KR20180127925A - Heat transfer plate for vacuum unit and method for manufacturing the same - Google Patents

Abstract

The present invention relates to a heat transfer plate for a vacuum unit used in a process of depositing various thin films such as an electrode film or the like on substrate glass such as a panel display or the like such as an LCD or an OLED. According to the present invention, the heat transfer plate for a vacuum unit comprises: a base member formed with an aluminum alloy board having a flow path groove to form a heat transfer medium flow path; and a plug member formed with an aluminum alloy board that becomes a cover of the flow path groove of the base member. Moreover, a dislocation prevention joint having a width wider than that of the flow path groove is installed in the base member and the plug member. The heat transfer medium flow path is formed by fitting the plug member to the flow path groove of the base member. A forge welding method is applied when fitting the plug member to the base member.

Description

Technical Field [0001] The present invention relates to a heat transfer plate for a vacuum device,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat transfer plate for a vacuum apparatus comprising an aluminum alloy sheet material and including a heat transfer medium flow path through which the heat transfer medium flows. The present invention also relates to a method for forming a heat transfer medium flow path ensuring high vacuum sealing performance as a manufacturing method of the heat transfer plate for a vacuum apparatus.

In the production of a liquid crystal panel display (LCD) or an organic EL display (OLED), there is a process of forming various thin films such as an electrode film and a coating film on a substrate glass. In the thin film forming step, a heat transfer plate is used for temperature control of the substrate. In view of securing the temperature uniformity of the substrate glass, a heat transfer plate made of an aluminum alloy sheet having a size matching with the substrate glass is used, and the heat transfer plate used for an LCD or an OLED is used have.

A heat transfer medium flow path is provided in a heat transfer plate made of an aluminum alloy sheet material, and the size and shape of the heat transfer medium flow path are appropriately designed according to the object. The heat transfer plate having such a heat transfer medium flow path is composed of an aluminum alloy plate (base member) provided with grooves in consideration of a target heat transfer medium flow path and a cover (plug member) of the heat transfer medium flow path groove. Then, the plug member is joined to the base member to form a closed heat transfer medium flow path. The reason for this is that the heat transfer plate used in the film formation of the LCD or the like is used under a high vacuum environment in the vacuum apparatus, and airtightness is required accordingly.

A detailed structure of a heat transfer plate made of an aluminum alloy sheet and a manufacturing process thereof will be described. For example, in Patent Document 1, a concave groove is provided in a base member, a tube for heating medium is inserted into the concave groove, And is joined to the base member by welding. Further, it is a heat transfer material in which the plastic flowable material flows into the recessed groove by frictional heat generated by rotation sealing. Further, in the case of the heater plate of Patent Document 2, the heater plate is composed of a pair of aluminum alloy members, and a heater circuit is disposed in the entire heater plate. Grooves are formed as the fitting portions (fitting portions) on both the outer circumference of the heater plate and the entire periphery of the heater circuit. And a plurality of reinforcing fitting portions are provided.

Japanese Patent Application Laid-Open No. 2010-17739 Japanese Patent Application Laid-Open No. 2006-172970

The heat transfer plates described in Patent Documents 1 and 2 all have a separate member as a heat transfer medium flow path, called a refrigerant tube or heater circuit, in the base member. The heat transfer medium flow path is brought into close contact with the base member and the lid member to secure the heat transfer effect. As described above, when a pipe for a refrigerant tube or a heater circuit is used as the heat transfer medium flow path, cost is naturally incurred for the member, thereby increasing the cost of the entire heat transfer plate.

In this type of heat transfer plate, in recent years, the thickness of the member tends to be reduced in order to reduce the material cost. Thinning the member is useful for heat transfer, but the strength surface is inevitably degraded. In a conventional heat transfer plate that supplies the heat transfer medium flow path in the form of a pipe, the groove shape of the base member may be deformed when the pipe is closely inserted into the groove provided in the base member. The heat transfer efficiency of the conventional heat transfer plate is lowered unless the pipe and the base member and the lid member surrounding the pipe are in close contact with each other. Therefore, it is impossible to set a clearance more than necessary between the pipe and the groove. For this reason, there is a risk of deformation of the pipe due to thermal expansion or contraction during use or during use.

