KR102679187B1 - Holder unit, and, scribing wheel and pin for the same - Google Patents

Abstract

(Problem) To provide a holder unit that can easily form a scribe line along the scanning direction of the holder unit, and its scribing wheel and pin.
(Solution) The pin 70 is a pin that supports the scribing wheel 60, and prevents the movement of the scribing wheel 60 with respect to the pin 70 in the axial direction of the pin 70. It is provided with a regulatory department (80).

Description

HOLDER UNIT, AND, SCRIBING WHEEL AND PIN FOR THE SAME}

The present invention relates to a holder unit and its scribing wheel and pin.

A scribing device is used to form scribe lines on a brittle material substrate such as a glass substrate. The scribe device is provided with a holder unit and a scanning device that scans the holder unit. The holder unit is composed of a holder body, a pin, and a scribing wheel. The holder body is attached to the injection device. The pin is supported on the holder body. The scribing wheel is supported by pins. Patent Document 1 discloses a scribe unit 20, which is an example of a holder unit. The scribing unit 20 is comprised of a scribing wheel 60, a pin 32 that rotatably supports the scribing wheel 60, and a support frame 33 that supports the pin 32. The scribing unit 20 scans the brittle material substrate in a predetermined scanning direction to form a scribe line on the brittle material substrate.

Japanese Patent Publication No. 2012-106479

In a conventional scribing device, for example, when the holder unit is scanned in a straight direction, a non-linear scribe line may be formed on a brittle material substrate. For example, a non-straight scribe line includes a straight portion along the scanning direction of the scribing wheel and a non-straight portion extending in a direction different from the scanning direction. There are cases where non-straight portions are formed partially at one or several locations of the scribe line, and cases where straight portions and non-straight portions are formed alternately throughout the scribe line. The shape of the non-straight scribe line is Varies. In terms of improving the quality of the broken brittle material substrate, it is preferable that the scribe line be formed along the scanning direction. This applies not only to the case of forming a straight scribe line, but also to the case of forming a scribe line of a shape different from a straight line.

(1) The pin of the scribing wheel according to the present invention is a pin that supports the scribing wheel, and is provided with a regulating portion that prevents movement of the scribing wheel with respect to the pin in the axial direction of the pin. .

When a reaction force acting in the axial direction of the pin is generated on the scribing wheel when the scribing wheel is scanned, this reaction force is received by the regulating portion of the pin. For this reason, movement of the scribing wheel relative to the pin in the axial direction of the pin is suppressed. Accordingly, it is possible to easily form a scribe line along the scanning direction of the holder unit.

(2) A preferred example is the pin of the scribing wheel described in (1), wherein the regulating portion includes a concave portion formed on the outer periphery of the pin.

For this reason, the composition of the regulatory department is simple.

(3) As a preferred example, in the pin of the scribing wheel described in (2), the surface of the concave portion is a curved surface.

For this reason, it is difficult for stress concentration to occur in the concave portion.

(4) The scribing wheel according to the present invention is a scribing wheel supported by the pin according to any one of (1) to (3), and has a regulated portion that contacts the regulating portion.

According to the scribing wheel, the same effect as described in (1) is obtained.

(5) A preferred example is the scribing wheel described in (4), which is supported by the pin described in (2), wherein the regulated portion includes a convex portion inserted into the concave portion.

For this reason, the structure of the regulated part is simple.

(6) A preferred example is the scribing wheel described in (5), which is supported by the pin described in (3), and the surface of the convex portion is a curved surface.

For this reason, it is difficult for stress concentration to occur in the convex portion.

(7) The holder unit according to the present invention includes the pin according to any one of (1) to (3) and the scribing wheel according to any one of (4) to (6).

According to the above holder unit, the same effect as described in (1) is obtained.

(8) In a preferred example, the holder unit described in (7) includes the pin described in (3) and the scribing wheel described in (6), and the radius of curvature of the concave portion is larger than the radius of curvature of the convex portion.

