KR102483034B1 - 증착 마스크용 케이스 - Google Patents

증착 마스크용 케이스 Download PDF

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Publication number
KR102483034B1
KR102483034B1 KR1020217036099A KR20217036099A KR102483034B1 KR 102483034 B1 KR102483034 B1 KR 102483034B1 KR 1020217036099 A KR1020217036099 A KR 1020217036099A KR 20217036099 A KR20217036099 A KR 20217036099A KR 102483034 B1 KR102483034 B1 KR 102483034B1
Authority
KR
South Korea
Prior art keywords
deposition mask
case
support
cover
deposition
Prior art date
Application number
KR1020217036099A
Other languages
English (en)
Korean (ko)
Other versions
KR20210153075A (ko
Inventor
다카오 마노
다이 이시자카
Original Assignee
도판 인사츠 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도판 인사츠 가부시키가이샤 filed Critical 도판 인사츠 가부시키가이샤
Priority to KR1020227045931A priority Critical patent/KR102645913B1/ko
Publication of KR20210153075A publication Critical patent/KR20210153075A/ko
Application granted granted Critical
Publication of KR102483034B1 publication Critical patent/KR102483034B1/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/025—Containers made of sheet-like material and having a shape to accommodate contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H01L51/00—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Packaging Frangible Articles (AREA)
  • Electroluminescent Light Sources (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Capacitors (AREA)
KR1020217036099A 2019-10-03 2020-10-02 증착 마스크용 케이스 KR102483034B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020227045931A KR102645913B1 (ko) 2019-10-03 2020-10-02 증착 마스크용 케이스

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019183089 2019-10-03
JPJP-P-2019-183089 2019-10-03
PCT/JP2020/037545 WO2021066143A1 (ja) 2019-10-03 2020-10-02 蒸着マスク用ケース

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020227045931A Division KR102645913B1 (ko) 2019-10-03 2020-10-02 증착 마스크용 케이스

Publications (2)

Publication Number Publication Date
KR20210153075A KR20210153075A (ko) 2021-12-16
KR102483034B1 true KR102483034B1 (ko) 2022-12-29

Family

ID=75338151

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020217036099A KR102483034B1 (ko) 2019-10-03 2020-10-02 증착 마스크용 케이스
KR1020227045931A KR102645913B1 (ko) 2019-10-03 2020-10-02 증착 마스크용 케이스

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020227045931A KR102645913B1 (ko) 2019-10-03 2020-10-02 증착 마스크용 케이스

Country Status (5)

Country Link
JP (1) JP6904502B1 (zh)
KR (2) KR102483034B1 (zh)
CN (2) CN213444112U (zh)
TW (1) TWI785393B (zh)
WO (1) WO2021066143A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202325869A (zh) 2021-12-20 2023-07-01 日商大日本印刷股份有限公司 蒸鍍罩捆包體及蒸鍍罩捆包方法
JP2024027053A (ja) * 2022-08-16 2024-02-29 Ｔｏｐｐａｎホールディングス株式会社 蒸着マスク用ケース

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007299566A (ja) * 2006-04-28 2007-11-15 Toppan Printing Co Ltd メタルマスク用収納容器
JP2009078836A (ja) 2007-09-26 2009-04-16 Dainippon Printing Co Ltd 梱包用部材および梱包体
JP2013101188A (ja) 2011-11-07 2013-05-23 Asahi Kasei E-Materials Corp ペリクル収納容器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980020576U (ko) * 1996-10-15 1998-07-15 이규한 X-선 반도체 노광장치용 마스크 보관 및 운반 케이스
JP2003226394A (ja) * 2002-01-31 2003-08-12 Arakawa Jushi:Kk マスクケース
JP2012002918A (ja) * 2010-06-15 2012-01-05 Shin Etsu Polymer Co Ltd 大型精密部材収納容器およびその蓋体
KR102205403B1 (ko) * 2014-10-08 2021-01-21 삼성디스플레이 주식회사 증착용 마스크 포장 용기
JP6320309B2 (ja) * 2015-01-19 2018-05-09 信越化学工業株式会社 ペリクル収納容器
KR20240063164A (ko) * 2016-09-29 2024-05-09 다이니폰 인사츠 가부시키가이샤 증착 마스크 곤포체 및 증착 마스크 곤포 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007299566A (ja) * 2006-04-28 2007-11-15 Toppan Printing Co Ltd メタルマスク用収納容器
JP2009078836A (ja) 2007-09-26 2009-04-16 Dainippon Printing Co Ltd 梱包用部材および梱包体
JP2013101188A (ja) 2011-11-07 2013-05-23 Asahi Kasei E-Materials Corp ペリクル収納容器

Also Published As

Publication number Publication date
KR102645913B1 (ko) 2024-03-11
JP6904502B1 (ja) 2021-07-14
TWI785393B (zh) 2022-12-01
TW202118709A (zh) 2021-05-16
WO2021066143A1 (ja) 2021-04-08
KR20210153075A (ko) 2021-12-16
KR20230008890A (ko) 2023-01-16
CN213444112U (zh) 2021-06-15
CN113840942A (zh) 2021-12-24
JPWO2021066143A1 (ja) 2021-10-21

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