KR102535626B1 - 이송 설비, 이송 방법 - Google Patents

이송 설비, 이송 방법 Download PDF

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Publication number
KR102535626B1
KR102535626B1 KR1020180141463A KR20180141463A KR102535626B1 KR 102535626 B1 KR102535626 B1 KR 102535626B1 KR 1020180141463 A KR1020180141463 A KR 1020180141463A KR 20180141463 A KR20180141463 A KR 20180141463A KR 102535626 B1 KR102535626 B1 KR 102535626B1
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KR
South Korea
Prior art keywords
cassette
fork
article
transfer
unit
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KR1020180141463A
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English (en)
Korean (ko)
Other versions
KR20190072407A (ko
Inventor
히로시 사카타
Original Assignee
가부시키가이샤 다이후쿠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 가부시키가이샤 다이후쿠 filed Critical 가부시키가이샤 다이후쿠
Publication of KR20190072407A publication Critical patent/KR20190072407A/ko
Application granted granted Critical
Publication of KR102535626B1 publication Critical patent/KR102535626B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020180141463A 2017-12-15 2018-11-16 이송 설비, 이송 방법 KR102535626B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017240108A JP6794976B2 (ja) 2017-12-15 2017-12-15 移載設備、移載方法
JPJP-P-2017-240108 2017-12-15

Publications (2)

Publication Number Publication Date
KR20190072407A KR20190072407A (ko) 2019-06-25
KR102535626B1 true KR102535626B1 (ko) 2023-05-23

Family

ID=66984538

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180141463A KR102535626B1 (ko) 2017-12-15 2018-11-16 이송 설비, 이송 방법

Country Status (4)

Country Link
JP (1) JP6794976B2 (zh)
KR (1) KR102535626B1 (zh)
CN (1) CN109928188B (zh)
TW (1) TWI756449B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117401417B (zh) * 2023-12-01 2024-03-22 济南诺洁清洁用品有限公司 一种洗衣粉生产用输送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073946A (ja) 2004-09-06 2006-03-16 Fuji Mach Mfg Co Ltd ガラス基板供給装置
JP2015063351A (ja) 2013-09-24 2015-04-09 村田機械株式会社 搬送装置及び移動装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3608950B2 (ja) * 1998-06-26 2005-01-12 村田機械株式会社 無人搬送車
JP2001002213A (ja) * 1999-06-18 2001-01-09 Hirata Corp フローティングユニット及び位置決め装置
JP4039157B2 (ja) * 2002-07-22 2008-01-30 株式会社ダイフク 自走台車
TWI228098B (en) * 2003-04-30 2005-02-21 Chunghwa Picture Tubes Ltd Manual guided vehicle capable of working on a rail
JP4239748B2 (ja) * 2003-08-08 2009-03-18 アシスト テクノロジーズ ジャパン株式会社 搬送装置
KR100999383B1 (ko) * 2005-08-16 2010-12-09 가부시키가이샤 다이후쿠 플로팅 유닛 및 이 플로팅 유닛을 구비한 물품 지지 장치
JP4614091B2 (ja) * 2005-08-16 2011-01-19 株式会社ダイフク フローティングユニット及び物品支持装置
JP4518269B2 (ja) * 2006-03-13 2010-08-04 株式会社ダイフク 荷位置決め装置
JP4949091B2 (ja) * 2007-03-16 2012-06-06 東京エレクトロン株式会社 基板処理装置、基板処理方法および記録媒体
JP2009038326A (ja) * 2007-08-06 2009-02-19 Yaskawa Electric Corp カセットフローティングステージおよびこれを用いたカセットステーション
JP5090269B2 (ja) * 2008-06-25 2012-12-05 台湾大福高科技設備股▲分▼有限公司 基板収納容器
KR101077566B1 (ko) * 2008-08-20 2011-10-28 세메스 주식회사 기판 처리장치 및 이의 기판 이송 방법
JP5287227B2 (ja) * 2008-12-25 2013-09-11 村田機械株式会社 搬送台車
TWI363732B (en) * 2009-01-23 2012-05-11 Au Optronics Corp Object conveying device and method therefor
JP2010239115A (ja) * 2009-03-10 2010-10-21 Hitachi Kokusai Electric Inc 基板処理装置
KR101511963B1 (ko) * 2013-09-16 2015-04-14 주식회사 에스에프에이 카세트 공급시스템

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073946A (ja) 2004-09-06 2006-03-16 Fuji Mach Mfg Co Ltd ガラス基板供給装置
JP2015063351A (ja) 2013-09-24 2015-04-09 村田機械株式会社 搬送装置及び移動装置

Also Published As

Publication number Publication date
TWI756449B (zh) 2022-03-01
CN109928188A (zh) 2019-06-25
JP6794976B2 (ja) 2020-12-02
TW201927667A (zh) 2019-07-16
JP2019106517A (ja) 2019-06-27
CN109928188B (zh) 2021-11-16
KR20190072407A (ko) 2019-06-25

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