The heat transfer plate disclosed in Patent Document 1 is manufactured by disposing a pipe for a refrigerant tube on a base member, disposing a lid, welding, and then joining by friction stir welding. However, since the thickness of the base member and the plug member is reduced by thinning the thickness of the heat transfer plate, deformation of the member is liable to occur due to heating at the time of bonding. If deformation occurs in the member, airtightness is not ensured due to poor bonding, and refrigerant leakage occurs. As a result, not only the function as a heat transfer plate can not be exhibited, but also the vacuum atmosphere may be destroyed, which may interfere with the film formation process.

SUMMARY OF THE INVENTION The present invention has been made under the above circumstances, and it is an object of the present invention to provide a heat transfer plate for vacuum use made of an aluminum alloy plate, which can reduce the number of members and reduce the cost, do. Further, the sealing property of the heat transfer medium flow path is also considered, thereby providing a heat transfer plate free from leakage of the heat transfer medium and without destroying the vacuum atmosphere in use. A preferred method of manufacturing the heat transfer plate is also provided.

Means for Solving the Problems In order to solve the above problems, the inventors of the present invention have conducted extensive studies to form a heat transfer medium flow path without using a pipe, and also investigate a means for suppressing leakage of the heat transfer medium in the case of a flow path not using a pipe. In this study, the inventors of the present invention fabricated two members made of aluminum alloy, namely, a base member for forming the heat transfer medium flow path and a plug member for covering the groove formed in the base member with the heat transfer medium flow path . Then, the plug member was fitted to the groove of the base member so as to secure the airtightness, and the heat transfer plate was manufactured by using the groove as the heat transfer medium flow path. The flow path formed by the heat transfer medium flow path may be referred to as a groove pattern below.

In this manner, when the heat transfer medium flow path is formed by the combination of the groove of the base member and the plug member, it is important to secure the adhesion of the two members in order to ensure the airtightness of the flow path. In the present invention, as a method of joining the base member and the plug member for ensuring airtightness, a forge welding method is employed in which the two members are heated and pressed as described later.

Here, in the case of bonding accompanied by heating such as a single-piece bonding method, it is necessary to consider the difference in thermal expansion between the base member and the plug member. In this respect, it is general that the volume of the base member and the volume of the plug member are greatly different. The base member on which the heat transfer medium flow path is provided needs to have a depth for forming the heat transfer medium flow path and a thickness that can withstand the pressure of the heat transfer medium be provided so that the difference in volume between the base member and the plug member becomes larger can do.

The volume difference between the base member and the plug member generates a difference in the amount of heat accumulated during heating, thereby causing deformation due to a difference in thermal expansion or the like. In the case of joining the concave portion which is the groove of the base member and the plug member (convex portion) which becomes the lid member, only by inserting the plug member having the same shape as the groove pattern, the plug member is displaced by deformation due to the thermal expansion difference , The possibility of not being fixed and bonded at the position as designed increases. This shift becomes remarkable as the size of the member increases and as the volume difference between the base member and the plug member becomes larger.

The inventor of the present invention has further studied to partially set a bar for prevention of deviation from the base member and the plug member in order to prevent displacement due to deformation when the plug member having a volume difference is fitted and joined to the base member Respectively.

That is, the present invention comprises a base member made of an aluminum alloy plate having a flow channel for forming a heat transfer medium flow path, and a plug member made of an aluminum alloy plate to be a cover of the flow channel of the base member, Wherein the base member and the plug member are provided with misalignment-preventing sections that are wider than the width of the flow path groove, wherein the base member and the plug member are provided with heat transfer medium flow paths formed by fitting the heat transfer medium flow paths And a heat transfer plate for a vacuum apparatus.

