KR102398984B1 - 구속 채널 내 탄소 나노튜브의 정렬 - Google Patents

구속 채널 내 탄소 나노튜브의 정렬 Download PDF

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KR102398984B1
KR102398984B1 KR1020197026036A KR20197026036A KR102398984B1 KR 102398984 B1 KR102398984 B1 KR 102398984B1 KR 1020197026036 A KR1020197026036 A KR 1020197026036A KR 20197026036 A KR20197026036 A KR 20197026036A KR 102398984 B1 KR102398984 B1 KR 102398984B1
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carbon nanotubes
fluid suspension
organic material
liquid
coated carbon
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KR20190126793A (ko
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마이클 스캇 아놀드
캐서린 로즈 진킨스
제랄드 조셉 브래디
파드마 고팔란
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위스콘신 얼럼나이 리서어치 화운데이션
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/168—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/168—After-treatment
    • C01B32/172—Sorting
    • H01L51/0003—
    • H01L51/0012—
    • H01L51/0048—
    • H01L51/0558—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221—Carbon nanotubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/742—Carbon nanotubes, CNTs
    • Y10S977/745—Carbon nanotubes, CNTs having a modified surface
    • Y10S977/746—Modified with biological, organic, or hydrocarbon material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
    • Y10S977/847—Surface modifications, e.g. functionalization, coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/89—Deposition of materials, e.g. coating, cvd, or ald
    • Y10S977/891—Vapor phase deposition

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Thin Film Transistor (AREA)
  • Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
  • Electrodes Of Semiconductors (AREA)
KR1020197026036A 2017-03-10 2018-01-05 구속 채널 내 탄소 나노튜브의 정렬 Active KR102398984B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/455,587 US10873026B2 (en) 2017-03-10 2017-03-10 Alignment of carbon nanotubes in confined channels
US15/455,587 2017-03-10
PCT/US2018/012480 WO2018164764A1 (en) 2017-03-10 2018-01-05 Alignment of carbon nanotubes in confined channels

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Publication Number Publication Date
KR20190126793A KR20190126793A (ko) 2019-11-12
KR102398984B1 true KR102398984B1 (ko) 2022-05-18

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EP (1) EP3592699B1 (enExample)
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KR (1) KR102398984B1 (enExample)
CN (1) CN110382413B (enExample)
DK (1) DK3592699T3 (enExample)
ES (1) ES2923453T3 (enExample)
PL (1) PL3592699T3 (enExample)
WO (1) WO2018164764A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113632254A (zh) * 2019-01-04 2021-11-09 阿汤姆H20有限责任公司 基于碳纳米管的射频设备
US12303930B2 (en) * 2019-09-04 2025-05-20 Beijing Hua Tan Yuan Xin Electronics Technology Co., Ltd Method for manufacturing high-density in-line carbon nanotube thin film
JP2024506165A (ja) * 2021-02-08 2024-02-09 ウィスコンシン アルムニ リサーチ ファンデイション 化学的およびトポグラフィー的にパターン化された基板を用いた整列度の高いカーボンナノチューブ膜の選択領域堆積
US11631814B2 (en) 2021-07-15 2023-04-18 Wisconsin Alumni Research Foundation Two-dimensional carbon nanotube liquid crystal films for wafer-scale electronics
US20250054755A1 (en) * 2023-08-07 2025-02-13 Wisconsin Alumni Research Foundation Surface-water-assisted deposition of patterned films of aligned nanoparticles

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090246408A1 (en) * 2006-07-28 2009-10-01 Nanyang Technological University Method of aligning nanotubes
US20100233360A1 (en) 2009-03-11 2010-09-16 Korea University Research And Business Foundation Method of forming electronic material layer and method of manufacturing electronic device using the method of forming electronic material layer
JP2013141631A (ja) 2012-01-10 2013-07-22 National Institute Of Advanced Industrial Science & Technology 半導体単層カーボンナノチューブの抽出分離法
US20170182718A1 (en) 2014-05-28 2017-06-29 University Of South Alabama Apparatus and method for directional alignment of nanofibers in a porous medium

