KR102475416B1 - 기판 시트의 에지 프로세싱을 위한 장치 및 방법 - Google Patents

기판 시트의 에지 프로세싱을 위한 장치 및 방법 Download PDF

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Publication number
KR102475416B1
KR102475416B1 KR1020197018851A KR20197018851A KR102475416B1 KR 102475416 B1 KR102475416 B1 KR 102475416B1 KR 1020197018851 A KR1020197018851 A KR 1020197018851A KR 20197018851 A KR20197018851 A KR 20197018851A KR 102475416 B1 KR102475416 B1 KR 102475416B1
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KR
South Korea
Prior art keywords
edge
tubular member
wall segment
finishing member
shroud
Prior art date
Application number
KR1020197018851A
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English (en)
Korean (ko)
Other versions
KR20190082980A (ko
Inventor
제임스 윌리엄 브라운
웨이밍 리
엘리아스 파니데스
Original Assignee
코닝 인코포레이티드
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Application filed by 코닝 인코포레이티드 filed Critical 코닝 인코포레이티드
Publication of KR20190082980A publication Critical patent/KR20190082980A/ko
Application granted granted Critical
Publication of KR102475416B1 publication Critical patent/KR102475416B1/ko

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06Dust extraction equipment on grinding or polishing machines

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
KR1020197018851A 2016-11-29 2017-11-29 기판 시트의 에지 프로세싱을 위한 장치 및 방법 KR102475416B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662427293P 2016-11-29 2016-11-29
US62/427,293 2016-11-29
PCT/US2017/063561 WO2018102327A1 (en) 2016-11-29 2017-11-29 Apparatus and method for edge processing of a substrate sheet

Publications (2)

Publication Number Publication Date
KR20190082980A KR20190082980A (ko) 2019-07-10
KR102475416B1 true KR102475416B1 (ko) 2022-12-07

Family

ID=62241936

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197018851A KR102475416B1 (ko) 2016-11-29 2017-11-29 기판 시트의 에지 프로세싱을 위한 장치 및 방법

Country Status (6)

Country Link
US (1) US20190291232A1 (zh)
JP (2) JP7388925B2 (zh)
KR (1) KR102475416B1 (zh)
CN (1) CN110087830A (zh)
TW (1) TWI808065B (zh)
WO (1) WO2018102327A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023047458A (ja) * 2021-09-27 2023-04-06 株式会社ディスコ 研削装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007030051A (ja) * 2005-07-22 2007-02-08 Shiraitekku:Kk 研磨装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2572036Y2 (ja) * 1992-06-15 1998-05-20 株式会社日研工作所 工作機械の冷却液供給装置
JPH0637075A (ja) * 1992-07-17 1994-02-10 Hitachi Ltd 砥石を用いる加工方法
US6015467A (en) * 1996-03-08 2000-01-18 Tokyo Ohka Kogyo Co., Ltd. Method of removing coating from edge of substrate
CA2276724A1 (en) * 1998-05-19 1999-11-19 Makino Milling Machine Co., Ltd. Machine tool system and machining method
US6325704B1 (en) * 1999-06-14 2001-12-04 Corning Incorporated Method for finishing edges of glass sheets
KR100954895B1 (ko) * 2003-05-14 2010-04-27 도쿄엘렉트론가부시키가이샤 박막제거장치 및 박막제거방법
JP4192135B2 (ja) * 2004-09-29 2008-12-03 株式会社東芝 加工装置及び加工方法
JP2006346803A (ja) * 2005-06-15 2006-12-28 Sanyo Electric Co Ltd 基板研磨装置
US7294045B1 (en) * 2005-12-21 2007-11-13 Corning Incorporated Apparatus and method for edge processing of a glass sheet
JP5127825B2 (ja) * 2006-09-28 2013-01-23 コーニングジャパン株式会社 脆弱な材料からなるシートのエッジ処理装置および方法
JP5177520B2 (ja) * 2007-12-25 2013-04-03 日本電気硝子株式会社 ガラス板の端面研削装置およびその方法
JP4665018B2 (ja) * 2008-07-28 2011-04-06 株式会社東芝 加工方法
KR20130140047A (ko) * 2010-12-01 2013-12-23 아사히 가라스 가부시키가이샤 연삭 방법 및 연삭 장치
JP5855379B2 (ja) * 2011-07-25 2016-02-09 新電元工業株式会社 ダイシング装置
CN202343527U (zh) * 2011-12-06 2012-07-25 郑州旭飞光电科技有限公司 Tft玻璃基板喷淋清洗装置
JP6352754B2 (ja) * 2014-09-29 2018-07-04 AvanStrate株式会社 ガラス基板の製造方法、および、ガラス基板の製造装置
GB201418175D0 (en) * 2014-10-14 2014-11-26 Pilkington Group Ltd An apparatus and a process for grinding an edge and a glazing having a ground edge
CN105479345B (zh) * 2015-12-30 2019-03-15 芜湖东旭光电科技有限公司 玻璃基板边缘研磨装置
CN205254793U (zh) * 2015-12-31 2016-05-25 东旭科技集团有限公司 研磨机用喷淋装置及研磨机

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007030051A (ja) * 2005-07-22 2007-02-08 Shiraitekku:Kk 研磨装置

Also Published As

Publication number Publication date
TWI808065B (zh) 2023-07-11
JP2023089266A (ja) 2023-06-27
JP2020500722A (ja) 2020-01-16
TW201829119A (zh) 2018-08-16
US20190291232A1 (en) 2019-09-26
WO2018102327A1 (en) 2018-06-07
JP7388925B2 (ja) 2023-11-29
KR20190082980A (ko) 2019-07-10
CN110087830A (zh) 2019-08-02

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