The method for manufacturing a heat transfer plate for a vacuum device according to the present invention includes a step of fitting the plug member to the base member by a single contact method in which the base member and the plug member are heated to a temperature in the range of 250 캜 to 400 캜 and pressed.

The aluminum alloy heat transfer plate of the present invention abolishes a pipe serving as a heat transfer medium flow path applied in the prior art, and forms a heat transfer medium flow path by combining a flow path of the base member and a plug member. As a result, in addition to cost reduction of the heat transfer plate, deformation of the base member during manufacture and leakage of the heat transfer medium from the pipe can be suppressed. Further, in the present invention, a misalignment prevention node is appropriately set in the flow path, and displacement of the plug member and the base member in the manufacturing process is suppressed. Then, a heat transfer plate having excellent airtightness can be manufactured.

1 is a view showing a specific example of a heat transfer plate of the present invention.
2 is a view showing a specific example of the heat transfer plate of the present invention.
Fig. 3 is a view for explaining an example of a specific form of the anti-misalignment node.
4 is a view for explaining the appearance of the base member of the heat transfer plate manufactured in this embodiment.
5 is a view for explaining the appearance of the plug member of the heat transfer plate manufactured in this embodiment.
Fig. 6 is a view showing an example of a cross-section which is judged to be acceptable in the cross-section observation of the heat transfer plate manufactured in this embodiment.

Hereinafter, a heat transfer plate for a vacuum apparatus comprising the aluminum alloy sheet of the present invention and a method of manufacturing the same will be described in detail. In the following description, the configuration of the heat transfer plate for a vacuum apparatus of the present invention will be described first.

The present invention is composed of two members made of an aluminum alloy sheet, that is, a base member having a flow channel for a heat transfer medium passage, and a plug member having a shape along the groove pattern. Then, the heat transfer medium flow path is formed by joining the plug member to the flow path groove of the base member to form the heat transfer plate. In the present invention, the piping for circulating the heat transfer medium such as the refrigerant is eliminated, and the flow path of the base member is directly used as the heat transfer medium flow path. In this way, the number of members is reduced by not using the piping, and the cost of the heat transfer plate can be reduced. Further, there is no fear of deformation of the groove shape when the pipe is inserted into the base member and leakage of the heat transfer medium from the pipe, which may occur in the related art. In addition, when the piping is removed and the flow path of the base member is directly used as the heat transfer medium flow path, the heat transfer effect is improved, and deformation in the process of using the piping and deformation of the heat transfer plate can be suppressed.

Here, the constituent members of the heat transfer plate for a vacuum apparatus according to the present invention will be described. The base member is made of an aluminum alloy plate, and a flow path groove for forming the heat transfer medium flow path is formed. The planar shape of the entire flow path groove for forming the heat transfer medium flow path, that is, the groove pattern is not particularly limited. In addition, the dimensions and the cross-sectional shape of the flow path groove are not limited. The shape and dimensions of the groove pattern are arbitrarily formed depending on the application, dimensions, heat capacity for heating (cooling), and the like.

The plug member, which is another member of the heat transfer plate for a vacuum device of the present invention, is made of an aluminum alloy plate material and serves as a cover of a flow path groove formed in the base member. The planar shape of the plug member is formed to have the same shape with respect to the groove pattern shape of the base member, except for the formation site of the anti-slip assembly described later. The thickness of the plug member is not particularly limited, and the thickness is set such that the pressure resistance and airtightness are secured in consideration of the pressure of the heat transfer medium flowing through the heat transfer medium passage.