Since the concave portion and the convex portion are in line contact, the frictional resistance during scribing decreases.

According to the holder unit and its scribing wheel and pin according to the present invention, a scribe line along the scanning direction of the holder unit can be easily formed.

1 is a perspective view of a scribing device of an embodiment.
Figure 2 is a cross-sectional view of the holder unit of Figure 1.
Figure 3 is a cross-sectional view of the holder unit of the first modification.
Fig. 4 is a cross-sectional view of the holder unit of the second modification example.

(Form for carrying out the invention)

(Embodiment)

The scribe device 1 shown in FIG. 1 is used to sever a substrate formed of a brittle material such as a glass substrate or a ceramic substrate (hereinafter referred to as “brittle material substrate GB”), for example, by dividing the surface of the brittle material substrate GB. It is used to form scribe lines. One example of a brittle material substrate (GB) is a glass substrate. One example of a glass substrate is alkali-free glass. Alkali-free glass is used in flat panel displays, etc.

The main elements constituting the scribe device 1 are a moving device 10, a table device 20, a holding mechanism 30, and a holder unit 40. The moving device 10 scans the brittle material substrate GB in the scanning direction. The moving device 10 is provided with a moving table 11 on which the table device 20 is mounted. The mobile platform 11 is placed on a pair of rails 12. The rotation-straight-forward conversion device 13 moves the moving table 11 along the rail 12. An example of the rotation/linear conversion device 13 is a feed screw device, and includes a motor 13A serving as a drive source and a feed screw portion 13B connected to the output shaft of the motor 13A.

The table device 20 includes a table 21 rotatable about a central rotation axis J, and a motor 22 for rotating the table 21. The brittle material substrate GB is placed on the table 21 and held on the table 21 by being attracted to the table 21 by vacuum suction means (not shown). The motor 22 is accommodated within the table 21. The motor 22 rotates the table 21 to determine the position of the brittle material substrate GB in the rotation direction of the table 21.

The holding mechanism 30 holds the holder unit 40. The holding mechanism 30 includes a bridge 31 installed to span the table 21 from above, and a pair of supports 32 for supporting the bridge 31. A guide 31A is formed on the bridge 31. A scribe head 34 is movably attached to the guide 31A via a connection portion 33. The connection portion 33 and the scribe head 34 move along the guide 31A. The connection portion 33 and the scribe head 34 are connected through a lifting mechanism (not shown). As the lifting mechanism is driven, the scribe head 34 moves in the vertical direction with respect to the connecting portion 33. A holder unit 40 is detachably attached to the scribe head 34 via a holder joint 35.

The main elements constituting the holder unit 40 shown in FIG. 2 are the holder 50, the scribing wheel 60, and the pin 70 of the scribing wheel 60 (hereinafter referred to as the “pin 70”). am. Since the scribing wheel 60 is a consumable item, it is replaced regularly. In one example, the scribing wheel 60 is replaced by replacing only the scribing wheel 60 or the holder unit 40.

One example of the material that makes up the holder 50 is magnetic metal. The holder 50 has a substantially cylindrical or prismatic shape. The holder 50 has a groove 51 for accommodating a part of the scribing wheel 60, and a support hole 52 penetrating the holder 50 to communicate with the groove 51. The groove portion 51 opens toward the brittle material substrate GB when the holder 50 is attached to the scribe head 34 (see Fig. 1).

Pin 70 supports scribing wheel 60. Pin 70 is inserted into support hole 52. One end 70A of the pin 70 has a tapered shape. The relationship between the support hole 52 and the pin 70 can be selected arbitrarily. In the first example, the pin 70 is fixed to the support hole 52 so that it cannot rotate with respect to the support hole 52 . The fixing method is press-fitting or gluing. In the first example, it is preferable that the maximum inner diameter of the support hole 52 and the maximum outer diameter of the pin 70 are substantially the same. In the second example, the pin 70 is inserted into the support hole 52 so that it can rotate with respect to the support hole 52. In the second example, the maximum inner diameter of the support hole 52 is slightly larger than the maximum outer diameter of the pin 70. Hereinafter, the direction in which the central axis of the pin 70 extends is referred to as the pin axis direction.

