KR102345130B1 - 센서부 및/또는 액츄에이터부를 비접촉적으로 지지하는 방법 및 장치 - Google Patents

센서부 및/또는 액츄에이터부를 비접촉적으로 지지하는 방법 및 장치 Download PDF

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Publication number
KR102345130B1
KR102345130B1 KR1020167004310A KR20167004310A KR102345130B1 KR 102345130 B1 KR102345130 B1 KR 102345130B1 KR 1020167004310 A KR1020167004310 A KR 1020167004310A KR 20167004310 A KR20167004310 A KR 20167004310A KR 102345130 B1 KR102345130 B1 KR 102345130B1
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KR
South Korea
Prior art keywords
sensor
sonotrode
actuator
substrate
unit
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KR1020167004310A
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English (en)
Korean (ko)
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KR20160033205A (ko
Inventor
노르베르트 크슈퇴텐바우어
레오폴트 슈테그펠르너
군터 렌가우어
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뵈스트알파인 스탈 게엠베하
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Publication of KR20160033205A publication Critical patent/KR20160033205A/ko
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Publication of KR102345130B1 publication Critical patent/KR102345130B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/02—Bearings or suspensions for moving parts
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K15/00—Acoustics not otherwise provided for

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Mechanical Engineering (AREA)
KR1020167004310A 2013-07-22 2014-07-22 센서부 및/또는 액츄에이터부를 비접촉적으로 지지하는 방법 및 장치 KR102345130B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13177497.8 2013-07-22
EP20130177497 EP2829841A1 (de) 2013-07-22 2013-07-22 Verfahren und Vorrichtung zur berührungslosen Lagerung einer Sensor- und/oder Aktoreinrichtung
PCT/EP2014/065749 WO2015011154A1 (de) 2013-07-22 2014-07-22 Verfahren und vorrichtung zur berührungslosen lagerung einer sensor- und/oder aktoreinrichtung

Publications (2)

Publication Number Publication Date
KR20160033205A KR20160033205A (ko) 2016-03-25
KR102345130B1 true KR102345130B1 (ko) 2021-12-29

Family

ID=48874828

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167004310A KR102345130B1 (ko) 2013-07-22 2014-07-22 센서부 및/또는 액츄에이터부를 비접촉적으로 지지하는 방법 및 장치

Country Status (6)

Country Link
US (1) US9903697B2 (ja)
EP (2) EP2829841A1 (ja)
JP (1) JP6489381B2 (ja)
KR (1) KR102345130B1 (ja)
CN (1) CN105556238B (ja)
WO (1) WO2015011154A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015010680A2 (de) * 2013-07-22 2015-01-29 Zs-Handling Gmbh Vorrichtung zur oberflächenbehandlung oder -bearbeitung
KR101729454B1 (ko) * 2013-07-22 2017-04-21 제트에스-핸들링 게엠베하 공작물 표면과 스트립 재료 검사 장치
CN106500639A (zh) * 2016-12-08 2017-03-15 太仓源凯汽车配件有限公司 一种执行器检测装置
CN108223574B (zh) * 2018-01-15 2019-07-30 大连交通大学 一种高速列车径向超声悬浮轴承

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004519346A (ja) 2001-05-04 2004-07-02 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 対象物を無接触式に把持し、保持するための装置
KR100675062B1 (ko) 2003-11-13 2007-01-26 가부시키가이샤 도요다 지도숏키 음파 부양 장치
JP2010101656A (ja) 2008-10-21 2010-05-06 Toyota Motor Corp 膜厚計測方法および膜厚計測装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924962Y2 (ja) * 1978-08-28 1984-07-23 株式会社東京精密 導電性シ−トの非接触測定装置
DE3435908A1 (de) 1984-09-29 1986-04-10 Phoenix Ag, 2100 Hamburg Vorrichtung zum beruehrungslosen messen der dicke von materialbahnen aus polymeren werkstoffen
US5355083A (en) * 1988-11-16 1994-10-11 Measurex Corporation Non-contact sensor and method using inductance and laser distance measurements for measuring the thickness of a layer of material overlaying a substrate
DE4128858C1 (ja) * 1991-08-30 1993-01-21 Stapla Ultraschall-Technik Gmbh, 6092 Kelsterbach, De
CN2658465Y (zh) * 2003-02-25 2004-11-24 吉林大学 超声波轴承
DE102007041850A1 (de) * 2007-09-03 2009-03-05 Robert Bosch Gmbh Ultraschallsensor mit einem Trägerelement und einer Membran, wobei die Membran in das Trägerelement eingebettet ist
CN101344468B (zh) * 2008-08-25 2010-09-15 浙江工业大学 纳米力学表征试样的声悬浮抛光设备
JP2012527215A (ja) * 2009-05-15 2012-11-01 ディスカバリー テクノロジー インターナショナル，インク． 超音波非接触軸受を有する電気モータ
CN102518740B (zh) * 2011-11-24 2013-12-11 吉林大学 超声波悬浮和气浮的混合悬浮减振装置
CN102904369A (zh) * 2012-11-14 2013-01-30 吉林大学 一种高速电机转子支撑新方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004519346A (ja) 2001-05-04 2004-07-02 ローベルト　ボツシユ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 対象物を無接触式に把持し、保持するための装置
KR100675062B1 (ko) 2003-11-13 2007-01-26 가부시키가이샤 도요다 지도숏키 음파 부양 장치
JP2010101656A (ja) 2008-10-21 2010-05-06 Toyota Motor Corp 膜厚計測方法および膜厚計測装置

Also Published As

Publication number Publication date
CN105556238A (zh) 2016-05-04
WO2015011154A1 (de) 2015-01-29
EP2829841A1 (de) 2015-01-28
JP6489381B2 (ja) 2019-03-27
EP3025118B1 (de) 2016-12-21
JP2016539329A (ja) 2016-12-15
CN105556238B (zh) 2018-12-18
US9903697B2 (en) 2018-02-27
US20160163307A1 (en) 2016-06-09
KR20160033205A (ko) 2016-03-25
EP3025118A1 (de) 2016-06-01

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