CN114755868A - 具有相位移反射器的声光系统 - Google Patents

具有相位移反射器的声光系统 Download PDF

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Publication number
CN114755868A
CN114755868A CN202210584764.4A CN202210584764A CN114755868A CN 114755868 A CN114755868 A CN 114755868A CN 202210584764 A CN202210584764 A CN 202210584764A CN 114755868 A CN114755868 A CN 114755868A
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China
Prior art keywords
acousto
axis
optic deflector
aod
scan field
Prior art date
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Pending
Application number
CN202210584764.4A
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English (en)
Chinese (zh)
Inventor
詹姆斯·布鲁克伊塞
杰恩·克雷能特
杰瑞德·瑞智特尔
克尔特·伊藤
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Irecto Science Industry Co ltd
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Irecto Science Industry Co ltd
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Application filed by Irecto Science Industry Co ltd filed Critical Irecto Science Industry Co ltd
Publication of CN114755868A publication Critical patent/CN114755868A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/291—Two-dimensional analogue deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/124—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers incorporating phase shifts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/145—Phase conjugate mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/16—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 series; tandem

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Eye Examination Apparatus (AREA)
CN202210584764.4A 2017-09-22 2018-09-20 具有相位移反射器的声光系统 Pending CN114755868A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762562047P 2017-09-22 2017-09-22
US62/562,047 2017-09-22
CN201880055941.1A CN111133361B (zh) 2017-09-22 2018-09-20 具有相位移反射器的声光系统
PCT/US2018/052018 WO2019060590A1 (en) 2017-09-22 2018-09-20 ACOUSTO-OPTICAL SYSTEM WITH REFLECTOR WITH PHASE

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201880055941.1A Division CN111133361B (zh) 2017-09-22 2018-09-20 具有相位移反射器的声光系统

Publications (1)

Publication Number Publication Date
CN114755868A true CN114755868A (zh) 2022-07-15

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CN201880055941.1A Active CN111133361B (zh) 2017-09-22 2018-09-20 具有相位移反射器的声光系统

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US (3) US11705686B2 (enExample)
EP (2) EP4699731A2 (enExample)
JP (1) JP7360384B2 (enExample)
KR (1) KR102617769B1 (enExample)
CN (2) CN114755868A (enExample)
SG (1) SG11202001217RA (enExample)
SI (1) SI3673315T1 (enExample)
TW (3) TWI779100B (enExample)
WO (1) WO2019060590A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI843784B (zh) 2019-01-31 2024-06-01 美商伊雷克托科學工業股份有限公司 雷射加工設備、與設備一起使用的控制器及非暫時性電腦可讀取媒體
KR102903491B1 (ko) 2020-04-20 2025-12-23 삼성디스플레이 주식회사 색변환 패널 및 이를 포함하는 표시 장치, 그리고 그 제조 방법
KR102545519B1 (ko) * 2022-01-03 2023-06-21 (주)오로스 테크놀로지 편광 변조가 최소화된 반사형 광학계 및 이를 구비한 분광 타원계
US20250102878A1 (en) * 2022-01-28 2025-03-27 Electro Scientific Industries, Inc. Germanium aod system with parallel and perpendicular orientations
US20230259001A1 (en) * 2022-02-16 2023-08-17 Quantinuum Llc Fast frequency-tunable optical relay and methods of use
US20250164831A1 (en) * 2022-02-27 2025-05-22 Electro Scientific Industries, Inc. Method and apparatus for thermally stable operation of aods
WO2024211097A1 (en) * 2023-04-07 2024-10-10 Electro Scientific Industries, Inc. System and method for thermally-stable operation of acousto-optic deflector with reduced acoustic transients

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160086A (ja) * 2000-11-28 2002-06-04 Mitsubishi Electric Corp レーザ加工機
US20020136524A1 (en) * 2001-03-14 2002-09-26 Nabeel Agha Riza High speed fiber-optic attenuation modules
CN101160646A (zh) * 2005-04-13 2008-04-09 应用材料公司 双波长热流激光退火
JP2012253092A (ja) * 2011-05-31 2012-12-20 Mitsubishi Electric Corp 固体レーザ発振器

