KR102528351B1 - Heat transfer plate for vacuum unit and method for manufacturing the same - Google Patents

Abstract

The present invention relates to a heat transfer plate for a vacuum device used in a process of forming various thin films such as electrode films on substrate glass of panel displays such as LCDs and OLEDs. The heat transfer plate for a vacuum device of the present invention is composed of a base member made of an aluminum alloy plate material having a passage groove for forming a heat transfer medium passage, and a plug member made of an aluminum alloy plate material serving as a cover for the passage groove of the base member. In addition, misalignment prevention knuckles wider than the width of the passage groove are provided on the base member and the plug member. The heat transfer medium passage is formed by fitting the plug member into the passage groove of the base member. When depressurizing the plug member to the base member, the welding method is applied.

Description

Heat transfer plate for vacuum unit and manufacturing method thereof {Heat transfer plate for vacuum unit and method for manufacturing the same}

The present invention relates to a heat transfer plate for a vacuum apparatus made of an aluminum alloy plate material and having a heat transfer medium passage through which a heat transfer medium flows. Further, as a method of manufacturing the heat transfer plate for a vacuum device, it relates to a method of forming a heat transfer medium flow path that ensures high vacuum sealing properties.

BACKGROUND OF THE INVENTION In manufacturing liquid crystal panel displays (LCDs) and organic electroluminescent displays (OLEDs), there is a process of forming various thin films such as electrode films and coating films on substrate glass. In the film formation process of this thin film, a heat transfer plate is used to control the temperature of the substrate. The structure of the heat transfer plate has various shapes depending on the purpose. The heat transfer plate used for LCD or OLED is a heat transfer plate made of an aluminum alloy plate material of a size suitable for the glass substrate from the viewpoint of securing the temperature uniformity of the glass substrate. there is.

A heat transfer plate made of an aluminum alloy plate material has a heat transfer medium flow path installed therein, and the size and shape of the heat transfer medium flow path are appropriately designed according to the object. A heat transfer plate having such a heat transfer medium flow path is composed of an aluminum alloy plate (base member) provided with a groove considering a target heat transfer medium flow path in advance and a cover (plug member) of the heat transfer medium flow path groove. Then, a sealed heat transfer medium passage is formed by bonding the plug member to the base member. In addition, the reason why it is sealed here is that the heat transfer plate used in film formation of the above-described LCD or the like is used in a high vacuum environment in a vacuum apparatus, and thus airtightness is required.

Looking at the detailed configuration of a heat transfer plate made of an aluminum alloy plate and its manufacturing process, for example, in Patent Document 1, a concave groove is provided in a base member, a tube for a heat medium is inserted into it, and a cover plate (plug member) is formed. It is joined to the base member by welding. In addition, it is a heat transfer material in which plastic flow material is introduced by frictional heat caused by rotary sealing along the concave groove. In addition, in the case of the heater plate of patent document 2, it consists of a pair of aluminum alloy members, and the heater circuit is arrange|positioned in the whole heater plate inside. Grooves are provided as fittings for bonding on both surfaces of the outer circumferential portion of the heater plate and the entire circumference of the heater circuit. Moreover, a plurality of fitting parts for reinforcement are provided.

Japanese Patent Laid-Open No. 2010-17739 Japanese Patent Laid-Open No. 2006-172970

In all of the heat transfer plates described in Patent Literatures 1 and 2, an independent member as a heat transfer medium flow path, such as a refrigerant tube or a heater circuit, is disposed in the base member. The heat transfer effect is ensured by bringing the heat transfer medium flow path into close contact with the base member and the cover member. In this way, if a tube for a refrigerant or a pipe such as a heater circuit is used as a heat transfer medium passage, costs are naturally incurred for the member, which increases the cost of the entire heat transfer plate.