Here, as a constitutional example of the flow channel of the base member, it is preferable to provide a joining groove that is wider than the flow channel groove in the vicinity of the surface of the base member. The plug member is also provided with a shape conforming to the joint groove, so that the base member and the plug member are joined to each other by pressurization under a predetermined temperature. Further, in the present invention, a shift preventing section is set, and the base member is provided with a shift preventing groove having a width larger than that of the flow path of the base member and approximately the same width as the shift preventing section . That is, it is preferable that the cross-sectional shape around the flow path groove of the base member is formed in a stepped shape (see the cross-sectional view of FIG. 4 showing the embodiment of the present invention). It is possible to lock the plug member while securing the required flow passage by setting the joint groove and the displacement preventing groove, and stable joining is possible. Further, it is preferable that the joint groove has a width of several millimeters (10 millimeters or less) with respect to the width of the flow channel. Further, it is sufficient that the depth of the joint groove is shallow, and it is preferable that the depth is approximately the same as the thickness of the plug member.

The width of the plug member is preferably approximately the same as the width of the flow channel of the base member including the shift preventing barrel portion, with respect to the base member having the flow groove having the joining groove and the shift preventing groove as described above.

The joining of the base member and the plug member is performed by heating at a predetermined temperature to be described later and then pressing. Here, there is a case where a deviation occurs in the heating process due to the volume difference between the base member and the plug member. Therefore, in order to prevent the groove pattern of the base member from being displaced from the plug member, the plug member is provided with the anti-slip knob. This anti-slip assembly prevents misalignment of the plug member due to deformation at the time of heating, and also acts to position the plug member when it is joined to the flow channel of the base member.

The anti-misalignment node is essentially a wider portion that is partially set with respect to the plug member having the same width. Fig. 1 and Fig. 2 show specific examples of the heat transfer plate in which the plug member and the base member are combined with each other. The groove pattern of the base member is designed in accordance with the necessary cooling and heating ability as described above. In most cases, the groove pattern is composed of long and short flow paths. In the case of a heat transfer plate having such a flow path, as shown in Figs. 1 and 2, a long flow path and a short flow path are usually arranged such that the heat transfer medium flow path is folded back in the width direction, starting from the heat transfer medium inlet port.

Next, the shape of the anti-misalignment node will be described. The following description is merely an example of the present invention, and the present invention can be satisfied if similar shapes are used. Fig. 3 shows a top view and a cross-sectional view of the base member and the plug member joint portion in the heat transfer plate. As shown in the cross-sectional view of Fig. 3, the width of the plug member serving as the cover of the groove is substantially the same as that of the groove which is slightly wider than the width of the flow channel of the base member. However, regarding the width of the plug member, it is allowed to be slightly wider than the joint groove in order to strengthen the joint. As shown in Fig. 3, the width of the anti-offsetting bar is wider than the width of the flow channel.

The plane shape of the anti-misalignment node can be variously set as shown in the top view of Fig. 3, and is not particularly limited. With respect to the outline in the planar shape of the shift preventing side and the shift preventing groove, it is preferable to connect the portion where the angle changes with R. So as to prevent deformation of the material due to friction between the base member and the plug member at the time of joining or curling due to the engagement of the material. This setting of the R shape is particularly important at a portion where the slip-preventing groove starts (a portion connecting both of them) from a normal flow groove (joint groove). The R is preferably 20 to 30. When R is less than 20, when the base member and the plug member are joined, friction occurs on both sides of R as a vertex, and the R portion is pulled in the joining direction, that is, in the groove depth direction, thereby causing defective joining such as leakage and channel deformation . In addition, even if R exceeds 30, the effect is maintained. In order to surely prevent the shift, it is preferable to set the upper limit of R to 30.