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3671103A (en) * 1970-04-09 1972-06-20 Nippon Telegraph & Telephone Di-lead molybdate ultrasonic light deflector
US3655255A (en) * 1970-07-13 1972-04-11 Bell Telephone Labor Inc Acoustic-optic ultrasonic devices using germanium containing chalcogenide glasses
ATE159457T1 (de) * 1992-06-11 1997-11-15 Zed Instr Ltd Druckkopf
JP3323548B2 (ja) 1992-09-07 2002-09-09 レーザーテック株式会社 ビーム偏向装置
TW245669B (enExample) 1993-09-27 1995-04-21 Mitsubishi Electric Machine
EP1571824B1 (en) * 1996-10-30 2012-10-24 FUJIFILM Corporation Method and apparatus for inner face scanning with multi beams
JP3253548B2 (ja) 1997-01-24 2002-02-04 有限会社祥起金型 道路標識ポール
US6236507B1 (en) * 1998-04-17 2001-05-22 Zygo Corporation Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components
WO2003046613A2 (en) 2001-11-28 2003-06-05 Overbeck James W Scanning microscopy, fluorescence detection, and laser beam positioning
JP2003329956A (ja) * 2002-05-14 2003-11-19 Fuji Photo Film Co Ltd 画像露光装置
US7039079B2 (en) * 2003-03-14 2006-05-02 Coherent, Inc. Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement
TW200523578A (en) 2003-09-10 2005-07-16 Zetetic Inst Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
US7133182B2 (en) * 2004-06-07 2006-11-07 Electro Scientific Industries, Inc. AOM frequency and amplitude modulation techniques for facilitating full beam extinction in laser systems
JP2006053438A (ja) * 2004-08-13 2006-02-23 Fuji Photo Film Co Ltd 走査露光装置
US7423727B2 (en) 2005-01-25 2008-09-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7538929B2 (en) * 2007-04-06 2009-05-26 Harris Corporation RF phase modulation technique for performing acousto-optic intensity modulation of an optical wavefront
US7667888B2 (en) 2007-04-06 2010-02-23 Harris Corporation Low cost system and method that implements acousto-optic (AO) RF signal excitation
JP2009181689A (ja) * 2008-01-30 2009-08-13 Jds Uniphase Corp ２ミラー位相シフタを有する光ピックアップ・ユニット
HU0800781D0 (en) * 2008-12-31 2009-03-02 Femtonics Kft Focusing system comprising acousto-optic deflectors for focusing an electromagnetic beam
CN101738815B (zh) 2009-12-03 2012-05-09 深圳先进技术研究院 激光三维扫描装置和激光三维扫描方法
DE112012002844T5 (de) * 2011-07-05 2014-04-24 Electronic Scientific Industries, Inc. Verfahren zur Laserbearbeitung mit einem thermisch stabilisierten akustooptischen Strahlablenker und thermisch stabilisiertes Hochgeschwindigkeits-Laserbearbeitungssystem
JP2013172100A (ja) 2012-02-22 2013-09-02 Mitsubishi Electric Corp レーザ装置の調整方法およびレーザ装置の製造方法
CN103676126A (zh) * 2013-12-20 2014-03-26 同济大学 一种光镊操作仪
CN103730826A (zh) * 2014-01-04 2014-04-16 天津奇谱光电技术有限公司 一种可调谐激光器系统
DE102014200633B3 (de) * 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
US20150338718A1 (en) 2014-05-22 2015-11-26 Intel Corporation Acousto-optic deflector with multiple transducers for optical beam steering
NL2016543A (en) * 2015-04-16 2016-10-19 Asml Holding Nv Method and apparatus for optical fiber connection.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160086A (ja) * 2000-11-28 2002-06-04 Mitsubishi Electric Corp レーザ加工機
US20020136524A1 (en) * 2001-03-14 2002-09-26 Nabeel Agha Riza High speed fiber-optic attenuation modules
CN101160646A (zh) * 2005-04-13 2008-04-09 应用材料公司 双波长热流激光退火
JP2012253092A (ja) * 2011-05-31 2012-12-20 Mitsubishi Electric Corp 固体レーザ発振器

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Publication number Publication date
EP4699731A2 (en) 2026-02-25
TW202544517A (zh) 2025-11-16
KR102617769B1 (ko) 2023-12-27
US20230307883A1 (en) 2023-09-28
TWI894485B (zh) 2025-08-21
TW202303220A (zh) 2023-01-16
US20210226406A1 (en) 2021-07-22
SI3673315T1 (sl) 2026-02-27
JP2020534569A (ja) 2020-11-26
US12381369B2 (en) 2025-08-05
EP3673315A4 (en) 2021-05-05
TW201921025A (zh) 2019-06-01
WO2019060590A1 (en) 2019-03-28
TWI779100B (zh) 2022-10-01
US11705686B2 (en) 2023-07-18
EP3673315B1 (en) 2025-11-26
CN111133361B (zh) 2022-06-03
US20250343388A1 (en) 2025-11-06
SG11202001217RA (en) 2020-03-30
JP7360384B2 (ja) 2023-10-12
KR20200047558A (ko) 2020-05-07
EP3673315A1 (en) 2020-07-01
CN111133361A (zh) 2020-05-08

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