KR102617769B1 - 위상-시프팅 리플렉터를 갖는 음향-광학 시스템 - Google Patents

위상-시프팅 리플렉터를 갖는 음향-광학 시스템 Download PDF

Info

Publication number
KR102617769B1
KR102617769B1 KR1020207006324A KR20207006324A KR102617769B1 KR 102617769 B1 KR102617769 B1 KR 102617769B1 KR 1020207006324 A KR1020207006324 A KR 1020207006324A KR 20207006324 A KR20207006324 A KR 20207006324A KR 102617769 B1 KR102617769 B1 KR 102617769B1
Authority
KR
South Korea
Prior art keywords
aod
reflector
phase
shifting
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020207006324A
Other languages
English (en)
Korean (ko)
Other versions
KR20200047558A (ko
Inventor
제임스 브룩카이저
장 클레이너트
제러드 리히터
커트 이튼
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20200047558A publication Critical patent/KR20200047558A/ko
Application granted granted Critical
Publication of KR102617769B1 publication Critical patent/KR102617769B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/291—Two-dimensional analogue deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/124—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers incorporating phase shifts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/145—Phase conjugate mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Eye Examination Apparatus (AREA)
KR1020207006324A 2017-09-22 2018-09-20 위상-시프팅 리플렉터를 갖는 음향-광학 시스템 Active KR102617769B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762562047P 2017-09-22 2017-09-22
US62/562,047 2017-09-22
PCT/US2018/052018 WO2019060590A1 (en) 2017-09-22 2018-09-20 ACOUSTO-OPTICAL SYSTEM WITH REFLECTOR WITH PHASE

Publications (2)

Publication Number Publication Date
KR20200047558A KR20200047558A (ko) 2020-05-07
KR102617769B1 true KR102617769B1 (ko) 2023-12-27

Family

ID=65810602

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020207006324A Active KR102617769B1 (ko) 2017-09-22 2018-09-20 위상-시프팅 리플렉터를 갖는 음향-광학 시스템

Country Status (8)

Country Link
US (3) US11705686B2 (enExample)
EP (1) EP3673315B1 (enExample)
JP (1) JP7360384B2 (enExample)
KR (1) KR102617769B1 (enExample)
CN (2) CN114755868A (enExample)
SG (1) SG11202001217RA (enExample)
TW (2) TWI894485B (enExample)
WO (1) WO2019060590A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11818909B2 (en) 2020-04-20 2023-11-14 Samsung Display Co., Ltd. Color conversion panel comprising overcoat and spacer, and display device including the same
KR102545519B1 (ko) * 2022-01-03 2023-06-21 (주)오로스 테크놀로지 편광 변조가 최소화된 반사형 광학계 및 이를 구비한 분광 타원계
US20230259001A1 (en) * 2022-02-16 2023-08-17 Quantinuum Llc Fast frequency-tunable optical relay and methods of use
JP2025508870A (ja) * 2022-02-27 2025-04-10 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 熱的に安定したａｏｄの動作のための方法及び装置
WO2024211097A1 (en) * 2023-04-07 2024-10-10 Electro Scientific Industries, Inc. System and method for thermally-stable operation of acousto-optic deflector with reduced acoustic transients

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160086A (ja) * 2000-11-28 2002-06-04 Mitsubishi Electric Corp レーザ加工機
JP2008537334A (ja) * 2005-04-13 2008-09-11 アプライド マテリアルズ インコーポレイテッド ２波長熱流束レーザアニール