In addition, in this type of heat transfer plate, there has recently been a tendency to reduce the thickness of the member in order to reduce material cost. Reducing the thickness of the member is useful for heat transfer, but a decrease in strength is unavoidable. In addition, when a conventional heat transfer plate supplying a heat transfer medium passage in the form of a pipe is inserted into a groove installed in a base member while keeping the pipe in close contact, the shape of the groove of the base member may be deformed. In the conventional heat transfer plate, it is impossible to set a clearance greater than necessary between the pipe and the groove because the heat exchange efficiency is reduced unless the pipe, the base member and the cover member surrounding the pipe are in close contact. For this reason, there is a risk of member deformation due to thermal expansion and contraction when the piping is inserted or during use.

Further, the heat transfer plate described in Patent Literature 1 is manufactured by arranging a tube for a refrigerant on a base member, arranging a lid, welding, and then performing bonding by friction stirring. However, since the thickness of the base member and the plug member is also reduced as the thickness of the heat transfer plate is reduced, deformation of the member is likely to occur due to heating at the time of bonding. When deformation occurs in the member, airtightness is not secured due to poor bonding, and refrigerant leakage occurs. As a result, not only the function as a heat transfer plate cannot be exhibited, but also the vacuum atmosphere may be destroyed and the film forming process may be hindered.

The present invention has been made under the above background, and provides a heat transfer plate for vacuum use made of an aluminum alloy plate material, which can reduce the cost by reducing the number of members and suppress deformation during manufacturing due to thinning at the same time. do. In addition, consideration is also given to the airtightness of the heat transfer medium flow path, and a heat transfer plate is provided that does not leak the heat transfer medium and does not break the vacuum atmosphere during use. And a preferable method as a manufacturing method of the said heat exchanger plate is also provided.

In order to solve the above problems, the inventors of the present invention conducted extensive studies to form a heat transfer medium flow path without using piping and at the same time studied means for suppressing leakage of the heat transfer medium even in the case of a flow path without using piping. In this study, the present inventors manufactured two members made of aluminum alloy, that is, a base member for forming a heat transfer medium flow path, and a plug member installed on the base member to cover a groove along the heat transfer medium flow path. . Then, a plug member was fitted to the groove of the base member so as to ensure airtightness, and the heat transfer plate was manufactured by using the groove as it is as a heat transfer medium flow path. In addition, below, the shape of the flow path formed by the heat transfer medium flow path may be referred to as a groove pattern.

In this way, when the heat transfer medium passage is formed by combining the groove of the base member and the plug member, it is important to secure adhesion when joining the two members in order to secure the airtightness of the passage. Here, in the present invention, as a bonding method between the base member and the plug member to ensure airtightness, a forge welding method of heating and pressing the two members as described later was adopted.

Here, it is necessary to consider the thermal expansion difference between the base member and the plug member in joining involving heating such as the forging welding method. In this regard, it is common that the volume of the base member and the volume of the plug member differ greatly. In the base member in which the heat transfer medium flow path is provided, it is necessary to provide a depth for forming the heat transfer medium flow path and a thickness capable of withstanding the pressure of the heat transfer medium, so that the difference in volume between the base member and the plug member becomes larger. can do.

The difference in volume between the base member and the plug member generates a difference in heat storage during heating, resulting in deformation due to a difference in thermal expansion. In the case of joining the concave portion, which is the groove of the base member, and the plug member (convex portion) to be the cover material, simply inserting the plug member having the same shape as the groove pattern prevents the plug member from being displaced due to deformation due to the difference in thermal expansion. , the possibility of not being fixed or connected in the position as designed increases. This shift becomes more conspicuous as the size of the member increases or the difference in volume between the base member and the plug member increases.

Accordingly, the inventors of the present invention have additionally investigated, and when fitting and joining a plug member having a volume difference to a base member, in order to prevent misalignment due to deformation, a joint for preventing misalignment is partially set for the base member and the plug member. did

That is, the present invention is composed of a base member made of an aluminum alloy plate material having a passage groove for forming a heat transfer medium passage, and a plug member made of an aluminum alloy plate material serving as a cover of the passage groove of the base member, the plug member A heat transfer plate for a vacuum device having a heat transfer medium flow path formed by fitting into the flow path groove, wherein misalignment-preventing sections wider than the width of the flow path groove are provided on the base member and the plug member, It is a heat transfer plate for a vacuum device, characterized in that there is.

