KR102357377B1 - Probe pin and probe unit with them - Google Patents

Abstract

The present invention includes: a body part supported by a guide block provided in a probe unit and made of a conductive material; an inspection contact part integrally formed on one end of the body part and in contact with an inspection object to transmit an electrical signal; a connection contact part integrally formed on the other end of the body part and in contact with a flexible printed circuit (FPC) to transmit an electrical signal; an inspection elastic part provided between the body part and the inspection contact part to offset the impact generated during an inspection operation; and a connection elastic part provided between the body part and the connection contact part to provide an elastic force for pressing the connection contact part to the FPC. Therefore, a plurality of probe pins can be installed in an accurate position with a constant interval, and the reliability of an inspection device can be improved.

Description

Probe pin and probe unit having the same {Probe pin and probe unit with them}

The present invention relates to a probe pin and a probe unit having the same, and more particularly, by providing a plurality of elastic parts to reduce the amount of impact generated during the inspection operation, thereby reducing the length and depth of the scrub generated on the inspection object. Prevents deformation or damage of the object to be inspected by the It relates to a probe pin that can be installed at a location and the reliability of an inspection device can be improved, and a probe unit having the same.

In general, the probe array block is a device used to perform a gross test in the process of manufacturing DISPLAY (LCD, OLED, MICRO LED), etc. come.

In particular, in the needle-type array block, a plurality of probes constituting an inspection tip are arranged to be adjacent to each other, so that when inspecting an object, the probe is in contact with each of the contact portions arranged thinly and densely on one surface of the object to be inspected.

As an example, the probe block of Korean Patent Publication No. 10-1558256 is presented, and the probe block according to the prior art inserts the probe pin between the vertical and horizontal portions and the second flow preventing portion so that the probe pin does not move. After arranging and bonding a plurality of probe pins in the same way, a first flow preventing part was used to fill in the gap between each probe pin to prevent a short circuit by flowing as much as the clearance between the neighboring probe pins.

However, when another connection part of the object to be inspected is additionally provided at another position, there is an inconvenience in that inspection cannot be performed with a probe block having a probe pin mounted on only one side as described above.

In addition, there is a problem that the probe pin may be unusable because other contact portions are not arranged thinly and densely and manufactured in a different shape. If there is a connection part where the longitudinal positions of the probe pins overlap, the probe pins protruding horizontally cannot be connected simultaneously by overlapping the probe pins in order to contact the connection part on the same line. It is necessary to use a pogo pin that protrudes downward instead of protruding, but a probe block using a probe pin and a pogo pin together has not been used in the prior art.

A probe pin block has been developed to solve the above problems, and the probe pin block according to the prior art has a case that forms an outer body while surrounding the front end of the flexible circuit board, and is in contact with the object to be inspected by the front tip, and the rear end A plurality of probe pins accommodated and mounted on the holder in the case so that the tip contacts the flexible circuit board and connects to the control device, and the tip of the flexible circuit board while pressing and constraining the probe pins accommodated in the holder It includes a probe pin cover mounted on the case to cover the portion, and a pogo pin mounted through the probe pin cover.

The background technology of the present invention is disclosed in Korean Patent No. 10-2266367 (published on June 17, 2021, title of the invention: probe pin block).

Since the probe pin block according to the prior art does not have a technical configuration for individually supporting a plurality of probe pins, it is difficult to install a plurality of probe pins at an accurate position, so that it is difficult to improve the alignment accuracy of the probe pins.

In addition, since the probe pin block according to the prior art does not have a separate technical configuration for providing an elastic force to the probe pin when the contact portion of the probe pin is in contact with the object to be inspected, the probe pin is pressed to the object to be inspected after the inspection operation is performed. There is a problem in that it is difficult to reduce the size of the traces that are generated.

Therefore, there is a need to improve it.

The present invention is provided with a plurality of elastic parts to reduce the amount of impact generated during the inspection operation, thereby reducing the length and depth of the scrub generated on the inspection object, thereby suppressing deformation or damage to the inspection object by the inspection operation, and a plurality of probe pins A plurality of seating and fixing parts for fixing the probe pin are provided between the installed probe unit and the probe pin, so that the plurality of probe pins can be installed at an accurate position while maintaining a constant distance, and the reliability of the inspection device can be improved. An object of the present invention is to provide a pin and a probe unit having the same.

