KR102528351B1 - 진공장치용 전열판 및 그의 제조방법 - Google Patents

진공장치용 전열판 및 그의 제조방법 Download PDF

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Publication number
KR102528351B1
KR102528351B1 KR1020180057553A KR20180057553A KR102528351B1 KR 102528351 B1 KR102528351 B1 KR 102528351B1 KR 1020180057553 A KR1020180057553 A KR 1020180057553A KR 20180057553 A KR20180057553 A KR 20180057553A KR 102528351 B1 KR102528351 B1 KR 102528351B1
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KR
South Korea
Prior art keywords
heat transfer
base member
plug member
groove
transfer plate
Prior art date
Application number
KR1020180057553A
Other languages
English (en)
Korean (ko)
Other versions
KR20180127925A (ko
Inventor
히데노리 구와타
Original Assignee
가부시키가이샤 유에이씨제이 츄탄
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 유에이씨제이 츄탄 filed Critical 가부시키가이샤 유에이씨제이 츄탄
Publication of KR20180127925A publication Critical patent/KR20180127925A/ko
Application granted granted Critical
Publication of KR102528351B1 publication Critical patent/KR102528351B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
    • B21K25/00—Uniting components to form integral members, e.g. turbine wheels and shafts, caulks with inserts, with or without shaping of the components
    • B21K25/005—Uniting components to form integral members, e.g. turbine wheels and shafts, caulks with inserts, with or without shaping of the components by friction heat forging
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023—Thermo-compression bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Forging (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
KR1020180057553A 2017-05-22 2018-05-21 진공장치용 전열판 및 그의 제조방법 KR102528351B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2017-100563 2017-05-22
JP2017100563A JP6948832B2 (ja) 2017-05-22 2017-05-22 真空装置用伝熱板及びその製造方法

Publications (2)

Publication Number Publication Date
KR20180127925A KR20180127925A (ko) 2018-11-30
KR102528351B1 true KR102528351B1 (ko) 2023-05-02

Family

ID=64499799

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180057553A KR102528351B1 (ko) 2017-05-22 2018-05-21 진공장치용 전열판 및 그의 제조방법

Country Status (4)

Country Link
JP (1) JP6948832B2 (ja)
KR (1) KR102528351B1 (ja)
CN (1) CN108955325B (ja)
TW (1) TWI761516B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112427799B (zh) * 2020-11-16 2022-08-26 中国电子科技集团公司第十四研究所 一种大尺寸高厚度铝合金面板的搅拌摩擦焊制造方法
JP7457760B2 (ja) 2022-07-29 2024-03-28 株式会社Ｕａｃｊ鋳鍛 伝熱板

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015080787A (ja) 2013-10-21 2015-04-27 日本軽金属株式会社 伝熱板の製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10160367A (ja) * 1996-12-02 1998-06-19 Hitachi Ltd 平板状ヒートパイプ及びそれを用いた電子装置
JP4312339B2 (ja) * 2000-02-24 2009-08-12 ナブテスコ株式会社 蛇行通路付熱伝達装置
JP4806179B2 (ja) * 2004-10-08 2011-11-02 古河スカイ株式会社 ヒータプレートの製造方法
KR101164186B1 (ko) * 2004-10-08 2012-07-10 후루카와 스카이 가부시키가이샤 히터 플레이트 및 히터 플레이트 제조방법
JP4868737B2 (ja) 2004-12-17 2012-02-01 古河スカイ株式会社 ヒータプレート及びヒータプレートの製造方法
CN100590377C (zh) * 2005-02-18 2010-02-17 阳傑科技股份有限公司 热管冷却系统及其热传递连接器
US20090294105A1 (en) * 2005-03-22 2009-12-03 Bharat Heavy Electricals Limited Selectively Grooved Cold Plate for Electronics Cooling
JP4852897B2 (ja) * 2005-06-07 2012-01-11 日立電線株式会社 冷却板
US20090071406A1 (en) * 2007-09-19 2009-03-19 Soo Young Choi Cooled backing plate
JP5195098B2 (ja) 2008-07-10 2013-05-08 日本軽金属株式会社 伝熱板の製造方法
JP5023020B2 (ja) * 2008-08-26 2012-09-12 株式会社豊田自動織機 液冷式冷却装置
JP2010284693A (ja) * 2009-06-12 2010-12-24 Mitsubishi Heavy Ind Ltd 冷却板およびその製造方法
US9410746B2 (en) * 2013-03-20 2016-08-09 Basf Se Temperature-regulating element
CN104308501B (zh) * 2014-09-30 2017-12-22 上海电机学院 笔记本电脑面板上铜套固定的方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015080787A (ja) 2013-10-21 2015-04-27 日本軽金属株式会社 伝熱板の製造方法

Also Published As

Publication number Publication date
TWI761516B (zh) 2022-04-21
CN108955325A (zh) 2018-12-07
KR20180127925A (ko) 2018-11-30
JP2018194273A (ja) 2018-12-06
JP6948832B2 (ja) 2021-10-13
TW201902295A (zh) 2019-01-01
CN108955325B (zh) 2021-08-31

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