In addition, the method of manufacturing a heat transfer plate for a vacuum device of the present invention includes a step of fitting the plug member to the base member by a welding method in which the base member and the plug member are heated in the range of 250 ° C. to 400 ° C. and pressurized.

In the aluminum alloy heat transfer plate of the present invention, the heat transfer medium flow path is formed by a combination of the flow path groove of the base member and the plug member, excluding piping used as a heat transfer medium flow path applied in the prior art. As a result, in addition to reducing the cost of the heat transfer plate, deformation of the base member during manufacturing and leakage of the heat transfer medium from the pipe can be suppressed. Further, in the present invention, a misalignment prevention knurl is appropriately set in the flow path to suppress the displacement between the plug member and the base member in the manufacturing process. In addition, a heat transfer plate having excellent airtightness can be manufactured.

1 is a view showing a specific example of the heat transfer plate of the present invention.
2 is a diagram showing a specific example of the heat transfer plate of the present invention.
Fig. 3 is a diagram for explaining an example of a specific form of a slip-preventing knuckle.
4 is a view explaining the appearance of the base member of the heat exchanger plate manufactured in this embodiment.
Fig. 5 is a view explaining the external appearance of the plug member of the heat exchanger plate manufactured in this embodiment.
6 is a diagram showing an example of a cross section judged as passing in cross section observation of a heat exchanger plate manufactured in the present embodiment.

Below, a heat transfer plate for a vacuum device made of an aluminum alloy plate material and a manufacturing method thereof will be described in detail. In the following description, first, the configuration of the heat transfer plate for a vacuum apparatus according to the present invention will be described.

The present invention is composed of two members made of an aluminum alloy plate, that is, a base member formed with a passage groove for a heat transfer medium passage and a plug member having a shape along the groove pattern. In addition, a heat transfer medium flow path is formed by fitting and bonding a plug member to the flow path groove of the base member to constitute a heat transfer plate. In the present invention, a pipe for distributing a heat transfer medium such as a refrigerant is eliminated, and the flow path groove of the base member is used as a heat transfer medium flow path as it is. In this way, by not using piping, the number of members can be reduced and the cost of the heat transfer plate can be reduced. In addition, there is no concern about deformation of the groove shape when driving the pipe into the base member or leakage of the heat transfer medium from the pipe, which may occur in the prior art. In addition, if the pipe is abolished and the passage groove of the base member is used as a heat transfer medium passage, the heat transfer effect is improved and deformation of the pipe during use and consequent deformation of the heat transfer plate can be suppressed.

Here, each constituent member of the heat transfer plate for a vacuum apparatus according to the present invention will be described. The base member is made of an aluminum alloy plate material, and a flow path groove for forming a heat transfer medium flow path is formed. There is no particular limitation on the planar shape of the entire passage groove for forming the heat transfer medium passage, that is, the groove pattern. In addition, there are no restrictions on the dimensions or cross-sectional shape of the passage groove. The shape and dimensions of the groove pattern are arbitrarily formed depending on the purpose, dimensions, heat capacity for heating (cooling), and the like.

A plug member, which is another member of the heat transfer plate for a vacuum device according to the present invention, is made of an aluminum alloy plate and serves as a cover for a passage groove formed in a base member. The planar shape of the plug member is formed in the same shape as the shape of the groove pattern of the base member, except for a formation portion of a misalignment preventing joint, which will be described later. In addition, the thickness of the plug member is not particularly limited, and the thickness at which pressure resistance and airtightness are ensured is set in consideration of the pressure of the heat transfer medium flowing through the heat transfer medium passage.