The present invention is supported by a guide block provided in the probe unit, the body portion made of a conductive material; an inspection contact part integrally formed on one end of the body part and in contact with an inspection object to transmit an electrical signal; a connection contact part integrally formed on the other end of the body part and in contact with a flexible printed circuit (FPC) to transmit an electrical signal; an inspection elastic part provided between the body part and the inspection contact part to offset the impact generated during the inspection operation; and a connection elastic part provided between the body part and the connection contact part to provide an elastic force for pressing the connection contact part to the FPC.

In addition, the main body portion of the present invention, the first body portion interposed between the first block and the first cover of the guide block installed in the central portion of the block body of the probe unit; and a second body portion interposed between the second block and the second cover of the guide block installed on both sides of the block body.

In addition, the inspection contact portion of the present invention, the first inspection contact portion extending from one end of the first body portion, and electrically connected to contact with the inspection object when the probe unit is seated on the inspection object by the inspection operation; and a second inspection contact portion extending from one end of the second body portion and electrically connected to the inspection object by being in contact with the inspection object when the probe unit is seated on the inspection object by an inspection operation.

In addition, the connection contact portion of the present invention, the first connection contact portion extending from the other end of the first body portion, in contact with the FPC installed in the probe unit to be electrically connected; and a second connection contact part extending from the other end of the second body part and electrically connected to the FPC installed in the probe unit.

In addition, the inspection elastic portion of the present invention, the first inspection elastic portion is provided between the first body portion and the first inspection contact portion, to offset the impact generated during the inspection operation; And it is provided between the second body portion and the second inspection contact portion, characterized in that it comprises a second inspection elastic portion for offsetting the impact generated during the inspection operation.

In addition, the first elastic inspection portion of the present invention, a first elastic hole portion formed long along the first inspection contact portion; and an elastically curved part formed by bending the first elastic hole toward the first body part.

In addition, the second inspection elastic portion of the present invention, the second inspection contact portion and the second body portion formed between the bent portion is characterized in that it comprises an elastic groove portion is formed concave in the inward direction.

In addition, the elastic connection portion of the present invention, the first connection elastic portion provided between the first body portion and the first connection contact portion, providing an elastic force for pressing the first connection contact portion to the FPC side; and a second connection elastic part provided between the second body part and the second connection contact part and providing an elastic force for pressing the second connection contact part toward the FPC.

In addition, the first connection elastic portion of the present invention, a second elastic hole portion formed in the portion where the first connection contact portion is connected to the first body portion; and a third resilient hole portion formed outside the second resilient hole portion to maintain a gap in a shape surrounding the second resilient hole portion.

In addition, the second connection elastic portion of the present invention, it characterized in that it comprises a corrugated panel for connecting the second body portion and the second connection contact portion in a wave shape.

In addition, the present invention, the block body installed on the probe inspection machine, which is seated on the inspection object when the inspection operation is in progress; an FPC assembly seated on the block body and extending to one side to transmit an electrical signal; a guide block installed on the block body; a probe pin seated on the guide block, one end extending toward the inspection object, and the other end being connected to the FPC to electrically connect the inspection object and the FPC; and a seating fixing part for restraining the probe pin so that the probe pin is installed in the correct part of the guide block or the block body.

In addition, the guide block of the present invention is installed in the central portion of the block body, the first block for supporting the first pin member of the probe pin; and a second block installed on both sides of the block body and supporting the second pin member of the probe pin.

In addition, the first block of the present invention, a first protrusion for supporting the first inspection contact portion of the first pin member; a second protrusion for supporting the first inspection contact portion and the first elastic portion; a third protrusion for supporting the first body of the first pin member; a first fixing protrusion inserted into the first fixing groove of the first pin member to support the first body portion; And it characterized in that it comprises a fixing block for fixing the first body by pressing toward the first fixing projection.

In addition, the second block of the present invention, a fourth protrusion for supporting the end of the second inspection contact portion of the second pin member; a fifth protrusion supporting a central portion of the second inspection contact portion; a sixth protrusion for supporting the second connecting contact portion and the second connecting elastic portion of the second pin member; and a second fixing protrusion inserted into the second fixing groove of the second pin member to support the second body portion.

In addition, the seating fixing part of the present invention, the first seating fixing part is provided in the first block, for fixing the plurality of parts of the first pin member; And it is provided in the second block, characterized in that it comprises a second seating fixing portion for fixing the plurality of parts of the second pin member.