It is preferable that the length (the length in the longitudinal direction of the channel groove) of the planar shape of the anti-slip assembly is a length sufficient to smoothly connect the rod portion to the rod. In the case where the joining groove and the shift preventing groove are formed in the base member as described above, it is preferable that the width of the shift preventing groove, that is, the width of the shift preventing bar is wider than the width of the joining groove by 5 times or more . The width of the displacement preventing groove and the width of the joining groove mean the sum of the widths of the grooves provided on both sides of the flow grooves, respectively. That is, the joint groove width is a difference between the total width of the joint groove and the width of the flow groove, and the shift prevention groove width is the difference between the total width of the shift prevention groove and the width of the flow groove. It is preferable that the normal joining groove width and the misalignment preventing groove width be symmetrical with respect to the center of the groove width.

In addition, since the displacement preventing node contributes to the bonding strength in the same manner as the channel groove and the plug member forming the heat transfer medium flow path of the base member, the oxide film is removed to expose the new surface at the time of bonding, May be provided in a tapered shape.

The number of the displacement preventing bars is determined based on the shape and length of the heat transfer medium flow path. The displacement preventing bar can be appropriately set while verifying the effect. However, according to the study by the present inventors, when the length of the straight portion exceeds 500 mm in the situation where the shift preventing bar is not provided to the groove pattern having the linear portion, the thermal expansion at the time of the bonding increases the There is a case where the plug member is lifted, which may cause a failure in joining. Therefore, it is preferable to set at least one shift prevention node within a length of 500 mm for a straight groove pattern, whereby the effect of preventing the base member from being displaced from the plug member is preferably exhibited. For example, as shown in Fig. 1 and Fig. 2, an anti-slip knot is provided.

The setting position of the deviation preventing effect within the preferable length of 500 mm may be set anywhere within 500 mm. However, if even one discrepancy preventing node is set, the center thereof, that is, groove pattern length 500 It is preferable to install it at a position where it is equalized with respect to mm. When a plurality of discrepancies prevention nodes are provided, it is preferable to set them so as to be equal to the groove pattern length. As for the portion where the groove pattern length is less than 500 mm, one or more discrepancy preventing nodes may be provided, but no discrepancy preventing node may be provided. That is, the effect of the invention can be confirmed if there is at least one discrepancy prevention node within the groove pattern length of 500 mm for the groove pattern when the groove pattern length exceeds 500 mm. The setting of the discontinuity prevention section in a portion where the length of the channel groove is short may be determined in consideration of the effect and productivity such as machining.

With respect to the heat transfer plate of the present invention described above, the material of the base member and the plug member is not particularly limited as long as it is an aluminum alloy plate. Preferred aluminum alloys include aluminum alloys such as JIS 1050, 1100, 3003, 3004, 5052, 5005, 6061, 6063, 7003, 7N01.

Next, a manufacturing method of the heat transfer plate for a vacuum apparatus of the present invention will be described. In the production of the heat transfer plate of the present invention, a single-contact method in which a base member provided with a heat transfer medium flow path and a plug member are combined and heated and pressurized to a predetermined temperature is employed.

The joining of the base member and the plug member is performed between the flow channel formed in the base member and the plug member corresponding to the shape of the groove pattern. In the single-contact method, when the plug member is joined to the base member to join the base member, the oxide film is broken by the friction on the surface of the contact portion of each member, and the aluminum new surface is exposed on the surface to advance the bonding. As specific conditions of the bonding step by this single-step bonding, the base member and the plug member are heated at 250 to 500 占 폚 while being fitted, and the interface between the base member and the plug member is pressurized to a higher pressure than the hot deformation resistance. This heating lowers the deformation resistance on the contact surface between the base member and the plug member on the contact surface between the base member and the plug member, so that the joining at the time of subsequent pressing, that is, the plug member is easily pushed into the base member. Then, as described above, friction occurs when the plug member is pushed into the base member, resulting in a new surface on each of the joined surfaces, and the metal member is further pressed by pressing each of the formed members. If the heating temperature is set to 250 ° C to 500 ° C, if the temperature is lower than 250 ° C, the deformation resistance of the joint surface between the base member and the plug member is small, so that a new surface is difficult to be formed and bonding of the base member and the plug member becomes insufficient. If the temperature exceeds 500 ° C, the deformation resistance becomes excessively small and excessively deformed, resulting in insufficient joining. The heating temperature is preferably in the range of 300 ° C to 450 ° C, more preferably 350 ° C to 420 ° C.