Examples of materials that make up the scribing wheel 60 are sintered diamond (poly crystalline diamond), cemented carbide, single crystalline diamond, and polycrystalline diamond. In another example, the scribing wheel 60 may be coated with a hard material. Hard materials are for example diamonds.

The scribing wheel 60 is mainly divided into a main body portion 61 and a blade tip portion 62. The main body portion 61 has a disk shape and is a portion radially inside the blade tip portion 62 of the scribing wheel 60. The blade tip portion 62 has a V-shaped cross section and is formed over the entire circumference of the outer peripheral portion of the scribing wheel 60. The cross-sectional V-shape means that in a cross-section of the scribing wheel 60 cut in a plane along the thickness direction (hereinafter “thickness direction DT”) of the scribing wheel 60, the outside of the scribing wheel 60 It has a shape where the end tapers towards the main axis. In the following description, a cross section perpendicular to a plane parallel to the radial direction of the scribing wheel 60 is referred to as an orthogonal cross section. As a preferred example, an example of the outer diameter of the scribing wheel 60 is within the range of ϕ1 mm to ϕ7 mm. As an example, the outer diameter of the scribing wheel 60 is ϕ2 mm. An example of the thickness of the scribing wheel 60 is 0.64 mm. In addition, an example of the length in the thickness direction DT of the groove portion 51, that is, the distance between the thickness direction DT of the two surfaces 51A and 51B facing the thickness direction DT of the inner surface of the groove portion 51, is 0.66. It is mm.

At the center of the main body 61, an insertion hole 63 is formed that penetrates the main body 61 in the thickness direction DT. A pin 70 is inserted into the insertion hole 63. The main body 61 has a first side 61A on which one end of the insertion hole 63 is formed, and a second side 61B on which the other end of the insertion hole 63 is formed. The portion of the first side 61A accommodated in the groove 51 faces the surface 51A of the groove 51 through a predetermined gap SA. The portion of the second side 61B accommodated in the groove 51 faces the surface 51B of the groove 51 through a predetermined gap SB. The relationship between the size of the gap SA and the size of the gap SB in the thickness direction DT can be arbitrarily selected depending on the position and size of the regulating portion 80, which will be described later. In the first example shown in FIG. 2, the size of the gap SA and the size of the gap SB in the thickness direction DT are the same. In the second example, the size of the gap SA and the size of the gap SB in the thickness direction DT are different.

The sizes of the gaps (SA, SB) in the thickness direction DT can be set arbitrarily. As a preferred example, the size of the gap (SA, SB) in the thickness direction DT is such that it is easy to suppress the inclination of the scribing wheel 60 within the groove portion 51 of the holder 50 in the thickness direction DT. And, it is determined based on the relationship with the difficulty of clogging the gap (SA, SB) with foreign matter. An example of foreign matter is cutting debris from the brittle material substrate GB generated by forming scribe lines. An example of the maximum value of the size of the gap (SA, SB) in the thickness direction DT is each 10 μm. When the size of the gap SA, SB is 10 μm or less, it becomes easy to suppress the inclination of the scribing wheel 60 within the groove 51 of the holder 50 in the thickness direction DT. An example of the minimum value of the size of the gap (SA, SB) in the thickness direction DT is each 2 μm. If the size of the gap (SA, SB) is 2㎛ or more, it is difficult for foreign matter to clog the gap (SA, SB). Furthermore, it is difficult for the scribing wheel 60 and the holder 50 to interfere. An example of a range in which the total size of the gaps (SA, SB) in the thickness direction DT can be taken is 4 μm to 20 μm.