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3671103A (en) * 1970-04-09 1972-06-20 Nippon Telegraph & Telephone Di-lead molybdate ultrasonic light deflector
US3655255A (en) * 1970-07-13 1972-04-11 Bell Telephone Labor Inc Acoustic-optic ultrasonic devices using germanium containing chalcogenide glasses
WO1993025387A1 (en) 1992-06-11 1993-12-23 Zed Instruments Ltd. Engraving head
JP3323548B2 (ja) 1992-09-07 2002-09-09 レーザーテック株式会社 ビーム偏向装置
TW245669B (enExample) 1993-09-27 1995-04-21 Mitsubishi Electric Machine
EP0840493B1 (en) * 1996-10-30 2005-06-15 Fuji Photo Film Co., Ltd. Method and Apparatus for Inner Face Scanning with Multi Beams
JP3253548B2 (ja) 1997-01-24 2002-02-04 有限会社祥起金型 道路標識ポール
US6236507B1 (en) * 1998-04-17 2001-05-22 Zygo Corporation Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components
US6885807B2 (en) 2001-03-14 2005-04-26 Nuonics, Inc. High speed fiber-optic attenuation modules
WO2003046613A2 (en) 2001-11-28 2003-06-05 Overbeck James W Scanning microscopy, fluorescence detection, and laser beam positioning
JP2003329956A (ja) * 2002-05-14 2003-11-19 Fuji Photo Film Co Ltd 画像露光装置
US7039079B2 (en) * 2003-03-14 2006-05-02 Coherent, Inc. Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement
US7355722B2 (en) 2003-09-10 2008-04-08 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US7133182B2 (en) * 2004-06-07 2006-11-07 Electro Scientific Industries, Inc. AOM frequency and amplitude modulation techniques for facilitating full beam extinction in laser systems
JP2006053438A (ja) * 2004-08-13 2006-02-23 Fuji Photo Film Co Ltd 走査露光装置
US7423727B2 (en) * 2005-01-25 2008-09-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7667888B2 (en) * 2007-04-06 2010-02-23 Harris Corporation Low cost system and method that implements acousto-optic (AO) RF signal excitation
US7538929B2 (en) * 2007-04-06 2009-05-26 Harris Corporation RF phase modulation technique for performing acousto-optic intensity modulation of an optical wavefront
US20090190463A1 (en) * 2008-01-30 2009-07-30 Jds Uniphase Corporation, Optical pick-up unit with two-mirror phase shifter
HU0800781D0 (en) * 2008-12-31 2009-03-02 Femtonics Kft Focusing system comprising acousto-optic deflectors for focusing an electromagnetic beam
CN101738815B (zh) * 2009-12-03 2012-05-09 深圳先进技术研究院 激光三维扫描装置和激光三维扫描方法
JP2012253092A (ja) * 2011-05-31 2012-12-20 Mitsubishi Electric Corp 固体レーザ発振器
KR102138223B1 (ko) 2011-07-05 2020-07-28 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 사용 중 음향-광학 빔 편향기와 음향-광학 변조기에 온도 안정성을 제공하기 위한 시스템 및 방법
JP2013172100A (ja) 2012-02-22 2013-09-02 Mitsubishi Electric Corp レーザ装置の調整方法およびレーザ装置の製造方法
CN103676126A (zh) * 2013-12-20 2014-03-26 同济大学 一种光镊操作仪
CN103730826A (zh) * 2014-01-04 2014-04-16 天津奇谱光电技术有限公司 一种可调谐激光器系统
DE102014200633B3 (de) * 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
US20150338718A1 (en) 2014-05-22 2015-11-26 Intel Corporation Acousto-optic deflector with multiple transducers for optical beam steering
NL2016543A (en) * 2015-04-16 2016-10-19 Asml Holding Nv Method and apparatus for optical fiber connection.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160086A (ja) * 2000-11-28 2002-06-04 Mitsubishi Electric Corp レーザ加工機
JP2008537334A (ja) * 2005-04-13 2008-09-11 アプライド マテリアルズ インコーポレイテッド ２波長熱流束レーザアニール

Also Published As

Publication number Publication date
US20210226406A1 (en) 2021-07-22
CN114755868A (zh) 2022-07-15
US11705686B2 (en) 2023-07-18
US20250343388A1 (en) 2025-11-06
JP2020534569A (ja) 2020-11-26
SG11202001217RA (en) 2020-03-30
TWI894485B (zh) 2025-08-21
US20230307883A1 (en) 2023-09-28
US12381369B2 (en) 2025-08-05
JP7360384B2 (ja) 2023-10-12
EP3673315A1 (en) 2020-07-01
WO2019060590A1 (en) 2019-03-28
CN111133361B (zh) 2022-06-03
TWI779100B (zh) 2022-10-01
TW201921025A (zh) 2019-06-01
KR20200047558A (ko) 2020-05-07
EP3673315B1 (en) 2025-11-26
EP3673315A4 (en) 2021-05-05
CN111133361A (zh) 2020-05-08
TW202303220A (zh) 2023-01-16

Similar Documents

Publication Publication Date Title
KR102617769B1 (ko) 위상-시프팅 리플렉터를 갖는 음향-광학 시스템
EP3319017A1 (en) Multi-channel laser system including an acousto-optic modulator (aom) and related methods
EP3319185B1 (en) Multi-channel phase-capable acousto-optic modulator (aom) and related methods
KR102551680B1 (ko) 광학적으로 접촉된 음향-광학 디바이스 및 이를 만드는 방법
KR20250099053A (ko) 음향 광학 편향기에 대한 수동 분산 보상
EP1936434B1 (en) Active temporal modulation of ultrashort pulse trains using reconfigurable optical gratings
WO2023144659A1 (en) Acousto optic modulator device for light frequency adjustment
TW202544517A (zh) 具有相位移反射器的聲光系統
KR20230117235A (ko) 레이저 빔에 영향을 주기 위한 장치
US20250102878A1 (en) Germanium aod system with parallel and perpendicular orientations
EP3531197A1 (en) Control system including a beam stabilizer and a phase modulation capable acousto-optic modulator for diverting laser output intensity noise to a first order laser light beam and related methods

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20200303

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20210520

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20230424

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20231024

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20231220

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20231221

End annual number: 3

Start annual number: 1

PG1601 Publication of registration