When bonding the base member and the plug member, it is preferable to adopt a rapid heating rate as high as possible to improve the productivity. However, when the heating rate is high, thermal expansion is remarkably observed on the side of the plug member rather than the base member. This is because the volume of the plug member having a small volume increases rapidly from the volume difference between the base member and the plug member. Here, since the plug member has a shape along the groove pattern of the flow path of the base member, that is, a shape close to the linear shape, the expansion can be expressed as linear expansion. The change in length due to linear expansion is obtained by multiplying the expansion coefficient and the temperature difference inherent in each material based on the original length. Here, the coefficient of linear expansion of the aluminum alloy is 23 × 10 ^-6 / ° C., which is larger than the coefficient of linear expansion of other metals such as iron and copper. Also, in the groove pattern having the long and short groove lengths as shown in Figs. 1 and 2, the plug member serving as the lid has a difference between the long and short groove patterns. In such a case, a change in length due to thermal expansion becomes remarkable at a long portion. As a result, there arises a possibility that the long portion of the plug member is displaced from the groove pattern of the base member and lifted from the groove pattern or missing from the groove pattern. The anti-slip assembly is particularly effective for preventing the plug member from being displaced in the long section. In other words, the anti-slip assembly contributes to ensuring the quality of anti-slip while increasing the rate of temperature rise and improving the productivity of the heat transfer plate.

The joining of the base member and the plug member requires pressurization after heating the two members at the above temperature, or simultaneously with heating. This pressing force requires a pressing force such that the plug member causes plastic deformation within the base member. That is, the pressing force is derived from the area where the plug member is subjected to pressure and the hot deformation resistance of the material.

Further, since the aluminum material usually has an oxide film formed on the surface in the atmosphere, it is preferable to remove the oxide film in advance before bonding the base member and the plug member. Examples of the method for removing the oxide film include cleaning the member by acid and alkali etching. This removal of the oxide film increases the bonding strength on the bonding surface between the base member and the plug member, thereby avoiding problems such as refrigerant leakage.

In addition, before the base member and the plug member are joined, a preliminary operation such as positioning of the two members is required. In the present invention, temporary fixing welding such as positioning of the two members is unnecessary. In the present invention, the positioning is facilitated by the presence of the anti-slip bar, and the deviation during heating is also suppressed, so that welding is not required. Therefore, the present invention can contribute to a reduction in the number of steps of manufacturing the heat transfer plate.

Example

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, preferred embodiments of the present invention will be described with reference to the drawings. This embodiment is an example of the present invention, and the present invention is not limited thereto.

In this embodiment, a heat transfer plate having a predetermined groove pattern was manufactured to examine the effect of the anti-slip assembly. First, the manufacturing method of the heat transfer plate will be described. The flow path of the groove pattern of Fig. 4, which serves as the heat transfer medium flow path, was formed in the base member, and a plug member having a shape matched to the groove pattern was prepared. The size of the base member was 1,000 mm in length, 1,000 mm in width, and 50 mm in height, and channel grooves of a groove pattern having a long and short straight line as shown in Fig. 4 were formed by cutting. The sectional dimensions of the channel grooves were 20 mm at the bottom and the joining grooves at the front side were wider than the width of the channel groove bottom by 6 mm (one side by 3 mm) to form a stepped shape. In addition, a portion of the channel groove where the shift preventing section was provided was formed to have a width of 30 mm (15 mm on each side) larger than the width of the channel groove. The thickness (depth) of the joint groove and the shift preventing groove is 15 mm.