In addition, the first seating fixing portion of the present invention, a plurality of the first protrusion is formed while maintaining a constant interval, the first seating groove portion constraining the first inspection contact portion; a second seating groove portion formed in a plurality of the second protrusions at regular intervals and constraining the first inspection contact portion and the first inspection elastic portion; a plurality of third seating portions formed at regular intervals on the third protrusion and constraining the first connecting contact portion; a plurality of fourth seating grooves formed on the first fixing protrusions at regular intervals and constraining the first fixing grooves; and a plurality of fifth seating grooves formed in the fixing block at regular intervals and constraining the first body.

In addition, the second seating fixing portion of the present invention, a plurality of the fourth protrusion is formed while maintaining a constant interval, the sixth seating groove portion constraining the end of the second inspection contact portion; a seventh seating groove portion formed in a plurality of the fifth protrusion at regular intervals and constraining a central portion of the second inspection contact portion; an eighth seating groove portion formed in a plurality of the second fixing protrusions at regular intervals and constraining the second fixing groove; and a ninth seating groove portion formed in a plurality of the sixth protrusion at regular intervals and constraining the second connection contact portion.

The probe pin and the probe unit having the same according to the present invention are provided with an elastic part between the body part installed on the guide block and the contact part protruding outside the guide body to come into contact with the inspection object or FPC, so that the inspection object or It is possible to reduce the amount of impact generated when the FPC and the contact part come into contact, so there is an advantage in that it is possible to prevent a malfunction in which the inspection object is deformed or damaged by the inspection operation.

In addition, the probe pin and the probe unit having the same according to the present invention are provided with a mounting fixing part for guiding the plurality of probe pins to be installed at an accurate position while maintaining a constant distance on the guide block, so that a plurality of probe pins having various shapes are provided. Even when installed, the spacing between the plurality of probe pins is kept constant, and the plurality of probe pins are installed at accurate positions to improve alignment accuracy of the probe pins.

In addition, in the probe pin and the probe unit having the same according to the present invention, a plurality of seating fixing parts are provided on the guide block or the cover member so that the plurality of seating fixing parts support one probe pin, so that the probe pin is mounted at a more accurate position. There is an advantage in that the reliability of the inspection operation of the probe unit can be improved by preventing the probe pin from flowing due to the impact generated during the inspection operation.

In addition, the probe pin and the probe unit having the same according to the present invention are provided with a seating and fixing part on the guide block and the cover member installed in the block body to fix the plurality of probe pins, so that the life of the probe pins is over and replacement work is to be carried out. When the cover member and the guide block are released from the block body, it is possible to easily replace the probe pin, and there is an advantage in that the time and cost required for the maintenance of the probe unit can be reduced.

1 is a perspective view illustrating a probe unit having a probe pin according to an embodiment of the present invention.
2 is an exploded perspective view illustrating a probe unit including a probe pin according to an embodiment of the present invention.
3 is a cross-sectional view illustrating a probe unit having a probe pin according to an embodiment of the present invention.
4 is a perspective view illustrating a first seating groove of a probe unit having a probe pin according to an embodiment of the present invention.
5 is a perspective view illustrating a fourth seating groove portion of a probe unit having a probe pin according to an embodiment of the present invention.
6 is a perspective view illustrating a connection structure between a first fixing groove and a first fixing protrusion of a probe unit having a probe pin according to an embodiment of the present invention.
7 is a perspective view showing a sixth seating groove portion and a seventh seating groove portion of a probe unit having a probe pin according to an embodiment of the present invention.
8 is an exploded perspective view illustrating a first pin member connection structure of a probe unit having a probe pin according to an embodiment of the present invention.
9 is an exploded perspective view illustrating a second pin member connection structure of a probe unit having a probe pin according to an embodiment of the present invention.
10 is a diagram illustrating a simulation operation of a probe pin according to an embodiment of the present invention.

Hereinafter, an embodiment of a probe pin and a probe unit having the same according to the present invention will be described with reference to the accompanying drawings.

In this process, the thickness of the lines or the size of the components shown in the drawings may be exaggerated for clarity and convenience of explanation.

In addition, the terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to intentions or customs of users and operators.

Therefore, definitions of these terms should be made based on the content throughout this specification.

1 is a perspective view showing a probe unit having a probe pin according to an embodiment of the present invention, and FIG. 2 is an exploded perspective view showing a probe unit having a probe pin according to an embodiment of the present invention, FIG. 3 is a cross-sectional view illustrating a probe unit having a probe pin according to an embodiment of the present invention.

In addition, FIG. 4 is a perspective view showing a first seating groove portion of a probe unit having a probe pin according to an embodiment of the present invention, and FIG. 5 is a probe unit having a probe pin according to an embodiment of the present invention. 6 is a perspective view showing a fourth seating groove, and FIG. 6 is a perspective view illustrating a connection structure between the first fixing groove and the first fixing protrusion of the probe unit having a probe pin according to an embodiment of the present invention.

