014-09-04 | 2016-09-27 | Univ Delft Tech | Multi electron beam inspection apparatus. |
-
2021
- 2021-06-04 KR KR1020237040026A patent/KR102803067B1/ko active Active
- 2021-06-04 JP JP2023525317A patent/JP7502563B2/ja active Active
- 2021-06-04 WO PCT/JP2021/021390 patent/WO2022254698A1/ja not_active Ceased
- 2021-06-04 US US18/556,927 patent/US20240222065A1/en active Pending
-
2022
- 2022-05-20 TW TW111118906A patent/TWI836437B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63100362A (ja) * | 1986-06-27 | 1988-05-02 | Jeol Ltd | 材料検査方法 |
| WO2011016208A1 (ja) * | 2009-08-07 | 2011-02-10 | 株式会社日立ハイテクノロジーズ | 走査型電子顕微鏡及び試料観察方法 |
| JP2019525408A (ja) * | 2016-07-19 | 2019-09-05 | バテル メモリアル インスティチュート | 分析機器用のまばらなサンプリング方法およびプローブシステム |
| JP2021085776A (ja) * | 2019-11-28 | 2021-06-03 | 三菱重工業株式会社 | 開口合成処理装置、開口合成処理方法、及びそのプログラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7502563B2 (ja) | 2024-06-18 |
| WO2022254698A1 (ja) | 2022-12-08 |
| TWI836437B (zh) | 2024-03-21 |
| KR20230174258A (ko) | 2023-12-27 |
| US20240222065A1 (en) | 2024-07-04 |
| KR102803067B1 (ko) | 2025-05-07 |
| TW202249054A (zh) | 2022-12-16 |
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