KR102697708B1 - 인코더 장치 - Google Patents

인코더 장치 Download PDF

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Publication number
KR102697708B1
KR102697708B1 KR1020187009887A KR20187009887A KR102697708B1 KR 102697708 B1 KR102697708 B1 KR 102697708B1 KR 1020187009887 A KR1020187009887 A KR 1020187009887A KR 20187009887 A KR20187009887 A KR 20187009887A KR 102697708 B1 KR102697708 B1 KR 102697708B1
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KR
South Korea
Prior art keywords
sensor
scale
encoder device
read head
output
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KR1020187009887A
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English (en)
Korean (ko)
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KR20180052676A (ko
Inventor
제이슨 슬랙
리차드 제임스 베일
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레니쇼우 피엘씨
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G01D5/34723—Scale reading or illumination devices involving light-guides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2448—Correction of gain, threshold, offset or phase control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
KR1020187009887A 2015-09-09 2016-09-08 인코더 장치 Active KR102697708B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15184459.4 2015-09-09
EP15184459 2015-09-09
PCT/GB2016/052781 WO2017042570A1 (en) 2015-09-09 2016-09-08 Encoder apparatus

Publications (2)

Publication Number Publication Date
KR20180052676A KR20180052676A (ko) 2018-05-18
KR102697708B1 true KR102697708B1 (ko) 2024-08-21

Family

ID=54072747

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187009887A Active KR102697708B1 (ko) 2015-09-09 2016-09-08 인코더 장치

Country Status (7)

Country Link
US (1) US10670431B2 (cg-RX-API-DMAC7.html)
EP (1) EP3347681B1 (cg-RX-API-DMAC7.html)
JP (1) JP6987045B2 (cg-RX-API-DMAC7.html)
KR (1) KR102697708B1 (cg-RX-API-DMAC7.html)
CN (1) CN108351229B (cg-RX-API-DMAC7.html)
ES (1) ES2830777T3 (cg-RX-API-DMAC7.html)
WO (1) WO2017042570A1 (cg-RX-API-DMAC7.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10274344B2 (en) * 2016-12-27 2019-04-30 Mitutoyo Corporation Displacement encoder
CN108390698B (zh) * 2018-03-16 2021-08-10 贵州电网有限责任公司 一种基于插值fft算法的电力线载波参数测量方法
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
JP7148337B2 (ja) * 2018-09-14 2022-10-05 キヤノン株式会社 位置検出装置、リソグラフィ装置、力覚センサ及び力覚センサを有する装置
EP3663723A1 (en) * 2018-12-04 2020-06-10 Renishaw PLC Encoder apparatus
CN113074619B (zh) * 2021-03-18 2022-11-25 浙江禾川科技股份有限公司 传感器安装位置确定方法、装置、设备及存储介质
US20240369385A1 (en) 2021-08-12 2024-11-07 Renishaw Plc Position encoder apparatus
EP4134633A1 (en) 2021-08-12 2023-02-15 Renishaw PLC Position encoder apparatus
WO2024134154A1 (en) 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus
EP4390328A1 (en) 2022-12-21 2024-06-26 Renishaw plc Encoder apparatus
EP4390325A1 (en) 2022-12-20 2024-06-26 Renishaw PLC Encoder apparatus
CN115931015B (zh) * 2023-01-16 2025-08-12 传周半导体科技(上海)有限公司 一种光学编码器的像素单元设计方法
EP4435385A1 (en) * 2023-03-20 2024-09-25 Renishaw PLC Position encoder apparatus
DE102023208964A1 (de) * 2023-09-15 2025-03-20 Dr. Johannes Heidenhain Gmbh Positionsmesssystem