7 is a perspective view showing a sixth seating groove and a seventh seating groove of a probe unit having a probe pin according to an embodiment of the present invention, and FIG. 8 is a probe pin according to an embodiment of the present invention. 9 is an exploded perspective view illustrating a connection structure of a second pin member of a probe unit having a probe pin according to an embodiment of the present invention; 10 is a diagram illustrating a simulation operation of a probe pin according to an embodiment of the present invention.

1 to 10, the probe unit having a probe pin according to an embodiment of the present invention is installed in the probe inspection machine, and when the inspection operation is in progress, the block body 10 is seated on the object to be inspected, and the block The FPC assembly 12 seated on the main body 10 and extending to one side to transmit an electrical signal, a guide block installed on the block body 10, and the guide block are seated on the guide block, and one end is extended to the inspection object side, The other end includes a probe pin connected to the FPC to electrically connect the object to be inspected and the FPC, and a seating fixing part for constraining the probe pin so that the probe pin is installed on the guide block or the correct part of the block body 10 .

Therefore, when assembling a plurality of probe pins to the block body 10, after installing a plurality of guide blocks on the bottom surface of the block body 10, the probe pins are installed on the guide blocks at regular intervals, and the probe pins are fixed to the block body. A plurality of probe pins are installed by installing a cover member in (10), and at this time, the plurality of probe pins can be installed at an accurate position while maintaining a constant interval by a seating and fixing part provided in the guide block.

Therefore, in this embodiment, the pin alignment precision of the probe pin can be precisely improved from the conventional xyz-axis error of 8 to 10 μm to the xyz-axis error of 5 μm.

The probe pins of this embodiment are installed with a plurality of first pin members 30 installed at regular intervals in the central part of the block body 10, and a plurality of probe pins on both sides of the block body 10 at regular intervals. and a second pin member 50 that is

The first pin member 30 includes a first body part 31 interposed between the first block 70 and the first cover 14 of the guide block installed in the central part of the block body 10, and the first body From the first inspection contact part 32 extending from one end of the part 31 and electrically connected to the inspection object when the probe unit is seated on the inspection object by the inspection operation, and the other end of the first body part 31 . It extends and is provided between the first connection contact part 33 electrically connected to the FPC installed in the probe unit, and the first body part 31 and the first inspection contact part 32, and during the inspection operation. It is provided between the first inspection elastic part 34 to offset the generated shock, and the first body part 31 and the first connection contact part 33, and presses the first connection contact part 33 to the FPC side. It includes a first connection elastic part 35 that provides an elastic force.

The first pin member 30 is fixed while being supported at four points by the first seating fixing part 100 provided in the first block 70 installed in the central part of the bottom surface of the block body 10, and the block body ( 10) is in contact with the channel FPC of the FPC assembly 12 installed in the FPC assembly 12 and is electrically connected, so the probe inspector descends and a plurality of probe units come into contact with the inspection object. While transmitting an electrical signal, a test object such as a display panel or a semiconductor is tested.

The first body part 31 of this embodiment forms an inclination with the lower end protruding forward, and is bent from the lower end of the first body part 31 to the front side so that the first inspection contact part 32 is integrally formed and , the first connecting contact portion 33 extending from the upper end of the first body portion 31 in the same extension direction as the first body portion 31 is integrally formed.

A first fixing groove 36 is formed concavely in a 'C' shape at the front end of the first body part 31 , and the first fixing protrusion 74 of the first block 70 is inserted while the first body part is inserted. (31) to be seated in the correct position.

In addition, the first body part 31 of this embodiment is formed to be inclined in the inner direction of the block body 10 to form a first inclined surface 37, and the first inclined surface 37 is formed on the fixed block 75 on the first inclined surface 37. 5 A fixing rib 38 inserted into the seating groove 108 is formed.

The outer end of the first inspection contact portion 32 is sharply formed in a downward direction, and a pin-shaped protrusion is further formed in the downward direction from the lower edge. Electrical connection is made while the protrusion formed at the outer end of the first inspection contact portion 32 comes into contact with the object to be inspected.

In addition, in the first inspection elastic portion 34 of this embodiment, the first elastic hole portion 34a formed long along the first inspection contact portion 32, and the first elastic hole portion 34a are the first body portion ( 31) and an elastically curved portion 34b formed by bending to the side.