Here, as an example of the configuration of the passage groove of the base member, it is preferable to provide a junction groove wider than the passage groove in the vicinity of the surface of the base member. The plug member is also provided with a shape suitable for the joining groove, so that the base member and the plug member are fitted and joined by pressing under a predetermined temperature. Further, in the present invention, the misalignment prevention knurl is set, and the base member has a misalignment preventing groove that is wider than the flow path groove of the base member and has a width substantially equal to that of the misalignment preventing knuckle in a portion corresponding to the misalignment preventing knuckle of the plug member. It is desirable to provide That is, it is preferable that the cross-sectional shape around the passage groove of the base member is stepped (see the cross-sectional view of Fig. 4 showing an embodiment of the present invention). The plug member can be locked while securing a necessary passage by setting the joint groove and the slip prevention groove, and stable joining is possible. In addition, it is preferable that the joint groove is several millimeters (less than 10 millimeters) wider than the width of the passage groove. In addition, the depth of the joint groove is sufficient if it is shallow, and it is preferable that it is substantially the same as the thickness of the plug member.

And, for the base member in which the passage groove having the joint groove and the misalignment prevention groove is formed as described above, the width of the plug member is preferably substantially the same as the width of the passage groove of the base member including the misalignment prevention knurled portion.

The base member and the plug member are joined by heating to a predetermined temperature and then pressurizing. Here, there is a case where a deviation occurs in the heating step due to a volume difference between the base member and the plug member. Accordingly, in the present invention, in order to prevent a misalignment between the groove pattern of the base member and the plug member, a misalignment prevention knurl is provided in the plug member. The misalignment prevention knurl prevents displacement of the plug member due to deformation during heating, and also serves as a positioning function when joining the plug member to the channel groove of the base member.

The misalignment-preventing knurl is a wide area partially set for a plug member originally having the same width. 1 and 2 show specific examples of the heat transfer plate in which the plug member having the slip-preventing knuckle and the base member are combined. The groove pattern of the base member is designed according to the necessary cooling/heating capabilities as described above, and in most cases is composed of long and short passages. In the case of a heat transfer plate having such a flow path, a long flow path and a short flow path are usually arranged such that the heat transfer medium flow path is folded back in the width direction, as shown in FIGS.

Next, the shape of the slip-preventing joint will be described. In the present invention, the following description is merely an example thereof, and a similar shape or the like can satisfy the present invention. Fig. 3 shows a top view and a sectional view of a base member and a plug member joint in the heat transfer plate. As shown in the cross-sectional view of Fig. 3, the width of the plug member serving as a cover for the groove is substantially the same as that of the joint groove slightly wider than the width of the passage groove of the base member. However, with regard to the width of the plug member, it is permissible to make it slightly wider than the joint groove in order to make the joint strong. And, as shown in Fig. 3, the width of the slip-preventing joint is wider than the width of the channel groove.

As can be seen from the top view of FIG. 3, the planar shape of the misalignment prevention node can be set in various shapes, and is not particularly limited. Regarding the planar contours of these misalignment preventing knurls and misalignment preventing grooves, it is preferable to connect the portions where the angle changes with R. This is to prevent deformation of the material due to friction between the base member and the plug member during bonding, or to be prevented from being rolled up due to jamming of the material. The setting of this R shape becomes especially important at the site where the misalignment preventing groove starts from the normal flow path groove (joint groove) (the site connecting the two). As for this R, 20-30 are preferable. If R is less than 20, when the base member and the plug member are joined, friction increases on both sides with R as the vertex, and the R part is pulled in the joining direction, that is, in the groove depth direction, resulting in joint defects such as leaks and channel deformation. . In addition, even if R exceeds 30, the effect is maintained, but in order to reliably prevent slippage, it is preferable to set the upper limit of R to 30.

In addition, it is preferable that the length (length in the longitudinal direction of the passage groove) of the slip-preventing knuckle is long enough to smoothly connect the knuckles to R. In addition, in the case where the joint groove and the misalignment preventing groove are formed in the base member as described above, the width of the misalignment preventing groove, that is, the width of the misalignment preventing knurl is preferably 5 times or more wider than the width of the joining groove. . Further, the width of the slip-preventing groove and the width of the bonding groove refer to the sum of the widths of the grooves provided on both outer sides of the passage groove, respectively. That is, the joining groove width is the difference between the overall width of the joining groove and the width of the passage groove, and the slip-prevention groove width is the difference between the overall width of the shift-preventing groove and the width of the passage groove. In general, it is preferable that the width of the joining groove and the width of the anti-displacement groove are symmetrical with respect to the center of the width of the passage groove.