In the process of forming a scribe line on the brittle material substrate GB, the holder unit 40 is scanned in a predetermined scanning direction while the scribing wheel 60 is pressed against the surface of the brittle material substrate GB. Examples of scanning methods include a method of moving the holder unit 40 with respect to the brittle material substrate GB, a method of moving the brittle material substrate GB with respect to the holder unit 40, and a method of combining these. When scribing the brittle material substrate GB, a first reaction force including a component acting in a direction opposite to the scanning direction as well as a second reaction force including a component in the pin axis direction are applied to the scribing wheel 60. . This is mainly caused by non-uniformity in the surface properties of the brittle material substrate GB. Non-uniformity in the surface properties is caused by, for example, a large number of microscopic irregularities distributed unevenly on the surface and warpage of the surface. The second reaction force includes a reaction force acting in the first pin axis direction, which is on one side of the pin axis direction, and a reaction force acting in the second pin axis direction, on the other side of the pin axis direction. Since the shape of the irregularities on the surface of the brittle material substrate GB is different for each part, the direction and force of the second reaction force acting on the scribing wheel 60 change as the scribing wheel 60 progresses. do. Since the scribing wheel 60 is not fixed to the pin 70, as the second reaction force acts on the scribing wheel 60, the scribing wheel 60 moves against the pin 70. It is displaced in the direction of the pin axis. In the following description, the movement of the scribing wheel 60 in the pin axis direction with respect to the pin 70 is referred to as “wheel axis direction displacement.”

The direction and amount of displacement in the wheel axis direction mainly depend on the relationship between the force of the second reaction force acting in the first pin axis direction and the force of the second reaction force acting in the second pin axis direction. As displacement in the wheel axis direction occurs, a non-straight scribe line is formed. By suppressing this displacement, it becomes difficult to form a non-straight scribe line. The holder unit 40 is provided with a displacement suppression structure that suppresses displacement in the wheel axis direction. The displacement suppression structure includes a regulating portion 80 formed on the pin 70 and a regulated portion 90 formed on the scribing wheel 60.

The configuration of the regulation unit 80 can be selected arbitrarily. In the example shown in FIG. 2 , the regulating portion 80 includes a concave portion 81 formed on the outer periphery of the pin 70 . For this reason, the configuration of the regulation unit 80 is simple. The concave portion 81 is a portion formed by, for example, grinding the outer periphery of the pin 70 so as to be in contact with the regulated portion 90, and is a portion formed during the manufacture of the pin 70. Irregularities are not included. The concave portion 81 goes around the outer periphery of the pin 70. The position of the recessed portion 81 in the axial direction of the pin 70 can be arbitrarily selected. In one example, the concave portion 81 is formed at the center of the pin 70 in the axial direction. The surface 81A of the concave portion 81 is a curved surface that is dented toward the central axis of the pin 70 with respect to the outer peripheral surface 71 of the pin 70. For this reason, it is difficult for stress concentration to occur in the concave portion 81. In an orthogonal cross-section, the surface 81A has a predetermined radius of curvature RA.

The diameter of the pin 70 is within the range of 0.4 mm to 1.1 mm. The depth (XA) of the concave portion 81 is within the range of 0.5 μm to 3.0 μm. For example, the depth .

The width (XB) of the concave portion (81) in the pin axis direction is equal to the thickness of the scribing wheel (60). The width The width of the concave portion 81 is equal to the thickness of the scribing wheel 60, or is larger than the thickness of the scribing wheel 60. The width of the concave portion 81 is within the range of 0.4 mm to 1.2 mm.