Therefore, when the inspection operation proceeds and the first inspection contact portion 32 comes into contact with the object to be inspected, the first elastic hole portion 34a and the bent portion are deformed to reduce the impact generated by the contact between the first inspection contact portion 32 and the object to be inspected. By offsetting, the length of the pad scrub generated on the object to be inspected can be reduced from the conventional 27-30㎛ to 7㎛.

As shown in the simulation results shown in FIG. 10, when the stroke of the inspection operation is 0.15 to 0.3 mm, the pin load applied to the first pin member 30 of this embodiment is 2.2 g/f, and the second pin member of this embodiment Since the pin load applied to 50 is 8 g/f, it is possible to reduce the scrub to 0.00699 mm as shown in FIG. 10 .

In addition, the first connecting elastic portion 35 of the present embodiment includes a second elastic hole portion 35a formed in a portion where the first connecting contact portion 33 is connected to the first body portion 31, and the second elastic portion It includes a third elastic hole portion (35b) formed outside the hole portion (35a) to maintain a gap in a shape surrounding the second elastic hole portion (35a).

A circular first resilient hole portion 34a is formed in a corresponding portion of the first body portion 31, and a ring-shaped first elastic hole portion 34a is formed while maintaining a distance from the first elastic hole portion 34a and surrounding the first elastic hole portion 34a. Since the second elastic hole portion 35a is formed, and a connection portion connecting the first elastic hole portion 34a and the second elastic hole portion 35a is provided, the first connection contact portion 33 is connected to the first elastic hole portion 34a and the second elastic hole portion 34a. It is formed integrally with the connection part of the 2 elastic hole part (35a).

Therefore, the first connection contact part 33 formed in a straight bar shape is movably connected to the first body part 31, and when the first connection contact part 33 comes into contact with the channel FPC, the first connection contact point By providing an elastic force for pressing the part 33 to the channel FPC side, it is possible to prevent the first connection contact part 33 from being separated from the channel FPC by an impact or flow generated during the inspection operation, and occurs during the inspection operation It is possible to prevent the connection part between the first body part 31 and the first connection contact part 33 from being deformed or damaged by the impact or flow.

In addition, the second pin member 50 of this embodiment is a second body portion 51 interposed between the second block 80 and the second cover 16 of the guide block installed on both sides of the block body 10 . ), a second inspection contact part 52 extending from one end of the second body part 51 and electrically connected to the inspection object by contacting the probe unit when the probe unit is seated on the inspection object by the inspection operation, and the second body part (51) provided between the second connection contact part 53 extending from the other end and electrically connected to the FPC installed in the probe unit, and the second body part 51 and the second inspection contact part 52 and a second inspection elastic part 54 for offsetting the impact generated during the inspection operation, and provided between the second body part 51 and the second connection contact part 53, the second connection contact part 53 It includes a second connection elastic part 55 that provides an elastic force for pressing the FPC side.

Here, the second body part 51 is formed to be upright in the vertical direction, and the second connecting elastic part 55 is integrally formed at the upper end and connected to the second connecting contact part 53, and the second connecting contact part 53 is formed at the lower end. The inspection contact portion 52 is integrally connected to be bent in the lateral direction, and a second inspection elastic portion 54 is provided at a connection portion between the second body portion 51 and the second inspection contact portion 52 .

Since the second inspection elastic part 54 of this embodiment includes an elastic groove part in which the bent part formed between the second inspection contact part 52 and the second body part 51 is concave in the inward direction, the inspection operation is performed When the second inspection contact portion 52 is pressed while in contact with the inspection object, the elastic groove portion is deformed inwardly by the The impact generated between the inspection contact parts 52 is offset.

In addition, a second fixing protrusion 84 is inserted into the central portion of the second body portion 51 to form a second fixing groove portion 56 for arranging the second body portion 51 in an accurate position, and a second block ( 80) and the second seating and fixing part 110 to be installed in the correct position.

In addition, since the second connection elastic part 55 of this embodiment includes a corrugated panel connecting the second body part 51 and the second connection contact part 53 in a wavy shape, the second connection contact part 53 When installing in contact with the visual FPC, it provides an elastic force for pressing the second connection contact part 53 toward the visual FPC, so that the second connection contact part 53 is separated from the visual FPC by an impact or flow generated during the inspection operation. it can be prevented

In addition, the guide block of this embodiment is installed in the central portion of the block body 10 , the first block 70 supporting the first pin member 30 of the probe pin, and installed on both sides of the block body 10 . and a second block 80 supporting the second pin member 50 of the probe pin.

