KR102578294B1 - 코팅된 연성 부품 - Google Patents
코팅된 연성 부품 Download PDFInfo
- Publication number
- KR102578294B1 KR102578294B1 KR1020187014865A KR20187014865A KR102578294B1 KR 102578294 B1 KR102578294 B1 KR 102578294B1 KR 1020187014865 A KR1020187014865 A KR 1020187014865A KR 20187014865 A KR20187014865 A KR 20187014865A KR 102578294 B1 KR102578294 B1 KR 102578294B1
- Authority
- KR
- South Korea
- Prior art keywords
- coating
- flexible
- electronic component
- coated
- molybdenum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000576 coating method Methods 0.000 claims abstract description 151
- 239000011248 coating agent Substances 0.000 claims abstract description 120
- 239000000758 substrate Substances 0.000 claims abstract description 83
- 238000000034 method Methods 0.000 claims abstract description 40
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 claims abstract description 16
- 229910052702 rhenium Inorganic materials 0.000 claims abstract description 16
- 230000008021 deposition Effects 0.000 claims abstract description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 38
- 239000000956 alloy Substances 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 33
- 239000004020 conductor Substances 0.000 claims description 32
- 229910052750 molybdenum Inorganic materials 0.000 claims description 27
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 24
- 239000011733 molybdenum Substances 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 19
- 229910052802 copper Inorganic materials 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 15
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 7
- 238000005240 physical vapour deposition Methods 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 5
- 239000010408 film Substances 0.000 claims description 4
- 239000011888 foil Substances 0.000 claims description 4
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 4
- 239000011707 mineral Substances 0.000 claims description 4
- 239000003870 refractory metal Substances 0.000 abstract description 64
- 239000010410 layer Substances 0.000 description 72
- 229910052721 tungsten Inorganic materials 0.000 description 19
- 229910052804 chromium Inorganic materials 0.000 description 14
- 229910052715 tantalum Inorganic materials 0.000 description 14
- 229910052719 titanium Inorganic materials 0.000 description 14
- 229910052758 niobium Inorganic materials 0.000 description 13
- 239000000203 mixture Substances 0.000 description 12
- 239000000523 sample Substances 0.000 description 11
- 238000009864 tensile test Methods 0.000 description 10
- 238000005477 sputtering target Methods 0.000 description 9
- 238000005336 cracking Methods 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 239000004642 Polyimide Substances 0.000 description 6
- 238000011161 development Methods 0.000 description 6
- 230000018109 developmental process Effects 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000004663 powder metallurgy Methods 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000000879 optical micrograph Methods 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 241001239379 Calophysus macropterus Species 0.000 description 3
- 229910015202 MoCr Inorganic materials 0.000 description 3
- 229910016024 MoTa Inorganic materials 0.000 description 3
- 229910016027 MoTi Inorganic materials 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000635 electron micrograph Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000010970 precious metal Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000013068 control sample Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910021389 graphene Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002751 molybdenum Chemical class 0.000 description 1
- JZLMRQMUNCKZTP-UHFFFAOYSA-N molybdenum tantalum Chemical compound [Mo].[Ta] JZLMRQMUNCKZTP-UHFFFAOYSA-N 0.000 description 1
- 229910021423 nanocrystalline silicon Inorganic materials 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229920006280 packaging film Polymers 0.000 description 1
- 239000012785 packaging film Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000004984 smart glass Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Photovoltaic Devices (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATGM350/2015 | 2015-11-27 | ||