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3611503B2 (ja) * 1999-07-21 2005-01-19 シャープ株式会社 電子源及びその製造方法
CN101104514A (zh) * 1999-10-27 2008-01-16 威廉马歇莱思大学 碳质毫微管的宏观有序集合体
JP3579714B2 (ja) 2001-01-29 2004-10-20 独立行政法人産業技術総合研究所 カーボンナノチューブからなるｌｂ膜
CA2442310A1 (en) * 2001-03-26 2002-10-03 Eikos, Inc. Coatings containing carbon nanotubes
US6896864B2 (en) * 2001-07-10 2005-05-24 Battelle Memorial Institute Spatial localization of dispersed single walled carbon nanotubes into useful structures
US7147894B2 (en) 2002-03-25 2006-12-12 The University Of North Carolina At Chapel Hill Method for assembling nano objects
US6872645B2 (en) 2002-04-02 2005-03-29 Nanosys, Inc. Methods of positioning and/or orienting nanostructures
US20060099135A1 (en) 2002-09-10 2006-05-11 Yodh Arjun G Carbon nanotubes: high solids dispersions and nematic gels thereof
CA2499965C (en) * 2002-09-30 2013-03-19 Nanosys, Inc. Large-area nanoenabled macroelectronic substrates and uses therefor
US20050208304A1 (en) 2003-02-21 2005-09-22 California Institute Of Technology Coatings for carbon nanotubes
US6918284B2 (en) 2003-03-24 2005-07-19 The United States Of America As Represented By The Secretary Of The Navy Interconnected networks of single-walled carbon nanotubes
US20080020487A1 (en) * 2004-09-16 2008-01-24 Mclean Robert S Alignment of carbon nanotubes on a substrate via solution deposition
US20070246784A1 (en) 2004-10-13 2007-10-25 Samsung Electronics Co., Ltd. Unipolar nanotube transistor using a carrier-trapping material
US7226818B2 (en) 2004-10-15 2007-06-05 General Electric Company High performance field effect transistors comprising carbon nanotubes fabricated using solution based processing
US8926933B2 (en) * 2004-11-09 2015-01-06 The Board Of Regents Of The University Of Texas System Fabrication of twisted and non-twisted nanofiber yarns
US7982130B2 (en) 2008-05-01 2011-07-19 The Regents Of The University Of Michigan Polymer wrapped carbon nanotube near-infrared photovoltaic devices
US8017863B2 (en) 2005-11-02 2011-09-13 The Regents Of The University Of Michigan Polymer wrapped carbon nanotube near-infrared photoactive devices
JP4701431B2 (ja) 2006-01-06 2011-06-15 独立行政法人産業技術総合研究所 異なる密度部分を有する配向カーボンナノチューブ・バルク構造体ならびにその製造方法および用途
WO2008060336A2 (en) * 2006-06-09 2008-05-22 Cleveland State University High strength composite materials and related processes
JP2008037919A (ja) * 2006-08-02 2008-02-21 Mitsubishi Rayon Co Ltd カーボンナノチューブ含有組成物とそれから得られる複合体
KR100911884B1 (ko) * 2006-08-30 2009-08-11 한국전기연구원 비상용성 이성분계 고분자 나노입자 복합체에 전단응력을 인가한 나노입자 배향채널의 제조방법
DE102006044182A1 (de) * 2006-09-15 2008-03-27 Abb Patent Gmbh System und Verfahren zur bedarfsgerechten Funktionalisierung von Steuer-/Regeleinrichtungen
US20090052029A1 (en) * 2006-10-12 2009-02-26 Cambrios Technologies Corporation Functional films formed by highly oriented deposition of nanowires
JP5009993B2 (ja) * 2006-11-09 2012-08-29 ナノシス・インク． ナノワイヤの配列方法および堆積方法
WO2008124211A2 (en) * 2007-02-15 2008-10-16 University Of Florida Research Foundation, Inc. Flow sorting of nanomaterials
FR2916902B1 (fr) 2007-05-31 2009-07-17 Commissariat Energie Atomique Transistor a effet de champ a nanotubes de carbone
JP5196879B2 (ja) * 2007-06-20 2013-05-15 キヤノン株式会社 圧電材料
WO2009017859A2 (en) * 2007-08-02 2009-02-05 The Texas A & M University System Dispersion, alignment and deposition of nanotubes
US8455055B1 (en) 2007-10-26 2013-06-04 The Boeing Company Aligning nanotubes
KR100974623B1 (ko) 2007-12-24 2010-08-09 고려대학교 산학협력단 정렬도가 향상된 오산화이바나듐 나노선 박막의 제조방법 및 그로부터 제조된 오산화이바나듐 나노선 박막
JP4737249B2 (ja) 2008-08-12 2011-07-27 ソニー株式会社 薄膜の製造方法及びその装置、並びに電子装置の製造方法
US20100054995A1 (en) * 2008-08-27 2010-03-04 Seoul National University Industry Foundation Method for aligning carbon nanotubes in microfluidic channel
US8784673B2 (en) 2008-11-14 2014-07-22 Northeastern University Highly organized single-walled carbon nanotube networks and method of making using template guided fluidic assembly
US8847313B2 (en) 2008-11-24 2014-09-30 University Of Southern California Transparent electronics based on transfer printed carbon nanotubes on rigid and flexible substrates
US8286803B2 (en) * 2009-06-18 2012-10-16 The Boeing Company Methods and systems for incorporating carbon nanotubes into thin film composite reverse osmosis membranes
US8128993B2 (en) 2009-07-31 2012-03-06 Nantero Inc. Anisotropic nanotube fabric layers and films and methods of forming same
CN102782770A (zh) 2010-01-14 2012-11-14 加利福尼亚大学董事会 用于生长导电性纳米结构薄膜的通用方法
EP2837035A2 (en) 2012-04-12 2015-02-18 Sol Voltaics AB Methods of nanowire functionalization, dispersion and attachment
EP2872575A2 (en) 2012-07-13 2015-05-20 President and Fellows of Harvard College Structured flexible supports and films for liquid-infused omniphobic surfaces
US9040364B2 (en) 2012-10-30 2015-05-26 International Business Machines Corporation Carbon nanotube devices with unzipped low-resistance contacts
US9694388B2 (en) 2013-05-14 2017-07-04 University Of Houston System Waterproof coating with nanoscopic/microscopic features and methods of making same
CN103342351B (zh) * 2013-07-10 2015-02-18 昆明纳太能源科技有限公司 一种大规模制备定向排列的巴基纸的方法与装置
EP3096892A4 (en) * 2014-01-24 2017-10-11 William Marsh Rice University Carbon nanotube-coated substrates and methods of making the same
US9368723B2 (en) * 2014-02-11 2016-06-14 Wisconsin Alumni Research Foundation Dose-controlled, floating evaporative assembly of aligned carbon nanotubes for use in high performance field effect transistors
CN106415844A (zh) 2014-04-29 2017-02-15 索尔伏打电流公司 捕获和对准纳米线的组合件的方法
US9327979B1 (en) * 2015-01-02 2016-05-03 Wisconsin Alumni Research Foundation Methods for removing polymer coatings from single-walled carbon nanotubes
US9425405B1 (en) 2015-02-11 2016-08-23 Wisconsin Alumni Research Foundation Continuous, floating evaporative assembly of aligned carbon nanotubes