Therefore, the first block 70 is installed in the central portion of the bottom surface of the block body 10 to support the plurality of first pin members 30, from both ends of the first block 70 to both ends of the block body 10. A pair of second blocks 80 are installed so that a plurality of second pin members 50 are installed at the correct positions of the block body 10 .

The first block 70 of this embodiment includes a first protrusion 71 supporting the first inspection contact portion 32 of the first pin member 30 , the first inspection contact portion 32 and the first elasticity The second protrusion 72 for supporting the part, the third protrusion 73 for supporting the first body part 31 of the first pin member 30, and the first fixing groove part of the first pin member 30 ( 36) is inserted into the first fixing protrusion 74 for supporting the first body part 31, and a fixing block 75 for pressing and fixing the first body part 31 toward the first fixing projection 74 side. include

The first block 70 is made of a bar shape having a shorter length than that of the block body 10 , and is installed at the front end of the bottom surface of the block body 10 to provide a plurality of first pin members to the first block 70 . When the 30 is installed, the first inspection contact portion 32 of the first pin member 30 is installed to protrude in the lower direction of the block body 10 .

Therefore, when the inspection operation is started and the block body 10 descends, the first inspection contact part 32 of the first pin member 30 installed to protrude from the bottom surface outer end of the block main body 10 descends while the inspection object and contacted and electrically connected.

In addition, the first block 70 of this embodiment is provided with a plurality of protrusions as described above to support a plurality of portions of the first pin member 30 , so that the first pin member 30 is supported to be seated in an accurate position. This can be done, and the first pin member 30 can be fixed at an accurate position by the first seating and fixing part 100 to be described later.

Here, the second protrusion 72 is seated on the coupling groove portion 72a formed in the first block 70, the coupling groove portion 72a, and the coupling block 72b in which the second seating groove portion 104 is formed. is made of

The second block 80 of this embodiment includes a fourth protrusion 81 supporting the end of the second inspection contact portion 52 of the second pin member 50 and the central portion of the second inspection contact portion 52 . a fifth protrusion 82 supporting It includes a second fixing protrusion 84 inserted into the second fixing groove portion 56 of the member 50 to support the second body portion (51).

The second block 80 of this embodiment is formed in a short bar shape compared to the first block 70 and is installed to extend from the outside of both ends of the first block 70 to the end of the block body 10, each of a plurality The second pin member 50 is supported.

The seating and fixing part of this embodiment is provided in the first block 70 and provided in the first seating fixing part 100 for fixing a plurality of parts of the first pin member 30 and the second block 80, A second seating fixing part 110 for fixing a plurality of parts of the second pin member 50 is included.

Here, the first seating fixing part 100 is formed with a plurality of first protrusions 71 at regular intervals, and a first seating groove part 102 constraining the first inspection contact part 32, and a first A plurality of the two protrusions 72 are formed at regular intervals, and a second seating groove 104 constraining the first inspection contact portion 32 and the first inspection elastic portion 34, and a third protrusion 73 ), a plurality of pieces are formed while maintaining a constant interval, and a plurality of third seating grooves 106 constraining the first connection contact portion 33 and the first fixing protrusion 74 are formed with constant intervals therebetween, A fourth seating groove portion 107 for constraining the first fixing groove portion 36, and a fifth seating groove portion ( 108).

Therefore, when the first pin member 30 is installed in the first block 70, the first inspection contact portion 32 is seated on the first protrusion 71 and the second protrusion 72, and at this time, the first inspection contact The part 32 is seated at the correct position while being inserted into the first seating groove 102 and the second seating groove 104, and the first connection contact part 33 is seated on the third protrusion part 73 and fixed block ( 75) and is inserted into and fixed to the third and fifth seating grooves 106 and 108, and the first body 31 is fixed while being inserted into the fourth seating groove 107.

The second seating fixing part 110 of this embodiment is formed with a plurality of the fourth protrusion part 81 at regular intervals, and a sixth seating groove part 112 for constraining the end of the second inspection contact part 52 . And, a plurality of pieces are formed on the fifth protrusion 82 at regular intervals, and a seventh seating groove 114 constraining the central portion of the second inspection contact portion 52, and a plurality of the second fixing protrusions 84 Dogs are formed while maintaining a constant distance, and a plurality of dogs are formed in an eighth seating groove portion 116 that restrains the second fixing groove portion 56 and a sixth protrusion portion 83 while maintaining a constant interval, and a second connecting contact portion It includes a ninth seating groove portion 118 for restraining the 53 .

