TWI894485B - 具有相位移反射器的聲光系統 - Google Patents
具有相位移反射器的聲光系統Info
- Publication number
- TWI894485B TWI894485B TW111134346A TW111134346A TWI894485B TW I894485 B TWI894485 B TW I894485B TW 111134346 A TW111134346 A TW 111134346A TW 111134346 A TW111134346 A TW 111134346A TW I894485 B TWI894485 B TW I894485B
- Authority
- TW
- Taiwan
- Prior art keywords
- aod
- axis
- reflector
- phase
- quarter
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/291—Two-dimensional analogue deflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/124—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers incorporating phase shifts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/145—Phase conjugate mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Eye Examination Apparatus (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
- Variable-Direction Aerials And Aerial Arrays (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762562047P | 2017-09-22 | 2017-09-22 | |
| US62/562,047 | 2017-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202303220A TW202303220A (zh) | 2023-01-16 |
| TWI894485B true TWI894485B (zh) | 2025-08-21 |
Family
ID=65810602
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111134346A TWI894485B (zh) | 2017-09-22 | 2018-09-21 | 具有相位移反射器的聲光系統 |
| TW107133424A TWI779100B (zh) | 2017-09-22 | 2018-09-21 | 具有相位移反射器的聲光系統 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107133424A TWI779100B (zh) | 2017-09-22 | 2018-09-21 | 具有相位移反射器的聲光系統 |
Country Status (8)
| Country | Link |
|---|---|
| US (3) | US11705686B2 (enExample) |
| EP (1) | EP3673315B1 (enExample) |
| JP (1) | JP7360384B2 (enExample) |
| KR (1) | KR102617769B1 (enExample) |
| CN (2) | CN111133361B (enExample) |
| SG (1) | SG11202001217RA (enExample) |
| TW (2) | TWI894485B (enExample) |
| WO (1) | WO2019060590A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11818909B2 (en) | 2020-04-20 | 2023-11-14 | Samsung Display Co., Ltd. | Color conversion panel comprising overcoat and spacer, and display device including the same |
| KR102545519B1 (ko) * | 2022-01-03 | 2023-06-21 | (주)오로스 테크놀로지 | 편광 변조가 최소화된 반사형 광학계 및 이를 구비한 분광 타원계 |
| US20230259001A1 (en) * | 2022-02-16 | 2023-08-17 | Quantinuum Llc | Fast frequency-tunable optical relay and methods of use |
| EP4483240A1 (en) * | 2022-02-27 | 2025-01-01 | Electro Scientific Industries, Inc. | Method and apparatus for thermally stable operation of aods |
| WO2024211097A1 (en) * | 2023-04-07 | 2024-10-10 | Electro Scientific Industries, Inc. | System and method for thermally-stable operation of acousto-optic deflector with reduced acoustic transients |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050270630A1 (en) * | 2004-06-07 | 2005-12-08 | Jay Johnson | AOM modulation techniques employing plurality of transducers to improve laser system performance |
| TW200916876A (en) * | 2007-04-06 | 2009-04-16 | Harris Corp | RF phase modulation technique for performing acousto-optic intensity modulation of an optical wavefront |
| US20130010349A1 (en) * | 2011-07-05 | 2013-01-10 | Gsi Group Corporation | Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use |
| CN106102982A (zh) * | 2014-01-15 | 2016-11-09 | 弗劳恩霍夫应用研究促进协会 | 用于激光加工表面的加工装置和方法 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3671103A (en) * | 1970-04-09 | 1972-06-20 | Nippon Telegraph & Telephone | Di-lead molybdate ultrasonic light deflector |
| US3655255A (en) * | 1970-07-13 | 1972-04-11 | Bell Telephone Labor Inc | Acoustic-optic ultrasonic devices using germanium containing chalcogenide glasses |
| EP0644829B1 (en) * | 1992-06-11 | 1997-10-22 | Zed Instruments Limited | Engraving head |
| JP3323548B2 (ja) | 1992-09-07 | 2002-09-09 | レーザーテック株式会社 | ビーム偏向装置 |
| TW245669B (enExample) | 1993-09-27 | 1995-04-21 | Mitsubishi Electric Machine | |
| DE69733529T2 (de) * | 1996-10-30 | 2006-05-11 | Fuji Photo Film Co., Ltd., Minami-Ashigara | Gerät und Verfahren zum mehrstrahligen Abtasten einer Innenfläche |
| JP3253548B2 (ja) | 1997-01-24 | 2002-02-04 | 有限会社祥起金型 | 道路標識ポール |
| US6236507B1 (en) * | 1998-04-17 | 2001-05-22 | Zygo Corporation | Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components |
| JP3870693B2 (ja) * | 2000-11-28 | 2007-01-24 | 三菱電機株式会社 | レーザ加工機 |