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090246408A1 (en) * 2006-07-28 2009-10-01 Nanyang Technological University Method of aligning nanotubes
US20100233360A1 (en) 2009-03-11 2010-09-16 Korea University Research And Business Foundation Method of forming electronic material layer and method of manufacturing electronic device using the method of forming electronic material layer
JP2013141631A (ja) 2012-01-10 2013-07-22 National Institute Of Advanced Industrial Science & Technology 半導体単層カーボンナノチューブの抽出分離法
US20170182718A1 (en) 2014-05-28 2017-06-29 University Of South Alabama Apparatus and method for directional alignment of nanofibers in a porous medium

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US10873026B2 (en) 2020-12-22
DK3592699T3 (da) 2022-07-25
JP2020512257A (ja) 2020-04-23
JP7206210B2 (ja) 2023-01-17
JP2023052190A (ja) 2023-04-11
US20180261772A1 (en) 2018-09-13
EP3592699A4 (en) 2020-12-23
ES2923453T3 (es) 2022-09-27
CN110382413B (zh) 2023-08-18
KR20190126793A (ko) 2019-11-12
EP3592699B1 (en) 2022-05-25
PL3592699T3 (pl) 2022-09-05
CN110382413A (zh) 2019-10-25
JP7536123B2 (ja) 2024-08-19
EP3592699A1 (en) 2020-01-15
WO2018164764A1 (en) 2018-09-13

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