Therefore, when the second pin member 50 is supported and fixed to the second block 80 , the second inspection contact part 52 is supported by the fourth protrusion 81 and the fifth protrusion 82 , and the sixth protrusion part The second connecting contact part 53 is supported by the 83 , and the second fixing protrusion 84 is inserted into the second fixing groove 56 so that the second pin member 50 can be seated in the correct position. do.

In addition, the second inspection contact portion 52, which is seated on the fourth protrusion 81 and the fifth protrusion 82, is inserted into the sixth seating groove portion 112 and the seventh seating groove portion 114 and is seated in an accurate position. , the second fixing groove portion 56 seated on the second fixing projection 84 is inserted into the eighth seating groove portion 116 , and the second connecting contact portion 53 seated on the sixth projection portion 83 is a ninth It is inserted into the seating groove 118 so that it can be seated in an accurate position.

As described above, in the first pin member 30 and the second pin member 50 of this embodiment, four or more parts are guided and supported to the correct positions by the seating grooves, so the error in alignment accuracy is reduced by 5㎛ (xyz axis). ) can be reduced to

Accordingly, the plurality of elastic parts are provided to reduce the amount of impact generated during the inspection operation, thereby reducing the length and depth of the scrub generated on the inspection object, thereby preventing the inspection object from being deformed or damaged by the inspection operation, and the plurality of probe pins A plurality of mounting and fixing parts for fixing the probe pin are provided between the installed probe unit and the probe pin, so that the plurality of probe pins can be installed at an accurate position while maintaining a constant distance, and the probe pin can improve the reliability of the inspection device And it is possible to provide a probe unit having the same.

Although the present invention has been described with reference to one embodiment shown in the drawings, this is merely exemplary, and various modifications and equivalent other embodiments are possible by those skilled in the art to which the art pertains. will understand

In addition, although a probe pin and a probe unit having the same have been described as an example, this is only exemplary, and the probe unit of the present invention may be used for products other than the probe pin and the probe unit having the same.

Accordingly, the true technical protection scope of the present invention should be defined by the following claims.

10: block body 12: FPC assembly
14: first cover 16: second cover
30: first pin member 31: first body part
32: first inspection contact portion 33: first connection contact portion
34: first inspection elastic part 34a: first elastic hole part
34b: elastic bent portion 35: first connection elastic portion
35a: second resilient hole portion 35b: third resilient hole portion
36: first fixing groove 37: first inclined surface
38: fixed rib 50: second pin member
51: second body part 52: second inspection contact part
53: second connection contact part 54: second inspection elastic part
55: second connection elastic part 56: second fixing groove part
70: first block 71: first protrusion
72: second protrusion 72a: coupling groove
72b: coupling block 73: third protrusion
73a: second inclined surface 74: first fixing projection
75: fixed block 80: second block
81: fourth protrusion 82: fifth protrusion
83: sixth protrusion 84: second fixing protrusion
100: first seating fixing part 102: first seating groove part
104: second seating groove 106: fourth seating groove
107: third seating groove 108: fifth seating groove
110: second seating fixing part 112: sixth seating groove part
114: seventh seating groove 116: eighth seating groove
118: ninth seating groove

Claims (17)