The regulated portion 90 includes a convex portion 91 inserted into the concave portion 81. For this reason, the structure of the regulated portion 90 is simple. The surface 91A of the convex portion 91 is a curved surface formed between the first side surface 61A and the second side surface 61B in the thickness direction DT and defined by a predetermined radius of curvature RB. For this reason, it is difficult for stress concentration to occur in the convex portion 91. The relationship between the radius of curvature (RA) of the concave portion (81) and the radius of curvature (RB) of the convex portion (91) can be arbitrarily selected. In the first example shown in FIG. 2, the radius of curvature RA of the concave portion 81 is larger than the radius of curvature RB of the convex portion 91. In the first example, since the surface 81A of the concave portion 81 and the surface 91A of the convex portion 91 are in line contact, the frictional resistance during scribing becomes small. In the second example, the radius of curvature RA of the concave portion 81 is equal to the radius of curvature RB of the convex portion 91, or is smaller than the radius of curvature RB of the convex portion 91. The height HA of the convex portion 91 is within the range of 0.1 μm to 1.0 μm. The height HA of the convex portion 91 is preferably within the range of 0.1 μm to 0.5 μm. The height HA of the convex portion 91 is the distance between the straight line LB passing through the boundary between the side surfaces 61A and 61B of the main body 61 and the surface 91A and the vertex 91B of the convex portion 91. It appears as The minimum inner diameter of the convex portion 91 of the insertion hole 63 of the scribing wheel 60 is slightly larger than the maximum outer diameter of the pin 70.

The operation and effect of the holder unit 40 will be described. When the scribing wheel 60 is pressed against the brittle material substrate GB and is not scanned, the vertex 91B of the regulated portion 90 of the scribing wheel 60 is pinned on the orthogonal cross section. Contact the regulatory unit (80) at (70). In reality, a certain range of the regulated part 90 is in line contact with the regulated part 80. The regulated portion 90 receives the reaction force acting in the pushing direction from the regulating portion 80. When a second reaction force acts on the scribing wheel 60 as the scribing wheel 60 is scanned, the second reaction force to move the regulated portion 90 in the pin axis direction is applied to the pin 70. It is accepted by the regulatory department 80 of . For this reason, the displacement of the scribing wheel 60 in the wheel axis direction is prevented, the scribing wheel 60 advances along the scanning direction, and a straight scribe line is formed on the brittle material substrate GB. For this reason, a scribe line along the scanning direction of the holder unit 40 can be easily formed.

(variation example)

The above embodiment is an example of the form that the holder unit and its scribing wheel and pin according to the present invention can take, and is not intended to limit the form. The holder unit according to the present invention, and its scribing wheels and pins, may take forms different from those illustrated in the embodiments. An example of this is a form in which part of the structure of the embodiment is replaced, changed, or omitted, or a form in which a new structure is added to the embodiment. An example of a modification of the embodiment is shown below.

·The configuration of the regulatory unit 80 and the regulated unit 90 can be arbitrarily changed. FIG. 3 shows the configuration of the holder unit 40 including the regulating portion 180 and the regulated portion 190 of the first modification example. The regulating portion 180 includes a convex portion 181 formed on the outer periphery of the pin 70. The convex portion 181 is a portion that protrudes from the outer peripheral surface 71 of the pin 70 so as to contact the regulated portion 190. The convex portion 181 is formed over the entire outer peripheral surface 71 of the pin 70 at a position opposite the insertion hole 63 of the scribing wheel 60. The position at which the convex portion 181 is formed in the axial direction of the pin 70 can be arbitrarily selected. In one example, the convex portion 181 is formed at the center of the groove portion 51 in the axial direction. The surface 181A of the convex portion 181 is a curved surface defined by a predetermined radius of curvature RA. The regulated portion 190 includes a concave portion 191 into which the convex portion 181 is inserted. The concave portion 191 is a portion formed by, for example, polishing the insertion hole 63, and does not include minute irregularities formed during manufacturing of the scribing wheel 60. The surface 191A of the concave portion 191 is a curved surface formed between the first side surface 61A and the second side surface 61B in the thickness direction DT and defined by a predetermined radius of curvature RB. In addition, in the first modification, the holder 50 is not formed as a single member, but as a member divided into a part including the surface 51A of the groove portion 51 and a part including the surface 51B. The holder unit 40 can be easily assembled.