| ATGM350/2015U AT15048U1 (de) | 2015-11-27 | 2015-11-27 | Beschichtetes flexibles Bauteil |
| PCT/AT2016/000094 WO2017087998A1 (de) | 2015-11-27 | 2016-10-24 | Beschichtetes flexibles bauteil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180087267A KR20180087267A (ko) | 2018-08-01 |
| KR102578294B1 true KR102578294B1 (ko) | 2023-09-13 |
Family
ID=57227195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187014865A Active KR102578294B1 (ko) | 2015-11-27 | 2016-10-24 | 코팅된 연성 부품 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP6908223B2 (enrdf_load_stackoverflow) |
| KR (1) | KR102578294B1 (enrdf_load_stackoverflow) |
| CN (1) | CN108292667B (enrdf_load_stackoverflow) |
| AT (1) | AT15048U1 (enrdf_load_stackoverflow) |
| TW (1) | TWI701346B (enrdf_load_stackoverflow) |
| WO (1) | WO2017087998A1 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT15574U3 (de) | 2017-05-11 | 2018-05-15 | Plansee Se | Flexibles Bauteil mit Schichtaufbau mit metallischer Lage |
| WO2020263628A1 (en) | 2019-06-26 | 2020-12-30 | Applied Materials, Inc. | Flexible multi-layered cover lens stacks for foldable displays |
| US11550364B2 (en) * | 2019-11-01 | 2023-01-10 | Motorola Mobility Llc | Flexible display with preformed curvilinear foldable substrate and corresponding electronic devices and methods |
| CN116855888A (zh) * | 2023-07-25 | 2023-10-10 | 北京师范大学 | 一种柔性高熵合金涂层及其制备方法和应用 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001174613A (ja) * | 1999-12-21 | 2001-06-29 | Mitsui Chemicals Inc | 反射部材 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4228405B2 (ja) * | 1998-01-22 | 2009-02-25 | 東洋紡績株式会社 | 金属薄膜積層フィルムおよび該フィルムを用いたフレキシブルプリント配線板 |
| JP4197206B2 (ja) * | 1998-12-25 | 2008-12-17 | シャープ株式会社 | 積層金属配線及び薄膜トランジスタ基板、並びにそれらの製造方法 |
| JP2003099917A (ja) * | 2001-09-21 | 2003-04-04 | Fuji Photo Film Co Ltd | 磁気記録媒体 |
| US20030134151A1 (en) * | 2001-09-14 | 2003-07-17 | Fuji Photo Film Co., Ltd. | Magnetic recording medium |
| ES2402364T3 (es) * | 2006-01-27 | 2013-05-03 | European Central Bank | Medios de seguridad electrónicos para documentos de seguridad que utilizan un generador de energía termoeléctrica |
| AT11941U1 (de) | 2010-02-12 | 2011-07-15 | Plansee Metall Gmbh | Berührungssensoranordnung |
| KR20130082234A (ko) * | 2012-01-11 | 2013-07-19 | 도레이첨단소재 주식회사 | 자성체를 포함하는 플렉시블 기판 및 이를 사용한 플렉시블 디스플레이의 제조방법 |
| JP5685558B2 (ja) * | 2012-04-19 | 2015-03-18 | 株式会社東芝 | 表示装置 |
| US9121100B2 (en) | 2012-12-14 | 2015-09-01 | Intermolecular, Inc. | Silver based conductive layer for flexible electronics |
| US9299472B2 (en) * | 2013-06-06 | 2016-03-29 | H.C. Starck Inc. | Copper-alloy barrier layers for metallization in thin-film transistors and flat panel displays |
| US20150014663A1 (en) * | 2013-07-11 | 2015-01-15 | Korea Institute Of Science And Technology | Organic light emitting display apparatus and the method for manufacturing the same |
-
2015
- 2015-11-27 AT ATGM350/2015U patent/AT15048U1/de unknown
-
2016
- 2016-10-13 TW TW105133024A patent/TWI701346B/zh active
- 2016-10-24 WO PCT/AT2016/000094 patent/WO2017087998A1/de active Application Filing
- 2016-10-24 KR KR1020187014865A patent/KR102578294B1/ko active Active
- 2016-10-24 JP JP2018527118A patent/JP6908223B2/ja active Active
- 2016-10-24 CN CN201680069437.8A patent/CN108292667B/zh active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001174613A (ja) * | 1999-12-21 | 2001-06-29 | Mitsui Chemicals Inc | 反射部材 |
Also Published As
| Publication number | Publication date |
|---|---|
| AT15048U1 (de) | 2016-11-15 |
| CN108292667A (zh) | 2018-07-17 |
| CN108292667B (zh) | 2022-06-14 |
| TWI701346B (zh) | 2020-08-11 |
| KR20180087267A (ko) | 2018-08-01 |
| TW201728766A (zh) | 2017-08-16 |
| WO2017087998A1 (de) | 2017-06-01 |
| JP2018538571A (ja) | 2018-12-27 |
| JP6908223B2 (ja) | 2021-07-21 |
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Patent event date: 20180525 Patent event code: PA01051R01D Comment text: International Patent Application |
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Comment text: Notification of reason for refusal Patent event date: 20230327 Patent event code: PE09021S01D |
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