a body part supported by a guide block provided in the probe unit and made of a conductive material;
an inspection contact part integrally formed on one end of the body part and in contact with an inspection object to transmit an electrical signal;
a connection contact part integrally formed on the other end of the body part and in contact with a flexible printed circuit (FPC) to transmit an electrical signal;
an inspection elastic part provided between the body part and the inspection contact part to offset the impact generated during the inspection operation; and
and a connection elastic part provided between the main body part and the connection contact part to provide an elastic force for pressing the connection contact part to the FPC,
The inspection elastic unit,
a first inspection elastic part provided between the first body part of the body part and the first inspection contact part of the inspection contact part, and for offsetting an impact generated during the inspection operation; and
and a second inspection elastic part provided between the second body part of the main body and the second inspection contact part of the inspection contact part, and a second inspection elastic part for canceling an impact generated during the inspection operation.
According to claim 1, wherein the body portion,
the first body portion interposed between the first block and the first cover of the guide block installed in the central portion of the block body of the probe unit; and
and the second body portion interposed between the second block and the second cover of the guide block installed on both sides of the block body.
According to claim 2, wherein the inspection contact portion,
the first inspection contact part extending from one end of the first body part and electrically connected to the inspection object by being in contact with the inspection object when the probe unit is seated on the inspection object by an inspection operation; and
and the second inspection contact part extending from one end of the second body part and electrically connected to the inspection object by being in contact with the inspection object when the probe unit is seated on the inspection object by an inspection operation.
The method of claim 3, wherein the connecting contact portion,
a first connection contact part extending from the other end of the first body part and electrically connected to the FPC installed in the probe unit; and
and a second connection contact part extending from the other end of the second body part and electrically connected to the FPC installed in the probe unit.
delete According to claim 4, The first inspection elastic portion,
a first elastic hole formed long along the first inspection contact portion; and
The probe pin according to claim 1, wherein the first elastic hole portion includes an elastically curved portion formed by bending toward the first body portion.
5. The method of claim 4,
The second inspection elastic part includes an elastic groove part in which a bent part formed between the second inspection contact part and the second body part is concave in an inward direction.
According to claim 4, wherein the connection elastic portion,
a first connection elastic part provided between the first body part and the first connection contact part and providing an elastic force for pressing the first connection contact part toward the FPC; and
and a second connection elastic part provided between the second body part and the second connection contact part and providing an elastic force for pressing the second connection contact part toward the FPC.
The method of claim 8, wherein the first connection elastic portion,
a second elastic hole portion formed in a portion where the first connection contact portion is connected to the first body portion; and
and a third resilient hole portion formed outside the second resilient hole portion to maintain a gap in a shape surrounding the second resilient hole portion.
9. The method of claim 8,
The second connecting elastic portion, probe pin, characterized in that it comprises a corrugated panel for connecting the second body portion and the second connecting contact portion in a wavy shape.
a block body installed on the probe inspection machine and seated on the inspection object when the inspection operation is in progress;
an FPC assembly seated on the block body and extending to one side to transmit an electrical signal;
a guide block installed on the block body;
a probe pin seated on the guide block, one end extending toward the inspection object, and the other end connected to the FPC to electrically connect the inspection object and the FPC; and
and a seating fixing part for restraining the probe pin so that the probe pin is installed on the guide block or an exact part of the block body,
The guide block is
a first block installed in the central portion of the block body and supporting the first pin member of the probe pin; and
and a second block installed on both sides of the block body and supporting the second pin member of the probe pin,
The first block is
a first protrusion for supporting the first inspection contact portion of the first pin member;
a second protrusion for supporting the first inspection contact portion and the first elastic portion;
a third protrusion for supporting the first body of the first pin member;
a first fixing protrusion inserted into the first fixing groove of the first pin member to support the first body portion; and
A probe unit having a probe pin, characterized in that it includes a fixing block for fixing the first body portion by pressing toward the first fixing protrusion.
delete delete The method of claim 11, wherein the second block,
a fourth protrusion for supporting an end of the second inspection contact portion of the second pin member;
a fifth protrusion supporting a central portion of the second inspection contact portion;
a sixth protrusion for supporting the second connecting contact portion and the second connecting elastic portion of the second pin member; and
and a second fixing protrusion inserted into the second fixing groove of the second pin member to support the second body of the second pin member.
15. The method of claim 14, wherein the seating fixing portion,
a first seating fixing part provided in the first block and fixing a plurality of parts of the first pin member; and
A probe unit having a probe pin, which is provided in the second block and includes a second seating fixing part for fixing a plurality of parts of the second pin member.

The method of claim 15, wherein the first seating fixing part,
a first seating groove portion formed in a plurality of the first protrusion at regular intervals and constraining the first inspection contact portion;
a second seating groove portion formed in a plurality of the second protrusion at regular intervals and constraining the first inspection contact portion and the first inspection elastic portion of the first pin member;
a third seating portion formed in a plurality of the third protrusion at regular intervals and constraining the first connection contact portion of the first pin member;
a plurality of fourth seating grooves formed on the first fixing protrusions at regular intervals and constraining the first fixing grooves; and
A probe unit having a probe pin, characterized in that the plurality of fixing blocks are formed at regular intervals and include a fifth seating groove portion for restraining the first body portion.
16. The method of claim 15, wherein the second seating fixing part,
a sixth seating groove portion formed in a plurality of the fourth protrusion at regular intervals and constraining an end of the second inspection contact portion;
a seventh seating groove portion formed in a plurality of the fifth protrusion at regular intervals and constraining a central portion of the second inspection contact portion;
an eighth seating groove portion formed in a plurality of the second fixing protrusions at regular intervals and constraining the second fixing groove; and
A probe unit having a probe pin, characterized in that a plurality of the sixth protrusions are formed at regular intervals and include a ninth seating groove portion for restraining the second connection contact portion.

Images