In addition, since the slip-preventing node contributes to joint strength like the flow path groove and the plug member forming the heat transfer medium flow path of the base member, the oxide film is removed to expose the newly formed surface at the time of bonding. You may install in this widened taper shape.

Regarding the number of installation of the slip-preventing joints, it is based on the shape and length of the heat transfer medium passage, and the slip-prevention joints can be appropriately set while verifying their effectiveness. However, according to the study by the present inventors, if the length of the straight portion exceeds 500 mm in a situation where the misalignment prevention knurl is not provided for the groove pattern having the straight portion, the thermal expansion when the temperature is raised during bonding causes the separation from the base member. There are cases where the plug member is lifted, resulting in poor bonding. Accordingly, it is preferable to set at least one misalignment preventing joint within a length of 500 mm for a groove pattern composed of straight lines, whereby the misalignment preventing effect between the base member and the plug member is preferably exhibited. For example, as shown in Figs. 1 and 2, a slip prevention knurl is provided.

In addition, as for the setting position of the shift-preventing effect within this preferred range of 500 mm in length, it may be set at any position within 500 mm, but when even one slip-preventing knurl is set, the center thereof, that is, the length of the groove pattern is 500 It is preferable to install it in a position that is equal to mm. In the case of providing a plurality of slip-preventing knurls, it is preferable to set them equally with respect to the length of the groove pattern. In addition, one or more slip-prevention knurls may be provided in the portion where the length of the groove pattern is less than 500 mm, but no slip-prevent knurls may be provided. That is, the effect of the present invention can be confirmed if there is one or more slip-preventing nodes within a groove pattern length of 500 mm for a groove pattern in the case of a groove pattern length exceeding 500 mm. What is necessary is just to consider the setting of the misalignment prevention joint in the short part of a flow path groove, taking into consideration the effect, productivity, etc. of processing.

Regarding the heat transfer plate of the present invention described above, the material of the base member and the plug member is not particularly limited as long as it is an aluminum alloy plate. Examples of preferred aluminum alloys include aluminum alloys such as JIS1050, 1100, 3003, 3004, 5052, 5005, 6061, 6063, 7003, and 7N01.

Next, the manufacturing method of the heat exchanger plate for vacuum apparatuses of this invention is demonstrated. In manufacturing the heat transfer plate of the present invention, a welding method is employed in which a base member having a heat transfer medium flow path and a plug member are combined, heated to a predetermined temperature, and joined by pressing.

The connection between the base member and the plug member is performed between a passage groove provided in the base member and a plug member according to the shape of the groove pattern. In the forging method, when a plug member is fitted and joined to a base member, the oxide film is destroyed by friction on the surface of the contact portion of each member, and the new aluminum surface is exposed on the surface, so that the joining proceeds. As specific conditions for the bonding process by welding, the base member and the plug member are heated at 250 ° C. to 500 ° C. in a fitted state, and the interface between the base member and the plug member is pressed at a high pressure higher than the hot deformation resistance. This heating lowers the deformation resistance at the joint surface of the base member and the plug member at the contact surface between the base member and the plug member, making it easier to join the plug member to the base member during subsequent pressing. In this way, a new surface is formed on each bonding surface due to friction when the plug member is pushed into the base member, and metal joining is performed by further pressing each member where the new surface is formed. Here, the reason why the heating temperature is 250° C. to 500° C. is that at a temperature lower than 250° C., the deformation resistance of the joint surface between the base member and the plug member is small, making it difficult to form a new surface, and bonding between the base member and the plug member becomes insufficient. If the temperature exceeds 500 ° C, the deformation resistance becomes too small, and the bonding becomes insufficient due to excessive deformation. The heating temperature is preferably in the range of 300°C to 450°C, more preferably 350°C to 420°C.