The relationship between the radius of curvature (RA) of the surface 181A and the radius of curvature (RB) of the surface 191A can be arbitrarily selected. In the first example shown in FIG. 3, the radius of curvature RA of the surface 181A is smaller than the radius of curvature RB of the surface 191A. In the first example, since the surface 181A and the surface 191A are in line contact, the frictional resistance during scribing becomes small. In the second example, the radius of curvature RA of the surface 181A is equal to the radius of curvature RB of the surface 191A, or is greater than the radius of curvature RB of the surface 191A.

FIG. 4 shows the configuration of the holder unit 40 including the regulating portion 280 and the regulated portion 290 of the second modification example. The regulating portion 280 includes a concave portion 281 formed on the outer peripheral surface 71 of the pin 70. The concave portion 281 is a portion formed by, for example, grinding the outer peripheral surface 71 of the pin 70 so as to be in contact with the regulated portion 290, and is formed during manufacturing of the pin 70. Minor irregularities are not included. The concave portion 281 is formed over the entire outer peripheral surface 71 of the pin 70 at a position opposite to the insertion hole 63 of the scribing wheel 60. The position at which the concave portion 281 is formed in the axial direction of the pin 70 can be arbitrarily selected. In one example, the concave portion 281 is formed at the center of the pin 70 in the axial direction. The concave portion 281 is a groove containing an angle. In the example shown in Fig. 4, the concave portion 281 is a V-shaped groove. The regulated portion 290 includes a convex portion 291 inserted into the concave portion 281. The convex portion 291 is formed between the first side 61A and the second side 61B in the thickness direction DT. The convex portion 291 is a protrusion containing an angle. In the example shown in FIG. 4, the convex portion 291 is a V-shaped protrusion. The minimum inner diameter of the convex portion 291 of the insertion hole 63 of the scribing wheel 60 is slightly larger than the maximum outer diameter of the pin 70.

·The configuration of the holder unit 40 can be arbitrarily changed. In one example, the holder unit 40 omits the regulated portion 90. In this case, it is preferable that the width of the regulating portion 80 is larger than the width of the scribing wheel 60 and narrower than the width of the groove portion 51. In addition, the shape of the regulating portion 80 and the regulated portion 90 is not limited to the configuration disclosed in the above embodiment, and may have a shape having a flat portion in part, for example. Additionally, the shape of the convex portion 91 and the shape of the concave portion 81 do not need to match. In this case, it is preferable that the width of the concave portion 81 is larger than the width of the convex portion 91.

1: Scribing device
40: Holder unit
60: Scribing wheel
70: pin
80: Regulatory Department
81: recess
90: Regulated Department
91: convex portion

Claims (8)

As a pin supporting the scribing wheel,
Provided with a regulating portion that prevents movement of the scribing wheel relative to the pin in the axial direction of the pin,
The regulating portion includes a concave portion formed on the outer periphery of the pin.
Pin on the scribing wheel. delete According to paragraph 1,
The surface of the concave portion is a curved surface.
Pin on the scribing wheel. A scribing wheel supported by the pin according to claim 1, comprising:
having a regulated unit in contact with the regulatory unit;
The regulated portion includes a convex portion inserted into the concave portion.
Scribing wheel. delete According to paragraph 4,
The surface of the concave portion is a curved surface,
The surface of the convex portion is a curved surface.
Scribing wheel. The pin described in paragraph 1 or 3,
Equipped with a scribing wheel according to claim 4 or 6.
Holder unit. The pin described in paragraph 3,
Equipped with the scribing wheel described in clause 6,
The radius of curvature of the concave portion is greater than the radius of curvature of the convex portion.
Holder unit.