JP7360384B2 - 位相シフト反射器を有する音響光学システム - Google Patents

位相シフト反射器を有する音響光学システム Download PDF

Info

Publication number
JP7360384B2
JP7360384B2 JP2020515659A JP2020515659A JP7360384B2 JP 7360384 B2 JP7360384 B2 JP 7360384B2 JP 2020515659 A JP2020515659 A JP 2020515659A JP 2020515659 A JP2020515659 A JP 2020515659A JP 7360384 B2 JP7360384 B2 JP 7360384B2
Authority
JP
Japan
Prior art keywords
aod
reflector
axis
phase shift
quarter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020515659A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020534569A5 (enExample
JP2020534569A (ja
Inventor
ブルックハイザー，ジェームス
クライネルト，ヤン
リヒター，ジェレッド
イートン，カート
Original Assignee
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド filed Critical エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
Publication of JP2020534569A publication Critical patent/JP2020534569A/ja
Publication of JP2020534569A5 publication Critical patent/JP2020534569A5/ja
Application granted granted Critical
Publication of JP7360384B2 publication Critical patent/JP7360384B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/291—Two-dimensional analogue deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/124—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers incorporating phase shifts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/145—Phase conjugate mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Eye Examination Apparatus (AREA)
JP2020515659A 2017-09-22 2018-09-20 位相シフト反射器を有する音響光学システム Active JP7360384B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762562047P 2017-09-22 2017-09-22
US62/562,047 2017-09-22
PCT/US2018/052018 WO2019060590A1 (en) 2017-09-22 2018-09-20 ACOUSTO-OPTICAL SYSTEM WITH REFLECTOR WITH PHASE

Publications (3)

Publication Number Publication Date
JP2020534569A JP2020534569A (ja) 2020-11-26
JP2020534569A5 JP2020534569A5 (enExample) 2021-09-16
JP7360384B2 true JP7360384B2 (ja) 2023-10-12

Family

ID=65810602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020515659A Active JP7360384B2 (ja) 2017-09-22 2018-09-20 位相シフト反射器を有する音響光学システム

Country Status (8)

Country Link
US (3) US11705686B2 (enExample)
EP (1) EP3673315B1 (enExample)
JP (1) JP7360384B2 (enExample)
KR (1) KR102617769B1 (enExample)
CN (2) CN114755868A (enExample)
SG (1) SG11202001217RA (enExample)
TW (2) TWI779100B (enExample)
WO (1) WO2019060590A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11818909B2 (en) 2020-04-20 2023-11-14 Samsung Display Co., Ltd. Color conversion panel comprising overcoat and spacer, and display device including the same
KR102545519B1 (ko) * 2022-01-03 2023-06-21 (주)오로스 테크놀로지 편광 변조가 최소화된 반사형 광학계 및 이를 구비한 분광 타원계
US20230259001A1 (en) * 2022-02-16 2023-08-17 Quantinuum Llc Fast frequency-tunable optical relay and methods of use
JP2025508870A (ja) * 2022-02-27 2025-04-10 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 熱的に安定したａｏｄの動作のための方法及び装置
CN120958375A (zh) * 2023-04-07 2025-11-14 伊雷克托科学工业股份有限公司 用于具有减少的声波智能的声光偏转器的热稳定操作的系统和方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160086A (ja) 2000-11-28 2002-06-04 Mitsubishi Electric Corp レーザ加工機
US20020136524A1 (en) 2001-03-14 2002-09-26 Nabeel Agha Riza High speed fiber-optic attenuation modules
JP2006210917A (ja) 2005-01-25 2006-08-10 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
JP2008537334A (ja) 2005-04-13 2008-09-11 アプライド マテリアルズ インコーポレイテッド ２波長熱流束レーザアニール
CN101738815A (zh) 2009-12-03 2010-06-16 深圳先进技术研究院 激光三维扫描装置和激光三维扫描方法
JP2010524033A (ja) 2007-04-06 2010-07-15 ハリス コーポレイション 音響光学（ａｏ）ｒｆ信号励起を実施するための低コストのシステム及び方法
US20120044569A1 (en) 2008-12-31 2012-02-23 Femtonics Kft. Focusing system comprising acousto-optic deflectors for focusing an electromagnetic beam
JP2013172100A (ja) 2012-02-22 2013-09-02 Mitsubishi Electric Corp レーザ装置の調整方法およびレーザ装置の製造方法
JP2014524047A (ja) 2011-07-05 2014-09-18 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 使用中の音響光学ビーム偏向器および音響光学変調器の温度安定性を実現するためのシステムならびに方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3671103A (en) * 1970-04-09 1972-06-20 Nippon Telegraph & Telephone Di-lead molybdate ultrasonic light deflector
US3655255A (en) * 1970-07-13 1972-04-11 Bell Telephone Labor Inc Acoustic-optic ultrasonic devices using germanium containing chalcogenide glasses
EP0644829B1 (en) 1992-06-11 1997-10-22 Zed Instruments Limited Engraving head
JP3323548B2 (ja) * 1992-09-07 2002-09-09 レーザーテック株式会社 ビーム偏向装置
TW245669B (enExample) 1993-09-27 1995-04-21 Mitsubishi Electric Machine
EP1571824B1 (en) * 1996-10-30 2012-10-24 FUJIFILM Corporation Method and apparatus for inner face scanning with multi beams
JP3253548B2 (ja) 1997-01-24 2002-02-04 有限会社祥起金型 道路標識ポール
US6236507B1 (en) * 1998-04-17 2001-05-22 Zygo Corporation Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components
EP1461602A4 (en) 2001-11-28 2011-09-14 James W Overbeck GRID MICROSCOPY, FLUORESCENT RECOGNITION AND LASER BEAM POSITIONING
JP2003329956A (ja) * 2002-05-14 2003-11-19 Fuji Photo Film Co Ltd 画像露光装置
US7039079B2 (en) * 2003-03-14 2006-05-02 Coherent, Inc. Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement
WO2005026810A2 (en) 2003-09-10 2005-03-24 Zetetic Institute Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US7133182B2 (en) * 2004-06-07 2006-11-07 Electro Scientific Industries, Inc. AOM frequency and amplitude modulation techniques for facilitating full beam extinction in laser systems
JP2006053438A (ja) * 2004-08-13 2006-02-23 Fuji Photo Film Co Ltd 走査露光装置
US7538929B2 (en) * 2007-04-06 2009-05-26 Harris Corporation RF phase modulation technique for performing acousto-optic intensity modulation of an optical wavefront
US20090190463A1 (en) * 2008-01-30 2009-07-30 Jds Uniphase Corporation, Optical pick-up unit with two-mirror phase shifter
JP2012253092A (ja) * 2011-05-31 2012-12-20 Mitsubishi Electric Corp 固体レーザ発振器
CN103676126A (zh) * 2013-12-20 2014-03-26 同济大学 一种光镊操作仪
CN103730826A (zh) * 2014-01-04 2014-04-16 天津奇谱光电技术有限公司 一种可调谐激光器系统
DE102014200633B3 (de) * 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
US20150338718A1 (en) 2014-05-22 2015-11-26 Intel Corporation Acousto-optic deflector with multiple transducers for optical beam steering
NL2016543A (en) * 2015-04-16 2016-10-19 Asml Holding Nv Method and apparatus for optical fiber connection.