When bonding the base member and the plug member, it is preferable to employ a temperature rising rate as fast as possible to improve productivity. However, when the temperature rise rate is high, thermal expansion is significantly observed on the plug member side rather than the base member. This is because the temperature rise of the plug member having a small volume is quick due to the volume difference between the base member and the plug member. Here, since the plug member has a shape along the groove pattern of the channel groove of the base member, that is, a shape close to a linear shape, its expansion can be expressed as a linear expansion. The length change due to linear expansion is obtained by multiplying the original length by the expansion coefficient inherent to each material and the temperature difference. Here, the linear expansion coefficient of the aluminum alloy is 23×10 ^-6 /°C, which is greater than that of other metals such as iron and copper. Further, in the groove pattern having long and short groove lengths as shown in Figs. 1 and 2, the plug member serving as the cover also differs in length and short length. In this case, the change in length due to thermal expansion becomes remarkable in the long part. As a result, a deviation from the groove pattern of the base member occurs at the long portion of the plug member, and there is a risk of lifting from the groove pattern or falling out of the groove pattern. The slip-preventing knuckle is particularly effective for slip-prevention of the elongated portion of the plug member. That is, the misalignment preventing node contributes to securing the quality of misalignment prevention while promoting the productivity of the heat transfer plate by accelerating the heating rate.

Bonding of the base member and the plug member requires heating the two members to the above temperature or pressurizing simultaneously with the heating. This pressing force requires a pressing force sufficient to cause plastic deformation of the plug member inside the base member. That is, the pressing force is derived from the area on which the plug member is subjected to pressure and the hot deformation resistance of the material.

In addition, since an oxide film is usually formed on the surface of an aluminum material in the air, it is preferable to remove the oxide film in advance before joining the base member and the plug member. As a method of removing the oxide film, cleaning of the member by acid/alkali etching is exemplified. By removing the oxide film, the joint strength is further increased at the joint surface between the base member and the plug member, and problems such as refrigerant leakage can be avoided.

In addition, prior to joining the base member and the plug member, pre-work such as positioning of the two members is required, but in the present invention, welding for temporary fixation such as positioning of the two members is unnecessary. In the present invention, positioning is facilitated by the presence of the misalignment-preventing knuckle, and misalignment during heating is suppressed, so welding is unnecessary. Therefore, the present invention can also contribute to reducing the number of steps in manufacturing a heat exchanger plate.

Example

Next, examples that become specific embodiments of the present invention will be described with drawings. In addition, this embodiment is an example of this invention, and is not limited to this.

In this embodiment, a heat transfer plate having a predetermined groove pattern was manufactured and the effect of the slip-preventing knurl was examined. First, a method for manufacturing a heat transfer plate will be described. A passage groove of the groove pattern of FIG. 4 serving as a heat transfer medium passage was formed in the base member, and a plug member having a shape conforming to the groove pattern was prepared. The size of the base member was 1,000 mm in length x 1,000 mm in width x 50 mm in height, and a channel groove having a groove pattern having long and short straight lines as shown in FIG. 4 was formed thereon by cutting. The width of the cross section of this passage groove was 20 mm at the bottom, and the joining groove on the surface side was 6 mm (3 mm on each side) wider than the width of the bottom of the passage groove, forming a stepped shape. Further, in the portion where the slip prevention knurls of the passage groove are provided, slip prevention grooves wider than the width of the passage groove by 30 mm (by 15 mm on each side) were formed. In addition, the thickness (depth) of the joining groove and the slip-preventing groove is 15 mm.

Then, an aluminum alloy of the same material was cut and processed to manufacture a plug member. 5 is a top view and a sectional view thereof. The planar shape of the plug member is the same shape as the groove pattern of the base member. A misalignment preventing joint having a width of 50 mm is formed on the plug member. The width of the plug member and the misalignment-preventing knuckle were the same as those of the joint groove and the misalignment-preventing groove of the base member. The thickness of the plug member is 15 mm. In the slip-preventing knurl, R is formed at a portion where an angle change occurs in the planar outline, and in this embodiment, R at the beginning of the knurl is set to 25 and R at the end of the knurl in the width direction is set to 25. .