Then, an aluminum alloy of the same material was cut to produce a plug member. 5 is a top view and a sectional view thereof. The planar shape of the plug member is the same as the groove pattern of the base member. The plug member is provided with an anti-slip knot having a width of 50 mm. The width of the plug member and the width of the anti-slip bar are the same as those of the joint groove and the anti-slip groove of the base member. The thickness of the plug member is 15 mm. In this embodiment, R is set to 25 at the beginning of the node, and R at the end of the node in the width direction is set to 25 .

After the positioning of the member, the base member and the plug member were heated to a predetermined joining temperature and pressed at a load of 5,000 tons to join the plug member to the base member. Here, the bonding temperature was set at a temperature between 200 ° C and 500 ° C. Further, in this embodiment, several heat transfer plates having different lengths of linear portions of the heat transfer medium flow paths were manufactured. In addition, a heat transfer plate having no dislocation prevention node was also manufactured. Then, the cross-section of the heat transfer medium passage portion and the leakage test were evaluated for the produced heat transfer plate.

(1) Cross section observation

It was confirmed that the base member and the plug member were bonded to each other by observing the center cross section of the longest flow path of the heat transfer medium flow path. After bonding, the observation site was cut out and machined to a mirror finish (Ra 3.2 or less) and observed with naked eyes. A state in which there is no gap between the base member and the plug member is regarded as " Good ", and a case in which there is some gap but not in the outside is designated as " DELTA & . For reference, FIG. 6 shows an example of a section judged to be acceptable in cross section observation after bonding.

(2) Leak test

In the leak test, one side of the flow path of the completed heat transfer plate circuit was closed, the other side was connected to a helium leak tester, and He was sprayed from the outside surface in a vacuum state (vacuum spraying method). When the leakage was not confirmed, the acceptance was " ", and when the leakage was confirmed, the result was " x ".

Table 1 shows the evaluation results after bonding. Test Nos. 1 to 4 are examples of the present invention. These are suitably set in the anti-offsetting barriers, and the bonding temperature is set in an appropriate range. In the case of these embodiments, it was acceptable in the cross-sectional observation and the leak test. On the other hand, in Test No. 6 (Comparative Example), the channel length exceeded 500 mm, and no deflection preventing node was provided. Therefore, a bonding failure was observed in the cross-section observation, and leakage was confirmed by the leak test. Test No. 7 (Comparative Example) had poor bonding because the bonding temperature was low. In addition, No. 5 is outside the scope of the present invention because no discrepancies prevention node is set (reference example). Since the channel length of this heat transfer plate is less than 500 mm, bonding failure did not occur even if the shift preventing bar was not provided.

According to the present invention, a heat transfer plate excellent in airtightness of the heat transfer medium passage can be efficiently manufactured at low cost. INDUSTRIAL APPLICABILITY The present invention is useful as a heat transfer plate applied to a vacuum apparatus used in various film-forming processes such as an electrode film in the manufacture of LCD, OLED and the like.

Claims (4)

A base member made of an aluminum alloy plate having a flow channel for forming a heat transfer medium flow path and a plug member made of an aluminum alloy plate to be a cover of the flow channel of the base member, 1. A heat transfer plate for a vacuum apparatus, comprising:
Wherein the base member and the plug member are provided with a shift preventing section that is wider than the width of the flow path groove. The method according to claim 1,
The channel groove is provided near the surface of the base member with a widening groove that is wider than the channel groove and has a displacement preventing groove that is wider than the channel groove at a portion corresponding to the anti-
Wherein a width of the plug member and a width of the joining groove are substantially the same. 3. The method according to claim 1 or 2,
Wherein an R of 20 to 30 is formed with respect to an angle changing portion in the outline of the flat shape of the anti-rotation preventing bar. A manufacturing method of a heat transfer plate for a vacuum apparatus according to any one of claims 1 to 3,
And a step of fitting the plug member to the base member by heating the base member and the plug member in the range of 250 占 폚 to 400 占 폚 and pressing the base member.

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