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160086A (ja) 2000-11-28 2002-06-04 Mitsubishi Electric Corp レーザ加工機
US20020136524A1 (en) 2001-03-14 2002-09-26 Nabeel Agha Riza High speed fiber-optic attenuation modules
JP2006210917A (ja) 2005-01-25 2006-08-10 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
JP2008537334A (ja) 2005-04-13 2008-09-11 アプライド マテリアルズ インコーポレイテッド ２波長熱流束レーザアニール
JP2010524033A (ja) 2007-04-06 2010-07-15 ハリス コーポレイション 音響光学（ａｏ）ｒｆ信号励起を実施するための低コストのシステム及び方法
US20120044569A1 (en) 2008-12-31 2012-02-23 Femtonics Kft. Focusing system comprising acousto-optic deflectors for focusing an electromagnetic beam
CN101738815A (zh) 2009-12-03 2010-06-16 深圳先进技术研究院 激光三维扫描装置和激光三维扫描方法
JP2014524047A (ja) 2011-07-05 2014-09-18 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 使用中の音響光学ビーム偏向器および音響光学変調器の温度安定性を実現するためのシステムならびに方法
JP2013172100A (ja) 2012-02-22 2013-09-02 Mitsubishi Electric Corp レーザ装置の調整方法およびレーザ装置の製造方法

Also Published As

Publication number Publication date
EP3673315B1 (en) 2025-11-26
US20230307883A1 (en) 2023-09-28
US12381369B2 (en) 2025-08-05
CN111133361A (zh) 2020-05-08
SG11202001217RA (en) 2020-03-30
US11705686B2 (en) 2023-07-18
TW202303220A (zh) 2023-01-16
US20250343388A1 (en) 2025-11-06
CN114755868A (zh) 2022-07-15
TWI894485B (zh) 2025-08-21
KR20200047558A (ko) 2020-05-07
EP3673315A4 (en) 2021-05-05
WO2019060590A1 (en) 2019-03-28
US20210226406A1 (en) 2021-07-22
EP3673315A1 (en) 2020-07-01
CN111133361B (zh) 2022-06-03
TWI779100B (zh) 2022-10-01
TW201921025A (zh) 2019-06-01
KR102617769B1 (ko) 2023-12-27
JP2020534569A (ja) 2020-11-26

Similar Documents

Publication Publication Date Title
JP7360384B2 (ja) 位相シフト反射器を有する音響光学システム
US10466516B2 (en) Control system including a beam stabilizer and a phase modulation capable acousto-optic modulator for diverting laser output intensity noise to a first order laser light beam and related methods
JP2008537609A (ja) 音響光学装置
KR102551680B1 (ko) 광학적으로 접촉된 음향-광학 디바이스 및 이를 만드는 방법
US5909304A (en) Acousto-optic tunable filter based on isotropic acousto-optic diffraction using phased array transducers
KR20250099053A (ko) 음향 광학 편향기에 대한 수동 분산 보상
TW202544517A (zh) 具有相位移反射器的聲光系統
US20250102878A1 (en) Germanium aod system with parallel and perpendicular orientations
CN118591767A (zh) 具有平行和垂直方向的锗声光偏转器系统
WO2023144659A1 (en) Acousto optic modulator device for light frequency adjustment
JPH04245230A (ja) 光偏向装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210805

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210805

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220824

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220906

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221129

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230131

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230425

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230426

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230711

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230711

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230905

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230929

R150 Certificate of patent or registration of utility model

Ref document number: 7360384

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150