In the joining of the base member and the plug member, after positioning the member, the temperature was raised to a set joining temperature, and pressurized with a load of 5,000 tons to fit and join the plug member to the base member. The junction temperature here was set between 200 °C and 500 °C. Further, in this embodiment, several heat transfer plates having different lengths of the straight portions of the heat transfer medium passages were manufactured. In addition, a heat transfer plate having no slip-preventing knurl was also manufactured. And, about the manufactured heat exchanger plate, evaluation was performed by observation of the cross section of the heat transfer medium passage part and a leak test.

(1) Cross section observation

The center section of the longest passage of the heat transfer medium passage was observed, and it was confirmed that the base member and the plug member were joined. After bonding, the observation site was cut out, machined to a mirror finish (Ra 3.2 or less), and observed visually. A state in which there was no gap between the joint surfaces of the base member and the plug member was rated as "○", a gap with some gaps but not connected to the outside was rated as "Δ", and a state that was not completely joined was rated as "x". . For reference, an example of a cross section judged to be pass in the cross section observation after bonding is shown in FIG. 6 .

(2) Leak test

In the leak test, one side of the passage of the completed heat transfer plate circuit was blocked, the other side was connected to a helium leak tester, and He was sprayed from the outer surface in a vacuum state (vacuum spray method) to confirm that there was no He leak. When leak was not confirmed, it was set as pass "○", and when leak was confirmed, it was set as "x".

Table 1 shows the evaluation results after bonding. Tests No.1 to No.4 can be said to be examples of the invention of this application. In these, shift-preventing joints are appropriately set, and the bonding temperature is set within an appropriate range. In the case of these Examples, the cross section observation and leak test were passed. On the other hand, in Test No. 6 (Comparative Example), since the channel length was over 500 mm and no slip-preventing knuckle was provided, bonding defects were observed in cross-section observation, and leakage was confirmed by the leak test. Further, in Test No. 7 (Comparative Example), the bonding temperature was low, and thus the bonding was poor. In addition, No. 5 is out of the scope of the present invention because no shift prevention knurl is set (reference example). Since this heat exchanger plate had a passage length of less than 500 mm, no bonding failure occurred even without providing a slip-preventing joint.

According to the present invention, a heat transfer plate having excellent airtightness of a heat transfer medium passage can be efficiently manufactured at low cost. The present invention is useful as a heat transfer plate applied to vacuum devices used in various film forming processes such as electrode films in the manufacture of LCDs, OLEDs, and the like.

Claims (5)

It consists of a base member made of an aluminum alloy plate material having a passage groove for forming a heat transfer medium passage, and a plug member made of an aluminum alloy plate material serving as a cover of the passage groove of the base member, and the plug member is attached to the base member. A heat transfer plate for a vacuum device having a heat transfer medium flow path formed by fitting,
The plug member is provided with a misalignment preventing joint, which is a wide portion,
The misalignment prevention knurl is wider than a portion of the plug member other than the misalignment prevention knuckle and is wider than the flow path groove;
The base member is provided with a misalignment preventing groove wider than the flow path groove and having the same width as the misalignment preventing joint in a portion of the plug member corresponding to the misalignment preventing joint. heat plate. According to claim 1,
At the same time as having a width wider than the channel groove on the surface of the base member, a joint groove having the same depth as the thickness of the plug member,
The heat transfer plate for a vacuum apparatus, wherein the width of portions other than the misalignment prevention knuckles of the plug member and the mating grooves are the same, and the misalignment prevention grooves and the misalignment prevention knuckles of the plug member have the same width. According to claim 1 or 2,
A heat transfer plate for a vacuum device in which an R of 20 to 30 is formed at an angle changing portion in a planar outline of a slip-preventing joint. A method of manufacturing a heat transfer plate for a vacuum device according to claim 1 or 2,
A method of manufacturing a heat transfer plate for a vacuum device, comprising a step of fitting a plug member to a base member by a welding method in which a base member and a plug member are heated and pressurized in a range of 250°C to 400°C. A method of manufacturing a heat transfer plate for a vacuum device according to claim 3,
A method of manufacturing a heat transfer plate for a vacuum device, comprising a step of fitting a plug member to a base member by a welding method in which a base member and a plug member are heated and pressurized in a range of 250°C to 400°C.

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