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005526951A (ja) 2001-08-30 2005-09-08 ジーエスアイ・ルモニックス・コーポレーション 基準点タルボットエンコーダ
JP2012519296A (ja) 2009-03-02 2012-08-23 アールエルエス メリルナ テニカ ディー．オー．オー． ポジションエンコーダ装置
JP2012519297A (ja) 2009-03-02 2012-08-23 アールエルエス メリルナ テニカ ディー．オー．オー． エンコーダ読取りヘッド
JP2012168177A (ja) 2011-02-15 2012-09-06 Avago Technologies Ecbu Ip (Singapore) Pte Ltd 単一の光トラックを用いる３チャネルエンコーダ
JP2012220460A (ja) 2011-04-14 2012-11-12 Canon Inc エンコーダ
JP2014163886A (ja) 2013-02-27 2014-09-08 Canon Inc アブソリュートエンコーダ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1227941A (cg-RX-API-DMAC7.html) 1967-03-16 1971-04-15
DE1921507C2 (de) 1969-04-26 1971-02-11 Zeiss Carl Fa Einrichtung zur Erzeugung phasenverschobener elektrischer Signale
DE1941731C2 (de) 1969-08-16 1973-11-15 Fa. Carl Zeiss, 7920 Heidenheim Einrichtung zur Messung von Lageande rungen zweier relativ zueinander bewegli eher Teile
DE3239108A1 (de) 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
DE3616144A1 (de) 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
JPS63503564A (ja) 1986-06-21 1988-12-22 レニショウ パブリック リミテッド カンパニー 補間装置
GB9424969D0 (en) 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
US5708756A (en) 1995-02-24 1998-01-13 Industrial Technology Research Institute Low delay, middle bit rate speech coder
WO2003021197A1 (en) 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
US7394061B2 (en) * 2005-08-31 2008-07-01 Avago Technologies Ecbu Pte Ltd Optical encoder with integrated index channel
JP2008014806A (ja) 2006-07-06 2008-01-24 Sharp Corp 光電式エンコーダおよびそれを用いた変位検出装置
GB0621487D0 (en) 2006-10-28 2006-12-06 Renishaw Plc Opto-electronic read head
GB0909724D0 (en) 2009-06-05 2009-07-22 Renishaw Plc Position measurement encoder and method of operation
JP5616741B2 (ja) 2010-10-08 2014-10-29 株式会社ミツトヨ エンコーダ
CN102564462B (zh) * 2011-12-27 2014-05-07 华中科技大学 一种正余弦编码器的误差补偿装置
US8835832B2 (en) * 2012-01-17 2014-09-16 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical encoder with signal offset correction system
EP3052897B1 (en) 2013-10-01 2019-07-17 Renishaw PLC Measurement encoder
JP5877212B2 (ja) 2014-01-10 2016-03-02 キヤノンプレシジョン株式会社 エンコーダ、エンコーダを用いた装置およびエンコーダ演算プログラム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005526951A (ja) 2001-08-30 2005-09-08 ジーエスアイ・ルモニックス・コーポレーション 基準点タルボットエンコーダ
JP2012519296A (ja) 2009-03-02 2012-08-23 アールエルエス メリルナ テニカ ディー．オー．オー． ポジションエンコーダ装置
JP2012519297A (ja) 2009-03-02 2012-08-23 アールエルエス メリルナ テニカ ディー．オー．オー． エンコーダ読取りヘッド
JP2012168177A (ja) 2011-02-15 2012-09-06 Avago Technologies Ecbu Ip (Singapore) Pte Ltd 単一の光トラックを用いる３チャネルエンコーダ
JP2012220460A (ja) 2011-04-14 2012-11-12 Canon Inc エンコーダ
JP2014163886A (ja) 2013-02-27 2014-09-08 Canon Inc アブソリュートエンコーダ

Also Published As

Publication number Publication date
JP6987045B2 (ja) 2021-12-22
US20180216972A1 (en) 2018-08-02
ES2830777T3 (es) 2021-06-04
US10670431B2 (en) 2020-06-02
JP2018530751A (ja) 2018-10-18
EP3347681A1 (en) 2018-07-18
KR20180052676A (ko) 2018-05-18
EP3347681B1 (en) 2020-09-02
CN108351229B (zh) 2021-03-26
CN108351229A (zh) 2018-07-31
WO2017042570A1 (en) 2017-03-16

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