| US6885807B2 (en) * | 2001-03-14 | 2005-04-26 | Nuonics, Inc. | High speed fiber-optic attenuation modules |
| EP1461602A4 (en) | 2001-11-28 | 2011-09-14 | James W Overbeck | GRID MICROSCOPY, FLUORESCENT RECOGNITION AND LASER BEAM POSITIONING |
| JP2003329956A (ja) * | 2002-05-14 | 2003-11-19 | Fuji Photo Film Co Ltd | 画像露光装置 |
| US7039079B2 (en) | 2003-03-14 | 2006-05-02 | Coherent, Inc. | Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement |
| WO2005026810A2 (en) | 2003-09-10 | 2005-03-24 | Zetetic Institute | Catoptric and catadioptric imaging systems with adaptive catoptric surfaces |
| JP2006053438A (ja) * | 2004-08-13 | 2006-02-23 | Fuji Photo Film Co Ltd | 走査露光装置 |
| US7423727B2 (en) | 2005-01-25 | 2008-09-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7279721B2 (en) | 2005-04-13 | 2007-10-09 | Applied Materials, Inc. | Dual wavelength thermal flux laser anneal |
| US7667888B2 (en) * | 2007-04-06 | 2010-02-23 | Harris Corporation | Low cost system and method that implements acousto-optic (AO) RF signal excitation |
| JP2009181689A (ja) * | 2008-01-30 | 2009-08-13 | Jds Uniphase Corp | 2ミラー位相シフタを有する光ピックアップ・ユニット |
| HU0800781D0 (en) * | 2008-12-31 | 2009-03-02 | Femtonics Kft | Focusing system comprising acousto-optic deflectors for focusing an electromagnetic beam |
| CN101738815B (zh) * | 2009-12-03 | 2012-05-09 | 深圳先进技术研究院 | 激光三维扫描装置和激光三维扫描方法 |
| JP2012253092A (ja) * | 2011-05-31 | 2012-12-20 | Mitsubishi Electric Corp | 固体レーザ発振器 |
| JP2013172100A (ja) | 2012-02-22 | 2013-09-02 | Mitsubishi Electric Corp | レーザ装置の調整方法およびレーザ装置の製造方法 |
| CN103676126A (zh) * | 2013-12-20 | 2014-03-26 | 同济大学 | 一种光镊操作仪 |
| CN103730826A (zh) * | 2014-01-04 | 2014-04-16 | 天津奇谱光电技术有限公司 | 一种可调谐激光器系统 |
| US20150338718A1 (en) | 2014-05-22 | 2015-11-26 | Intel Corporation | Acousto-optic deflector with multiple transducers for optical beam steering |
| NL2016543A (en) * | 2015-04-16 | 2016-10-19 | Asml Holding Nv | Method and apparatus for optical fiber connection. |
-
2018
- 2018-09-20 KR KR1020207006324A patent/KR102617769B1/ko active Active
- 2018-09-20 EP EP18858748.9A patent/EP3673315B1/en active Active
- 2018-09-20 JP JP2020515659A patent/JP7360384B2/ja active Active
- 2018-09-20 CN CN201880055941.1A patent/CN111133361B/zh active Active
- 2018-09-20 CN CN202210584764.4A patent/CN114755868A/zh active Pending
- 2018-09-20 WO PCT/US2018/052018 patent/WO2019060590A1/en not_active Ceased
- 2018-09-20 SG SG11202001217RA patent/SG11202001217RA/en unknown
- 2018-09-20 US US16/636,605 patent/US11705686B2/en active Active
- 2018-09-21 TW TW111134346A patent/TWI894485B/zh active
- 2018-09-21 TW TW107133424A patent/TWI779100B/zh active
-
2023
- 2023-05-31 US US18/326,463 patent/US12381369B2/en active Active
-
2025
- 2025-07-10 US US19/265,229 patent/US20250343388A1/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050270630A1 (en) * | 2004-06-07 | 2005-12-08 | Jay Johnson | AOM modulation techniques employing plurality of transducers to improve laser system performance |
| TW200916876A (en) * | 2007-04-06 | 2009-04-16 | Harris Corp | RF phase modulation technique for performing acousto-optic intensity modulation of an optical wavefront |
| US20130010349A1 (en) * | 2011-07-05 | 2013-01-10 | Gsi Group Corporation | Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use |
| CN106102982A (zh) * | 2014-01-15 | 2016-11-09 | 弗劳恩霍夫应用研究促进协会 | 用于激光加工表面的加工装置和方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US12381369B2 (en) | 2025-08-05 |
| KR102617769B1 (ko) | 2023-12-27 |
| EP3673315A4 (en) | 2021-05-05 |
| TWI779100B (zh) | 2022-10-01 |
| US20210226406A1 (en) | 2021-07-22 |
| CN114755868A (zh) | 2022-07-15 |
| SG11202001217RA (en) | 2020-03-30 |
| EP3673315A1 (en) | 2020-07-01 |
| US20250343388A1 (en) | 2025-11-06 |
| JP2020534569A (ja) | 2020-11-26 |
| KR20200047558A (ko) | 2020-05-07 |
| CN111133361A (zh) | 2020-05-08 |
| EP3673315B1 (en) | 2025-11-26 |
| JP7360384B2 (ja) | 2023-10-12 |
| WO2019060590A1 (en) | 2019-03-28 |
| US11705686B2 (en) | 2023-07-18 |
| US20230307883A1 (en) | 2023-09-28 |
| CN111133361B (zh) | 2022-06-03 |
| TW202303220A (zh) | 2023-01-16 |
| TW201921025A (zh) | 2019-06-01 |
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